Lifting mechanism and vacuum coating equipment

Abstract

The utility model discloses a kind of lifting mechanism and vacuum coating equipment, lifting mechanism includes: cavity;Support part, support part is set in cavity, support part is provided with multiple support rods;Support part, support part is set in cavity, the upper end of support part defines out supporting surface;Among them, support part and support part can be relatively moved along vertical direction, so that lifting mechanism switches between first state and second state, in first state, the top of multiple support rods is higher than supporting surface, to support substrate, in second state, multiple support rods are lower than supporting surface, so that supporting surface supports substrate.The utility model is by being provided with the support part and support part that can be relatively moved vertically, so when taking and placing substrate, the top of multiple support rods can be higher than supporting surface by allowing support part and support part to be relatively moved vertically, so as to avoid manipulator, provide the space of insertion for manipulator, facilitate manipulator to take and place substrate.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a lifting mechanism and a vacuum coating equipment. Background Technology

[0002] Vacuum coating equipment for semiconductors, photovoltaics, and other applications integrates multiple chambers within its system. Before entering the process chamber, the substrate needs to be heated to remove moisture. However, if the substrate is directly introduced into the process chamber after heating, the working pressure of the process chamber cannot be reached quickly enough, affecting the process and the equipment's cycle time. Therefore, the newly heated substrate needs to be transferred to a transition chamber for cooling before being transferred to the process chamber. However, in existing structural designs, the handling of the substrate by a robotic arm is inconvenient when the substrate is being cooled in the transition chamber. Utility Model Content

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention proposes a lifting mechanism to facilitate the picking and placing of substrates by a robotic arm.

[0004] This utility model also proposes a vacuum coating equipment including the above-mentioned lifting mechanism.

[0005] The lifting mechanism according to a first aspect embodiment of the present invention includes:

[0006] cavity;

[0007] A support portion is disposed within the cavity, and the support portion is provided with multiple support rods;

[0008] A support portion is disposed within the cavity, and the upper end of the support portion defines a support surface;

[0009] The supporting part and the supporting part can move relative to each other in the vertical direction, so that the lifting mechanism can switch between a first state and a second state. In the first state, the tops of the plurality of supporting rods are higher than the supporting surface to support the substrate. In the second state, the plurality of supporting rods are lower than the supporting surface, so that the supporting surface supports the substrate.

[0010] The lifting mechanism according to the embodiments of this utility model has at least the following beneficial effects:

[0011] By setting up a support and a backing that can move vertically relative to each other, when picking up or placing a substrate, the support and the backing can be moved vertically relative to each other so that the tops of the multiple support rods are higher than the support surface, thereby avoiding the robot arm and providing space for the robot arm to insert, making it convenient for the robot arm to pick up or place the substrate.

[0012] According to some embodiments of the present invention, the lifting mechanism further includes:

[0013] A cooling assembly includes a cooling pipe, a medium input pipe, and a medium output pipe. The cooling pipes are evenly distributed on the lower surface of the support portion. The medium input pipe is connected to one end of the cooling pipe and is used to input cooling medium into the cooling pipe. The medium output pipe is connected to the other end of the cooling pipe and is used to output the cooling medium from the cooling pipe.

[0014] According to some embodiments of the present invention, the lower surface of the support portion is provided with a mounting groove, and the cooling pipe is at least partially embedded in the mounting groove.

[0015] According to some embodiments of the present invention, along the length of the mounting groove, the supporting part is provided with a plurality of locking structures for locking the cooling pipe in the mounting groove.

[0016] According to some embodiments of the present invention, two support portions are provided vertically at intervals, and the two support portions are fixedly connected by a connecting portion.

[0017] According to some embodiments of the present invention, the lifting mechanism further includes:

[0018] A detection device is used to detect whether a substrate is supported on the support surface of the support portion located on the lower side.

[0019] According to some embodiments of the present invention, the support portion is fixed within the cavity, and the lifting mechanism further includes:

[0020] A driving device is disposed in the cavity and is connected to the support part for driving the support part to move vertically.

[0021] According to some embodiments of the present invention, a conveying port is provided on the side wall of the cavity, and the projection of the top ends of the plurality of support rods is located within the projection range of the conveying port along the extending direction of the conveying port.

[0022] According to some embodiments of the present invention, the supporting part is provided with a plurality of limiting blocks on the supporting surface, and the plurality of limiting blocks are used to horizontally position the substrate supported on the supporting surface.

[0023] The vacuum coating equipment according to a second aspect of the present invention includes a lifting mechanism according to any of the above embodiments.

