Plasma excitation device

Abstract

The utility model discloses a kind of plasma excitation devices for generating plasma. Plasma excitation device utilizes cooling medium circulating in cooling branch pipe to cool down, and plasma excitation device includes discharge chamber, coil and shell. Coil is located at the one side outside discharge chamber, and coil has cooling channel through its inside, and cooling channel is adapted to communicate with cooling branch pipe, so that cooling medium enters cooling channel. Shell defines assembly cavity, and assembly cavity is used to accommodate discharge chamber and coil. Shell includes air inlet and air outlet communicated with assembly cavity, and cooling airflow is adapted to enter assembly cavity from air inlet and flow out from air outlet, to cool down the outside of coil. The scheme can effectively reduce the temperature difference inside and outside coil, avoid the situation that condensate water is generated due to the temperature difference inside and outside coil, effectively prevent short circuit of plasma excitation device, and ensure the stability and reliability of plasma excitation device operation.

Description

Technical Field

[0001] This utility model relates to the field of plasma excitation technology, and in particular to a plasma excitation device. Background Technology

[0002] The radio frequency (RF) coil of the plasma excitation device (inductively coupled radio frequency ion source) generates an electromagnetic field inside the discharge chamber. Under the influence of this electromagnetic field, accelerated electrons bombard neutral gas, causing ionization and generating plasma. Because the RF coil is located outside the discharge chamber and no cathode filament is required, the plasma density is high and the cleanliness is excellent, preventing sample contamination. It can be widely used in semiconductor etching, thin film deposition, surface cleaning, and post-oxidation.

[0003] When a plasma excitation device is operating, the radio frequency coil generates heat, requiring a cooling medium to circulate within it. Since the cooling unit needs to supply cooling medium to multiple plasma excitation devices simultaneously, if some devices stop operating while others continue, the cooling unit cannot stop supplying the cooling medium. This means the cooling medium continues to flow within the coils of the stopped devices, creating a significant temperature difference between the coil's interior and the external environment. Consequently, condensation forms on the coil surface. When that part of the ion source device is powered on and continues operating, the condensation causes a short circuit, damaging the plasma excitation device. Utility Model Content

[0004] The main purpose of this invention is to propose a plasma excitation device that aims to solve the technical problem of short circuits in plasma excitation devices.

[0005] To achieve the above objectives, a first aspect of this utility model provides a plasma excitation device for generating plasma. The plasma excitation device utilizes a cooling medium flowing within a cooling branch pipe for cooling. The plasma excitation device includes:

[0006] Discharge chamber;

[0007] A coil, located on one side outside the discharge chamber, has a cooling channel extending through its interior, the cooling channel being adapted to communicate with the cooling branch pipe to allow the cooling medium to enter the cooling channel;

[0008] The outer casing defines an assembly cavity for housing the discharge chamber and the coil. The outer casing includes an air inlet and an air outlet communicating with the assembly cavity. Cooling airflow is adapted to enter the assembly cavity through the air inlet and exit through the air outlet to cool the outside of the coil.

[0009] In some embodiments, the air inlet is arranged toward the coil, and the air inlet is provided with an air blowing section for generating an airflow to cool the outside of the coil.

[0010] In some embodiments, the air outlet is arranged toward the coil, and the air outlet is provided with an air intake section for generating an air intake flow to cool the outside of the coil.

[0011] In some embodiments, the coil and the discharge chamber are arranged opposite each other along a first direction, and the blowing part and the suction part are located on opposite sides of the coil along a second direction, which is perpendicular to the first direction.

