A gas preheating system utilizing waste heat and a vacuum sintering furnace

Abstract

This utility model relates to the field of vacuum sintering technology, specifically a gas preheating system utilizing waste heat and a vacuum sintering furnace. The system includes a waste heat recovery mechanism, a connecting pipe, and a storage mechanism. A gas outlet pipe on one side of the top of the waste heat recovery mechanism is connected to one end of the connecting pipe, and the other end of the connecting pipe is connected to the storage inlet pipe of the storage mechanism. The waste heat recovery mechanism contains multiple layers of heat recovery pipes, with the gas inlet pipe at one end and the gas outlet pipe at the other end. The U-shaped arrangement of the multiple heat recovery pipes increases the contact area of ​​the heated gas, thereby improving waste heat recovery efficiency.

Description

Technical Field

[0001] This utility model relates to the field of vacuum sintering technology, and in particular to a gas preheating system and a vacuum sintering furnace that utilize waste heat. Background Technology

[0002] Vacuum gate valves are used to isolate vacuum pipelines and block airflow; they are important vacuum components. Semiconductor chip packaging requires a vacuum environment, typically achieved using a vacuum reflow oven. Current vacuum reflow ovens have multiple temperature zones: a preheating zone, a soldering zone, and a cooling zone. The preheating zone uses nitrogen protection, but is not a completely oxygen-free environment; the soldering zone is a vacuum environment. After soldering, the door connecting the soldering and cooling zones opens, allowing the chip to move from the soldering zone to the cooling zone. Simultaneously, the door connecting the soldering and preheating zones opens, sending the preheated chip into the soldering zone for soldering. Thus, during the transition from one soldering cycle to the next, the doors of the soldering zone must open simultaneously, disrupting the vacuum environment of the soldering zone.

[0003] Existing vacuum furnaces have low waste heat recovery efficiency. Summary of the Invention

[0004] This invention provides a gas preheating system that utilizes waste heat to solve the problem of low waste heat recovery efficiency in existing vacuum furnaces.

[0005] This utility model provides a gas preheating system utilizing waste heat, including a waste heat recovery mechanism, a connecting pipe, and a storage mechanism; a gas outlet pipe on one side of the top of the waste heat recovery mechanism is connected to one end of the connecting pipe, and the other end of the connecting pipe is connected to the storage inlet pipe of the storage mechanism; multiple layers of heat recovery pipes are arranged inside the waste heat recovery mechanism, with the gas inlet pipe at one end of each heat recovery pipe and the gas outlet pipe at the other end.

[0006] According to the gas preheating system utilizing waste heat of this utility model, the waste heat recovery mechanism further includes an upper cover, a lower cavity, a waste heat inlet pipe, and a waste heat outlet pipe; the upper cover is disposed above the lower cavity and forms a sealed cavity, the waste heat inlet pipe is disposed in the upper middle part of the upper cover, and the waste heat outlet pipe is disposed below the lower cavity.

[0007] According to the waste heat gas preheating system of this utility model, the upper cover includes an upper cover cavity frame, a manifold, and multiple waste heat gas pipes; the manifold is arranged at the lower part of the upper cover, the waste heat inlet pipe is arranged at the inlet end of the manifold, the outlet is arranged at the outlet end of the manifold, and the waste heat gas pipes are evenly arranged around the manifold.

[0008] The gas preheating system utilizing waste heat according to this utility model further includes a first temperature sensor, a first pressure sensor, and a support frame; the lower cavity is disposed above the support frame, and the first temperature sensor and the first pressure sensor are disposed on the upper part of the upper cover.

[0009] The gas preheating system utilizing waste heat according to this utility model further includes a cooling box and a liquid collection tank. Slopes are provided on both sides of the bottom of the lower cavity, and the waste heat outlet pipe is provided in the middle of the slope. The waste heat outlet pipe connects the cooling box and the liquid collection tank.

[0010] According to the waste heat gas preheating system of this utility model, the storage mechanism includes a storage tank body, a first insulation layer and a heater; the first insulation layer is disposed on the outer layer of the storage tank body, and the heater is disposed on the outer layer of the first insulation layer.

[0011] According to the present invention, a gas preheating system utilizing waste heat also includes a second insulation layer, a bottom plate, and supporting rollers; the second insulation layer is provided on the outer layer of the heater, the bottom plate is provided below the storage tank body, and the supporting rollers are provided around the bottom of the bottom plate.

