A filter chip sample test fixture

Abstract

The utility model provides a filter chip sample test fixture, including chip sample bearing unit, chip sample bearing unit includes upper clamping plate, lower clamping plate and the metal net of clamping between upper clamping plate and lower clamping plate, be equipped with a plurality of first through -hole of penetrating first clamping plate on upper clamping plate, a plurality of first through -hole are arranged on upper clamping plate and present grid array, be equipped with a plurality of second through -hole of penetrating second clamping plate on lower clamping plate, a plurality of second through -hole with a plurality of first through -hole one -to -one setting, first through -hole with the recess for placing chip sample that first through -hole bottom exposed metal net forms, first through -hole bottom exposed metal net is used for bearing at least one chip sample, the utility model discloses can avoid the problem that chip sample appears in the test process and is jammed, leaks sample, is blown and is destroyed by static electricity.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor device testing, and in particular to a test fixture for filter chip samples. Background Technology

[0002] When conducting environmental reliability tests such as UHAST (Unbiased Highly Accelerated Stress Test) and TC (Temperature Cycling) on ​​TFAP (Thin-Film Acoustic Packaging) filter samples, a sample test fixture is typically used to support the filter chip sample. The traditional sample test fixture consists of two metal plates. The lower metal plate has multiple rectangular recessed units arranged in a grid, with a through hole in the center of each unit. Corresponding through holes are also present on the upper and lower metal plates. The chip sample is placed in the recessed units of the lower metal plate, and the upper and lower metal plates are connected by bolts for the relevant tests. Because the filter chip sample has small dimensions (generally less than 2 mm in length and width, and typically less than 0.5 mm in thickness), the traditional fixture currently used has a small gap between the upper and lower metal plates, and the through hole diameter is relatively large. During the test, the sample may get stuck in the gap or leak out of the fixture. Furthermore, there is a risk that the sample may be blown out of the fixture when the equipment's fan is running during the test. Meanwhile, the TFAP filter chip sample filter is sensitive to electrostatic discharge. Traditional sample testing fixtures lack ESD (Electro-Static discharge) protection, and the sample is at risk of being damaged by electrostatic discharge. Utility Model Content

[0003] The purpose of this invention is to provide a test fixture for filter chip samples, which solves the problems of chip samples getting stuck, leaking, being blown away, and being damaged by static electricity during the test.

[0004] To achieve the above objectives, this utility model provides a filter chip sample testing fixture, characterized in that it includes a chip sample carrying unit, wherein the chip sample carrying unit includes an upper clamping plate, a lower clamping plate, and a metal mesh clamped between the upper clamping plate and the lower clamping plate;

[0005] The upper clamping plate is provided with a plurality of first through holes penetrating the first clamping plate, and the plurality of first through holes are arranged in a grid array on the upper clamping plate;

[0006] The lower clamping plate is provided with a plurality of second through holes penetrating the second clamping plate, and the plurality of second through holes are provided in a one-to-one correspondence with the plurality of first through holes;

[0007] The first through hole and the metal mesh exposed at the bottom of the first through hole form a groove for placing a chip sample, and the metal mesh exposed at the bottom of the first through hole is used to support at least one chip sample.

[0008] Optionally, the depth of the first through hole is greater than or equal to 4 mm.

[0009] Optionally, the upper clamping plate and the lower clamping plate have the same thickness, and the first through hole and the second through hole have the same depth, size and shape.

[0010] Optionally, both the upper clamping plate and the lower clamping plate are made of metal and have undergone surface oxidation treatment.

[0011] Optionally, the metal mesh may be made of stainless steel.

[0012] Optionally, the upper clamping plate has multiple first screw holes penetrating the upper clamping plate at its edge and in the spaced areas of the multiple first through holes, and the lower clamping plate has multiple second screw holes penetrating the lower clamping plate, with the multiple second screw holes corresponding one-to-one with the multiple first screw holes;

[0013] Each of the first screw holes and the corresponding second screw holes is provided with a clamping bolt. The upper clamping plate and the lower clamping plate are connected and fixed by a plurality of clamping bolts to clamp the metal mesh.

