Exhaust system

Abstract

This application discloses an exhaust device. The exhaust device includes: a main pipe, the exhaust end of which is connected to a fan; at least two branch pipes, the inlet ends of which are connected to at least two pieces of equipment; an exhaust box; and a main control valve, including a baffle plate and a control arm, the baffle plate being rotatably disposed within the main pipe. This application, by setting up a main pipe and connecting it to at least two branch pipes, effectively simplifies the pipe structure, reduces the space occupied by the pipes, and allows for simultaneous exhaust cleaning of multiple devices using a single main pipe. The exhaust box provides a reliable intermediate connection between the main pipe and the at least two branch pipes, and allows gas to enter the exhaust box first for transfer, improving the stability of airflow during the entire exhaust process. The main control valve on the main pipe controls the gas flow rate within the main pipe.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to an exhaust device. Background Technology

[0002] In semiconductor manufacturing, some equipment generates large amounts of harmful gases and particulate matter. Exhaust systems need to efficiently and reliably ventilate and exchange air within the equipment to ensure a clean and safe production environment. Traditional exhaust systems have simple duct structures, requiring each piece of equipment to connect to the outside through a separate duct. This results in a large overall footprint and an inability to adjust the ventilation based on the concentration of harmful gases and particulate matter within the equipment, potentially leading to pollutant residues or localized exceedances of safety standards. Utility Model Content

[0003] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes an exhaust device to solve the problems of traditional exhaust devices having simple structure, large space occupation, and inability to adjust flow rate.

[0004] This application provides an exhaust device, comprising:

[0005] The main pipeline, the exhaust end of which is used to connect to the fan;

[0006] At least two branch pipes, with the air inlet ends of at least two branch pipes connected to the interior of at least two devices;

[0007] An exhaust box is provided with at least two air inlets and an exhaust outlet connected to the air inlet of the main pipeline. The exhaust ends of at least two branch pipelines are connected to at least two air inlets of the exhaust box in a one-to-one correspondence.

[0008] The main control valve includes a baffle plate and a control arm. The baffle plate is rotatably disposed within the main pipeline to change the flow rate of gas within the main pipeline. The control arm is rotatably disposed on the outer wall of the main pipeline and controls the rotation angle of the baffle plate.

[0009] Based on the exhaust system, by setting up a main pipeline and connecting it to at least two branch pipelines, the pipeline structure can be effectively simplified, the space occupied by the pipeline can be reduced, and multiple devices can be simultaneously ventilated and cleaned using a single main pipeline. The exhaust box provides a reliable intermediate connection between the main pipeline and the at least two branch pipelines, and the gas can first enter the exhaust box for transfer, improving the airflow stability during the entire exhaust process. The main control valve on the main pipeline can regulate the gas flow rate within the main pipeline. When the gas composition in the equipment is complex and difficult to expel, reducing the gas resistance and increasing the gas velocity allows harmful gases and suspended particles to be quickly expelled, improving exhaust efficiency. When the gas in the equipment is less harmful and easy to expel, the gas resistance can be appropriately increased to reduce the gas velocity, thereby reducing energy consumption.

[0010] Optionally, the main pipeline and / or the branch pipeline are formed by splicing multiple pipeline segments.

[0011] Furthermore, based on the aforementioned main pipelines and branch pipelines, it is possible to facilitate the assembly and disassembly of the main pipelines and branch pipelines, and at the same time, it is possible to arrange the specific structure of the main pipelines and branch pipelines more flexibly.

[0012] Optionally, a sealing structure is provided at the connection between the main pipeline and the fan and / or at the connection between the main pipeline and the exhaust box;

[0013] The connection between the branch pipe and the exhaust box is equipped with a sealing structure.

[0014] Furthermore, the aforementioned sealing structure can significantly improve the overall sealing performance of the exhaust system, preventing harmful gases from leaking to the outside of the exhaust system.

[0015] Optionally, the air inlet end of the branch pipe is provided with a deformable connecting pipe; the air outlet end of the connecting pipe is connected to the air inlet end of the branch pipe, the air inlet end extends into the equipment, and the relative angle and relative position between the air outlet end and the air inlet end of the connecting pipe are adjustable.

[0016] Furthermore, the connection pipes further enhance the flexibility and practicality of the exhaust system, facilitating the connection or disconnection of branch pipes from the equipment.

[0017] Optionally, the exhaust device further includes a branch control valve, at least one of the branch pipes is provided with a branch control valve, the branch control valve being used to change the flow rate of the gas in the corresponding branch pipe.