[0012] The waste heat gas preheating system according to this utility model further includes a safety relief valve, a second pressure sensor, and a second temperature sensor; the safety relief valve is provided on the top of the storage tank body, and the second pressure sensor and the second temperature sensor are provided on the top of the storage tank body.

[0013] A vacuum sintering furnace includes the aforementioned gas preheating system utilizing waste heat.

[0014] The diagonally positioned waste heat gas pipes create a more uniform thermal field within the cavity, preventing localized overheating and improving temperature uniformity. This effectively reduces dead zones in the airflow, ensuring hot air reaches every corner and preventing heat waste. The U-shaped arrangement of the multi-layer heat recovery pipes increases the contact area with the heated gas, improving waste heat recovery efficiency. The curved structure of the U-shaped pipes causes the gas to continuously change direction during flow, generating disturbances that disrupt the gas boundary layer, thin the thermal resistance layer, and facilitate smoother heat transfer. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1Schematic diagram of the three-dimensional structure of the gas preheating system Figure 1 ;

[0017] Figure 2 This is a three-dimensional structural diagram of a waste heat recovery mechanism;

[0018] Figure 3 This is a three-dimensional structural diagram of the top cover;

[0019] Figure 4 This is a three-dimensional structural diagram of the storage mechanism;

[0020] Figure 5 This is a cross-sectional view of the storage mechanism;

[0021] Reference numerals: 1. Waste heat recovery mechanism; 2. Connecting pipe; 3. Storage mechanism; 11. Top cover; 12. Waste heat inlet pipe; 13. First temperature sensor; 14. First pressure sensor; 15. Gas inlet pipe; 16. Support frame; 17. Heat recovery pipe; 18. Lower cavity; 19. Gas outlet pipe; 31. Storage tank body; 32. First insulation layer; 33. Heater; 34. Second insulation layer; 35. Base plate; 36. Support rollers; 111. Top cover cavity frame; 112. Manifold; 113. Waste heat gas pipe; 311. Second pressure sensor; 312. Storage inlet pipe; 313. Second temperature sensor; 314. Storage outlet pipe; 315. Safety valve / pressure relief valve. Detailed Implementation

[0022] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.

[0023] In the description of the embodiments of this utility model, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this utility model. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0024] In the description of the embodiments of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this utility model based on the specific circumstances.

[0025] In this embodiment of the utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0026] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0027] The following is combined with Figure 1-5 A gas preheating system utilizing waste heat is described, comprising a waste heat recovery mechanism 1, a connecting pipe 2, and a storage mechanism 3. A gas outlet pipe 19 on one side of the top of the waste heat recovery mechanism 1 connects to one end of the connecting pipe 2, and the other end of the connecting pipe 2 connects to the storage inlet pipe 312 of the storage mechanism 3. Multiple layers of heat recovery pipes 17 are arranged inside the waste heat recovery mechanism 1. One end of each heat recovery pipe 17 has a gas inlet pipe 19, and the other end has a gas outlet pipe 15. The U-shaped or serpentine arrangement of the multiple layers of heat recovery pipes 17 increases the contact area of ​​the heated gas and improves the waste heat recovery efficiency.

[0028] In some embodiments, the waste heat recovery mechanism 1 further includes an upper cover 11, a lower cavity 18, a waste heat inlet pipe 12, and a waste heat outlet pipe; the upper cover 11 is disposed above the lower cavity 18 and forms a sealed cavity, the waste heat inlet pipe 12 is disposed in the upper middle part of the upper cover 11, and the waste heat outlet pipe is disposed below the lower cavity 18.

[0029] In some embodiments, the upper cover 11 includes an upper cover cavity frame 111, a manifold 112, and a plurality of waste heat gas pipes 113. The waste heat gas pipes 113 are arranged diagonally symmetrically. The manifold 111 is located at the lower part of the upper cover 11. A waste heat inlet pipe is located at the inlet end of the manifold 112, and an outlet pipe is located at the outlet end of the manifold 112. The waste heat gas pipes 113 are evenly arranged around the manifold 112. The diagonal arrangement of the waste heat gas pipes 113 can form a more uniform heat field in the cavity, avoid local overheating, and improve the temperature uniformity in the cavity. It effectively reduces the dead zone of airflow in the cavity, allowing the hot airflow to reach every corner and avoiding heat waste. The curved structure of the U-shaped pipe causes the gas to continuously change direction during flow, generating disturbance, destroying the gas boundary layer, thinning the thermal resistance layer, and making heat transfer smoother.

[0030] In some embodiments, the system further includes a first temperature sensor 13, a first pressure sensor 14, and a support frame 16; the lower cavity 18 is disposed above the support frame 16, and the upper part of the upper cover 11 is provided with the first temperature sensor 13 and the first pressure sensor 14.

