A two-dimensional balanced motion device

Abstract

This application provides a two-dimensional balancing motion device, relating to the technical field of motion devices. The two-dimensional balancing motion device provided in this application includes: a base, a first-direction balancing mass driving device and a second-direction balancing mass driving device disposed on the base, a two-dimensional balancing mass block connected to the first-direction balancing mass driving device and the second-direction balancing mass driving device, a two-dimensional motion device disposed on the two-dimensional balancing mass block, and a driven component connected to the two-dimensional motion device; the two-dimensional balancing mass block is an integral structure; the first-direction balancing mass driving device is capable of driving the two-dimensional balancing mass block to move along a first direction, and the first-direction balancing mass driving device is configured to allow the two-dimensional balancing mass block to move along a second direction; the second-direction balancing mass driving device is capable of driving the two-dimensional balancing mass block to move along a second direction, and the second-direction balancing mass driving device is configured to allow the two-dimensional balancing mass block to move along the first direction.

Description

Technical Field

[0001] This specification relates to the technical field of motion devices, and in particular to a two-dimensional balance motion device. Background Technology

[0002] Two-dimensional motion devices refer to motion control systems capable of achieving precise movement in a first and / or second direction within a horizontal plane. With the development of semiconductor technology and advancements in process technology, the speed and acceleration requirements for two-dimensional motion devices are constantly increasing. Arranging balancing mass blocks can reduce or eliminate the additional impacts caused by high acceleration and deceleration in two-dimensional motion devices, thereby improving their accuracy. Stacked two-dimensional motion devices can have independent first and second balancing mass blocks respectively in the first and second directions; however, the first and second balancing mass blocks need to be designed separately according to the size and structure of the stacked two-dimensional motion device, resulting in complex structures and high assembly difficulty. Utility Model Content

[0003] This specification provides one or more embodiments of a two-dimensional balancing motion device, comprising: a base, a first-direction balancing mass driving device and a second-direction balancing mass driving device disposed on the base, a two-dimensional balancing mass block connected to the first-direction balancing mass driving device and the second-direction balancing mass driving device, a two-dimensional motion device disposed on the two-dimensional balancing mass block, and a driven member connected to the two-dimensional motion device; the two-dimensional balancing mass block is an integral structure; the first-direction balancing mass driving device is capable of driving the two-dimensional balancing mass block to move along a first direction, and the first-direction balancing mass driving device is configured to allow the two-dimensional balancing mass block to move along a second direction; the second-direction balancing mass driving device is capable of driving the two-dimensional balancing mass block to move along the second direction, and the second-direction balancing mass driving device is configured to allow the two-dimensional balancing mass block to move along the first direction; the two-dimensional motion device drives the driven member to move relative to the base along the first direction and / or the second direction.

[0004] In some embodiments, the first-direction balancing mass drive device and / or the second-direction balancing mass drive device are linear motors; the linear motor includes a coil assembly and a magnet assembly, one of the coil assembly and the magnet assembly is fixedly connected to the base, and the other of the coil assembly and the magnet assembly is fixedly connected to the two-dimensional balancing mass block; the magnet assembly is provided with a magnetic field space extending along the first direction and the second direction, the coil of the coil assembly is disposed in the magnetic field space, and the movable stroke of the magnet assembly relative to the coil assembly in the first direction and the second direction is greater than the maximum movable stroke of the two-dimensional balancing mass block in the first direction and the second direction; one or more balancing mass guide devices are also provided on the base, and the two-dimensional balancing mass block is air-floated on the balancing mass guide device.

[0005] In some embodiments, the two-dimensional motion device includes a first direction motion device and a second direction motion device; the first direction motion device includes: a first direction base disposed on the two-dimensional balancing mass block, a first direction guide device disposed on the first direction base, and a first direction driving device; the second direction motion device includes: a second direction base connected to the first direction guide device, a second direction guide device disposed on the second direction base, and a second direction driving device; the first direction driving device drives the second direction base to move along the first direction; the second direction driving device drives the driven component to move along the second direction.

[0006] In some embodiments, a vertical flexible connector is provided between the second direction driving device and the driven member; the vertical flexible connector is configured such that: the vertical flexible connector is rigid along the first direction and the second direction, and flexible along a third direction; the third direction is perpendicular to the first direction and the second direction; the vertical flexible connector includes a first connecting portion, a second connecting portion, and a vertical flexible spring connecting the first connecting portion and the second connecting portion; the first connecting portion is connected to the second direction driving device; the driven member includes a driven substrate, and the second connecting portion is connected to the driven substrate.

