A vacuum pump testing system

Abstract

The utility model provides a kind of vacuum pump test system, it is related to vacuum pump technical field.Specifically, the vacuum pump test system includes test cover, detection module, gas supply module, period test module and reading module.Wherein, test cover is used to connect with the import of the vacuum pump to be measured, to simulate the process chamber connected with the vacuum pump to be measured.And gas supply module, period test module and reading module are connected with test cover.Wherein, gas supply module is used to supply gas to test cover and monitor gas supply flow, to simulate the load condition of the vacuum pump to be measured in actual working scene. Reading module is used to read the vacuum degree of test cover, to facilitate the evaluation of the key performance indicators such as pumping efficiency and ultimate vacuum degree of the vacuum pump to be measured.And period test module is used to supply gas to test cover and simulate test environment, to carry out period test to the vacuum pump to be measured, to predict the service life of the vacuum pump to be measured, to formulate maintenance plan accordingly.

Description

Technical Field

[0001] This utility model relates to the field of vacuum pump technology, and more specifically, to a vacuum pump testing system. Background Technology

[0002] As a high-precision manufacturing equipment, the comprehensive performance testing of vacuum pumps after assembly is crucial. In particular, testing core indicators such as vacuum level, operating temperature, operating pressure, and operating current is an important basis for optimizing, evaluating, and verifying the design and manufacturing level of vacuum pumps.

[0003] However, the industry typically employs customized testing methods, with each manufacturer developing and assembling testing systems according to its own needs, resulting in a lack of a unified vacuum pump testing platform. This decentralized testing model is not only inefficient, but also makes it difficult to guarantee the accuracy and comparability of test results, thus hindering the further development and application of vacuum pump technology. Utility Model Content

[0004] As mentioned in the background section, the industry's fragmented testing methods and lack of a unified vacuum pump testing platform have resulted in low speed measurement efficiency and large error in the test results.

[0005] To address the aforementioned problems, this utility model provides a vacuum pump testing system that can conveniently, efficiently, and cost-effectively test and evaluate the vacuum pump under test, and comprehensively and accurately reflect the performance of the vacuum pump under test.

[0006] This utility model provides a vacuum pump testing system comprising a test hood, a detection module, a gas supply module, a periodic testing module, and a reading module. The test hood is connected to the inlet of the vacuum pump under test to simulate the process chamber connected to the pump, providing a relatively enclosed testing environment. The gas supply module, periodic testing module, and reading module are all connected to the test hood. The gas supply module supplies gas to the test hood and monitors the gas flow rate to simulate the load conditions of the vacuum pump under test in actual working scenarios. The reading module reads the vacuum level of the test hood; combined with the gas flow rate supplied by the gas supply module, key performance indicators such as pumping efficiency and ultimate vacuum of the vacuum pump under test can be evaluated. The periodic testing module supplies gas to the test hood and simulates the operating environment to perform periodic tests on the vacuum pump under test. It is understood that by setting up periodic tests and recording the performance of the vacuum pump under test in each cycle, the service life of the vacuum pump under test can be predicted, thereby enabling the development of a corresponding maintenance plan. Attached Figure Description

[0007] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0008] Figure 1 This is a schematic diagram of the vacuum pump testing system provided in this embodiment;

[0009] Figure 2 This is a schematic diagram of the gas supply module of the vacuum pump testing system provided in this embodiment;

[0010] Figure 3 This is a schematic diagram of the detection module of the vacuum pump testing system provided in this embodiment;

[0011] Figure 4 This is a schematic diagram of the structure of the test cover of the vacuum pump testing system provided in this embodiment;

[0012] Figure 5 This is a schematic diagram of the reading module of the vacuum pump testing system provided in this embodiment;

[0013] Figure 6 This is a schematic diagram of the calibration and zeroing module of the vacuum pump testing system provided in this embodiment;

[0014] Figure 7 This is a schematic diagram of the periodic testing module of the vacuum pump testing system provided in this embodiment;

[0015] Figure 8 This is a schematic diagram of the main control module of the vacuum pump testing system provided in this embodiment.