[0024] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0025] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0026] Figure 1 This is a schematic diagram of the lifting mechanism in the first position of the first state according to an embodiment of the present utility model;

[0027] Figure 2 This is a schematic diagram of the lifting mechanism in the second position of the first state according to an embodiment of the present invention;

[0028] Figure 3 yes Figure 1 Enlarged view of point D;

[0029] Figure 4 yes Figure 1 Schematic diagram of the cross section along the AA direction;

[0030] Figure 5 yes Figure 1 Schematic diagram of the cross section along the BB direction;

[0031] Figure 6 yes Figure 1 Schematic diagram of the cross section along the CC direction;

[0032] Figure 7 This is a schematic diagram of the connection structure between the cooling component and the support portion in an embodiment of this utility model.

[0033] Icon labels:

[0034] Cavity 100, conveying port 101, through port 102;

[0035] Support part 200, support rod 210, base 220;

[0036] Support part 300, support surface 301, clearance hole 302, mounting groove 303, tray 310, positioning screw 320, connecting part 330, reflector 340, central tube 350, limiting block 360;

[0037] substrate 400;

[0038] Cooling assembly 500, cooling pipe 510, medium inlet pipe 520, medium outlet pipe 530, center plate 540;

[0039] Photoelectric sensor 600;

[0040] Drive unit 700;

[0041] 800 bellows. Detailed Implementation

[0042] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0043] In the description of this utility model, it should be understood that the orientation descriptions, such as up, down, etc., are based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0044] In the description of this utility model, "multiple" refers to two or more. The use of "first" and "second" is for distinguishing technical features only and should not be construed as indicating or implying relative importance, or implicitly indicating the number of technical features or their sequential relationship.

[0045] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.

[0046] Vacuum coating equipment for semiconductors, photovoltaics, and other applications integrates multiple chambers within its system. Before entering the process chamber, the substrate needs to be heated to remove moisture. However, if the substrate is directly introduced into the process chamber after heating, the working pressure of the process chamber cannot be reached quickly enough, affecting the process and the equipment's cycle time. Therefore, the newly heated substrate needs to be transferred to a transition chamber for cooling before being transferred to the process chamber. However, in the existing structural design, there is a problem with the robotic arm's handling of the substrate during cooling in the transition chamber. Furthermore, it should be noted that the robotic arm lifts the substrate for transport; it cannot clamp the substrate.

[0047] Therefore, this utility model proposes a lifting mechanism and a vacuum coating equipment, which can effectively improve the above-mentioned problems.

[0048] The lifting mechanism and vacuum coating equipment according to embodiments of the present invention are described below with reference to the accompanying drawings.

[0049] Reference Figure 1 and Figure 3 As shown, a lifting mechanism according to an embodiment of the present invention includes: a cavity 100, a support 200, and a bearing 300.

[0050] Cavity 100 is a vacuum chamber and requires vacuuming to ensure that the interior of cavity 100 is a vacuum environment.

[0051] The support part 200 is disposed inside the cavity 100, and the support part 200 is provided with a plurality of support rods 210 at intervals, the support rods 210 extending vertically.

[0052] The support portion 300 is disposed within the cavity 100, and the upper end of the support portion 300 defines the support surface 301.

[0053] The supporting part 300 and the supporting part 200 can move relative to each other in the vertical direction, so that the lifting mechanism can switch between the first state and the second state. In the first state, the top of the multiple support rods 210 is higher than the supporting surface 301 to support the substrate 400. In the second state, the multiple support rods 210 are lower than the supporting surface 301, so that the supporting surface 301 supports the substrate 400.

[0054] In this embodiment, when the substrate 400 needs to be transferred to the cavity 100 for cooling, the lifting mechanism is adjusted to the first state, so that the tops of the multiple support rods 210 are higher than the support surface 301. Since the tops of the multiple support rods 210 are higher than the support surface 301, it provides space for the robot arm to move. At this time, the robot arm can transfer the substrate 400 into the cavity 100 and place the substrate 400 on the multiple support rods 210, which support the substrate 400. After the substrate 400 is placed stably, the robot arm retracts, and then the lifting mechanism is adjusted to the second state, so that... Multiple support rods 210 are lower than the support surface 301, which supports the substrate 400, allowing the substrate 400 to be cooled. When the substrate 400 needs to be removed after cooling, the robot cannot lift the substrate 400 for transfer because the substrate 400 is supported on the support surface 301. Therefore, the lifting mechanism is adjusted to the first state, so that the tops of the multiple support rods 210 are higher than the support surface 301, allowing the substrate 400 to detach from the support surface 301 and leaving space for the robot to insert. Then the robot can move to the underside of the substrate 400 to remove the substrate 400.