[0007] In some embodiments, the device further includes: a first direction absolute position measuring device and a second direction absolute position measuring device; the first direction absolute position measuring device is used to measure the position of the driven member relative to the base in a first direction; the second direction absolute position measuring device is used to measure the position of the driven member relative to the base in a second direction.

[0008] In some embodiments, the first direction absolute position measuring device includes: a first absolute position measuring tape disposed on the base and capable of moving relative to the base along the second direction, and a first absolute position measuring head fixedly connected to the second direction base, the first absolute position measuring tape extending along the first direction; the second direction absolute position measuring device includes: a second absolute position measuring tape disposed on the base and capable of moving relative to the base along the first direction, and a second absolute position measuring head fixedly connected to the mover of the second direction driving device, the second absolute position measuring tape extending along the second direction.

[0009] In some embodiments, the first direction absolute position measuring device further includes a first lower guide rail assembly disposed on the base, the first lower guide rail assembly extending in the second direction; a first crossbeam movable along the first lower guide rail assembly, the first crossbeam having the first absolute position measuring scale disposed on the first crossbeam; a first upper guide rail assembly disposed on the first crossbeam; a first adapter connected to a slider of the first upper guide rail assembly, the first adapter also being fixedly connected to the second direction base, the first adapter having the first absolute position measuring head disposed on the first adapter; and / or, the second direction absolute position measuring device further includes: a second lower guide rail assembly disposed on the base, the second lower guide rail assembly extending in the first direction; a second crossbeam movable along the second lower guide rail assembly, the second crossbeam having the second absolute position measuring scale disposed on the second crossbeam; a second upper guide rail assembly disposed on the second crossbeam; a second adapter connected to a slider of the second upper guide rail assembly, the second adapter also being fixedly connected to a mover of the second direction driving device, the second adapter having the second absolute position measuring head disposed on the second adapter.

[0010] In some embodiments, the first direction absolute position measuring device and the second direction absolute position measuring device further include: a vertically rotating flexible connector; the vertically rotating flexible connector includes a third connecting portion, a fourth connecting portion, a central portion, a third vertically rotating flexible spring connecting the third connecting portion and the central portion, and a fourth vertically rotating flexible spring connecting the fourth connecting portion and the central portion; the third connecting portion is fixedly connected to the first crossbeam or the second crossbeam, and the fourth connecting portion is fixedly connected to the slider of the first lower guide rail assembly or the slider of the second lower guide rail assembly; the vertically rotating flexible connector is configured to be rigid in the first direction and the second direction, and flexible in a third direction; the third direction is perpendicular to the first direction and the second direction.

[0011] In some embodiments, the base includes a measuring base with a groove formed thereon; the measuring base is disposed on the outer side of the two-dimensional balance mass block along the second direction, the first crossbeam is disposed at the groove, the first lower guide rail assembly is disposed on the sidewall of the groove, and the second lower guide rail assembly is disposed on the surface of the measuring base; or, the measuring base is disposed on the outer side of the two-dimensional balance mass block along the first direction, the second crossbeam is disposed at the groove, the second lower guide rail assembly is disposed on the sidewall of the groove, and the first lower guide rail assembly is disposed on the surface of the measuring base.

[0012] In some embodiments, both the first direction absolute position measuring device and the second direction absolute position measuring device include: a long strip mirror disposed on the driven member and a laser interferometer that matches the long strip mirror and is disposed on the base.

[0013] The beneficial effects that the embodiments of this specification may bring include, but are not limited to: (1) reducing or eliminating additional impact vibrations generated by the two-dimensional motion device during high acceleration and high deceleration motion through the integrated two-dimensional balancing mass block; (2) ensuring that the motion of the integrated two-dimensional balancing mass block in the first and second directions does not interfere with each other through the arrangement of the first-direction balancing mass drive device and the second-direction balancing mass drive device; (3) eliminating the need to arrange decoupling mechanisms between the first-direction balancing mass drive device and the two-dimensional balancing mass block, and between the second-direction balancing mass drive device and the two-dimensional balancing mass block, based on the arrangement of the first-direction balancing mass drive device and the second-direction balancing mass block; (4) achieving third-direction decoupling between the driven component and the second-direction drive device through the vertical flexible connector; (5) solving the problem of difficulty in measuring the absolute position of the mover in the two-dimensional motion device by arranging the first-direction absolute position measuring device and the second-direction absolute position measuring device. It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced can be any one or a combination of the above, or any other possible beneficial effects. Attached Figure Description

[0014] This specification will be further described by way of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. The same numbers in the drawings denote the same structures or steps.