[0016] Icons: 10-Vacuum pump test system; 30-Vacuum pump under test; 31-Upper pump inlet pipe; 32-Upper pump exhaust pipe; 33-Lower pump exhaust pipe; 34-Upper pump motor; 35-Lower pump motor; 36-Upper pump stator; 37-Lower pump stator; 100-Test hood; 110-First vacuum gauge; 130-Connecting flange; 200-Gas supply module; 210-Gas supply assembly; 211-Flow meter; 213-Fourth control valve; 215-Gas supply pipe; 300-Reading module; 310-First controller; 330-Reading assembly; 331-Second vacuum gauge ; 333-Third control valve; 350-Main pipeline; 370-First control valve; 400-Calibration and zeroing module; 410-Second control valve; 430-Calibration pump; 431-Foreboard pump; 433-Main pump; 450-Second controller; 500-Period test module; 510-Orifice plate; 530-Fifth control valve; 550-Third controller; 600-Detection module; 610-Pressure sensor; 630-Temperature sensor; 650-Electrical parameter power analyzer; 700-Main control module; 710-Central control center; 750-Data logger. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0018] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0019] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0020] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0021] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0022] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0023] The overall structure, working principle, and technical effects of the vacuum pump testing system 10 provided by this utility model are described in detail below with reference to embodiments and accompanying drawings. Please refer to... Figure 1 This utility model provides a vacuum pump testing system 10, which can conveniently, efficiently and cost-effectively test and evaluate the vacuum pump 30 under test, and comprehensively and accurately reflect the performance of the vacuum pump 30 under test.

[0024] This vacuum pump testing system 10 includes a test shroud 100, a detection module 600, a gas supply module 200, a cycle testing module 500, and a reading module 300. The test shroud 100 is connected to the inlet of the vacuum pump 30 under test to simulate the process chamber connected to the vacuum pump 30, providing a relatively enclosed testing environment. In some embodiments, the test shroud 100 is selected based on the swept volume Vp of the vacuum pump under test during one compression cycle, choosing a test shroud 100 with a volume not less than five times Vp. Furthermore, the test shroud 100 is connected to the vacuum pump 30 under test via a connecting flange 130.

[0025] Based on this, the gas supply module 200, the periodic testing module 500, and the reading module 300 are all connected to the test chamber 100. The gas supply module 200 supplies gas to the test chamber 100 and monitors the gas flow rate to simulate the load conditions of the vacuum pump 30 under test in a real-world working environment. The reading module 300 reads the vacuum level of the test chamber 100; combined with the gas flow rate supplied by the gas supply module 200, key performance indicators such as the pumping efficiency and ultimate vacuum of the vacuum pump 30 under test can be evaluated. The periodic testing module 500 supplies gas to the test chamber 100 and simulates the test environment to perform periodic tests on the vacuum pump 30 under test. It is understood that by setting up periodic tests and recording the performance of the vacuum pump 30 under test during these tests, the service life of the vacuum pump 30 under test can be predicted, thereby enabling the development of a corresponding maintenance plan.

[0026] Please see Figure 2 To facilitate the evaluation of the performance of the vacuum pump 30 under test at different flow rates, the gas supply module 200 includes multiple gas supply components 210 for supplying different flow rates. These gas supply components 210 are connected to the test chamber 100. In some tests, the operator can select a specific flow rate gas supply component 210 to connect to the test chamber 100. In other tests, the operator can use a progressively increasing flow rate switching mechanism to connect multiple gas supply components 210 sequentially to the test chamber 100. That is, the operator can connect a low-flow-rate gas supply component 210 to the test chamber 100 as needed, obtain the corresponding curve, and then replace that gas supply component 210 with one capable of supplying a relatively higher flow rate. This process continues, connecting the gas supply components 210 sequentially to the test chamber 100 in ascending order of flow rate to test the performance of the vacuum pump 30 under different flow rates, i.e., to test the energy consumption and pumping speed of the vacuum pump 30 under different vacuum target values.

[0027] For example, in this test, by plotting the gas flow rate on the horizontal axis and the pumping speed and vacuum level on the vertical axis, the corresponding curves can be visually displayed, showing the performance changes of the vacuum pump 30 under different flow rates. Additionally, it should be noted that to comprehensively evaluate the performance of the vacuum pump under test, its pumping speed needs to be measured at different vacuum levels to obtain a complete pumping speed curve. Therefore, the supplied flow rates cover the required flow rates for all operating ranges from the ultimate vacuum level (i.e., the highest vacuum level) to atmospheric pressure (i.e., the lowest vacuum level).