[0018] Furthermore, based on the aforementioned branch control valve configuration, one or more branch pipelines can be controlled, thereby allowing for targeted adjustment of the opening and closing degree of the corresponding branch control valve according to the specific conditions within each piece of equipment. This further enhances the flexibility of the exhaust system, enabling timely adjustments to the exhaust ventilation efficiency based on the conditions within each piece of equipment, thereby reducing energy consumption.

[0019] Optionally, ventilation holes are provided on the wind deflector.

[0020] Furthermore, based on the aforementioned ventilation holes, excessive air pressure can be prevented from forming inside the equipment due to the inability to expel gas, thus affecting the operation of the equipment. The ventilation holes enable the main control valve to have a pressure relief effect.

[0021] Optionally, a filter screen is provided between the exhaust end of the main pipeline and the fan.

[0022] Furthermore, based on the aforementioned filter setup, the fan can be protected, as well as the external environment, thus improving safety.

[0023] Optionally, the filter screen is slidably engaged with the main pipeline along the radial direction of the main pipeline.

[0024] Furthermore, based on the above-mentioned filter setup, the filter can be installed and removed without disconnecting the main pipeline and the fan, thus facilitating the cleaning and replacement of the filter.

[0025] Optionally, the filter screen is provided with sealing structures on both sides along the extension direction of the main pipeline, and the sealing structures are arranged around the periphery of the filter screen.

[0026] Furthermore, based on the sealing structure set around the filter screen, the filter screen can be closed by the sealing structure after sliding to align with the main pipeline. At the same time, the filter screen can be squeezed and fixed between the main pipeline and the fan by squeezing the sealing structure.

[0027] Optionally, the connecting end of the control arm is rotatably engaged with the side wall of the main pipeline and connected to the wind deflector, and the swing end of the control arm swings between the fully open position, the fully closed position, and the partially open and closed position in between.

[0028] When the control arm is in the fully open position or the partially open position, at least part of the control arm is in a limiting engagement with the filter screen. When the control arm is in the fully closed position, the baffle plate closes the interior of the main pipeline, and the limiting engagement between the control arm and the filter screen is released.

[0029] Furthermore, based on the aforementioned control arm, when the control arm is in a position other than the fully closed position, the filter screen can be limited to prevent problems such as the filter screen sliding out from the connection between the main pipeline and the fan when the main pipeline is venting. Only when the control arm is rotated to the fully closed position can the filter screen slide out from the connection between the main pipeline and the fan, which can protect the personnel who are replacing the filter screen and prevent a large amount of harmful gas from being sprayed out from the main pipeline when replacing the filter screen.

[0030] The above-described one or more embodiments of this application have at least one or more of the following beneficial effects:

[0031] By setting up a main pipeline and connecting it to at least two branch pipelines, the pipeline structure can be effectively simplified, the space occupied by the pipeline can be reduced, and multiple devices can be simultaneously ventilated and cleaned using a single main pipeline. The exhaust box provides a reliable intermediate connection between the main pipeline and the at least two branch pipelines, and the gas can first enter the exhaust box for transfer, improving the stability of airflow during the entire exhaust process. The main control valve on the main pipeline can regulate the gas flow rate within the main pipeline. When the gas composition in the equipment is complex and difficult to expel, reducing the gas resistance and increasing the gas velocity allows harmful gases and suspended particles to be quickly expelled, improving exhaust efficiency. When the gas in the equipment is less harmful and easy to expel, the gas resistance can be appropriately increased to reduce the gas velocity, thereby reducing energy consumption.

[0032] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0033] The disclosure of this application will become more readily understood with reference to the accompanying drawings. It will be readily understood by those skilled in the art that these drawings are for illustrative purposes only and are not intended to limit the scope of protection of this application. Furthermore, similar numbers in the drawings are used to denote similar components, wherein:

[0034] Figure 1 This is a schematic diagram of the exhaust device described in the embodiments of this application;

[0035] Figure 2 This is a schematic diagram of the main control valve in the fully open position according to an embodiment of this application;

[0036] Figure 3 This is a schematic diagram of the main control valve in the fully closed position according to an embodiment of this application;

[0037] Figure 4 This is a schematic diagram of the internal structure of the exhaust box described in the embodiment of this application.

[0038] Explanation of reference numerals in the attached figures

[0039] 1. Main pipe; 2. Branch pipe; 3. Exhaust box; 31. Air box inlet; 32. Air box outlet; 4. Main control valve; 41. Baffle plate; 411. Ventilation hole; 42. Control arm; 5. Filter screen. Detailed Implementation

[0040] Some embodiments of this application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of this application and are not intended to limit the scope of protection of this application.

