Sputtering jig

Abstract

The utility model relates to sputter coating technical field, sputter coating is with clamping jig, including sputter coating vacuum cavity, the inside of sputter coating vacuum cavity is provided with moving station, be provided with the clamping mechanism of being convenient for to different size and thickness's sample piece clamping fixed of moving station, first clamping seat fixed connection is in the upper surface of moving station, the screw rod is penetrated rotationally connected in the inside of first clamping seat. This sputter coating is with clamping jig, through setting up the fixed station and support seat that moving station bottom connection in sputter coating vacuum cavity, the first clamping seat and second clamping seat in moving station upper surface are slidably connected with first slider and second slider respectively, be provided with first lower clamping taper block, first threaded column and first upper clamping taper block on first slider, be provided with second lower clamping taper block, second threaded column and second upper clamping taper block on second slider, in order to be convenient for to different size's sample piece clamping fixed processing.

Description

Technical Field

[0001] This utility model relates to the field of sputtering coating technology, specifically to a jig for sputtering coating. Background Technology

[0002] The dual-target magnetron sputtering coating system is a laboratory thin film preparation device equipped with both DC and RF dual targets. It achieves atomic-level deposition of materials such as metals and oxides by bombarding the target with ions. It can prepare thin films with various functions such as conductivity, optics, and ferroelectricity. It features high deposition rate and low substrate temperature rise, and is suitable for research in the fields of materials science and electronic engineering.

[0003] The aforementioned device lacks a fixture within the vacuum chamber of the coating instrument that can fix sample sheets of different sizes and thicknesses. As a result, when using existing magnetron sputtering coating instruments for coating processing in a vacuum chamber, the sample sheets are mostly placed directly on the stage inside the vacuum chamber. This not only results in a generally poor fixation effect, but also causes the bottom of the sample sheet to adhere to the bottom of the stage, making it impossible to perform good coating processing. In addition, due to the small space of the vacuum chamber, the operating space is limited, which limits the speed of clamping and fixing the sample sheets. Based on the shortcomings of the existing technology, this utility model designs a clamping fixture for sputtering coating. Utility Model Content

[0004] To address the shortcomings of existing technologies, this invention provides a jig for sputtering coating, which has the advantage of being able to fix sample pieces of different sizes and thicknesses within the vacuum chamber of the coating instrument.

[0005] This utility model provides the following technical solution: a jig for sputtering coating, including a sputtering coating vacuum chamber, wherein a movable stage is provided inside the sputtering coating vacuum chamber, and a clamping mechanism is provided on the movable stage to facilitate clamping and fixing sample sheets of different sizes and thicknesses.

[0006] A clamping mechanism includes a first clamping seat, a screw, a screw head, a first slider, a first lower clamping cone, a first threaded post, a first upper clamping cone, a second clamping seat, a sliding rod, a second slider, a traction spring, a second lower clamping cone, a second threaded post, a second upper clamping cone, and a traction handle. The first clamping seat is fixedly connected to the upper surface of the moving platform. The screw is rotatably connected inside the first clamping seat. The screw head is fixedly connected to the outer end of the screw. The first slider is slidably connected inside the first clamping seat. The first lower clamping cone is fixedly connected to the upper surface of the first slider. The first threaded post... A column is fixedly connected to the upper surface of the first lower clamping cone, the first upper clamping cone is threadedly connected to the first threaded column, the second clamping seat is fixedly connected to the moving platform, the slide rod is fixedly connected inside the second clamping seat, the second slider is slidably connected inside the second clamping seat, the traction spring is sleeved on the slide rod, the second lower clamping cone is fixedly connected to the upper surface of the second slider, the second threaded column is fixedly connected to the upper surface of the second lower clamping cone, the second upper clamping cone is threadedly connected to the second threaded column, and the traction handle is fixedly connected to one side of the upper surface of the second slider.