[0012] The beneficial effects of the first aspect of this utility model include at least the following: In the technical solution of this embodiment, the plasma excitation device includes a discharge chamber, a coil, and a housing. The coil is located on one side outside the discharge chamber. The coil has a cooling channel penetrating its interior, which is adapted to communicate with a cooling branch pipe to allow the cooling medium to enter the cooling channel, thereby cooling the inside of the coil. Existing cooling machines require the simultaneous supply of cooling medium to multiple plasma excitation devices. When some plasma excitation devices stop working while others continue to work, the cooling machine cannot stop supplying the cooling medium. That is, the cooling medium continues to flow within the coil of the stopped plasma excitation device, creating a large temperature difference between the inside of the coil and the external environment. Consequently, condensation forms on the surface of the coil. When that part of the ion source device is powered on and continues to work, it will be affected by the condensation, causing a short circuit and damaging the plasma excitation device. The outer casing of this design defines an assembly cavity for housing the discharge chamber and coil. The casing includes an air inlet and an air outlet communicating with the assembly cavity. Cooling airflow enters the assembly cavity through the air inlet and exits through the air outlet, effectively cooling the outer surface of the coil. Meanwhile, the coil's interior is cooled by a cooling medium. Therefore, this design ensures that the temperature inside and outside the coil is more uniform, effectively reducing the temperature difference between the inside and outside of the coil in a stopped plasma excitation device. This prevents condensation due to the temperature difference, effectively preventing short circuits in the plasma excitation device and ensuring its stability and reliability. Furthermore, even if a small amount of condensation occurs on the outer surface of the coil due to a small temperature difference, the circulating cooling airflow can remove this condensation, preventing short circuits in the plasma excitation device.

[0013] A second aspect of this utility model provides a plasma excitation device for generating plasma. The plasma excitation device utilizes a cooling medium flowing within a cooling branch pipe for cooling. The plasma excitation device includes:

[0014] Discharge chamber;

[0015] A coil, located on one side outside the discharge chamber, has a cooling channel extending through its interior;

[0016] An adapter is adapted to connect the coil and the cooling branch pipe. The adapter is configured to have a first state and a second state. In the first state, the cooling channel is in communication with the cooling branch pipe to allow the cooling medium to enter the cooling channel. In the second state, the adapter blocks the cooling channel from the cooling branch pipe to prevent the cooling medium from entering the cooling channel.

[0017] In some embodiments, the adapter includes a flow channel and a stop that are movably connected to each other. The stop has a first position and a second position relative to the flow channel. In the first position, the stop at least partially opens the flow channel to place the adapter in a first state. In the second position, the stop at least partially closes the flow channel to place the adapter in a second state.

[0018] The beneficial effects of the second aspect of this utility model include at least the following: In the technical solution of this embodiment, the plasma excitation device includes a discharge chamber, a coil, and a transition section. The coil is located on one side outside the discharge chamber and has a cooling channel penetrating its interior. The transition section is suitable for connecting the coil and the cooling branch pipe. Existing cooling machines require simultaneous supply of cooling medium to multiple plasma excitation devices. When some plasma excitation devices stop working while others continue working, the cooling machine cannot stop supplying the cooling medium; that is, the cooling medium continues to flow within the coil of the stopped plasma excitation device, creating a large temperature difference between the inside of the coil and the external environment. Consequently, condensation forms on the surface of the coil. When that part of the ion source device is powered on and continues to work, it will be affected by the condensation, causing a short circuit and damaging the plasma excitation device. The transition section of this solution has a first state and a second state. In the first state, the cooling channel is connected to the cooling branch pipe, allowing the cooling medium to enter the cooling channel to cool the coil normally and suppress coil overheating during operation of the plasma excitation device. In the second state, the transition section blocks the cooling channel and the cooling branch pipe, which can suppress the cooling medium from entering the cooling channel. This prevents the cooling medium from entering the coil of the stopped plasma excitation device, avoiding the formation of condensation in the coil due to the temperature difference between the inside and outside. This effectively prevents the plasma excitation device from short-circuiting and ensures the stability and reliability of the plasma excitation device's operation.

[0019] A third aspect of this utility model provides a plasma excitation device for generating plasma. The plasma excitation device utilizes a cooling medium flowing within a cooling branch pipe for cooling. The plasma excitation device includes:

[0020] Discharge chamber;

[0021] A coil, located on one side outside the discharge chamber, has a cooling channel extending through its interior;

[0022] An adapter is adapted to connect the coil and the cooling branch pipe. The adapter is configured to have a first state and a second state. In the first state, the cooling channel is in communication with the cooling branch pipe to allow the cooling medium to enter the cooling channel. In the second state, the adapter blocks the cooling channel from the cooling branch pipe to prevent the cooling medium from entering the cooling channel.

