A tooling and assembly apparatus

Abstract

The utility model provides a kind of tooling and assembly equipment, tooling is used for the centering of bushing, it includes first body and positioning pin, first body is equipped with lap joint portion near the side edge of bushing, lap joint portion is formed by the inward recess of one end of first body;When assembling top plate, lap joint portion is overlapped with the edge of bushing, positioning pin is fixedly connected first body and chamber cover, then top plate is fixed and set in the upper of bushing.This application is limited to bushing by first body, then fixedly connects first body and chamber cover by positioning pin, to further fix first body, chamber cover and bushing, to avoid bushing to move on chamber cover, so that the position of bushing is stable and unchangeable when assembling top plate, to make the center of chamber cover, bushing and top plate consistent, improve the centering accuracy of bushing and chamber cover, top plate, to improve the gap uniformity of bushing and top plate, to improve the uniformity of purge gas, to improve production quality, and improve production efficiency and service life.

Description

Technical Field

[0001] This utility model relates to the field of mechanical assembly, and in particular to a tooling and assembly equipment. Background Technology

[0002] In high-end manufacturing fields such as semiconductor manufacturing, flat panel displays, and photovoltaic cells, processes such as physical vapor deposition (PVD) and chemical vapor deposition (CVD) are widely used in thin film preparation. Among these processes, the reaction chamber, as a core component, directly impacts process stability and product yield through the precise installation of its internal components. The top plate, as a crucial connecting component between the chamber cover and the process area, is particularly important for its proper installation in conjunction with the bushing.

[0003] As an insulating and supporting component, the bushing plays a crucial role in isolating conductive parts, preventing short circuits, and maintaining the internal gas flow and electric field distribution within the reaction chamber. During top plate installation, it is essential to ensure alignment between the bushing and the chamber cover, as well as between the bushing and the top plate. Misalignment between the bushing and the chamber cover will lead to uneven gas distribution within the chamber, resulting in inconsistent film deposition thickness and poor uniformity. Conversely, poor alignment between the bushing and the top plate may cause uneven gaps between them, resulting in low uniformity of the purge gas. Furthermore, insufficient alignment accuracy between the bushing and these components will exacerbate localized wear on the bushing, shorten its service life, and increase equipment maintenance costs.

[0004] Currently, traditional installation methods rely heavily on manual operation. Workers use experience and simple auxiliary tools to make centering adjustments. This method is not only inefficient, but also makes it difficult to guarantee high-precision centering requirements. It is greatly affected by the worker's skill level and fatigue, resulting in poor installation consistency between different batches of products. Utility Model Content

[0005] The present invention provides a tooling and assembly equipment to improve the alignment accuracy of the bushing with the chamber cover and top plate, thereby improving production quality and efficiency, and extending the service life of the bushing.

[0006] This utility model provides a tooling, which includes:

[0007] The first body and the positioning pin, wherein the first body has an overlapping portion on one side edge near the bushing, the overlapping portion being formed by an inward indentation at one end of the first body;

[0008] When assembling the top plate, the overlapping part overlaps with the edge of the bushing, the positioning pin is fixedly connected to the first body and the chamber cover, and then the top plate is fixed above the bushing.

[0009] In the tooling provided by this utility model, the first body is an arc-shaped structure, and the first body extends circumferentially along the outer edge of the bushing.

[0010] In the tooling provided by this utility model, the perimeter of the first body is one-eighth of the perimeter of the bushing.

[0011] In the tooling provided by this utility model, there are two first bodies, and the two first bodies are respectively located on opposite sides of the bushing.

[0012] In the tooling provided by this utility model, the first main body is provided with through holes that pass through both sides of it, and one end of the positioning pin passes through the through holes and is fixedly connected to the chamber cover.

[0013] In the tooling provided by this utility model, the other end of the positioning pin is located on the side of the first body near the top plate and is engaged with the limiting hole of the top plate.

[0014] The tooling provided by this utility model further includes a second body and a set screw, which are movably connected.

[0015] When the top plate is disassembled, the second body is located between the first body and the top plate, one end of the set screw passes through the second body and abuts against the first body, and the set screw is rotated to drive the second body to move closer to the top plate.

[0016] In the tooling provided by this utility model, the second body and the set screw are connected by a thread.

[0017] In the tooling provided by this utility model, the second main body is an arc-shaped structure, and the length of the second main body is less than the length of the first main body.