[0014] Optionally, at least one positioning pin is provided at each of the four corners of the upper surface of the upper clamping plate;

[0015] The lower clamping plate has at least one third screw hole at each of the four corners of its lower surface, and each third screw hole is opposite to a positioning pin.

[0016] Optionally, it also includes a connecting stud, one end of which is provided with an external thread that mates with the third threaded hole, and the other end of which is provided with a blind hole that mates with the locating pin.

[0017] Optionally, there are multiple chip sample carrier units, and the multiple chip sample carrier units are stacked on top of each other by means of the studs connecting the third screw hole and the positioning pin.

[0018] Optionally, the vertical spacing between adjacent chip sample carrier units is greater than or equal to 3 cm.

[0019] The beneficial effects of this utility model are as follows:

[0020] The filter chip sample test fixture of this utility model adopts a structure in which a metal mesh is clamped between upper and lower clamping plates. Since the metal mesh is fixed by the upper and lower clamping plates, gaps can be avoided between the metal mesh and the bottom of the first through hole on the upper clamping plate, thereby avoiding the problems of chip samples getting stuck or exposed outside the fixture during the test.

[0021] Furthermore, the depth of the first through hole on the upper clamp is greater than or equal to 4mm, so the depth of the groove used to place the chip sample is relatively deep, much greater than the thickness of the chip sample, which can effectively avoid the problem of the chip sample being blown out of the fixture during the test.

[0022] Furthermore, the second through hole on the lower clamp is exactly the same in depth, size and shape as the first through hole on the upper clamp, which can make the experimental environment (such as water vapor) on the upper and lower surfaces of the sample consistent, thus improving the accuracy of the test results; and the consistent structural dimensions of the upper and lower clamps also facilitate processing and assembly.

[0023] Furthermore, both the upper and lower metal plates undergo surface oxidation treatment, which increases the surface resistance of the upper and lower plates. Combined with the stainless steel mesh, this ensures that the overall surface resistance of the chip sample carrier unit meets ESD standards, preventing instantaneous discharge phenomena caused by the low resistance of stainless steel in contact with the sample, which could lead to sample damage.

[0024] Furthermore, the fixture can include multiple chip sample carrier units, which can be stacked vertically through studs, positioning pins on the upper clamping plate, and third screw holes on the lower clamping plate. This allows for simultaneous testing of multiple samples, improving equipment space utilization and testing efficiency. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a top view of a filter chip sample testing fixture according to an embodiment of the present invention.

[0027] Figure 2 This is a side view of a filter chip sample testing fixture according to an embodiment of the present invention.

[0028] Figure 3 For along Figure 1 Cross-sectional view along the BB direction.

[0029] Figure 4 This is a front view of a filter chip sample testing fixture according to an embodiment of the present invention.

[0030] Figure 5 for Figure 4 A magnified view of a section at point D. Detailed Implementation

[0031] The device of this utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this utility model will become clearer from the following description and drawings. However, it should be noted that the concept of the technical solution of this utility model can be implemented in many different forms and is not limited to the specific embodiments described herein. The drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.

[0032] The terms "first," "second," etc., used in the specification and claims are used to distinguish between similar elements and are not necessarily used to describe a particular order or chronological sequence. It should be understood that these terms, used so in this way, can be replaced, for example, to allow the embodiments of the present invention described herein to operate in a different order than that described or shown herein. If a component in one drawing is identical to a component in another drawing, although these components are easily identifiable in all drawings, this specification will not label all identical components in every drawing for the sake of clarity.

[0033] like Figure 1 As shown, this embodiment provides a filter chip sample test fixture, including a chip sample carrying unit. The chip sample carrying unit includes an upper clamping plate 1, a lower clamping plate 2, and a metal mesh 3 clamped between the upper clamping plate 1 and the lower clamping plate 2.

