Vacuum furnace for preparing coated silicon material with easy cleaning

Abstract

The utility model relates to the field of coated silicon material preparation, concretely relates to a coated silicon material preparation vacuum furnace convenient to clean, including bearing platform, vacuum pump is installed in bearing platform upper side, the utility model discloses through the inside vacuum furnace shell moves along the outside vacuum furnace shell, can make the inside vacuum furnace shell and outside vacuum furnace shell open and shut, realize the manual cleaning of its inside conveniently, and in the moving process, the scraper ring one and the scraper ring two can utilize the power of movement, the inside wall of both is scraped to the residue, thereby guaranteeing the cleanness of both interiors, and the setting of sealing ring and sealing groove can effectively guarantee the air tightness of both, through this kind of mode can effectively guarantee the sealing property of vacuum furnace, and utilize the power when opening, clean the inside wall of both, thereby avoiding the residue of residue, and the vacuum furnace inside after starting is completely open, thereby facilitating the subsequent manual fine cleaning, thereby improving the subsequent coated silicon material preparation quality.

Description

Technical Field

[0001] This utility model relates to the field of coated silicon material preparation, specifically to a vacuum furnace for preparing coated silicon materials that is easy to clean. Background Technology

[0002] Silicon, as an optical coating material, possesses properties such as high reflectivity, high temperature resistance, corrosion resistance, and oxidation resistance. After coating the surface of optical devices, it can significantly improve the transmittance, reflectivity, and wear resistance of the devices. The preparation process requires the use of a vacuum furnace; a vacuum furnace for preparing coated silicon materials is an industrial device specifically designed for coating silicon materials in a vacuum environment.

[0003] A search revealed a utility model patent with publication number CN218179583U, specifically disclosing a vacuum furnace device for smelting and coating silicon materials using a single cavity. Belonging to the field of vacuum furnace technology, the device includes a furnace body, a ventilation duct fixed to one side of the furnace body, a vacuum pump fixed to the bottom of the ventilation duct, a dust collector fixed to the ventilation duct, a partition fixed to the inner wall of the dust collector, a cover rotatably connected to the top of the dust collector, a motor fixed to the top of the cover, a collection box on the inner wall of the dust collector, a support column snapped to the bottom of the collection box, the bottom of the support column being fixedly connected to the inner wall of the dust collector, and a ceramic membrane snapped to the top of the collection box. This vacuum furnace device for smelting and coating silicon materials using a single cavity, through the inclusion of a ceramic membrane and a transmission block, allows the ceramic membrane to filter out particulate matter in the air, while the rotating ceramic membrane also accelerates airflow, thus effectively preventing damage to the vacuum pump from particulate matter without disrupting production.

[0004] In the process of preparing coated silicon materials, existing vacuum furnaces leave a large amount of waste residue inside the furnace or on its inner wall. Due to the sealed nature of the vacuum furnace itself, it is difficult for cleaning equipment and personnel to effectively clean its interior, which greatly affects the subsequent preparation of coated silicon materials.

[0005] Therefore, it is necessary to invent a vacuum furnace for preparing coated silicon materials that is easy to clean in order to solve the above problems. Utility Model Content

[0006] The purpose of this invention is to provide a vacuum furnace for preparing coated silicon materials that is easy to clean. The inner vacuum furnace shell moves within the outer vacuum furnace shell, thereby achieving the purpose of opening and closing, and also facilitating the cleaning of the interior of both. During the movement, scraper rings one and two can be used to scrape off the residue on the inner walls of both, achieving an effective cleaning effect inside the vacuum furnace. This solves the problem in the prior art that the interior of the vacuum furnace is difficult to clean, affecting the quality of subsequent preparation and processing.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a vacuum furnace for preparing coated silicon materials that is easy to clean, comprising a support platform, a vacuum pump installed on one side above the support platform, connecting seats symmetrically installed on the support platform, an outer vacuum furnace shell installed on one side of a set of connecting seats, and a pipe installed between the outer vacuum furnace shell and the vacuum pump, an inner vacuum furnace shell sleeved inside the outer vacuum furnace shell, an inlet and outlet groove opened on the surface of the inner vacuum furnace shell, and a telescopic rod installed between the inner vacuum furnace shell and another set of connecting seats;

[0008] The drive assembly located on the outside of the inner vacuum furnace shell includes a connecting ring, which is sleeved and fixed on one side of the inner vacuum furnace shell. Multiple sets of positioning cylinders are installed in a ring-shaped arrangement on one side of the connecting ring.

[0009] The cleaning assembly disposed on the surface of the inner vacuum furnace shell includes through grooves, which are arranged in a ring on the surface of the inner vacuum furnace shell.

[0010] Preferably, the drive assembly further includes a screw, on which a positioning block is sleeved and fixed, and an annular groove is formed on the inner wall of the positioning cylinder.

