High-temperature fastening structure for high-purity silicon carbide production equipment

Abstract

The utility model provides high temperature fastening structure for high -purity silicon carbide production equipment, through setting up lower hook in the bottom of support rod, setting up connecting rod in the top of support rod, form upper buckle mechanism, the sliding setting of connecting rod has the slider and upper hook, form lower buckle mechanism, lower hook and upper hook respectively hook in the limit slot of furnace body and furnace cover edge opening, by bolt fastening, the edge of furnace body and furnace cover is pressed tightly, the bottom of support rod opens the waist hole, the waist hole rotates on the pivot, and is fixed by the pivot, only needs to rotate support rod when installing, and the upper hook buckle is in the limit slot of furnace cover, and then the bolt is screwed tightly. Adopt the above technical scheme, adopt the mode of bolt tightening, and fix stable under the condition that thermal stress and pressure difference are big, compared with flange installation and fixation, operation is more convenient.

Description

Technical Field

[0001] This utility model relates to the field of container sealing technology, specifically to a quick-fastening structure for sealed containers. Background Technology

[0002] High-purity silicon carbide is typically produced in pressure vessels, such as CVD (Chemical Vapor Deposition) furnaces. Therefore, the openings need to be sealed and compressed to withstand thermal stress and pressure differences at high temperatures. Current methods usually employ flange connections, but these require aligning the bolt holes and installing each bolt and nut individually before tightening. While this provides good compression, the process is complex.

[0003] Chinese invention patent CN102175200A discloses a quick-pressing mechanism, including a handle bracket with a cavity, a handle with a cavity rotatably mounted at the rear of the handle bracket, and a positioning sleeve mounted at the front of the handle bracket. A pull rod is inserted into the cavity of the handle bracket, the rear end of the pull rod abuts against the handle, and the front end of the pull rod is connected to a tightening sleeve, which is inserted into the inner cavity of the positioning sleeve. An elastic element is installed between the pull rod and the handle bracket. In the free state, the rear end of the pull rod pushes the handle open, and in the pressed state, the front end of the pull rod pushes the front end of the tightening sleeve out of the positioning sleeve.

[0004] The above solution is convenient to operate as it only requires pulling the handle to lock. However, in applications such as CVD furnaces and other reactors, its reliability decreases under high and low pressure conditions due to the use of elastic components for reset. Therefore, a fastening structure that is both easy to operate and highly reliable is needed. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of the aforementioned technologies by proposing a high-temperature fastening structure for high-purity silicon carbide production equipment, aiming to solve the problem of how to both securely tighten and conveniently operate a sealed furnace body.

[0006] This utility model provides a high-temperature fastening structure for high-purity silicon carbide production equipment, including fastening of the furnace body and furnace cover of the furnace to be sealed. The fastening structure is used for a lower fastening mechanism for fastening the edge of the furnace body and an upper fastening mechanism for fastening the edge of the furnace cover. The upper fastening mechanism is sleeved on the lower fastening mechanism, and the top of the upper fastening mechanism is provided with a fastening mechanism for adjusting the distance between the upper fastening mechanism and the lower fastening mechanism.

[0007] Preferably, the edges of the furnace body and the furnace cover are provided with limiting grooves, and the two limiting grooves are arranged opposite to each other. The lower buckling mechanism includes a support rod, and the bottom end of the support rod is provided with a lower hook facing the side of the upper buckling mechanism. The lower hook is embedded in the limiting groove located on the edge of the furnace body. The top end of the support rod is provided with a connecting rod, and the upper buckling mechanism is sleeved on the connecting rod and locked by a fastening mechanism.

[0008] Preferably, the upper latching mechanism includes a slider with an upper hook facing the lower hook. The upper hook and lower hook are opposite each other and are embedded in a limiting groove located at the edge of the furnace cover. The slider has an opening through which a connecting rod passes. A fastening mechanism is provided at the top of the slider. The diameters of the connecting rod and the opening are smaller than the diameter of the support rod. The side of the slider away from the upper hook extends towards the bottom of the support rod. Both the upper and lower hooks have a first toothed groove on their surfaces to increase friction, and a second toothed groove is provided in the limiting groove. The first and second toothed grooves mesh with each other.

