A cage fixing structure and a sputtering coating equipment

By adopting a design with detachable side plates and adjustable fixing blocks in the cage frame fixing structure, the problems of inaccurate side plate curvature and inability to adjust diameter are solved, achieving more efficient structural adjustment and stability.

CN224362843UActive Publication Date: 2026-06-16SHANGHAI HANA MECHANICAL & ELECTRICAL EQUIPMENT CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SHANGHAI HANA MECHANICAL & ELECTRICAL EQUIPMENT CO LTD
Filing Date
2025-06-25
Publication Date
2026-06-16

AI Technical Summary

Technical Problem

The existing cage fixing method results in inaccurate side plate curvature, complicated operation, and the diameter of the cylindrical enclosure structure cannot be flexibly adjusted, making it difficult to meet the needs of different customers.

Method used

The detachable side plates are fixed to the outer circumference of the annular bearing section. By adjusting the position of the fixing blocks on the top and bottom plates, the outer diameter of the annular bearing section can be changed, thus achieving flexible adjustment of the cylindrical enclosure structure.

Benefits of technology

It improves the accuracy of the side panel curvature and the regularity of the cylindrical enclosure structure, simplifies the operation, enhances the stability and adaptability of the structure, and reduces the difficulty and cost of adjustment.

✦ Generated by Eureka AI based on patent content.

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  • Figure CN224362843U_ABST
    Figure CN224362843U_ABST
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Abstract

The application relates to the field of sputtering film coating, and provides a cage fixing structure and a sputtering film coating device. The cage fixing structure comprises a top plate, a bottom plate, a plurality of side plates and a plurality of fixing blocks. The fixing blocks are respectively installed on the bottom of the top plate and the top of the bottom plate in a manner that can be adjusted, and form an expandable annular bearing part. The side plates are detachably fixed to the outer circumferential surface of the annular bearing part to construct a cylindrical enclosure structure. The outer diameter of the annular bearing part is synchronously adjusted by adjusting the position of the fixing block on the corresponding mounting surface along the radial direction, and then the containing diameter of the cylindrical enclosure structure is changed. The sputtering film coating device comprises the cage fixing structure. Each side plate of the application is detachably fixed to the outer circumferential surface of the annular bearing part, so that the circular arc of each side plate is more accurate, and the roundness of the whole cylindrical enclosure structure is more regular. The mounting position of the fixing block is adjusted along the radial direction, the outer diameter of the annular bearing part is synchronously changed, and then the containing diameter of the cylindrical enclosure structure can be flexibly adjusted.
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