Horizontal coating machine

Abstract

The utility model relates to horizontal type coating machine equipment technical field discloses a horizontal type coating machine, including the coating table, the top fixed mounting of coating table has the processing room, the top of processing room and the top of coating table all are fixedly connected with two guide rails, one end of four guide rails is commonly fixedly connected with the support plate, the one side of support plate is provided with the push component, the one side of push component is provided with the moving seat, the top fixed connection of moving seat has two support steel sheets, and the opposite side of two support steel sheets all is connected with the pivot of rotation, the utility model discloses the cooperation of guide rail, support plate, moving seat and push component etc. structure uses to be able to push the sealing gasket and processing room mouth butt joint, through the cooperation of four sliding blocks synchronous guide of cylinder center push, avoids the edge air leakage phenomenon, guarantees the stability and precision of coating quality, and simultaneously through the design of moving seat, can conveniently feed the discharge, and the convenient use.

Description

Technical Field

[0001] This utility model relates to the technical field of horizontal coating machine equipment, and in particular to a horizontal coating machine. Background Technology

[0002] Horizontal coating machines are widely used equipment in modern manufacturing, mainly used for depositing thin films on substrate surfaces. They are widely used in the production processes of industries such as electronics, optics, semiconductors, automobiles, displays, and photovoltaics. In traditional coating processes, the substrate is usually rotated or fixed on the rotating platform of the coating machine, and the thin film material is uniformly deposited onto the substrate surface through evaporation, sputtering, chemical vapor deposition, or other methods in a vacuum environment.

[0003] For example, Chinese utility model patent application number 202322441948.8 discloses a horizontal vacuum coating machine, specifically relating to the field of coating machine technology. It includes a machine base with a sliding groove on one side of the top of the machine base and a vacuum coating chamber fixedly mounted on the other side of the top of the machine base. A feeding assembly is located within the sliding groove and is situated inside the vacuum coating chamber. The feeding assembly includes a slider that slides within the sliding groove. This utility model uses two clamping plates to fix the workpiece and transport it into the vacuum coating chamber for coating. Then, an electric push rod drives the clamping plates downwards, causing the workpiece to fall onto two support plates. The clamping plates are then moved away from the workpiece, coating both sides of the workpiece. Finally, the slider moves a sealing plate out of the vacuum coating chamber. Compared to existing technologies, this design is simpler. The use of clamping plates and support plates allows for all-around coating of the workpiece surface, and eliminates the need for manual adjustment of the workpiece position, resulting in higher coating efficiency.

[0004] The above solution uses a threaded rod to drive the sealing plate for sealing. However, in actual use, the slider on the threaded rod is pushed too low, resulting in uneven force and a risk of side leakage. In addition, it is prone to deformation after long-term use, rendering the device unusable. Furthermore, although the above device can clamp the device, it can only coat both sides, which is not comprehensive enough. It is difficult to meet the needs of comprehensive coating. Therefore, improvements are needed. Utility Model Content

[0005] The purpose of this utility model is to address the shortcomings of existing technologies by proposing a horizontal coating machine.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a horizontal coating machine, including a coating table, a processing chamber fixedly installed on the top of the coating table, two guide rails fixedly connected to the top of the processing chamber and the top of the coating table, a support plate fixedly connected to one end of the four guide rails, a pushing component provided on one side of the support plate, a movable seat provided on one side of the pushing component, two supporting steel plates fixedly connected to the top of the movable seat, a rotating shaft rotatably connected to the opposite sides of the two supporting steel plates, a rotating component provided on one side of one of the support plates, a connecting plate fixedly connected to the opposite sides of the two rotating shafts, a guide rod fixedly connected between the opposite sides of the two connecting plates, two clamping plates slidably connected to the outer wall of the guide rod, and a clamping component provided on one side of one of the connecting plates.

[0007] The coating stage serves as the foundation platform for the entire coating machine, providing support and stability. The processing chamber is made of stainless steel and is a vacuum cavity. Coating deposition takes place inside, providing a high vacuum environment to ensure the purity of the film layer. The guide rail provides sliding guidance for the moving slider on the push plate. With the support of the rail, the push plate can move smoothly to ensure the sealing effect. The guide rod provides sliding guidance for the clamping plate, ensuring that the clamping plate can smoothly and accurately position the workpiece.

[0008] As a further description of the above technical solution:

[0009] The pushing assembly includes a cylinder fixedly installed on one side of the support plate, the telescopic end of the cylinder passing through the support plate and fixedly connected to the pushing plate.