[0034] The upper clamping plate 1 is provided with a plurality of first through holes 4 penetrating the first clamping plate, and the plurality of first through holes 4 are arranged in a grid array on the upper clamping plate 1.

[0035] The lower clamping plate 2 is provided with a plurality of second through holes 5 penetrating the second clamping plate, and the plurality of second through holes 5 are provided in a one-to-one correspondence with the plurality of first through holes 4;

[0036] The first through hole 4 and the metal mesh 3 exposed at the bottom of the first through hole 4 form a groove for placing a chip sample. The metal mesh 3 exposed at the bottom of the first through hole 4 is used to support at least one chip sample.

[0037] Specifically, the fixture adopts a structure in which a metal mesh 3 is clamped between upper and lower clamping plates 2. Since the metal mesh 3 is fixed by the upper and lower clamping plates 2, gaps can be avoided between the metal mesh 3 and the bottom of the first through hole 4 on the upper clamping plate 1, thereby avoiding the problem of chip samples getting stuck and exposed outside the fixture during the test.

[0038] In this embodiment, the depth of the first through hole 4 is greater than or equal to 4 mm.

[0039] Specifically, the depth of the first through hole 4 on the upper clamping plate 1 is greater than or equal to 4mm. Therefore, the depth of the groove used to place the chip sample is relatively deep, much greater than the thickness of the chip sample, which can effectively avoid the problem of the chip sample being blown out of the fixture during the test.

[0040] In this embodiment, the upper clamping plate 1 and the lower clamping plate 2 have the same thickness, and the first through hole 4 and the second through hole 5 have the same depth, size and shape.

[0041] Specifically, the second through hole 5 on the lower clamping plate 2 has the same depth, size, and shape as the first through hole 4 on the upper clamping plate 1, which can make the experimental environment (such as water vapor) on the upper and lower surfaces of the sample consistent, thus improving the accuracy of the test results. In this embodiment, the first through hole 4 and the second through hole 5 are rounded squares. In other embodiments, other shapes of through holes, such as circular through holes, can also be used.

[0042] In this embodiment, preferably, the upper clamping plate 1 and the lower clamping plate 2 are both made of metal and have undergone surface oxidation treatment. The metal mesh 3 is made of stainless steel. Preferably, the mesh size of the metal mesh is 0.4*0.4mm and the wire diameter is about 0.3mm.

[0043] Specifically, both the upper and lower metal clamps undergo surface oxidation treatment, which increases the surface resistance of the upper and lower clamps 2. Combined with the stainless steel metal mesh 3, the overall surface resistance of the clamps and metal mesh 3 meets the ESD standard, preventing sample damage caused by instantaneous discharge when the stainless steel has insufficient resistance and comes into contact with the sample. Lower clamp 2, metal mesh 3.

[0044] In this embodiment, the upper clamping plate 1 has multiple first screw holes penetrating the upper clamping plate 1 at its edge and at the interval of the multiple first through holes 4, and the lower clamping plate 2 has multiple second screw holes penetrating the lower clamping plate 2, with the multiple second screw holes corresponding one-to-one with the multiple first screw holes;

[0045] Each of the first screw holes and the corresponding second screw holes is provided with a clamping bolt 6. The upper clamping plate 1 and the lower clamping plate 2 are connected and fixed by a plurality of clamping bolts 6 to clamp the metal mesh 3.

[0046] Specifically, by connecting the upper and lower clamping plates 2 with clamping bolts 6, it can be effectively ensured that there are no gaps between the upper and lower clamping plates 2 and the metal mesh 3, thereby preventing the sample from getting stuck in the middle of the plate.

[0047] In this embodiment, at least one positioning pin 7 is provided at each of the four corners of the upper surface of the upper clamping plate 1; at least one third screw hole is provided at each of the four corners of the lower surface of the lower clamping plate 2, and each third screw hole is opposite to a positioning pin 7.

