Ion optical tunable nozzle developed based on desktop cluster device

Abstract

The utility model relates to ion optics nozzle technical field, concretely disclose a kind of ion optics adjustable nozzle based on desktop cluster equipment development, comprising: transmission shaft fixed seat, the upper end of adjustable nozzle flange is equipped with nozzle body by nozzle mounting seat, adjustable nozzle flange is provided with sealing element between nozzle mounting seat, the lower end of transmission shaft fixed seat is connected with diaphragm lever by connecting rod mechanism;The utility model is through the rotation of transmission shaft body, active lever starts to swing, drive plane connecting rod mechanism operation, swing lever in connecting rod mechanism is driven under the active lever and carries out accurate movement, further push diaphragm lever rotation, diaphragm body rotates accordingly, to realize the adjustment of nozzle diameter, this process makes nozzle can accurately adjust beam diameter, effectively control airflow and the characteristic of cluster beam;Nozzle mounting seat and adjustable nozzle flange between adopt aluminium ring sealing, ensure the airtightness and stability of system.

Description

Technical Field

[0001] This utility model belongs to the field of ion optical nozzle technology, specifically relating to an adjustable ion optical nozzle developed based on a desktop cluster device. Background Technology

[0002] Ion optical nozzles belong to the field of ion optical technology and are mainly used to generate and control ion beams or plasma jets. This device is widely used in multiple technical fields such as ion beam processing, plasma treatment, spraying, and cutting. Through the adjustable aperture, the diameter of the ion optical nozzle can be adjusted within the range of 1-10mm, thereby achieving higher beam density and more precise size control.

[0003] When the desktop cluster device is started, clusters are generated inside the cavity and enter the cluster particle selection cavity through the gas-phase cluster flow. In this process, a well-focused cluster beam is first formed. The quality of this beam directly affects the subsequent quality selection and deposition effect, so its stability is crucial. The nozzle is responsible for precisely controlling the cluster beam to ensure its uniformity and stability, thereby providing a reliable guarantee for subsequent experiments and process operations. The inconvenience of adjusting traditional ion optical nozzles brings inconvenience to use. Utility Model Content

[0004] The purpose of this invention is to provide an ion optical adjustable nozzle developed based on a desktop cluster device, in order to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] An ion optics tunable nozzle developed based on a desktop cluster device includes:

[0007] A drive shaft mounting base is provided, with an adjustable nozzle flange at its upper end. A nozzle body is mounted on the upper end of the adjustable nozzle flange via a nozzle mounting seat. The nozzle body has an internal nozzle cavity. A seal is provided between the adjustable nozzle flange and the nozzle mounting seat. An aperture body is mounted on the lower end of the drive shaft mounting base via an aperture mounting plate. An aperture lever is connected to the lower end of the drive shaft mounting base via a linkage mechanism. The aperture lever is connected to the aperture body. A drive component is connected to the linkage mechanism to drive the linkage mechanism to move, thereby driving the aperture lever to rotate, and thus the aperture body to rotate accordingly.

[0008] Preferably, the linkage mechanism includes a driving rod, a driven rod, and a swing rod. One end of the driving rod is rotatably connected to the driven rod, one end of the driven rod is rotatably connected to the swing rod, and one end of the swing rod is rotatably connected to the aperture lever.

[0009] Preferably, the driving component is a drive shaft body, which is mounted on the upper end of the drive shaft mounting base, and the lower end of the drive shaft body passes through the drive shaft mounting base and connects to the drive rod. The drive shaft body is connected to an external drive motor.

[0010] Preferably, the sealing element is an aluminum ring seal to ensure the system's airtightness and stability. The aluminum ring seal not only effectively prevents gas leakage but also maintains excellent sealing performance during prolonged use, thereby significantly improving the overall performance and reliability of the equipment. This design effectively avoids performance fluctuations and equipment failures caused by sealing problems, ensuring the long-term stable operation of the equipment.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] 1. By rotating the drive shaft body, the active rod begins to swing, driving the planar linkage mechanism to operate. The swing rod in the linkage mechanism moves precisely under the drive of the active rod, further pushing the aperture lever to rotate. As the aperture lever rotates, the aperture body rotates accordingly, thereby realizing the adjustment of the nozzle diameter. This process enables the nozzle to precisely adjust the beam diameter, effectively control the characteristics of airflow and cluster beam, and thus provide higher stability and consistency for subsequent process operations.

[0013] 2. An aluminum ring seal is used between the nozzle mounting base and the adjustable nozzle flange to ensure the airtightness and stability of the system. The aluminum ring seal not only effectively prevents gas leakage, but also maintains excellent sealing performance during long-term use, thereby significantly improving the overall performance and reliability of the equipment. This design effectively avoids performance fluctuations and equipment failures caused by sealing problems, ensuring the long-term stable operation of the equipment. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0015] Figure 2 This is a schematic diagram of the structure of this utility model from another perspective;

[0016] In the diagram: 1. Drive shaft body; 2. Drive shaft mounting base; 3. Nozzle inner cavity; 4. Drive rod;

[0017] 5. Driven rod; 6. Swing rod; 7. Aperture lever; 8. Aperture fixing plate; 9. Aperture body; 10. Adjustable nozzle flange. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] Example:

[0020] Please see Figures 1-2 As shown, an ion optics adjustable nozzle developed based on a desktop cluster device includes:

