A silicon wafer cutting coolant purity detection sampling device

Abstract

The utility model relates to the technical field of silicon wafer cutting coolant, and disclose a kind of silicon wafer cutting coolant purity detection sampling device, comprising: sampling cylinder, piston head is slidably arranged in the sampling cylinder, piston rod is fixedly installed in the side of piston head, and still be provided with limiting assembly and dismounting assembly on sampling cylinder;The limiting assembly includes vertical rod.The silicon wafer cutting coolant purity detection sampling device, by setting limiting assembly in the tail end of sampling cylinder, by screwing screw rod, to limit the sliding range of piston rod and piston head, so as to limit the amount of sampling cylinder extraction silicon wafer cutting coolant, guarantee the quality consistency of multiple sampling, to ensure the accuracy of multiple purity detection result comparison, vertical rod in limiting assembly can also give piston rod support effect, so that piston rod slides more stably, so that stress is uniform when sliding, avoid local pressure too large damage.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer cutting coolant technology, specifically a silicon wafer cutting coolant purity detection and sampling device. Background Technology

[0002] In the silicon wafer cutting process, silicon wafer cutting fluid is an essential auxiliary consumable product that can form a protective film on the silicon wafer surface, reduce cutting resistance, and ensure that the surface of the cut finished product is smooth.

[0003] To ensure the quality of silicon wafer cutting, the purity of the silicon wafer cutting coolant is sampled and tested. However, traditional sampling devices require manual measurement of the sample size, which inevitably introduces errors, especially for novice operators. This leads to inconsistent sample sizes from multiple samplings, affecting the accuracy of subsequent purity comparisons. To address these issues, we propose a silicon wafer cutting coolant purity testing sampling device. Utility Model Content

[0004] To address the shortcomings of existing technologies, this invention provides a sampling device for detecting the purity of silicon wafer cutting coolant, thus solving the problems mentioned in the background.

[0005] This utility model provides the following technical solution: a sampling device for detecting the purity of silicon wafer cutting coolant, comprising: a sampling cylinder, a piston head slidably disposed inside the sampling cylinder, a piston rod fixedly mounted on the side of the piston head, and a limiting component and a disassembly component also disposed on the sampling cylinder; the limiting component includes a vertical rod, a top seat and an insert block respectively fixedly mounted at both ends of the vertical rod, a baffle slidably disposed on the vertical rod, and the vertical rod is also slidably connected to the piston rod; a threaded sleeve is embedded inside the top seat, and a screw is threadedly connected to the top seat through the threaded sleeve; the screw is connected to... An expansion plate is fixedly installed at the adjacent ends of the baffle, and the insert can be inserted into the sampling cylinder; the disassembly assembly includes a cylinder body, an auxiliary bearing for realizing the rotational connection between the cylinder body and the sampling cylinder is provided on the inner side of the cylinder body, a retaining ring is fixedly installed on the side of the retaining ring, and a slide block is fixedly installed on the side of the retaining ring, and the slide block is located in the internal cavity of the sampling cylinder. An arc-shaped spring is also fixedly installed on the side of the slide block, and the end of the arc-shaped spring is also fixedly connected to the sampling cylinder. An arc-shaped guide rod is fixedly installed on the inner wall of the sampling cylinder, and the slide block is also slidably connected to the arc-shaped guide rod.

[0006] Preferably, the insert block has a notch, and the inner side of the retaining ring is fixedly provided with a protrusion that can cooperate with the notch.

[0007] Preferably, the sampling tube is designed with openings at both ends, with the first end used for sampling and the second end used for assembling the piston head.

[0008] Preferably, there are two uprights, both of which are located at the tail end of the sampling tube.

[0009] Preferably, the threaded sleeve is located at the center of the top seat, and the outer surface of the threaded sleeve is provided with a raised ring to improve the stability of the engagement.

[0010] Preferably, the baffle is located above the tail end of the piston rod, and the expansion plate is located above the baffle.

[0011] Preferably, the arc-shaped guide rod is located in the internal cavity of the arc-shaped spring, and the curvature of the arc-shaped guide rod is consistent with the curvature of the arc-shaped spring.

[0012] Preferably, the sampling tube is also provided with an observation window, and the observation window is made of transparent glass.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] 1. This silicon wafer cutting coolant purity testing and sampling device, by setting a limiting component at the tail end of the sampling cylinder, limits the sliding range of the piston rod and piston head by rotating the screw, thereby limiting the amount of silicon wafer cutting coolant extracted by the sampling cylinder, ensuring the consistency of quality of multiple samples, and ensuring the accuracy of comparison of multiple purity test results. At the same time, the upright rod in the limiting component can also provide support for the piston rod, making the piston rod slide more smoothly and the force distributed evenly during sliding, avoiding damage caused by excessive local pressure.