[0011] Preferably, the screw is connected through the positioning cylinder, and the annular groove is slidably connected to the positioning block.

[0012] Preferably, a connecting ring is fitted and fixed to the surface of the outer vacuum furnace shell, and each set of screws is threaded through the connecting ring. A gear is installed at the end of each screw near the inner vacuum furnace shell.

[0013] Preferably, an annular slide rail is fixedly fitted onto the inner vacuum furnace shell, and a toothed ring is fitted onto the annular slide rail, with the toothed ring meshing with each set of gears.

[0014] Preferably, a positioning ring is installed on the inner wall of the toothed ring, and the positioning ring is slidably connected to the inside of the annular slide rail.

[0015] Preferably, a servo motor is symmetrically mounted on one side of the connecting ring, and a second gear is mounted on the output end of the servo motor, and the second gear meshes with the gear ring.

[0016] Preferably, a sealing ring is installed on the side of the connecting ring away from the servo motor, and a sealing groove is provided on one side of the mating ring, with the sealing groove fitting and connected to the sealing ring.

[0017] Preferably, the cleaning assembly further includes a scraper ring, which is sequentially sleeved and fixed on the surface of the inner vacuum furnace shell, and the scraper ring is in contact with the inner wall of the outer vacuum furnace shell.

[0018] Preferably, multiple sets of connecting rods are installed on the inner wall of the outer vacuum furnace shell, and the connecting rods penetrate the inner wall of the inner vacuum furnace shell. Each set of connecting rods has a scraper ring II installed at the end away from the outer vacuum furnace shell, and the scraper ring II is in contact with the inner wall of the inner vacuum furnace shell.

[0019] The technical effects and advantages provided by this utility model in the above technical solution are as follows:

[0020] The inner vacuum furnace shell moves along the inner side of the outer vacuum furnace shell, allowing both shells to open and close. This facilitates manual cleaning of the interior. During this movement, scraper rings one and two use the momentum to scrape away residue from the inner walls of both shells, ensuring cleanliness. The sealing rings and sealing grooves effectively guarantee airtightness. This method effectively ensures the vacuum furnace's sealing performance. The opening power cleans the inner walls, preventing residue buildup. Once opened, the interior of the vacuum furnace is completely open, facilitating subsequent fine manual cleaning and improving the quality of the resulting silicon coating. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0022] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0023] Figure 2 This is a schematic diagram of the overall planing structure of this utility model;

[0024] Figure 3 This is a schematic diagram of the internal vacuum furnace shell structure of this utility model;

[0025] Figure 4 This is a schematic diagram of the outer vacuum furnace shell structure of this utility model;

[0026] Figure 5 For the present utility model Figure 2 Enlarged structural diagram at point A in the middle;

[0027] Figure 6 For the present utility model Figure 2 Enlarged structural diagram at point B.

[0028] Explanation of reference numerals in the attached figures:

[0029] 001, Support platform; 002, Drive assembly; 003, Cleaning assembly; 101, Vacuum pump; 102, Connecting seat; 103, Outer vacuum furnace shell; 104, Inner vacuum furnace shell; 105, Telescopic rod; 106, Inlet / outlet chute; 201, Positioning cylinder; 202, Annular groove; 203, Screw; 204, Positioning block; 205, Gear one; 206, Annular slide rail; 207, Gear ring; 208, Servo motor; 209, Gear two; 210, Sealing ring; 211, Sealing groove; 212, Connecting ring; 213, Butt ring; 214, Positioning ring; 301, Through groove; 302, Scraper ring one; 303, Connecting rod; 304, Scraper ring two. Detailed Implementation

[0030] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0031] This utility model provides, for example Figure 1-6 The vacuum furnace for preparing coated silicon materials, which is easy to clean, includes a support platform 001. A vacuum pump 101 is installed on one side above the support platform 001. Connecting seats 102 are symmetrically installed on the support platform 001. An outer vacuum furnace shell 103 is installed on one side of a set of connecting seats 102. A pipe is installed between the outer vacuum furnace shell 103 and the vacuum pump 101. An inner vacuum furnace shell 104 is sleeved inside the outer vacuum furnace shell 103. The surface of the inner vacuum furnace shell 104 is provided with a material inlet / outlet groove 106. A telescopic rod 105 is installed between the inner vacuum furnace shell 104 and another set of connecting seats 102.

[0032] The vacuum pump 101 can vacuum dry the interior of the outer vacuum furnace shell 103 and the inner vacuum furnace shell 104, and the telescopic rod 105 can ensure that the inner vacuum furnace shell 104 moves outward along the inside of the outer vacuum furnace shell 103, thereby facilitating the cleaning of the interior of both and the addition of materials.

