Coaxiality measuring device

Abstract

This utility model discloses a coaxiality measuring device, which includes a first base, a measuring structure, and a first adjusting and locking structure. A first through hole is formed on the first base. The measuring structure is disposed on the first base and includes at least three measuring elements spaced circumferentially along the first through hole. Each measuring element is used to measure the radial dimension of the structure under test at its location. The measuring structure has at least a predetermined state in which the measuring heads of the multiple measuring elements extend radially along the first through hole to the radially inner side of the hole wall and are located on the same imaginary cylindrical surface. The measuring heads of the multiple measuring elements are all located on the same cross-section of the imaginary cylindrical surface. Therefore, by comparing the measurement data of each measuring element, the coaxiality deviation between one structure under test and another can be obtained. The measurement results are accurate and reliable, and the device is easy to operate.

Description

Technical Field

[0001] This utility model relates to the field of crystal growth technology, and in particular to a coaxiality measuring device. Background Technology

[0002] Currently, the CZ method, which uses a crystal growth furnace to grow crystals, involves contacting a seed crystal with the molten liquid in a crucible used for crystal growth. The seed crystal is then slowly pulled upwards and rotated, with the molten liquid growing along the seed crystal. If the rotation axis of the seed crystal and the crucible axis are not collinear, the molten liquid in the crucible will cause the crystal rod to wobble during crucible rotation, causing a shift in the solid-liquid interface of crystal growth, disrupting the crystal growth environment, and leading to a decrease in crystal growth quality. To ensure that the rotation axis of the seed crystal and the crucible axis are collinear, the common practice is to make the axis of the seed crystal collinear with the axis of the lifting axis used to carry and pull the seed crystal, and also to make the axis of the lifting axis collinear with the axis of the crucible axis.

[0003] In related technologies, a target plate with concentric circles is first set on the top of the crucible shaft, and a connecting block is installed at the lower end of the lifting shaft. A soft rope is threaded through the connecting block, and a hammer with a pointed tip is suspended at the lower end of the soft rope. The eccentricity between the tip of the hammer and the center of the target plate is observed to determine whether the axis of the crucible shaft and the axis of the lifting shaft are collinear. However, this detection method has a large error, low detection accuracy, and low detection efficiency. Utility Model Content

[0004] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a coaxiality measuring device. By comparing the measurement data of each measuring component, it can determine whether the center of the cross-section at the location of the measured structure and the center of the cross-section of the same cylindrical surface where the measuring heads of multiple measuring components are located coincide. Furthermore, using the above setup, the coaxiality deviation between the measured structure and another measured structure can be obtained. The measurement results are accurate and reliable, and the operation is relatively simple, thus improving detection efficiency.

[0005] According to a first aspect of the present invention, a coaxiality measuring device includes: a first base, a measuring structure, and a first adjustment and locking structure. A first through hole is formed on the first base. The measuring structure is disposed on the first base and includes at least three measuring elements spaced circumferentially along the first through hole. Each measuring element is used to measure the radial dimension of the structure under test at its location. The measuring structure has at least a predetermined state in which the measuring heads of the plurality of measuring elements extend radially along the first through hole to the radially inner side of the hole wall of the first through hole and are located on the same imaginary cylindrical surface. The measuring heads of the plurality of measuring elements are located on the same cross-section of the imaginary cylindrical surface. The first adjustment and locking structure is at least used to adjust and lock the position of the first base on a plane perpendicular to the central axis of the first through hole.

[0006] According to the coaxiality measuring device of this utility model embodiment, in a predetermined state, the measuring heads of multiple measuring elements are located on the same imaginary cylindrical surface, and the measuring heads of multiple measuring elements extend radially to the inner side of the hole wall of the first through hole. When the structure to be measured passes through the first through hole and / or other components come into contact with the measuring head, each measuring head moves radially away from the structure to be measured in the first through hole, thereby obtaining the radial dimension of the structure to be measured at each measuring element's location. When the measurement results of each measuring element are the same, it can be considered that the center of the cross section of the structure to be measured at the location of the measuring element coincides with the virtual center of the same cross section of the imaginary cylindrical surface where the measuring heads of multiple measuring elements are located. When the measurement results of some measuring elements are different, it can be considered that the center of the cross section of the structure to be measured at the location of the measuring element does not coincide with the virtual center of the same cross section of the imaginary cylindrical surface where the measuring heads of multiple measuring elements are located. Therefore, by comparing the measurement data of each measuring component, it is possible to determine whether the center of the cross section at the location of the measuring structure and the virtual center of the same cross section of the imaginary cylindrical surface where the measuring heads of multiple measuring components are located coincide. Furthermore, the coaxiality deviation between the measured structure and another measured structure can be obtained using the above settings. The measurement results are accurate and reliable, and the operation is relatively simple, which helps to improve the detection efficiency.

[0007] In some embodiments, the measuring structure further includes a plurality of second adjustment and locking structures all disposed on the first base. Each measuring element corresponds to one second adjustment and locking structure and is respectively installed on the first base through the corresponding second adjustment and locking structure. The second adjustment and locking structure is configured to: at least continuously adjust and lock the position of the corresponding measuring element in the radial direction relative to the first through hole in real time. The coaxiality measuring device further includes: a second base and a positioning cylinder. The second base is positioned and fitted to the first through hole and is separable from the first through hole. The positioning cylinder is positioned and fitted to the second base. The outer peripheral wall of the positioning cylinder is a cylindrical surface and is adapted to be coaxially arranged with an imaginary cylindrical surface. On a plane perpendicular to the central axis of the first through hole, the orthographic projection of the outer peripheral wall of the positioning cylinder is spaced within the outer contour range of the orthographic projection of the hole wall of the first through hole. The positioning cylinder is adapted to radially stop with the measuring heads of the plurality of measuring elements, so that the positioning cylinder cooperates with the second adjustment and locking structure to adjust the measurement results of the plurality of measuring elements to be equal.

[0008] In some embodiments, the second base includes at least three self-centering components arranged sequentially along the circumference, each self-centering component having a self-positioning portion, and the self-positioning portions of the multiple self-centering components splicing together to form a cylindrical surface and limiting the fit with the positioning cylinder.

[0009] In some embodiments, the second adjustment locking structure includes a third base, which magnetically engages with the first base.

[0010] In some embodiments, the second adjustment and locking structure is further used to adjust and lock the position of the corresponding measuring element in the axial direction relative to the first through hole. The first base has a mounting surface, the first through hole penetrates the mounting surface, the central axis of the first through hole is parallel or coincident with the central axis of the positioning cylinder, and both are perpendicular to the mounting surface. The measuring structure is disposed on the mounting surface. The second adjustment and locking structure further includes a first connecting rod, a second connecting rod, and a locking member. One end of the first connecting rod and one end of the second connecting rod are pivotally connected. The locking member is disposed at the pivot position between the first connecting rod and the second connecting rod and is used to lock the included angle between the first connecting rod and the second connecting rod. The end of the first connecting rod away from the second connecting rod is connected to the third base through a universal damping ball hinge, and the end of the second connecting rod away from the first connecting rod is connected to the measuring element through a universal damping ball hinge.

[0011] In some embodiments, the first adjustment locking structure includes a bracket and a first adjustment structure. The bracket is connected to a first base. The first adjustment structure is disposed on the bracket and includes at least three first adjustment units circumferentially spaced along the first through hole. The first adjustment units are spaced radially outward from the first through hole. The radially inner end of each first adjustment unit is adapted to abut against the mounting platform, and the position of each first adjustment unit radially in the first through hole is adjustable.

[0012] In some embodiments, the edge of the bracket has a plurality of lugs spaced apart circumferentially, the lugs extending axially, and the first adjustment unit passing through the corresponding lug radially and threadedly engaging with the lug.

[0013] In some embodiments, the first adjustment and locking structure further includes a second adjustment structure for adjusting and locking the position of the first base in the axial direction of the first through hole. The second adjustment structure is connected between the bracket and the first base and is used to adjust and lock the distance between the bracket and the first base.

[0014] In some embodiments, the second adjustment structure includes at least three second adjustment units arranged circumferentially along the first through hole, each second adjustment unit being connected to the bracket and the first base, so as to continuously adjust and lock the distance between the bracket and the first base at the location of the second adjustment unit in real time.

[0015] In some embodiments, the second adjustment unit includes: a third connecting rod, a first locking nut and a second locking nut. The third connecting rod passes through one of the bracket and the first base along the axial direction of the first through hole and is fixedly connected to the other. The first locking nut and the second locking nut are both sleeved on the outside of the third connecting rod and threadedly engaged with the third connecting rod. The first locking nut and the second locking nut respectively abut against both sides of one of the bracket and the first base.

[0016] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0017] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0018] Figure 1 This is a schematic diagram of a coaxiality measuring device according to some embodiments of the present invention;

[0019] Figure 2 yes Figure 1 The diagram shows the assembly of the coaxiality measuring device, the positioning cylinder, and the second chassis.

[0020] Figure 3 yes Figure 2 Another assembly diagram of the coaxiality measuring device, positioning cylinder, and second chassis shown in the figure;

[0021] Figure 4 yes Figure 2 A partial schematic diagram of the coaxiality measuring device, positioning cylinder, and second chassis shown in the figure;

[0022] Figure 5 yes Figure 4 A partial schematic diagram of the coaxiality measuring device, positioning cylinder, and second chassis shown in the figure;

[0023] Figure 6 yes Figure 5 The diagram shows the assembly of the positioning cylinder and the second base.

[0024] Figure 7 yes Figure 1 The diagram shows the assembly of the coaxiality measuring device and the cooling jacket.

[0025] Figure 8 yes Figure 5 The diagram shows the assembly of the coaxiality measuring device, cooling jacket, crucible shaft, and lifting shaft.

[0026] Figure 9 yes Figure 6 A schematic diagram of the crucible shaft shown;

[0027] Figure 10 This is a flowchart of a coaxiality measurement method according to some embodiments of the present invention;

[0028] Figure 11 This is a flowchart of a coaxiality measurement method according to some embodiments of the present invention;

[0029] Figure 12 This is a flowchart of a coaxiality measurement method according to some embodiments of the present invention.

[0030] Figure 13 This is another flowchart of a coaxiality measurement method according to some embodiments of the present invention;

[0031] Figure 14 This is another flowchart of a coaxiality measurement method according to some embodiments of the present invention.

[0032] Reference numerals: coaxiality measuring device 100, first base 10, first through hole 10a, measuring structure 2, measuring component 20, measuring head 20a, first adjustment and locking structure 3, bracket 30, second through hole 30a, first adjustment structure 31, first adjustment unit 32, lug 33, second adjustment structure 34, second adjustment unit 35, third connecting rod 35a, first locking nut 35b, second locking nut 35c, grip cap 36, non-metallic wear-resistant structure 37, mating groove 38, second adjustment and locking structure 4, third base 40, first connecting rod 41, second connecting rod 42, locking component 43, positioning cylinder 5, second base 6, self-centering component 60, self-positioning part 61, cooling jacket 70, lifting shaft 71, crucible shaft 72, main shaft 72a, extension shaft 72b, mounting platform 74. Detailed Implementation

[0033] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0034] The following disclosure provides numerous different embodiments or examples for implementing various structures of the present invention. To simplify the disclosure, specific examples of components and arrangements are described below. These are merely examples and are not intended to limit the scope of the invention. Furthermore, reference numerals and / or letters may be repeated in different examples. Such repetition is for simplification and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed. In addition, examples of various specific processes and materials are provided in this invention; however, those skilled in the art will recognize the applicability of other processes and / or the use of other materials.