[0023] The outer casing defines an assembly cavity for housing the discharge chamber and the coil. The outer casing includes an air inlet and an air outlet communicating with the assembly cavity. Cooling airflow is adapted to enter the assembly cavity through the air inlet and exit through the air outlet to cool the outside of the coil.

[0024] In some embodiments, the air inlet is arranged toward the coil, and the air inlet is provided with an air blowing section for generating an air blowing flow to cool the outside of the coil;

[0025] The air outlet is arranged facing the coil, and the air outlet is provided with an air intake section, which is used to generate an air intake flow to cool the outside of the coil.

[0026] In some embodiments, the coil and the discharge chamber are arranged opposite each other along a first direction, and the blowing part and the suction part are located on opposite sides of the coil along a second direction, which is perpendicular to the first direction.

[0027] In some embodiments, the adapter includes a flow channel and a stop that are movably connected to each other. The stop has a first position and a second position relative to the flow channel. In the first position, the stop at least partially opens the flow channel to place the adapter in a first state. In the second position, the stop at least partially closes the flow channel to place the adapter in a second state.

[0028] The beneficial effects of the third aspect embodiment of this utility model include at least the following: In the technical solution of this embodiment, the plasma excitation device includes a discharge chamber, a coil, a transition part, and a housing. The coil is located on one side outside the discharge chamber and has a cooling channel penetrating its interior. The transition part is suitable for connecting the coil and a cooling branch pipe. The housing of this solution defines an assembly cavity for accommodating the discharge chamber and the coil. The housing includes an air inlet and an air outlet communicating with the assembly cavity. Cooling airflow can enter the assembly cavity through the air inlet and flow out through the air outlet, which can cool the outside of the coil, while the inside of the coil is cooled by a cooling medium. Therefore, this solution can make the temperature inside and outside the coil more uniform, effectively reducing the temperature difference between the inside and outside of the coil in a stopped plasma excitation device, avoiding the formation of condensate due to the temperature difference between the inside and outside of the coil, and effectively preventing short circuits in the plasma excitation device. Furthermore, even if a small amount of condensate forms on the outside of the coil due to a small temperature difference, the circulating cooling airflow can carry away the condensate formed on the outside of the coil, preventing short circuits in the plasma excitation device.

[0029] Furthermore, the adapter is suitable for connecting the coil and the cooling branch pipe. This adapter has a first state and a second state. In the first state, the cooling channel and the cooling branch pipe are connected, allowing the cooling medium to enter the cooling channel for normal cooling of the coil and suppressing coil overheating during operation of the plasma excitation device. In the second state, the adapter blocks the cooling channel from the cooling branch pipe, preventing the cooling medium from entering the cooling channel. This avoids the cooling medium entering the coil of the stopped plasma excitation device, preventing condensation due to temperature differences between the inside and outside of the coil, and effectively preventing short circuits in the plasma excitation device. In summary, this solution further improves the stability and reliability of the plasma excitation device. Attached Figure Description

[0030] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0031] Figure 1 This is a schematic diagram of the structure of the plasma excitation device in one embodiment of the present invention;

[0032] Figure 2 This is a cross-sectional view of a plasma excitation device according to an embodiment of the present invention;

[0033] Figure 3 This is an explosion diagram of the plasma excitation device in one embodiment of the present invention.

[0034] Explanation of icon numbers:

[0035] Plasma excitation device 10;

[0036] Discharge chamber 100;

[0037] Coil 200;

[0038] 300 outer shell; 310 assembly cavity; 320 air inlet; 330 air outlet; 340 air blowing section; 350 air suction section;

[0039] Adapter 400;

[0040] First direction X; second direction Y.

