High-precision horizontal adjustment mechanism of large device

Abstract

The utility model relates to mechanical equipment technical field especially relates to a high accuracy level adjusting mechanism of large -scale device, including adjusting support seat and the adjusted device base, be provided with the original point end, constant force end and two adjusting ends and the position enclosure becomes rectangle on the adjusting support seat, the original point end and constant force end diagonal setting and two adjusting ends are diagonal setting, the original point end, constant force end, adjusting end are installed with the support piece one end away from the adjusting support seat, the utility model reduces the creeping distance of screw rod, improves the adjusting accuracy, four support points stress balance, help the attitude adjustment of equipment.

Description

Technical Field

[0001] This utility model relates to the field of mechanical equipment technology, and in particular to a high-precision horizontal adjustment mechanism for a large device. Background Technology

[0002] With the development of precision manufacturing (such as semiconductor lithography and nanoimprinting), optical detection (gravitational wave observation and space telescopes) and biomedical equipment, the leveling accuracy requirements for equipment bases have reached the micrometer (μm) or even nanometer (nm) level.

[0003] Traditional large-scale optical systems use a four-point ball joint and a common fine-tooth screw to adjust the attitude of the device. This method suffers from problems such as severe creep of the adjustment structure, inability to quantify the adjustment angle, and uneven force distribution at the four adjustment points. Therefore, we need a high-resolution, high-precision leveling mechanism. Utility Model Content

[0004] The purpose of this invention is to address the following shortcomings in the prior art, namely the serious problem of structural creep, and to propose a high-precision horizontal adjustment mechanism for large devices.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A high-precision horizontal adjustment mechanism for a large device includes an adjustment support base and a base of the device to be adjusted. The adjustment support base is provided with an origin end, a constant force end and two adjustment ends, which are arranged in a rectangle. The origin end and the constant force end are diagonally arranged and the two adjustment ends are also diagonally arranged. Support members are installed on the end of the origin end, the constant force end and the adjustment ends that are away from the adjustment support base.

[0007] The constant force end includes a constant force end I-beam support body fixedly installed on an adjusting support base. A constant force end spring shell body with a hollow interior is fixedly connected to the constant force end I-beam support body. A spring T-shaped ejector shaft is slidably connected inside the constant force end spring shell body. The upper end of the spring T-shaped ejector shaft is connected to the support member. A constant force end high rigidity spring is installed between the lower end of the spring T-shaped ejector shaft and the bottom side of the constant force end spring shell body.

[0008] A fixing plate is provided on the bottom side of the support member on the adjusting end. The adjusting end includes a ball lifting machine provided on the adjusting support base. A ball screw is provided at the output end of the ball lifting machine. An adjusting end housing is fixedly installed on the ball lifting machine. A spring limit protection block is fixedly installed on the adjusting end housing. A high-rigidity adjusting end spring is provided inside the spring limit protection block and sleeved on the ball screw. The fixing plate is sleeved on the outer wall of the spring limit protection block. A micrometer is installed on the outer wall of the ball lifting machine through a connecting block.

[0009] Preferably, the support member includes an upper support plate and a lower support plate, the upper end face of the upper support plate is used to connect to the base of the adjustable device, and the lower end face of the upper support plate and the lower support plate are connected by steel balls.

[0010] Preferably, the origin end includes an origin I-beam support body fixedly installed on an adjusting support base, and the lower support plate in the support member is located on the origin I-beam support body.

[0011] Preferably, a pad is installed on the upper end face of the origin I-beam support, and the lower end face of the lower support plate of the support member abuts against the pad.

[0012] Preferably, the output end of the ball mill is also equipped with a speed reducer, and a drive component is provided on the speed reducer.

[0013] Preferably, the micrometer component includes a measuring base elevation column mounted on the connecting block, a measuring base screw head installed at the upper end of the measuring base elevation column, a micrometer extension plate fixedly connected to one side of the upper support plate located on the adjusting end, a clamp installed at the bottom end of the micrometer extension plate, a high-precision micrometer provided on one side of the micrometer extension plate, the probe inside the high-precision micrometer passing through the clamp and being clamped by it, and located on the line connecting the origin end and the center of the adjusting end.

