A motion platform and welding apparatus

Abstract

The application belongs to the technical field of processing and relates to a motion platform and a welding device, which comprises a base, a workbench slidingly arranged on the base and a driving device; the driving device comprises a driving motor, a stator of the driving motor is slidingly connected to the base, one end of a rotor of the driving motor is connected to the workbench to drive the workbench to move, and the other end of the rotor is slidingly connected to the stator or the base. According to the technical scheme, the rotor is slidingly connected to the stator or the base, so that the rigidity of the rotor can be improved and the motion stability can be improved. In addition, the sliding arrangement of the stator makes the reaction force received by the driving device not directly act on the base, so that the impact of the driving device on the base when the driving device is stressed can be reduced, the stability of the workbench as a whole is improved, and the positioning accuracy of the motion platform is improved.

Description

Technical Field

[0001] This application relates to the field of processing technology, and more specifically, to a motion platform and welding equipment. Background Technology

[0002] Wire bonding technology is widely used in the semiconductor packaging field. In the existing technology, wire bonding machines include a motion platform. The stability of the drive motor and the worktable in the motion platform will affect the welding quality. Currently, the worktable in the motion platform is directly connected to the mover. When the worktable is driven by the mover, the reaction force generated will act on the mover of the drive motor and affect its stability, which in turn affects the stability of the worktable. This will affect the positioning accuracy of the motion platform, and thus affect the welding quality of the wire bonding machine. Utility Model Content

[0003] The technical problem to be solved by the embodiments of this application is that the reaction force generated by the moving parts in the motion platform will act on the linear motor and affect the positioning accuracy of the motion platform.

[0004] To address the aforementioned technical problems, this application provides a motion platform, including a base, a worktable slidably disposed on the base, and a driving device.

[0005] The driving device includes a drive motor, the stator of which is slidably connected to the base, and one end of the mover of which is connected to the worktable to drive the worktable to move, and the other end is slidably connected to the stator or the base, or the other end is suspended and engaged with the stator.

[0006] In one embodiment, the other end of the mover is slidably connected to the base; wherein...

[0007] The stator has a cavity, the base is connected to a connecting seat that extends into the cavity, and the mover is connected to the connecting seat via a first guide rail assembly;

[0008] The first guide rail assembly includes a pair of first guide rails and at least a pair of first sliders disposed on the first guide rails, each of the first sliders being connected to the mover.

[0009] Furthermore, the connecting seat is independent of the base and is fixedly connected to the base;

[0010] Alternatively, the connecting seat and the base can be integrally formed.

[0011] Furthermore, the width of the side of the connecting seat facing the moving element is greater than the width of the moving element, and the width direction of the moving element is perpendicular to the direction of movement of the moving element; and / or,

[0012] The connecting seat extends to a position below the central axis of the stator, and the central axis is parallel to the direction of motion of the mover.

[0013] Furthermore, the mover is also connected to the inner wall of the stator via a second guide rail assembly; the structure of the second guide rail assembly is the same as that of the first guide rail assembly.

[0014] In one embodiment, the other end of the mover is slidably connected to the stator; wherein...

[0015] The stator has a cavity, and the mover is connected to the inner wall of the stator in the cavity via a first guide rail assembly;

[0016] The first guide rail assembly includes a pair of first guide rails and at least a pair of first sliders disposed on the first guide rails, each of the first sliders being connected to the mover.

[0017] Furthermore, the first guide rail assembly has multiple components, and the mover has multiple surfaces facing the inner wall of the stator, each surface being connected to the inner wall of the stator via a first guide rail assembly.

[0018] Furthermore, the motion platform also includes vibration damping components;

[0019] The vibration damping assembly includes a vibration damping bracket, a vibration damping element, and a vibration damping plate connected in sequence. The vibration damping bracket is connected to the base and located outside the stator, and the vibration damping plate is connected to the stator.

[0020] Furthermore, the vibration damping bracket is integrally formed with the base; and / or,

[0021] The damping plate is integrally formed with the stator.

[0022] To address the aforementioned technical problems, this application provides a welding device, which includes the aforementioned motion platform.

[0023] Compared with the prior art, the embodiments of this application have the following main advantages:

[0024] When the mover of the drive device of this application pushes the worktable, the rigidity of the mover can be improved by sliding the mover with the stator or the base, thereby improving the motion stability. In addition, the sliding arrangement of the stator ensures that the reaction force on the drive device does not act directly on the base, which can reduce the overall impact of the drive device on the base when it is under force, which is conducive to improving the overall stability of the worktable and thus improving the positioning accuracy of the motion platform. Attached Figure Description

[0025] To more clearly illustrate the solutions in this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the structure of a motion platform provided in one embodiment of this application;

[0027] Figure 2 This is a schematic diagram of the structure of a motion platform provided in another embodiment of this application;

[0028] Figure 3 For this application Figure 2 Top view of the motion platform shown;

[0029] Figure 4 For this application Figure 3 Sectional view along the middle AA.