[0015] Figure 1 This is a schematic diagram of a two-dimensional balancing motion device according to some embodiments of this specification.

[0016] Figure 2 This is a schematic diagram of the base of a two-dimensional balancing motion device according to some embodiments of this specification.

[0017] Figure 3 This is a schematic diagram of the base and two-dimensional balancing mass block of a two-dimensional balancing motion device according to some embodiments of this specification.

[0018] Figure 4 This is a schematic diagram of a linear motor for a two-dimensional balancing motion device according to some embodiments of this specification.

[0019] Figure 5 This is a schematic diagram of the principle of a linear motor for a two-dimensional balancing motion device according to some embodiments of this specification.

[0020] Figure 6 This is a schematic diagram of a planar grating of a two-dimensional balancing motion device according to some embodiments of this specification.

[0021] Figure 7 This is a schematic diagram of a two-dimensional motion device according to some embodiments of the present specification.

[0022] Figure 8 This is a schematic diagram of the vertical flexible connector of a two-dimensional balancing motion device according to some embodiments of this specification.

[0023] Figure 9 , Figure 10 This is a schematic diagram of the first direction absolute position measuring device of a two-dimensional balance motion device according to some embodiments of this specification.

[0024] Figure 11 This is a schematic diagram of a vertically rotating flexible connector according to some embodiments of this specification.

[0025] Figure 12 This is a schematic diagram of a vertically rotating flexible connector according to other embodiments of this specification.

[0026] Figure 13 This is a schematic diagram of the second-direction absolute position measuring device of a two-dimensional balance motion device according to some embodiments of this specification.

[0027] Figure 14 , Figure 15 This is an assembly diagram of a first-direction absolute position measuring device and a second-direction absolute position measuring device according to other embodiments of this specification.

[0028] Figure 16 This is a schematic diagram of a first-direction absolute position measuring device and a second-direction absolute position measuring device according to other embodiments of this specification.

[0029] In the diagram, the markings are as follows: 100 Base; 101 First-direction balancing mass driving device; 102 Second-direction balancing mass driving device; 103 First-direction balancing mass measuring device; 104 Second-direction balancing mass measuring device; 105 Balancing mass guiding device; 200 Two-dimensional balancing mass block; 300 Two-dimensional motion device; 310 First-direction motion device; 311 First-direction base; 312 First-direction guiding device; 313 First-direction driving device; 320 Second-direction motion device; 321 Second-direction base; 321a Sidewall; 322 Second-direction guiding device; 323 Second-direction driving device; 400 Driven component; 401 Driven substrate; 500 Vertical flexible connector; 501 First connecting part; 502 Second connecting part; 503 Vertical flexible spring; 600 First-direction absolute position measuring device; 602 First absolute position measuring scale; 603 604 First absolute position measuring head; 605 First lower guide rail assembly; 606 First upper guide rail assembly; 607 First adapter; 700 Second direction absolute position measuring device; 702 Second absolute position measuring scale; 703 Second absolute position measuring head; 704 Second lower guide rail assembly; 705 Second crossbeam; 706 Second upper guide rail assembly; 707 Second adapter; 800 Vertical rotation flexible connector; 801 Third connecting part; 802 Fourth connecting part; 803 Center part; 804 Third vertical rotation flexible spring; 805 Fourth vertical rotation flexible spring; 901 Long strip mirror; 902 Laser interferometer; 1000 Two-dimensional balanced mass block limiting device; 1000a First direction limiting device; 1000b Second direction limiting device; 1001 Measuring base; 1002 Groove; 1011 Coil assembly; 1012 Magnet assembly. Detailed Implementation

[0030] To more clearly illustrate the technical solutions of the embodiments in this specification, the embodiments will be described in detail below with reference to the accompanying drawings. Obviously, the content described below are some examples or embodiments of this specification. For those skilled in the art, without creative effort, the technical solutions or means disclosed in this specification can be applied to other scenarios based on this technical content.

[0031] It should be understood that the terms "system," "device," "equipment," "part" and / or "component," "unit" and / or "module" used in this specification are a method of distinguishing different components, elements, parts, sections, or assemblies at different levels. However, if other words can achieve the same purpose, they may be replaced by other expressions.

[0032] Unless otherwise specified, the technical terms used to describe components, elements, etc. in this specification are not singular but may include plural. Generally speaking, terms such as "comprising" or "including" only indicate that explicitly identified steps, elements, or components are included, and these steps, elements, and components do not constitute an exclusive list, as the described method or apparatus may also include other steps or components.

