A quick lifting electrostatic chuck support mechanism

Abstract

The utility model relates to electrostatic chuck support technical field discloses a quick lifting's electrostatic chuck support mechanism, including the bottom plate, the right side near the edge department fixedly connected with support frame in the top of bottom plate, the top of bottom plate is provided with lifting mechanism, the lifting mechanism is used for realizing the lifting of electrostatic chuck, the left side of support frame is provided with the support mechanism, the support mechanism is used for realizing the fixed support of electrostatic chuck, the lifting mechanism includes two fixed blocks one, the bottom of fixed block one all is fixedly connected in the top right side of bottom plate. In the utility model, through the left and right movement of telescopic link pushing slide bar one, can quickly drive long board one rotation, and long board one and long board two constitute quadrilateral structure to high -efficiently realize the lifting, can quickly adapt the demand of height to different working procedure, can through the engagement of L type block and corresponding hole simultaneously, realize the fixed support to the height.

Description

Technical Field

[0001] This utility model relates to the field of electrostatic chuck support technology, and in particular to an electrostatic chuck support mechanism for rapid lifting and lowering. Background Technology

[0002] With the continuous upgrading of precision manufacturing in the semiconductor, flat panel display, and photovoltaic industries, the requirements for workpiece handling are becoming increasingly stringent. In the semiconductor field, wafers undergo multiple processes such as photolithography, etching, and deposition during production. After each process is completed, they must be precisely transferred to the next processing equipment. This requires the transfer process to be both fast and stable; otherwise, it will directly affect the overall efficiency of the production line. In the flat panel display industry, even the slightest shaking or positional deviation during the handling of large glass substrates can lead to defects in subsequent bonding and coating processes, thereby affecting the quality of the display. The same applies to silicon wafers in the photovoltaic industry. Their thin and brittle nature means that any form of collision or excessive compression must be avoided during transport. These specific scenarios in actual production place stringent requirements on workpiece handling mechanisms for efficiency, precision, and safety, becoming a direct driving force for technological innovation.

[0003] In balancing speed and precision, traditional mechanisms using gear and belt drives can lead to positioning errors due to gaps between components when rapid lifting is required. In the workpiece adsorption stage, vacuum chucks rely on air pressure to generate adsorption force. When moving rapidly, fluctuations in air pressure can cause unstable adsorption force, and can also bring external dust and particles into the clean production environment, contaminating the workpiece surface. Electrostatic chucks, on the other hand, adsorb workpieces without mechanical contact with the workpiece surface, thus preventing scratches on precision workpieces. The mechanism enables the lifting and lowering of the electrostatic chuck, and real-time feedback adjustments ensure positioning accuracy during the lifting process. However, existing lifting mechanisms suffer from slow lifting action due to complex transmission structures, multiple power transmission links, and high energy loss, making it difficult to quickly respond to the immediate height requirements of different processes. Utility Model Content

[0004] To overcome the above shortcomings, this utility model provides a fast lifting electrostatic chuck support mechanism, which aims to improve the problem that the existing lifting mechanism has a complex transmission structure, many power transmission links and large energy loss, resulting in slow lifting action and difficulty in quickly responding to the real-time height requirements of different processes.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: a fast-lifting electrostatic chuck support mechanism, comprising a base plate, a support frame fixedly connected to the top right side of the base plate near the edge, a lifting mechanism provided on the top of the base plate for lifting the electrostatic chuck, a support mechanism provided on the left side of the support frame for fixed support of the electrostatic chuck, the lifting mechanism comprising two fixing blocks, the bottom of which is fixedly connected to the top right side of the base plate, two fixing plates fixedly connected to the top left side of the base plate, a long plate rotatably connected to the top of both fixing blocks and fixing plates, a long plate rotatably connected to the top of each long plate, a fixing plate rotatably connected to the top of the left side of the long plate rotatably connected to the top of the right side of the long plate rotatably connected to the top of the fixing block rotatably connected to the top of the fixing block rotatably connected to the top of the fixing plate ...

[0006] As a further description of the above technical solution:

[0007] The support mechanism includes an electrostatic suction cup, the bottom of which is mounted on the top of a support plate. Two locking frames are slidably connected to the top of the support plate. A long column is slidably connected to the left side of the locking frame. Two fastening bolts are threaded to the outer wall of the long column. The adjacent side of the fastening bolts is attached to the side of the locking frame that is furthest away from it. An adjustment component is provided in the middle of the locking frame. A fixing component is provided on the right side of the support plate.