[0041] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0042] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0043] The first aspect of this utility model provides a plasma excitation device 10, which is used to generate plasma and can effectively avoid short circuits. The plasma excitation device 10 utilizes a cooling medium flowing within a cooling branch pipe for cooling. It is understood that the cooling branch pipe can be connected to a cooling machine, which can supply the cooling medium to the cooling branch pipe. The cooling machine can be connected to a single cooling branch pipe or multiple cooling branch pipes. It should be noted that the cooling medium can be a cooling gas stream or a cooling liquid (aqueous cooling solution or an aqueous ethylene glycol solution), etc. This embodiment uses an aqueous cooling solution as an example for explanation. The following refers to... Figures 1 to 3 The plasma excitation device 10 of this application embodiment will be introduced. Specifically, the plasma excitation device 10 includes a discharge chamber 100, a coil 200 and a housing 300.

[0044] Reference Figure 1 The discharge chamber 100 provides a sealed space through which a working gas (such as Ar, O2, CF4, etc.) can be introduced, and can confine the plasma generation region to maintain discharge stability. The discharge chamber 100 can be in the form of a sealed cylinder or sphere, and its inner wall can be covered with a ceramic insulating layer. Specific configurations of the discharge chamber 100 can be found in relevant known technologies.

[0045] Reference Figure 2 and Figure 3The coil 200 can be a radio frequency (RF) coil 200. RF current can be passed through the coil 200 to generate an alternating electromagnetic field. This electromagnetic field can penetrate the discharge chamber wall and ionize the internal gas to generate plasma. The coil 200 can be helical or planar ring-shaped, etc. The coil 200 is located on one side outside the discharge chamber 100, and its specific location can be determined according to actual conditions. This embodiment uses the example of the coil 200 located on the bottom side outside the discharge chamber 100 for illustration. The coil 200 has a cooling channel penetrating its interior. The cooling channel can be connected to a cooling branch pipe, allowing the cooling medium to flow into the cooling channel to cool the coil 200 and prevent overheating during operation.

[0046] Reference Figures 1 to 3 The housing 300 is used to assemble the discharge chamber 100 and the coil 200. Specifically, the housing 300 defines an assembly cavity 310, which can accommodate the discharge chamber 100 and the coil 200. The specific structure and arrangement of the housing 300 can be adapted to the arrangement of the discharge chamber 100 and the coil 200. The housing 300 includes an air inlet 320 and an air outlet 330, which can communicate with the assembly cavity 310. Cooling airflow can enter the assembly cavity 310 through the air inlet 320 and flow out through the air outlet 330, thereby cooling the outside of the coil 200. Since the inside of the coil 200 can be cooled by the cooling medium, the temperature difference between the inside and outside of the coil 200 can be reduced. It should be noted that in some embodiments, the housing 300 may be provided with a single air inlet 320. In other embodiments, the housing 300 may be provided with multiple air inlets 320. This application embodiment takes the housing 300 being provided with a single air inlet 320 as an example for illustration. The number of air outlets 330 may be the same as or different from the number of air inlets 320.

[0047] In this embodiment, the plasma excitation device 10 includes a discharge chamber 100, a coil 200, and a housing 300. The coil 200 is located on one side outside the discharge chamber 100. The coil 200 has a cooling channel penetrating its interior, which is adapted to communicate with a cooling branch pipe to allow the cooling medium to enter the cooling channel, thereby cooling the inside of the coil 200. Existing cooling machines require the simultaneous supply of cooling medium to multiple plasma excitation devices. When some plasma excitation devices stop working while others continue to work, the cooling machine cannot stop supplying the cooling medium. The cooling medium continues to flow within the coil of the stopped plasma excitation device, creating a large temperature difference between the inside of the coil and the external environment. This causes condensation to form on the coil surface. When that part of the ion source device is powered on and continues to work, it will be affected by the condensation, causing a short circuit and damaging the plasma excitation device. The outer casing 300 of this design defines an assembly cavity 310 for housing the discharge chamber 100 and the coil 200. The outer casing 300 includes an air inlet 320 and an air outlet 330 communicating with the assembly cavity 310. Cooling airflow can enter the assembly cavity 310 through the air inlet 320 and flow out through the air outlet 330, thus cooling the outside of the coil 200. The inside of the coil 200 is cooled by a cooling medium. Therefore, this design can make the temperature inside and outside the coil 200 more uniform, effectively reducing the temperature difference between the inside and outside of the coil 200 in the stopped plasma excitation device 10, preventing condensation due to the temperature difference, effectively preventing short circuits in the plasma excitation device 10, and ensuring the stability and reliability of the plasma excitation device 10. Furthermore, even if a small amount of condensation occurs on the outside of the coil 200 due to a small temperature difference, the circulating cooling airflow can remove the condensation, preventing short circuits in the plasma excitation device 10.