[0055] In this embodiment, the lifting mechanism is provided with a support portion 300 and a support portion 200 that can move vertically relative to each other. When picking up or placing the substrate 400, the support portion 300 and the support portion 200 can be moved vertically relative to each other so that the top of the multiple support rods 210 is higher than the support surface 301, thereby avoiding the robot arm and providing space for the robot arm to insert, which facilitates the robot arm to pick up or place the substrate 400.

[0056] It is understood that in some embodiments of this utility model, to ensure the stability of the substrate 400, the tops of the multiple support rods 210 are at the same height, and the supporting surface 301 is a horizontal plane, with an area larger than that of the substrate 400; for example... Figure 3 As shown, in order to avoid the support rod 210, the supporting surface 301 is provided with a clearance hole 302 for the support rod 210 to pass through, and the clearance hole 302 corresponds one-to-one with the support rod 210.

[0057] In some specific embodiments, refer to Figure 1 and Figure 3 As shown, the support part is also provided with a base 220, and the support rod 210 is a pin and is fixed on the base 220.

[0058] In some specific embodiments, the support portion 300 is configured as a disc shape and is made of aluminum.

[0059] Reference Figure 1 , Figure 3 , Figure 4 and Figure 7 As shown, in some embodiments of this utility model, the lifting mechanism further includes a cooling assembly 500. The cooling assembly 500 includes a cooling pipe 510, a medium input pipe 520, and a medium output pipe 530. The cooling pipes 510 are evenly distributed on the lower surface of the support portion 300. The medium input pipe 520 is connected to one end of the cooling pipe 510 and is used to input cooling medium into the cooling pipe 510. The medium output pipe 530 is connected to the other end of the cooling pipe 510 and is used to output the cooling medium in the cooling pipe 510.

[0060] In this embodiment, cooling medium is introduced into cooling pipe 510 through medium input pipe 520 and then output from medium output pipe 530. The flow of cooling medium carries away the heat of support portion 300, thereby carrying away the heat of substrate 400 supported on support portion 300, so as to cool substrate 400. The cooling effect is good and the cooling efficiency is high. In addition, since cooling pipes 510 are evenly distributed on the lower surface of support portion 300, substrate 400 can be cooled evenly.

[0061] It is conceivable that the cooling medium can be water or water mixed with coolant, or of course, it can be a gas that has undergone refrigeration.

[0062] It is understood that in some embodiments of this utility model, the cooling assembly 500 further includes a circulation conveying assembly (not shown in the figure). The circulation conveying assembly is connected to the medium input pipe 520 and the medium output pipe 530 to circulate and convey the cooling medium into the cooling pipe 510 through the medium input pipe 520 and the medium output pipe 530. The circulation conveying assembly includes a cooling source, a pump, and input and output pipes. This is a conventional technical means, so it will not be described in detail here.

[0063] It is understood that, in some embodiments of this utility model, reference is made to... Figure 1 , Figure 3 and Figure 7 As shown, the cooling assembly 500 also includes a central disk 540, which is installed at the center of the lower end of the support portion 300. The central disk 540 is provided with an input channel and an output channel. The two ends of the cooling pipe 510 are connected to the input channel and the output channel, respectively. The medium input pipe 520 is connected to the end of the input channel away from the cooling pipe 510, and the medium output pipe 530 is connected to the end of the output channel away from the cooling pipe 510. There are two cooling pipes 510, which are evenly distributed on opposite sides of the central disk 540. The medium input pipe 520 and the medium output pipe 530 are both located on the lower side of the central disk 540.

[0064] Obviously, the medium input pipe 520, the medium output pipe 530, and the cooling pipe 510 can all be fixedly connected to the central plate 540 by welding.

[0065] It is understood that, in some embodiments of this utility model, reference is made to... Figure 3 and Figure 7 As shown, in order to install and fix the center plate 540, the lower end of the support part 300 is also connected to the tray 310 by fasteners such as screws. The tray 310 is provided with a T-shaped fixing groove that runs through the tray 310 and is larger at the top and smaller at the bottom. The longitudinal section of the center plate 540 is also T-shaped, with a larger top and a smaller bottom. The center plate 540 is embedded in the fixing groove, thereby fixing the center plate 540 to the support part 300 through the tray 310.