[0018] This utility model also provides an assembly device, which includes:

[0019] Tooling, wherein the tooling is any of the tooling described above;

[0020] Thin film deposition equipment, including bushings, chamber covers, and top plates;

[0021] When assembling the top plate, the first body overlaps with the bushing and is fixedly connected to the first body, the bushing and the chamber cover by a positioning pin, and then the top plate is fixed above the bushing.

[0022] This application first limits the bushing by using the first body to initially fix its position. Then, the first body and the chamber cover are fixedly connected by the positioning pin to further fix the first body, the chamber cover, and the bushing, thereby preventing the bushing from moving on the chamber cover. The tooling ensures the alignment of the bushing and the chamber cover. Therefore, when assembling the top plate, the position of the bushing remains stable, so that the centers of the chamber cover, the bushing, and the top plate are consistent, improving the alignment accuracy of the bushing, the chamber cover, and the top plate, thereby improving the uniformity of the gap between the bushing and the top plate, improving the uniformity of the purging gas, and thus improving production quality, production efficiency, and service life. Attached Figure Description

[0023] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figures 1a to 1c These are cross-sectional views of the tooling during assembly in the embodiments of this utility model;

[0025] Figure 2 for Figure 1a Enlarged view of point A in the middle;

[0026] Figure 3 This is an exploded view of the assembly equipment in an embodiment of this utility model;

[0027] Figure 4 This is a structural diagram of the tooling assembly in the embodiments of this utility model;

[0028] Figure 5 This is another structural diagram of the tooling assembly in the embodiments of this utility model;

[0029] Figure 6 This is a structural diagram of the first main body in an embodiment of the present utility model;

[0030] Figure 7 This is a structural diagram of the second main body in an embodiment of this utility model.

[0031] The labels for the attached figures are as follows:

[0032] 1. First body; 11. Overlapping part; 12. Through hole; 2. Positioning pin; 3. Second body; 31. Mounting hole; 4. Top screw; 5. Chamber cover; 6. Bushing; 7. Top plate; 71. Limiting hole. Detailed Implementation

[0033] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The preferred embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0034] Reference Figures 1a to 7 The diagram illustrates an embodiment of the tooling and assembly equipment of this utility model. The tooling is used for centering the bushing 6. The tooling includes a first body 1 and a positioning pin 2. The first body 1 has an overlapping portion 11 on one edge near the bushing 6. The overlapping portion 11 is formed by an inward recess at one end of the first body 1. When assembling the top plate 7, the overlapping portion 11 overlaps with the edge of the bushing 6. The positioning pin 2 fixes the first body 1 and the chamber cover 5, and then the top plate 7 is fixed above the bushing 6.

[0035] Specifically, during equipment assembly, the bushing 6, top plate 7, and chamber cover 5 are prone to misalignment, causing random circumferential displacement of the bushing 6 and resulting in uneven gaps. Consequently, during purging gas, more purging gas flows out at larger gaps and less at smaller gaps, leading to uneven purging gas distribution. The tooling is primarily used for aligning the bushing 6, ensuring its alignment with other structural components during equipment assembly and preventing movement of the bushing 6 during assembly, which could cause structural instability. In this embodiment, the tooling is mainly used for the assembly and disassembly of the semiconductor thin-film equipment, assisting in the installation and disassembly of the semiconductor thin-film equipment and improving the structural stability, installation efficiency, and disassembly efficiency of the installed equipment.

[0036] The tooling includes a first body 1 and a positioning pin 2. The first body 1 is used to limit the bushing 6, thereby ensuring the alignment of the bushing 6 with the chamber cover 5 and the top plate 7. The positioning pin 2 is used to fix the first body 1 and the chamber cover 5. The first body 1 is provided with an overlapping part 11. The overlapping part 11 is located at the edge of the first body 1 near the bushing 6. The overlapping part 11 is formed by one end of the first body 1 being recessed inward. That is, the overlapping part 11 is mainly a stepped structure to facilitate the overlapping function of the bushing 6.

[0037] During equipment assembly, the bushing 6 is installed onto the chamber cover 5, and then the first body 1 is installed onto the edge of the bushing 6 so that the overlapping part 11 overlaps with the edge of the bushing 6. This allows the first body 1 to limit the bushing 6, preventing it from moving and causing the centers of the bushing 6 and the chamber cover 5 to be misaligned. Then, the positioning pin 2 is used to fix the first body 1 and the chamber cover 5 together. At this time, the first body 1 limits the bushing 6 onto the chamber cover 5, and the center of the bushing 6 and the center of the chamber cover 5 are aligned. Finally, the top plate 7 is positioned above the bushing 6, and the positioning pin 2 and the first body 1 are removed and fixed.