[0007] As a preferred embodiment of this utility model, the side wall of the sputtering coating vacuum chamber is fixedly connected to a pick-and-place tube window, a connector is provided on the pick-and-place tube window, a sealing window is installed on the connector, an observation window is fixedly connected to the sealing window, a first fixing member is provided between the pick-and-place tube window and the sealing window, a top cover is provided on the top of the sputtering coating vacuum chamber, a second fixing member is provided between the sputtering coating vacuum chamber and the top cover, and two sets of magnetically controlled target guns are provided on the upper surface of the top cover.

[0008] As a preferred embodiment of this utility model, the bottom of the mobile platform is slidably connected to a fixed platform, the fixed platform has side grooves on both sides, and the bottom of the fixed platform is fixedly connected to a support base.

[0009] As a preferred embodiment of this utility model, the screw is threadedly connected inside the first slider, and the side wall of the first threaded column is provided with scale lines.

[0010] As a preferred embodiment of this utility model, the second slider is slidably connected to the slide rod, the two ends of the traction spring are fixedly connected to the inner wall of the second clamp and one side of the second slider, and the side wall of the second threaded column is provided with scale lines.

[0011] As a preferred technical solution of this utility model, the inner side of the moving platform is provided with a limiting pulley, and the pulley on the inner side of the moving platform is slidably engaged in the side groove.

[0012] As a preferred embodiment of this utility model, the observation window is located on one side of the tube loading and unloading window.

[0013] As a preferred embodiment of this utility model, the support base is fixedly connected to the bottom of the inner cavity of the sputtering coating vacuum chamber.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] This sputtering coating jig unlocks the pick-and-place tube window and the sealing window by screwing on the first fixing member, and opens the sealing window using the connecting member. Then, the moving stage is pulled outward by the limiting position of the fixed stage and the side groove, which drives the clamping mechanism to be extracted from the inside of the sputtering coating vacuum chamber. At this time, according to the length of the sample sheet, the screw head is screwed to rotate the screw, causing the two sets of first sliders to move in opposite directions to adjust the spacing. Then, according to the thickness of the sample sheet, the first upper clamping cone and the second upper clamping cone are screwed to move the first upper clamping cone and the second upper clamping cone on the first threaded post and the second threaded post respectively to adjust the spacing with the first lower clamping cone and the second lower clamping cone. After the above structure is adjusted, the jig is hooked by hand for traction. Pulling the second slider outward causes the second lower clamping cone and the second upper clamping cone to continue moving outward and stretching the traction spring. At this time, the sample sheet is placed horizontally between the two sets of the first lower clamping cone and the first upper clamping cone, as well as the second lower clamping cone and the second upper clamping cone. Finally, the traction handle is released, causing the traction spring to retract and pull the second slider inward to reset. The moving second slider causes the second lower clamping cone and the second upper clamping cone to move inward, clamping and fixing the sample sheet with the assistance of the first lower clamping cone and the first upper clamping cone. After clamping and fixing is completed, the moving stage is pushed to send the sample sheet into the sputtering coating vacuum chamber for sputtering coating treatment. This device is convenient for fixing sample sheets of different sizes and thicknesses. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is a schematic diagram of the main structure of the sputtering coating vacuum chamber of this utility model;

[0018] Figure 3 This is a schematic diagram of the unfolded structure of the sputtering coating vacuum cavity and sealing window of this utility model;

[0019] Figure 4 This is a schematic diagram of the connection structure between the mobile platform and the clamping mechanism of this utility model;

[0020] Figure 5 This is an exploded cross-sectional view of the clamping mechanism of this utility model.