[0033] In the description of this specification, it should be understood that the directional descriptions, such as up, down, front, back, left, and right, indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. These descriptions are for the convenience of describing this application and for simplification, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. In the description of this specification, unless otherwise expressly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly. Those skilled in the art can reasonably determine the specific meaning of the above terms in this specification in conjunction with the specific content of the technical solution.

[0034] Two-dimensional motion devices refer to motion control systems that can achieve precise movement in a first direction (e.g., the X-axis direction) and / or a second direction (e.g., the Y-axis direction) within a horizontal plane. The functions of two-dimensional motion devices can include trajectory control, positioning adjustment, and complex path planning. They can be applied to precision machining, experimental testing, and automated production lines, especially in semiconductor manufacturing equipment.

[0035] In some related embodiments, the two-dimensional motion device may include a first-direction motion device (e.g., an X-axis motion device) and a second-direction motion device (e.g., a Y-axis motion device). The second-direction motion device can be used to drive the driven component to move along the second direction, and the first-direction motion device can be used to drive the second-direction motion device and the driven component together to move along the first direction, thereby realizing the two-dimensional motion of the driven component.

[0036] With the development of semiconductor technology and the advancement of process technology, the speed and acceleration requirements for two-dimensional motion devices are constantly increasing. In some related embodiments, arranging balancing mass blocks can reduce or eliminate the additional impact caused by high acceleration and high deceleration of the two-dimensional motion device, thereby improving the accuracy of the two-dimensional motion device. In some related embodiments, stacked two-dimensional motion devices can have independent first and second balancing mass blocks respectively arranged in the first and second directions. However, the first and second balancing mass blocks need to be designed separately according to the size and structure of the stacked two-dimensional motion device, resulting in complex structures and high assembly difficulty.

[0037] Based on this, one or more embodiments of this specification provide a two-dimensional balancing motion device, which includes a two-dimensional motion device and an integrated balancing mass block, and solves the coupling problem of the two one-dimensional motions involved in the integrated balancing mass block, without involving a complex decoupling mechanism.

[0038] Figure 1 This is a schematic diagram of a two-dimensional balance motion device according to some embodiments of this specification. Figure 2 This is a schematic diagram of the base of a two-dimensional balancing motion device according to some embodiments of this specification. Figure 3 This is a schematic diagram of the base and two-dimensional balancing mass block of a two-dimensional balancing motion device according to some embodiments of this specification. See also Figures 1 to 3 As shown, in one or more embodiments of this specification, the two-dimensional balancing motion device may include: a base 100, a first-direction balancing mass drive device 101 and a second-direction balancing mass drive device 102 disposed on the base 100, a two-dimensional balancing mass block 200 connected to the first-direction balancing mass drive device 101 and the second-direction balancing mass drive device 102, a two-dimensional motion device 300 disposed on the two-dimensional balancing mass block 200, and a driven component 400 connected to the two-dimensional motion device 300.

[0039] In some embodiments, the two-dimensional motion device 300 is used to drive the driven member 400 to perform two-dimensional motion, such as motion along a first direction X, motion along a second direction Y, and a combination of motion along the first direction X and the second direction Y. In some embodiments, the driven member 400 may be an object or device that needs to be moved, or it may be a platform or platform mechanism for supporting the object or device that needs to be moved.

[0040] In some embodiments, the two-dimensional balancing mass block 200 is used to arrange the two-dimensional motion device 300, and the two-dimensional balancing mass block 200 is configured to perform a movement opposite to the movement direction of the driven member 400, so as to reduce or eliminate the additional impact caused by the high acceleration and high deceleration of the driven member 400. In some embodiments, the first direction balancing mass drive device 101 and the second direction balancing mass drive device 102 are used to drive the balancing mass block 200 to perform two-dimensional motion, which may be a movement opposite to the movement direction of the driven member 400.

[0041] In some embodiments, the two-dimensional balancing mass block 200 is a one-piece structure. For example, the two-dimensional balancing mass block 200 can be integrally molded. For example, the two-dimensional balancing mass block 200 may include multiple two-dimensional balancing mass block components fixedly connected to each other.

[0042] In some embodiments, the base 100 supports the aforementioned components, such as the first-direction balancing mass drive device 101, the second-direction balancing mass drive device 102, the two-dimensional balancing mass block 200, the two-dimensional motion device 300, and the driven member 400. The base 100 allows the two-dimensional balancing mass block 200 to move relative to the base 100, thereby reducing or eliminating additional impacts caused by the high-acceleration or high-deceleration motion of the driven member 400. In some embodiments, the mass of the two-dimensional balancing mass block 200 is greater than the mass of the driven member 400, so that the two-dimensional balancing mass block 200 only needs to move a small displacement to reduce or eliminate additional impacts caused by the large-stroke motion of the driven member 400.

