A round wafer cassette

Abstract

The utility model relates to round wafer storage technical field, specifically disclose a kind of round wafer card box, by being equipped with several limiting card slot for limiting round wafer in storage cavity, and being equipped with anti-drop mechanism in the opening end of storage cavity, when storing round wafer in storage cavity, limiting card slot can limit each round wafer to be used to ensure the stability of round wafer, and after round wafer is placed into storage cavity, the baffle strip in anti-drop mechanism can also be rotated to opening end, to reduce the size of opening end, to make baffle strip for limiting round wafer, avoid round wafer from opening end to drop out when handling box, to further effectively ensure the storage stability of round wafer in box.

Description

Technical Field

[0001] This utility model relates to the field of wafer storage technology, and in particular to a wafer cassette. Background Technology

[0002] In the optoelectronic detection chip manufacturing industry, chips are uncut whole wafers from bare silicon wafers to grinding and dicing stations. They need to go through more than a dozen processes. During the transfer between processes, the products need to be placed in special cassettes for transfer and handling. Moreover, wafers are precision products. New bare silicon wafers and wafers after production need to be protected to avoid damage. Currently, wafer cassettes on the market are prone to movement and being dropped when handling wafers after storage, because some wafers have a circular cross-section. This cannot guarantee the stability of the wafers stored in the cassettes.

[0003] The technical problem to be solved by this application is: to design a wafer cassette that can effectively ensure the stable storage of wafers. Utility Model Content

[0004] In order to overcome the shortcomings of the existing technology, the purpose of this utility model is to provide a wafer cassette that can effectively ensure the stable storage of wafers.

[0005] The technical solution adopted by this utility model is as follows: a wafer cassette, including a cassette body, a storage cavity provided in the cassette body, a plurality of limiting slots for storing and limiting the wafers in the storage cavity, and an anti-detachment mechanism provided at the opening end of the storage cavity. The anti-detachment mechanism includes baffles provided on both sides of the opening end of the storage cavity, and the baffles are rotatably connected to the cassette body.

[0006] In some embodiments, the housing includes an upper fixing plate and a lower bottom plate arranged correspondingly on the upper and lower sides, and a connecting column is provided between the upper fixing plate and the lower bottom plate to connect them.

[0007] In some embodiments, the storage cavity is provided with a plurality of longitudinally arranged post for carrying the wafer, and the limiting slots are equidistantly arranged along the length of the post.

[0008] In some implementations, the limiting slots on each locking pin are correspondingly set on the same transverse plane.

[0009] In some embodiments, the anti-detachment mechanism includes pins respectively disposed on the upper fixed plate and the lower base plate, the pins having connecting blocks rotatably connected thereto, and the stop bar being fixedly connected to the connecting blocks.

[0010] In some embodiments, both the upper fixing plate and the lower base plate are provided with locking holes, and the locking position between the baffle and the locking hole is used to limit the wafer and prevent the wafer from falling off.

[0011] In some implementations, the retaining posts are located around the periphery of the storage cavity.

[0012] In some embodiments, a handle is provided on the outside of the casing, and the handle is connected to the connecting post.

[0013] In some implementations, the bottom of the lower base plate is also provided with support feet.

[0014] This invention has the following technical effects: By providing several limiting slots for limiting the wafers in the storage cavity, and providing an anti-detachment mechanism at the opening end of the storage cavity, when the wafers are stored in the storage cavity, the limiting slots can limit each wafer to ensure the stability of the wafers. After the wafers are placed in the storage cavity, the baffle in the anti-detachment mechanism can be rotated toward the opening end to reduce the size of the opening end, thereby allowing the baffle to restrict the wafers and prevent them from coming out of the opening end when the cassette is being transported, thus further effectively ensuring the storage stability of the wafers in the cassette. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of the wafer cassette of this utility model;

[0016] Figure 2 This utility model is a wafer cassette. Figure 1 Schematic diagram of partial structure A.

[0017] The labels and names in the diagram correspond as follows: 1. Box body; 2. Storage cavity; 3. Limiting slot; 4. Anti-detachment mechanism; 40. Stop bar; 10. Upper fixing plate; 11. Lower bottom plate; 12. Connecting column; 13. Locking column; 40. Pin; 41. Connecting block; 42. Locking hole; 5. Handle; 6. Support foot pad. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] Please see Figure 1-2This utility model provides a technical solution: a wafer cassette, including a cassette body 1, a storage cavity 2 inside the cassette body 1, wherein the storage cavity 2 is provided with a plurality of limiting slots 3, and a plurality of longitudinally arranged locking posts 13 are also provided inside the storage cavity 2. Each locking post 13 is provided with a plurality of limiting slots 3, wherein the limiting slots 3 are equidistantly arranged along the length direction of the locking post 13, and the limiting slots 3 on each locking post 13 are correspondingly arranged on the same transverse plane. When it is necessary to store a wafer in the cassette body 1, the wafer is opened from the opening end of the storage cavity 2. The wafer is placed in the storage cavity 2 and its side is positioned in the limiting slot 3 located on the same horizontal plane. By using the limiting slot 3 to limit the wafer, the storage stability of the wafer can be effectively guaranteed. The limiting slots 3 are arranged vertically on the same locking post 13, so the wafers are equivalent to being stored vertically stacked in the storage cavity 2. However, since each wafer corresponds to only the limiting slot 3 on the same horizontal plane, adjacent wafers will not collide and thus affect the accuracy and quality.