[0038] This application first limits the bushing 6 by using the first body 1 to initially fix the position of the bushing 6. Then, the first body 1 and the chamber cover 5 are fixedly connected by the positioning pin 2 to further fix the first body 1, the chamber cover 5 and the bushing 6, thereby preventing the bushing 6 from moving on the chamber cover 5. The tooling ensures the alignment of the bushing 6 and the chamber cover 5. Therefore, when assembling the top plate 7, the position of the bushing 6 remains stable, so that the centers of the chamber cover 5, the bushing 6 and the top plate 7 are consistent, improving the alignment accuracy of the bushing 6, the chamber cover 5 and the top plate 7, thereby improving the uniformity of the gap between the bushing 6 and the top plate 7, improving the uniformity of the purging gas, thereby improving production quality, production efficiency and service life.

[0039] In one embodiment, reference is made to Figures 4 to 6 As shown, the first body 1 has an arc-shaped structure and extends circumferentially along the outer edge of the bushing 6. Specifically, to facilitate the adaptation of the first body 1 to the shape of the bushing 6 for limiting the bushing 6, the first body 1 is configured as an arc-shaped structure and extends circumferentially along the outer edge of the bushing 6. When the first body 1 overlaps the outer edge of the bushing 6, the first body 1 is close to the outer edge of the bushing 6 and extends circumferentially along the bushing 6, thereby improving the adaptability of the first body 1 and the bushing 6, thus improving the structural stability of the first body 1 in limiting the bushing 6, and simplifying assembly and improving installation efficiency.

[0040] In a specific embodiment, reference is made to Figures 4 to 5As shown, the circumference of the first main body 1 is one-eighth of the circumference of the bushing 6. Specifically, the first main body 1 does not need to completely overlap and limit the outer side of the bushing 6, that is, it does not need to be set as a complete circular structure. In this embodiment, the circumference of the first main body 1 is one-eighth of the circumference of the bushing 6, that is, the first main body 1 only overlaps one-eighth of the circumference of the outer edge of the bushing 6 to limit the bushing 6 in a designated position and prevent the bushing 6 from shifting, thereby causing the bushing 6 to be misaligned with the center of the chamber cover 5 and the top plate 7. The smaller circumference of the first main body 1 can save production costs while ensuring the basic function of limiting the bushing 6; at the same time, when the first main body 1 overlaps the outer edge of the bushing 6, the operation is simpler and the work efficiency is higher.

[0041] In one embodiment, reference is made to Figures 3 to 5 As shown, there are two first bodies 1, and the two first bodies 1 are respectively located on opposite sides of the bushing 6. Specifically, the limiting function of the first bodies 1 on the bushing 6 is achieved by the cooperation of the two first bodies 1. That is, there are two first bodies 1, and the two first bodies 1 overlap with the outer edges of the opposite sides of the bushing 6, so that the two first bodies 1 can limit the opposite sides of the bushing 6 and prevent the bushing 6 from moving due to unstable limiting on one side. Therefore, two first bodies 1 overlap on the opposite sides of the bushing 6 to improve the stability of the limiting of the bushing 6 by the first bodies 1, so that the bushing 6 is more firmly installed on the chamber cover 5 and is not easily moved by interference from the top plate 7, thereby further improving the centering accuracy of the bushing 6, the chamber cover 5 and the top plate 7.

[0042] In a specific embodiment, refer to Figure 1c As shown, the first body 1 has through holes 12 extending through both sides of it. One end of the positioning pin 2 passes through the through holes 12 and is fixedly connected to the chamber cover 5. Specifically, the first body 1 has through holes 12 extending through both sides of the first body 1. Therefore, when fixing the first body 1 and the chamber cover 5, one end of the positioning pin 2 passes through the through holes 12 from the side of the first body 1 near the top plate 7 and is positioned on the side of the first body 1 near the chamber cover 5. The positioning pin 2 is then locked and fixed to the chamber cover 5, making the first body 1 and the chamber cover 5 detachably connected. The connection method is simple and the operation is convenient.

[0043] More specifically, the through hole 12 is provided corresponding to the limiting hole 71 of the top plate 7; and there are two through holes 12, which are respectively located on both sides of the first body 1. Specifically, the through hole 12 is provided corresponding to the limiting hole 71 of the top plate 7, and the limiting hole 71 is provided at the edge of the top plate 7. The limiting hole 71 is used to limit the circumferential movement of the top plate 7 and prevent the top plate 7 from moving; therefore, when the positioning pin 2 is fixedly connected to the first body 1 and the chamber cover 5 through the through hole 12, the installation method is simple; and there are two through holes 12, which are respectively located on both sides of the first body 1. Therefore, two positioning pins 2 are provided to fix the two ends of the first body 1 to the chamber cover 5, thereby improving the fixation and stability of the connection between the first body 1 and the chamber cover 5, and preventing the first body 1 from detaching from the chamber cover 5, thereby causing instability in the limiting of the bushing 6.