[0028] Specifically, the gas supply assembly 210 includes a gas supply pipe 215, a flow meter 211 mounted on the gas supply pipe 215, and a fourth control valve 213. The gas supply pipe 215 is connected to the test chamber 100. The fourth control valve 213 controls the gas flow rate from the gas supply pipe 215 to the test chamber 100. That is, according to a preset flow target value, the opening of the fourth control valve 213 is adjusted to control the corresponding level of gas flow rate entering the test chamber 100. During this process, the flow meter 211 monitors the gas flow rate through the gas supply pipe 215 to ensure that the incoming gas flow rate reaches the required accuracy.

[0029] Please see Figure 3 The vacuum pump testing system 10 also includes a detection module 600, which is used to provide feedback on the operating parameters of the vacuum pump 30 under test, so as to promptly detect and handle abnormal situations while performing the aforementioned performance tests on the vacuum pump 30 under test. Specifically, the detection module 600 includes at least one of a pressure sensor 610, a temperature sensor 630, and an electrical parameter power analyzer 650. It can be understood that the pressure sensor 610, temperature sensor 630, and electrical parameter power analyzer 650 are used to provide feedback on the pressure information, temperature information, and current information of the vacuum pump 30 under test, respectively.

[0030] The pressure sensor 610 is installed on at least one of the upper pump inlet pipe 31, upper pump exhaust pipe 32, and lower pump exhaust pipe 33 of the vacuum pump under test 30. It should be noted that the upper pump exhaust pipe 32 is also the lower pump inlet pipe. Therefore, the pressure sensor 610 is used to acquire the intake / exhaust pressure information of the upper (or lower) pump of the vacuum pump under test 30. It is easy to understand that through the aforementioned exhaust pressure curve or intake pressure curve, the operating status of the vacuum pump under test 30 can be comprehensively monitored, and data support can be provided for process optimization.

[0031] Since the temperature sensor 630 can detect the temperature changes of key parts of the vacuum pump 30 under test in real time, the temperature sensor 630 is installed on at least one of the upper pump motor 34, lower pump motor 35, upper pump exhaust pipe 32, lower pump exhaust pipe 33, upper pump stator 36 and lower pump stator 37 of the vacuum pump 30 under test, so as to obtain the temperature curve of the corresponding component and evaluate the thermal stability of the corresponding component.

[0032] Similarly, the electrical parameter power analyzer 650 is electrically connected to at least one of the upper pump motor 34 and the lower pump motor 35 of the vacuum pump 30 under test, and detects the motor current and power of the upper pump motor 34 and / or the lower pump motor 35 in real time, evaluates the actual load of the upper pump motor 34 and / or the lower pump motor 35, and provides data basis for the testing of the vacuum pump 30 under test.

[0033] It should be noted that the aforementioned pressure sensor 610, temperature sensor 630, and electrical parameter power analyzer 650 can serve as auxiliary means for fault diagnosis. Specifically, while acquiring the pressure curve, temperature curve, and current curve, they can determine whether any abnormal pressure, temperature, or current conditions have occurred. Furthermore, it should be noted that these three types of sensors can be used in combination to more comprehensively evaluate the motor's operating status. For example, the combined application of pressure sensor 610 and temperature sensor 630 can assess the impact of temperature changes on pumping efficiency and vacuum level. The combined application of pressure sensor 610 and electrical parameter power analyzer 650 can determine whether the vacuum pump's pumping performance meets requirements under different currents.

[0034] In the testing process, distributed measurement methods are generally used to improve measurement accuracy and efficiency. Therefore, please refer to [link / reference needed]. Figure 4 and Figure 5 The vacuum pump testing system 10 also includes a first vacuum gauge 110 for reading the vacuum level of the test chamber 100. The reading module 300 includes at least two reading components 330 with different ranges. The first vacuum gauge 110 has a wider range and is used for preliminary measurements of the test chamber 100 to determine the approximate vacuum level range. The reading components 330 are used for subsequent precise measurements to provide more accurate vacuum level data. Therefore, the accuracy of any reading component 330 is higher than that of the first vacuum gauge 110, and the combined ranges of all reading components 330 at least cover the range of the first vacuum gauge 110. Optionally, the first vacuum gauge 110 is a Pirani vacuum gauge, whose range covers the entire range from atmospheric pressure to ultimate vacuum.