[0048] Reference Figure 1 and Figure 2 In some embodiments, the specific arrangement of the cooling airflow is described below. The cooling airflow can be generated by the air blowing section 340. The air inlet 320 can be arranged towards the coil 200. Specifically, the air inlet 320 can be located on one side of the coil 200 along the lateral direction. The air inlet 320 is provided with the air blowing section 340, which is used to generate a blowing airflow to cool the outside of the coil 200. In other embodiments, the air blowing section 340 can be a fan or a nozzle, etc. The blowing airflow generated by the air blowing section 340 of this solution can be directly blown onto the coil 200, which can enhance the cooling effect, effectively reduce the temperature difference between the inside and outside of the coil 200, prevent the formation of condensate in the coil 200, and ensure the stability and reliability of the plasma excitation device 10.

[0049] Reference Figure 1 and Figure 2In some embodiments, the specific arrangement of the cooling airflow is described below. The cooling airflow can also be generated by the suction section 350. The air outlet 330 is arranged facing the coil 200. Specifically, the air outlet 330 can be on one side of the coil 200 along the lateral direction. The air outlet 330 is provided with the suction section 350, which is used to generate suction airflow to cool the outside of the coil 200. In other embodiments, the suction section 350 can be a fan, vacuum pump, or exhaust fan, etc. The suction airflow generated by the suction section 350 of this solution can directly extract the hot air from the surface of the coil 200, enhance the cooling effect, effectively reduce the temperature difference between the inside and outside of the coil 200, prevent the formation of condensate in the coil 200, and ensure the stability and reliability of the plasma excitation device 10.

[0050] Reference Figures 1 to 3 The relative arrangement of the coil 200, discharge chamber 100, blowing section 340, and suction section 350 is described below. In some embodiments, for ease of description and understanding of the relative positions of the coil 200 and discharge chamber 100, a first direction X is defined, and the coil 200 and discharge chamber 100 are arranged relative to each other along the first direction X, as shown in the figure. Figure 2 In terms of orientation, the first direction X can point vertically, and the discharge chamber 100 can be located above the coil 200. For ease of description and understanding of the relative positions of the blowing section 340 and the suction section 350, a second direction Y is defined. The second direction Y is perpendicular to the first direction X, and the blowing section 340 and the suction section 350 are located on opposite sides of the coil 200 along the second direction Y. (Refer to...) Figure 2 In terms of orientation, the blowing part 340 and the suction part 350 can be located on opposite sides of the coil 200 in the left-right direction. This solution can optimize the airflow circulation path, effectively improve the cooling effect of the cooling airflow on the coil 200, reduce the temperature difference between the inside and outside of the coil 200, prevent the coil 200 from generating condensate, and ensure the stability and reliability of the plasma excitation device 10.

[0051] A second aspect of this utility model provides a plasma excitation device 10 for generating plasma, which effectively avoids short circuits. The plasma excitation device 10 utilizes a cooling medium flowing within a cooling branch pipe for cooling; the specific cooling settings can be determined according to actual conditions. The following refers to... Figures 1 to 3 The plasma excitation device 10 according to an embodiment of this application will be introduced. Specifically, the plasma excitation device 10 includes a discharge chamber 100, a coil 200, and a connecting part 400. The coil 200 is located on one side outside the discharge chamber 100. In this embodiment, the coil 200 is located on the bottom side outside the discharge chamber 100 as an example. The coil 200 has a cooling channel that extends through its interior, and the cooling channel is suitable for the flow of cooling medium in the cooling branch pipe.