[0044] In one embodiment, reference is made to Figure 1c As shown, the other end of the positioning pin 2 is located on the side of the first body 1 near the top plate 7 and engages with the limiting hole 71 of the top plate 7. Specifically, in addition to fixing the first body 1 and the chamber cover 5, the positioning pin 2 also has a limiting function for the top plate 7. That is, one end of the positioning pin 2 passes through the through hole 12 and is fixedly connected to the chamber cover 5, while the other end of the positioning pin 2 is located on the side of the first body 1 near the top plate 7 and engages with the limiting hole 71 of the top plate 7. That is, the other end of the positioning pin 2 protrudes outward from the surface of the first body 1 and engages with the limiting hole 71 of the top plate 7, so that the positioning pin 2 limits the top plate 7, prevents the top plate 7 from moving, and thus improves assembly efficiency and alignment accuracy.

[0045] In a specific embodiment, refer to Figures 1a to 5 As shown, the tooling also includes a second body 3 and a set screw 4, which are movably connected. When disassembling the top plate 7, the second body 3 is located between the first body 1 and the top plate 7. One end of the set screw 4 passes through the second body 3 and abuts against the first body 1. Rotating the set screw 4 causes the second body 3 to move toward the top plate 7.

[0046] Specifically, the top plate 7 is kept at a high temperature during the process, and a sealing ring is required between the top plate 7 and the bushing 6. Due to the long-term high temperature, the top plate 7 and the sealing ring will stick together. When the top plate 7 is disassembled, the bushing 6 will be tightly stuck to the top plate 7 due to the adhesion of the sealing ring and cannot be separated. Moreover, because the bushing 6 is fragile and easily damaged, it cannot be forcibly separated with other metal tools, which will cause some trouble during the disassembly process.

[0047] Therefore, the tooling can also be used during the disassembly of the top plate 7 to assist in the disassembly of the top plate 7 and the bushing 6, preventing the bushing 6 and the top plate 7 from sticking together due to the sealing ring and reducing damage to the bushing 6. The tooling includes a second body 3 and a set screw 4, which are movably connected. The second body 3 is used to lift the top plate 7 so that the top plate 7 gradually separates from the bushing 6; the set screw 4 is used to drive the second body 3 to move upward to lift the top plate 7; the second body 3 and the first body 1 are two independent structural components, that is, the second body 3 and the first body 1 are not connected; the second body 3 is movably connected to the set screw 4 so that the rotational motion of the set screw 4 is converted into the linear motion of the second body 3.

[0048] When disassembling the top plate 7, firstly, the first main body 1 is placed on the edge of the bushing 6, and the first main body 1 and the chamber cover 5 are fixedly connected by the positioning pin 2 to fix the bushing 6 and the chamber cover 5 into a whole; then, the second main body 3 is placed between the first main body 1 and the top plate 7, and one end of the set screw 4 is passed through the second main body 3 and abuts against the first main body 1. By rotating the set screw 4, the second main body 3 is driven to move upward until the second main body 3 continues to move upward and abuts against the top plate 7, and then the top plate 7 is lifted until the top plate 7 is completely separated from the bushing 6, so as to realize the disassembly operation of the top plate 7.

[0049] In this embodiment, the bushing 6 and the chamber cover 5 are first fixed together by the first main body 1 and the positioning pin 2 to form a whole, so that the bushing 6 is not easy to move together with the top plate 7; then the second main body 3 and the set screw 4 are used to drive the second main body 3 to lift the top plate 7 upward until the top plate 7 is completely separated from the bushing 6. The bushing 6 will not be damaged during the disassembly process, and the problem of adhesion between the bushing 6 and the top plate 7 can be effectively solved, achieving effective disassembly, and the disassembly method is simple.

[0050] In one embodiment, reference is made to Figure 2As shown, the second body 3 and the set screw 4 are threadedly connected. Specifically, the second body 3 and the set screw 4 are threaded together so that the rotation of the set screw 4 is converted into the linear motion of the second body 3, thereby causing the set screw 4 to drive the second body 3 to lift the top plate 7, realizing the effective disassembly of the top plate 7 and the bushing 6. The connection method between the second body 3 and the set screw 4 is simple and easy to operate, improving disassembly efficiency.