[0043] In some related embodiments, such as those of a stacked two-dimensional motion device, the balancing mass block can be split, such as including a first-direction balancing mass block and a second-direction balancing mass block. The first-direction balancing mass block and the second-direction balancing mass block move independently. The first-direction balancing mass block is used to reduce or eliminate the impact force formed by the component of the driven member's motion in the first direction, and the second-direction balancing mass block is used to reduce or eliminate the impact force formed by the component of the driven member's motion in the second direction. The first balancing mass block can be driven by a first balancing mass block driving mechanism, and the second balancing mass block can be driven by a second balancing mass block driving mechanism.

[0044] In the above embodiments, the split-type balance mass block structure has relatively many components, making installation and debugging difficult. If an integrated balance mass block is to be further set in the embodiment of the stacked two-dimensional motion device, the decoupling problem between different drives needs to be solved. Specifically, due to the asynchronous movement of the two sides in the first direction and / or the two sides in the second direction of the integrated balance mass block, there may be interference between the first balance mass block drive mechanism and the second balance mass block drive mechanism. In order to solve the interference problem, it may be necessary to arrange a complex decoupling mechanism for decoupling in the first direction and / or the second direction to avoid jamming of the integrated balance mass block.

[0045] In one or more embodiments of this specification, a first-direction balancing mass drive device 101 is capable of driving a two-dimensional balancing mass block 200 to move along a first direction X, and the first-direction balancing mass drive device 101 is configured to allow the two-dimensional balancing mass block 200 to move along a second direction Y. In some embodiments, a second-direction balancing mass drive device 102 is capable of driving the two-dimensional balancing mass block 200 to move along a second direction Y, and the second-direction balancing mass drive device 102 is configured to allow the two-dimensional balancing mass block 200 to move along the first direction X.

[0046] Based on the above-described configuration in one or more embodiments of this specification, when the first directional balancing mass drive device 101 drives the integrated two-dimensional balancing mass block 200 to move along the first direction X, the second directional balancing mass drive device 102 will not interfere with its movement in the first direction X; when the second directional balancing mass drive device 102 drives the integrated two-dimensional balancing mass block 200 to move along the second direction Y, the first directional balancing mass drive device 101 will not interfere with its movement in the second direction Y; when the first directional balancing mass drive device 101 and the second directional balancing mass drive device 102 simultaneously drive the two-dimensional balancing mass block 200, since the first directional balancing mass drive device 101 provides the degree of freedom of movement in the second direction Y, and the second directional balancing mass drive device 102 provides the degree of freedom of movement in the first direction X, the two drives of the two-dimensional balancing mass block 200 will not interfere with each other. Therefore, there is no need to arrange a decoupling mechanism between the first directional balancing mass drive device 101 and the two-dimensional balancing mass block 200 or between the second directional balancing mass drive device 102 and the two-dimensional balancing mass block 200. The embodiments in this specification achieve structures in different directions by modifying the drive device itself. Compared with the method of arranging decoupling mechanisms, the installation and debugging are more convenient and the structure is simpler.

[0047] Figure 4 This is a schematic diagram of a linear motor for a two-dimensional balancing motion device according to some embodiments of this specification. Figure 5 This is a schematic diagram illustrating the principle of a linear motor for a two-dimensional balancing motion device according to some embodiments shown in this specification. See also... Figure 4 , Figure 5 As shown, in one or more embodiments of this specification, the first directional balancing mass drive device 101 and / or the second directional balancing mass drive device 102 are linear motors.

[0048] In some embodiments, the linear motor includes a coil assembly 1011 and a magnet assembly 1012, one of which is fixedly connected to a base 100, and the other of which is fixedly connected to a two-dimensional balancing mass block 200.

[0049] In some embodiments, the magnet assembly 1012 is provided with a magnetic field space extending along a first direction X and a second direction Y. The coil of the coil assembly 1011 is disposed within the magnetic field space. The movable stroke of the magnet assembly 1012 relative to the coil assembly 1011 in the first direction X and the second direction Y is greater than the maximum movable stroke of the two-dimensional balancing mass block 200 in the first direction X and the second direction Y. For example, the movable stroke of the magnet assembly 1012 relative to the coil assembly 1011 in the first direction X is greater than the maximum movable stroke of the two-dimensional balancing mass block 200 in the first direction X. For example, the movable stroke of the magnet assembly 1012 relative to the coil assembly 1011 in the second direction Y is greater than the maximum movable stroke of the two-dimensional balancing mass block 200 in the second direction Y.

