Transport device and vacuum coating apparatus

Abstract

The utility model embodiment provides a kind of transport device and vacuum coating equipment, it is related to vacuum coating technical field.Vacuum coating equipment includes transport device, and transport device includes chamber, transport module, power module and drive assembly.Transport module includes two groups of transport components, and transport component includes multiple rotating shafts, and rotating shaft is set apart in the second direction along the chamber, and transport piece and cooperation wheel are set on rotating shaft, and the axis of rotating shaft is parallel with first direction, and transport piece and cooperation wheel can rotate with rotating shaft, and transport piece is used to transport plate body and can limit plate body to move in first direction, and in the two groups of transport components in this embodiment, corresponding two transport pieces in first direction are not installed on the same rotating shaft, but are set apart, so that the deformation of rotating shaft under vacuum state can be reduced, to reduce the abnormal sound caused by interference of transport piece when transporting plate body, and the situation that transport wheel appears dead lock can also be avoided.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and more specifically, to a transport device and a vacuum coating equipment. Background Technology

[0002] Vacuum coating technology is a novel material synthesis and processing technology, and an important component of the field of surface engineering technology. Vacuum coating technology utilizes physical and chemical methods to coat a solid surface with a special-property film, thereby endowing the solid surface with many superior properties compared to the solid material itself, such as wear resistance, high temperature resistance, corrosion resistance, oxidation resistance, radiation protection, electrical conductivity, magnetic permeability, insulation, and decorative properties.

[0003] In some existing transport devices, multiple transport wheel sets are installed in the chamber, spaced apart along a second direction. Each transport wheel set includes transport wheels spaced apart along a first direction. The transport wheels are connected together by a drive shaft, which drives the transport wheels to rotate. The drive shaft is relatively long, thus transporting the plate. However, after the chamber is evacuated, the deformation is greater closer to the center of the chamber. Due to the long length of the drive shaft, it is more prone to large deformation. This deformation can easily cause the transport wheels to interfere with the inner wall of the chamber or the drive shaft when rotating, resulting in additional friction when the transport wheels rotate, which can easily cause abnormal noise. In severe cases, the transport wheels may even seize up. Utility Model Content

[0004] The purpose of this utility model is to provide a transportation device and a vacuum coating equipment, which can reduce the occurrence of abnormal noises when transporting plates and also prevent the transport wheels from locking up.

[0005] The embodiments of this utility model can be implemented as follows:

[0006] In a first aspect, this utility model provides a transportation device, comprising:

[0007] Chamber;

[0008] The transport module includes two sets of transport components spaced apart in the chamber along a first direction. Each transport component includes multiple rotating shafts spaced apart along a second direction. The rotating shafts can rotate relative to the chamber around their own axes. A transport component and a mating wheel are sleeved on the rotating shaft. The transport component and the mating wheel can rotate with the rotating shaft. The axis of the rotating shaft is parallel to the first direction. The transport component is used to transport the plate and can restrict the movement of the plate in the first direction.

[0009] The power module includes two sets of power wheel sets spaced apart in the chamber along a first direction. The two sets of power wheel sets are correspondingly arranged with two sets of transport components. Each power wheel set includes a connecting rod extending along a second direction. Multiple power wheels spaced apart along the second direction are sleeved on the connecting rod. The multiple power wheels are correspondingly connected to multiple mating wheels. The first direction and the second direction form an angle.

[0010] The drive assembly is connected to the connecting rods of the two sets of power wheel sets.

[0011] In an optional implementation, the mating wheel is a mating magnetic wheel, and the driving wheel is a driving magnetic wheel, with the magnetic poles of the mating magnetic wheel and the driving magnetic wheel being opposite.

[0012] In an optional embodiment, the mating wheel is a mating bevel gear, and the driving wheel is a driving bevel gear that meshes with the mating bevel gear.

[0013] In an optional embodiment, the transport component includes a wheel body and a limiting part. The limiting part is disposed at one end of the wheel body in the axial direction. The radial dimension of the limiting part is larger than the radial dimension of the wheel body. The limiting parts in the two sets of transport components are located on both sides of the plate in the first direction. The limiting parts are used to restrict the movement of the plate in the first direction.