[0008] As a further description of the above technical solution:

[0009] The power assembly includes a telescopic rod, the rear side of which is rotatably connected to the adjacent fixed block one, and the other end of the telescopic rod is fixedly connected to a sliding rod one. The front and rear sides of the sliding rod one are slidably connected to the adjacent fixed plate one, and the adjacent fixed plate two is slidably connected to a sliding rod two.

[0010] As a further description of the above technical solution:

[0011] The stabilizing component includes a support rod one, the front and rear sides of which are fixedly connected to adjacent sections of a long plate one, and a support rod two is fixedly connected to adjacent sections of a long plate two.

[0012] As a further description of the above technical solution:

[0013] The adjustment assembly includes two adjustment plates, the outer walls of which are slidably connected to the middle of the locking frame, and the top of each adjustment plate is slidably connected to two positioning posts.

[0014] As a further description of the above technical solution:

[0015] The top of the support plate has multiple positioning holes, and the bottom of the positioning post engages with the inner wall of the corresponding positioning hole.

[0016] As a further description of the above technical solution:

[0017] The fixing component includes a connecting frame, the left side of which is fixedly connected to the right side of the support plate, and two fixing blocks are fixedly connected to the right side of the connecting frame.

[0018] As a further description of the above technical solution:

[0019] The top of each of the three fixed blocks is slidably connected to an L-shaped block, and the right side of the support frame has multiple holes, with the left side of the L-shaped block engaging with the inner wall of the corresponding hole.

[0020] This utility model has the following beneficial effects:

[0021] 1. In this utility model, the left and right movement of the sliding rod by the telescopic rod can quickly drive the rotation of the long plate. The quadrilateral structure formed by the long plate and the long plate makes the telescopic movement smoother, thereby achieving efficient lifting and lowering. It can quickly adapt to the immediate height requirements of different processes. At the same time, the L-shaped block can be engaged with the corresponding hole to achieve fixed support for the adjusted height, avoiding the impact on workpiece processing and transmission due to accidental height deviation, and providing a solid guarantee for the entire operation process.

[0022] 2. In this utility model, the electrostatic suction cup is fixed by sliding the locking frame, then the long column is rotated to fix the locking frame, then the sliding adjustment plate is used to further fix the electrostatic suction cup, and then the electrostatic suction cup is fixed by locking the positioning column with the corresponding positioning hole, thus preventing the electrostatic suction cup from moving during the lifting process. The suction cup is fixed from multiple dimensions. This layered fixing method, compared with a single fixing structure, can fully cover the direction and angle of the suction cup movement, reducing the risk of movement. Attached Figure Description

[0023] Figure 1 This is a perspective view of the front side of the base plate of a fast-lifting electrostatic chuck support mechanism proposed in this utility model.

[0024] Figure 2 This is a side view of the support frame of a fast-lifting electrostatic chuck support mechanism proposed in this utility model;

[0025] Figure 3 A diagram showing the long plate of a rapid lifting electrostatic chuck support mechanism proposed in this utility model;

[0026] Figure 4A split view of the connecting frame of a fast-lifting electrostatic chuck support mechanism proposed in this utility model;

[0027] Figure 5 This is a split view of the support plate of a fast-lifting electrostatic chuck support mechanism proposed in this utility model.

[0028] Legend:

[0029] 1. Base plate; 2. Lifting mechanism; 201. Fixed block one; 202. Fixed plate one; 203. Long plate one; 204. Long plate two; 205. Fixed plate two; 206. Fixed block two; 207. Support plate; 208. Power component; 2081. Telescopic rod; 2082. Slide rod one; 2083. Slide rod two; 209. Stabilizing component; 2091. Support rod one; 2092. Support rod two; 3. Support mechanism; 301. Electrostatic suction cup; 302. Clamping frame; 303. Long column; 304. Fastening bolt; 305. Adjustment component; 3051. Adjustment plate; 3052. Positioning column; 3053. Positioning hole; 306. Fixed component; 3061. Connecting frame; 3062. Fixed block three; 3063. L-shaped block; 3064. Hole; 4. Support frame. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] Please see the appendix Figure 1 - Appendix Figure 3This utility model provides an embodiment of a fast-lifting electrostatic chuck support mechanism, comprising a base plate 1, a support frame 4 fixedly connected to the top right side near the edge of the base plate 1, a lifting mechanism 2 provided on the top of the base plate 1 for lifting the electrostatic chuck, a support mechanism 3 provided on the left side of the support frame 4 for fixing the electrostatic chuck, and the lifting mechanism 2 including two fixing blocks 201, the bottom of which is fixedly connected to the top right side of the base plate 1, and the top left side of the base plate 1 is fixedly connected to... There are two fixed plates 202, fixed blocks 201 and fixed plates 202 are rotatably connected to the top of each long plate 203, long plates 204 are rotatably connected to the top of each long plate 203, fixed plates 205 are rotatably connected to the top of each long plate 204 on the left, fixed blocks 206 are rotatably connected to the top of each long plate 204 on the right, and a support plate 207 is fixedly connected to the top of the fixed blocks 206. A power assembly 208 is provided between adjacent fixed plates 202, and a stabilizing assembly 209 is provided between adjacent long plates 204.

[0032] Specifically, the base plate 1 serves as the foundation of the entire support mechanism. A support frame 4 is fixedly connected to its top right side near the edge to provide additional stability. A lifting mechanism 2 is also installed on the top of the base plate 1. This mechanism enables the electrostatic chuck to be quickly raised and lowered to meet different working height requirements. A support mechanism 3 is installed on the left side of the support frame 4 to provide fixed support for the electrostatic chuck, ensuring its stability and reliability during operation. The bottom of the fixing block 201 is fixedly connected to the top right side of the base plate 1, providing stable support for the lifting mechanism 2. The top of the base plate 1... On the left side, there are two fixed plates 202. The tops of these fixed plates 202 and fixed blocks 201 are all rotatably connected to long plates 203. The tops of long plates 203 are rotatably connected to long plates 204, so that the lifting mechanism 2 can flexibly realize the lifting action. The tops of the long plates 204 on the left side are rotatably connected to fixed plates 205, and the tops of the long plates 204 on the right side are rotatably connected to fixed blocks 206. The tops of fixed plates 205 and fixed blocks 206 are fixedly connected to support plates 207 to achieve fixed support for the suction cup.

[0033] Please see the appendix Figure 3 - Appendix Figure 5The support mechanism 3 includes an electrostatic suction cup 301. The bottom of the electrostatic suction cup 301 is installed on the top of the support plate 207. Two locking frames 302 are slidably connected to the top of the support plate 207. A long column 303 is slidably connected to the left side of the locking frame 302. Two fastening bolts 304 are threadedly connected to the outer wall of the long column 303. The adjacent side of the fastening bolt 304 is attached to the side of the locking frame 302 that is far away from it. An adjustment component 305 is provided in the middle of the locking frame 302. A fixing component 306 is provided on the right side of the support plate 207.

[0034] Specifically, the support mechanism 3 includes an electrostatic suction cup 301, the bottom of which is placed on top of the support plate 207. The top of the support plate 207 has a sliding groove on which two locking brackets 302 are slidably connected. These two locking brackets 302 can slide to facilitate adjustment of their position according to actual needs. A long column 303 is slidably connected to the left side of the locking bracket 302. The outer wall of the long column 303 is connected to two fastening bolts 304 by threaded engagement. When the fastening bolts 304 are rotated, their position on the long column 303 can be controlled. The adjacent side of the fastening bolt 304 is tightly fitted with the side of the locking bracket 302 that is far away. This fitting method can effectively prevent the locking bracket 302 from shaking during use, ensuring the stability and reliability of the structure.

[0035] Please see the appendix Figure 2 - Appendix Figure 4 The fixing component 306 includes a connecting frame 3061. The left side of the connecting frame 3061 is fixedly connected to the right side of the support plate 207. Two fixing blocks 3062 are fixedly connected to the right side of the connecting frame 3061. L-shaped blocks 3063 are slidably connected to the top of each fixing block 3062. Multiple holes 3064 are opened on the right side of the support frame 4. The left side of the L-shaped blocks 3063 engages with the inner wall of the corresponding holes 3064. The power component 208 includes a telescopic rod 2081. The rear side of the telescopic rod 2081 is rotatably connected to the adjacent fixing block 201. The other end of the telescopic rod 2081 is fixedly connected to a sliding rod 2082. The front and rear sides of the sliding rod 2082 are slidably connected to the adjacent fixing plate 202. The adjacent fixing plate 205 is slidably connected to the sliding rod 2083.