[0052] Reference Figure 1 and Figure 2The adapter 400 is used to control the flow of cooling medium within the coil 200. Specifically, the adapter 400 can connect the coil 200 to the cooling branch pipe, and its specific location can be determined according to actual conditions. The adapter 400 has a first state and a second state. In the first state, when the plasma excitation device 10 is working normally, the cooling channel and the cooling branch pipe are connected, so the cooling medium can smoothly enter the cooling channel, thereby cooling the inside of the coil 200 and effectively suppressing the heat generated by the coil 200 during operation. In the second state, when the plasma excitation device 10 stops working, the adapter 400 blocks the cooling channel and the cooling branch pipe to prevent the cooling medium from entering the cooling channel, thus avoiding the formation of condensation due to temperature differences inside and outside the coil 200, which could lead to a short circuit.

[0053] In this embodiment, the plasma excitation device 10 includes a discharge chamber 100, a coil 200, and a connecting part 400. The coil 200 is located on one side outside the discharge chamber 100 and has a cooling channel penetrating its interior. The connecting part 400 is adapted to connect the coil 200 and the cooling branch pipe. Existing cooling machines require simultaneous supply of cooling medium to multiple plasma excitation devices. When some plasma excitation devices stop working while others continue, the cooling machine cannot stop supplying cooling medium; that is, the cooling medium continues to flow within the coil of the stopped plasma excitation device, creating a large temperature difference between the inside of the coil and the external environment. Consequently, condensation forms on the coil surface. When that part of the ion source device is powered on and continues to operate, it will be affected by the condensation, causing a short circuit and damaging the plasma excitation device. In this solution, the connecting part 400 has a first state and a second state. In the first state, the cooling channel is connected to the cooling branch pipe, allowing the cooling medium to enter the cooling channel to cool the coil 200 normally, suppressing the heating of the coil 200 when the plasma excitation device 10 is operating. In the second state, the adapter 400 blocks the cooling channel and the cooling branch pipe, which can suppress the cooling medium from entering the cooling channel. This prevents the cooling medium from entering the coil 200 of the stopped plasma excitation device 10, thus preventing the coil 200 from condensing due to the temperature difference between the inside and outside. This effectively prevents the plasma excitation device 10 from short-circuiting and ensures the stability and reliability of the operation of the plasma excitation device 10.

[0054] The specific configuration of the adapter 400 is described below. In some embodiments, the adapter 400 includes a flow channel and a stop that are movably connected to each other. The stop has a first position and a second position relative to the flow channel. In the first position, the stop at least partially opens the flow channel, thereby enabling the adapter 400 to be stably maintained in the first state and ensuring that the cooling medium can flow normally to the cooling channel. In the second position, the stop at least partially closes the flow channel, thereby enabling the adapter 400 to be stably maintained in the second state and inhibiting the flow of the cooling medium to the cooling channel. This design ensures the reliability of the on / off adjustment of the adapter 400, and the overall adjustment operation is convenient and quick.

[0055] It should be noted that in some embodiments, the adapter 400 can be a gate valve or a ball valve, etc. Specifically, the adapter 400 can cut off the cooling medium through a rigid sealing pair (valve core, valve seat), block external leakage through a dynamic sealing system (packing, bellows), and precisely control the opening and closing through an actuator. That is, the three work together to ensure reliable opening and closing of the valve under gas / liquid conditions.

[0056] A third aspect of this utility model provides a plasma excitation device 10, which is used to generate plasma and can effectively avoid short circuits. The plasma excitation device 10 utilizes a cooling medium flowing within a cooling branch pipe for cooling. The following refers to... Figures 1 to 3 The plasma excitation device 10 according to an embodiment of this application will be introduced. Specifically, the plasma excitation device 10 includes a discharge chamber 100, a coil 200, a connecting part 400, and a housing 300. The coil 200 is located on one side outside the discharge chamber 100, and the coil 200 has a cooling channel that extends through its interior.