[0030] Figure label:

[0031] 10-Base, 11-Connecting seat, 20-Workbench, 31-Stator, 31a-Cavity, 32-Motor, 33-First guide rail assembly, 40-Vibration damping assembly, 41-Vibration damping bracket, 42-Vibration damping component, 43-Vibration damping plate. Detailed Implementation

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs; the terminology used herein in the specification of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application; the terms "comprising" and "having," and any variations thereof, in the specification, claims, and foregoing drawings of this application are intended to cover non-exclusive inclusion. The terms "first," "second," etc., in the specification, claims, or foregoing drawings of this application are used to distinguish different objects, not to describe a particular order.

[0033] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0034] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings.

[0035] This application provides a motion platform, such as... Figure 1 As shown, the motion platform includes a base 10, a worktable 20 slidably disposed on the base 10, and a drive device;

[0036] The driving device includes a drive motor, the stator 31 of which is slidably connected to the base 10, and the mover 32 of which is connected at one end to the worktable 20 to drive the worktable 20 to move, and at the other end slidably connected to the stator 31.

[0037] In this embodiment, when the mover 32 of the drive device pushes the worktable 20, the rigidity of the mover 32 can be improved by sliding the mover 32 and the stator 31. When the mover 32 is subjected to a reaction force, vibration can be effectively suppressed, and the stability of the mover 32 can be improved. In addition, the sliding arrangement of the stator 31 ensures that the reaction force on the drive device does not directly act on the base 10, which can reduce the impact of the drive device on the base 10 when it is subjected to force, which is beneficial to improving the stability of the worktable 20, thereby improving the overall positioning accuracy of the motion platform.

[0038] In one embodiment, the stator 31 has a cavity 31a, and the mover 32 is connected to the inner wall of the stator 31 within the cavity 31a via a first guide rail assembly 33. The first guide rail assembly 33 includes a pair of first guide rails (not shown) and at least one pair of first sliders (not shown) disposed on the first guide rails, each of which is connected to the mover 32. In this embodiment, the mover 32 and stator 31 are rigidly connected. This direct connection optimizes the force transmission path, shortens the kinematic chain, and the symmetrical layout of the dual guide rails significantly improves the bending and torsional resistance of the mover 32, thereby increasing its stiffness and ensuring a more balanced inertia among the components, thus improving the stability of the worktable 20.

[0039] In a specific embodiment, the stator 31 has an inner bottom wall on the side facing the base 10, and the paired first guide rails in the first guide rail assembly 33 are fixed parallel to the inner bottom wall. In this embodiment, each of the first sliders is evenly distributed on the end face of the mover 32, which can improve the motion stability of the mover 32.

[0040] In other embodiments, the first guide rail assembly 33 may also be disposed on the inner top wall or inner side wall of the cavity 31a of the stator 31, or multiple first guide rail assemblies 33 may be disposed on the inner wall surface. Specifically, the mover 32 has multiple surfaces facing the inner wall of the stator 31, and each surface is connected to the inner wall of the stator 31 through a first guide rail assembly 33, thereby guiding the movement of the mover 32 from different directions to improve the movement stability of the mover 32.

[0041] In another embodiment of this application, such as Figure 2 As shown, different Figure 1 The motion platform shown in this embodiment has one end of the drive motor 32 connected to the worktable 20 to drive the worktable 20 to move, and the other end slidably connected to the base 10.

[0042] In this embodiment, the mover 32 is independently slidably connected to the base 10. On the one hand, it can provide multi-directional constraints for the mover 32, simultaneously improving axial stiffness and resistance to lateral impact. When the mover 32 is subjected to external force, it can effectively suppress vibration and improve the stability of the mover 32's movement, thereby helping to improve the overall positioning accuracy. On the other hand, it can also decouple the mover 32 from the stator 31, forming a spatially separated double-layer motion chain with the stator 31. By physically isolating and cutting off the direct vibration transmission path between the mover 32 and the stator 31, the working frequency ranges of the mover 32 and the stator 31 are effectively separated, suppressing the risk of system resonance and further improving the positioning accuracy of the motion platform.