[0041] Traditional exhaust systems have simple duct structures, with each device connected to the outside through a separate pipe. This results in a large overall space requirement and an inability to adjust the system based on the concentration of harmful gases and suspended particles within the equipment, which can lead to pollutant residues or localized concentrations exceeding the standard.

[0042] Based on this, this application provides an exhaust device. By setting up a main pipeline and then connecting the main pipeline to at least two branch pipelines, the pipeline structure can be effectively simplified, the space occupied by the pipeline can be reduced, and multiple devices can be simultaneously ventilated and cleaned using a single main pipeline. The exhaust box provides a reliable intermediate connection between the main pipeline and the at least two branch pipelines, and the gas can first enter the exhaust box for transfer, improving the airflow stability during the entire exhaust process. The main control valve on the main pipeline can regulate the gas flow rate in the main pipeline. Thus, when the gas composition in the equipment is complex and difficult to expel, the gas resistance can be reduced to increase the gas velocity, allowing harmful gases and suspended particles to be quickly expelled, improving exhaust efficiency. When the gas in the equipment is less harmful and easy to expel, the gas resistance can be appropriately increased to reduce the gas velocity, thereby reducing energy consumption.

[0043] The present application will be specifically described below through specific embodiments.

[0044] Reference Figures 1 to 4As shown, this embodiment provides an exhaust device, including: a main pipeline 1, the exhaust end of which is connected to a fan; at least two branch pipelines 2, the inlet ends of which are correspondingly connected to the interiors of at least two devices; an exhaust box 3, the interior of which forms a receiving space, the gas discharged from the branch pipelines 2 first converges in the receiving space and then is discharged to the main pipeline 1, the exhaust box 3 has at least two air box inlets 31 and air box exhaust outlets 32 connected to the inlet ends of the main pipeline 1, the exhaust ends of the at least two branch pipelines 2 are correspondingly connected to the at least two air box inlets 31; and a main control valve 4, including... The baffle plate 41 and the control arm 42 are rotatably mounted inside the main pipeline 1 to change the gas flow rate inside the main pipeline 1. It should be understood that the baffle plate 41 can rotate between a state perpendicular to the gas flow direction and a state parallel to the gas flow direction. When the baffle plate 41 is rotated to the state perpendicular to the exhaust direction, the gas resistance in the main pipeline 1 is the greatest, and the flow rate is the smallest. When the baffle plate 41 is rotated to the state parallel to the exhaust direction, the gas resistance in the main pipeline 1 is the least, and the flow rate is the greatest. The control arm 42 is rotatably mounted on the outer wall of the main pipeline 1 and controls the rotation angle of the baffle plate 41.

[0045] The exhaust device provided in this embodiment, by setting a main pipeline 1 and connecting the main pipeline 1 to at least two branch pipelines 2, can effectively simplify the pipeline structure, reduce the space occupied by the pipeline, and can also use one main pipeline 1 to exhaust and clean multiple devices simultaneously. The exhaust box 3 provides a reliable intermediate connection between the main pipeline 1 and the at least two branch pipelines 2, and the gas can first enter the exhaust box 3 for transfer, improving the airflow stability during the entire exhaust operation. The main control valve 4 set on the main pipeline 1 can adjust the flow rate in the main pipeline 1. Thus, when the gas composition in the equipment is relatively complex and difficult to exhaust, the gas resistance is reduced and the gas flow rate is increased, so that harmful gases and suspended particles are quickly discharged, improving exhaust efficiency. When the gas in the equipment is less harmful and easy to exhaust, the gas resistance can be appropriately increased and the gas flow rate reduced, thereby reducing energy consumption.

[0046] In some embodiments, the main pipeline 1 and / or branch pipeline 2 are formed by splicing together multiple pipeline segments.

[0047] Furthermore, based on the aforementioned main pipeline 1 and branch pipeline 2, it is possible to facilitate the assembly and disassembly of the main pipeline 1 and branch pipeline 2, and at the same time, it is possible to arrange the specific structure of the main pipeline 1 and branch pipeline 2 more flexibly.

[0048] Optionally, a sealing structure is provided at the connection between the main pipeline 1 and the fan and / or the connection between the main pipeline 1 and the exhaust box 3; a sealing structure is provided at the connection between the branch pipeline 2 and the exhaust box 3; the sealing structure can be a sealing ring or other structure that can reliably seal the pipeline connection. It should be understood that when the main pipeline 1 and the branch pipeline 2 are formed by splicing multiple pipeline segments, a sealing structure is provided at the connection of each pipeline segment on the main pipeline 1 and the branch pipeline 2.