[0014] In an optional embodiment, the transport component includes transport wheels and limiting wheels that are spaced apart on the rotating shaft along a first direction. The radial dimension of the limiting wheels is larger than that of the transport wheels. The limiting wheels in the two sets of transport components are located on both sides of the plate in the first direction, and the limiting wheels are used to restrict the movement of the plate in the first direction.

[0015] In an optional embodiment, the drive assembly includes a drive member, a first transmission assembly, a second transmission assembly, and a transmission rod. The drive member can be driven to the first transmission assembly and the second transmission assembly via the transmission rod. The first transmission assembly is driven to the connecting rod of one of the power modules. The transmission rod extends along a first direction. The second transmission assembly is driven to the connecting rod of another power module.

[0016] In an optional embodiment, the drive assembly further includes a clutch, the drive member being drive-connected to the clutch, and the clutch being drive-connected to the first transmission assembly and the second transmission assembly via a transmission rod.

[0017] In an optional embodiment, the drive assembly further includes a reducer, and the drive component, reducer, and clutch are sequentially connected in a transmission manner.

[0018] In an optional embodiment, the power wheel set further includes multiple support parts, which are spaced apart along the second direction. A connecting rod passes through the multiple support parts, and the support parts are installed on the bottom wall of the chamber.

[0019] The and / or transport components also include multiple mounting seats, which are spaced apart along the second direction and correspond one-to-one with multiple rotating shafts, the rotating shafts passing through the mounting seats, and the mounting seats being installed on the bottom wall of the chamber.

[0020] In an optional embodiment, the transport device further includes a support assembly disposed within the cavity, the support assembly being located between the two sets of transport assemblies for supporting the plate.

[0021] In an optional embodiment, the support assembly includes a plurality of support seats spaced apart in the cavity along a second direction, each support seat being provided with a support wheel, the rotation axis of the support wheel being parallel to the first direction.

[0022] In an optional embodiment, the support base includes two mounting plates, and a connecting shaft is provided on both sides of the support wheel, with the two connecting shafts rotatably engaging with the two mounting plates respectively.

[0023] Secondly, this utility model provides a vacuum coating equipment, including a transport device according to any of the foregoing embodiments.

[0024] This utility model provides a transportation device including a chamber, a transportation module, a power module, and a drive assembly. The transportation module includes two sets of transportation components spaced apart within the chamber along a first direction. Each transportation component includes multiple rotating shafts spaced apart along a second direction within the chamber. Transportation components and mating wheels are mounted on the rotating shafts. The axis of the rotating shaft is parallel to the first direction. The transportation components and mating wheels can rotate with the rotating shafts. The transportation components are used to transport a plate and can restrict the movement of the plate in the first direction. The power module includes two sets of power wheel sets spaced apart within the chamber along the first direction. Each set of power wheel sets corresponds to one of the two sets of transportation components. Each power wheel set includes a connecting rod extending along the second direction. Multiple power wheels spaced apart along the length direction are mounted on the connecting rod. The multiple power wheels are connected to the multiple mating wheels in a corresponding transmission connection. The drive assembly is connected to the connecting rod of the two sets of power wheel sets. When the chamber is evacuated, the deformation is greater closer to the center of the chamber. If the shaft crosses the chamber in the first direction, the shaft is prone to large deformation. Shaft deformation can cause abnormal noise when the transport component rotates with the shaft. In this embodiment, the two transport components in the first direction of the two sets of transport components are not installed on the same shaft, but are spaced apart. Therefore, when transporting the plate in a vacuum state, the length of the shaft in the first direction of the transport component can be reduced, thereby reducing the deformation of the shaft in a vacuum state. This reduces the abnormal noise caused by interference of the transport component when transporting the plate and also prevents the transport wheels from locking up. Attached Figure Description

[0025] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a schematic diagram of the transportation device provided in this embodiment;

[0027] Figure 2 for Figure 1 A magnified view of a portion of the image;

[0028] Figure 3 This is a schematic diagram of the structure of the transport device after the hidden chamber is provided in this embodiment;

[0029] Figure 4 This is a schematic diagram of the assembly of the support base and the support wheel in an optional embodiment;

[0030] Figure 5 This is one of the structural schematic diagrams of the transport device after the hidden chamber is provided in an optional embodiment;

[0031] Figure 6 This is a second schematic diagram of the structure of the transport device after the hidden chamber is provided in an optional embodiment.