[0066] It is understood that, in some embodiments of this utility model, reference is made to... Figure 4 and Figure 7 As shown, the lower surface of the support portion 300 is provided with a mounting groove 303. The cooling pipe 510 is at least partially embedded in the mounting groove 303 and fits against the inner wall of the mounting groove 303, thereby making the connection between the cooling pipe 510 and the support portion 300 tighter and improving the cooling effect.

[0067] Reference Figure 4 and Figure 7 As shown, in some embodiments of this utility model, along the length of the mounting groove 303, the support part 300 is provided with multiple locking structures. The locking structures are used to lock the cooling pipe 510 in the mounting groove 303. By providing multiple locking structures, a stable connection between the cooling pipe 510 and the support part 300 is ensured.

[0068] It is conceivable that the locking structure can be a pipe clamp or other forms. For example, in some embodiments of this utility model, refer to... Figure 7As shown, the locking structure is set as a positioning screw 320. The support part 300 is provided with a corresponding threaded hole for installing the positioning screw 320. The head of the positioning screw 320 abuts against the pipe wall of the cooling pipe 510 on the side away from the mounting groove 303, thereby locking the cooling pipe 510 in the mounting groove 303. The structure is simple and easy to disassemble and assemble.

[0069] It is conceivable that the number of support units 300 could be one or more.

[0070] For example, in some embodiments of this utility model, reference is made to Figure 1 and Figure 2 As shown, two support portions 300 are vertically spaced apart, and the two support portions 300 are fixedly connected by a connecting portion 330; by providing two support portions 300, two substrates 400 can be supported.

[0071] It is conceivable that the connecting part 330 can be a rod-shaped structure or a block-shaped structure, and the connecting part 330 can be connected to the supporting part 300 by means of welding or fastener connection.

[0072] It should be noted that when two support portions 300 are provided, the mounting groove 303 is provided on the support portion 300 located on the lower side, and the cooling pipe 510 and the central disk 540 of the cooling assembly 500 are both installed on the support portion 300 located on the lower side. The cooling assembly 500 is used to cool the support portion 300 located on the lower side, thereby cooling the substrate 400 on the support portion 300 located on the lower side.

[0073] It is understood that the lifting mechanism in this embodiment is applied in a vacuum coating equipment. Vacuum coating equipment often has cycle time requirements, and the process of transferring the substrate 400 to the process chamber for processing takes a certain amount of time. In order to avoid affecting the cycle time of the equipment, this embodiment provides two support parts 300. The support part 300 located on the lower side is used to support the substrate 400 that needs to be cooled, while the support part 300 located on the upper side can be used to support the substrate 400 that no longer needs to be cooled. The main function of the support part 300 located on the upper side is to temporarily place the substrate 400 as a transfer station. The robot can place the substrate 400 on the support part 300 located on the upper side and remove the substrate 400 for processing according to the cycle time requirements of the equipment.

[0074] It should be noted that when two support parts 300 are provided, the first state of the lifting mechanism includes two positions: a first position and a second position. In the first position of the first state, the tops of the multiple support rods 210 are located between the two support parts 300 (e.g., Figure 1 As shown), in the second position of the first state, the tops of the multiple support rods 210 are higher than the support surface 301 of the upper support portion 300 (as shown). Figure 2As shown), the second state of the lifting mechanism may include only one position, in which the plurality of support rods 210 are lower than the support surface 301 of the support portion 300 located on the lower side.

[0075] Based on the above embodiments, the process of placing the substrate 400 on the lower support portion 300 and removing the substrate 400 is as follows: First, adjust the lifting mechanism to the first position in the first state, then use a robotic arm to transfer the substrate 400 to multiple support rods 210. After the substrate 400 is placed stably, the robotic arm retracts. Then, adjust the lifting mechanism to the second state so that the substrate 400 is supported on the support surface 301 of the lower support portion 300. When removing the substrate 400 from the lower support portion 300, reverse the operation. The process of placing the substrate 400 on the upper support portion 300 and removing the substrate 400 is as follows: First, adjust the lifting mechanism to the second position in the first state, and then use a robot to transfer the substrate 400 to multiple support rods 210. After the substrate 400 is placed stably, the robot withdraws, and then adjust the lifting mechanism to the second state so that the substrate 400 is supported on the support surface 301 of the upper support portion 300. When removing the substrate 400 from the upper support portion 300, the operation is reversed.

[0076] It should be noted that when the substrate 400 is supported on the lower support portion 300, the substrate 400 should not be removed or placed on the upper support portion 300, so as to avoid damaging the substrate 400 on the lower support portion 300.