[0009] Preferably, the fastening mechanism includes a bolt, the top end of the connecting rod is threaded, the bolt is threaded to the connecting rod, and an anti-slip pad is provided between the bolt and the top wall of the slider.

[0010] Preferably, the end of the support rod away from the slider is provided with a waist hole, the furnace body is provided with a fixed seat, the fixed seat is provided with a rotating shaft, and the rotating shaft passes through the waist hole.

[0011] Compared with existing technologies, it has the following beneficial effects:

[0012] This utility model provides a high-temperature fastening structure for high-purity silicon carbide production equipment. It features a lower hook at the bottom of a support rod and a connecting rod at the top, forming an upper locking mechanism. A slider and the upper hook slide on the connecting rod, forming a lower locking mechanism. The lower and upper hooks respectively engage with limiting grooves on the edges of the furnace body and furnace cover. Bolts are used to tighten the edges of the furnace body and furnace cover. A waist hole is provided at the bottom of the support rod, rotating on and fixed by a rotating shaft. During installation, simply rotate the support rod to engage the upper hook with the limiting groove on the furnace cover, and then tighten the bolts. This technical solution, using bolt tightening, provides stable fixation even under high thermal stress and pressure differences; compared to flange installation, it is more convenient to operate. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only preferred embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1This is a schematic diagram of the high-temperature fastening structure for high-purity silicon carbide production equipment of this utility model;

[0015] Figure 2 This is a schematic diagram of the upper and lower latching mechanisms of this utility model;

[0016] Figure 3 This is a diagram showing the internal mechanisms of the upper and lower latching mechanisms of this utility model.

[0017] Figure 4 This is a schematic diagram of the upper buckle mechanism and fastening mechanism of this utility model;

[0018] Figure 5 This is a schematic diagram of the slider of this utility model.

[0019] In the diagram, 1-furnace body; 11-furnace frame; 111-fixed seat; 112-rotating shaft; 12-furnace cover; 13-limiting groove; 2-lower buckling mechanism; 21-support rod; 211-waist hole; 22-lower hook; 23-connecting rod; 3-upper buckling mechanism; 31-slider; 32-upper hook; 33-opening; 4-fastening mechanism; 41-bolt; 42-anti-slip pad; 51-first tooth groove; 52-second tooth groove. Detailed Implementation

[0020] To better understand the structure, functional features, and advantages of this utility model, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings:

[0021] Example:

[0022] like Figures 1 to 5 As shown, this utility model provides a high-temperature fastening structure for high-purity silicon carbide production equipment, including fastening of the furnace body 11 and furnace cover 12 of the furnace body 1 to be sealed. The fastening structure is used to fasten the lower fastening mechanism 2 for fastening the edge of the furnace body 11, and the upper fastening mechanism 3 for fastening the edge of the furnace cover 12. The upper fastening mechanism 3 is sleeved on the lower fastening mechanism 2, and the top of the upper fastening mechanism 3 is provided with a fastening mechanism 4 for adjusting the distance between the upper fastening mechanism 3 and the lower fastening mechanism 2.

[0023] The edges of the furnace body 11 and the furnace cover 12 are provided with limiting grooves 13, and the two limiting grooves 13 are arranged opposite to each other. The lower latching mechanism 2 includes a support rod 21. The bottom end of the support rod 21 is provided with a lower hook 22 facing the side of the upper latching mechanism 3. The lower hook 22 is embedded in the limiting groove 13 located on the edge of the furnace body 11. The top end of the support rod 21 is provided with a connecting rod 23. The upper latching mechanism 3 is sleeved on the connecting rod 23 and locked by the fastening mechanism 4.