[0032] Icons: 1-Transporting device; 100-Cavity; 110-First inner wall; 120-Second inner wall; 130-Third inner wall; 140-Fourth inner wall; 150-Bottom wall; 210-Support base; 211-Mounting plate; 220-Support wheel; 221-Connecting shaft; 300-Transporting assembly; 310-Rotating shaft; 320-Mounting base; 330-Transporting component; 331-Wheel body; 332-Limiting part; 333-Transporting wheel; 334-Limiting wheel; 340 -Matching wheel; 400-Drive wheel set; 410-Connecting rod; 420-Drive wheel; 430-Support part; 510-First transmission assembly; 511-First reversing transmission component; 512-Second reversing transmission component; 513-First drive rod; 520-Second transmission assembly; 521-Third reversing transmission component; 522-Fourth reversing transmission component; 523-Second drive rod; 530-Transmission rod; 540-Drive component; 550-Clutch; 560-Reducer. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0034] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0035] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0036] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0037] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0038] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0039] In some existing transport devices, multiple transport wheel sets are installed in the chamber, spaced apart along a second direction. Each transport wheel set includes transport wheels spaced apart along a first direction. The transport wheels are connected together by a drive shaft, which drives the transport wheels to rotate. The drive shaft is relatively long, thus transporting the plate. However, after the chamber is evacuated, the deformation is greater closer to the center of the chamber. Due to the long length of the drive shaft, it is more prone to large deformation. This deformation can easily cause the transport wheels to interfere with the inner wall of the chamber or the drive shaft when rotating, resulting in additional frictional force on the transport wheels. Therefore, the transport wheels are prone to abnormal noise when transporting the plate, and in severe cases, the transport wheels may even seize up.

[0040] It should be noted that, with Figure 1 For reference, in this embodiment, the first direction is direction a, and the second direction is direction b.

[0041] The following describes in detail, with reference to the accompanying drawings, the specific structure of a transportation device 1 provided by this utility model and its corresponding technical effects.

[0042] Please refer to Figures 1-3 The present invention provides a transportation device 1 including a chamber 100, a transportation module, a power module and a drive component.

[0043] The transport module includes two sets of transport components 300 spaced apart in the chamber 100 along a first direction. Each transport component 300 includes a plurality of rotating shafts 310 spaced apart along a second direction. Each rotating shaft 310 is fitted with a transport component 330 and a mating wheel 340. The rotating shaft 310 can rotate relative to the chamber around its own axis. The transport component 330 and the mating wheel 340 can rotate with the rotating shaft 310. The axis of the rotating shaft 310 is parallel to the first direction of the chamber 100. The transport component 330 is used to transport the plate and can restrict the movement of the plate in the first direction.

[0044] The first direction and the second direction form an angle; more specifically, in this embodiment, the first direction and the second direction are perpendicular.

[0045] It should be noted that the verticality in this embodiment is not limited to the strict sense of verticality, but only to approximate verticality. Similarly, the parallelism in this embodiment is not limited to the strict sense of parallelism, but only to approximate parallelism.

[0046] The power module includes two sets of power wheel sets 400 spaced apart in the chamber 100 along a first direction. The two sets of power wheel sets 400 are correspondingly arranged with two sets of transport components 300. Each power wheel set 400 includes a connecting rod 410 extending along a second direction. Multiple power wheels 420 spaced apart along the second direction are sleeved on the connecting rod 410. The multiple power wheels 420 are correspondingly connected to multiple mating wheels 340. The drive component is connected to the connecting rod 410.

[0047] In the first direction, two sets of transport components 300 are spaced apart within the chamber 100. Therefore, the rotating shafts 310 corresponding to each other in the first direction are spaced apart and are not directly connected in the first direction. Thus, when the chamber 100 is evacuated, the length of the rotating shaft in the first direction of the transport component 300 can be reduced, thereby reducing the deformation of the rotating shaft 310 under vacuum conditions. This reduces the abnormal noise caused by interference to the transport component 330 when transporting the plate, and also prevents the transport component 330 from seizing up.

[0048] In detail, the chamber 100 includes a first inner wall 110 and a second inner wall 120 spaced apart along its first direction. The two sets of transport components 300 in the transport module are respectively close to the first inner wall 110 and the second inner wall 120, and the two sets of power wheel sets 400 in the power module are respectively close to the first inner wall 110 and the second inner wall 120.

