Photovoltaic sheet exposure device

Abstract

The utility model provides a kind of photovoltaic wafer exposure device, it is related to photovoltaic wafer processing equipment technical field.Photovoltaic wafer exposure device includes bearing assembly, operating mechanism, first positioning mechanism, second positioning mechanism and exposure mechanism.Bearing assembly includes feeding rack and discharging rack, feeding rack and discharging rack are used to place flower basket, first positioning mechanism is used to adjust photovoltaic wafer to preset attitude, second positioning mechanism is used to drive photovoltaic wafer to exposure position, and exposure mechanism is used to expose photovoltaic wafer.Visible, through the stable support provided by bearing assembly, the automatic transmission realized by operating mechanism, the accurate positioning completed by first positioning mechanism and second positioning mechanism, and the high-precision exposure realized by exposure mechanism, the synergistic effect, not only realizes automatic exposure process, but also improves the precision and consistency of photovoltaic wafer exposure process, and significantly improves production efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and more specifically, to a photovoltaic wafer exposure device. Background Technology

[0002] In the manufacturing process of solar photovoltaic cells, the exposure process is one of the key steps, which directly affects the photoelectric conversion efficiency and overall performance of the photovoltaic cells.

[0003] However, in practice, when photovoltaic cells are placed in the exposure equipment, positional deviations can easily occur due to inaccurate positioning or external vibrations. This deviation not only causes the photolithographic pattern to deviate from the predetermined design but can also lead to localized underexposure or overexposure, resulting in quality issues such as pattern distortion and reduced resolution. These problems ultimately affect the accuracy of the electrode patterns on the photovoltaic cells, reducing the cell's conversion efficiency and lifespan. Utility Model Content

[0004] The purpose of this invention is to provide a photovoltaic cell exposure device that can solve the exposure quality problem caused by photovoltaic cell misalignment in the prior art, ensure accurate alignment and stable exposure, and improve product quality and production efficiency.

[0005] The embodiments of this utility model are implemented as follows:

[0006] In a first aspect, this utility model provides a photovoltaic cell exposure device, including a support component, an operating mechanism, a first positioning mechanism, a second positioning mechanism, and an exposure mechanism;

[0007] The supporting component includes an loading rack and a unloading rack, both of which are used to place flower baskets; the operating mechanism is used to transfer the photovoltaic cells placed in the flower baskets to the first positioning mechanism, the second positioning mechanism, and the flower basket located on the unloading rack in sequence; the first positioning mechanism is used to adjust the photovoltaic cells to a preset posture; the second positioning mechanism is used to move the photovoltaic cells to the exposure position; and the exposure mechanism is used to expose the photovoltaic cells.

[0008] In an optional embodiment, the first positioning mechanism includes a first driving member for driving the photovoltaic cell to displace and rotate along at least two horizontal directions.

[0009] In an optional embodiment, the first positioning mechanism further includes a first adsorption element for adsorbing photovoltaic cells, and the first driving element is connected to the first adsorption element for driving the first adsorption element to move and rotate along at least two horizontal directions.

[0010] In an optional embodiment, the first positioning mechanism further includes an image acquisition component electrically connected to the first driving component. The image acquisition component is used to acquire the position information of the photovoltaic cell, and the first driving component is used to drive the first adsorption component to shift or rotate according to the position information, so that the photovoltaic cell is adjusted to a preset posture.

[0011] In an optional embodiment, the second positioning mechanism includes a second driving member for driving the photovoltaic cell to move in a vertical direction and at least two horizontal directions.

[0012] In an optional embodiment, the second positioning mechanism further includes a second adsorption member for adsorbing the photovoltaic cell, and a second driving member for driving the second adsorption member to move in a vertical direction and at least two horizontal directions.

[0013] In an optional embodiment, the second positioning mechanism further includes a lifting member, which is movably inserted through the second adsorption member to drive the photovoltaic cell to rise and fall.