[0036] Specifically, the fixing component 306 consists of a connecting frame 3061. The left side of this connecting frame 3061 is fixedly connected to the right side of the support plate 207, ensuring the stability and robustness of the entire structure. Two fixing blocks 3062 are fixedly connected to the right side of the connecting frame 3061. L-shaped blocks 3063 are slidably connected to the top of these fixing blocks 3062, which can engage with the inner wall of the hole 3064 opened on the right side of the support frame 4, thereby meeting different usage requirements. The rear side of the telescopic rod 2081 is connected to the fixing block 201. The adjacent parts are connected by a rotating connection, allowing the telescopic rod 2081 to be adjusted as needed. A slide rod 2082 is fixedly connected to the other end of the telescopic rod 2081. The front and rear sides of the slide rod 2082 are connected to the adjacent parts of the fixing plate 202 by a sliding connection, allowing the slide rod 2082 to move as needed. In addition, the adjacent parts of the fixing plate 205 are also tightly connected to the slide rod 2083 by a sliding connection, further enhancing the flexibility and adjustability of the entire structure.

[0037] Please see the appendix Figure 3 - Appendix Figure 5 The adjustment component 305 includes two adjustment plates 3051. The outer wall of the adjustment plate 3051 is slidably connected to the middle of the locking frame 302. The top of each adjustment plate 3051 is slidably connected to two positioning posts 3052. The top of the support plate 207 is provided with multiple positioning holes 3053. The bottom of the positioning posts 3052 is engaged with the inner wall of the corresponding positioning holes 3053. The stabilizing component 209 includes a first support rod 2091. The front and rear sides of the first support rod 2091 are fixedly connected between adjacent long plates 203. The second support rod 2092 is fixedly connected between adjacent long plates 204.

[0038] Specifically, the outer wall of the adjusting plate 3051 is slidably connected to the middle of the locking frame 302, allowing the adjusting plate 3051 to move freely within a certain range to meet different adjustment needs. Two positioning posts 3052 are provided at the top of each adjusting plate 3051. These positioning posts 3052 are tightly connected to the adjusting plate 3051 through a slidable connection, ensuring the stability and accuracy of the adjustment process. Multiple positioning holes 3053 are opened at the top of the support plate 207, and the bottom of these positioning posts 3052 engages with the inner wall of the corresponding positioning hole 3053. The adjustment plate 3051 is effectively prevented from shifting during the adjustment process, thereby further improving the stability and reliability of the entire adjustment assembly 305. The stabilizing assembly 209 consists of support rod 1 2091 and support rod 2092. The front and rear sides of support rod 1 2091 are fixedly connected to the adjacent positions of long plate 1 203, ensuring the stability of support rod 1 2091 on long plate 1 203. At the same time, support rod 2092 is fixedly connected to the adjacent position of long plate 204, so that the entire system can be more evenly stressed, thereby effectively improving the overall stability and durability.

[0039] Working principle: The telescopic rod 2081 pushes the slide rod 2082 to move left and right. This direct power transmission method reduces energy loss in the intermediate links and can quickly drive the long plate 203 to rotate. The quadrilateral structure formed by the long plate 203 and the long plate 204 utilizes the variability of the quadrilateral to make the telescopic action smoother, thereby achieving efficient lifting and lowering. Compared with a complex transmission structure, it makes the lifting process more direct and the response faster. It can quickly adapt to the immediate height requirements of different processes. The support rod 2091 provides additional support and constraint for the entire structure, achieving a stable lifting and lowering effect. At the same time, the L-shaped block 3063 can be engaged with the corresponding hole 3064 to achieve fixed support at the adjusted height, firmly fixing the mechanism at that height. It is not easily affected by external factors. Even when subjected to a certain external force impact, it can maintain a constant height, avoiding the impact on workpiece processing and transmission due to accidental height deviation, and providing a solid guarantee for the entire operation process.