[0049] In detail, in this embodiment, the chamber 100 is a rectangular chamber 100. The chamber 100 also includes a third inner wall 130 and a fourth inner wall 140 spaced apart along its second direction. The first inner wall 110, the third inner wall 130, the second inner wall 120 and the fourth inner wall 140 are connected end to end in sequence. The chamber 100 also includes a bottom wall 150. The first inner wall 110, the third inner wall 130, the second inner wall 120 and the fourth inner wall 140 are disposed on the bottom wall 150.

[0050] Two sets of transport components 300 are respectively set inside the chamber 100 near the first inner wall 110 and the second inner wall 120. Since the transport components 300 are set on both sides in the first direction inside the chamber 100, the stability of the plate during transport inside the chamber 100 can be guaranteed.

[0051] In this embodiment, the drive wheel assembly 400 is disposed within the chamber 100. Of course, in some alternative embodiments, the mating wheel 340 of the rotating shaft 310 and the drive wheel assembly 400 may also be disposed outside the chamber 100.

[0052] Understandably, considering cost and the need for a tight seal within chamber 100 during vacuuming, it is preferable to position the drive wheel assembly 400 within chamber 100. Similarly, positioning the mating wheel 340 of the rotating shaft 310 and the drive wheel assembly 400 within the chamber 100 reduces the number of components penetrating the chamber wall, thus ensuring a tight seal within chamber 100. Furthermore, reducing the number of perforations in the chamber wall and the number of corresponding seals significantly lowers the overall manufacturing cost of the equipment.

[0053] The drive assembly is used to drive the connecting rods 410 of the two sets of power wheel sets 400 to rotate. In other words, the drive assembly can drive the connecting rods 410 of the two sets of power wheel sets 400 to rotate simultaneously.

[0054] In detail, the drive assembly includes a drive component 540, a first transmission assembly 510, a second transmission assembly 520, and a transmission rod 530. The drive component 540 can be connected to the first transmission assembly 510 and the second transmission assembly 520 via the transmission rod 530.

[0055] The first transmission component 510 is connected to the connecting rod 410 of one of the two sets of power wheel sets 400, the transmission rod 530 extends along the first direction, and the second transmission component 520 is connected to the connecting rod 410 of the other set of power wheel sets 400.

[0056] In other words, a single drive component 540 can simultaneously drive the connecting rods 410 in both sets of power wheel sets 400 to rotate via the first transmission assembly 510, the second transmission assembly 520, and the transmission rod 530. This not only reduces the number of drive components 540 but also ensures the synchronicity of the rotation of the connecting rods 410 in the two sets of power wheel sets 400.

[0057] Understandably, the first transmission component 510 can be simultaneously connected to both the connecting rod 410 and the transmission rod 530, and the second transmission component 520 can also be simultaneously connected to both the connecting rod 410 and the transmission rod 530. Since the connecting rod 410 and the transmission rod 530 extend in different directions, in this embodiment, the extending directions of the connecting rod 410 and the transmission rod 530 are perpendicular. Therefore, the first transmission component 510 and the second transmission component 520 have two output ends, and both the first transmission component 510 and the second transmission component 520 can achieve reversing transmission.

[0058] Please refer to Figures 5-6 Optionally, in some embodiments, the drive assembly further includes a clutch 550, the drive member 540 is drivenly connected to the clutch 550, and the clutch 550 is drivenly connected to the first transmission assembly 510 and the second transmission assembly 520 via a transmission rod 530.

[0059] Understandably, the clutch 550 can control the on / off of power transmission with the first transmission component 510 and the second transmission component 520. Therefore, by providing the clutch 550, the power between the first transmission component 510 and the second transmission component 520 can be quickly disconnected, so that the transported plate is in a free state or a stopped state after the transmission is completed, which facilitates other supporting structures such as positioning devices to perform positioning operations or positioning constraints on the plate.

[0060] Optionally, the drive assembly also includes a reducer 560, with the drive element 540, reducer 560, and clutch 550 sequentially connected in a transmission manner. Understandably, the reducer 560 allows for precise control of the final output speed; different transmission speeds can be adjusted by changing the gear ratio of the reducer 560, making it easy to adjust the output speed to meet specific requirements.

