A crystal bar edge grinding device

Abstract

The utility model relates to the technical field of semiconductor device manufacturing, disclose a kind of crystal bar edge grinding device, with two two mutually perpendicular first direction, second direction and third direction, including rotating mechanism, visual inspection system and edge grinding mechanism;The rotating mechanism is used to carry crystal bar, and can drive crystal bar rotation around axis;The visual inspection system includes two visual inspection cameras, and two the visual inspection cameras are respectively arranged at the two ends of the crystal bar;The number of the edge grinding mechanism is two, and is respectively arranged at the two ends of crystal bar, and the edge grinding mechanism includes drive assembly and sand strip, and the output end of the drive assembly is connected with the sand strip, and the drive assembly can drive the sand strip move in the first direction, the second direction and the third direction.The utility model has the beneficial effects that: the two ends of crystal bar can be simultaneously edge grinding processing, improve processing efficiency and processing accuracy, improve the yield of subsequent wafer production.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor device manufacturing technology, and in particular to a crystal rod edge grinding device. Background Technology

[0002] Semiconductor ingots, used as wafer manufacturing materials, require edge grinding to facilitate positioning during subsequent wafer fabrication and to remove defects present at the ends during crystal growth. In existing technologies, edge grinding of the ingot typically involves grinding one end, followed by a 180° rotation and repositioning by hand or a robotic arm to grind the other end. This process is complex, and the repositioning after rotation results in significant positioning errors, impacting processing efficiency and accuracy. Furthermore, processing only one end of the ingot can cause asymmetric stress distribution, leading to micro-bending deformation and affecting the yield rate in subsequent wafer production. Utility Model Content

[0003] The purpose of this invention is to provide a crystal ingot grinding device that can simultaneously grind both ends of a crystal ingot, avoiding multiple positioning during crystal ingot grinding, improving processing efficiency and accuracy, and increasing the yield of subsequent wafer production.

[0004] To achieve the above objectives, this utility model provides a crystal rod edge grinding device, which has a first direction, a second direction and a third direction that are perpendicular to each other, and includes a rotation mechanism, a vision inspection system and an edge grinding mechanism.

[0005] The rotating mechanism is used to support the crystal rod and can drive the crystal rod to rotate around the axis, the axis of the crystal rod being parallel to the first direction;

[0006] The visual inspection system includes two visual inspection cameras, which are respectively located at both ends of the crystal rod and are used to detect the positions of the two ends of the crystal rod.

[0007] The number of the edge grinding mechanisms is two, and they are respectively located at both ends of the crystal rod. The edge grinding mechanism includes a driving component and a grinding strip. The output end of the driving component is connected to the grinding strip. The driving component can drive the grinding strip to move upward in the first direction, the second direction and the third direction, so that the grinding strip is close to the end of the crystal rod for edge grinding.

[0008] Furthermore, the rotating mechanism includes a frame, a roller pressing assembly, and two load-bearing assemblies;

[0009] Two of the bearing components are spaced apart in the second direction and located below the frame. Each bearing component includes a first bracket, a first support shaft, and a support bearing. The first bracket is rotatably connected to the first support shaft. The first support shaft extends in the first direction. A plurality of the support bearings are sleeved on the first support shaft. The outer wall of the support bearing abuts against the outer wall of the crystal rod.

[0010] The rolling assembly includes a first cylinder, a connecting frame, a drive unit, and a second support shaft; the first cylinder is fixedly connected to the frame, and the output end of the first cylinder is provided with the connecting frame; the drive unit is located on the connecting frame and is used to drive the second support shaft to rotate, the second support shaft is rotatably connected to the connecting frame, the second support shaft extends in the first direction, and one end of the second support shaft is connected to the output end of the drive unit;

[0011] The crystal rod is placed between the two supporting components, and the outer wall of the crystal rod abuts against the outer wall of the supporting bearing. The first cylinder drives the connecting frame to move downward so that the outer wall of the second supporting shaft abuts against the outer wall of the crystal rod. The driving unit works to make the second supporting shaft rotate, thereby driving the crystal rod to rotate.