[0035] In the description of the embodiments in this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0036] Hereinafter, with reference to the accompanying drawings, a coaxiality measuring device 100 according to an embodiment of the present invention will be described.

[0037] Please refer to Figure 1 and Figure 2 The coaxiality measuring device 100 includes: a first base 10, a measuring structure 2, and a first adjustment and locking structure 3. The first base 10 has a first through hole 10a. The measuring structure 2 is disposed on the first base 10 and includes at least three measuring elements 20 (e.g., three, four, five, etc.) spaced circumferentially along the first through hole 10a. Each measuring element 20 is used to measure the radial dimension of the structure under test at its location. The measuring structure 2 has at least a predetermined state in which the measuring heads 20a of the multiple measuring elements 20 extend radially along the first through hole 10a to the radially inner side of the hole wall of the first through hole 10a, and the measuring heads 20a of the multiple measuring elements 20 are located on the same imaginary cylindrical surface and on the same cross-section of the imaginary cylindrical surface. The first adjustment and locking structure 3 is at least used to adjust and lock the position of the first base 10 on a plane perpendicular to the central axis of the first through hole 10a. It can be understood that the first through hole 10a has a central axis L, the extension direction of the central axis L is the axial direction of the first through hole 10a, the direction around the central axis L is the circumferential direction of the first through hole 10a, and in the radial plane, the direction passing through the central axis L is the radial direction of the first through hole 10a. The radial plane is perpendicular to the central axis L.

[0038] As can be seen, when it is necessary to measure the coaxiality of two structures to be measured, the structure to be measured can extend into and contact the measuring element 20 through the first through hole 10a, or the structure to be measured can extend into and contact the measuring element 20 through other components (in which case the structure to be measured may not extend into the first through hole 10a). This facilitates the flexibility of the coaxiality measuring device 100 and makes it suitable for various different usage situations. It can be understood that the two structures to be measured can be two different shaft segments on the same axis, or they can be two different shafts. For example, the axis of the first through hole 10a is vertical. In a crystal growth furnace, the lifting shaft 71 is located on the upper side of the crucible shaft 72. To measure the coaxiality of the crucible shaft 72 and the lifting shaft 71, the crucible shaft 72 can pass through the first through hole 10a and contact the measuring element 20, while the lifting shaft 71 can contact the measuring element 20 without passing through the first through hole 10a. This allows the coaxiality measuring device 100 to better adapt to the installation state of both the crucible shaft 72 and the lifting shaft 71 in the production state.

[0039] The first adjustment and locking structure 3 is used to adjust and lock the position of the first base 10 on the plane perpendicular to the central axis of the first through hole 10a. That is, the first adjustment and locking structure 3 can make the first base 10 move radially along the first through hole 10a, thereby indirectly changing the position of the multiple measuring elements 20 on the plane perpendicular to the central axis of the first through hole 10a. In order to achieve the virtual center of the cross section of the structure under test corresponding to the measuring structure 2 at the location of the measuring structure 20 and the virtual center of the same cross section of the imaginary cylindrical surface where the measuring head 20a of the multiple measuring elements 20 is located, or to achieve the initial coincidence of the central axis of the structure under test and the central axis of the same imaginary cylindrical surface where the measuring head 20a of the multiple measuring elements 20 is located, so as to prepare for the measurement of the second structure under test and improve the measurement efficiency and measurement accuracy of the coaxiality measuring device 100. Furthermore, the first adjustment and locking structure 3 can lock the position of the first base 10 in the axial direction of the first through hole 10a. At the same time, the first adjustment and locking structure 3 can lock the position of the first base 10 in the plane perpendicular to the central axis of the first through hole 10a. This ensures that when the structure under test contacts the measuring head 20a of the multiple measuring elements 20, the first base 10 and the measuring structure 2 are less likely to tilt or shake. This makes the setting position of the coaxiality measuring device 100 more stable and facilitates the improvement of the stability of the coaxiality measuring device 100.

[0040] The measuring structure 2 has a predetermined state in which the measuring heads 20a of multiple measuring elements 20 extend radially along the first through hole 10a to the radially inner side of the hole wall of the first through hole 10a, and the measuring heads 20a of multiple measuring elements 20 are located on the same imaginary cylindrical surface, and the measuring heads 20a of multiple measuring elements 20 are located on the same cross-section of the imaginary cylindrical surface. In the predetermined state, the diameter of the imaginary cylindrical surface is smaller than the diameter of the first through hole 10a, and along the axial direction of the imaginary cylindrical surface, at least a portion of the projections of the multiple measuring heads 20a are located inside the projection of the hole wall of the first through hole 10a, and the projections of the multiple measuring heads 20a are located on the same circle.

[0041] It is understandable that the imaginary cylindrical surface can be an imaginary cylindrical surface with a certain diameter, for example, the position of the measuring element 20 relative to the first base 10 in the radial direction of the first through hole 10a remains unchanged; of course, if the position of the measuring element 20 in the radial direction of the first through hole 10a is adjustable, then the diameter of the imaginary cylindrical surface is uncertain.

[0042] Furthermore, the measuring structure 2 may only have a predetermined state, in which case the measuring structure 2 is always in the predetermined state; or, the measuring structure 2 may have not only a predetermined state but also a non-predetermined state. For example, in the non-predetermined state, the measuring structure 2 satisfies at least one of the following conditions: Condition A1, the multiple measuring heads 20a are not located on the same imaginary cylindrical surface; Condition A2, at least one of the multiple measuring heads 20a does not extend to the radially inner side of the hole wall of the first through hole 10a; Condition A3, the multiple measuring heads 20a are not located on the same cross section of the imaginary cylindrical surface, or, although the multiple measuring heads 20a are located on the same plane, the plane is not perpendicular to the central axis of the imaginary cylindrical surface.

[0043] Furthermore, the central axis of the imaginary cylindrical surface and the central axis of the first through hole 10a can be parallel, coincident, or non-parallel, with a small angle between them, for example, not exceeding 10°. Of course, if the space occupied by the coaxiality measuring device 100 is not considered, the angle between the central axis of the imaginary cylindrical surface and the central axis of the first through hole 10a can also exceed 10°. It is easy to understand that even if there is eccentricity or skewness between the central axis of the imaginary cylindrical surface and the central axis of the first through hole 10a due to processing errors, it will not affect the measurement. In the following description of this application, the central axis of the imaginary cylindrical surface and the central axis of the first through hole 10a are parallel or coincident as an example. Those skilled in the art can easily understand other embodiments after reading the following technical solutions.

[0044] It can be seen that the coaxiality measuring device 100 can be used to measure the coaxiality deviation of two structures under test. For example, in a predetermined state, when the first structure under test contacts multiple measuring elements 20, each measuring head 20a moves radially away from the structure under test in the direction away from the structure under test in the first through hole 10a, thereby obtaining the radial dimension of the structure under test measured by each measuring element 20 at the location of each measuring element 20 (this radial dimension can be understood as the radial dimension relative to the imaginary cylindrical surface). If the measurement results of each measuring element 20 are the same, it can be considered that the center of the cross-section of the first structure under test corresponding to the location of the measuring structure 2 coincides with the virtual center of the same cross-section of the imaginary cylindrical surface where the measuring heads 20a of multiple measuring elements 20 are located. At this time, it is not necessary to operate the first adjustment locking structure 3. However, if the measurement results of some measuring elements 20 are different, it can be considered that the center of the cross-section of the first structure under test corresponding to the location of the measuring structure 2 coincides with the virtual center of the same cross-section of the imaginary cylindrical surface where the measuring heads 20a of multiple measuring elements 20 are located. If the virtual centers of the measuring heads 20a of multiple measuring elements 20 on the same cross-section of the imaginary cylindrical surface do not coincide, then the position of the first base 10 on the plane perpendicular to the central axis of the first through hole 10a needs to be adjusted by the first adjusting locking structure 3, thereby indirectly adjusting the position of the multiple measuring elements 20 on the plane perpendicular to the central axis of the first through hole 10a, until the measurement results of the multiple measuring elements 20 are the same. Next, the first structure to be tested can be removed, and the second structure to be tested can be brought into contact with the multiple measuring elements 20. At this time, the coaxiality deviation of the two structures to be tested can be calculated based on the measurement results of the multiple measuring elements 20. That is, the coaxiality deviation of the two structures to be tested can be calculated by measuring the radial dimension of the first structure to be tested at each position of the measuring element 20 and measuring the radial dimension of the second structure to be tested at each position of the measuring element 20.

[0045] During the process of the first structure under test contacting multiple measuring elements 20, the first adjusting and locking structure 3 can adjust and lock the position of the first base 10. The first adjusting and locking structure 3 can also adjust the position of the first through hole 10a. Through the first adjusting and locking structure 3, the central axis of the first structure under test can be aligned with the central axis of the imaginary cylindrical surface to achieve preliminary positioning. It also facilitates the preliminary positioning of the central axis of the second structure under test with the central axis of the imaginary cylindrical surface. For example, if the first structure under test contacts multiple measuring elements 20 by passing through the first through hole 10a, the first adjusting and locking structure... Structure 3 enables the first structure under test to achieve preliminary positioning with the first through hole 10a. Specifically, the first adjusting and locking structure 3 allows the central axis of the first structure under test to be initially positioned with the central axis of the imaginary cylindrical surface, ensuring the first structure under test can smoothly pass through the first through hole 10a. This also prevents significant deviations in the measurement results of multiple measuring elements 20. Furthermore, it facilitates the preliminary positioning of the central axis of the second structure under test with the central axis of the imaginary cylindrical surface. Therefore, when the second structure under test contacts the measuring structure 2, it is less likely to interfere with the first base 10, thus improving the stability of the coaxiality measuring device 100. After preliminary positioning, the first adjusting and locking structure 3 locks the positions of the first base 10 and the measuring structure 2 on a plane perpendicular to the central axis of the first through hole 10a, making the setting position of the measuring structure 2 more stable. Even if the measuring structure 2 is subjected to external forces, it is less likely to experience radial displacement, further improving the reliability of the coaxiality measuring device 100.

[0046] Therefore, by comparing the measurement results of each measuring element 20, it is possible to determine whether the center of the cross section at the location of the measuring structure 2 of the structure under test coincides with the virtual center of the same cross section of the imaginary cylindrical surface where the measuring heads 20a of multiple measuring elements 20 are located. The positions of the first base 10 and the measuring structure 2 are adjusted by the first adjusting and locking structure 3 so that the measurement results of multiple measuring elements 20 are the same. Then, another structure under test is measured to obtain the coaxiality deviation of the two structures under test. The measurement results are accurate and reliable, and the operation is relatively convenient, which can improve the detection efficiency.

[0047] It is understandable that when it is necessary to measure whether the axes of different sections of the same shaft are collinear, the above-mentioned coaxiality measuring device 100 can also be used, and the operation process is similar to that of measuring the coaxiality of the crucible shaft 72 and the lifting shaft 71, so it will not be described again.