[0061] Please refer to 3 for details. In this embodiment, the first transmission assembly 510 includes a first reversing transmission member 511, a first power rod 513, and a second reversing transmission member 512. The two ends of the first power rod 513 are respectively connected to the first reversing transmission member 511 and the second reversing transmission member 512. The first power rod 513 extends along the height direction of the chamber 100. The driving member 540 can be a drive motor. The driving member 540 is connected to the first reversing transmission member 511. The second reversing transmission member 512 is connected to the connecting rod 410 in one of the power wheel sets 400.

[0062] The second transmission assembly 520 includes a third reversing transmission member 521, a second power rod 523, and a fourth reversing transmission member 522. The two ends of the second power rod 523 are connected to the third reversing transmission member 521 and the fourth reversing transmission member 522, respectively. The second power rod 523 extends along the height direction of the chamber 100. The two ends of the transmission rod 530 are connected to the first reversing transmission member 511 and the third reversing transmission member 521, respectively. The fourth reversing transmission member 522 is connected to the connecting rod 410 in another set of power wheel sets 400.

[0063] Optionally, the first reversing transmission member 511 may include a meshing first transmission bevel gear and a second transmission bevel gear. The rotation axis of the first transmission bevel gear is coaxial with the transmission rod 530, and the rotation axis of the second transmission bevel gear is coaxial with the first power rod 513. The second reversing transmission member 512 may include a meshing third transmission bevel gear and a fourth transmission bevel gear. The rotation axis of the third transmission bevel gear is coaxial with the first power rod 513, and the rotation axis of the fourth transmission bevel gear is coaxial with the connecting rod 410. That is, the second transmission bevel gear and the third transmission bevel gear can be sleeved on the first power rod 513, and the fourth transmission bevel gear can be sleeved on the connecting rod 410 of one of the power wheel sets 400.

[0064] Optionally, the third reversing transmission member 521 may include a meshing fifth transmission bevel gear and a sixth transmission bevel gear. The rotation axis of the fifth transmission bevel gear is coaxial with the transmission rod 530 and can be sleeved on the transmission rod 530. The sixth transmission bevel gear can be sleeved on the second power rod 523. The fourth reversing transmission member 522 may include a meshing seventh transmission bevel gear and an eighth transmission bevel gear. The seventh transmission bevel gear can be sleeved on the second power rod 523, and the eighth transmission bevel gear can be sleeved on the connecting rod 410 of another set of power wheel sets 400.

[0065] With the above settings, the drive unit 540 can simultaneously drive the connecting rod 410 of the two power wheel sets 400 to rotate.

[0066] Optionally, in this embodiment, the mating wheel 340 is a mating bevel gear, and the driving wheel 420 is a driving bevel gear meshing with the mating bevel gear. This ensures that when the driving assembly drives the connecting rod 410 to rotate, the driving wheel 420 on the connecting rod 410 rotates, thereby causing the mating wheel 340 on the corresponding rotating shaft 310 to rotate. This, in turn, drives the rotating shaft 310 to rotate along with the mating wheel 340, ultimately causing the transport component 330 to rotate, facilitating the transport component 330 to transport the plate. The mating bevel gear and the driving bevel gear can operate with their axes intersecting, making the layout of the entire mechanical system more compact, helping to save space, and also providing high transmission efficiency.

[0067] Optionally, in other embodiments, the mating wheel 340 is a mating magnetic wheel, and the driving wheel 420 is a driving magnetic wheel. The magnetic poles of the mating magnetic wheel and the driving magnetic wheel are opposite. It can be understood that by setting the driving magnetic wheel and the mating magnetic wheel, the driving wheel 420 and the corresponding driving wheel 340 can be spaced apart, meaning the driving wheel 420 and the corresponding driving wheel 340 do not directly contact each other. Therefore, the friction and wear problems of traditional mechanical transmissions are eliminated. This not only extends the service life of the equipment but also reduces maintenance frequency and costs. It also avoids the particulate or lubricating oil contamination problems that may occur in traditional mechanical transmissions, ensuring the purity of the process environment.

[0068] As can be seen from the above, the transmission connection in this embodiment can be understood as a transmission connection in which the mating wheel 340 and the power wheel 420 are in contact, or it can be understood as a transmission connection in which the mating wheel 340 and the power wheel 420 are not in contact.