[0014] In an optional embodiment, the exposure mechanism includes a laser emission source and an optical component, wherein the laser emission source exposes the photovoltaic cell through the optical component.

[0015] In an optional embodiment, the operating mechanism includes at least two robotic arms, wherein at least one of the robotic arms is used to transfer the photovoltaic cells in the flower basket to the first positioning mechanism and the second positioning mechanism in sequence, and at least another robotic arm is used to transfer the photovoltaic cells placed in the second positioning mechanism to the flower basket located on the unloading rack.

[0016] In an optional embodiment, the supporting assembly further includes a clamping member, which is provided on both the loading rack and the unloading rack, and is used to fix the flower basket.

[0017] The beneficial effects of the photovoltaic cell exposure device provided in this embodiment of the invention include: after the photovoltaic cell is picked up from the basket by the operating mechanism, it is first placed in the first positioning mechanism. The first positioning mechanism controls the horizontal displacement and rotation of the photovoltaic cell to ensure that it is in a standard preset posture. Then, the operating mechanism transfers the photovoltaic cell to the second positioning mechanism to ensure that the operating mechanism picks up the photovoltaic cell at the same position in the first positioning mechanism each time. This ensures that the operating mechanism can place the photovoltaic cell at the same position on the second positioning mechanism, thus effectively solving the problem of misalignment caused by initial position deviation. The second positioning mechanism then moves the photovoltaic cell with the adjusted posture to the exposure position. Its multi-degree-of-freedom motion capability allows the photovoltaic cell to be accurately positioned in the exposure area. Finally, the exposure mechanism performs the exposure operation on the photovoltaic cell. Through the cooperation of the laser light source and the optical system, the transfer of micron-level or even nanometer-level grid patterns is achieved, which significantly improves the photoelectric conversion efficiency of the photovoltaic cell. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 This is a first-view structural schematic diagram of the photovoltaic cell exposure device provided in an embodiment of the present utility model;

[0020] Figure 2 This is a schematic diagram of the photovoltaic cell exposure device provided in an embodiment of the present invention from a second perspective.

[0021] Figure 3 This is one of the partial structural schematic diagrams of the photovoltaic cell exposure device provided in the embodiments of this utility model;

[0022] Figure 4 This is the second partial structural schematic diagram of the photovoltaic cell exposure device provided in an embodiment of the present invention.

[0023] Icons: 10-Photovoltaic wafer exposure device; 100-Carrier component; 110-Loading rack; 120-Unloading rack; 130-Basket; 140-Clamping component; 200-Operating mechanism; 210-Robotic arm; 300-First positioning mechanism; 310-First driving component; 320-First adsorption component; 330-Image acquisition component; 400-Second positioning mechanism; 410-Second driving component; 420-Second adsorption component; 430-Lifting component; 500-Exposure mechanism; 510-Laser emission source; 520-Optical component; 20-Photovoltaic wafer. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0026] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0027] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0028] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0029] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0030] In the manufacturing process of solar photovoltaic cells, the exposure process is one of the key steps, directly affecting the photoelectric conversion efficiency and overall performance of the photovoltaic cell. However, in actual operation, when the photovoltaic cell is placed in the exposure equipment, positional deviation can easily occur due to inaccurate positioning or external vibrations. This deviation not only causes the photolithographic pattern to deviate from the predetermined design, but may also cause localized underexposure or overexposure, resulting in quality problems such as pattern distortion and reduced resolution. These problems ultimately affect the accuracy of the electrode pattern on the photovoltaic cell, reducing the cell's conversion efficiency and lifespan.

[0031] Furthermore, correcting misalignment typically requires additional calibration steps or manual intervention, which not only increases production costs but also extends production cycles and reduces efficiency. Moreover, frequent manual adjustments may introduce new errors, further impacting the consistency and stability of product quality.

[0032] Therefore, there is an urgent need to provide an improved solar photovoltaic cell exposure device to solve the exposure quality problems caused by photovoltaic cell misalignment in existing technologies, ensure precise alignment and stable exposure, improve product quality and production efficiency, and meet the urgent needs of modern photovoltaic manufacturing for high-precision and high-efficiency production. This solution should be able to achieve automated and precise positioning control, reduce human intervention, and improve the overall automation level and reliability of the production line.