[0014] Compared with the prior art, the beneficial effects of this utility model are:

[0015] Reducing the fine-tuning step distance of the actuator allows for controllable stress distribution at the four support points, improving the stability of the lifting device and eliminating false contact, resulting in more accurate data. Furthermore, employing a high-precision micrometer enhances measurement accuracy and provides real-time feedback of attitude data, aiding in the device's attitude adjustment. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of a high-precision horizontal adjustment mechanism for a large device proposed in this utility model.

[0017] Figure 2 This is a three-dimensional structural diagram of a high-precision horizontal adjustment mechanism for a large device proposed in this utility model.

[0018] Figure 3 This is a partial cross-sectional structural diagram of a high-precision horizontal adjustment mechanism for a large device proposed in this utility model.

[0019] Figure 4 This is a schematic diagram of a partial cross-sectional structure of the adjustment end.

[0020] In the diagram: 1. Adjustable device base; 2. Adjustable support seat; 31. Upper support plate; 32. Steel ball; 33. Lower support plate; 41. Spring T-shaped ejector shaft; 42. Constant force end spring housing; 43. Constant force end I-beam support body; 44. Constant force end high rigidity spring; 51. Screw plate; 52. Ball lifting machine; 53. Reducer; 54. Micrometer extension plate; 55. High precision micrometer; 56. Ball screw; 57. Adjustable end high rigidity spring; 58. Adjustable end housing; 59. Spring limit protection block; 6. Origin end I-beam support body. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0022] The terms used in this utility model, such as "upper", "lower", "left", "right", "middle" and "one", are only for clarity of description and are not intended to limit the scope of implementation of this utility model. Changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered as within the scope of implementation of this utility model.

[0023] Reference Figures 1-4A high-precision horizontal adjustment mechanism for a large device includes an adjustment support 2 and a base 1 for the device to be adjusted. The base 1 is the base of the large device. The adjustment support 2 has an origin end, a constant force end, and two adjustment ends arranged in a rectangle. The short side of the rectangle is 468 mm long and the long side is 1360 mm long. The origin end and the constant force end are diagonally arranged, and the two adjustment ends are also diagonally arranged. A support member is installed at the end of the origin end, the constant force end, and the adjustment ends away from the adjustment support 2. The support member is located on the device to be adjusted. The base 1 and each port serve to support the adjustable device base 1 and the equipment on it. Initially, the height of the constant force end is higher than that of the origin end, with a height difference of 30mm. When the leveling mechanism moves to the bottom of the adjustable device base 1, taking the origin end as the origin, the constant force end moves downward under the action of the equipment's gravity. When finally reaching equilibrium, the forces on the four ports are approximately the same, with each port experiencing a force of about 300kg. The constant force end includes a constant force end I-beam support body 43 fixedly installed on the adjusting support base 2. A hollow constant-force end spring housing 42 is fixedly connected to the steel support body 43. A spring T-shaped ejector shaft 41 is slidably connected inside the constant-force end spring housing 42. The upper end of the spring T-shaped ejector shaft 41 is connected to the support member and abuts against the bottom end of the support member. A constant-force end high-rigidity spring 44 is installed between the lower end of the spring T-shaped ejector shaft 41 and the bottom side of the constant-force end spring housing 42. The constant-force end high-rigidity spring 44 has a spring constant of 10 mm when subjected to a 100 kg weight. When the adjustable device base 1 is seated... During the leveling mechanism, the high-rigidity spring 44 at the constant force end is compressed downwards under the action of gravity, and the upper surface of the constant force end will move downwards until equilibrium is reached. A force sensor (not shown) can be installed on the constant force end to provide feedback on the magnitude of the supporting force of the constant force end. This is existing technology and will not be described in detail. A displacement mechanism is added to the lower end of the constant force end. This mechanism includes, but is not limited to, one of the following: telescopic cylinder, worm gear screw jack, or spiral screw jack. These can be purchased on the market, and their principles will not be described in detail. They are mainly used to adjust the size of the constant force end.