[0031] In some embodiments, the system further includes a cooling tank and a liquid collection tank. Slopes are provided on both sides of the bottom of the lower cavity, and a waste heat outlet pipe is provided in the middle of the slopes. The waste heat outlet pipe connects the cooling tank and the liquid collection tank. The flux is cooled by the cooling tank and recovered by the liquid collection tank. The exhaust gas that has absorbed heat is recovered by an exhaust gas recovery device.

[0032] In some embodiments, the storage mechanism 3 includes a storage tank body 31, a first insulation layer 32, and a heater 33; the storage tank body 31 is provided with the first insulation layer 32 on its outer layer, and the heater 33 is provided on the outer layer of the first insulation layer 32. The heater 33 is preferably a ceramic heater 33.

[0033] In some embodiments, a second insulation layer 34, a base plate 35, and supporting rollers 36 are also provided; the heater 33 is provided with a second insulation layer 34 on its outer layer, a base plate 35 is provided below the storage tank body 31, and supporting rollers 36 are provided around the bottom of the base plate 35.

[0034] In some embodiments, a safety relief valve 315, a second pressure sensor 311, and a second temperature sensor 313 are also included; the top of the storage tank body 31 is provided with a safety relief valve 315, and the top of the storage tank body 31 is provided with a second pressure sensor 311 and a second temperature sensor 313.

[0035] A vacuum sintering furnace includes the aforementioned gas preheating system utilizing waste heat.

[0036] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A gas preheating system utilizing waste heat, characterized in that, It includes a waste heat recovery mechanism, a connecting pipe, and a storage mechanism; a gas outlet pipe on one side of the top of the waste heat recovery mechanism is connected to one end of the connecting pipe, and the other end of the connecting pipe is connected to the storage inlet pipe of the storage mechanism; the waste heat recovery mechanism is equipped with multiple layers of heat recovery pipes, one end of the heat recovery pipe is equipped with a gas inlet pipe, and the other end of the heat recovery pipe is equipped with a gas outlet pipe.

2. The gas preheating system utilizing waste heat according to claim 1, characterized in that, The waste heat recovery mechanism also includes an upper cover, a lower cavity, a waste heat inlet pipe, and a waste heat outlet pipe; the upper cover is located above the lower cavity and forms a sealed cavity, the waste heat inlet pipe is located in the upper middle part of the upper cover, and the waste heat outlet pipe is located below the lower cavity.

3. The gas preheating system utilizing waste heat according to claim 2, characterized in that, The upper cover includes an upper cover cavity frame, a manifold, and multiple waste heat gas pipes; the manifold is arranged at the lower part of the upper cover, the waste heat inlet pipe is arranged at the inlet end of the manifold, the outlet pipe is arranged at the outlet end of the manifold, and the waste heat gas pipes are evenly arranged around the manifold.

4. The gas preheating system utilizing waste heat according to claim 3, characterized in that, It also includes a first temperature sensor, a first pressure sensor, and a support frame; the lower cavity is disposed above the support frame, and the first temperature sensor and the first pressure sensor are disposed on the upper part of the upper cover.

5. The gas preheating system utilizing waste heat according to claim 2, characterized in that, It also includes a waste heat outlet pipe, a cooling box, and a liquid collection tank. The bottom of the lower cavity is provided with ramps on both sides, and the waste heat outlet pipe is provided in the middle of the ramps. The waste heat outlet pipe connects the cooling box and the liquid collection tank.

6. The gas preheating system utilizing waste heat according to claim 1, characterized in that, The storage mechanism includes a storage tank body, a first insulation layer, and a heater; the first insulation layer is disposed on the outer layer of the storage tank body, and the heater is disposed on the outer layer of the first insulation layer.

7. The gas preheating system utilizing waste heat according to claim 6, characterized in that, The heater is provided with a second insulation layer, a base plate, and supporting rollers; the heater is provided with the second insulation layer on its outer surface, the storage tank body is provided with the base plate below it, and the supporting rollers are provided around the bottom of the base plate.

8. The gas preheating system utilizing waste heat according to claim 6, characterized in that, It also includes a safety relief valve, a second pressure sensor, and a second temperature sensor; the safety relief valve is installed on the top of the storage tank body, and the second pressure sensor and the second temperature sensor are installed on the top of the storage tank body.

9. A vacuum sintering furnace, characterized in that, Includes the gas preheating system utilizing waste heat as described in any one of claims 1-8.

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