[0050] For example, the coil assembly 1011 of the first-direction balancing mass drive device 101 is fixedly connected to the base 100, and the magnet assembly 1012 of the first-direction balancing mass drive device 101 is fixedly connected to the two-dimensional balancing mass block 200. In this embodiment, when the first-direction balancing mass drive device 101 is working, its magnet assembly 1012 is driven relative to the coil assembly 1011 in the first direction X, and simultaneously has a movable stroke in the second direction Y. In other words, its magnet assembly 1012 can move freely within the movable stroke in the second direction Y while being driven in the first direction X. Since this movable stroke is greater than the maximum movement stroke of the two-dimensional balancing mass block 200 in the second direction Y, it will not affect the movement of the two-dimensional balancing mass block 200 in the second direction Y under any circumstances.

[0051] For example, the coil assembly 1011 of the second-direction balancing mass drive device 102 is fixedly connected to the base 100, and the magnet assembly 1012 of the second-direction balancing mass drive device 102 is fixedly connected to the two-dimensional balancing mass block 200. In this embodiment, when the second-direction balancing mass drive device 102 is working, its magnet assembly 1012 is driven relative to the coil assembly 1011 in the second direction Y, while having a movable stroke in the first direction X. In other words, its magnet assembly 1012 can be driven in the second direction Y while moving freely within the movable stroke in the first direction X. Since this movable stroke is greater than the maximum movement stroke of the two-dimensional balancing mass block 200 in the first direction X, it will not affect the movement of the two-dimensional balancing mass block 200 in the first direction X under any circumstances.

[0052] In some embodiments, see Figure 5As shown, the magnet assembly 1012 of the linear motor can be C-shaped or H-shaped. In some embodiments, an accommodating space A is formed inside the magnet assembly 1012 of the linear motor, and the coil of the coil assembly 1011 in the linear motor is arranged in the accommodating space A. In some embodiments, the accommodating space A can have the aforementioned magnetic field space.

[0053] In some embodiments, the accommodating space A of the first-direction balancing mass drive device 101 can be disposed through the first direction X. In some embodiments, the accommodating space A of the second-direction balancing mass drive device 102 can be disposed through the second direction Y.

[0054] In some embodiments, the number of first-direction balancing mass drive devices 101 can be one or more, for example, two. In some embodiments, the number of second-direction balancing mass drive devices 102 can be one or more, for example, two.

[0055] In one or more embodiments of this specification, see Figure 2 As shown, one or more balancing mass guiding devices 105 are also provided on the base 100, and the two-dimensional balancing mass block 200 is air-floating on the balancing mass guiding device 105. In some embodiments, the balancing mass guiding device 105 is used to provide support for the two-dimensional balancing mass block 200. In some embodiments, the balancing mass guiding device 105 reduces the motion friction of the two-dimensional balancing mass block 200 and provides higher motion accuracy. In some embodiments, four balancing mass guiding devices 105 may be included. In some embodiments, the four balancing mass guiding devices 105 may be arranged at the four corners of the rectangular base 100.

[0056] It should be noted that in some other embodiments, the first direction balancing mass drive device 101 and the second direction balancing mass drive device 102 may also be other types of drive devices, such as a magnetic levitation planar motor. When the range of the magnetic field is greater than the travel distance of the two-dimensional balancing mass block 200, the motor mover suspended on the motor stator will not be restricted in the first direction X and the second direction Y.

[0057] In one or more embodiments of this specification, see Figure 2 As shown, the two-dimensional balancing motion device may include: a first-direction balancing mass measuring device 103 and a second-direction balancing mass measuring device 104. In some embodiments, the first-direction balancing mass measuring device 103 is used to measure the position of the two-dimensional balancing mass block 200 relative to the base 100 in the first direction X. In some embodiments, the second-direction balancing mass measuring device 104 is used to measure the position of the two-dimensional balancing mass block 200 relative to the base 100 in the second direction Y.

[0058] In some embodiments, see Figure 6 As shown, the first directional balance mass measuring device 103 and / or the second directional balance mass measuring device 104 are planar capacitive grids.