[0051] More specifically, the second body 3 is provided with a mounting hole 31, one end of the set screw 4 passes through the mounting hole 31 and abuts against the first body 1, and the set screw 4 is threadedly connected to the mounting hole 31 so as to rotate the set screw 4 to drive the second body 3 to make an upward movement and lift the top plate 7 until the top plate 7 is completely separated from the bushing 6.

[0052] More specifically, the second body 3 is provided with two mounting holes 31, and the two mounting holes 31 are respectively located on both sides of the second body 3. The two set screws 4 pass through the two mounting holes 31 respectively to drive the second body 3 to move. This improves the stability of the movement of the second body 3 and the structural strength of the second body 3 and the set screws 4.

[0053] In a specific embodiment, refer to Figures 3 to 7 As shown, the second main body 3 has an arc-shaped structure, and its length is less than that of the first main body 1. Specifically, the shape of the second main body 3 is adapted to that of the first main body 1, so that when the second main body 3 is placed between the first main body 1 and the top plate 7, the tooling has high structural stability, and the second main body 3 will not interfere with the bushing 6, ensuring the movement of the second main body 3. Since the two sides of the first main body 1 need to be fixedly connected to the chamber cover 5 through the positioning pins 2, in order to avoid the second main body 3 interfering with the positioning pins 2 and thus affecting the movement of the second main body 3, the length of the second main body 3 is set to be less than that of the first main body 1, thereby ensuring that the second main body 3 can be completely placed between the first main body 1 and the top plate 7, improving the adaptability of the tooling to the top plate 7, the bushing 6, and the chamber cover 5.

[0054] Reference Figures 1a to 5As shown, this embodiment also provides an assembly device, which includes a tooling and a thin film deposition device. The tooling can be any tooling provided by this utility model. Since the specific structure and working principle of the tooling have been described in detail in the previous description, they will not be repeated here for the sake of brevity. The thin film deposition device includes a bushing 6, a chamber cover 5, and a top plate 7. When assembling the top plate 7, the first body 1 overlaps with the bushing 6 and is fixedly connected to the first body 1, the bushing 6, and the chamber cover 5 by a positioning pin 2. Then, the top plate 7 is fixed above the bushing 6.

[0055] The assembly equipment in this embodiment uses the tooling provided by this utility model, which helps to accurately align the centers of the bushing 6, the chamber cover 5, and the top plate 7, thereby improving the installation efficiency and quality of the assembly equipment.

[0056] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this utility model, and these modifications or substitutions should all be covered within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A tool for centering a bushing, characterized by, include: The first body and the positioning pin, wherein the first body has an overlapping portion on one side edge near the bushing, the overlapping portion being formed by an inward indentation at one end of the first body; When assembling the top plate, the overlapping part overlaps with the edge of the bushing, the positioning pin is fixedly connected to the first body and the chamber cover, and then the top plate is fixed above the bushing.

2. The tooling according to claim 1, characterized in that, The first body has an arc-shaped structure and extends circumferentially along the outer edge of the bushing.

3. The tooling according to any one of claims 1-2, characterized in that, The perimeter of the first body is one-eighth of the perimeter of the bushing.

4. The tooling according to any one of claims 1-2, characterized in that, There are two first bodies, and the two first bodies are respectively located on opposite sides of the bushing.

5. The tooling according to claim 1, characterized in that, The first main body is provided with through holes on both sides, and one end of the positioning pin passes through the through holes and is fixedly connected to the chamber cover.

6. The tooling according to claim 5, characterized in that, The other end of the positioning pin is located on the side of the first body near the top plate and engages with the limiting hole of the top plate.

7. The tooling according to claim 1, characterized in that, The tooling also includes a second body and a set screw, which are movably connected; When the top plate is disassembled, the second body is located between the first body and the top plate, one end of the set screw passes through the second body and abuts against the first body, and the set screw is rotated to drive the second body to move closer to the top plate.

8. The tooling according to claim 7, characterized in that, The second body is threadedly connected to the set screw.

9. The tooling according to claim 7, characterized in that, The second main body has an arc-shaped structure, and the length of the second main body is less than the length of the first main body.

10. An assembly device, characterized in that, include: The tooling is the tooling described in any one of claims 1-9; Thin film deposition equipment, including bushings, chamber covers, and top plates; When assembling the top plate, the first body overlaps with the bushing and is fixedly connected to the first body, the bushing and the chamber cover by a positioning pin, and then the top plate is fixed above the bushing.

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