[0048] The following explanation uses the axial direction of the first through hole 10a as an example, with the direction being vertical:

[0049] For example, the coaxiality measuring device 100 is used in a crystal growth furnace to measure the coaxiality deviation between the crucible shaft 72 and the lifting shaft 71. Both the crucible shaft 72 and the lifting shaft 71 are arranged vertically. First, the coaxiality measuring device 100 is adjusted to a predetermined state, and then placed inside the crystal growth furnace. The first adjustment and locking structure 3 is used to initially adjust the position of the first base 10 and the measuring structure 2 on the horizontal plane, so that the first through hole 10a is vertically aligned with the crucible shaft 72 below it. Then, the crucible shaft 72 is raised until it is fully extended. The first base 10 and the measuring structure 2 are inserted through the first through hole 10a and in contact with multiple measuring elements 20. If the measurement results of the multiple measuring elements 20 are different, the positions of the first base 10 and the measuring structure 2 are adjusted again through the first adjusting locking structure 3 until the measurement results of the multiple measuring elements 20 are the same. The crucible shaft 72 is lowered to separate the crucible shaft 72 from the multiple measuring elements 20, and then the lifting shaft 71 is lowered until the lifting shaft 71 contacts the multiple measuring elements 20. The coaxiality deviation between the lifting shaft 71 and the crucible shaft 72 is calculated based on the measurement results of the multiple measuring elements 20.

[0050] In related technologies, the measurement of the coaxiality deviation between the crucible shaft and the lifting shaft typically employs a suspension alignment method. This involves first setting a target plate with concentric circles at the top of the crucible shaft, then installing a connecting block at the lower end of the lifting shaft. A flexible rope is threaded through the connecting block, and a pointed weight is suspended from the lower end of the rope. The eccentricity between the tip of the weight and the center of the target plate is observed to determine whether the coaxiality of the crucible shaft and the lifting shaft meets technical requirements. However, this method for measuring the coaxiality of the crucible shaft and the lifting shaft has the following drawbacks: 1. Visual inspection introduces visual errors; 2. Due to processing errors and installation gaps, the center of the target plate may deviate from the axis of the crucible shaft; 3. The connecting block and the flexible rope at the lower end of the lifting shaft also have eccentricity errors; 4. The pendulum effect of the flexible rope inevitably leads to long observation times and difficulties. The accumulation of these errors causes the observed results to deviate from the actual coaxiality value, resulting in low detection accuracy and slow detection efficiency.

[0051] According to the coaxiality measuring device 100 of this utility model embodiment, in a predetermined state, by comparing the measurement data of each measuring element 20, it can determine whether the center of the cross-section at the location of the first structure to be tested and the virtual center of the same cross-section of the imaginary cylindrical surface where the measuring heads 20a of the multiple measuring elements 20 are located coincide. It can also use the first adjustment locking structure 3 to make the axis of the first structure to be tested basically collinear with the axis of the cylindrical surface where the multiple measuring heads 20a are located, and then measure the positional relationship between the axis of the second structure to be tested and the axis of the cylindrical surface where the multiple measuring heads 20a are located, thereby obtaining the coaxiality deviation of the two structures to be tested. The measurement results are accurate and reliable, and the operation is relatively convenient, which can improve the detection efficiency.

[0052] Furthermore, when the coaxiality measuring device 100 is used to measure the coaxiality deviation between the crucible shaft 72 and the lifting shaft 71 in a crystal growth furnace, it is not necessary to disassemble the thermal field structure (including heaters) and cooling structure inside the crystal growth furnace. The coaxiality measuring device 100 can be directly placed inside the crystal growth furnace, making the state of the crystal growth furnace closer to its production state when the coaxiality measuring device 100 is measuring. This is beneficial for significantly saving furnace disassembly time, shortening inspection time, and improving the visual error and pendulum effect caused by the suspension alignment method, thereby improving measurement accuracy. For example, the first adjustment and locking structure 3 can be used in conjunction with the mounting platform 74 (e.g., water-cooled jacket) inside the crystal growth furnace, using the mounting platform 74 to adjust and lock the position of the first base 10 on the plane perpendicular to the central axis of the first through hole 10a. Of course, the coaxiality measuring device 100 is not limited to measuring the coaxiality of the crucible shaft 72 and the lifting shaft 71.

[0053] Optionally, the measuring head 20a is made of soft nylon material so that when the measuring head 20a comes into contact with the structure to be measured, it is not easy to leave wear marks on the outer surface of the structure to be measured, thereby reducing the influence of the coaxiality measuring device 100 on the structure to be measured.

[0054] According to the coaxiality measuring device 100 of this utility model embodiment, in a predetermined state, the measuring heads 20a of multiple measuring elements 20 are located on the same cross-section of the same imaginary cylindrical surface, and the measuring heads 20a of multiple measuring elements 20 extend radially to the inner side of the hole wall of the first through hole 10a. When the structure to be measured passes through the first through hole 10a and / or other components contact the measuring head 20a, each measuring head 20a moves radially away from the structure to be measured in the first through hole 10a, thereby obtaining the coaxiality measuring head 20a of each measuring element 20a. The radial dimension of the structure under test measured by measuring element 20 at the location of each measuring element 20 is determined. When the measurement results of each measuring element 20 are the same, it can be assumed that the center of the cross-section of the structure under test corresponding to the location of measuring structure 2 coincides with the virtual center of the same cross-section of the imaginary cylindrical surface where the measuring heads 20a of multiple measuring elements 20 are located. When the measurement results of some measuring elements 20 are different, it can be assumed that the center of the cross-section of the structure under test corresponding to the location of measuring structure 2 does not coincide with the center of the same cross-section of the imaginary cylindrical surface where the measuring heads 20a of multiple measuring elements 20 are located. Therefore, by comparing the measurement data of each measuring element 20, it is possible to determine whether the center of the cross-section of the structure under test corresponding to the location of measuring structure 2 coincides with the center of the same cross-section of the imaginary cylindrical surface where the measuring heads 20a of multiple measuring elements 20 are located. Furthermore, the coaxiality deviation between the structure under test and another structure under test can be obtained using the above settings. The measurement results are accurate and reliable, and the operation is relatively simple, which helps to improve the detection efficiency.

[0055] Please refer to Figure 1 , Figure 2 and Figure 4 In some embodiments, the measuring structure 2 further includes a plurality of second adjustment and locking structures 4 all disposed on the first base 10. Each measuring element 20 corresponds to one second adjustment and locking structure 4, and each measuring element 20 is mounted on the first base 10 through the corresponding second adjustment and locking structure 4. The second adjustment and locking structure 4 is configured to: at least continuously adjust and lock the position of the corresponding measuring element 20 in the radial direction relative to the first through hole 10a in real time; the coaxiality measuring device 100 further includes: a second base 6 and a positioning cylinder 5, the second base 6 being positioned and fitted into the first through hole 10a. The second base 6 and the first through hole 10a are separable and can be fitted together. The positioning cylinder 5 is positioned and fitted on the second base 6. The outer peripheral wall of the positioning cylinder 5 is a cylindrical surface and the positioning cylinder 5 is adapted to be coaxially arranged with the imaginary cylindrical surface. On the plane perpendicular to the central axis of the first through hole 10a, the orthographic projection of the outer peripheral wall of the positioning cylinder 5 is spaced within the outer contour range of the orthographic projection of the hole wall of the first through hole 10a. The positioning cylinder 5 is adapted to radially stop with the measuring head 20a of the multiple measuring elements 20, so that the positioning cylinder 5 cooperates with the second adjustment and locking structure 4 to adjust the measurement results of the multiple measuring elements 20 to be equal.

[0056] As can be seen, the second adjustment and locking structure 4 allows the measuring element 20 to move radially relative to the first base 10, that is, the second adjustment and locking structure 4 allows the measuring element 20 to move radially relative to the first through hole 10a, thereby changing the radial position of the measuring element 20. When the positioning cylinder 5 is positioned and engaged with the first through hole 10a, the positioning cylinder 5 can radially stop against the measuring heads 20a of multiple measuring elements 20. The second adjustment and locking structure 4 can change the radial distance between the positioning cylinder 5 and the measuring element 20, thereby changing the measurement result of the measuring element 20 and making the measurement results of multiple measuring elements 20 the same. At this time, it means that the measuring heads 20a of multiple measuring elements 20 are located on the same cylindrical surface. Even if the positioning cylinder 5 is removed, the multiple measuring heads 20a are still located on the same cylindrical surface. This makes it easy to adjust the measuring structure 2 towards the predetermined state through the positioning cylinder 5, and then lock the position of the measuring element 20 relative to the first base 10 through the second adjustment and locking structure 4, so that the setting position of the measuring element 20 is more stable, and the coaxiality measuring device 100 is stably in the predetermined state.

[0057] Therefore, the orthographic projection of the outer peripheral wall of the positioning cylinder 5 is set within the orthographic projection outer contour of the wall of the first through hole 10a. Thus, the outer diameter of the positioning cylinder 5 is smaller than the diameter of the first through hole 10a. When the positioning cylinder 5 is removed for measurement, multiple measuring heads 20a still extend to the radial inner side of the wall of the first through hole 10a, and the measuring heads 20a of multiple measuring components 20 are located on the same imaginary cylindrical surface, which facilitates the subsequent detection of the coaxiality of the structure to be measured.

[0058] It is understandable that after multiple measuring elements 20 are used in conjunction with the positioning cylinder 5, the measuring head 20a of the measuring element 20 can be in a normal state (e.g., the measuring head 20a is abutted against the positioning cylinder 5 and the measuring head 20a is not in a compressed state), or the measuring head 20a of the measuring element 20 can be in a compressed state. For example, the compression amount of the measuring head 20a of the multiple measuring elements 20 is 2mm, that is, the measurement result of the multiple measuring elements 20 is 2mm. At this time, the measurement result of the multiple measuring elements 20 can be zeroed or not, and will not affect the subsequent measurement of the structure to be measured.

[0059] Optionally, the diameter of the positioning cylinder 5 is basically the same as the diameter of the structure to be measured, with little difference. For example, when the coaxiality measuring device 100 is used to measure the coaxiality of the crucible shaft 72 and the lifting shaft 71 in the single crystal growth furnace, the diameters of the positioning cylinder 5, the crucible shaft 72 and the lifting shaft 71 are basically the same, so as to reduce the requirements on the measurement range of the measuring component 20.

[0060] Please refer to Figures 3-6 In some embodiments, the second base 6 includes at least three self-centering components 60 arranged sequentially along the circumference. Each self-centering component 60 has a self-positioning part 61. The self-positioning parts 61 of the multiple self-centering components 60 are spliced ​​to form a cylindrical surface, and the self-positioning parts 61 of the multiple self-centering components 60 are limited to fit the positioning cylinder 5. That is, the cylindrical surface formed by the self-positioning parts 61 of the multiple self-centering components 60 is adapted to the outer contour of the positioning cylinder 5, so that the cylindrical surface formed by the self-positioning part 61 is in a gapless fit with the positioning cylinder 5 (for example, the gapless fit is achieved by the structure of the lateral force generated by the weight of the positioning cylinder 5 and the self-centering component 60). This achieves the self-centering effect of the second base 6 and makes the setting position of the positioning cylinder 5 more stable. Therefore, the positioning cylinder 5 is less likely to deviate when subjected to the force of the measuring head 20a, which facilitates the improvement of adjustment accuracy. For example, the self-positioning part 61 can be formed as a protrusion, with multiple protrusions surrounding each other so that the radial outer walls of the multiple protrusions are spliced ​​to form a cylindrical surface, and the multiple protrusions are limited and fitted inside the positioning cylinder 5; or, for another example, the self-positioning part 61 can be a groove, with multiple grooves surrounding each other so that the side walls of the multiple grooves are spliced ​​to form a cylindrical surface, and the positioning cylinder 5 is limited and fitted inside the multiple grooves.

[0061] It is understood that the second base 6 may include three or more self-centering components 60 arranged sequentially along the circumference, as long as the self-positioning parts 61 of the multiple self-centering components 60 can be spliced ​​together to form a cylindrical surface that can be limited and matched with the positioning cylinder 5.