[0021] In the diagram: 1. Sputtering coating vacuum chamber; 101. Pick-up and drop-off tube window; 102. Connector; 103. Sealing window; 104. Observation window; 105. First fixing component; 106. Top cover; 107. Second fixing component; 108. Magnetically controlled target gun; 2. Moving stage; 201. Fixed stage; 202. Side groove; 203. Support base; 3. Clamping mechanism; 301. First clamping seat; 302. Screw; 303. Tightening head; 304. First slider; 305. First lower clamping cone; 306. First threaded column; 307. First upper clamping cone; 308. Second clamping seat; 309. Slide rod; 310. Second slider; 311. Traction spring; 312. Second lower clamping cone; 313. Second threaded column; 314. Second upper clamping cone; 315. Traction handle. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figure 1-5 A sputtering coating fixture includes a sputtering coating vacuum chamber 1, a movable stage 2 inside the sputtering coating vacuum chamber 1, a clamping mechanism 3 on the movable stage 2 for clamping and fixing sample sheets of different sizes and thicknesses, a pick-and-place window 101 fixedly connected to the side wall of the sputtering coating vacuum chamber 1, a connector 102 on the pick-and-place window 101, a sealing window 103 installed on the connector 102, an observation window 104 fixedly connected to the sealing window 103, a first fixing member 105 between the pick-and-place window 101 and the sealing window 103, a top cover 106 on the top of the sputtering coating vacuum chamber 1, a second fixing member 107 between the sputtering coating vacuum chamber 1 and the top cover 106, two sets of magnetically controlled target guns 108 on the upper surface of the top cover 106, and the observation window 104 on one side of the pick-and-place window 101.

[0024] Please see Figure 4-5The clamping mechanism 3 includes a first clamping seat 301, a screw 302, a screw head 303, a first slider 304, a first lower clamping cone 305, a first threaded post 306, a first upper clamping cone 307, a second clamping seat 308, a sliding rod 309, a second slider 310, a traction spring 311, a second lower clamping cone 312, a second threaded post 313, a second upper clamping cone 314, and a traction handle 315. The first clamping seat 301 is fixedly connected to the upper surface of the moving platform 2. The screw 302 is rotatably connected inside the first clamping seat 301. The screw head 303 is fixedly connected to the outer end of the screw 302. The first slider 304 is slidably connected inside the first clamping seat 301. The first lower clamping cone 305 is fixedly connected to the upper surface of the first slider 304. The first threaded post 306 is fixedly connected to the upper surface of the first lower clamping cone 305. The first upper clamping cone 307 is threadedly connected to the first threaded post 314. On the 06, the second clamping seat 308 is fixedly connected to the moving platform 2, the slide rod 309 is fixedly connected to the inside of the second clamping seat 308, the second slider 310 is slidably connected to the inside of the second clamping seat 308, the traction spring 311 is sleeved on the slide rod 309, the second lower clamping cone 312 is fixedly connected to the upper surface of the second slider 310, the second threaded post 313 is fixedly connected to the upper surface of the second lower clamping cone 312, the second upper clamping cone 314 is threadedly connected to the second threaded post 313, the traction handle 315 is fixedly connected to one side of the upper surface of the second slider 310, the screw 302 is threadedly connected to the first slider 304, the side wall of the first threaded post 306 is provided with scale lines, the second slider 310 is slidably connected to the slide rod 309, the two ends of the traction spring 311 are fixedly connected to the inner wall of the second clamping seat 308 and one side of the second slider 310, and the side wall of the second threaded post 313 is provided with scale lines.

[0025] By configuring a first lower clamping cone 305, a first threaded post 306, a first upper clamping cone 307, a second lower clamping cone 312, a second threaded post 313, and a second upper clamping cone 314, it is possible to clamp and fix sample pieces of different thicknesses. By configuring a first clamping seat 301, a screw 302, a screw head 303, and a first slider 304, it is possible to adjust the two sets of the first lower clamping cone 305, the first threaded post 306, and the first upper clamping cone according to sample pieces of different lengths. The spacing of 307 is designed to accommodate sample pieces of various lengths for clamping and fixing. By setting a second clamping seat 308, a slide bar 309, a second slider 310, a traction spring 311, and a traction handle 315, the positions of the second lower clamping cone 312, the second threaded post 313, and the second upper clamping cone 314 can be automatically adjusted according to sample pieces of different widths. With the assistance of the first lower clamping cone 305, the first threaded post 306, and the first upper clamping cone 307, the sample piece is clamped and fixed.