[0057] Reference Figure 1 and Figure 2 The adapter 400 is used to control the flow of cooling medium within the coil 200. Specifically, the adapter 400 can connect the coil 200 to the cooling branch pipe, and its specific location can be determined according to actual conditions. The adapter 400 has a first state and a second state. In the first state, when the plasma excitation device 10 is working normally, the cooling channel and the cooling branch pipe are connected, so the cooling medium can smoothly enter the cooling channel, thereby cooling the inside of the coil 200 and effectively suppressing the heat generated by the coil 200 during operation. In the second state, when the plasma excitation device 10 stops working, the adapter 400 blocks the cooling channel and the cooling branch pipe to prevent the cooling medium from entering the cooling channel, thus avoiding the formation of condensation due to temperature differences inside and outside the coil 200, which could lead to a short circuit.

[0058] The outer casing 300 defines an assembly cavity 310 for housing the discharge chamber 100 and the coil 200. The outer casing 300 includes an air inlet 320 and an air outlet 330 communicating with the assembly cavity 310. Cooling airflow is adapted to enter the assembly cavity 310 through the air inlet 320 and exit through the air outlet 330 to cool the outer side of the coil 200, while the inner side of the coil 200 can be cooled by a cooling medium. This design enables the temperature inside and outside the coil 200 to become more uniform, effectively reducing the temperature difference between the inside and outside of the coil 200 in the stopped plasma excitation device 10, preventing condensation in the coil 200 due to the temperature difference, effectively preventing short circuits in the plasma excitation device 10, and ensuring the stability and reliability of the operation of the plasma excitation device 10.

[0059] Reference Figures 1 to 3 In some embodiments, the air inlet 320 is arranged facing the coil 200, and the air inlet 320 is provided with an air blowing section 340 for generating an airflow to cool the outside of the coil 200. In other embodiments, the air outlet 330 is arranged facing the coil 200, and the air outlet 330 is provided with an air intake section 350 for generating an air intake to cool the outside of the coil 200. It should be noted that the cooling airflow can be generated by the operation of the air outlet section, the operation of the air intake section 350, or the operation of the air blowing section 340 and the air intake section 350 simultaneously. This solution can ensure the cooling effect of the cooling airflow on the outside of the coil 200, effectively reduce the temperature difference between the inside and outside of the coil 200, prevent the formation of condensate in the coil 200, and ensure the stability and reliability of the plasma excitation device 10. Furthermore, even if a small amount of condensation occurs on the outside of the coil 200 due to a small temperature difference, the circulating cooling airflow can carry away the condensation generated on the outside of the coil 200, thus preventing a short circuit in the plasma excitation device 10.

[0060] Reference Figure 2 In some embodiments, the coil 200 and the discharge chamber 100 are arranged opposite each other along a first direction X, and the blowing part 340 and the suction part 350 are located on opposite sides of the coil 200 along a second direction Y. The second direction Y is perpendicular to the first direction X. This solution can optimize the airflow circulation path, effectively improve the cooling effect of the cooling airflow on the outside of the coil 200, reduce the temperature difference between the inside and outside of the coil 200, prevent the formation of condensate in the coil 200, and ensure the stability and reliability of the plasma excitation device 10.

[0061] The specific configuration of the adapter 400 is described below. In some embodiments, the adapter 400 includes a flow channel and a stop that are movably connected to each other. The stop has a first position and a second position relative to the flow channel. In the first position, the stop at least partially opens the flow channel, thereby enabling the adapter 400 to be stably maintained in the first state and ensuring that the cooling medium can flow normally to the cooling channel. In the second position, the stop at least partially closes the flow channel, thereby enabling the adapter 400 to be stably maintained in the second state and inhibiting the flow of the cooling medium to the cooling channel. This design ensures the reliability of the on / off adjustment of the adapter 400, and the overall adjustment operation is convenient and quick.

[0062] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0063] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or," "and / or," or "and / or" throughout the text implies three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0064] The above are merely preferred embodiments of this utility model and do not limit the patent scope of this utility model. Any equivalent structural transformations made based on the inventive concept of this utility model and the contents of this utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of this utility model.