[0035] Based on the above, the reading module 300 also includes a first controller 310. The first controller 310 is communicatively connected to the first vacuum gauge 110 and all reading components 330, and is used to control the corresponding range of the reading component 330 to connect to the test chamber 100 based on the reading data from the first vacuum gauge 110. That is to say, in actual testing, the first vacuum gauge 110 is an indicating vacuum gauge, and its reading serves as a reference. The first controller 310 compares the reading of the first vacuum gauge 110 with the ranges of all reading components 330, causing the reading component 330 corresponding to the range containing that reading to connect to the test chamber 100. At this time, the reading component 330 can provide more accurate vacuum measurement data.

[0036] Additionally, it should be noted that in practical applications, the first vacuum gauge 110 can also be used to determine whether the motor of the vacuum pump 30 under test is correctly connected. Specifically, during the test, if the pointer of the first vacuum gauge 110 rotates in the direction of decreasing pressure, it indicates that the motor of the vacuum pump 30 under test is correctly connected; if the pointer of the first vacuum gauge 110 rotates in the direction of increasing pressure (or the pointer remains stationary), it indicates that the motor of the vacuum pump 30 under test is reversed.

[0037] Furthermore, the reading component 330 includes a second vacuum gauge 331 and a third control valve 333. It is understood that the range of the reading component 330 is specifically represented by the range of the second vacuum gauge 331. Therefore, corresponding to the foregoing, the accuracy of any second vacuum gauge 331 is higher than that of the first vacuum gauge 110, and the combined range of all second vacuum gauges 331 at least covers the range of the first vacuum gauge 110. Optionally, the second vacuum gauge 331 is a capacitive thin-film vacuum gauge or an ionization vacuum gauge. The third control valve 333 is connected between the test chamber 100 and the second vacuum gauge 331 and is communicatively connected to the first controller 310. That is, the third control valve 333, as an element in the reading component 330 responding to the first controller 310, switches the second vacuum gauge 331 and the test chamber 100 on and off under the action of the first controller 310, ensuring that the second vacuum gauge 331 with an appropriate range performs precise measurements and reduces measurement errors.

[0038] Please refer to it again. Figure 5 The reading module 300 also includes a main pipe 350. All reading components 330 are connected to the test chamber 100 via the main pipe 350, and a first control valve 370 is provided between the main pipe 350 and the test chamber 100. It is understood that the first control valve 370 is used to open and close the main pipe 350 and the test chamber 100. The reading components 330 are used to selectively connect to the main pipe 350 under the action of the first controller 310. That is, during the test, the first control valve 370 is opened, and the main pipe 350 and the test chamber 100 are connected. At this time, the air pressure inside the main pipe 350 is the air pressure inside the test chamber 100. Therefore, the first controller 310 controls the reading components 330 with appropriate ranges to connect to the main pipe 350, so as to achieve accurate measurement of the vacuum degree inside the test chamber 100 by reading the air pressure inside the main pipe 350.

[0039] In addition, the vacuum pump testing system 10 also includes a calibration and zeroing module 400 for calibrating the reading component 330. The calibration and zeroing module 400 includes a calibration pump 430 and a second controller 450, with a second control valve 410 located between the calibration pump 430 and the main pipeline 350. It is understood that due to long-term operation or contamination, the second vacuum gauge 331 in the reading component 330 may experience zero-point drift. Therefore, before the testing process, the second vacuum gauge 331 can be calibrated and zeroed using the calibration pump 430 to avoid measurement errors. In some specific examples, the main pipeline 350 can be evacuated by the calibration pump 430, and the second vacuum gauge 331 can be observed. For example, the main pipeline 350 can be evacuated to at least the maximum or minimum range of the second vacuum gauge 331. At this time, observe whether the test value of the second vacuum gauge 331 reaches the corresponding range value. If it does not reach the range value, it indicates that there is an error in the vacuum gauge. At this time, the vacuum gauge can be zeroed. For example, the vacuum gauge can be equipped with a zeroing button or adjustment component. The zeroing calibration of the vacuum gauge can be achieved by manually adjusting the zeroing button or adjustment component.