[0020] An anti-detachment mechanism 4 is also provided at the opening end of the storage cavity 2. The anti-detachment mechanism 4 includes baffles 40 on both sides of the opening end of the storage cavity 2. The baffles 40 are rotatably connected to the box body 1. When the wafer is stored in the storage cavity 2, the baffles 40 on both sides of the opening end of the storage cavity 2 are rotated to lock the baffles 40 to the box body 1, which is equivalent to reducing the size of the opening end of the storage cavity 2. This can effectively prevent the wafer from falling off the opening end of the storage cavity 2 when the box body 1 is moved, thereby further ensuring the storage stability of the wafer.

[0021] The casing 1 includes an upper fixing plate 10 and a lower bottom plate 11 arranged correspondingly on the top and bottom. A connecting post 12 is provided between the upper fixing plate 10 and the lower bottom plate 11 to connect with each other. A locking post 13 is arranged around the storage cavity 2. The storage cavity 2 is formed between the upper fixing plate 10, the lower bottom plate 11, the connecting post 12 and the locking post 13.

[0022] In order to enable the rotation between the baffle 40 and the housing 1, the anti-detachment mechanism 4 includes a pin 40 respectively provided on the upper fixed plate 10 and the lower bottom plate 11. The pin 40 is provided with a connecting block 41 rotatably connected to it. The upper and lower ends of each baffle 40 are fixedly connected to the upper and lower corresponding connecting blocks 41. The upper fixed plate 10 and the lower bottom plate 11 are provided with locking holes 42, which are also provided vertically and vertically on the upper fixed plate 10 and the lower bottom plate 11. When it is necessary to use the baffle 40 to prevent the wafer from falling out of the storage cavity 2, it is only necessary to rotate the baffle 40, so that the connecting block 41 rotates along the pin 40, thereby driving the baffle 40 to rotate and locking the baffle 40 into the locking hole 42. This is equivalent to reducing the size of the opening at the opening end, thus limiting the wafer in the storage cavity 2 and preventing the wafer from falling out of the opening end of the storage cavity 2.

[0023] To facilitate the handling of the box 1, a handle 5 is provided on the outside of the box 1, and the handle 5 is connected to the connecting post 12.

[0024] To facilitate the placement of the housing 1, the bottom of the lower base plate 11 is also provided with support feet 6.

[0025] The working principle of this utility model is as follows: By providing a plurality of limiting slots 3 for limiting the wafers in the storage cavity 2, and providing an anti-detachment mechanism 4 at the opening end of the storage cavity 2, when the wafers are stored in the storage cavity 2, the limiting slots 3 can limit each wafer to ensure the stability of the wafers. After the wafers are placed in the storage cavity 2, the baffle 40 in the anti-detachment mechanism 4 can be rotated toward the opening end to reduce the size of the opening end, thereby allowing the baffle 40 to restrict the wafers and prevent the wafers from detaching from the opening end when the cassette 1 is being transported, thus further effectively ensuring the storage stability of the wafers in the cassette 1.

[0026] Finally, it should be noted that the above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A round wafer cassette comprising a cassette body, characterized in that, The cassette is internally provided with a storage cavity, the storage cavity is internally provided with a plurality of limiting clamping grooves for storing and limiting the circular wafer, the opening end of the storage cavity is provided with an anti-falling mechanism, the anti-falling mechanism comprises a blocking strip arranged on both sides of the opening end of the storage cavity, and the blocking strip is rotationally connected with the cassette.

2. A round wafer cassette according to claim 1, wherein The cassette comprises an upper fixed plate and a lower bottom plate arranged in correspondence with each other, and the upper fixed plate and the lower bottom plate are provided with a connecting column connected with each other.

3. The round wafer cassette of claim 1, wherein, The storage cavity is internally provided with a plurality of longitudinally arranged clamping columns for bearing the circular wafer, and the limiting clamping grooves are equidistantly arranged in the length direction of the clamping column.

4. A round wafer cassette according to claim 3, wherein The limiting clamping grooves on each clamping column are arranged in correspondence with each other on the same transverse plane.

5. The round wafer cassette of claim 2 wherein, The anti-falling mechanism comprises a pin shaft arranged on the upper fixed plate and the lower bottom plate respectively, the pin shaft is provided with a connecting block rotationally connected therewith, and the blocking strip is fixedly connected with the connecting block.

6. The round wafer cassette of claim 2, wherein, The upper fixed plate and the lower bottom plate are both provided with a clamping hole, and the blocking strip and the clamping hole are clamped and positioned for limiting the circular wafer and preventing the circular wafer from falling off.

7. The round wafer cassette of claim 3 wherein, The clamping column is arranged at the periphery of the storage cavity.

8. The round wafer cassette of claim 2, wherein, The outer side of the cassette is further provided with a handle, and the handle is connected with the connecting column.

9. The round wafer cassette of claim 2 wherein, The bottom of the lower bottom plate is further provided with a supporting foot pad.

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