[0026] Please see Figure 4The bottom of the moving stage 2 is slidably connected to the fixed stage 201. The fixed stage 201 has side grooves 202 on both sides. The bottom of the fixed stage 201 is fixedly connected to the support base 203. The inner side of the moving stage 2 is provided with a limiting pulley, and the pulley on the inner side of the moving stage 2 is slidably connected to the side groove 202. The support base 203 is fixedly connected to the bottom of the inner cavity of the sputtering coating vacuum chamber 1.

[0027] By setting a support base 203, the positions of the fixed stage 201 and the moving stage 2 are fixed, so that after the moving stage 2 is inserted into the sputtering coating vacuum chamber 1, the clamping mechanism 3 set above the moving stage 2 and the sample sheet can be located in the center position inside the sputtering coating vacuum chamber 1. By setting a fixed stage 201 and a side groove 202, the moving stage 2 can slide and pull inside the sputtering coating vacuum chamber 1 and the pick-and-place window 101, so that the clamping mechanism 3 can be sent out from inside the sputtering coating vacuum chamber 1 and the pick-and-place window 101, and the sample sheet can be fixed outside the sputtering coating vacuum chamber 1 using the clamping mechanism 3.

[0028] Working principle: When the sputtering coating jig is used, in the initial state, the pick-and-place window 101 is first set on the side wall of the sputtering coating vacuum chamber 1. The sealing window 103 outside the pick-and-place window 101 is rotated, installed, and fixed by the connector 102 and the first fixing member 105. A magnetron-controlled target gun 108 is also provided on the upper surface of the top cover 106, which is fixed at the top of the sputtering coating vacuum chamber 1 by the second fixing member 107, to facilitate sample pick-and-place and sputter coating. Inside the sputtering coating vacuum chamber 1, a magnetron-controlled target gun 108 is set... The bottom of the movable stage 2 is connected to a fixed stage 201 and a support base 203. The first slider 304 and the second slider 310 are slidably connected in the first clamping base 301 and the second clamping base 308 on the upper surface of the movable stage 2, respectively. The first slider 304 is provided with a first lower clamping cone 305, a first threaded post 306 and a first upper clamping cone 307. The second slider 310 is provided with a second lower clamping cone 312, a second threaded post 313 and a second upper clamping cone 314, so as to facilitate the clamping and fixing of sample pieces of different sizes.

[0029] When it is necessary to fix sample pieces of different sizes and thicknesses, firstly, the first fixing member 105 is turned to unlock the gap between the pick-up and drop-out window 101 and the sealing window 103, and the sealing window 103 is opened using the connecting member 102. Then, the moving stage 2 is pulled outward by the limiting of the fixing stage 201 and the side groove 202, which drives the clamping mechanism 3 to be pulled out from the inside of the sputtering coating vacuum chamber 1. At this time, according to the length of the sample piece, the screw head 303 is turned to drive the screw 302 to rotate, so that the two sets of first sliders 304 move in opposite directions to adjust the spacing. Then, according to the thickness of the sample piece, the first upper clamping cone 307 and the second upper clamping cone 314 are turned to move the first upper clamping cone 307 and the second upper clamping cone 314 on the first threaded post 306 and the second threaded post 313 respectively to adjust the spacing with the first lower clamping cone 305 and the second lower clamping cone 312 until the above structure is adjusted. Then, by hooking the traction handle 315, pull the second slider 310 outward, causing the second lower clamping cone 312 and the second upper clamping cone 314 to continue moving outward and stretching the traction spring 311. At this time, place the sample sheet horizontally between the two sets of the first lower clamping cone 305 and the first upper clamping cone 307, as well as the second lower clamping cone 312 and the second upper clamping cone 314. Finally, release the traction handle 315 to allow the traction spring 311 to retract and pull the second slider 310 inward to reset. The moving second slider 310 causes the second lower clamping cone 312 and the second upper clamping cone 314 to move inward. With the assistance of the first lower clamping cone 305 and the first upper clamping cone 307, the sample sheet is clamped and fixed. After the clamping and fixing is completed, push the moving stage 2 to send the sample sheet into the sputtering coating vacuum chamber 1 for sputtering coating treatment. This device is convenient for fixing sample sheets of different sizes and thicknesses.