[0049] Furthermore, the aforementioned sealing structure can significantly improve the overall sealing performance of the exhaust system, preventing harmful gases from leaking to the outside of the exhaust system.

[0050] In some embodiments, the air inlet end of the branch pipe 2 is provided with a deformable connecting pipe; the air outlet end of the connecting pipe is connected to the air inlet end of the branch pipe 2, the air inlet end extends into the equipment, and the relative angle and relative position between the air outlet end and the air inlet end of the connecting pipe are adjustable. Specifically, the connecting pipe can be a corrugated pipe or other structure that can fix its shape after adjustment.

[0051] Furthermore, the connection pipes further enhance the flexibility and practicality of the exhaust system, facilitating the connection or disconnection of branch pipe 2 from the equipment.

[0052] In some embodiments, the exhaust device further includes a branch control valve, and at least one branch pipe 2 is provided with a branch control valve. The branch control valve is used to change the gas flow rate in the corresponding branch pipe 2. The gas flow rate can be controlled by setting a rotatable plate-shaped baffle structure inside the branch control valve. It should be understood that the plate-shaped baffle structure can rotate between a state perpendicular to the gas flow direction and a state parallel to the gas flow direction. When the plate-shaped baffle structure is rotated to the state perpendicular to the exhaust direction, the gas resistance in the branch pipe 2 is the greatest, and the flow rate is the smallest. When the plate-shaped baffle structure is rotated to the state parallel to the exhaust direction, the gas resistance in the branch pipe 2 is the smallest, and the flow rate is the greatest.

[0053] Furthermore, based on the aforementioned branch control valve configuration, one or more branch pipes 2 can be controlled, thereby allowing for targeted adjustment of the flow rate of the corresponding branch control valve according to the specific conditions within each device. This further enhances the flexibility of the exhaust system, enabling timely adjustments to the exhaust ventilation efficiency based on the conditions within each device to reduce energy consumption.

[0054] Optionally, the baffle plate 41 is provided with ventilation holes 411. The ventilation holes 411 can be single or multiple. Multiple ventilation holes 411 can be evenly distributed on the surface of the baffle plate 41. When the baffle plate 41 is rotated to a position that coincides with the cross-section of the inner wall of the main pipeline 1, the ventilation holes 411 can still connect the two sides of the main control valve 4. The area of ​​a single ventilation hole 411 or the sum of the areas of multiple ventilation holes 411 can be much smaller than the area of ​​the baffle plate 41.

[0055] Furthermore, based on the above-mentioned ventilation hole 411, it is possible to avoid excessive air pressure inside the equipment due to the inability to expel gas, which would affect the operation of the equipment. The ventilation hole 411 enables the main control valve 4 to have a pressure relief effect.

[0056] In some embodiments, both the main pipeline 1 and the branch pipeline 2 can be pipe structures with circular cross-sections, or they can be pipe structures with square or other shaped cross-sections, as long as they can facilitate gas transportation and reduce the resistance to gas during transportation.

[0057] Continue to refer to Figures 1 to 3 As shown, a filter screen 5 is installed between the exhaust end of the main pipeline 1 and the fan. The filter screen 5 can purify or adsorb harmful gases or suspended particles generated in the equipment, and allow the purified air to continue to be drawn out by the fan through the holes on the filter screen 5.

[0058] Furthermore, based on the aforementioned filter 5, the fan can be protected, as well as the external environment, thus improving safety.

[0059] Optionally, the filter screen 5 can slide along the radial direction of the main pipe 1, meaning that the filter screen 5 can slide away from or be inserted into the connection between the main pipe 1 and the fan.

[0060] Furthermore, based on the above-mentioned filter 5 configuration, the filter 5 can be installed and removed without disconnecting the main pipeline 1 and the blower, thus facilitating the cleaning and replacement of the filter 5.

[0061] In some further embodiments, the connection between the main pipeline 1 and the fan is provided with a sliding groove that slides with the filter screen 5 to ensure the stability of the filter screen 5 during the sliding process.

[0062] Continue to refer to Figures 1 to 3 As shown, the filter screen 5 has sealing structures on both sides along the extension direction of the main pipeline 1, and the sealing structures are arranged around the periphery of the filter screen 5.

[0063] Furthermore, based on the sealing structure set around the filter screen 5, the filter screen 5 can be closed by the sealing structure after sliding to align with the main pipeline 1. At the same time, the filter screen 5 can be squeezed and fixed between the main pipeline 1 and the fan by squeezing the sealing structure.