[0040] Furthermore, the ultimate vacuum degree of the calibration pump 430 is not less than the maximum vacuum range of the second vacuum gauge 331, so as to ensure that when the second controller 450 connects the calibration pump 430 and the main pipeline 350, the calibration pump 430 can make the gas pressure in the main pipeline 350 lower than the lowest range of all reading components 330, so as to avoid the pressure in the main pipeline 350 being too high and unable to reach the zero point of some reading components 330 with higher vacuum degrees.

[0041] Specifically, before testing, the first control valve 370 is closed and the second control valve 410 is opened, ensuring that only the calibration pump 430 is connected to the main pipeline 350. Then, the calibration pump 430 evacuates the main pipeline 350, causing the air pressure in the main pipeline 350 to be lower than the lowest range (i.e., the maximum vacuum range) of all reading components 330. After confirming the air pressure in the main pipeline 350, the reading of the second vacuum gauge 331 is observed. If the reading of the second vacuum gauge 331 corresponds to its lowest range, it indicates that the zero point of the second vacuum gauge 331 is accurate, and zeroing is not required. If the reading of the second vacuum gauge 331 does not correspond to its lowest range, it indicates that there is an error in the zero point of the second vacuum gauge 331, and the operator can manually zero it by pressing the zeroing button on the second vacuum gauge 331. Optionally, the calibration and zeroing module 400 includes a reference vacuum gauge, such as the first vacuum gauge 110, to confirm that the air pressure in the pipeline is lower than the lowest range of all reading components 330.

[0042] Please see Figure 6The calibration pump 430 is a pump set, including a backing pump 431 and a main pump 433. The backing pump 431 is connected to the main pump 433, and the main pump 433 is connected to the main pipeline 350 via a second control valve 410. It should be noted that the backing pump 431 is used for initial vacuuming, reducing the system pressure to the operating range of the main pump 433. Subsequently, the main pump 433 starts, further reducing the system pressure to achieve a vacuum state.

[0043] Optionally, the backing pump 431 may be an oil-sealed rotary vane pump or a diaphragm pump. The main pump 433 may be a turbomolecular pump. As mentioned above, since the backing pump 431 and the main pump 433 need to follow a strict startup sequence, the calibration and zeroing module 400 also includes a second controller 450 connected to the calibration pump 430. Specifically, the second controller 450 is communicatively connected to the backing pump 431 and the main pump 433 to control the start and stop of the backing pump 431 and the main pump 433 to ensure the normal operation of the calibration and zeroing process. In some embodiments, the calibration and zeroing module 400 also includes a UPS (Uninterruptible Power Supply), which is readily understood to prevent damage to the main pump 433 due to unexpected power outages.

[0044] In practical scenarios, the calibration and zeroing module 400 can be used in conjunction with the vacuum pump under test 30 to further improve zeroing efficiency and shorten zeroing time. Specifically, before the calibration pump 430 evacuates the main pipeline 350 to a level below the lowest range of all reading components 330, the vacuum pump under test 30 is used to pre-evacuate the main pipeline 350. During this process, the first control valve 370 needs to be opened, the second control valve 410 closed, and the vacuum pump under test 30 started to complete the pre-evacuation of the main pipeline 350. Furthermore, it should be noted that when only the calibration and zeroing module 400 and the reading module 300 are connected, the change in the reading of the reading component 330 within a preset time period can be used to determine whether there is any leakage between the calibration and zeroing module 400 and the reading module 300.

[0045] Similarly, the calibration and zeroing module 400 can also participate in the testing process, assisting the vacuum pump under test 30 to rapidly reduce the gas pressure inside the test chamber 100 to a specific value. Specifically, the first control valve 370 and the second control valve 410 are opened, and the calibration pump 430 and the vacuum pump under test 30 work together to evacuate air and rapidly reduce the gas pressure in the test chamber. When the gas pressure approaches the ultimate vacuum level achievable by the vacuum pump under test 30, the second control valve 410 is closed, stopping the calibration pump 430. At this point, the vacuum pump under test 30 continues to operate independently until it reaches its ultimate vacuum level. During this process, the evacuation rate data is recorded.