[0030] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A jig for sputtering coating, comprising a sputtering coating vacuum chamber (1), characterized in that: The sputtering coating vacuum chamber (1) is equipped with a moving stage (2), and the moving stage (2) is equipped with a clamping mechanism (3) to facilitate clamping and fixing sample pieces of different sizes and thicknesses. The clamping mechanism (3) includes a first clamping seat (301), a screw (302), a screw head (303), a first slider (304), a first lower clamping cone (305), a first threaded column (306), a first upper clamping cone (307), a second clamping seat (308), a slide rod (309), a second slider (310), a traction spring (311), a second lower clamping cone (312), a second threaded column (313), a second upper clamping cone (314), and a traction handle (315). The first clamping seat (301) is fixedly connected to the upper surface of the moving platform (2). The screw (302) is rotatably connected through the first clamping seat (301). The screw head (303) is fixedly connected to the outer end of the screw (302). The first slider (304) is slidably connected inside the first clamping seat (301). The first lower clamping cone (305) is fixedly connected to the first slider (304). The upper surface of the first threaded post (306) is fixedly connected to the upper surface of the first lower clamping cone (305), the first upper clamping cone (307) is threadedly connected to the first threaded post (306), the second clamping seat (308) is fixedly connected to the moving table (2), the slide rod (309) is fixedly connected to the inside of the second clamping seat (308), the second slider (310) is slidably connected to the inside of the second clamping seat (308), the traction spring (311) is sleeved on the slide rod (309), the second lower clamping cone (312) is fixedly connected to the upper surface of the second slider (310), the second threaded post (313) is fixedly connected to the upper surface of the second lower clamping cone (312), the second upper clamping cone (314) is threadedly connected to the second threaded post (313), and the traction handle (315) is fixedly connected to one side of the upper surface of the second slider (310).

2. The jig for sputtering coating according to claim 1, characterized in that: The sputtering coating vacuum chamber (1) has a pick-and-place window (101) fixedly connected to its side wall. A connector (102) is provided on the pick-and-place window (101). A sealing window (103) is installed on the connector (102). An observation window (104) is fixedly connected to the sealing window (103). A first fixing member (105) is provided between the pick-and-place window (101) and the sealing window (103). A top cover (106) is provided on the top of the sputtering coating vacuum chamber (1). A second fixing member (107) is provided between the sputtering coating vacuum chamber (1) and the top cover (106). Two sets of magnetically controlled target guns (108) are provided on the upper surface of the top cover (106).

3. The jig for sputtering coating according to claim 1, characterized in that: The bottom of the mobile platform (2) is slidably connected to a fixed platform (201), and the fixed platform (201) has side grooves (202) on both sides. The bottom of the fixed platform (201) is fixedly connected to a support base (203).

4. The jig for sputtering coating according to claim 1, characterized in that: The screw (302) is threaded through and connected inside the first slider (304), and the side wall of the first threaded column (306) is provided with scale lines.

5. The jig for sputtering coating according to claim 1, characterized in that: The second slider (310) is slidably connected to the slide rod (309), and the two ends of the traction spring (311) are fixedly connected to the inner wall of the second clamp (308) and one side of the second slider (310). The side wall of the second threaded column (313) is provided with scale lines.

6. The jig for sputtering coating according to claim 3, characterized in that: The inner side of the moving platform (2) is provided with a limiting pulley, and the pulley on the inner side of the moving platform (2) is slidably engaged in the side groove (202).

7. The jig for sputtering coating according to claim 2, characterized in that: The observation window (104) is located on one side of the pick-up and drop-off tube window (101).

8. The jig for sputtering coating according to claim 3, characterized in that: The support base (203) is fixedly connected to the bottom of the inner cavity of the sputtering coating vacuum chamber (1).

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