[0043] In this embodiment, the stator 31 has a cavity 31a, and the base 10 is connected to a connecting seat 11 extending into the cavity 31a. The mover 32 is connected to the connecting seat 11 via a first guide rail assembly 33. The first guide rail assembly 33 includes a pair of first guide rails and at least one pair of first sliders (not shown) disposed on the first guide rails, each of the first sliders being connected to the mover 32. In this embodiment, each of the first sliders is evenly distributed on the end face of the mover 32, which can improve the motion stability of the mover 32. At the same time, the symmetrical layout of the double guide rails can significantly improve the bending and torsional resistance of the mover 32, thereby improving the stiffness of the mover 32 and making the inertia of each component more balanced, thus improving the stability of the motion platform.

[0044] In one embodiment, the connecting seat 11 is independent of the base 10 and is fixedly connected to the base 10, facilitating disassembly and replacement.

[0045] In another embodiment, the connecting seat 11 is integrally formed with the base 10, which can simplify the installation of the overall structure and the connecting seat 11 has higher stability, which is beneficial to improving the overall stability of the motion platform.

[0046] In one embodiment, the width of the side of the connecting seat 11 facing the mover 32 (the aforementioned end face) is greater than the width of the mover 32, and the width direction of the mover 32 is perpendicular to the direction of movement of the mover 32. Specifically, as follows... Figure 3 and Figure 4 As shown in the figure, the arrow W indicates the width direction, and the M direction indicates the movement direction of the mover 32. By making the width of the end face of the connecting seat 11 greater than the width of the mover 32, the connection stability of the mover 32 can be improved.

[0047] In one embodiment, the end face of the connecting seat 11 that connects to the first guide rail assembly 33 is located in the lower center of the stator 31 or the cavity 31a to ensure the movement space of the mover 32.

[0048] Specifically, such as Figure 4 As shown, the connecting seat 11 extends to a position below the central axis B of the stator 31. The central axis is parallel to the direction of movement of the mover 32. While ensuring the movement space of the mover 32, the center of gravity of the connecting seat 11 can be lowered, thereby improving stability.

[0049] In one embodiment, while the mover 32 is slidably connected to the base 10, the mover 32 can also be slidably connected to the stator 31. Specifically, the mover 32 is also connected to the inner wall of the stator 31 through a second guide rail assembly (not shown). The structure of the second guide rail assembly is the same as that of the first guide rail assembly 33, thereby further improving the movement stability of the mover 32.

[0050] Based on the above embodiments, other structures of the motion platform will be described below.

[0051] In one embodiment, such as Figures 1 to 3 As shown, the drive device also includes at least one vibration damping component 40;

[0052] The vibration damping assembly 40 includes a vibration damping bracket 41, a vibration damping element 42, and a vibration damping plate 43 connected in sequence. The vibration damping bracket 41 is connected to the base 10 and located on the outside of the stator 31, and the vibration damping plate 43 is connected to the stator 31.

[0053] Specifically, the damping plate 43 is plate-shaped, and the plate-shaped structure is perpendicular to the direction of motion M of the stator 32. On both sides of the plate-shaped structure, each side is connected to the damping bracket 41 through the damping element 42. The damping element 42 has the function of damping and absorbing energy. Initially, the damping elements 42 on both sides of the damping plate 43 are in a balanced state. When the stator 31 is subjected to a reaction force and moves, this balance is broken. The damping element 42 on one side is compressed and the one on the other side is stretched, thereby generating a restoring force that causes the stator 31 to reciprocate until it returns to the balanced state.

[0054] In this embodiment, the damping element 42 can be formed by a combination of a flexible element and a damping element, wherein the flexible element is a spring or rubber, and the damping element is a damper or a buffer.

[0055] In one embodiment, the vibration damping bracket 41 can be integrally formed with the base 10 and located on one side of the stator 31, which can simplify the installation of the overall structure.

[0056] In one embodiment, the damping plate 43 can be integrally formed with the stator 31, which can simplify the installation of the overall structure.

[0057] In this embodiment, the worktable 20 can be a rotary motor ball screw drive platform, or a voice coil motor, linear motor drive platform, etc.

[0058] In one embodiment, the motion platform may also include multiple other drive devices (not shown) and have a corresponding number of worktables. Each worktable is connected to each drive device in a one-to-one correspondence, and the worktables are slidably connected to each other. By setting two or more drive devices, more flexible motion control can be provided for the worktables to meet actual processing needs.

[0059] In this embodiment, these driving devices have the same... Figures 1 to 3 The drive devices shown have the same structure, but the movement directions of the movers of each drive device are different, that is, the driving directions of each drive device are different, so as to drive the movement of different worktables to form multi-directional control. In order to adapt to the overall structure of the motion platform, the same type of components of different drive devices can differ in size and setting position. For example, based on the movement direction of the mover, the vibration damping component of one drive device is set on the right side of the stator, while the vibration damping component of another drive device is set on the left side of the stator.