[0046] The periodic testing module 500 will now be described in detail. It should be noted that the periodic test performed by the periodic testing module 500 is a test method that simulates the actual process conditions of the user of the vacuum pump 30 under test to evaluate its service life. Specifically, this periodic test divides the predicted lifespan of the vacuum pump 30 under test into several periods, progressively testing the performance parameters within each period, thereby achieving a scientific assessment of its service life. It should be noted that throughout the entire periodic test, the vacuum pump 30 under test remains operational and will not be shut down.

[0047] Please see Figure 7 The periodic testing module 500 includes an orifice plate 510, a fifth control valve 530, and a third controller 550. The orifice plate 510 is used to regulate the gas flow rate entering the test chamber 100. For example, the gas flow rate can be controlled and adjusted by adjusting the orifice diameter of the orifice plate 510 or by using orifice plates 510 with different orifice diameters. The fifth control valve 530 is connected between the test chamber 100 and the orifice plate 510, and is used to control the on / off state between the test chamber 100 and the orifice plate 510 under the action of the third controller 550. It can be understood that the periodic testing module 500 can set and record parameters such as the orifice diameter of the orifice plate 510, the opening duration of the orifice plate 510, the closing duration of the orifice plate 510, and the number of cycles, simulating the actual process conditions of different users.

[0048] It is understood that each cycle includes two time periods. In one time period, the fifth control valve 530 is open, connecting the test chamber 100 and the orifice plate 510. At this time, the orifice plate 510 is open, continuously supplying gas to ensure the vacuum level inside the test chamber 100 reaches the set process vacuum level. This time period is the process time period. In the other time period, the fifth control valve 530 is closed, disconnecting the test chamber 100 and the orifice plate 510. At this time, the orifice plate 510 is closed, and no gas is supplied. This time period simulates the time when operators handle workpieces or perform other operations during actual applications. Additionally, during this time period, the vacuum pump 30 under test continues to evacuate the test chamber 100 to maintain this process vacuum level (pressure value). It is understood that the duration of the two time periods mentioned above is a fixed duration designed for the entire test cycle.

[0049] During periodic testing, the detection module 600 is activated to evaluate the performance changes of the vacuum pump 30 under test during actual operation and determine whether it has reached the preset attenuation standard. It is important to clarify that this service life not only represents the timeframe within which the vacuum pump 30 under test can operate stably within an acceptable performance range, but also directly corresponds to its maintenance cycle. In other words, after reaching this service life, necessary maintenance or repair operations must be performed on the vacuum pump 30 under test to ensure normal operation and stable performance. It should be further noted that in some embodiments, the preset attenuation standard can be determined by the pumping efficiency. That is, when any one of the temperature, pressure, or motor current at a preset location of the vacuum pump 30 under test exceeds a preset threshold, its performance is considered to have attenuated to an unacceptable level, and the preset attenuation standard is considered to have been reached.

[0050] Based on the above, that is, to explain, the cycle test module 500 simulates the actual working environment of the vacuum pump 30 under test to conduct accelerated life testing and obtain the maintenance cycle. Specifically, before the test begins, a suitable orifice plate 510 is selected and installed. Then, the test begins, the vacuum pump 30 under test is started, and the fifth control valve 530 is opened to maintain the vacuum level inside the test hood 100 within the preset process vacuum level range. Based on the process duration under actual working conditions, the fifth control valve 530 is set to remain open for a period of time and then automatically close; at the same time, based on the time required to change workpieces under actual working conditions, the fifth control valve 530 is set to remain closed for a period of time and then reopen. This cycle is repeated until, within a certain cycle, the detection module 600 in the aforementioned embodiment detects that at least one of the pressure, temperature, or motor current of the vacuum pump 30 under test at a preset position exceeds a set threshold, at which point it can be determined that the vacuum pump has reached the preset attenuation standard. Once the performance attenuation reaches this standard, the service life of the vacuum pump 30 under test can be calculated by the total number of cycles executed.

[0051] It should be noted that the selection of an orifice plate 510 with a suitable aperture needs to be based on two considerations: firstly, the specifications and performance of the vacuum pump 30 under test should be considered; secondly, the process vacuum requirements of the customer should be matched. Therefore, multiple orifice plates 510 with different apertures are configured in the cycle test module 500 of this application, so that testers can flexibly select according to actual test needs. In addition, it should be noted that the third controller 550 is a microcomputer time control unit. By executing its preset program parameters and recording relevant data, it can perform maintenance cycle tests under different harsh procedures to determine the maintenance cycle.