[0048] It also includes a connecting stud 8, one end of which is provided with an external thread that mates with the third threaded hole, and the other end of which is provided with a blind hole that mates with the locating pin 7.

[0049] In this embodiment, there are multiple chip sample carrier units, which are stacked vertically by means of the studs connecting the third screw hole and the positioning pin 7. Preferably, the vertical spacing between adjacent chip sample carrier units is greater than or equal to 3 cm.

[0050] Specifically, by setting positioning pins 7 at the four corners of the upper surface of the upper clamping plate 1 and setting third screw holes at the four corners of the lower surface of the lower clamping plate 2, and using studs with external threads at one end and blind holes at the other end to cooperate with the positioning pins 7 and the third screw holes, multiple chip sample carrier units can be stacked vertically, thereby enabling simultaneous testing of multiple samples, improving equipment space utilization and testing efficiency.

[0051] In summary, the filter chip sample test fixture of this embodiment can avoid problems such as jamming, leakage, being blown away, and being damaged by static electricity during the test. It can also realize the simultaneous testing of multiple samples, thus improving the test efficiency.

[0052] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A sample testing fixture for filter chips, characterized in that, The chip sample carrier unit includes an upper clamping plate, a lower clamping plate, and a metal mesh clamped between the upper clamping plate and the lower clamping plate. The upper clamping plate is provided with a plurality of first through holes penetrating the first clamping plate, and the plurality of first through holes are arranged in a grid array on the upper clamping plate; The lower clamping plate is provided with a plurality of second through holes penetrating the second clamping plate, and the plurality of second through holes are provided in a one-to-one correspondence with the plurality of first through holes; The first through hole and the metal mesh exposed at the bottom of the first through hole form a groove for placing a chip sample, and the metal mesh exposed at the bottom of the first through hole is used to support at least one chip sample.

2. The filter chip sample test fixture according to claim 1, characterized in that, The depth of the first through hole is greater than or equal to 4 mm.

3. The filter chip sample test fixture according to claim 2, characterized in that, The upper clamping plate and the lower clamping plate have the same thickness, and the first through hole and the second through hole have the same depth, size and shape.

4. The filter chip sample test fixture according to claim 1, characterized in that, Both the upper and lower clamping plates are made of metal and have undergone surface oxidation treatment.

5. The filter chip sample test fixture according to claim 1, characterized in that, The metal mesh is made of stainless steel.

6. The filter chip sample test fixture according to claim 1, characterized in that, The upper clamping plate has multiple first screw holes penetrating the upper clamping plate at its edge and in the spaced areas between the multiple first through holes. The lower clamping plate has multiple second screw holes penetrating the lower clamping plate. The multiple second screw holes correspond one-to-one with the multiple first screw holes. Each of the first screw holes and the corresponding second screw holes is provided with a clamping bolt. The upper clamping plate and the lower clamping plate are connected and fixed by a plurality of clamping bolts to clamp the metal mesh.

7. The filter chip sample test fixture according to claim 1, characterized in that, At least one positioning pin is provided at each of the four corners of the upper surface of the upper clamping plate; The lower clamping plate has at least one third screw hole at each of the four corners of its lower surface, and each third screw hole is opposite to a positioning pin.

8. The filter chip sample test fixture according to claim 7, characterized in that, It also includes a connecting stud, one end of which is provided with an external thread that mates with the third threaded hole, and the other end of which is provided with a blind hole that mates with the locating pin.

9. The filter chip sample testing fixture according to claim 8, characterized in that, The chip sample carrier unit is a plurality of units, and the plurality of chip sample carrier units are stacked on top of each other by means of the studs, the third screw hole and the positioning pin.

10. The filter chip sample test fixture according to claim 9, characterized in that, The vertical spacing between adjacent chip sample carrier units is greater than or equal to 3 cm.

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