[0059] In one or more embodiments of this specification, see Figure 2 As shown, a two-dimensional balancing mass block limiting device 1000 may also be provided on the base 100. In some embodiments, the two-dimensional balancing mass block limiting device 1000 may include a two-dimensional balancing mass block first direction limiting device 1000a for limiting the maximum displacement of the two-dimensional balancing mass block 200 in the first direction X. In some embodiments, the two-dimensional balancing mass block limiting device 1000 may include a two-dimensional balancing mass block second direction limiting device 1000b for limiting the maximum displacement of the two-dimensional balancing mass block 200 in the second direction Y.

[0060] In some embodiments, the number of first-direction limiting devices 1000a for the two-dimensional balancing mass block 200 can be two, respectively used to limit the maximum displacement of the two-dimensional balancing mass block 200 in the positive and negative directions of the first direction X. In some embodiments, the number of second-direction limiting devices 1000b for the two-dimensional balancing mass block 200 can be two, respectively used to limit the maximum displacement of the two-dimensional balancing mass block 200 in the positive and negative directions of the second direction Y.

[0061] In one or more embodiments of this specification, see Figure 7 As shown, the two-dimensional motion device 300 includes a first direction motion device 310 and a second direction motion device 320.

[0062] In some embodiments, the first direction motion device 310 includes: a first direction base 311 disposed on the two-dimensional balance mass block 200, a first direction guide device 312 disposed on the first direction base 311, and a first direction drive device 313. In some embodiments, the first direction drive device 313 drives the second direction motion device 320 (e.g., the second direction base 321) to move along the first direction X.

[0063] In some embodiments, the first direction base 311 has a strip-shaped structure. In some embodiments, the first direction base 311 may extend in the first direction X. In some embodiments, there are two first direction bases 311, which are respectively disposed at both ends of the second direction motion device 320 (e.g., the second direction base 321) in the second direction Y.

[0064] In some embodiments, the first directional guide device 312 may include a first directional guide rail disposed on a first directional base 311 and a first directional slider that matches the first directional guide rail, wherein the first directional slider is fixedly connected to a second directional motion device 320 (e.g., a second directional base 321). In some embodiments, the number of first directional guide devices 312 may be two, with the two first directional guide devices 312 respectively disposed on two first directional bases 311.

[0065] In some embodiments, the first direction driving device 313 may include a first direction driving stator and a first direction driving mover, wherein the first direction driving stator is fixedly connected to a first direction base 311, and the first direction driving mover is fixedly connected to a second direction motion device 320 (e.g., a second direction base 321). In some embodiments, the number of first direction driving devices 313 may be two.

[0066] In some embodiments, the second direction motion device 320 includes: a second direction base 321 connected to the first direction guide device 312, a second direction guide device 322 disposed on the second direction base 321, and a second direction drive device 323. In some embodiments, the second direction drive device 323 drives the driven member 400 to move along the second direction Y.

[0067] In some embodiments, the second-direction base 321 has a frame-like structure, such as a rectangular frame-like structure. In some embodiments, the second-direction base 321 has a portion extending in the second direction Y. In some embodiments, the second-direction base 321 has two parallel portions extending in the second direction Y.

[0068] In some embodiments, the second direction guide device 322 may include a second direction guide rail disposed on the second direction base 321 and a second direction slider that matches the second direction guide rail, wherein the second direction slider is directly or indirectly fixedly connected to the driven member 400. In some embodiments, the number of second direction guide devices 322 may be two, and the two second direction guide devices 322 are respectively disposed on the two parallel portions of the second direction base 321 that extend in the second direction Y.

[0069] In some embodiments, see Figure 7 As shown, the frame-shaped second-direction base 321 has two sidewalls 321a extending in the second direction Y. In some embodiments, a second-direction guide device 322 may be disposed on the sidewalls 321a; for example, two second-direction guide devices 322 may be disposed on two oppositely arranged sidewalls 321a. In other embodiments, the second-direction guide device 322 may also be disposed on the upper surface of the frame-shaped second-direction base 321.

[0070] It should be noted that if the second directional guide device 322 is disposed on the upper surface of the second directional base 321 with a frame-shaped structure, the upper surface of the second directional base 321 requires precise machining to ensure that the two second directional guide devices 322 have a more accurate parallelism. In some embodiments, the second directional guide device 322 is disposed on the side wall 321a (e.g., the inner wall of the frame-shaped structure), and the parallelism of the two second directional guide devices 322 can be adjusted by adjusting the positions of the two ends of the second directional guide rail of the second directional guide device 322, thereby reducing the machining requirements of the second directional base 321.

[0071] In some embodiments, the second direction driving device 323 may include a second direction driving stator and a second direction driving mover, wherein the second direction driving stator is fixedly connected to the second direction base 321, and the second direction driving mover is directly or indirectly fixedly connected to the driven member 400. In some embodiments, the number of second direction driving devices 323 may be two.