[0052] Furthermore, due to its simple structure, low cost, and high reliability, the orifice plate 510 has become the mainstream choice in industrial applications when repeatedly starting and stopping the vacuum pump 30 under test for periodic testing. However, in certain special scenarios, when a suitable orifice plate 510 is unavailable, the flow meter 211 in the gas supply assembly 210 may be considered as an alternative. However, considering the complex mechanical mechanism of the flow meter 211, it is prone to damage during the start-up and shutdown operations within the simulation cycle, leading to higher maintenance and replacement costs. Therefore, for both economic and reliability considerations, the orifice plate 510 remains the primary means of gas flow regulation during maintenance cycle testing.

[0053] In addition, to further optimize the operating efficiency and performance of the entire vacuum pump test system 10, please refer to [link / reference needed]. Figure 8 The vacuum pump testing system 10 also includes a main control module 700, which can collect, analyze and summarize key data such as power, temperature and vacuum level of the vacuum pump under test 30 in real time. At the same time, it can also complete the performance and life evaluation of the vacuum pump under test 30 by executing preset test programs and output the final test results.

[0054] Specifically, the main control module 700 is communicatively connected to the gas supply module 200, the reading module 300, the calibration and zeroing module 400, the detection module 600, and the periodic testing module 500, respectively, to acquire and record feedback signals from the aforementioned modules and output control commands to them accordingly. For example, the electrical parameter power analyzer 650 in the detection module 600 is used to detect, convert, and summarize the current and power values ​​of the upper pump motor 34 / lower pump motor 35 on the vacuum pump under test 30 in real time, and uploads the acquired / analyzed data to the central control center 710 accordingly.

[0055] Furthermore, the main control module 700 includes a central control center 710 and a data logger 750. The data logger 750 uploads the vacuum level of the vacuum pump 30 under test, data from each temperature sensor 630, and real-time data acquired by each pressure sensor 610 to the central control center 710. The central control center 710 stores a dedicated test program for the vacuum pump testing system 10 provided in this application. This test program includes a central main program, a test submodule for measuring the change in vacuum level of the vacuum pump 30 under test with pumping time, a test submodule for measuring the change in power consumption of the vacuum pump 30 under test at different pumping speeds, and a test submodule for measuring the maintenance cycle of the vacuum pump 30 under test, etc.

[0056] Based on the above, the central control center 710 can complete the corresponding test items and output the corresponding test results (graphics, colors, and text representing the test results, etc.) to the display screen by updating and comparing various data in real time and executing the corresponding programs / submodules stored internally (controlling the controller and control valve in the aforementioned embodiments). During the test, the central control center 710 can use a buzzer to realize fault alarm, and can also use the color change of the indicator light to indicate the test progress to the tester (e.g., orange indicator light indicates that the test is in progress; green indicates that the test has passed; red indicates that the test has failed).

[0057] In summary, this utility model provides a vacuum pump testing system 10, which includes a test hood 100, a detection module 600, a gas supply module 200, a periodic testing module 500, and a reading module 300. The test hood 100 is connected to the inlet of the vacuum pump 30 under test to simulate the process chamber connected to the vacuum pump 30, providing a relatively closed testing environment for the vacuum pump 30. The gas supply module 200, periodic testing module 500, and reading module 300 are all connected to the test hood 100. The gas supply module 200 supplies gas to the test hood 100 and monitors the gas flow rate to simulate the load conditions of the vacuum pump 30 under test in actual working scenarios. The reading module 300 reads the vacuum level of the test hood 100. Combined with the gas flow rate supplied by the gas supply module 200, key performance indicators such as the pumping efficiency and ultimate vacuum level of the vacuum pump 30 under test can be evaluated. The periodic testing module 500 supplies gas to the test chamber 100 and simulates the test environment to perform periodic testing on the vacuum pump 30 under test. It is understood that by setting up periodic tests and recording the performance of the vacuum pump 30 under test in each cycle, the service life of the vacuum pump 30 under test can be predicted, thereby enabling the development of a corresponding maintenance plan.