[0015] 2. This silicon wafer cutting coolant purity testing and sampling device, by setting up a disassembly and assembly component, allows for flexible adjustment of the connection state between the limiting component and the sampling cylinder. This facilitates users to quickly disassemble and assemble the entire limiting component, making it easier to clean the inner wall of the sampling cylinder and prevent residual liquid inside the sampling cylinder from affecting the test results of the silicon wafer cutting coolant sample. Furthermore, this makes the overall structural design more suitable for actual application scenarios. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0017] Figure 2 This is an exploded view of the structure of the limited-edition component of this utility model;

[0018] Figure 3 This is an exploded view of the cylindrical structure of this utility model;

[0019] Figure 4 This is a cross-sectional schematic diagram of the sampling cylinder structure of this utility model;

[0020] Figure 5 This is a schematic diagram of the arc-shaped guide rod structure of this utility model.

[0021] In the diagram: 1. Sampling cylinder; 2. Observation window; 3. Piston head; 4. Piston rod; 5. Limiting component; 51. Vertical rod; 52. Top seat; 53. Screw; 54. Threaded sleeve; 55. Expansion plate; 56. Baffle; 57. Insert block; 6. Assembly / disassembly component; 61. Cylinder body; 62. Auxiliary bearing; 63. Retaining ring; 64. Slide seat; 65. Arc spring; 66. Arc guide rod. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figure 1-5 A sampling device for detecting the purity of silicon wafer cutting coolant includes: a sampling cylinder 1, a piston head 3 slidably disposed inside the sampling cylinder 1, a piston rod 4 fixedly mounted on the side of the piston head 3, and a limiting component 5 and a disassembly component 6 on the sampling cylinder 1; an observation window 2 is also provided on the sampling cylinder 1, and the observation window 2 is made of transparent glass. The sampling cylinder 1 has an open design at both ends, with the first end used for sampling and the second end used for assembling the piston head 3, ensuring that the sampling cylinder 1 can meet the actual sampling requirements.

[0024] The limited component 5 includes a pole 51, with a top seat 52 and an insert 57 fixedly installed at both ends of the pole 51. A baffle 56 is slidably mounted on the pole 51, and the pole 51 is also slidably connected to the piston rod 4. A threaded sleeve 54 is embedded inside the top seat 52, and a screw 53 is threadedly connected to the top seat 52 through the threaded sleeve 54. An expansion plate 55 is fixedly installed at the end of the screw 53 adjacent to the baffle 56. The insert 57 can be inserted into the sampling cylinder 1. The baffle 56 is located above the tail end of the piston rod 4, and the expansion plate 55 is located above the baffle 56. The threaded sleeve 54 is located at the center of the top seat 52, so that after tightening the screw 53, the overall structure is subjected to more uniform force, thereby preventing damage from excessive local pressure. The outer surface of the threaded sleeve 54 is provided with a convex ring to improve the stability of the insertion. There are two poles 51, and both poles 51 are located at the tail end of the sampling cylinder 1.

[0025] The disassembly and assembly assembly 6 includes a cylinder 61. An auxiliary bearing 62 is provided on the inner side of the cylinder 61 to enable rotational connection between the cylinder 61 and the sampling cylinder 1. A retaining ring 63 is fixedly installed on the side of the cylinder 61, and a slide block 64 is fixedly installed on the side of the retaining ring 63, located within the internal cavity of the sampling cylinder 1. An arc-shaped spring 65 is also fixedly installed on the side of the slide block 64, with its end fixedly connected to the sampling cylinder 1. An arc-shaped guide rod 66 is fixedly installed on the inner wall of the sampling cylinder 1, and the slide block 64 is slidably connected to the arc-shaped guide rod 66. The arc-shaped guide rod 66 is located within the internal cavity of the arc-shaped spring 65, and its curvature matches that of the arc-shaped spring 65. A notch is provided on the insert block 57, and a protrusion that engages with the notch is fixedly provided on the inner side of the retaining ring 63, allowing for quick disassembly and assembly of the upright rod 51 and other structures by adjusting the state of the retaining ring 63, thus meeting the actual cleaning requirements of the sampling cylinder 1.