[0021] The drive shaft mounting base 2 has an adjustable nozzle flange 10 at its upper end. This flange connection makes nozzle disassembly, cleaning, and replacement more convenient. Operators can complete nozzle maintenance in a shorter time, avoiding equipment downtime due to cleaning difficulties and further improving equipment operating efficiency and sustainability. Overall, this design meets high-precision control requirements while providing greater operational convenience and cost-effectiveness. The nozzle body is mounted on the upper end of the adjustable nozzle flange 10 via a nozzle mounting seat. The nozzle body has an internal nozzle cavity 3. A seal is provided between the adjustable nozzle flange 10 and the nozzle mounting seat. The lower end of the drive shaft mounting base 2 has an aperture body 9 mounted on an aperture mounting plate 8. The lower end of the drive shaft mounting base 2 is connected to an aperture lever 7 via a linkage mechanism. The aperture lever 7 is connected to the aperture body 9. The linkage mechanism is connected to a drive component to drive the linkage mechanism, thereby rotating the aperture lever 7, which in turn rotates the aperture body 9.

[0022] The nozzle module adopts a modular design and is structurally combined through flange connections. This design allows the nozzle assembly to be flexibly selected and adjusted according to different processing requirements. Whether processing different types of agglomerated substances or dealing with changes in processing parameters, the economy and adaptability of the equipment can be improved through simple module replacement or adjustment. The modular design not only reduces the maintenance cost of the equipment, but also allows for quick adjustments according to specific experimental needs, thus enhancing the flexibility of the equipment.

[0023] refer to Figures 1-2 As shown, the linkage mechanism includes a driving rod 4, a driven rod 5, and a swing rod 6. One end of the driving rod 4 is rotatably connected to the driven rod 5, and one end of the driven rod 5 is rotatably connected to the swing rod 6. One end of the swing rod 6 is rotatably connected to the aperture lever 7.

[0024] refer to Figures 1-2As shown, the driving component is a drive shaft body 1, which is mounted on the upper end of the drive shaft mounting base 2. The lower end of the drive shaft body 1 passes through the drive shaft mounting base 2 and connects to the drive rod 4. The drive shaft body 1 is connected to an external drive motor.

[0025] refer to Figures 1-2 As shown, the sealing element is set as an aluminum ring seal to ensure the airtightness and stability of the system. The aluminum ring seal can not only effectively prevent gas leakage, but also maintain excellent sealing effect during long-term use, thereby significantly improving the overall performance and reliability of the equipment. This design effectively avoids performance fluctuations and equipment failures caused by sealing problems, and ensures the long-term stable operation of the equipment.

[0026] The nozzle consists of a linkage mechanism and an adjustable aperture, which together enable precise adjustment of the beam. By rotating the drive shaft body 1, the drive rod 4 begins to swing, thereby activating the planar linkage mechanism. The swing rod 6 of the linkage mechanism begins to move with the drive rod 4, which in turn drives the aperture lever 7 to rotate. This rotation causes the aperture body 9 to rotate, thereby changing the diameter of the nozzle and precisely adjusting the characteristics of the airflow and the beam.

[0027] 1. By rotating the transmission shaft body 1, the active rod 4 begins to swing, driving the planar linkage mechanism to operate. The swing rod 6 in the linkage mechanism moves precisely under the drive of the active rod 4, further pushing the aperture lever 7 to rotate. As the aperture lever 7 rotates, the aperture body 9 rotates accordingly, thereby realizing the adjustment of the nozzle diameter. This process enables the nozzle to precisely adjust the beam diameter, effectively control the characteristics of airflow and cluster beam, and thus provide higher stability and consistency for subsequent process operations.

[0028] 2. An aluminum ring seal is used between the nozzle mounting base and the adjustable nozzle flange 10 to ensure the airtightness and stability of the system. The aluminum ring seal can not only effectively prevent gas leakage, but also maintain excellent sealing effect during long-term use, thereby significantly improving the overall performance and reliability of the equipment. This design effectively avoids performance fluctuations and equipment failures caused by sealing problems, and ensures the long-term stable operation of the equipment.

[0029] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An ion-optics tunable nozzle developed on the basis of a desktop cluster device, characterized in that, include: A drive shaft fixing seat (2) is provided with an adjustable nozzle flange (10) at its upper end. A nozzle body is mounted on the upper end of the adjustable nozzle flange (10) via a nozzle mounting seat. A nozzle cavity (3) is opened inside the nozzle body. A sealing element is provided between the adjustable nozzle flange (10) and the nozzle mounting seat. An aperture body (9) is mounted on the lower end of the drive shaft fixing seat (2) via an aperture fixing plate (8). An aperture lever (7) is connected to the lower end of the drive shaft fixing seat (2) via a linkage mechanism. The aperture lever (7) is connected to the aperture body (9). A drive element is connected to the linkage mechanism.

2. The ion-optically tunable nozzle developed based on a table-top cluster apparatus according to claim 1, characterized in that: The linkage mechanism includes a driving rod (4), a driven rod (5), and a swing rod (6). One end of the driving rod (4) is rotatably connected to the driven rod (5), and one end of the driven rod (5) is rotatably connected to the swing rod (6). One end of the swing rod (6) is rotatably connected to the aperture lever (7).

3. The ion-optically tunable nozzle developed based on a table-top cluster apparatus according to claim 2, characterized in that: The driving component is configured as a transmission shaft body (1), which is mounted on the upper end of the transmission shaft fixing seat (2). The lower end of the transmission shaft body (1) passes through the transmission shaft fixing seat (2) and is connected to the drive rod (4).

4. The ion-optically tunable nozzle developed based on a table-top cluster apparatus according to claim 3, characterized in that: The sealing element is set as an aluminum ring seal.

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