[0058] The above are merely specific embodiments of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A vacuum pump testing system, characterized in that, The system includes a test chamber (100), a gas supply module (200), a periodic test module (500), and a reading module (300). The test chamber (100) is connected to the inlet of the vacuum pump (30) under test. The gas supply module (200), the periodic test module (500), and the reading module (300) are all connected to the test chamber (100). The gas supply module (200) supplies gas to the test chamber (100) and monitors the gas flow rate. The reading module (300) reads the vacuum level of the test chamber (100). The periodic test module (500) supplies gas to the test chamber (100) and simulates the operating environment to perform periodic tests on the vacuum pump (30) under test.

2. The vacuum pump testing system according to claim 1, characterized in that, The vacuum pump testing system (10) further includes a first vacuum gauge (110) for reading the vacuum level of the test chamber (100). The reading module (300) includes a first controller (310) and at least two reading components (330) with different ranges. The accuracy of any of the reading components (330) is higher than that of the first vacuum gauge (110), and the ranges of all the reading components (330) are superimposed to at least cover the range of the first vacuum gauge (110). The first controller (310) is communicatively connected to the first vacuum gauge (110) and all the reading components (330), and is used to control the reading component (330) of the corresponding range to connect with the test chamber (100) according to the reading data of the first vacuum gauge (110).

3. The vacuum pump testing system according to claim 2, characterized in that, The reading component (330) includes a second vacuum gauge (331) and a third control valve (333); the second vacuum gauge (331) has a higher accuracy than the first vacuum gauge (110), and the third control valve (333) is connected between the test cover (100) and the second vacuum gauge (331), and is communicatively connected to the first controller (310).

4. The vacuum pump testing system according to claim 3, characterized in that, The reading module (300) includes a main pipe (350), and the reading components (330) are all connected to the test cover (100) through the main pipe (350). A first control valve (370) is provided between the main pipe (350) and the test cover (100).

5. The vacuum pump testing system according to claim 4, characterized in that, It also includes a calibration and zeroing module (400) for calibrating the reading component (330), the calibration and zeroing module (400) including a calibration pump (430) and a second controller (450) connected to the calibration pump (430), and a second control valve (410) is provided between the calibration pump (430) and the main pipeline (350).

6. The vacuum pump testing system according to claim 5, characterized in that, The ultimate vacuum of the calibration pump (430) is not less than the maximum vacuum range of the second vacuum gauge (331).

7. The vacuum pump testing system according to claim 1, characterized in that, The gas supply module (200) includes at least two gas supply components (210) for supplying different flow rates, and the gas supply components (210) are connected to the test cover (100).

8. The vacuum pump testing system according to claim 7, characterized in that, The gas supply assembly (210) includes a gas supply pipe (215), a flow meter (211) and a fourth control valve (213) disposed on the gas supply pipe (215); wherein the gas supply pipe (215) is connected to the test hood (100), the flow meter (211) is used to detect the gas flow rate through the gas supply pipe (215), and the fourth control valve (213) is used to control the gas flow rate from the gas supply pipe (215) to the test hood (100).

9. The vacuum pump testing system according to claim 1, characterized in that, The periodic test module (500) includes an orifice plate (510), a fifth control valve (530), and a third controller (550). The orifice plate (510) is used to adjust the gas flow rate entering the test hood (100). The fifth control valve (530) is connected between the test hood (100) and the orifice plate (510) and is used to control the on / off connection between the test hood (100) and the orifice plate (510) under the action of the third controller (550).

10. The vacuum pump testing system according to any one of claims 1 to 9, characterized in that, The vacuum pump testing system (10) further includes a detection module (600), which includes at least one of a pressure sensor (610), a temperature sensor (630), and an electrical parameter power analyzer (650); wherein the pressure sensor (610) is installed on at least one of the upper pump inlet pipe (31), the upper pump exhaust pipe (32), and the lower pump exhaust pipe (33) of the vacuum pump under test (30); the temperature sensor (630) is installed on at least one of the upper pump motor (34), the lower pump motor (35), the upper pump exhaust pipe (32), the lower pump exhaust pipe (33), the upper pump stator (36), and the lower pump stator (37) of the vacuum pump under test (30); and the electrical parameter power analyzer (650) is communicatively connected to at least one of the upper pump motor (34) and the lower pump motor (35) of the vacuum pump under test (30).

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