[0012] Furthermore, the drive unit includes a second motor, a drive wheel, a belt, and a driven wheel. The second motor is fixedly connected to the connecting frame. The output end of the second motor passes through one side plate of the connecting frame and is connected to the drive wheel at its end. The driven wheel is located at one end of the second support shaft. The drive wheel and the driven wheel are driven by meshing with the belt.

[0013] The second motor operates to drive the drive wheel to rotate, which in turn drives the second support shaft to rotate.

[0014] Furthermore, the drive assembly includes a fixed plate, a first linear module, a second linear module, a third linear module, and a clamp;

[0015] The fixed end of the first linear module is connected to the fixed plate, and the output end of the first linear module can move in the first direction;

[0016] The fixed end of the second linear module is connected to the output end of the first linear module, and the output end of the second linear module can move upward on the third party;

[0017] The fixed end of the third linear module is connected to the output end of the second linear module, and the output end of the third linear module can move in the second direction;

[0018] The clamp is located at the output end of the third linear module and is detachably connected to the sanding strip.

[0019] Furthermore, the fixture includes a mounting base and a locking screw. The mounting base is connected to the output end of the third linear module. The top of the mounting base has a through groove extending along the first direction. The sanding strip is inserted into the through groove. Threaded holes are formed on the opposite side walls of the through groove in the second direction. The locking screw is inserted into the threaded holes.

[0020] Furthermore, the first linear module, the second linear module, and the third linear module have the same structure. The first linear module includes a fixed base, a first motor, a support rod, a lead screw, a guide rail, and a slider.

[0021] The fixed base is connected to the fixed plate. The side of the first motor facing the output shaft is fixedly connected to one end of the multiple support rods. The other end of the multiple support rods is connected to the fixed base. The lead screw is rotatably connected inside the fixed base. The lead screw extends in the first direction. The lead screw is connected to the output shaft of the motor through a coupling. The slider is threadedly connected to the lead screw. Guide rails are provided on both sides of the lead screw on the fixed base. The bottom of the slider is provided with a groove corresponding to the guide rail.

[0022] The motor drives the lead screw to rotate, which in turn drives the slider to move in the first direction.

[0023] Furthermore, the abrasive strip has a polishing bevel at one end facing the crystal rod in the first direction.

[0024] Furthermore, the visual inspection camera includes a support frame and a camera body, wherein the projection of the lens of the camera body onto a vertical plane parallel to the first direction coincides with the projection of the end of the crystal rod.

[0025] Compared with the prior art, the crystal ingot grinding device of this utility model has the following advantages: It includes a rotating mechanism to support the crystal ingot and drive it to rotate around an axis; a vision inspection system includes two vision inspection cameras, each located at one end of the crystal ingot, for detecting the position of the two ends; and two grinding mechanisms, each located at one end of the crystal ingot, including a drive assembly and a grinding strip. By rotating the crystal ingot through the rotating mechanism and measuring the positions of the two ends of the crystal ingot using the two vision inspection cameras, precise positioning is achieved during grinding. Subsequently, the two grinding mechanisms can simultaneously grind the ends of the crystal ingot, avoiding multiple positioning operations during grinding, improving processing efficiency and accuracy, and increasing the yield rate of subsequent wafer production. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the structure of the crystal rod grinding device according to an embodiment of the present invention;

[0027] Figure 2 This is a schematic diagram of the rotating mechanism of the crystal rod grinding device according to an embodiment of the present invention;

[0028] Figure 3 This is a schematic diagram of the crystal rod grinding device from another perspective of an embodiment of this utility model;

[0029] Figure 4 yes Figure 3 A magnified view of a section at point A in the middle;

[0030] Figure 5 This is a schematic diagram of the installation of the abrasive strip in the crystal rod grinding device according to an embodiment of this utility model;

[0031] Figure 6 This is a schematic diagram of the edge grinding mechanism of the crystal rod edge grinding device according to an embodiment of the present invention;

[0032] Figure 7 This is a schematic diagram of the structure of the first linear module of the crystal rod edge grinding device according to an embodiment of this utility model;

[0033] Figure 8 This is a structural schematic diagram of the first linear module of the crystal rod grinding device according to another embodiment of the present invention.