[0033] Please see Figures 1 to 4 The photovoltaic wafer exposure device 10 provided in this embodiment of the present invention includes a support component 100, an operating mechanism 200, a first positioning mechanism 300, a second positioning mechanism 400, and an exposure mechanism 500.

[0034] The supporting component 100 includes an loading rack 110 and an unloading rack 120, both of which are used to place the basket 130 to provide a stable supporting foundation for the automatic transfer of the photovoltaic panels 20. It should be noted that the basket 130 is a support that can simultaneously load multiple photovoltaic panels 20.

[0035] In order to ensure the stability of the flower basket 130 on which the photovoltaic panels 20 are placed, the supporting component 100 also includes a clamping member 140. Both the loading rack 110 and the unloading rack 120 are provided with clamping members 140, which are used to clamp and fix the flower basket 130.

[0036] The operating mechanism 200 is responsible for transferring the photovoltaic cell 20 from the basket 130 in the loading rack 110 to the first positioning mechanism 300 and the second positioning mechanism 400, and finally feeding it into the basket 130 in the unloading rack 120, realizing fully automatic loading and unloading of the photovoltaic cell 20. The first positioning mechanism 300 is used to adjust the photovoltaic cell 20 to a preset posture, the second positioning mechanism 400 is used to move the photovoltaic cell 20 to the exposure position, and the exposure mechanism 500 is used to expose the photovoltaic cell 20.

[0037] In practical applications, since the position of the photovoltaic sheet 20 is uncertain when it is placed in the flower basket 130, if the operating mechanism 200 directly transfers the photovoltaic sheet 20 in the flower basket 130 to the second positioning mechanism 400 for exposure, the position of the photovoltaic sheet 20 on the second positioning mechanism 400 may be offset.

[0038] Therefore, in this embodiment of the utility model, after the operating mechanism 200 picks up the photovoltaic panel 20 from the flower basket 130, the photovoltaic panel 20 is first placed in the first positioning mechanism 300. The first positioning mechanism 300 controls the horizontal displacement and rotation of the photovoltaic panel 20 so that the photovoltaic panel 20 is in a standard preset posture. Then, the operating mechanism 200 transfers the photovoltaic panel 20 to the second positioning mechanism 400. This ensures that the operating mechanism 200 picks up the photovoltaic panel 20 from the first positioning mechanism 300 each time, thus ensuring that the operating mechanism 200 can place the photovoltaic panel 20 in the same position on the second positioning mechanism 400. This effectively solves the problem of misalignment caused by initial position deviation.

[0039] The second positioning mechanism 400 moves the photovoltaic cell 20, which has already been adjusted in orientation, to the exposure position. Its multi-degree-of-freedom motion capability allows the photovoltaic cell 20 to be precisely positioned in the exposure area. The exposure mechanism 500 then performs the exposure operation on the photovoltaic cell 20 at this position. Through the cooperation of the laser light source and the optical system, it achieves the transfer of micron- or even nanometer-level wire grid patterns, significantly improving the photoelectric conversion efficiency of the photovoltaic cell 20.

[0040] Therefore, the photovoltaic cell exposure device 10 provided by this utility model embodiment, through the synergistic effect of the support component 100 providing stable support, the operating mechanism 200 realizing automated transmission, the first positioning mechanism 300 and the second positioning mechanism 400 completing precise positioning, and the exposure mechanism 500 realizing high-precision exposure, not only realizes the automated exposure process, but also improves the accuracy and consistency of the photovoltaic cell 20 exposure process, and significantly improves production efficiency.

[0041] Furthermore, the first positioning mechanism 300 includes a first driving component 310, a first adsorption component 320, and an image acquisition component 330.

[0042] The first driving element 310 is used to drive the photovoltaic cell 20 to move and rotate in at least two horizontal directions.