[0060] In a preferred embodiment, the motion platform includes two sets of drive devices and worktables. The two worktables are slidably connected, and the sliding direction is consistent with the driving direction of one of the drive devices. This allows one drive device to drive both worktables to move simultaneously along a first direction, while the other drive device can drive one worktable to move along a second direction (the other does not move), thus achieving decoupling when a single worktable moves independently. In this embodiment, the first direction and the second direction are preferably perpendicular to each other, forming an XY linear platform. Of course, in other embodiments, the first direction and the second direction may not be perpendicular.

[0061] It should be noted that in other solutions different from the above embodiments, only the stator 31 and the base 10 can be slidably connected for vibration reduction. The mover 32 can be unconnected to the stator 31 and the base 10, but is a cantilever beam structure in a suspended state. That is, the other end of the stator 31 is in a suspended state and forms a cooperation with the stator 31. On the one hand, the non-contact layout between the mover 32 and the stator 31 effectively eliminates the friction of the sliding pair and reduces the mechanical loss during the movement. On the other hand, the single-sided fixing method of the cantilever beam structure reduces the precision requirements of the component fitting.

[0062] This application also provides a welding device, which includes the motion platform described in the above embodiments and has corresponding technical effects, which will not be repeated here.

[0063] Obviously, the embodiments described above are only some embodiments of this application, not all embodiments. The accompanying drawings show preferred embodiments of this application, but do not limit the patent scope of this application. This application can be implemented in many different forms; rather, the purpose of providing these embodiments is to provide a more thorough and comprehensive understanding of the disclosure of this application. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing specific embodiments, or make equivalent substitutions for some of the technical features. Any equivalent structures made using the content of this application's specification and drawings, directly or indirectly applied to other related technical fields, are similarly within the scope of patent protection of this application.

Claims

1. A motion platform, characterized in that, Includes a base, a worktable slidably disposed on the base, and a drive device; The driving device includes a drive motor, the stator of which is slidably connected to the base, and one end of the mover of which is connected to the worktable to drive the worktable to move, and the other end is slidably connected to the stator or the base, or the other end is suspended and engaged with the stator.

2. The motion platform according to claim 1, characterized in that, The other end of the moving element is slidably connected to the base; wherein... The stator has a cavity, the base is connected to a connecting seat that extends into the cavity, and the mover is connected to the connecting seat via a first guide rail assembly; The first guide rail assembly includes a pair of first guide rails and at least a pair of first sliders disposed on the first guide rails, each of the first sliders being connected to the mover.

3. The motion platform according to claim 2, characterized in that, The connecting seat is independent of the base and is fixedly connected to the base; Alternatively, the connecting seat and the base can be integrally formed.

4. The motion platform according to claim 2, characterized in that, The width of the side of the connecting seat facing the moving part is greater than the width of the moving part, and the width direction of the moving part is perpendicular to the direction of movement of the moving part; and / or, The connecting seat extends to a position below the central axis of the stator, and the central axis is parallel to the direction of motion of the mover.

5. The motion platform according to claim 2, characterized in that, The mover is also connected to the inner wall of the stator via a second guide rail assembly; the structure of the second guide rail assembly is the same as that of the first guide rail assembly.

6. The motion platform according to claim 1, characterized in that, The other end of the mover is slidably connected to the stator; wherein... The stator has a cavity, and the mover is connected to the inner wall of the stator in the cavity via a first guide rail assembly; The first guide rail assembly includes a pair of first guide rails and at least a pair of first sliders disposed on the first guide rails, each of the first sliders being connected to the mover.

7. The motion platform according to claim 6, characterized in that, The first guide rail assembly has multiple components, and the mover has multiple faces facing the inner wall of the stator, each face being connected to the inner wall of the stator via a first guide rail assembly.

8. The motion platform according to any one of claims 1 to 7, characterized in that, The motion platform also includes vibration damping components; The vibration damping assembly includes a vibration damping bracket, a vibration damping element, and a vibration damping plate connected in sequence. The vibration damping bracket is connected to the base and located outside the stator, and the vibration damping plate is connected to the stator.

9. The motion platform according to claim 8, characterized in that, The vibration damping bracket is integrally formed with the base; and / or, The damping plate is integrally formed with the stator.

10. A welding device, characterized in that, The welding equipment includes the motion platform as described in any one of claims 1 to 9.

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