[0024] High-purity silicon carbide is processed within a chemical vapor deposition (CVD) furnace (furnace 1) during its preparation. The negative pressure generated during processing allows external air to flow in, severely impacting the reaction and leading to product spoilage. Similarly, the leakage of flammable gases such as silane and propane from gaps in the furnace body 1 also poses a hazard. Therefore, the connection between the furnace body 11 and the furnace cover 12 must be tight. This application incorporates limiting grooves 13 along the edges of the furnace body 11 and furnace cover 12. The lower hook 22 of the lower locking mechanism 2 is embedded within the limiting groove 13, and the upper locking mechanism 3 slides on the lower locking mechanism 2. After the upper locking mechanism 3 is engaged within the limiting groove 13, it is locked in place by the fastening mechanism 4, thus securing the furnace body 11 and furnace cover 12. Compared to flange connections, which are not only cumbersome but also require aligning the holes on the flange and tightening the bolts 41 one by one, and need to be re-aligned each time the furnace is reused, this application offers greater ease of operation. A sealing gasket is typically required between the furnace body 11 and the furnace cover 12.

[0025] As another embodiment, such as Figure 1 and Figure 5 As shown, the upper latching mechanism 3 of this application includes a slider 31, on which an upper latch 32 is provided. The upper latch 32 faces the lower latch 22 and is opposite to it. The upper latch 32 is embedded in the limiting groove 13 located at the edge of the furnace cover 12. The slider 31 has an opening 33 through which a connecting rod 23 passes. A fastening mechanism 4 is provided at the top of the slider 31. The diameters of the connecting rod 23 and the opening 33 are both smaller than the diameter of the support rod 21. The side of the slider 31 away from the upper latch 32 extends towards the bottom of the support rod 21. The surfaces of both the upper latch 32 and the lower latch 22 are provided with a first toothed groove 51 for increasing friction. A second toothed groove 52 is provided in the limiting groove 13, and the first toothed groove 51 and the second toothed groove 52 mesh. The support rod 21 has a waist hole 211 at the end away from the slider 31. The furnace body 11 is provided with a fixing seat 111, and the fixing seat 111 is provided with a rotating shaft 112, which passes through the waist hole 211. The fastening mechanism 4 includes a bolt 41. The top end of the connecting rod 23 is provided with a thread, and the bolt 41 is threadedly connected to the connecting rod 23. An anti-slip pad 42 is provided between the bolt 41 and the top wall of the slider 31.

[0026] The slider 31 is provided with a downward-facing upper hook 32, which is integrally formed with the slider 31. The lower hook 22 is also integrally formed with the support rod 21. The upper hook 32 and the lower hook 22 correspond to each other and hook into the limiting grooves 13 on the edges of the furnace body 11 and the furnace cover 12, respectively. The opening 33 of the slider 31 allows the slider 31 to slide on the connecting rod 23, thereby adjusting the distance between the upper hook 32 and the lower hook 22 for easy tightening and loosening. The diameter of the connecting rod 23 and the opening 33 is smaller than the diameter of the support rod 21, which limits the movement of the slider 31 towards the support rod 21, so that the tightening degree of each clamping device is not much different. On the one hand, it can make the sealing gasket between the furnace cover 12 and the furnace body 11 relatively uniform in force, resulting in better sealing effect in long-term use. On the other hand, it can prevent excessive tightening from damaging the edges of the furnace cover 12 and the furnace body 11, and also prevent the support rod 21 from breaking due to excessive local stress. The slider 31, located away from the upper hook 32, extends towards the support rod 21 or the lower hook 22, increasing the coverage area of ​​the slider 31 on the support rod 21 and providing support. This reduces the probability of the support rod 21 breaking due to increased local stress after compression. The first toothed groove 51 and the second toothed groove 52 increase friction after compression, preventing the upper hook 32 or the lower hook 22 from slipping out of the limiting groove 13 under pressure. The fixed seat 111 is welded to the furnace body 11. The rotating shaft 112 can be welded to the fixed seat 111 or inserted into it like a pin. This application uses welding to improve connection stability under pressure. The waist hole 211 passes through the rotating shaft 112. When compression is required, the support rod 21 is rotated upwards, and the lower hook 22 and the upper hook 32 are embedded in the limiting groove 13. The bolt 41 is then tightened, further improving the ease of operation. The anti-slip pad 42 is existing technology and can be either toothed or toothless. The anti-slip pad 42 with toothed surfaces has stepped toothed surfaces, and toothed surfaces that mesh with the toothed surfaces are also engraved on the top of the slider 31 and the bolt 41. This reduces the loosening of the bolt 41 caused by vibration after tightening. This application uses an anti-slip pad 42 without toothed surfaces, with a surface roughness greater than that of the bolt 41. Because the furnace body 1 operates under negative pressure, the probability of the bolt 41 loosening is relatively small. If it is a positive high-pressure vessel such as a reactor, then an anti-slip pad 42 with toothed surfaces is required.