[0043] During the driving process, the first driving component 310 can drive the adsorption component and the photovoltaic cell 20 it adsorbs to move linearly in at least two horizontal directions, and at the same time has the ability to rotate around a central axis or eccentric axis. This multi-degree-of-freedom motion capability allows the photovoltaic cell 20 to dynamically adjust according to the actual position information fed back by the image acquisition system, so as to correct the positioning inaccuracy caused by deviations in the transportation process or initial placement errors.

[0044] It is understandable that the structure of the first driving component 310 can be selected according to specific needs, such as existing technical solutions like a linear motor module combined with a rotary table, as long as it can achieve the function of driving the photovoltaic cell 20 to move and rotate in at least two horizontal directions. The structure of the first driving component 310 is not specifically limited here.

[0045] The first adsorption element 320 is used to adsorb the photovoltaic cell 20. The first driving element 310 is connected to the first adsorption element 320 and is used to drive the first adsorption element 320 to move and rotate in at least two horizontal directions.

[0046] In this embodiment, the first adsorption element 320, as a contact element that directly acts on the photovoltaic cell 20, can be a component with vacuum adsorption function, so as to stably grasp the photovoltaic cell 20 without damaging its surface.

[0047] Therefore, a rigid or semi-rigid connection is formed between the first adsorption member 320 and the first driving member 310 to ensure accurate action response and high positioning accuracy during the driving process. After receiving the control signal, the first driving member 310 can drive the first adsorption member 320 to move linearly in at least two horizontal directions and can cooperate to complete the rotation action, thereby enabling the photovoltaic cell 20 adsorbed by it to achieve multi-degree-of-freedom attitude adjustment.

[0048] In this way, the photovoltaic cell 20 can be precisely corrected according to the actual position deviation before entering the exposure process, ensuring that the operating mechanism 200 can grasp the photovoltaic cell 20 in a fixed position and in a preset posture, and ensure that the photovoltaic cell 20 is transferred and placed in the same position on the second positioning mechanism 400 in a preset posture, thereby improving the consistency and reliability of the overall exposure process.

[0049] The image acquisition unit 330 is electrically connected to the first driving unit 310. The image acquisition unit 330 is used to acquire the position information of the photovoltaic cell 20. The first driving unit 310 is used to drive the first adsorption unit 320 to move or rotate according to the position information so that the photovoltaic cell 20 is adjusted to a preset posture.

[0050] Specifically, the image acquisition unit 330, as an optical detection device, typically includes a high-resolution camera, a light source system, and related image processing modules, capable of capturing the two-dimensional or three-dimensional position of the photovoltaic cell 20 in space in real time. Therefore, the image data acquired by the image acquisition unit 330, after analysis by the control system, can generate deviation parameters of the photovoltaic cell 20's current posture relative to the target posture. Upon receiving these deviation parameters, the first driving unit 310 automatically executes corresponding compensation actions according to a preset algorithm, driving the first adsorption unit 320 to move along at least two horizontal directions, possibly accompanied by rotation, thereby causing the photovoltaic cell 20 to complete posture correction.

[0051] Furthermore, the second positioning mechanism 400 includes a second driving member 410, a second adsorption member 420, and a lifting member 430.

[0052] The second driving member 410 is used to drive the photovoltaic cell 20 to move in the vertical direction and at least two horizontal directions, and the lifting member 430 is movably inserted into the second adsorption member 420.

[0053] In this embodiment, the second positioning mechanism 400 can move the photovoltaic cell 20, whose posture has been adjusted, into the exposure position and displace it according to the exposure requirements. For example, the second driving component 410 has multi-axis linkage capability, enabling the photovoltaic cell 20 to move up and down in the vertical direction (i.e., the Z-axis direction) and to make fine adjustments in at least two horizontal directions (usually the X-axis and Y-axis directions). Therefore, the flexible displacement capability of the second positioning mechanism 400 in three-dimensional space allows the photovoltaic cell 20 to accurately match the focusing plane of the optical system during the exposure process, ensuring the clarity and consistency of the exposure pattern, thereby improving the exposure quality.