[0077] Based on this, in some embodiments of the present invention, the lifting mechanism further includes a detection device. The detection device is used to detect whether the substrate 400 is supported on the support surface 301 of the support portion 300 located on the lower side. Thus, before the lifting mechanism switches from the second state to the second position of the first state, the detection device can detect whether the substrate 400 is supported on the support surface 301 of the support portion 300 located on the lower side. Only when the substrate 400 is not present on the support surface 301 of the support portion 300 located on the lower side can the lifting mechanism switch from the second state to the second position of the first state, thereby avoiding damage to the substrate 400 and increasing safety.

[0078] It is conceivable that the detection device can take many forms, such as ultrasonic detection, photoelectric detection, and visual detection, etc.

[0079] In some embodiments of this utility model, reference is made to Figure 1 , Figure 5 and Figure 6As shown, the detection device includes a photoelectric sensor 600, which is fixed to the bottom of the outer side of the cavity 100 by a mounting bracket. The bottom wall of the cavity 100 is provided with a light-transmitting hole corresponding to the photoelectric sensor 600. A light-transmitting photoelectric glass is pressed onto the outside of this hole and sealed to ensure the vacuum level inside the cavity 100. Furthermore, a reflector 340 is installed on the lower surface of the upper support 300 directly above the photoelectric sensor 600, and a light-transmitting hole is provided on the lower support 300 directly below the reflector 340. The photoelectric sensor 600 can emit a detection signal to the reflector 340 and receive the detection signal reflected by the reflector 340. The photoelectric sensor 600 and the reflector 340 cooperate to detect whether the substrate 400 is on the lower support 300, which plays a safety role.

[0080] It is conceivable that multiple detection devices can be set up to improve detection accuracy.

[0081] It should be noted that the above-mentioned detection device has a common structure in the prior art, so it will not be described in detail here.

[0082] Reference Figures 1 to 3 As shown, in some embodiments of this utility model, the support part 200 is fixed inside the cavity 100, and the lifting mechanism also includes a driving device 700. The driving device 700 is disposed in the cavity 100 and is connected to the support part 300 in a transmission manner. The driving device 700 is used to drive the support part 300 to move vertically. That is, the relative vertical movement between the support part 200 and the support part 300 is achieved by the vertical movement of the support part 300. In other words, the switching of the lifting mechanism between the first state and the second state is achieved by the driving device 700 driving the support part 300 to move vertically.

[0083] The advantage of this arrangement is that, since the support part 200 is fixed, the top position of the support rod 210 is also fixed. Therefore, the robot can operate from a fixed position when picking up or placing the substrate 400. Furthermore, the drive device 700 does not require excessively high precision when driving the support part 300 to move vertically, simplifying operation. Especially when two support parts 300 are provided, since the top position of the support rod 210 is fixed, the robot can operate from a fixed position regardless of which support part 300 is used to pick up or place the substrate 400.

[0084] Furthermore, refer to Figure 1 As shown, a conveying port 101 is provided on the side wall of the cavity 100. Along the extending direction of the conveying port 101, the projection of the top ends of the multiple support rods 210 is located within the projection range of the conveying port 101. This facilitates the robot arm to enter and exit the cavity 100 and perform the picking and placing operations of the substrate 400.

[0085] It is understood that, since the cavity 100 in this embodiment is a vacuum cavity 100, the drive device 700 is disposed outside the cavity 100 in order to ensure stable and reliable operation of the drive device 700. Specifically, refer to... Figures 1 to 3 As shown, a through-hole 102 is provided on the bottom wall of the cavity 100. A vertically extending central pipe 350 (with flanges at both ends) is connected to the bottom of the tray 310 via fasteners. The central pipe 350 passes through the through-hole 102 and extends to the outside of the cavity 100. The portion of the central pipe 350 extending to the outside of the cavity 100 is connected to the output end of the drive device 700. The drive device 700 drives the support part 300 to move vertically by driving the central pipe 350 to move vertically. In addition, the medium input pipe 520 and the medium output pipe 530 of the cooling assembly 500 both pass through the inside of the central pipe 350 and extend to the lower side of the central pipe 350, thereby connecting to the circulation conveying assembly.

[0086] Obviously, since the central tube 350 passes through the through-hole 102 and needs to move vertically, a static sealing structure such as a sealing ring cannot be used to seal the central tube 350 and the through-hole 102. Therefore, in this embodiment, a bellows 800 is installed on the outside of the cavity 100 at the position corresponding to the through-hole 102. The bottom end of the bellows 800 is connected to the connecting flange at the lower end of the central tube 350 to prevent external air from entering the cavity 100.