[0027] The above description is merely a preferred embodiment of this utility model and does not constitute any limitation on this utility model. Any person skilled in the art can make many possible variations and modifications to the technical solution of this utility model, or modify it into equivalent embodiments, without departing from the scope of the technical solution of this utility model. Therefore, any modifications, equivalent changes, and alterations made to the above embodiments based on the technology of this utility model without departing from the scope of the technical solution of this utility model shall fall within the protection scope of this technical solution.

Claims

1. A high-temperature fastening structure for high-purity silicon carbide production equipment, comprising fastening of the furnace body (11) and furnace cover (12) of the furnace body to be sealed (1), characterized in that... The fastening structure includes a lower fastening mechanism (2) for fastening the edge of the furnace body (11) and an upper fastening mechanism (3) for fastening the edge of the furnace cover (12). The upper fastening mechanism (3) is sleeved on the lower fastening mechanism (2). The top of the upper fastening mechanism (3) is provided with a fastening mechanism (4) for adjusting the distance between the upper fastening mechanism (3) and the lower fastening mechanism.

2. The high-temperature fastening structure for high-purity silicon carbide production equipment according to claim 1, characterized in that, The edges of the furnace body (11) and the furnace cover (12) are provided with limiting grooves (13), and the two limiting grooves (13) are arranged opposite to each other. The lower buckling mechanism (2) includes a support rod (21). The bottom end of the support rod (21) is provided with a lower hook (22) facing the side of the upper buckling mechanism (3). The lower hook (22) is embedded in the limiting groove (13) located on the edge of the furnace body (11). The top end of the support rod (21) is provided with a connecting rod (23). The upper buckling mechanism (3) is sleeved on the connecting rod (23) and locked by the fastening mechanism (4).

3. The high-temperature fastening structure for high-purity silicon carbide production equipment according to claim 2, characterized in that, The upper latching mechanism (3) includes a slider (31), on which an upper hook (32) is provided. The upper hook (32) faces the lower hook (22) and is opposite to the lower hook (22). The upper hook (32) is embedded in a limiting groove (13) located at the edge of the furnace cover (12). The slider (31) has an opening (33), through which the connecting rod (23) passes. The top of the slider (31) is provided with the fastening mechanism (4).

4. The high-temperature fastening structure for high-purity silicon carbide production equipment according to claim 3, characterized in that, The fastening mechanism (4) includes a bolt (41), the top end of the connecting rod (23) is threaded, the bolt (41) is threadedly connected to the connecting rod (23), and an anti-slip pad (42) is provided between the bolt (41) and the top wall of the slider (31).

5. The high-temperature fastening structure for high-purity silicon carbide production equipment according to claim 4, characterized in that, The diameters of the connecting rod (23) and the opening (33) are both smaller than the diameter of the support rod (21).

6. The high-temperature fastening structure for high-purity silicon carbide production equipment according to claim 5, characterized in that, The support rod (21) has a waist hole (211) at one end away from the slider (31). The furnace body (11) is provided with a fixed seat (111). The fixed seat (111) is provided with a rotating shaft (112). The rotating shaft (112) passes through the waist hole (211).

7. The high-temperature fastening structure for high-purity silicon carbide production equipment according to claim 3, characterized in that, The slider (31) extends toward the bottom end of the support rod (21) from the side away from the upper hook (32).

8. The high-temperature fastening structure for high-purity silicon carbide production equipment according to claim 7, characterized in that, The surfaces of the upper hook (32) and the lower hook (22) are provided with a first tooth groove (51) for increasing friction, and the limiting groove (13) is provided with a second tooth groove (52), and the first tooth groove (51) and the second tooth groove (52) mesh.

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