[0024] A retaining plate 51 is provided on the bottom side of the support member on the adjusting end. The adjusting end includes a ball lifting machine 52 mounted on the adjusting support base 2. A ball screw 56 is provided at the output end of the ball lifting machine 52. The top end of the ball screw 56 rests against the lower end face of the support member. An adjusting end housing 58 is fixedly mounted on the ball lifting machine 52. A spring limit protection block 59 is fixedly mounted on the adjusting end housing 58. A groove with an upward opening is provided inside the spring limit protection block 59. A high-rigidity adjusting end spring 57, which is sleeved on the ball screw 56, is installed in the groove. A second groove is provided on the retaining plate 51. The second groove in the retaining plate 51 is sleeved on the outer wall of the spring limit protection block 59. A micrometer is installed on the outer wall of the ball lifting machine 52 through a connecting block. When leveling, the ball lifting machine 52 is started. The ball screw 56 rotates, causing the support components to move. The lead of the ball screw 56 is 5mm, and this movement parameter is transmitted to a micrometer for display and data recording. The micrometer data is used to determine the tilt angle and direction of the entire device. When the adjusting end is compressed, part of the load is borne by the ball screw 56, while the majority of the load is borne by the high-rigidity spring 57 at the adjusting end. By distributing the load and reducing friction, the creep distance of the ball screw 56 is significantly reduced. In common leveling structures on the market, when the load is around 1 ton, the creep distance of the ball screw 56 is around 10 microns. The above design reduces the creep distance of the ball screw 56 to less than 1 micron when bearing the same weight, thus improving the service life of the equipment.

[0025] The support includes an upper support plate 31 and a lower support plate 33. The upper end face of the upper support plate 31 is used to connect to the base 1 of the device to be adjusted. The lower end face of the upper support plate 31 and the lower support plate 33 are connected by a steel ball 32. Through the spherical hinge of the steel ball 32, the upper support plate 31 can rotate slightly under pressure when subjected to gravity, and can also move slightly within the lower support plate 33 to counteract the changes in distance between points caused by changes in angle, which facilitates subsequent leveling work.

[0026] The origin end includes an origin I-beam support body 6 fixedly installed on the adjusting support base 2. The lower support plate 33 of the support is located on the origin I-beam support body 6. No high-rigidity spring is installed on the entire origin end. A pad is installed on the upper end surface of the origin I-beam support body 6. The lower end surface of the lower support plate 33 of the support abuts against the pad. The overall height of the origin end can be adjusted by controlling the thickness and number of pads, thereby improving the adaptability of the equipment and facilitating the adjustment of the initial height of the origin end.

[0027] The output end of the ball screw 52 is also equipped with a reducer 53. A drive component is installed on the reducer 53. The drive component is either a manual screw nut or a servo motor. The rotation speed of the ball screw 56 is controlled by the reducer 53, which facilitates high-precision fine-tuning. In addition, the combined reduction ratio of the ball screw 52 and the reducer 53 is 600:1. The lead of the ball screw 56 is 5mm, that is, the stroke of the reducer 53 is 0.008mm for one input revolution. The connection and control between the manual reducer output plate, the reducer 53, and the ball screw 52 are existing technologies and will not be described in detail here.

[0028] The micrometer includes a measuring base elevation column mounted on the connecting block. A measuring base screw head is installed at the upper end of the measuring base elevation column. The screw head is used to adjust the initial position of the micrometer to the median value. A micrometer extension plate 54 is fixedly connected to one side of the upper support plate 31 located on the adjustment end. A clamp is installed at the bottom end of the micrometer extension plate 54. Any clamp that can be purchased on the market and can perform clamping function is acceptable. A high-precision micrometer 55 is set on one side of the micrometer extension plate 54. The probe inside the high-precision micrometer 55 passes through the clamp and is clamped by it. It is located on the line connecting the center of the origin end and the center of the adjustment end. The parameters of the high-precision micrometer 55 are as follows: it is an absolute grating, its stroke is 12.7mm, its resolution is 1μm, and its accuracy is ±2μm.