[0054] Similarly, in order to ensure the stability of the photovoltaic cell 20 under the drive of the second drive member 410, the second adsorption member 420 is used to adsorb the photovoltaic cell 20, and the second drive member 410 is used to drive the second adsorption member 420 to move in the vertical direction and at least two horizontal directions.

[0055] It is worth mentioning that the operating mechanism 200 picks up and transfers the photovoltaic panel 20 in a lifting manner. Therefore, in order to ensure that the operating mechanism 200 places the photovoltaic panel 20 in the preset position of the second adsorption member 420, before exposure, the top of the lifting member 430 extends out of the second adsorption member 420. The operating mechanism 200 places the photovoltaic panel 20 on the lifting member 430. After the operating mechanism 200 withdraws, the lifting member 430 lowers and drops the photovoltaic panel 20 onto the second adsorption member 420, thereby adsorbing the photovoltaic panel 20. At this time, the operating mechanism 200 can pick up a new photovoltaic panel 20 to be exposed from the basket 130 and repeat the above actions. After exposure, the lifting member 430 drives the photovoltaic panel 20 to rise away from the surface of the second adsorption member 420. At this time, the operating mechanism 200 can lift the photovoltaic panel 20 from below and transfer the exposed photovoltaic panel 20 to the unloading rack 120 for placing the exposed photovoltaic panel 20 in the basket 130.

[0056] Furthermore, the exposure mechanism 500 includes a laser emission source 510 and an optical component 520, wherein the laser emission source 510 exposes the photovoltaic cell 20 through the optical component 520.

[0057] In this embodiment, the laser emission source 510, as an energy output component, can generate a beam with high directionality, monochromaticity, and coherence, ensuring high resolution and focusing capability during the exposure process. The optical component 520 is used to shape, guide, focus, or split the laser beam to adapt it to current process requirements and form an exposure pattern that meets design requirements on the surface of the photovoltaic cell 20.

[0058] Specifically, the synergistic cooperation between the laser emitter 510 and the optical component 520 not only improves the stability and energy utilization of the optical path system, but also enhances the consistency and repeatability of the exposure pattern, reducing processing errors caused by environmental disturbances or equipment drift. Furthermore, the modular design of the optical component 520 facilitates rapid replacement and adjustment under different process parameters, improving the flexibility and applicability of the equipment.

[0059] Furthermore, the operating mechanism 200 includes at least two robotic arms 210, wherein at least one robotic arm 210 is used to transfer the photovoltaic panels 20 in the flower basket 130 to the first positioning mechanism 300 and the second positioning mechanism 400 in turn, and at least another robotic arm 210 is used to transfer the photovoltaic panels 20 placed in the second positioning mechanism 400 to the flower basket 130 located on the unloading rack 120.

[0060] In this embodiment, each robotic arm 210 has multi-degree-of-freedom motion capability, enabling it to flexibly extend and rotate in three-dimensional space, and to grasp or release photovoltaic panels 20 through end effectors (such as adsorption components).

[0061] Specifically, one robotic arm 210 is used for loading operations, which sequentially sends the photovoltaic panels 20 in the flower basket 130 of the loading rack 110 to the first positioning mechanism 300 for attitude correction, and further transfers them to the second positioning mechanism 400 for exposure; another robotic arm 210 is used for unloading operations, which removes the photovoltaic panels 20 from the second positioning mechanism 400 after exposure and accurately places them in the flower basket 130 at the corresponding position of the unloading rack 120.

[0062] Therefore, by using at least two robotic arms 210, the transfer process of the photovoltaic wafer 20 within the exposure device achieves a high degree of automation and path optimization, reducing the waiting time and control complexity caused by frequent switching actions of a single robotic arm 210. Simultaneously, the clear division of tasks among multiple robotic arms 210 and their ability to operate in parallel improve the overall production efficiency of the equipment. Furthermore, this distributed operation mode enhances the system's fault tolerance; if one robotic arm 210 malfunctions or requires maintenance, other robotic arms 210 can still maintain a portion of the production process within a certain range, avoiding capacity loss due to a complete line downtime.