[0026] Working principle: The piston head 3 is fixed on the piston rod 4. Therefore, when the piston rod 4 is pulled, causing the piston head 3 to slide inside the sampling cylinder 1, the silicon wafer cutting coolant can be drawn into the sampling cylinder 1 through the opening at the front end of the sampling cylinder 1 to complete the sampling. The pull plate at the rear end of the piston rod 4 is slidably connected to the upright rod 51. Rotating the screw 53, which is threadedly connected to the threaded sleeve 54, limits the sliding range of the baffle 56 through the expansion plate 55. The baffle 56 further limits the sliding range of the piston rod 4, thereby limiting the amount of silicon wafer cutting coolant sampled by the sampling cylinder 1 in a single operation, ensuring the accuracy of multiple test result comparisons. The cylinder 61, which is rotatably connected to the sampling cylinder 1 via the auxiliary bearing 62, rotates together with the retaining ring 63 fixed on the top surface of the cylinder 61. This causes the protrusion on the inner side of the retaining ring 63 to be misaligned with the notch of the insert block 57 at the lower end of the upright 51. At this point, the upright 51, top seat 52, and other structures can be removed from the sampling cylinder 1, so that the user can clean the inside of the sampling cylinder 1. The top surface of the retaining ring 63 is fixedly installed with a slide block 64 located in the cavity inside the sampling cylinder 1, and the slide block 64 is slidably connected to the arc-shaped guide rod 66 fixed inside the sampling cylinder 1. The slide block 64 is further connected to the sampling cylinder 1 using an arc-shaped spring 65. Therefore, when the cylinder 61 is released, under the elastic force of the arc-shaped spring 65, the retaining ring 63 and other structures rotate in the opposite direction, causing the protrusion on the inner side of the retaining ring 63 to re-insert into the notch of the insert block 57. In this way, when the upright 51 is inserted into the sampling cylinder 1, the position of the upright 51 can be locked.

[0027] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A sampling device for detecting the purity of silicon wafer cutting coolant, characterized in that, include: The sampling tube (1) has a piston head (3) slidably disposed inside the sampling tube (1), and a piston rod (4) is fixedly installed on the side of the piston head (3). The sampling tube (1) is also provided with a quantity component (5) and a disassembly component (6). The limited component (5) includes a pole (51), with a top seat (52) and an insert (57) fixedly installed at both ends of the pole (51). A baffle (56) is slidably provided on the pole (51), and the pole (51) is also slidably connected to the piston rod (4). A threaded sleeve (54) is embedded inside the top seat (52), and a screw (53) is threadedly connected to the top seat (52) through the threaded sleeve (54). An expansion plate (55) is fixedly installed at the end of the screw (53) adjacent to the baffle (56). The insert (57) can be inserted into the sampling cylinder (1). The disassembly and assembly assembly (6) includes a cylinder (61). An auxiliary bearing (62) is provided on the inner side of the cylinder (61) to enable the cylinder (61) to rotate and connect with the sampling cylinder (1). A retaining ring (63) is fixedly installed on the side of the cylinder (61). A slide (64) is fixedly installed on the side of the retaining ring (63). The slide (64) is located in the cavity inside the sampling cylinder (1). An arc spring (65) is also fixedly installed on the side of the slide (64). The end of the arc spring (65) is also fixedly connected to the sampling cylinder (1). An arc guide rod (66) is fixedly installed on the inner wall of the sampling cylinder (1). The slide (64) is also slidably connected to the arc guide rod (66).

2. The silicon wafer cutting coolant purity detection and sampling device according to claim 1, characterized in that, The insert (57) has a notch, and the inner side of the retaining ring (63) is fixedly provided with a protrusion that can cooperate with the notch.

3. The silicon wafer cutting coolant purity detection and sampling device according to claim 1, characterized in that, The sampling tube (1) has an open design at both ends. The front end is used to draw up the sample, while the rear end is used to assemble the piston head (3).

4. The silicon wafer cutting coolant purity detection and sampling device according to claim 3, characterized in that, There are two uprights (51), and both uprights (51) are located at the tail end of the sampling tube (1).

5. The silicon wafer cutting coolant purity detection and sampling device according to claim 1, characterized in that, The threaded sleeve (54) is located at the center of the top seat (52), and the outer surface of the threaded sleeve (54) is provided with a raised ring for improving the stability of the engagement.

6. The silicon wafer cutting coolant purity detection and sampling device according to claim 1, characterized in that, The baffle (56) is located above the tail end of the piston rod (4), and the expansion plate (55) is located above the baffle (56).

7. The silicon wafer cutting coolant purity detection and sampling device according to claim 1, characterized in that, The arc-shaped guide rod (66) is located in the cavity inside the arc-shaped spring (65), and the degree of curvature of the arc-shaped guide rod (66) is consistent with the degree of curvature of the arc-shaped spring (65).

8. The silicon wafer cutting coolant purity detection and sampling device according to claim 1, characterized in that, The sampling tube (1) is also provided with an observation window (2), and the observation window (2) is made of transparent glass.

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