[0029] The above structural design can reduce the crawling distance from 10 micrometers to less than 1 micrometer, thus improving the service life of the equipment. In addition, the high-resolution micrometer and the stroke parameters of the lead screw are used to improve the measurement accuracy. Furthermore, the curvature at the two adjustment points is calculated through this measurement, and the height at the two points is adjusted until leveling is achieved.

[0030] In this utility model, unless otherwise explicitly specified and limited, the terms "installation", "connection", "linking", "fixing", etc., should be interpreted broadly.

[0031] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A high-precision horizontal adjustment mechanism for a large device, comprising an adjustment support (2) and a base (1) of the device to be adjusted, characterized in that... The adjustment support base (2) is provided with an origin end, a constant force end and two adjustment ends, and the positions are arranged to form a rectangle. The origin end and the constant force end are diagonally arranged and the two adjustment ends are diagonally arranged. The end of the origin end, the constant force end and the adjustment end away from the adjustment support base (2) is equipped with a support member. The constant force end includes a constant force end I-beam support body (43) fixedly installed on the adjusting support base (2). A constant force end spring shell body (42) with a hollow interior is fixedly connected to the constant force end I-beam support body (43). A spring T-shaped ejector shaft (41) is slidably connected inside the constant force end spring shell body (42). The upper end of the spring T-shaped ejector shaft (41) is connected to the support member. A constant force end high rigidity spring (44) is installed between the lower end of the spring T-shaped ejector shaft (41) and the bottom side of the constant force end spring shell body (42). A swivel plate (51) is provided on the bottom side of the support member on the adjustment end. The adjustment end includes a ball lifting machine (52) provided on the adjustment support base (2). A ball screw (56) is provided at the output end of the ball lifting machine (52). An adjustment end housing (58) is fixedly installed on the ball lifting machine (52). A spring limit protection block (59) is fixedly installed on the adjustment end housing (58). A high-rigidity adjustment end spring (57) is provided inside the spring limit protection block (59) and sleeved on the ball screw (56). The swivel plate (51) is sleeved on the outer wall of the spring limit protection block (59). A micrometer is installed on the outer wall of the ball lifting machine (52) through a connecting block.

2. The high-precision horizontal adjustment mechanism for a large device according to claim 1, characterized in that, The support includes an upper support plate (31) and a lower support plate (33). The upper end face of the upper support plate (31) is used to connect to the base (1) of the adjustable device. The lower end face of the upper support plate (31) and the lower support plate (33) are hinged by a steel ball (32).

3. The high-precision horizontal adjustment mechanism for a large device according to claim 2, characterized in that, The origin end includes an origin I-beam support body (6) fixedly installed on the adjusting support base (2), and the lower support plate (33) of the support is located on the origin I-beam support body (6).

4. The high-precision horizontal adjustment mechanism for a large device according to claim 3, characterized in that, A pad is installed on the upper end face of the origin I-beam support (6), and the lower end face of the lower support plate (33) of the support member abuts against the pad.

5. The high-precision horizontal adjustment mechanism for a large device according to claim 4, characterized in that, The output end of the ball lifting machine (52) is also equipped with a reducer (53), and a drive component is provided on the reducer (53).

6. The high-precision horizontal adjustment mechanism for a large device according to claim 5, characterized in that, The micrometer component includes a measuring base support column mounted on the connecting block. A measuring base screw head is installed at the upper end of the measuring base support column. A micrometer extension plate (54) is fixedly connected to one side of the upper support plate (31) on the adjusting end. A clamp is installed at the bottom end of the micrometer extension plate (54). A high-precision micrometer (55) is provided on one side of the micrometer extension plate (54). The probe inside the high-precision micrometer (55) passes through the clamp and is clamped by it, and is located on the line connecting the origin end and the center of the adjusting end.

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