[0062] Please refer to Figure 4In some embodiments, the second adjustment and locking structure 4 includes a third base 40, which magnetically engages with the first base 10. This magnetic engagement allows the third base 40 and the first base 10 to quickly dock without the need for complex mechanical structures or cumbersome operating steps. Simply bring the two close together, and they will automatically attract each other under the action of magnetic force, greatly saving installation time. At the same time, the magnetic force generated by the magnetic engagement can provide sufficient connection strength, so that the third base 40 and the first base 10 maintain a stable connection during normal use. Even when subjected to a certain degree of vibration, impact, or external force, they are not easy to loosen or separate, so as to make the setting position of the measuring structure 2 more stable and improve the stability of the coaxiality measuring device 100 during use.

[0063] Optionally, the surface of the first base 10 is coated, for example, the surface of the first base 10 is treated with anti-rust treatment such as nickel plating or chromium plating and the surface is smooth, so that the third base 40 and the first base 10 can be reliably engaged by magnetic attraction.

[0064] Please refer to Figure 4 In some embodiments, the second adjustment and locking structure 4 is also used to adjust and lock the position of the corresponding measuring element 20 in the axial direction relative to the first through hole 10a. The first base 10 has a mounting surface (e.g., the upper surface of the first base 10), the first through hole 10a penetrates the mounting surface, the central axis of the first through hole 10a is parallel to or coincides with the central axis of the positioning cylinder 5, and both the central axis of the first through hole 10a and the central axis of the positioning cylinder 5 are perpendicular to the mounting surface. The measuring structure 2 is provided on the mounting surface.

[0065] It can be seen that the second adjustment and locking structure 4 is also used to adjust and lock the position of the corresponding measuring element 20 in the axial direction relative to the first through hole 10a. That is, the second adjustment and locking structure 4 can adjust the position of the corresponding measuring element 20 in the axial direction so that the measuring heads 20a of multiple measuring elements 20 can all be located on the same cross section of the imaginary cylindrical surface, which makes it easy to adjust the measuring structure 2 to the predetermined state.

[0066] Wherein, the central axis of the first through hole 10a is parallel or coincident with the central axis of the positioning cylinder 5, the axial position of the corresponding measuring element 20 relative to the first through hole 10a is adjusted by the second adjusting and locking structure 4. This is equivalent to adjusting the axial position of the corresponding measuring element 20 when it abuts against the positioning cylinder 5, so that the measuring heads 20a of multiple measuring elements 20 can be more easily adjusted to be located on the same cross-section of the imaginary cylindrical surface, improving the efficiency of adjusting the measuring structure 2 to the predetermined state. Moreover, when the measuring heads 20a of multiple measuring elements 20 are all located on the same cross-section of the imaginary cylindrical surface, the second adjusting and locking structure 4 can lock the axial position of the measuring element 20 relative to the first through hole 10a, so that the axial position of multiple measuring elements 20 is not easily changed, which facilitates the improvement of the operational stability of the coaxiality measuring device 100.

[0067] It is understood that the position of the measuring element 20 in the axial direction relative to the first through hole 10a can be measured by other measuring tools, or a scale or size sensor can be set on the first base 10 so that the second adjustment locking structure 4 can adjust the measuring element 20 toward a predetermined state.

[0068] Please refer to Figure 2 and Figure 4 The second adjustment and locking structure 4 also includes a first link 41, a second link 42, and a locking member 43. One end of the first link 41 and one end of the second link 42 are pivotally connected. The locking member 43 is located at the pivot position between the first link 41 and the second link 42 and is used to lock the included angle between the first link 41 and the second link 42. The end of the first link 41 away from the second link 42 is connected to the third base 40 through a universal damping ball hinge. The end of the second link 42 away from the first link 41 is connected to the measuring member 20 through a universal damping ball hinge.

[0069] As can be seen, the first link 41 and the second link 42 are pivotally connected. The operator can indirectly change the axial position of the measuring element 20 relative to the first through hole 10a by adjusting the included angle between the first link 41 and the second link 42. When multiple measuring heads 20a are all located on the same cross section of the imaginary cylindrical surface, the locking element 43 can lock the axial position of the measuring element 20 relative to the first through hole 10a. The included angle between the first link 41 and the second link 42 is not easily changed, that is, the axial position of multiple measuring elements 20 is not easily changed, making the setting position of multiple measuring elements 20 more stable, which facilitates the improvement of the stability of the coaxiality measuring device 100 operation.

[0070] In addition, the universal damping ball hinge not only allows the measuring element 20 to rotate freely in multiple directions, but also provides a certain damping effect. When adjusting the angle of the measuring element 20 relative to the mounting surface, the damping effect can make the adjustment process smoother and more precise, avoiding the difficulty in controlling the position of the measuring element 20 due to excessive adjustment, thus improving the accuracy of adjustment.

[0071] Please refer to Figure 1 and Figure 2 In some embodiments, the first adjustment and locking structure 3 includes a bracket 30 and a first adjustment structure 31. The bracket 30 is connected to the first base 10 and a second through hole 30a is formed on the bracket 30 that is axially opposite to the first through hole 10a. The first adjustment structure 31 is disposed on the bracket 30 and is used to adjust and lock the position of the first base 10 on a plane perpendicular to the central axis of the first through hole 10a. It is understood that the bracket 30 can be sequentially arranged with the first base 10 along the axial direction of the first through hole 10a. The arrangement of the bracket 30 facilitates the better matching of the coaxiality measuring device 100 with the height position of the mounting platform 74 inside the crystal growth furnace, so that the position of the first base 10 can allow the crucible shaft and the lifting shaft to abut against the measuring structure 2 for separate measurement. Moreover, a second through hole 30a is formed on the bracket 30 that is axially opposite to the first through hole 10a, so that the bracket 30 does not easily affect the structure under test from the side of the first base 10 where the bracket 30 is set. That is, the structure under test can not only extend into the first through hole 10a to contact the measuring heads 20a of multiple measuring elements 20, but also extend into the second through hole 30a to contact the measuring heads 20a of multiple measuring elements 20, which can meet different usage conditions.

[0072] For example, in a crystal growth furnace, the coaxiality measuring device 100 is used with the crucible shaft 72 and the lifting shaft 71 both arranged vertically, and the axis of the first through hole 10a is also vertically set. The lifting shaft 71 is located above the crucible shaft 72, and the support 30 is located above the first base 10. At this time, the lifting shaft 71 can contact the measuring heads 20a of multiple measuring elements 20 through the second through hole 30a, and the crucible shaft 72 can contact the measuring heads 20a of multiple measuring elements 20 through the first through hole 10a. Of course, the first adjustment structure 31 can also be provided on the first base 10.

[0073] Please refer to Figure 1 and Figure 2 In some embodiments, the first adjustment structure 31 includes at least three first adjustment units 32 arranged circumferentially along the first through hole 10a. The first adjustment units 32 are arranged radially outside the first through hole 10a so that there is a certain distance between the first adjustment structure 31 and the first through hole 10a in the radial direction, so that the first adjustment structure 31 is less likely to affect the contact between the structure under test and the measuring head 20a of the multiple measuring elements 20 arranged at the first through hole 10a.

[0074] In this device, the radial inner end of each first adjustment unit 32 is adapted to abut against the mounting platform 74, and the position of each first adjustment unit 32 in the radial direction of the first through hole 10a is adjustable. By changing the position of the first adjustment unit 32 in the radial direction of the first through hole 10a, the positions of the first base 10 and the measuring structure 2 in the radial direction of the first through hole 10a are indirectly changed. More specifically, the positions of the first base 10 and the measuring structure 2 relative to the mounting platform 74 in the plane perpendicular to the central axis of the first through hole 10a can be changed, which facilitates the initial alignment of the axis of the structure to be measured with the central axis of the imaginary cylindrical surface, and makes it easier for the structure to be measured to fit more smoothly into the measuring structure 2, thus improving the accuracy of the coaxiality measuring device 100.

[0075] It is understood that the first adjustment structure 31 includes three or more first adjustment units 32 arranged circumferentially along the first through hole 10a. For example, there are three, four, five, etc. The first adjustment units 32 are arranged circumferentially to make the first adjustment units 32 and the mounting platform 74 cooperate more stably. When subjected to external force, multiple first adjustment units 32 can share the force to reduce the deformation or damage of the structure caused by excessive local force.

[0076] Please refer to Figure 1 and Figure 2 In some embodiments, the edge of the bracket 30 has a plurality of circumferentially spaced lugs 33, the lugs 33 extending axially, and the first adjustment unit 32 passing through the corresponding lug 33 radially and threadedly engaging with the lug 33. As can be seen, the first adjustment unit 32 is radially inserted into the corresponding lug 33, and the lug 33 extends axially, so that the lug 33 can provide a larger operating space for the first adjustment unit 32 to be inserted, which facilitates the improvement of the measurement efficiency of the coaxiality measuring device 100. At the same time, by rotating the first adjustment unit 32, the radial position of the first adjustment unit 32 relative to the corresponding lug 33 can be adjusted. The radial inner end of the first adjustment unit 32 is suitable to abut against the mounting platform 74. That is, by adjusting multiple first adjustment units 32, the first base 10 and the measuring structure 2 can be moved radially relative to the mounting platform 74. When the first base 10 and the measuring structure 2 are moved to a suitable position, for example, when the first through hole 10a and the structure to be measured are initially aligned, and the measuring structure 2 is also initially aligned with the structure to be measured, the multiple first adjustment units 32 are locked to make the setting position of the measuring structure 2 more stable.

[0077] Optionally, the first adjustment unit 32 is a threaded fastener, such as a knurled screw. Knurled screws are made of non-metallic materials and have good wear resistance, which helps to improve the service life of the first adjustment unit 32. They also make the installation and disassembly of the load-bearing structure and the platform more convenient, facilitating subsequent maintenance and repair. At the same time, they make the overall structure more compact and save space.

[0078] For example, please refer to Figure 7 and Figure 8 The coaxiality measuring device 100 is used to measure the coaxiality of the crucible shaft 72 and the lifting shaft 71 in the crystal growth furnace. The cooling sleeve 70 in the crystal growth furnace is used as the mounting platform 74. After the crystal growth furnace is assembled, the crucible shaft 72 and the lifting shaft 71 will not deviate excessively from the central axis of the cooling sleeve 70. Therefore, the cooling sleeve 70 is used to support the coaxiality measuring device 100 and adjust the position of the first base 10 on the horizontal plane. This facilitates the quick alignment of the crucible shaft 72 and the lifting shaft 71 with the first through hole 10a, and the horizontal deviation will not be too large. Even if the crucible shaft 72 interferes with the hole wall of the first through hole 10a or interferes with the measuring structure 2 during the subsequent rise of the crucible shaft 72, the position of the first base 10 on the horizontal plane can be adjusted by the first adjustment structure 31 so that the crucible shaft 72 can be smoothly inserted into the first through hole 10a and smoothly cooperate with the measuring structure 2.

[0079] Please refer to Figure 1 and Figure 2 In some embodiments, the first adjustment and locking structure 3 further includes a second adjustment structure 34, which is used to adjust and lock the position of the first base 10 in the axial direction of the first through hole 10a. The second adjustment structure 34 is connected between the bracket 30 and the first base 10, and is used to adjust and lock the distance between the bracket 30 and the first base 10.

[0080] Therefore, the first adjustment and locking structure 3 is used to adjust and lock the position of the first base 10 in the axial direction of the first through hole 10a. For example, when the coaxiality measuring device 100 is used in a crystal growth furnace, the size of the crystal growth furnace that produces different crystal rods will have certain differences. The first adjustment and locking structure 3 can adjust the position of the first base 10 in the axial direction of the first through hole so as to be suitable for more crystal growth furnaces of different sizes and improve the applicability of the coaxiality measuring device 100.