[0010] A cylinder drives a push plate, which in turn moves a sealing gasket to seal the processing chamber, thus maintaining the airtightness of the coating environment. This component is crucial to ensuring that the processing environment is free from external contamination.

[0011] As a further description of the above technical solution:

[0012] A sealing gasket is fixedly installed on the side of the push plate closest to the processing chamber, and four movable sliders are fixedly installed on the side of the push plate furthest from the sealing gasket.

[0013] The movable slider slides along the guide rail, and one side of the push plate passes through the sealing gasket and is fixedly connected to the movable seat.

[0014] As a further description of the above technical solution:

[0015] The rotating assembly includes a servo motor that is fixedly mounted on one side of one of the support plates via a bracket, and a pinion is fixedly connected to the output end of the servo motor.

[0016] By controlling the servo motor, the workpiece can be precisely rotated to achieve all-around coating.

[0017] As a further description of the above technical solution:

[0018] The outer wall of the small gear is meshed with a large gear.

[0019] One side of the large gear is fixedly connected to one of the rotating shafts.

[0020] As a further description of the above technical solution:

[0021] The clamping assembly includes a drive motor fixedly mounted on one side of one of the connecting plates, and a bidirectional lead screw is fixedly connected to the output end of the drive motor.

[0022] The outer wall of the bidirectional lead screw is threadedly connected to two clamping plates, and one end of the bidirectional lead screw is rotatably connected to another connecting plate.

[0023] As a further description of the above technical solution:

[0024] Rubber pads are fixedly installed on the opposite sides of both clamping plates.

[0025] Rubber pads are installed on the clamping plate to protect the workpiece surface and prevent mechanical clamping from damaging the workpiece. The rubber pads provide sufficient friction to make the clamping more stable.

[0026] As a further description of the above technical solution:

[0027] A coating tank is fixedly installed on the top of the coating table, two warning lights and a vacuum pump are fixedly installed on the top of the processing chamber, and a control panel is fixedly installed on the front of the processing chamber.

[0028] The coating tank stores the coating material and supplies the substances required for coating to the processing room. Warning lights illuminate when there is a problem with the equipment operation, reminding staff to take necessary safety measures. The vacuum pump is used to create and maintain a vacuum environment in the processing room. The control panel provides a user interface, through which operators can control various functions of the equipment, such as cylinder extension and retraction, workpiece rotation, coating time, etc., via buttons and displays.

[0029] This utility model has the following beneficial effects:

[0030] 1. Compared with existing technologies, this horizontal coating machine, through the coordinated use of structures such as guide rails, support plates, moving seats and pushing components, can push the sealing gasket to connect with the processing chamber opening. The cylinder center pushes in conjunction with the four sliders for synchronous guidance, avoiding edge air leakage and ensuring the stability and precision of coating quality. At the same time, the design of the moving seat facilitates material feeding and discharging, making it convenient to use.

[0031] 2. Compared with existing technologies, this horizontal coating machine, through the coordinated use of rotating components, clamping components, guide rods and clamping plates, can drive the workpiece to rotate via a servo motor, enabling all-around coating of the substrate. This ensures that a thin film is uniformly deposited on each side of the workpiece, improving coating quality. Especially in applications requiring multi-sided coating, it reduces the complexity of multiple clamping and operations, and can adapt to various workpiece sizes and shapes. Furthermore, the clamping position can be flexibly adjusted, increasing the equipment's versatility. Attached Figure Description

[0032] Figure 1 This is a three-dimensional schematic diagram of the overall structure of a horizontal coating machine proposed in this utility model;

[0033] Figure 2 This is a three-dimensional schematic diagram of the overall structure of a horizontal coating machine proposed in this utility model from another perspective;

[0034] Figure 3 A three-dimensional schematic diagram of the pushing component structure of a horizontal coating machine proposed in this utility model;

[0035] Figure 4 This is a three-dimensional schematic diagram of the rotating component structure of a horizontal coating machine proposed in this utility model;

[0036] Figure 5 This is a three-dimensional schematic diagram of the clamping component structure of a horizontal coating machine proposed in this utility model.