[0034] In the diagram, 1 is the rotating mechanism; 11 is the frame; 12 is the roller pressing assembly; 121 is the first cylinder; 122 is the connecting frame; 123 is the drive unit; 1231 is the second motor; 1232 is the drive wheel; 1233 is the belt; 1234 is the driven wheel; 124 is the second support shaft; 13 is the load-bearing assembly; 131 is the first bracket; 132 is the first support shaft; and 133 is the support bearing.

[0035] 2. Visual inspection camera; 21. Support frame; 22. Camera body;

[0036] 3. Grinding mechanism; 31. Drive assembly; 311. Fixing plate; 312. First linear module; 3121. Fixing base; 3122. First motor; 3123. Support rod; 3124. Lead screw; 3125. Guide rail; 3126. Slider; 31261. Slide groove; 313. Second linear module; 314. Third linear module; 315. Fixture; 3151. Mounting base; 3152. Locking screw; 31511. Through groove; 32. Sanding strip; 321. Grinding bevel;

[0037] X, first direction; Y, second direction; Z, third direction; a, crystal rod. Detailed Implementation

[0038] The specific embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are used to illustrate this utility model, but are not intended to limit its scope.

[0039] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "inner", "outer" and other terms used in this utility model to indicate the orientation or positional relationship are based on the positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device and element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0040] In the description of this utility model, it should be understood that the terms "first," "second," etc., are used to describe various information, but this information should not be limited to these terms. These terms are only used to distinguish information of the same type from each other. For example, without departing from the scope of this utility model, "first" information can also be referred to as "second" information, and similarly, "second" information can also be referred to as "first" information.

[0041] like Figures 1 to 8 As shown, a preferred embodiment of the present invention provides a crystal rod edge grinding device with three mutually perpendicular directions: a first direction X, a second direction Y, and a third direction Z. It includes a rotating mechanism 1, a vision inspection system, and an edge grinding mechanism 3. For ease of explanation, the length direction of the rotating mechanism 1 is defined as the first direction X, the width direction as the second direction Y, and the height direction as the third direction Z. The rotating mechanism 1 carries the crystal rod a and drives it to rotate around an axis, the axis of which is parallel to the first direction X. To facilitate positioning during edge grinding of both ends of the crystal rod a, the vision inspection system includes two vision inspection cameras 2, respectively located at both ends of the crystal rod a, for detecting the positions of the two ends of the crystal rod a. To simultaneously grind both ends of the crystal rod a, two edge grinding mechanisms 3 are used, each located at one end of the crystal rod a. Specifically, as shown... Figure 1 As shown, the edge grinding mechanism 3 includes a drive assembly 31 and a grinding strip 32. The output end of the drive assembly 31 is connected to the grinding strip 32. The drive assembly 31 can drive the grinding strip 32 to move in the first direction X, the second direction Y and the third direction Z, so that the grinding strip 32 is close to the end of the crystal rod a for edge grinding.

[0042] When grinding the crystal ingot, the rotating mechanism 1 drives the crystal ingot to rotate, and two vision inspection cameras 2 measure the positions of the two ends of the crystal ingot respectively, so as to achieve precise positioning during grinding. Then, two grinding mechanisms 3 can grind the ends of the crystal ingot at the same time, avoiding multiple positioning during crystal ingot grinding, improving processing efficiency and processing accuracy, and improving the yield of subsequent wafer production.

[0043] In some embodiments, to facilitate the rotation of the crystal rod, both ends of the crystal rod can be exposed, which is beneficial for simultaneously grinding both ends of the crystal rod. Figure 1 , Figure 2 As shown, the rotating mechanism 1 includes a frame 11, a rolling assembly 12, and two support assemblies 13. The two support assemblies 13 are spaced apart in the second direction Y and located below the frame 11, used to support the crystal rod. Specifically, to simplify the structure of the support assembly 13, in this embodiment, the support assembly 13 includes a first bracket 131, a first support shaft 132, and support bearings 133. The first bracket 131 is rotatably connected to the first support shaft 132, which extends in the first direction X. Multiple support bearings 133 are sleeved on the first support shaft 132, and the outer walls of the support bearings 133 abut against the outer walls of the crystal rod. In this embodiment, the first bracket 131 includes two plate structures spaced apart in the first direction X, with bearings at its top for rotatably connecting to both ends of the first support shaft 132.