[0081] Please refer to Figure 1 and Figure 2In some embodiments, the second adjustment structure 34 includes at least three second adjustment units 35 arranged circumferentially along the first through hole 10a. Each second adjustment unit 35 is connected to the bracket 30 and the first base 10 to continuously adjust and lock the distance between the bracket 30 and the first base 10 at the location of the second adjustment unit 35 in real time. Corresponding to the location of each second adjustment unit 35, the second adjustment unit 35 can adjust the vertical distance between the bracket 30 and the first base 10 to any value within a certain range, and during the adjustment process, the second adjustment unit 35 can lock the vertical distance between the bracket 30 and the first base 10 to any value within the aforementioned range.

[0082] As can be seen, the second adjustment structure 34 can be used to adjust the distance between the bracket 30 and the first base 10. The parallelism between the bracket 30 and the first base 10 can be adjusted by at least three second adjustment units 35. After the surfaces of the bracket 30 and the first base 10 that are opposite each other are adjusted to be parallel or the parallelism meets the technical requirements by the second adjustment structure 34, the second adjustment structure 34 can be locked to the first base 10 and / or the bracket 30 connected to it, so that the relative position of the first base 10 and the bracket 30 is not easily changed, so that the coaxiality measuring device 100 is switched to the measuring state, which facilitates the subsequent measurement of the coaxiality measuring device 100. The connection accuracy requirement of the second adjustment structure 34 is relatively low.

[0083] It is understandable that when the distance between the support 30 and the first base 10 at each location of the second adjustment unit 35 is equal, and at least three spaced second adjustment units 35 can define a plane, it can be considered that the surfaces of the support 30 and the first base 10 opposite each other are parallel or their parallelism meets the technical requirements. Each second adjustment unit 35 is then locked to prevent relative displacement of the support 30 and the first base 10, thus improving the reliability of the coaxiality measuring device 100. Furthermore, when the coaxiality measuring device 100 is used to measure the coaxiality of the crucible shaft 72 and the lifting shaft 71 in a crystal growth furnace, the second adjustment units 35 can also adjust the distance between the support 30 and the first base 10 to a certain extent, reducing the required lifting length of the crucible shaft 72 and the lifting shaft 71. This facilitates application to different furnace types, reduces tooling manufacturing costs, facilitates tool (tooling) management, and saves space requirements. The second adjustment units 35 can be three, four, five, etc., to further improve adjustment accuracy.

[0084] For example, the bracket 30 and the first base 10 can be arranged opposite each other in the horizontal direction, and the parallelism of the opposing surfaces of the bracket 30 and the first base 10 can be adjusted by the second adjustment unit 35; or the bracket 30 and the first base 10 can be arranged opposite each other in the vertical direction, and the parallelism of the opposing surfaces of the bracket 30 and the first base 10 can be adjusted by the second adjustment unit 35, so that the setting position of the bracket 30 and the first base 10 is more flexible and can be adapted to different installation environments.

[0085] Please refer to Figures 1-3 In some embodiments, the second adjustment unit 35 includes: a third connecting rod 35a, a first locking nut 35b, and a second locking nut 35c. The third connecting rod 35a passes through one of the bracket 30 and the first base 10 along the axial direction of the first through hole 10a and is fixedly connected to the other of the bracket 30 and the first base 10. The first locking nut 35b and the second locking nut 35c are both sleeved on the outside of the third connecting rod 35a and are threadedly engaged with the third connecting rod 35a. The first locking nut 35b and the second locking nut 35c respectively abut against both sides of one of the bracket 30 and the first base 10.

[0086] For example, the third link 35a passes through the bracket 30 along the axial direction of the first through hole 10a, and the third link 35a is fixedly connected to the first base 10. The first locking nut 35b abuts against the side of the bracket 30 facing the first base 10, and the second locking nut 35c abuts against the side of the bracket 30 away from the first base 10. When it is necessary to adjust the parallelism between the surfaces of the bracket 30 and the first base 10, the first locking nut 35b can be sleeved on the third link 35a, and the bracket 30 can be fitted with each third link 35a so that the first locking nut 35b is located on the side of the bracket 30 facing the first base 10. At this time, the second locking nut 35c is not provided on the surface of the bracket 30 away from the first base 10. By rotating the first locking nut 35b, the parallelism between the bracket 30 and the first base 10 at each first locking nut can be adjusted. When the spacing between the positions of the first locking nuts 35b and the bracket 30 is equal at at least three positions of the first locking nuts 35b (for example, this can be measured using other measuring tools, or by setting a scale or size sensor on the third connecting rod 35a), it can be considered that the surfaces of the bracket 30 and the first base 10 facing each other are parallel. Then, the second locking nut 35c is screwed into the third connecting rod 35a and abuts against the side of the bracket 30 away from the first base 10, so that the relative position of the bracket 30 and the first base 10 is not easily changed, and the surfaces of the bracket 30 and the first base 10 facing each other can always remain parallel, which is convenient for subsequent measurement by the coaxiality measuring device 100. The fixing connection method between the third connecting rod 35a and the first base 10 is not limited; they can be threaded or welded. Of course, it is also possible that the second locking nut 35c abuts against the side of the bracket 30 facing the first base 10, and the first locking nut 35b abuts against the side of the bracket 30 away from the first base 10.

[0087] It is understood that when adjusting the parallelism of the surfaces of the bracket 30 and the first base 10, the adjustment process of "the third connecting rod 35a passing through the first base 10 along the axial direction of the first through hole 10a and being fixedly connected to the bracket 30" is similar to the adjustment process of "the third connecting rod 35a passing through the bracket 30 along the axial direction of the first through hole 10a and being fixedly connected to the first base 10", and will not be described again in this application.

[0088] Therefore, by means of the third link 35a, the first locking nut 35b and the second locking nut 35c, the parallelism between the opposing surfaces of the bracket 30 and the first base 10 can be adjusted. The adjustment method is relatively simple and facilitates the improvement of the adjustment efficiency of the coaxiality measuring device 100.

[0089] Please refer to Figures 1-3In some embodiments, the top of the third link 35a is also provided with a grip cap 36. The bracket 30 and the first base 10 are spaced apart from the grip cap 36 along the axial direction. For example, the grip cap 36 is a knurled nut. The knurled surface is formed with a textured surface by embossing or hobbing, which significantly increases the friction and makes it easier for the hand to grip the grip cap 36. This allows the worker to more easily lift or place the first base 10 through the grip cap 36 without the need for tools, which improves work efficiency and meets the requirements of ergonomics.

[0090] Please refer to Figures 1-3 In some embodiments, the surface of the bracket 30 facing the first base 10 is provided with a non-metallic wear-resistant structure 37, and the bracket 30 is adapted to abut against the mounting platform 74 through the non-metallic wear-resistant structure 37.

[0091] As can be seen, the support 30 is abutted against the mounting platform 74 by a non-metallic wear-resistant structure 37, such as an anti-friction pad. The anti-friction pad has a certain degree of flexibility so that when the support 30 and the mounting platform 74 rub against each other, it is not easy for particles to fall and contaminate the structure under test. When the coaxiality measuring device 100 is used to measure the coaxiality of the crucible shaft 72 and the lifting shaft 71 in the crystal growth furnace, the aforementioned non-metallic wear-resistant structure 37 makes it less likely for the support 30 and the mounting platform 74 to generate metal particles that contaminate the internal growth cavity of the crystal growth furnace during friction, thereby improving the reliability of the coaxiality measuring device 100.

[0092] In other embodiments of this application, the surface of the bracket 30 facing the first base 10 is provided with a metal wear-resistant structure. For example, the metal wear-resistant structure is formed by coating the surface of a metal material. The bracket 30 is adapted to abut against the mounting platform 74 through the metal wear-resistant structure, so that when the bracket 30 and the mounting platform 74 rub against each other, it is not easy for particles to fall and contaminate the structure to be tested.

[0093] Please refer to Figures 1-3In some embodiments, the side surface of the bracket 30 facing the first base 10 is adapted to be axially limited with the mounting platform 74, and the measuring structure 2 is provided on the side surface of the first base 10 facing the bracket 30. When the coaxiality measuring device 100 performs the measurement, the surfaces of the bracket 30 and the first base 10 that are opposite to each other are parallel. Therefore, multiple measuring components 20 can be set with the side surface of the first base 10 facing the bracket 30 as the reference. If the measuring structure 2 is assembled with the first base 10 and the multiple measuring components 20 are in a certain state relative to the first base 10, such as the multiple measuring components 20 being in a state corresponding to a predetermined state, then when the coaxiality measuring device 100 is switched to the predetermined state and installed for measurement, since the side surface of the bracket 30 facing the first base 10 is axially limited by the mounting platform 74, and the surfaces of the bracket 30 and the first base 10 are parallel to each other at this time, the cooperation between the bracket 30 and the mounting platform 74 will not easily change the predetermined state that has been adjusted. In other words, the installation of the coaxiality measuring device 100 will not easily affect its predetermined state. Therefore, the coaxiality measuring device 100 can be switched to the predetermined state first and then cooperated with the mounting platform 74 for installation. After installation, there is no need to adjust the multiple measuring components 20 again, which simplifies the operation of the coaxiality measuring device 100.

[0094] For example, in a crystal growth furnace, the measuring structure 2 can be switched to a predetermined state outside the crystal growth furnace and then placed inside for installation. After installation, there is no need to adjust multiple measuring elements 20 inside the crystal growth furnace, and the crystal growth furnace does not need to provide operating space for adjusting multiple measuring elements 20 for the coaxiality measuring device 100, which helps to further save furnace dismantling time. For example, if the surface of the first base 10 facing the support 30 is perpendicular to the central axis of the first through hole 10a, then in the predetermined state, the surface of the support 30 facing the first base 10 is perpendicular to the central axis of the first through hole 10a. Therefore, if the central axis of the first through hole 10a is parallel or coincident with the central axis of the imaginary cylindrical surface, then when the coaxiality measuring device 100 measures, the surfaces of the support 30 and the first base 10 facing each other are both perpendicular to the central axis of the imaginary cylindrical surface.

[0095] Please refer to Figures 1-3 In some embodiments, the first adjustment structure 31 is located at the edge of the bracket 30, or at the edge of the first base 10, and the first adjustment structure 31 includes at least three first adjustment units 32 arranged circumferentially along the first through hole 10a. The first adjustment units 32 are arranged radially outside the second adjustment structure 34 to define a mating groove 38 between the second adjustment structure 34 and the second adjustment structure 34, which is suitable for accommodating the mounting platform 74.

[0096] As can be seen, the placement of the first adjustment structure 31 is more flexible and adaptable to different installation environments. For example, if the axis of the first through hole 10a is vertical and the bracket 30 is located above the first base 10, and the coaxiality measuring device 100 is used to measure the coaxiality of the crucible shaft 72 and the lifting shaft 71 in the crystal growth furnace, the first adjustment structure 31 can be placed at the edge of the bracket 30. The first adjustment structure 31 is close to the top of the furnace body, which facilitates adjustment. Moreover, the arrangement of the first adjustment structure 31 and the bracket 30 is relatively concentrated, which helps to reduce the requirements on the structure of the mounting platform 74.