[0069] Please refer to Figure 2 Optionally, in some embodiments, the transport component 330 includes a wheel body 331 and a limiting part 332. The limiting part 332 is disposed at one end of the wheel body 331 in the axial direction. The radial dimension of the limiting part 332 is larger than the radial dimension of the wheel body 331. In the two sets of transport components 300, the limiting part 332 is located on both sides of the plate in the first direction. The limiting part 332 is used to restrict the movement of the plate in the first direction.

[0070] Understandably, when the plate is placed on the wheel body 331, the limiting parts 332 in the two sets of transport components 300 are located on both sides of the plate in the first direction, ensuring that the plate will not easily shift when transported by the transport component 330. During limiting, both the wheel body 331 and the limiting parts 332 are fitted onto the rotating shaft 310 and can rotate synchronously with the shaft. While the wheel body 331 provides support, the limiting parts 332 rotate synchronously to achieve limiting.

[0071] Please refer to Figures 5-6 Optionally, in some other embodiments, the transport component 330 includes transport wheels 333 and limiting wheels 334 spaced apart along the pivot in the first direction. The radial dimension of the limiting wheels 334 is larger than that of the transport wheels 333. The limiting wheels 334 in the two sets of transport components 300 are located on both sides of the plate in the first direction, and the limiting wheels 334 are used to restrict the movement of the plate in the first direction. Similarly, due to the setting of the limiting wheels 334, it can be ensured that the plate will not easily deviate when transported by the transport component 330.

[0072] It should be noted that when the transport component 330 is composed of an integral wheel body 331 and a limiting part 332, the thickness of the transport component 330 in the first direction is relatively large. However, when the transport component 330 is composed of a split transport wheel 333 and a limiting wheel 334 arranged at intervals, the thickness of the limiting wheel 334 in the first direction can be reduced. In this embodiment, the transport device 1 is applied to a vacuum coating equipment. When the chamber 100 is under negative pressure and the plate on the transport component 330 needs to be coated, the size of the opening corresponding to the limiting wheel 334 on the baffle plate above the chamber can be reduced due to the smaller thickness of the limiting wheel 334. This reduces the area of ​​the film material deposited on the back of the plate or near the limiting wheel, thus preventing coating around the plate.

[0073] Optionally, in this embodiment, the power wheel assembly 400 further includes a plurality of support portions 430, which are spaced apart along the second direction of the chamber 100. The connecting rod 410 passes through the plurality of support portions 430, and the support portions 430 are installed on the bottom wall 150 of the chamber 100. By providing the support portions 430, the connecting rod 410 can be prevented from deforming in a vacuum environment, thereby ensuring the normal rotation of the power wheel 420.

[0074] It should be noted that the connecting rod 410 in this embodiment can be a single rod or multiple sub-connecting rods 410 connected together by a coupling.

[0075] Optionally, to facilitate the rotation of the connecting rod 410, a bearing is installed on the support part 430, and the connecting rod 410 rotates in conjunction with the bearing.

[0076] Optionally, to ensure the stable installation of the rotating shaft 310 within the cavity, the transport assembly 300 further includes multiple mounting seats 320. These mounting seats 320 are spaced apart along the second direction and correspond one-to-one with each of the rotating shafts 310. The rotating shaft 310 passes through the mounting seat 320 and can rotate relative to it. The mounting seats are mounted on the bottom wall of the cavity 100. In other words, the rotating shaft 310 is installed within the cavity 100 via the mounting seats 320.

[0077] Please refer to Figure 1 , Figure 3 and Figure 4 Optionally, in some embodiments, the transport device further includes a support assembly disposed within the chamber 100 and located between two sets of transport assemblies 300 for supporting the plate. It is understood that the chamber 100 is relatively large, and the edges of the plate are supported only by the transport members 330, while the middle of the plate is prone to deformation. Therefore, the support assembly can be used to support the middle of the plate.

[0078] Please refer to Figure 1 and Figure 3The support assembly includes a plurality of support seats 210 spaced apart within the chamber 100 along a second direction. Each support seat 210 is equipped with a support wheel 220, the axis of rotation of which is parallel to the first direction of the chamber 100. Understandably, when the transport component 330 transports the plate, the support wheel 220 supports the plate, and the support wheel 220 and the plate are in rolling contact, which reduces friction between the plate and the support wheel 220, thereby facilitating the transport of the plate within the chamber 100.