[0037] Legend:

[0038] 1. Coating table; 2. Processing chamber; 3. Guide rail; 4. Support plate; 5. Movable seat; 6. Support steel plate; 7. Rotary shaft; 8. Connecting plate; 9. Guide rod; 10. Clamping plate; 11. Cylinder; 12. Push plate; 13. Sealing gasket; 14. Moving slider; 15. Servo motor; 16. Pinion gear; 17. Large gear; 18. Drive motor; 19. Two-way lead screw; 20. Rubber pad; 21. Coating tank; 22. Warning light; 23. Vacuum pump; 24. Control panel. Detailed Implementation

[0039] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0040] Reference Figure 1-5This utility model provides a horizontal coating machine, comprising a coating table 1, a processing chamber 2 fixedly mounted on the top of the coating table 1, two guide rails 3 fixedly connected to the top of both the processing chamber 2 and the top of the coating table 1, a support plate 4 fixedly connected to one end of each of the four guide rails 3, a pushing assembly on one side of the support plate 4, a movable seat 5 on one side of the pushing assembly, two support steel plates 6 fixedly connected to the top of the movable seat 5, a rotating shaft 7 rotatably connected to the opposite sides of each of the two support steel plates 6, a rotating assembly on one side of one of the support plates 4, a connecting plate 8 fixedly connected to the opposite sides of each of the two rotating shafts 7, a guide rod 9 fixedly connected between the opposite sides of the two connecting plates 8, two clamping plates 10 slidably connected to the outer wall of the guide rod 9, a clamping assembly on one side of one of the connecting plates 8, and the coating table 1 serving as the entire unit. The basic platform of the coating machine provides support and stability. The processing chamber 2 is a vacuum chamber made of stainless steel, where coating deposition is performed. It provides a high vacuum environment to ensure the purity of the film layer. The guide rail 3 provides sliding guidance for the moving slider 14 on the push plate 12. With the support of the rail, the push plate 12 can move smoothly to ensure the sealing effect. The guide rod 9 provides sliding guidance for the clamping plate 10 to ensure that the clamping plate 10 can smoothly and accurately position the workpiece. Through the cooperation of the guide rail 3, support plate 4, moving seat 5 and push assembly, the sealing gasket 13 can be pushed to connect with the opening of the processing chamber 2. The central push of the cylinder 11, combined with the synchronous guidance of the four sliders, avoids edge leakage and ensures the stability and accuracy of the coating quality. At the same time, the design of the moving seat 5 facilitates material feeding and discharging, making it convenient to use.

[0041] The pushing assembly includes a cylinder 11 fixedly installed on one side of the support plate 4. The telescopic end of the cylinder 11 passes through the support plate 4 and is fixedly connected to a pushing plate 12. The cylinder 11 drives the pushing plate 12, which in turn drives the sealing gasket 13 to seal the processing chamber 2, thereby maintaining the airtightness of the coating environment. This assembly is crucial to ensuring that the processing environment is not contaminated by external factors. The sealing gasket 13 is fixedly installed on the side of the pushing plate 12 closest to the processing chamber 2, and four movable sliders 14 are fixedly installed on the side of the pushing plate 12 away from the sealing gasket 13. The movable sliders 14 slide along the guide rail 3. One side of the pushing plate 12 passes through the sealing gasket 13 and is fixedly connected to the movable seat 5.

[0042] The rotating assembly includes a servo motor 15 fixedly mounted on one side of one of the support plates 4 via a bracket. The output end of the servo motor 15 is fixedly connected to a pinion 16. Under the control of the servo motor 15, the workpiece can be precisely rotated to achieve all-round coating. The outer wall of the pinion 16 is meshed with a large gear 17, and one side of the large gear 17 is fixedly connected to one of the rotating shafts 7.

[0043] The clamping assembly includes a drive motor 18 fixedly installed on one side of one of the connecting plates 8. The output end of the drive motor 18 is fixedly connected to a bidirectional lead screw 19. The outer wall of the bidirectional lead screw 19 is threadedly connected to the two clamping plates 10. One end of the bidirectional lead screw 19 is rotatably connected to the other connecting plate 8.

[0044] Rubber pads 20 are fixedly installed on opposite sides of the two clamping plates 10. The rubber pads 20 are installed on the clamping plates 10 to protect the workpiece surface and prevent mechanical clamping from damaging the workpiece. The rubber pads 20 provide sufficient friction to make the clamping more stable.