[0097] Furthermore, the first adjustment unit 32 is spaced radially outward from the second adjustment unit 35, and there is a certain amount of empty space between the first adjustment unit 32 and the second adjustment unit 35 to define the mating groove 38. The mating groove 38 can accommodate the mounting platform 74. That is, the first adjustment unit 32 and the second adjustment unit 35 are respectively located on both sides of the mounting platform 74 radially in the first through hole 10a. After the mating groove 38 is fitted into the mounting platform 74, it can limit the radial movement of the first base 10 to a certain extent through the radial limiting of the first adjustment structure 31 and the mounting platform 74. At the same time, after the mating groove 38 is fitted into the mounting platform 74, it can limit the axial movement of the first base 10 through the axial limiting of the bracket 30 and the mounting platform 74, so that the setting position of the first base 10 and the measuring structure 2 can be more stable, which is convenient for the subsequent measurement by the coaxiality measuring device 100. For example, the mounting platform 74 defines a cylindrical structure, the first adjustment structure 31 is adapted to abut against the outer peripheral wall of the cylindrical structure, and the bracket 30 is adapted to abut against the end face of one axial end of the cylindrical structure.

[0098] The first adjustment unit 32 is used to continuously adjust and lock the radial width of the mating groove 38 in real time. By adjusting the radial width of the mating groove 38, the first base 10 can be driven to move radially. When the first base 10 is adjusted to a suitable position, it can be locked by the first adjustment unit 32 so that the first base 10 is not easy to move radially relative to the mounting platform 74, making the setting position of the first base 10 more stable and improving the reliability of the coaxiality measuring device 100.

[0099] Furthermore, the edge of the bracket 30 has a plurality of circumferentially spaced lugs 33, the first adjustment unit 32 is radially inserted into the corresponding lug 33, the lug 33 extends axially, and the second adjustment unit 35 also extends axially, so that a portion of the space between the lug 33 and the second adjustment unit 35 is used to define the mating groove 38.

[0100] Please refer to Figures 1-3In some embodiments, the third link 35a passes through the bracket 30 and the first base 10. Multiple third links 35a are radially aligned with multiple first adjustment units 32, so that the third links 35a and the lugs 33 are arranged more centrally on the bracket 30, making it less likely for the third links 35a and the lugs 33 to affect the arrangement of other components. The lugs 33 are located at the edge of the bracket 30, and the lugs 33 can increase the coverage area of ​​the bracket 30. By arranging the third links 35a and the lugs 33 in a one-to-one correspondence, the third... The three-link 35a can make fuller use of the area where the lug 33 is located. At the same time, the part of the third bracket 30 located between two adjacent lugs 33 can be hollowed out or the outer contour can be recessed in the radial direction, which can reduce the amount of material used in manufacturing the bracket 30. Moreover, the above-mentioned arrangement of the third link 35a and lug 33 makes it easier to transmit and disperse the force when the lug 33 and / or the third link 35a are subjected to external force, so that the lug 33 and the third link 35a are not easily damaged, thus improving their service life.

[0101] Please refer to Figures 1-3 In some embodiments, multiple measuring elements 20 are arranged at equal intervals. It can be seen that the multiple measuring elements 20 are arranged circumferentially along the first through hole 10a and at equal intervals, so that the measuring elements 20 can measure the structure under test from various angular positions at equal intervals. This ensures that the measurement results are collected uniformly over the entire circumference, thereby more comprehensively and accurately reflecting the actual radial dimension changes of the structure under test, and facilitating the improvement of the measurement accuracy of the coaxiality measuring device 100.

[0102] Furthermore, there are four measuring elements 20 arranged at equal intervals, meaning each measuring element 20 is 90° apart from its adjacent measuring element 20 in the circumferential direction. In other words, the four measuring heads 20a are equally spaced in the circumferential direction. This ensures that when the measuring heads 20a of the measuring elements 20 contact the structure under test, the forces exerted by the four measuring elements 20 on the structure under test can cancel each other out, preventing the measuring elements 20 from shifting away from the structure under test. This improves the reliability of the coaxiality measuring device 100. Simultaneously, the measurement results of two radially opposite measuring elements 20 will have a certain degree of similarity, reducing the processing difficulty of measurement results from multiple measuring elements 20. For example, the measuring elements 20 can be dial indicators or micrometers, and the measuring range of the measuring elements 20 can be selected according to the difference in diameter between the two structures under test.

[0103] Please refer to Figure 7 and Figure 8In some embodiments, the coaxiality measuring device 100 is used to measure the coaxiality of the crucible shaft 72 and the lifting shaft 71 in a crystal growth furnace. The crystal growth furnace includes a furnace body, a crucible, a cooling jacket 70, a crucible shaft 72, and a lifting shaft 71. Each of the crucible shaft 72 and the lifting shaft 71 is vertically and rotatably disposed in the furnace body. The crucible is disposed in the furnace body and can be separably coupled to the crucible shaft 72 so that the crucible shaft 72 is used to drive the crucible movement. The lifting shaft 71 is disposed on the upper side of the crucible shaft 72. The cooling jacket 70 is disposed in the furnace body and is located on the upper side of the crucible shaft 72. The coaxiality measuring device 100 includes a first base 10, a measuring structure 2, and a first adjusting and locking structure 3. A first through hole 10a is formed on the first base 10. The measuring structure 2 is disposed on the first base 10 and includes at least three measuring structures circumferentially spaced along the first through hole 10a. Each measuring element 20 is used to measure the radial dimension of the structure under test at its location. The measuring structure 2 has at least a predetermined state in which the measuring heads 20a of the multiple measuring elements 20 extend radially along the first through hole 10a to the radially inner side of the hole wall of the first through hole 10a, and the measuring heads 20a of the multiple measuring elements 20 are located on the same imaginary cylindrical surface and on the same cross-section of the imaginary cylindrical surface. The first adjustment and locking structure 3 includes a bracket 30 and a first adjustment structure 31. The bracket 30 is connected to the first base 10 and is spaced apart on the upper side of the first base 10. A second through hole 30a is formed on the bracket 30 that is axially opposite to the first through hole 10a. The bracket 30 is adapted to abut against the top of the cooling sleeve 70, and the first adjustment structure 31 is adapted to radially limit the cooling sleeve 70. The single crystal growth furnace is a hard-axis silicon single crystal growth furnace.

[0104] As can be seen, the bracket 30 abuts against the top of the cooling sleeve 70, and the first adjustment structure 31 is adapted to radially limit the cooling sleeve 70, so that the setting position of the coaxiality measuring device 100 is more stable. The coaxiality measuring device 100 is less likely to deviate when measuring the coaxiality of the crucible shaft 72 and the lifting shaft 71, which helps to improve the reliability of the coaxiality measuring device 100. Moreover, by fitting the coaxiality measuring device 100 onto the cooling sleeve 70, when using the coaxiality measuring device 100 of this application to measure the coaxiality of the crucible shaft 72 and the lifting shaft 71, it is not necessary to disassemble the cooling sleeve 70 and the crucible. The coaxiality of the crucible shaft 72 and the lifting shaft 71 of the single crystal growth furnace can be detected in the near-production state (when the crucible and the cooling sleeve 70 are in the installation state), which can greatly save furnace disassembly time and shorten the detection time.

[0105] Furthermore, the lifting shaft 71 is located on the upper side of the crucible shaft 72. Each of the crucible shaft 72 and the lifting shaft 71 is vertically and rotatably mounted on the furnace body. When it is necessary to measure the coaxiality of the crucible shaft 72 and the lifting shaft 71, the measuring structure 2 is in a predetermined state. The lifting shaft 71 moves to contact the measuring head 20a through the second through hole 30a, and the crucible shaft 72 moves to contact the measuring head 20a through the first through hole 10a. When each measuring element 20 measures one of the lifting shaft 71 and the crucible shaft 72, and all measurement results are consistent, it can be determined that the center of the cross section of the measuring structure 2 corresponding to one of the lifting shaft 71 and the crucible shaft 72 coincides with the virtual center of the same cross section of the imaginary cylindrical surface where multiple measuring heads 20a are located. Then, the other of the lifting shaft 71 and the crucible shaft 72 is matched with multiple measuring elements 20, the measurement results are recorded, and the coaxiality deviation of the lifting shaft 71 and the crucible shaft 72 can be obtained by processing the measurement results.

[0106] It is understandable that in a conventional single crystal growth furnace, the lifting shaft 71, cooling sleeve 70, and crucible shaft 72 are arranged opposite each other in the vertical direction. By fitting the coaxiality measuring device 100 onto the cooling sleeve 70, the coaxiality measuring device 100 can more conveniently measure the coaxiality of the lifting shaft 71 and the crucible shaft 72. The lifting shaft 71 and the crucible shaft 72 can contact the measuring head 20a of the measuring piece 20 by lifting and lowering, without the need for additional adjustments, which facilitates improved measurement efficiency.

[0107] Please refer to Figure 9 In some embodiments, the crucible shaft 72 includes a main shaft 72a and an extension shaft 72b. The extension shaft 72b is connected to the upper end of the main shaft 72a. For example, the extension shaft 72b is threaded into the main shaft 72a. For economic reasons, even if the main shaft 72a is running to its upper limit in the hard-axis silicon single crystal growth furnace, there will still be a certain distance between the upper end of the main shaft 72a and the lower end of the lifting shaft 71. By setting the extension shaft 72b, the axial length of the crucible shaft 72 can be increased so that both the crucible shaft 72 and the lifting shaft 71 can contact the measuring head 20a of the coaxiality measuring device 100 without any adjustment to the coaxiality measuring device 100, which facilitates reducing the measurement difficulty and improving the measurement efficiency. The role and usage of the extension shaft 72b in the crystal growth furnace are well known to those skilled in the art.

[0108] Please refer to Figure 10According to the coaxiality measurement method of the second aspect of the present invention, the coaxiality of the crucible shaft 72 and the lifting shaft 71 is measured using the coaxiality measuring device 100 according to the first aspect of the present invention. One of the crucible shaft 72 and the lifting shaft 71 is a first shaft, and the other is a second shaft. The coaxiality measurement method includes the following steps: Step S1, the measuring structure 2 is in a predetermined state, and the coaxiality measuring device 100 is extended downward until the first adjusting locking structure 3 stops at the top of the mounting platform 74; Step S2, the first shaft moves to stop with the measuring structure 2, and the first adjusting locking structure 3 adjusts the position of the first base 10 on the plane perpendicular to the central axis of the first through hole 10a until the measurement results of the multiple measuring elements 20 are equal, and the first measurement result of the measuring structure 2 is recorded; Step S3, the first shaft moves to disengage from the measuring structure 2, and the second shaft moves to stop with the measuring structure 2; Step S4, the second measurement result of the measuring structure 2 is recorded, and the static coaxiality deviation of the crucible shaft 72 and the lifting shaft 71 is calculated based on the first measurement result and the second measurement result.

[0109] For example, the first axis is the crucible axis 72, and the second axis is the lifting axis 71. The coaxiality measurement method includes: Step S1, the measuring structure 2 is in a predetermined state, and the coaxiality measuring device 100 extends downward until the lower surface of the first adjusting and locking structure 3 abuts against the top of the mounting platform 74; Step S2, the crucible axis 72 moves to abut against the measuring heads 20a of the multiple measuring elements 20, and the first adjusting and locking structure 3 adjusts the position of the first base 10 on the plane perpendicular to the central axis of the first through hole 10a, so that the first adjusting and locking structure 3 indirectly changes the position of the measuring structure 2 on the plane perpendicular to the central axis of the first through hole 10a, until the measurement results of the multiple measuring elements 20 are obtained. The first measurement result of the measuring structure 2 is recorded when the center of the cross section of the crucible shaft 72 at the location of the measuring structure 2 coincides with the center of the cross section of the same imaginary cylindrical surface where the measuring heads 20a of the multiple measuring elements 20 are located. In step S3, the crucible shaft 72 is moved to disengage from the measuring heads 20a of the multiple measuring elements 20 (i.e., the crucible shaft 72 does not stop with the measuring heads 20a of the multiple measuring elements 20), and then the lifting shaft 71 is moved so that the lifting shaft 71 stops with the multiple measuring heads 20a. In step S4, the second measurement result of the measuring structure 2 is recorded, and the static coaxiality deviation of the crucible shaft 72 and the lifting shaft 71 is calculated based on the first measurement result and the second measurement result.