Claims

1. A plasma excitation device for generating plasma, wherein the plasma excitation device utilizes a cooling medium flowing within a cooling branch pipe for cooling, characterized in that, The plasma excitation device includes: Discharge chamber; A coil, located on one side outside the discharge chamber, has a cooling channel extending through its interior, the cooling channel being adapted to communicate with the cooling branch pipe to allow the cooling medium to enter the cooling channel; The outer casing defines an assembly cavity for housing the discharge chamber and the coil. The outer casing includes an air inlet and an air outlet communicating with the assembly cavity. Cooling airflow is adapted to enter the assembly cavity through the air inlet and exit through the air outlet to cool the outside of the coil.

2. The plasma excitation device as described in claim 1, characterized in that, The air inlet is arranged facing the coil, and the air inlet is provided with an air blowing section, which is used to generate airflow to cool the outside of the coil.

3. The plasma excitation device as described in claim 2, characterized in that, The air outlet is arranged facing the coil, and the air outlet is provided with an air intake section, which is used to generate an air intake flow to cool the outside of the coil.

4. The plasma excitation device as described in claim 3, characterized in that, The coil and the discharge chamber are arranged opposite each other along a first direction, and the blowing part and the suction part are located on opposite sides of the coil along a second direction, which is perpendicular to the first direction.

5. A plasma excitation device for generating plasma, wherein the plasma excitation device is cooled by a cooling medium flowing within a cooling branch pipe, characterized in that, The plasma excitation device includes: Discharge chamber; A coil, located on one side outside the discharge chamber, has a cooling channel extending through its interior; An adapter is adapted to connect the coil and the cooling branch pipe. The adapter is configured to have a first state and a second state. In the first state, the cooling channel is in communication with the cooling branch pipe to allow the cooling medium to enter the cooling channel. In the second state, the adapter blocks the cooling channel from the cooling branch pipe to prevent the cooling medium from entering the cooling channel.

6. The plasma excitation device as described in claim 5, characterized in that, The transition portion includes a flow channel and a stop that are movably connected to each other. The stop has a first position and a second position relative to the flow channel. In the first position, the stop at least partially opens the flow channel so that the transition portion is in the first state. In the second position, the stop at least partially closes the flow channel so that the transition portion is in the second state.

7. A plasma excitation device for generating plasma, wherein the plasma excitation device utilizes a cooling medium flowing within a cooling branch pipe for cooling, characterized in that, The plasma excitation device includes: Discharge chamber; A coil, located on one side outside the discharge chamber, has a cooling channel extending through its interior; An adapter is adapted to connect the coil and the cooling branch pipe. The adapter is configured to have a first state and a second state. In the first state, the cooling channel is in communication with the cooling branch pipe to allow the cooling medium to enter the cooling channel. In the second state, the adapter blocks the cooling channel from the cooling branch pipe to prevent the cooling medium from entering the cooling channel. The outer casing defines an assembly cavity for housing the discharge chamber and the coil. The outer casing includes an air inlet and an air outlet communicating with the assembly cavity. Cooling airflow is adapted to enter the assembly cavity through the air inlet and exit through the air outlet to cool the outside of the coil.

8. The plasma excitation device as described in claim 7, characterized in that, The air inlet is arranged facing the coil, and the air inlet is provided with an air blowing section, which is used to generate air blowing to cool the outside of the coil. The air outlet is arranged facing the coil, and the air outlet is provided with an air intake section, which is used to generate an air intake flow to cool the outside of the coil.

9. The plasma excitation device as described in claim 8, characterized in that, The coil and the discharge chamber are arranged opposite each other along a first direction, and the blowing part and the suction part are located on opposite sides of the coil along a second direction, which is perpendicular to the first direction.

10. The plasma excitation device as described in claim 7, characterized in that, The transition portion includes a flow channel and a stop that are movably connected to each other. The stop has a first position and a second position relative to the flow channel. In the first position, the stop at least partially opens the flow channel so that the transition portion is in the first state. In the second position, the stop at least partially closes the flow channel so that the transition portion is in the second state.

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