[0064] In some embodiments, the connecting end of the control arm 42 is rotatably engaged with the side wall of the main pipeline 1 and connected to the baffle plate 41. The swing end of the control arm 42 swings between a fully open position, a fully closed position, and a partially open / closed position in between. It should be understood that the connecting end of the control arm 42 extends radially along the main pipeline 1. The connecting end can extend into the main pipeline 1 by a set length, as long as it can reliably connect with the baffle plate 41. Furthermore, the connecting end can also penetrate the main pipeline 1, forming a support rod in the radial direction of the baffle plate 41. The swing end of the control arm 42 can be a rod-shaped structure that is perpendicularly connected to the connecting end of the control arm 42. It should be noted that the control arm 42 can also be a ring, a fan, or other shapes, as long as it can rotate on the outside of the main pipeline 1 relative to the connecting end of the control arm 42. When the control arm 42 is in the fully open position or the partially open position, at least part of the control arm 42 is in a limiting engagement with the filter screen 5. When the control arm 42 is in the fully closed position, the baffle plate 41 closes the interior of the main pipeline 1, and the limiting engagement between the control arm 42 and the filter screen 5 is released.

[0065] Furthermore, based on the aforementioned control arm 42, when the control arm 42 is in a position other than the fully closed position, the filter screen 5 can be limited to prevent the filter screen 5 from sliding out from the connection between the main pipe 1 and the fan when the main pipe 1 is venting. Only when the control arm 42 is rotated to the fully closed position can the filter screen 5 slide out from the connection between the main pipe 1 and the fan, which can protect the personnel replacing the filter screen 5 and prevent a large amount of harmful gas from being sprayed out from the main pipe 1 when the filter screen 5 is being replaced.

[0066] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0067] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0068] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. An air exhaust device characterized by comprising: include: Main pipeline (1), the exhaust end of which is used to connect to a fan; At least two branch pipes (2), the air inlet ends of at least two branch pipes (2) are connected to the interior of at least two devices; The exhaust box (3) has at least two air box inlets (31) and an exhaust port (32) connected to the air inlet of the main pipeline (1). The exhaust ends of at least two branch pipelines (2) are connected to at least two air box inlets (31) in a one-to-one correspondence. The main control valve (4) includes a baffle plate (41) and a control arm (42). The baffle plate (41) is rotatably disposed in the main pipeline (1) to change the flow rate of the gas in the main pipeline (1). The control arm (42) is rotatably disposed on the outer wall of the main pipeline (1) and controls the rotation angle of the baffle plate (41).

2. The exhaust apparatus according to claim 1, characterized by The main pipeline (1) and / or the branch pipeline (2) are formed by splicing multiple pipeline segments.

3. The exhaust apparatus according to claim 1, wherein The connection between the main pipeline (1) and the fan and / or the connection between the main pipeline (1) and the exhaust box (3) is provided with a sealing structure; The connection between the branch pipe (2) and the exhaust box (3) is provided with a sealing structure.

4. The exhaust apparatus according to claim 1, wherein The air inlet end of the branch pipe (2) is provided with a deformable connecting pipe; the air outlet end of the connecting pipe is connected to the air inlet end of the branch pipe (2), the air inlet end extends into the equipment, and the relative angle and relative position between the air outlet end and the air inlet end of the connecting pipe are adjustable.

5. The exhaust apparatus according to claim 1, wherein The exhaust device also includes a branch control valve, and at least one of the branch pipes (2) is provided with a branch control valve, which is used to change the flow rate of the gas in the corresponding branch pipe (2).

6. The exhaust apparatus according to claim 1, wherein The wind deflector (41) has ventilation holes (411).

7. The exhaust device according to any one of claims 1 to 6, characterized in that, A filter screen (5) is provided between the exhaust end of the main pipeline (1) and the fan.

8. The exhaust device according to claim 7, characterized in that, The filter (5) slides along the radial direction of the main pipeline (1).

9. The exhaust device according to claim 8, characterized in that, The filter screen (5) has sealing structures on both sides along the extension direction of the main pipeline (1), and the sealing structures are arranged around the periphery of the filter screen (5).

10. The exhaust apparatus according to claim 8, characterized by The connecting end of the control arm (42) is rotatably engaged with the side wall of the main pipeline (1) and connected to the wind deflector (41). The swing end of the control arm (42) swings between the fully open position, the fully closed position, and the partially open and closed position in between. When the control arm (42) is in the fully open position or the partially open position, at least part of the control arm (42) is in a limiting engagement with the filter screen (5). When the control arm (42) is in the fully closed position, the baffle plate (41) closes the interior of the main pipeline (1), and the limiting engagement between the control arm (42) and the filter screen (5) is released.

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