[0110] As can be seen, in step S2, the center of the cross-section of the crucible shaft 72 corresponding to the location of the measuring structure 2 coincides with the virtual center of the imaginary cylindrical surface where the measuring heads 20a of the multiple measuring elements 20 are located. In step S3, when measuring the lifting shaft 71, the position of the measuring structure 2 on the plane perpendicular to the central axis of the first through hole 10a is not adjusted by the first adjusting locking structure 3. If the measurement results of the multiple measuring elements 20 are the same at this time, it indicates that the center of the cross-section of the lifting shaft 71 corresponding to the location of the measuring structure 2 coincides with the virtual center of the imaginary cylindrical surface where the measuring heads 20a of the multiple measuring elements 20 are located. The virtual centers of a cross section coincide, meaning the center of the cross section at the location of the measuring structure 2 corresponding to the lifting shaft 71 coincides with the center of the cross section at the location of the measuring structure 2 corresponding to the crucible shaft 72. If the measurement results of multiple measuring elements 20 are different, it indicates that the center of the cross section at the location of the measuring structure 2 corresponding to the lifting shaft 71 does not coincide with the virtual center of the same cross section of the imaginary cylindrical surface where the measuring heads 20a of multiple measuring elements 20 are located. The operator can calculate the static coaxiality deviation between the crucible shaft 72 and the lifting shaft 71 based on the deviation between the second and first measurement results. It can be understood that the measurement order of the crucible shaft 72 and the lifting shaft 71 does not affect the static coaxiality deviation between them. The operator can choose the measurement order according to the actual situation. That is to say, the first axis can also be the lifting shaft 71, and the second axis can be the crucible shaft 72.

[0111] Under normal circumstances, the diameters of the crucible shaft 72 and the lifting shaft 71 are basically equal, although they may not be.

[0112] According to the coaxiality measurement method of this utility model embodiment, the above coaxiality measurement method is relatively simple, which facilitates the improvement of the detection efficiency of the coaxiality of the crucible shaft 72 and the lifting shaft 71, and the detection results are accurate and reliable.

[0113] Please refer to Figure 11In some embodiments, after step S4, the method further includes step S5: the first shaft stops with the measuring structure 2 and rotates, recording the third measurement result of the measuring structure 2; the second shaft stops with the measuring structure 2 and rotates, recording the fourth measurement result of the measuring structure 2; and the dynamic coaxiality deviation between the crucible shaft 72 and the lifting shaft 71 is calculated based on the third and fourth measurement results. For example, step S5 includes: step S51: the first shaft stops with the measuring structure 2, and then the first shaft rotates, recording the third measurement result; step S52: the second shaft stops with the measuring structure 2, and then the second shaft rotates, recording the fourth measurement result; step S53: the dynamic coaxiality deviation between the crucible shaft 72 and the lifting shaft 71 is calculated based on the third and fourth measurement results. The order of steps S51 and S52 is not limited. For example, if step S52 is performed first and then step S51 is performed, the second axis can be rotated after the second measurement result is recorded. Alternatively, if step S51 is performed first and then step S52 is performed, the second axis can be disengaged from the measuring structure 2 after the second measurement result is recorded, and then the first axis can be moved to engage with the measuring structure 2. After that, the first axis can be rotated and the third measurement result can be recorded.

[0114] For example, in step S5, the first axis rotates, for example, at least one revolution (for example, the first axis can also rotate continuously, reading multiple maximum and minimum values ​​to verify whether the operation is stable by checking whether the multiple maximum values ​​are consistent and / or whether the multiple minimum values ​​are consistent). By analyzing the measurement results of multiple measuring elements 20, the rotation axis of the first axis and the coaxiality of the axis with the measuring head 20a of the multiple measuring elements 20 located on the same imaginary cylindrical surface can be obtained, and the third measurement result of the measuring structure 2 is recorded; the second axis and the measuring head 20a of the multiple measuring elements 20... Stop (at this point, the measurement results of multiple measuring elements 20 may be equal or unequal). The second axis then rotates, for example, at least one revolution (or it may rotate continuously, reading multiple maximum and minimum values ​​to verify stable operation by checking if the maximum and / or minimum values ​​are consistent). By analyzing the measurement results of multiple measuring elements 20, the coaxiality of the rotation axis of the second axis and the axis of the same imaginary cylindrical surface where the measuring heads 20a of the multiple measuring elements 20 are located can be obtained, and the fourth measurement result of the measuring structure 2 is recorded. Finally, the dynamic coaxiality deviation of the crucible shaft 72 and the lifting shaft 71 is calculated based on the third and fourth measurement results. If the calculated dynamic coaxiality deviation of the crucible shaft 72 and the lifting shaft 71 is large, the operator can re-align the crucible shaft 72 and the lifting shaft 71 and perform the measurement again.

[0115] It is understandable that since the central axis of the crucible shaft 72 and the lifting shaft 71 at the measurement structure 2 cannot be completely coincident with their respective rotation axes, static detection will inevitably lead to measurement deviation. However, when the crucible shaft 72 and the lifting shaft 71 are rotated, they will always rotate around their respective rotation axes. By processing the data of the third and fourth measurement results, the measurement deviation can be eliminated, so as to better reflect the actual production situation and facilitate the improvement of product quality in single crystal production furnaces.

[0116] In some embodiments, when the crucible shaft 72 and / or the lifting shaft 71 are rotated, the deviation of the measurement results of the multiple measuring elements 20 will not exceed 0.2 mm, so that the rotation axes of the crucible shaft 72 and the lifting shaft 71 can be substantially coincident, which facilitates the improvement of product quality of the single crystal production furnace.

[0117] Please refer to Figures 1-3 In some embodiments, there are four measuring elements 20 arranged at equal intervals, and two adjacent measuring elements 20 are respectively the first measuring element and the second measuring element. In step S5, the third measurement result includes the maximum value X1 of the measurement result of the first measuring element. max and minimum value X1 min The maximum value Y1 of the measurement result of the second measuring piece. max and minimum value Y1 min The fourth measurement result includes the maximum value of the measurement result of the first measuring piece multiplied by 2. max and minimum value X2 min The maximum value Y2 of the measurement result of the second measuring piece. max and minimum value Y2 min The dynamic coaxiality deviation between the crucible shaft 72 and the lifting shaft 71 is d.

[0118] X1=(X1 min +X1 max ) / 2, X2=(X2) min +X2 max ) / 2, Y1=(Y1 min +Y1 max ) / 2, Y2=(Y2 min +Y2 max ) / 2.

[0119] As can be seen, the four measuring elements 20 are arranged at intervals along the circumference of the first through hole 10a, and the multiple measuring elements 20 are set at equal intervals so that the multiple measuring elements 20 present a "+" shape arrangement on the radial plane, which facilitates subsequent data processing; two adjacent measuring elements 20 are the first measuring elements, that is, each first measuring element has a second measuring element with an included angle of 90° on both sides of its circumference, and similarly, each second measuring element has a first measuring element with an included angle of 90° on both sides of its circumference, so that the relationship between the measurement data is clearer and facilitates subsequent processing of the measurement data.

[0120] Taking an example where the first measuring element is located on one side of the first through hole 10a in the first direction, and the second measuring element is located on one side of the first through hole 10a in the second direction, both the first and second directions are parallel to the radial plane and perpendicular to each other, this explains the coaxiality measurement method of this application. In step S5, the first shaft rotates, for example, one revolution, so that the first measuring element can obtain a maximum value X1 of the measurement result. max And the minimum value X1 of a measurement result min This allows us to obtain the runout in the first direction of the axis of rotation of the first axis and the axis of the axis of the measuring head 20a of the multiple measuring elements 20 on the same imaginary cylindrical surface. The second measuring element can then obtain a maximum value Y1 of the measurement result. max And the minimum value Y1 of a measurement result min This allows us to obtain the runout in the second direction of the axis of rotation of the first axis and the axis of the axis of the measuring head 20a of the multiple measuring elements 20 on the same imaginary cylindrical surface.

[0121] In step S5, the second axis rotates, for example, one full rotation, so that the first measuring element can obtain a maximum value X2 of the measurement result. max And the minimum value of a measurement result X2 min This allows us to obtain the runout in the first direction of the axis of rotation of the second axis and the axis of the axis of the measuring head 20a of the multiple measuring elements 20 on the same imaginary cylindrical surface. The second measuring element can then obtain a maximum value Y2 of the measurement result. max The minimum Y2 of a measurement result min This allows us to obtain the runout in the second direction of the axis of rotation of the second axis and the axis of the axis on the same imaginary cylindrical surface where the measuring heads 20a of the multiple measuring elements 20 are located. It can be understood that the runout is an important indicator for measuring the deviation of the axis from its ideal position; by measuring the maximum and minimum values, the degree of deviation of the axis in that direction can be calculated.

[0122] Wherein, the position of the rotation axis of the first axis in the first direction is X1 = (X1 min +X1 max ) / 2, the position of the first axis rotation axis in the second direction is Y1=(Y1 min +Y1max ) / 2, the position of the second axis's rotation axis in the first direction is X2=(X2) / 2. min +X2 max ) / 2, the position of the second axis rotation axis in the second direction is Y2=(Y2 min +Y2 max If ) / 2, then the eccentricity X1-X2 in the first direction between the first axis and the second axis, and the eccentricity Y1-Y2 in the second direction between the first axis and the second axis, are obtained. Thus, the dynamic coaxiality deviation between the crucible shaft 72 and the lifting shaft 71 is... Therefore, the coaxiality deviation of the rotation axes of the crucible shaft 72 and the lifting shaft 71 can be obtained through the above method, so that the workers can adjust the lifting shaft 71 according to the obtained eccentricity and eccentricity direction, so as to reduce the impact of the non-collinearity of the rotation axes of the lifting shaft 71 and the crucible shaft 72 on production and improve product quality.

[0123] Furthermore, to facilitate the engagement of the crucible shaft 72 and the lifting shaft 71 with the measuring structure 2, conical shaft sections can be provided at the upper end of the crucible shaft 72 and the lower end of the lifting shaft 71. These conical shaft sections have a certain length to provide guidance when the crucible shaft 72 and the lifting shaft 71 engage with the measuring structure 2. They also facilitate timely assessment of the suitability of the shaft's position relative to the measuring structure 2 by comparing the measurement results from multiple measuring elements 20. This allows for timely adjustment of the bearing structure's position on the horizontal plane, reducing the risk of interference between the crucible shaft 72, the lifting shaft 71, and the measuring structure 2. There are no restrictions on whether the diameters of the crucible shaft 72 and the lifting shaft 71 are equal. Especially when their diameters are unequal, the length of the conical shaft section can be appropriately increased, while also using a measuring element 20 with a suitable range.