[0044] Specifically, the rolling assembly 12 is used to provide the driving force for rotating the crystal ingot, see [reference]. Figure 2 It includes a first cylinder 121, a connecting frame 122, a drive unit 123, and a second support shaft 124; wherein, the first cylinder 121 is fixedly connected to the frame 11, and the output end of the first cylinder 121 is provided with the connecting frame 122; the drive unit 123 is provided on the connecting frame 122 and is used to drive the second support shaft 124 to rotate, the second support shaft 124 is rotatably connected to the connecting frame 122, the second support shaft 124 extends in the first direction X, and one end of the second support shaft 124 is connected to the output end of the drive unit 123.

[0045] When it is necessary to rotate the crystal rod, the crystal rod is placed between two bearing components 13, and the outer wall of the crystal rod abuts against the outer wall of the support bearing 133. The first cylinder 121 drives the connecting frame 122 to move downward so that the outer wall of the second support shaft 124 abuts against the outer wall of the crystal rod. The drive unit 123 works to make the second support shaft 124 rotate, thereby driving the crystal rod to rotate.

[0046] When grinding the crystal ingot, the ingot is first placed on two support components 13. The support bearing 133 abuts against the outer wall of the ingot and supports it. The ingot is rotated by the roller pressing component 12. Two vision inspection cameras 2 respectively measure the position of one end of the ingot. The drive component 31 moves the abrasive strip 32 to the grinding position, and the grinding operation can then be performed. In this embodiment, the electrical components inside the roller pressing component 12, the vision inspection camera 2, and the drive component 31 are all electrically connected to the PLC control system to realize the corresponding signal transmission and control the action of each component. The control method and electrical signal transmission method are common in the mechanical field, so they will not be described in detail here.

[0047] In this embodiment, to simplify the structure of the driving unit 123, refer to... Figure 4 The drive unit 123 includes a second motor 1231, a drive wheel 1232, a belt 1233, and a driven wheel 1234. The second motor 1231 is fixedly connected to the connecting frame 122. The output end of the second motor 1231 passes through one side plate of the connecting frame 122 and is connected to the drive wheel 1232 at its end. The driven wheel 1234 is located at the end of the second support shaft 124. The drive wheel 1232 and the driven wheel 1234 are driven by the belt 1233. When the second motor 1231 operates, it drives the drive wheel 1232 to rotate. The drive wheel 1232 drives the driven wheel 1234 to rotate through the belt 1233. Since the driven wheel 1234 is fixed to the second support shaft 124, it drives the second support shaft 124 to rotate.

[0048] Furthermore, in some embodiments, to facilitate the movement of the abrasive strip 32 in multiple directions for fine-tuning of the edge grinding precision, see [reference needed]. Figures 5 to 8 The drive assembly 31 includes a fixed plate 311, a first linear module 312, a second linear module 313, a third linear module 314, and a clamp 315. The fixed plate 311 serves as a mounting carrier. The fixed end of the first linear module 312 is connected to the fixed plate 311, and the output end of the first linear module 312 can move in the first direction X. The fixed end of the second linear module 313 is connected to the output end of the first linear module 312, and the output end of the second linear module 313 can move in the third direction Z. The fixed end of the third linear module 314 is connected to the output end of the second linear module 313, and the output end of the third linear module 314 can move in the second direction Y. The clamp 315 is located at the output end of the third linear module 314 and is detachably connected to the sanding strip 32. Through the cooperation between the first linear module 312, the second linear module 313 and the third linear module 314, the clamp 315 can be moved in the first direction X, the second direction Y and the third direction Z, thereby adjusting the position between the sand bar 32 and the crystal rod.