[0033] The drive assembly 002 located on the outside of the inner vacuum furnace shell 104 includes a connecting ring 212. The connecting ring 212 is sleeved and fixed on one side of the inner vacuum furnace shell 104. Multiple sets of positioning cylinders 201 are installed in a ring on one side of the connecting ring 212.

[0034] The cleaning assembly 003 disposed on the surface of the inner vacuum furnace shell 104 includes a through groove 301, which is distributed in a ring on the surface of the inner vacuum furnace shell 104.

[0035] By opening the through slot 301, the surface of the inner vacuum furnace shell 104 can be made hollow, which facilitates the smooth discharge of internal residue.

[0036] Furthermore, in the above structure, the drive assembly 002 also includes a screw 203, on which a positioning block 204 is sleeved and fixed, and an annular groove 202 is provided on the inner wall of the positioning cylinder 201.

[0037] Furthermore, in the above structure, the screw 203 is connected through the positioning cylinder 201, and the annular groove 202 is slidably connected to the positioning block 204.

[0038] The screw 203 can rotate stably inside the positioning cylinder 201 by the cooperation of the positioning block 204 and the annular groove 202.

[0039] Furthermore, in the above structure, a mating ring 213 is fixedly fitted onto the surface of the outer vacuum furnace shell 103, and each set of screws 203 is threaded through and screwed onto the mating ring 213. A gear 205 is installed on one end of each screw 203 near the inner vacuum furnace shell 104.

[0040] Furthermore, in the above structure, an annular slide rail 206 is fixedly fitted onto the inner vacuum furnace shell 104, and a toothed ring 207 is fitted onto the annular slide rail 206, and the toothed ring 207 meshes with each set of gears 205.

[0041] Furthermore, in the above structure, a positioning ring 214 is installed on the inner wall of the toothed ring 207, and the positioning ring 214 is slidably connected to the inside of the annular slide rail 206.

[0042] Through the meshing of gear 205 and gear ring 207, gear ring 207 can drive multiple sets of gears 205 to rotate simultaneously, thereby enabling screw 203 to cooperate with docking ring 213 to move inner vacuum furnace shell 104 outward within outer vacuum furnace shell 103. Furthermore, the cooperation between positioning ring 214 and annular slide rail 206 ensures stable rotation of gear ring 207.

[0043] Furthermore, in the above structure, a servo motor 208 is symmetrically installed on one side of the connecting ring 212, and a gear 209 is installed at the output end of the servo motor 208, and the gear 209 meshes with the gear ring 207.

[0044] The rotation of the servo motor 208 causes the gear 209 to drive the gear ring 207 to rotate.

[0045] Furthermore, in the above structure, a sealing ring 210 is installed on the side of the connecting ring 212 away from the servo motor 208, and a sealing groove 211 is opened on the side of the mating ring 213, and the sealing groove 211 is in close contact with the sealing ring 210.

[0046] The connecting ring 212 moves closer to the mating ring 213, thereby ensuring that the sealing ring 210 and the sealing groove 211 fit tightly together, thus guaranteeing the sealing between the outer vacuum furnace shell 103 and the inner vacuum furnace shell 104.

[0047] Furthermore, in the above structure, the cleaning component 003 also includes a scraper ring 302, which is sequentially sleeved and fixed on the surface of the inner vacuum furnace shell 104, and the scraper ring 302 is in contact with the inner wall of the outer vacuum furnace shell 103.

[0048] When the inner vacuum furnace shell 104 can move along the inside of the outer vacuum furnace shell 103 through the scraper ring 302, the inner wall of the outer vacuum furnace shell 103 is cleaned.

[0049] Furthermore, in the above structure, multiple sets of connecting rods 303 are installed on the inner wall of the outer vacuum furnace shell 103, and the connecting rods 303 penetrate the inner wall of the inner vacuum furnace shell 104. A scraper ring 304 is installed at the end of each set of connecting rods 303 away from the outer vacuum furnace shell 103, and the scraper ring 304 is in contact with the inner wall of the inner vacuum furnace shell 104.

[0050] The connecting rod 303 can keep the scraper ring 304 in position, so that when the inner vacuum furnace shell 104 moves, the scraper ring 304 can clean its inner wall.