[0124] Please refer to Figure 12In some embodiments, between steps S4 and S5, step S7 is further included: determining whether the static coaxiality deviation in step S4 exceeds a predetermined value; if it exceeds the predetermined value, step S8 is executed; if it does not exceed the predetermined value, step S5 is executed. Step S8 involves moving the second axis to disengage from the measuring structure 2, aligning the first and second axes, and then executing steps S2 to S4 again, re-evaluating the static coaxiality deviation. It can be seen that before performing dynamic measurement, the static coaxiality deviation obtained in step S4 is first determined to meet the above conditions. If the conditions are met, it indicates that the static coaxiality deviation is not too large, and subsequent dynamic measurement can continue, executing step S5. If the static coaxiality deviation does not meet the above conditions, it indicates that the static coaxiality deviation is too large, and there is no need to continue subsequent dynamic measurement. In this case, the first and second axes are aligned to reduce the static coaxiality deviation between the first and second axes, and steps S2 to S4 are executed again, re-evaluating the static coaxiality deviation. This process is repeated at least once until the static coaxiality deviation meets the above conditions, and then step S5 is executed. It is understandable that the above settings can reduce the measurement deviation caused by the static coaxiality deviation of the first axis and the second axis to the dynamic coaxiality deviation of the two, which is beneficial to improving the measurement accuracy of dynamic coaxiality deviation.

[0125] It is understood that the alignment adjustment methods of the first and second axes in step S8 are well known to those skilled in the art and will not be described in detail here.

[0126] Optionally, before performing step S8, it can be determined whether the coaxiality measuring device 100 needs to be moved out based on the actual needs of the subsequent alignment operation. If the coaxiality measuring device 100 is moved out, then in step S8, the first axis and the second axis are aligned, and steps S1 to S4 are performed again. If the coaxiality measuring device 100 does not need to be moved out, then after alignment, steps S2 to S4 are performed again.

[0127] In some embodiments, please refer to Figure 13The measuring structure 2 also includes multiple second adjustment and locking structures 4, each disposed on the first base 10. Each measuring element 20 corresponds to one second adjustment and locking structure 4 and is mounted on the first base 10 via the corresponding second adjustment and locking structure 4. The second adjustment and locking structure 4 is configured to continuously adjust and lock the position of the corresponding measuring element 20 in the radial direction relative to the first through hole 10a in real time. The coaxiality measuring device 100 also includes a second base 6 and a positioning cylinder 5. The second base 6 is positioned and fitted with the first through hole 10a and is separable from the first through hole 10a. The positioning cylinder 5 is positioned and fitted with the second base 6. The outer peripheral wall of the positioning cylinder 5 is cylindrical and is suitable for being coaxially arranged with an imaginary cylindrical surface. On the plane of the central axis of the first through hole 10a, the orthographic projection of the outer peripheral wall of the positioning cylinder 5 is spaced within the outer contour range of the orthographic projection of the hole wall of the first through hole 10a. The positioning cylinder 5 is adapted to radially abut against the measuring heads 20a of the multiple measuring elements 20, so that the positioning cylinder 5 cooperates with the second adjusting locking structure 4 to adjust the measurement results of the multiple measuring elements 20 to be equal. Before step S1, the method further includes: step S9, positioning the second base 6 and the positioning cylinder 5 in the first through hole 10a and abutting against the measuring structure 2, adjusting the second adjusting locking structure 4 until the measurement results of the multiple measuring elements 20 are equal; step S10, removing the positioning cylinder 5 from the first through hole 10a to expose the first through hole 10a; and / or, please refer to Figure 14 The first adjustment and locking structure 3 also includes a second adjustment structure 34. The second adjustment structure 34 is used to adjust and lock the position of the first base 10 in the axial direction of the first through hole 10a. The second adjustment structure 34 is connected between the bracket 30 and the first base 10, and the second adjustment structure 34 is used to adjust and lock the distance between the bracket 30 and the first base 10. Before step S1, step S11 is also included: according to the maximum movement distance of the first axis and the second axis, the second adjustment structure 34 adjusts and locks the distance between the first base 10 and the bracket 30 so that the surfaces of the bracket 30 and the first base 10 that are opposite to each other are parallel. In step S1, the coaxiality measuring device 100 is inserted downward into the cooling sleeve 70 until the bracket 30 stops against the top of the cooling sleeve 70.

[0128] As can be seen, by positioning the second base 6 and the positioning cylinder 5 in the first through hole 10a, and with the outer peripheral wall of the positioning cylinder 5 abutting against the measuring structure 2, the second adjusting locking structure 4 is adjusted so that multiple measuring elements 20 can move radially relative to the first through hole 10a until the measurement results of multiple measuring elements 20 are the same. Then, the positioning cylinder 5 is removed from the first through hole 10a to expose the first through hole 10a, so that the measuring heads 20a of multiple measuring elements 20 extend radially into the inner side of the hole wall of the first through hole 10a, and the multiple measuring elements 20... The measuring head 20a of the measuring part 20 is located on the same imaginary cylindrical surface, which facilitates the subsequent measurement of the crucible shaft 72 and the lifting shaft 71; and / or, in step S11, by adjusting the second adjustment structure 34, the surfaces of the support 30 and the first base 10 that are opposite to each other are kept parallel, so that when the first adjustment locking structure 3 is adjusted later, the first adjustment locking structure 3 can drive the first chassis and the measuring structure 2 to move radially, and during the adjustment process, it is not easy to generate axial error to the measuring structure 2, which facilitates the improvement of the measurement accuracy of the coaxiality measuring device 100.

[0129] For example, the positioning cylinder 5 is positioned and fitted into the first through hole 10a by the second base 6. When the radial dimension change of the positioning cylinder 5 at each position of the measuring element 20 is the same, the second base 6 and the positioning cylinder 5 can be disassembled together to expose the first through hole 10a, so as to facilitate the subsequent insertion of the lifting shaft 71 and / or the crucible shaft 72 into the first through hole 10a.

[0130] Thus, the second adjustment structure 34 can adjust the surfaces of the support 30 and the first base 10 to be parallel to each other, and the second adjustment locking structure 4 can use the positioning cylinder 5 to adjust the measuring heads 20a of the multiple measuring elements 20 to be located on the same imaginary cylindrical surface. That is, the second adjustment structure 34 and the second adjustment locking structure 4 can switch the measuring structure 2 to a predetermined state so as to facilitate the subsequent measurement of the lifting shaft 71 and the crucible shaft 72 by the coaxiality measuring device 100.

[0131] It is understood that the process of adjusting the coaxiality measuring device 100 described above can occur outside the single crystal growth furnace, providing a larger operating space for adjusting the coaxiality measuring device 100 and facilitating improved adjustment efficiency.

[0132] Furthermore, it should be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. To avoid unnecessary repetition, this application will not describe the various possible combinations separately. In addition, various different embodiments of this application can also be arbitrarily combined, as long as they do not violate the spirit of this application, they should also be regarded as the content disclosed in this application.

[0133] In the description of this application, it should be understood that the terms "center," "lateral," "length," "thickness," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, features defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "multiple" means two or more. In the description of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a mechanical connection or an electrical connection; it can refer to a direct connection or an indirect connection through an intermediate medium; it can refer to the internal communication of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0134] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "over," and "on the upper side" of the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "on the lower side" of the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0135] In the description of this specification, references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A coaxiality measuring device, characterized in that, include: A first base, on which a first through hole is formed; A measuring structure is disposed on the first base and includes at least three measuring elements spaced circumferentially along the first through hole. Each measuring element is used to measure the radial dimension of the structure under test at its location. The measuring structure has at least a predetermined state in which the measuring heads of the plurality of measuring elements extend radially along the first through hole to the radially inner side of the hole wall of the first through hole and are located on the same imaginary cylindrical surface. The measuring heads of the plurality of measuring elements are located on the same cross-section of the imaginary cylindrical surface. A first adjustment and locking structure is used at least to adjust and lock the position of the first base in a plane perpendicular to the central axis of the first through hole.

2. The coaxiality measuring device according to claim 1, characterized in that, The measuring structure further includes multiple second adjustment and locking structures all disposed on the first base. Each measuring element corresponds to one of the second adjustment and locking structures and is respectively mounted on the first base through the corresponding second adjustment and locking structure. The second adjustment and locking structure is configured to: at least continuously adjust and lock in real time the radial position of the corresponding measuring element relative to the first through hole. The coaxiality measuring device further includes: The second base is positioned and fitted into the first through hole and can be detachably fitted from the first through hole; A positioning cylinder is positioned and fitted to the second base. The outer peripheral wall of the positioning cylinder is cylindrical and is adapted to be coaxially arranged with the imaginary cylindrical surface. On a plane perpendicular to the central axis of the first through hole, the orthographic projection of the outer peripheral wall of the positioning cylinder is spaced within the outer contour range of the orthographic projection of the wall of the first through hole. The positioning cylinder is adapted to radially stop with the measuring heads of the plurality of measuring elements, so that the positioning cylinder cooperates with the second adjustment and locking structure to adjust the measurement results of the plurality of measuring elements to be equal.

3. The coaxiality measuring device according to claim 2, characterized in that, The second base includes at least three self-centering components arranged sequentially along the circumference. Each self-centering component has a self-positioning part. The self-positioning parts of the multiple self-centering components are spliced ​​together to form a cylindrical surface and are limited to fit the positioning cylinder.

4. The coaxiality measuring device according to claim 2, characterized in that, The second adjustment and locking structure includes a third base, which magnetically engages with the first base.

5. The coaxiality measuring device according to claim 4, characterized in that, The second adjustment and locking structure is also used to adjust and lock the axial position of the corresponding measuring element relative to the first through hole. The first base has a mounting surface, the first through hole penetrates the mounting surface, the central axis of the first through hole is parallel to or coincides with the central axis of the positioning cylinder, and both are perpendicular to the mounting surface. The measuring structure is disposed on the mounting surface. The second adjustment and locking structure further includes a first link, a second link, and a locking member. One end of the first link and one end of the second link are pivotally connected. The locking member is located at the pivot position between the first link and the second link and is used to lock the included angle between the first link and the second link. The end of the first link away from the second link is connected to the third base through a universal damping ball hinge. The end of the second link away from the first link is connected to the measuring member through a universal damping ball hinge.

6. The coaxiality measuring device according to any one of claims 1-5, characterized in that, The first adjustment and locking structure includes a bracket and a first adjustment structure. The bracket has a second through hole that is axially opposite to the first through hole and is connected to the first base. The first adjustment structure is disposed on the bracket and includes at least three first adjustment units that are circumferentially spaced along the first through hole. The first adjustment units are spaced radially outward from the first through hole. The radially inner end of each first adjustment unit is adapted to abut against the mounting platform, and the position of each first adjustment unit radially in the first through hole is adjustable.

7. The coaxiality measuring device according to claim 6, characterized in that, The bracket has multiple lugs spaced circumferentially at its edge, the lugs extending axially, and the first adjustment unit passing radially through the corresponding lug and threadedly engaging with the lug.

8. The coaxiality measuring device according to claim 6, characterized in that, The first adjustment and locking structure further includes a second adjustment structure, which is used to adjust and lock the axial position of the first base in the first through hole. The second adjustment structure is connected between the bracket and the first base, and is used to adjust and lock the distance between the bracket and the first base.

9. The coaxiality measuring device according to claim 8, characterized in that, The second adjustment structure includes at least three second adjustment units arranged circumferentially along the first through hole. Each second adjustment unit is connected to the bracket and the first base to continuously adjust and lock the distance between the bracket and the first base at the location of the second adjustment unit in real time.

10. The coaxiality measuring device according to claim 9, characterized in that, The second adjustment unit includes: The third link is axially inserted through the first through hole into one of the bracket and the first base and is fixedly connected to the other. A first locking nut and a second locking nut are both sleeved on the outside of the third connecting rod and threaded into the third connecting rod. The first locking nut and the second locking nut respectively abut against both sides of one of the brackets and the first base.

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