[0049] In this embodiment, to facilitate the replacement of the sanding strip 32, specifically, as follows: Figure 5 , Figure 6 As shown, the fixture 315 includes a mounting base 3151 and a locking screw 3152. The mounting base 3151 is connected to the output end of the third linear module 314. The top of the mounting base 3151 has a through groove 31511 extending along the first direction X. A sanding strip 32 is inserted into the through groove 31511. Threaded holes are formed on the opposite side walls of the through groove 31511 in the second direction Y. The locking screw 3152 is inserted into the threaded holes. When replacing the sanding strip 32, the sanding strip 32 can be loosened by tightening the locking screw 3152 to remove it and replace it with a new sanding strip 32. Furthermore, the end of the sanding strip 32 facing the crystal rod in the first direction X has a grinding bevel 322. When grinding the edge of the crystal rod, the grinding bevel 322 abuts against the edge of the crystal rod to achieve the grinding operation.

[0050] Furthermore, to simplify the overall structure of the drive component 31, the first linear module 312, the second linear module 313, and the third linear module 314 have the same structure. Specifically, as shown... Figure 7 , Figure 8 As shown, the first linear module 312 includes a fixed base 3121, a first motor 3122, support rods 3123, a lead screw 3124, guide rails 3125, and a slider 3126. The fixed base 3121 is connected to a fixed plate 311. The side of the first motor 3122 facing the output shaft is fixedly connected to one end of multiple support rods 3123, and the other end of the multiple support rods 3123 is connected to the fixed base 3121. The lead screw 3124 is rotatably connected inside the fixed base 3121. The lead screw 3124 extends in the first direction X and is connected to the output shaft of the motor through a coupling. The slider 3126 is threadedly connected to the lead screw 3124. Guide rails 3125 are provided on both sides of the lead screw 3124 on the fixed base 3121. The bottom of the slider 3126 is provided with a groove 31261 corresponding to the guide rail 3125. The motor drives the lead screw 3124 to rotate, which in turn drives the slider 3126 to move in the first direction X.

[0051] Specifically, see Figure 3 The visual inspection camera 2 includes a support frame 21 and a camera body 22. The camera body 22 is fixedly mounted on the support frame 21 as a mounting carrier. To ensure that the camera body 22 can always detect the end position of the crystal rod, the projection of the lens of the camera body 22 on a vertical plane parallel to the first direction X coincides with the end projection of the crystal rod.

[0052] In summary, this utility model embodiment provides a crystal ingot grinding device, which includes a rotating mechanism 1 for carrying the crystal ingot and driving it to rotate around an axis; a vision inspection system including two vision inspection cameras 2, which are respectively located at both ends of the crystal ingot to detect the positions of the two ends of the crystal ingot; and two grinding mechanisms 3, which are respectively located at both ends of the crystal ingot, each including a drive assembly 31 and a grinding strip 32. The rotating mechanism 1 drives the crystal ingot to rotate, and the two vision inspection cameras 2 respectively measure the positions of the two ends of the crystal ingot, achieving precise positioning during grinding. Subsequently, the two grinding mechanisms 3 can simultaneously grind the ends of the crystal ingot, avoiding multiple positioning during crystal ingot grinding, improving processing efficiency and accuracy, and increasing the yield of subsequent wafer production.

[0053] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and substitutions can be made without departing from the technical principles of the present utility model, and these improvements and substitutions should also be considered within the protection scope of the present utility model.

Claims

1. A crystal rod grinding device, having a first direction, a second direction, and a third direction that are mutually perpendicular, characterized in that: Includes a rotating mechanism, a vision inspection system, and an edge grinding mechanism; The rotating mechanism is used to support the crystal rod and can drive the crystal rod to rotate around the axis, the axis of the crystal rod being parallel to the first direction; The visual inspection system includes two visual inspection cameras, which are respectively located at both ends of the crystal rod and are used to detect the positions of the two ends of the crystal rod. The number of the edge grinding mechanisms is two, and they are respectively located at both ends of the crystal rod. The edge grinding mechanism includes a driving component and a grinding strip. The output end of the driving component is connected to the grinding strip. The driving component can drive the grinding strip to move upward in the first direction, the second direction and the third direction, so that the grinding strip is close to the end of the crystal rod for edge grinding.