[0051] The working principle of this practical application is as follows:

[0052] Refer to the instruction manual appendix Figure 1-6 By placing the material into the inner vacuum furnace shell 104 through the inlet / outlet chute 106, the servo motor 208 drives the gear 209 to rotate, which in turn drives the gear ring 207 to rotate. This causes the gear ring 207 to simultaneously rotate each set of gears 205, resulting in the screw 203 rotating within the positioning cylinder 201. This moves the inner vacuum furnace shell 104 towards the outer vacuum furnace shell 103, ultimately causing the sealing ring 210 and the sealing groove 211 to fit together, creating a seal. At this point, the vacuum pump 101 evacuates the space between them to create a vacuum, allowing for processing. After processing, the inner vacuum furnace shell 104 is moved back into place in the same manner. As the outer vacuum furnace shell 103 moves outward, scraper ring 302 scrapes the inner wall of the outer vacuum furnace shell 103. At the same time, scraper ring 304 scrapes the inner wall of the inner vacuum furnace shell 104 as the inner vacuum furnace shell 104 moves, thus effectively removing residue. The complete opening of the inner and outer vacuum furnace shells 104 and 103 also facilitates manual cleaning of their interiors. This method effectively ensures the sealing of the vacuum furnace and uses the power during opening to clean the inner walls of both, thus avoiding residue residue. Furthermore, the complete opening of the vacuum furnace interior after opening facilitates subsequent fine manual cleaning, thereby improving the quality of subsequent silicon coating material preparation.

[0053] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A vacuum furnace for preparing coated silicon materials that is easy to clean, comprising a support stage (001), characterized in that: A vacuum pump (101) is installed on one side above the support platform (001). Connecting seats (102) are symmetrically installed on the support platform (001). An outer vacuum furnace shell (103) is installed on one side of a set of connecting seats (102), and a pipe is installed between the outer vacuum furnace shell (103) and the vacuum pump (101). An inner vacuum furnace shell (104) is sleeved inside the outer vacuum furnace shell (103). An inlet and outlet groove (106) is opened on the surface of the inner vacuum furnace shell (104). A telescopic rod (105) is installed between the inner vacuum furnace shell (104) and another set of connecting seats (102). The drive assembly (002) located on the outside of the inner vacuum furnace shell (104) includes a connecting ring (212), which is sleeved and fixed on one side of the inner vacuum furnace shell (104). Multiple sets of positioning cylinders (201) are installed in a ring on one side of the connecting ring (212). The cleaning assembly (003) disposed on the surface of the inner vacuum furnace shell (104) includes a through groove (301) which is distributed in a ring on the surface of the inner vacuum furnace shell (104).

2. The vacuum furnace for preparing coated silicon materials that is easy to clean according to claim 1, characterized in that: The drive assembly (002) further includes a screw (203), on which a positioning block (204) is sleeved and fixed, and an annular groove (202) is provided on the inner wall of the positioning cylinder (201).

3. The vacuum furnace for preparing coated silicon materials that is easy to clean according to claim 2, characterized in that: The screw (203) is connected through the positioning cylinder (201), and the annular groove (202) is slidably connected to the positioning block (204).

4. The vacuum furnace for preparing coated silicon materials that is easy to clean according to claim 3, characterized in that: The outer vacuum furnace shell (103) is fitted with a docking ring (213), and each set of screws (203) is threaded through the docking ring (213). A gear (205) is installed on the end of each screw (203) near the inner vacuum furnace shell (104).

5. The vacuum furnace for preparing coated silicon materials that is easy to clean according to claim 4, characterized in that: An annular slide rail (206) is fixedly fitted onto the inner vacuum furnace shell (104), and a toothed ring (207) is fitted onto the annular slide rail (206), and the toothed ring (207) meshes with each set of gears (205).

6. The vacuum furnace for preparing coated silicon materials that is easy to clean according to claim 5, characterized in that: A positioning ring (214) is installed on the inner wall of the toothed ring (207), and the positioning ring (214) is slidably connected to the inside of the annular slide rail (206).

7. The vacuum furnace for preparing coated silicon materials that is easy to clean according to claim 1, characterized in that: A servo motor (208) is symmetrically installed on one side of the connecting ring (212). A gear (209) is installed at the output end of the servo motor (208), and the gear (209) meshes with the gear ring (207).

8. The vacuum furnace for preparing coated silicon materials that is easy to clean according to claim 4, characterized in that: A sealing ring (210) is installed on the side of the connecting ring (212) away from the servo motor (208), and a sealing groove (211) is provided on one side of the docking ring (213), and the sealing groove (211) is in close contact with the sealing ring (210).

9. The vacuum furnace for preparing coated silicon materials that is easy to clean according to claim 1, characterized in that: The cleaning assembly (003) also includes a scraper ring (302), which is sequentially sleeved and fixed on the surface of the inner vacuum furnace shell (104), and the scraper ring (302) is in contact with the inner wall of the outer vacuum furnace shell (103).

10. A vacuum furnace for preparing coated silicon materials that is easy to clean, as described in claim 9, characterized in that: Multiple sets of connecting rods (303) are installed on the inner wall of the outer vacuum furnace shell (103), and the connecting rods (303) penetrate the inner wall of the inner vacuum furnace shell (104). Each set of connecting rods (303) is equipped with a scraper ring (304) at the end away from the outer vacuum furnace shell (103), and the scraper ring (304) is in contact with the inner wall of the inner vacuum furnace shell (104).

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