[0079] It should be noted that in this embodiment, in the first direction of the chamber 100, the support assembly is located in the middle of the chamber 100. That is, the multiple support seats 210 are in the middle of the chamber 100 in the first direction to ensure that the support wheel 220 supports the middle of the plate.

[0080] Of course, in some other embodiments, the support base 210 may not be limited to being disposed in the middle of the chamber 100 in the first direction, but may also be disposed in other positions. For example, there may be multiple sets of support components, with multiple sets of support components spaced apart along the first direction of the chamber 100, and the support base 210 of each set of support components spaced apart along the second direction of the chamber 100.

[0081] It should be noted that "multiple" in this embodiment should be understood as two or more quantities.

[0082] Furthermore, in this embodiment, the support component, the transport component 330, and the drive wheel 420 are arranged sequentially at intervals along the first direction of the chamber 100, wherein the drive wheel 420 is located between the first inner wall 110 and / or the second inner wall 120 and the transport component 330.

[0083] In other words, for the power wheel assembly 400 and the transport component 300 near the first inner wall 110, the power wheel 420 of the power wheel assembly 400 is located between the first inner wall 110 and the transport component 330. That is, the power wheel 420 of this assembly is closer to the first inner wall 110 than the transport component 330. Similarly, for the power wheel assembly 400 and the transport component 300 near the second inner wall 120, the power wheel 420 of the power wheel assembly 400 is located between the second inner wall 120 and the transport component 330, which reduces the influence of the vacuum pressure in the chamber 100 on the power wheel 420.

[0084] Please refer to Figure 4Optionally, in some embodiments, the support base 210 includes two mounting plates 211, which are spaced apart at the bottom of the chamber along a first direction. A connecting shaft 221 is provided on both sides of the support wheel 220, and the two connecting shafts 221 are rotatably engaged with the two mounting plates 211 respectively. It is understood that the support wheel 220 is located between the two mounting plates 211, and the connecting shafts 221 on both sides of the support wheel 220 are rotatably connected to the two mounting plates 211 respectively. It is understood that the arrangement of the two connecting shafts 221 enables the support wheel 220 to be stably mounted on the support base 210, thereby reducing the impact of vacuum pressure on the support wheel 220 and ensuring that the support wheel 220 normally supports the plate.

[0085] This utility model embodiment also provides a vacuum coating equipment, which includes the aforementioned transport device. It should be noted that the transport device can be applied within the coating chamber of the vacuum coating equipment, as well as within the loading chamber and transition chamber. Since the vacuum coating equipment includes the aforementioned transport device, it also possesses the technical effects of the transport device; therefore, the technical effects of the vacuum coating equipment will not be elaborated upon here.

[0086] In summary, this utility model embodiment provides a transport device 1 and a vacuum coating equipment. The vacuum coating equipment includes a transport device, and the transport device 1 includes a chamber 100, a transport module, a power module, and a drive component. The transport module includes two sets of transport components 300 spaced apart in the chamber 100 along a first direction. Each transport component 300 includes multiple rotating shafts 310 spaced apart along a second direction of the chamber 100. A transport component 330 and a mating wheel 340 are sleeved on the rotating shaft 310. The axis of the rotating shaft 310 is parallel to the first direction. The transport component 330 and the mating wheel 340 can rotate with the rotating shaft. The transport component 330 is used to transport the plate and can restrict the movement of the plate in the first direction. The power module includes two sets of power wheel sets 400 spaced apart in the chamber 100 along the first direction. The two sets of power wheel sets 400 are arranged one-to-one with the two sets of transport components 300. Each power wheel set 400 includes a connecting rod 410 extending along the second direction. Multiple power wheels 420 spaced apart along the length direction are sleeved on the connecting rod 410. The multiple power wheels 420 and the multiple mating wheels 340 are connected in a transmission manner one-to-one. The drive component is connected in a transmission manner to the connecting rod 410 of the two sets of power wheel sets 400. In this embodiment, the two transport components 330 in the first direction of the two sets of transport components 300 are not installed on the same rotating shaft 310, but are arranged at intervals. Therefore, when transporting the plate in a vacuum state, the length of the rotating shaft 310 in the first direction of the transport component 300 can be reduced, thereby reducing the deformation of the rotating shaft 310 in a vacuum state, so as to reduce the abnormal noise caused by interference of the transport component 330 when transporting the plate.