2. The crystal rod grinding apparatus as described in claim 1, characterized in that: The rotating mechanism includes a frame, a roller pressing assembly, and two load-bearing assemblies; Two of the bearing components are spaced apart in the second direction and located below the frame. Each bearing component includes a first bracket, a first support shaft, and a support bearing. The first bracket is rotatably connected to the first support shaft. The first support shaft extends in the first direction. A plurality of the support bearings are sleeved on the first support shaft. The outer wall of the support bearing abuts against the outer wall of the crystal rod. The rolling assembly includes a first cylinder, a connecting frame, a drive unit, and a second support shaft; the first cylinder is fixedly connected to the frame, and the output end of the first cylinder is provided with the connecting frame; the drive unit is located on the connecting frame and is used to drive the second support shaft to rotate, the second support shaft is rotatably connected to the connecting frame, the second support shaft extends in the first direction, and one end of the second support shaft is connected to the output end of the drive unit; The crystal rod is placed between the two supporting components, and the outer wall of the crystal rod abuts against the outer wall of the supporting bearing. The first cylinder drives the connecting frame to move downward so that the outer wall of the second supporting shaft abuts against the outer wall of the crystal rod. The driving unit works to make the second supporting shaft rotate, thereby driving the crystal rod to rotate.

3. The crystal rod grinding apparatus as described in claim 2, characterized in that: The drive unit includes a second motor, a drive wheel, a belt, and a driven wheel. The second motor is fixedly connected to the connecting frame. The output end of the second motor passes through one side plate of the connecting frame and is connected to the drive wheel at its end. The driven wheel is located at one end of the second support shaft. The drive wheel and the driven wheel are driven by the belt. The second motor operates to drive the drive wheel to rotate, which in turn drives the second support shaft to rotate.

4. The crystal rod edging apparatus as described in claim 1, characterized in that: The drive assembly includes a fixed plate, a first linear module, a second linear module, a third linear module, and a clamp; The fixed end of the first linear module is connected to the fixed plate, and the output end of the first linear module can move in the first direction; The fixed end of the second linear module is connected to the output end of the first linear module, and the output end of the second linear module can move upward on the third party; The fixed end of the third linear module is connected to the output end of the second linear module, and the output end of the third linear module can move in the second direction; The clamp is located at the output end of the third linear module and is detachably connected to the sanding strip.

5. The crystal rod grinding apparatus as described in claim 4, characterized in that: The fixture includes a mounting base and a locking screw. The mounting base is connected to the output end of the third linear module. The top of the mounting base has a through groove extending along the first direction. The sanding strip is inserted into the through groove. The two opposite side walls of the through groove in the second direction have threaded holes. The locking screw is inserted into the threaded holes.

6. The crystal rod edging apparatus as described in claim 4, characterized in that: The first linear module, the second linear module, and the third linear module have the same structure. The first linear module includes a fixed base, a first motor, a support rod, a lead screw, a guide rail, and a slider. The fixed base is connected to the fixed plate. The side of the first motor facing the output shaft is fixedly connected to one end of the multiple support rods. The other end of the multiple support rods is connected to the fixed base. The lead screw is rotatably connected inside the fixed base. The lead screw extends in the first direction. The lead screw is connected to the output shaft of the motor through a coupling. The slider is threadedly connected to the lead screw. Guide rails are provided on both sides of the lead screw on the fixed base. The bottom of the slider is provided with a groove corresponding to the guide rail. The motor drives the lead screw to rotate, which in turn drives the slider to move in the first direction.

7. The crystal rod edging apparatus as described in claim 1, characterized in that: The abrasive bar has a polishing bevel at one end facing the crystal rod in the first direction.

8. The crystal rod grinding apparatus as described in claim 1, characterized in that: The visual inspection camera includes a support frame and a camera body. The projection of the lens of the camera body onto a vertical plane parallel to the first direction coincides with the projection of the end of the crystal rod.

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