[0087] It should be noted that the bellows 800 is a standard feature in the vacuum coating field, and therefore will not be described in detail here. In addition to the bellows 800, all gaps between the cavity 100 and the external environment must be sealed. For example, O-rings are installed between the tray 310 and the central plate 540, between the tray 310 and the flange at the upper end of the central tube 350, between the bottom end of the bellows 800 and the flange at the lower end of the central tube 350, and between the top end of the bellows 800 and the cavity 100. It should be noted that sealing structures are very common in the vacuum coating field, and this embodiment does not make any improvements to them, therefore, they will not be described in detail.

[0088] It is conceivable that the drive unit 700 can take many forms, such as hydraulic units, pneumatic units, or, for example, ... Figure 1 and Figure 2 As shown, the drive unit 700 adopts a motor-screw mechanism. The above-mentioned drive methods are all conventional technologies, and therefore will not be described in detail here.

[0089] Reference Figures 1 to 3As shown, in some embodiments of this utility model, the support portion 300 is provided with a plurality of limiting blocks 360 on the support surface 301. The plurality of limiting blocks 360 are used to horizontally position and support the substrate 400 on the support surface 301, so that the substrate 400 can be stably placed on the support surface 301. The plurality of limiting blocks 360 are divided into four groups, corresponding to the four sides of the substrate 400 respectively. The number of limiting blocks 360 in each group can be one or more. In addition, the limiting blocks 360 can be fixed to the support portion 300 by fasteners.

[0090] This utility model also proposes a vacuum coating equipment. The vacuum coating equipment of this embodiment includes the lifting mechanism of any of the above embodiments. Thanks to the improvement of the lifting mechanism, the vacuum coating equipment of this embodiment has the same technical effect as the lifting mechanism, which will not be described in detail here.

[0091] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. In addition, those skilled in the art can combine different embodiments or examples described in this specification.

[0092] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.

Claims

1. A lifting mechanism, characterized in that, include: cavity; A support portion is disposed within the cavity, and the support portion is provided with multiple support rods; A support portion is disposed within the cavity, and the upper end of the support portion defines a support surface; The supporting part and the supporting part can move relative to each other in the vertical direction, so that the lifting mechanism can switch between a first state and a second state. In the first state, the tops of the plurality of supporting rods are higher than the supporting surface to support the substrate. In the second state, the plurality of supporting rods are lower than the supporting surface, so that the supporting surface supports the substrate.

2. The lifting mechanism according to claim 1, characterized in that, The lifting mechanism also includes: A cooling assembly includes a cooling pipe, a medium input pipe, and a medium output pipe. The cooling pipes are evenly distributed on the lower surface of the support portion. The medium input pipe is connected to one end of the cooling pipe and is used to input cooling medium into the cooling pipe. The medium output pipe is connected to the other end of the cooling pipe and is used to output the cooling medium from the cooling pipe.

3. The lifting mechanism according to claim 2, characterized in that, The lower surface of the support is provided with a mounting groove, and the cooling pipe is at least partially embedded in the mounting groove.

4. The lifting mechanism according to claim 3, characterized in that, Along the length of the mounting groove, the support portion is provided with multiple locking structures for locking the cooling pipe into the mounting groove.

5. The lifting mechanism according to claim 1, characterized in that, The support portion is provided in two vertically spaced parts, and the two support portions are fixedly connected by a connecting portion.

6. The lifting mechanism according to claim 5, characterized in that, The lifting mechanism also includes: A detection device is used to detect whether a substrate is supported on the support surface of the support portion located on the lower side.

7. The lifting mechanism according to claim 1, characterized in that, The support portion is fixed within the cavity, and the lifting mechanism further includes: A driving device is disposed in the cavity and is connected to the support part for driving the support part to move vertically.

8. The lifting mechanism according to claim 7, characterized in that, A conveying port is provided on the side wall of the cavity, and the projection of the top ends of the plurality of support rods is located within the projection range of the conveying port along the extension direction of the conveying port.

9. The lifting mechanism according to claim 1, characterized in that, The supporting part is provided with a plurality of limiting blocks on the supporting surface, and the plurality of limiting blocks are used to horizontally position the substrate supported on the supporting surface.

10. A vacuum coating apparatus, characterized in that, include: The lifting mechanism according to any one of claims 1 to 9.

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