[0087] The above are merely specific embodiments of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A transport device, characterized in that, include: Chamber; The transport module includes two sets of transport components spaced apart in the cavity along a first direction. Each transport component includes a plurality of rotating shafts spaced apart along a second direction. Each rotating shaft can rotate relative to the cavity around its own axis. A transport component and a mating wheel are sleeved on the rotating shaft. The transport component and the mating wheel can rotate with the rotating shaft. The axis of the rotating shaft is parallel to the first direction. The transport component is used to transport the plate and can restrict the movement of the plate in the first direction. The power module includes two sets of power wheel sets spaced apart in the chamber along the first direction. The two sets of power wheel sets are correspondingly arranged with the two sets of transport components. Each power wheel set includes a connecting rod extending along the second direction. Multiple power wheels spaced apart along the second direction are sleeved on the connecting rod. The multiple power wheels are correspondingly connected to multiple mating wheels. The first direction and the second direction form an angle. A drive assembly is connected to the connecting rods of the two sets of power wheel sets.

2. The transport device according to claim 1, characterized in that: The mating wheel is a mating magnetic wheel, and the driving wheel is a driving magnetic wheel. The magnetic poles of the mating magnetic wheel and the driving magnetic wheel are opposite.

3. The transport device according to claim 1, characterized in that: The mating wheel is a mating bevel gear, and the driving wheel is a driving bevel gear that meshes with the mating bevel gear.

4. The transport device according to claim 1, characterized in that: The transport component includes a wheel body and a limiting part. The limiting part is disposed at one end of the wheel body in the axial direction. The radial dimension of the limiting part is larger than the radial dimension of the wheel body. The limiting parts in the two sets of transport components are located on both sides of the plate in the first direction. The limiting parts are used to restrict the movement of the plate in the first direction.

5. The transport device according to claim 1, characterized in that: The transport component includes transport wheels and limiting wheels that are spaced apart from each other on the rotating shaft along the first direction. The radial dimension of the limiting wheel is larger than that of the transport wheel. The limiting wheels in the two sets of transport components are located on both sides of the plate in the first direction. The limiting wheels are used to restrict the movement of the plate in the first direction.

6. The transport device according to claim 1, characterized in that: The drive assembly includes a drive component, a first transmission assembly, a second transmission assembly, and a transmission rod. The drive component is driveably connected to the first transmission assembly and the second transmission assembly via the transmission rod. The first transmission assembly is driveably connected to the connecting rod of one set of the power modules. The transmission rod extends along the first direction. The second transmission assembly is driveably connected to the connecting rod of the other set of the power modules.

7. The transport device according to claim 6, characterized in that: The drive assembly further includes a clutch, the drive component is drive-connected to the clutch, and the clutch is drive-connected to the first transmission assembly and the second transmission assembly via the transmission rod.

8. The transport device according to claim 7, characterized in that: The drive assembly also includes a reducer, and the drive component, the reducer, and the clutch are sequentially connected in a transmission manner.

9. The transport device according to claim 1, characterized in that: The power wheel assembly also includes multiple support parts, which are spaced apart along the second direction. The connecting rod passes through the multiple support parts, and the support parts are installed on the bottom wall of the chamber. And / or the transport assembly further includes a plurality of mounting seats, which are spaced apart along the second direction and correspond one-to-one with a plurality of the rotating shafts, the rotating shafts passing through the mounting seats, and the mounting seats being mounted on the bottom wall of the chamber.

10. The transport device according to any one of claims 1-9, characterized in that: The transport device further includes a support assembly disposed within the cavity, the support assembly being located between the two sets of transport assemblies for supporting the plate.

11. The transport device according to claim 10, characterized in that: The support assembly includes a plurality of support seats spaced apart in the cavity along the second direction, each support seat being provided with a support wheel, the rotation axis of the support wheel being parallel to the first direction.

12. The transport device according to claim 11, characterized in that: The support base includes two mounting plates, and a connecting shaft is provided on both sides of the support wheel. The two connecting shafts are rotatably engaged with the two mounting plates respectively.

13. A vacuum coating apparatus, characterized in that, Includes the transport device as described in any one of claims 1-12.

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