A focus ring power adjustment assembly
CN224342273UActive Publication Date: 2026-06-09ADVANCED MICRO FAB EQUIP INC CHINA
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ADVANCED MICRO FAB EQUIP INC CHINA
- Filing Date
- 2025-05-15
- Publication Date
- 2026-06-09
AI Technical Summary
Technical Problem
In existing technologies, the RF power coupling range of focusing rings is limited, resulting in a short lifespan that cannot meet the requirements of long-term processes.
Method used
The support ring is designed with a combination of two ceramic materials with high dielectric constant and high thermal conductivity to increase the capacitance between the electrode and the focusing ring, improve the RF coupling efficiency, and adjust the RF power through a variable capacitor.
Benefits of technology
It significantly increases the adjustment range of RF power, extends the lifespan of the focusing ring, and improves the stability and uniformity of the process.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN224342273U_ABST
Abstract
The utility model discloses a kind of focusing ring power regulation components, comprising: support ring, sinking step embedded in the edge of pedestal and below the focusing ring, the support ring includes the part of first insulating material and the part of second insulating material, the dielectric constant of the first insulating material is higher than the second insulating material, and the thermal conductivity of the first insulating material is lower than the second insulating material;Electrode, embedded in the inside of the support ring, the electrode includes the part of first insulating material between the focusing ring;Variable capacitance, with the electrode is electrically connected by wire;Radio frequency matcher, one end is connected the variable capacitance, the other end is connected radio frequency source.The support ring by adding the first insulating material of high dielectric constant, improve the capacitance between electrode and focusing ring, significantly increase the coupling efficiency and power of radio frequency to focusing ring, improve the service life of coupling ring.
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