[0040] The electrostatic chuck 301 is fixed by sliding the locking bracket 302, then the long column 303 is rotated to fix the locking bracket 302, and then the sliding adjustment plate 3051 is used to further fix the electrostatic chuck 301. Finally, the electrostatic chuck 301 is fixed by the engagement of the positioning column 3052 with the corresponding positioning hole 3053, thus preventing the electrostatic chuck 301 from moving during the lifting process. The chuck is fixed from multiple dimensions. This layered fixing method, compared with a single fixing structure, can fully cover the direction and angle of the chuck's movement, reduce the risk of movement, and ensure that the electrostatic chuck 301 always maintains a stable position during the lifting process. It avoids the chuck from moving during the lifting process, which could cause the workpiece to be deviated, or even cause workpiece damage and processing errors, thereby improving the reliability of the entire equipment and the yield of the products.

[0041] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A rapid lifting electrostatic chuck support mechanism, comprising a base plate (1), characterized in that: A support frame (4) is fixedly connected to the top right side of the base plate (1) near the edge. A lifting mechanism (2) is provided on the top of the base plate (1). The lifting mechanism (2) is used to lift the electrostatic chuck. A support mechanism (3) is provided on the left side of the support frame (4). The support mechanism (3) is used to fix the electrostatic chuck. The lifting mechanism (2) includes two fixed blocks (201). The bottom of each fixed block (201) is fixedly connected to the top right side of the base plate (1). The top left side of the base plate (1) is fixedly connected to two fixed plates (202). The top of each fixed block (201) and fixed plate (202) is rotatably connected to a long plate (203). The top of each long plate (203) is rotatably connected to a long plate (204). The top of the left long plate (204) is rotatably connected to a fixed plate (205). The top of the right long plate (204) is rotatably connected to a fixed block (206). The top of the fixed block (206) is fixedly connected to a support plate (207). A power component (208) is provided between adjacent fixed plates (202). A stabilizing component (209) is provided between adjacent long plates (204).

2. The electrostatic chuck support mechanism for rapid lifting and lowering according to claim 1, characterized in that: The support mechanism (3) includes an electrostatic suction cup (301), the bottom of which is mounted on the top of a support plate (207). Two locking brackets (302) are slidably connected to the top of the support plate (207). A long column (303) is slidably connected to the left side of the locking bracket (302). Two fastening bolts (304) are threadedly connected to the outer wall of the long column (303). The adjacent side of the fastening bolt (304) is attached to the side of the locking bracket (302) that is far away from it. An adjustment component (305) is provided in the middle of the locking bracket (302). A fixing component (306) is provided on the right side of the support plate (207).

3. The electrostatic chuck support mechanism for rapid lifting and lowering according to claim 1, characterized in that: The power assembly (208) includes a telescopic rod (2081), the rear side of which is rotatably connected to the adjacent fixed block (201), the other end of which is fixedly connected to a slide rod (2082), the front and rear sides of which are slidably connected to the adjacent fixed plate (202), and the adjacent fixed plate (205) is slidably connected to a slide rod (2083).

4. The electrostatic chuck support mechanism for rapid lifting and lowering according to claim 1, characterized in that: The stabilizing component (209) includes a support rod (2091), the front and rear sides of which are fixedly connected to adjacent long plates (203), and a support rod (2092) is fixedly connected to adjacent long plates (204).

5. The electrostatic chuck support mechanism for rapid lifting and lowering according to claim 2, characterized in that: The adjustment assembly (305) includes two adjustment plates (3051), the outer wall of the adjustment plate (3051) is slidably connected to the middle of the locking frame (302), and the top of each adjustment plate (3051) is slidably connected to two positioning posts (3052).

6. The electrostatic chuck support mechanism for rapid lifting and lowering according to claim 5, characterized in that: The top of the support plate (207) is provided with a plurality of positioning holes (3053), and the bottom of the positioning post (3052) engages with the inner wall of the corresponding positioning hole (3053).

7. The electrostatic chuck support mechanism for rapid lifting and lowering according to claim 2, characterized in that: The fixing component (306) includes a connecting frame (3061), the left side of which is fixedly connected to the right side of the support plate (207), and two fixing blocks (3062) are fixedly connected to the right side of the connecting frame (3061).

8. The electrostatic chuck support mechanism for rapid lifting and lowering according to claim 7, characterized in that: The top of each of the fixed blocks (3062) is slidably connected to an L-shaped block (3063), and the right side of the support frame (4) is provided with multiple holes (3064). The left side of the L-shaped block (3063) engages with the inner wall of the corresponding hole (3064).

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