[0063] Of course, in other embodiments of this utility model, a greater number of robotic arms 210 can be used for loading operations, and similarly, a greater number of robotic arms 210 can be used for unloading operations. The number of robotic arms 210 is not specifically limited here.

[0064] In summary, this utility model provides a photovoltaic wafer exposure device 10, which achieves stable support through the support component 100, automated transmission through the operating mechanism 200, precise positioning through the first positioning mechanism 300 and the second positioning mechanism 400, and high-precision exposure through the exposure mechanism 500. This not only realizes the automated exposure process, but also improves the accuracy and consistency of the photovoltaic wafer 20 exposure process, and significantly improves production efficiency.

[0065] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A photovoltaic wafer exposure apparatus, characterized in that, It includes a carrier component, an operating mechanism, a first positioning mechanism, a second positioning mechanism, and an exposure mechanism; The supporting component includes an loading rack and a unloading rack, both of which are used to place flower baskets; the operating mechanism is used to transfer the photovoltaic cells placed in the flower baskets to the first positioning mechanism, the second positioning mechanism, and the flower basket located on the unloading rack in sequence; the first positioning mechanism is used to adjust the photovoltaic cells to a preset posture; the second positioning mechanism is used to move the photovoltaic cells to the exposure position; and the exposure mechanism is used to expose the photovoltaic cells.

2. The photovoltaic wafer exposure apparatus according to claim 1, characterized in that, The first positioning mechanism includes a first driving member, which is used to drive the photovoltaic cell to move and rotate along at least two horizontal directions.

3. The photovoltaic wafer exposure apparatus according to claim 2, characterized in that, The first positioning mechanism further includes a first adsorption element for adsorbing photovoltaic cells, and a first driving element connected to the first adsorption element for driving the first adsorption element to move and rotate along at least two horizontal directions.

4. The photovoltaic wafer exposure apparatus according to claim 3, characterized in that, The first positioning mechanism further includes an image acquisition component, which is electrically connected to the first driving component. The image acquisition component is used to acquire the position information of the photovoltaic cell, and the first driving component is used to drive the first adsorption component to shift or rotate according to the position information, so that the photovoltaic cell is adjusted to a preset posture.

5. The photovoltaic wafer exposure apparatus according to claim 1, characterized in that, The second positioning mechanism includes a second driving member, which is used to drive the photovoltaic cell to move in a vertical direction and at least two horizontal directions.

6. The photovoltaic wafer exposure apparatus according to claim 5, characterized in that, The second positioning mechanism further includes a second adsorption element, which is used to adsorb the photovoltaic cell, and the second driving element is used to drive the second adsorption element to move in the vertical direction and at least two horizontal directions.

7. The photovoltaic wafer exposure apparatus according to claim 6, characterized in that, The second positioning mechanism also includes a lifting member, which is movably inserted through the second adsorption member to drive the photovoltaic cell to rise and fall.

8. The photovoltaic wafer exposure apparatus according to claim 1, characterized in that, The exposure mechanism includes a laser emission source and optical components, and the laser emission source exposes the photovoltaic cell through the optical components.

9. The photovoltaic wafer exposure apparatus according to claim 1, characterized in that, The operating mechanism includes at least two robotic arms, wherein at least one of the robotic arms is used to transfer the photovoltaic panels in the flower basket to the first positioning mechanism and the second positioning mechanism in sequence, and at least another robotic arm is used to transfer the photovoltaic panels placed in the second positioning mechanism to the flower basket located on the unloading rack.

10. The photovoltaic wafer exposure apparatus according to claim 1, characterized in that, The supporting component also includes a clamping member, which is provided on both the loading rack and the unloading rack. The clamping member is used to fix the flower basket.

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