[0045] A coating tank 21 is fixedly installed on the top of the coating table 1. Two warning lights 22 and a vacuum pump 23 are fixedly installed on the top of the processing chamber 2. A control panel 24 is fixedly installed on the front of the processing chamber 2. The coating tank 21 stores the coating material and provides the substances required for coating to the processing chamber 2. The warning lights 22 illuminate when there is a problem with the equipment operation, reminding the staff to take necessary safety measures. The vacuum pump 23 is used to create and maintain a vacuum environment in the processing chamber 2. The control panel 24 provides a user interface. Through buttons and a display screen, the operator can control various functions of the equipment, such as the extension and retraction of the cylinder 11, the rotation of the workpiece, and the coating time.

[0046] Working principle: First, the workpiece to be coated is placed between two clamping plates 10. Then, the drive motor 18 is started, and its output end rotates to drive the bidirectional lead screw 19 to rotate. This causes the two clamping plates 10 to move relative to each other along the guide rod 9, so that the rubber pad 20 clamps the workpiece to be coated. Then, the cylinder 11 can be started to extend and retract its telescopic end, thereby driving the moving slider 14 on the push plate 12 to move along the guide rail 3. This causes the sealing gasket 13 to clamp and align with the opening of the processing chamber 2. At the same time, the cylinder 11 is located in the center position, which can ensure the sealing effect and effectively prevent edge leakage.

[0047] Then, the staff can operate the buttons on the control panel 24 to coat one side of the workpiece. When it is necessary to coat other sides, the servo motor 15 is started through the control panel 24, causing its output end to rotate, which in turn drives the pinion 16 to rotate. The rotation of the pinion 16 drives the meshing large gear 17 to rotate, which in turn drives the rotating shaft 7 to rotate. The rotating shaft 7 drives the clamped and fixed workpiece to rotate. The rotating shaft 7 integrates a conductive slip ring to ensure 360° continuous rotation without cable entanglement, thus completing the all-round coating treatment of the substrate in one go, reducing manual operation, improving work efficiency, and ensuring the requirement of uniform coating on multiple sides.

[0048] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A horizontal coating machine, comprising a coating table (1), characterized in that: A processing chamber (2) is fixedly installed on the top of the coating table (1). Two guide rails (3) are fixedly connected to the top of the processing chamber (2) and the top of the coating table (1). A support plate (4) is fixedly connected to one end of the four guide rails (3). A pushing component is provided on one side of the support plate (4). A moving seat (5) is provided on one side of the pushing component. Two support steel plates (6) are fixedly connected to the top of the moving seat (5). A rotating shaft (7) is rotatably connected to the opposite side of the two support steel plates (6). A rotating component is provided on one side of one of the support plates (4). A connecting plate (8) is fixedly connected to the opposite side of the two rotating shafts (7). A guide rod (9) is fixedly connected between the opposite sides of the two connecting plates (8). Two clamping plates (10) are slidably connected to the outer wall of the guide rod (9). A clamping component is provided on one side of one of the connecting plates (8).

2. A horizontal coating machine according to claim 1, characterized in that: The pushing assembly includes a cylinder (11) fixedly installed on one side of the support plate (4), and the telescopic end of the cylinder (11) passes through the support plate (4) and is fixedly connected to a pushing plate (12).

3. A horizontal coating machine according to claim 2, characterized in that: A sealing gasket (13) is fixedly installed on the side of the push plate (12) near the processing chamber (2), and four movable sliders (14) are fixedly installed on the side of the push plate (12) away from the sealing gasket (13).

4. A horizontal coating machine according to claim 1, characterized in that: The rotating assembly includes a servo motor (15) fixedly mounted on one side of one of the support plates (4) by a bracket, and a pinion (16) is fixedly connected to the output end of the servo motor (15).

5. A horizontal coating machine according to claim 4, characterized in that: The outer wall of the small gear (16) is meshed with the large gear (17).

6. A horizontal coating machine according to claim 1, characterized in that: The clamping assembly includes a drive motor (18) fixedly installed on one side of one of the connecting plates (8), and the output end of the drive motor (18) is fixedly connected to a bidirectional lead screw (19).

7. A horizontal coating machine according to claim 1, characterized in that: Rubber pads (20) are fixedly installed on opposite sides of the two clamping plates (10).

8. A horizontal coating machine according to claim 1, characterized in that: A coating tank (21) is fixedly installed on the top of the coating table (1), and two warning lights (22) and a vacuum pump (23) are fixedly installed on the top of the processing chamber (2). A control panel (24) is fixedly installed on the front of the processing chamber (2).

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