[0072] In one or more embodiments of this specification, see Figure 7 , Figure 8 As shown, a vertical flexible connector 500 is provided between the second direction driving device 323 and the driven member 400. In some embodiments, the vertical flexible connector 500 is configured such that it is rigid along the first direction X and the second direction Y, and flexible along the third direction Z, wherein the third direction Z is perpendicular to the first direction X and the second direction Y.

[0073] In some embodiments, the vertical flexible connector 500 includes a first connecting portion 501, a second connecting portion 502, and a vertical flexible spring 503 connecting the first connecting portion 501 and the second connecting portion 502. In some embodiments, the vertical flexible spring 503 has a plate-like structure. In some embodiments, the vertical flexible spring 503 may be arranged parallel to or substantially parallel to the XY plane. In some embodiments, see [link to relevant documentation]. Figure 8 As shown, since the vertical flexible spring 503 is arranged parallel to or approximately parallel to the XY plane and can extend in the second direction Y, it is difficult to compress in the first direction X, thus having rigidity in the first direction X; it is difficult to twist in the second direction Y, thus having rigidity in the second direction Y; it can provide flexibility in the third direction Z through deformation such as bending.

[0074] In some embodiments, the vertical flexible connector 500 may include a plurality of first connecting portions 501 and a second connecting portion 502. In some embodiments, each first connecting portion 501 is connected to the second connecting portion 502 via one or more vertical flexible springs 503. See, for example... Figure 8 As shown, the vertical flexible connector 500 may include three first connecting parts 501 and one second connecting part 502. The three first connecting parts 501 are arranged sequentially in the second direction Y. Each first connecting part 501 can be connected to the second connecting part 502 through two vertical flexible springs 503. The two vertical flexible springs 503 can be arranged sequentially in the third direction Z and can be arranged in parallel.

[0075] In some embodiments, the first connecting portion 501 is connected to the second directional driving device 323. In some embodiments, multiple first connecting portions 501 help reduce the positioning accuracy when the vertical flexible connector 500 is connected to the second directional driving device 323.

[0076] In some embodiments, the second connecting portion 502 is connected to the driven member 400. In some embodiments, the driven member 400 includes a driven substrate 401, and the second connecting portion 502 is connected to the driven substrate 401.

[0077] In one or more embodiments of this specification, see Figure 7 As shown, the two-dimensional balancing motion device may include: a first-direction absolute position measuring device 600 and a second-direction absolute position measuring device 700. In some embodiments, the first-direction absolute position measuring device 600 is used to measure the position of the driven member 400 relative to the base 100 in a first direction X. In some embodiments, the second-direction absolute position measuring device 700 is used to measure the position of the driven member 400 relative to the base 100 in a second direction Y.

[0078] In some embodiments, see Figure 7 and combined Figure 9 , Figure 10 As shown, the first direction absolute position measuring device 600 includes: a first absolute position measuring tape 602 disposed on the base 100 and capable of moving relative to the base 100 along the second direction Y, and a first absolute position measuring reading head 603 fixedly connected to the second direction base 321. The first absolute position measuring tape 602 extends along the first direction X.

[0079] In some embodiments, see Figure 7 and combined Figure 13 As shown, the second absolute position measuring device 700 includes: a second absolute position measuring tape 702 disposed on the base 100 and capable of moving relative to the base 100 along the first direction X, and a second absolute position measuring reading head 703 fixedly connected to the mover of the second direction driving device 323, wherein the second absolute position measuring tape 702 extends along the second direction Y.

[0080] In one or more embodiments of this specification, the first direction absolute position measuring device 600 further includes: a first lower guide rail assembly 604, a first crossbeam 605, a first upper guide rail assembly 606, and a first adapter 607.

[0081] In some embodiments, a first lower guide rail assembly 604 is disposed on a base 100 and extends in a second direction Y.

[0082] In some embodiments, the first crossbeam 605 is movable along the first lower guide rail assembly 604. Exemplarily, the first lower guide rail assembly 604 may include a first lower guide rail and a first lower slider that mates with the first lower guide rail, wherein the first lower guide rail may be fixedly connected to the base 100, and the first lower slider may be fixedly connected to the first crossbeam 605, thereby allowing the first crossbeam 605 to move along the first lower guide rail assembly 604. In some embodiments, the first crossbeam 605 is provided with a first absolute position measuring scale 602.

[0083] In some embodiments, the first upper guide rail assembly 606 is disposed on the first crossbeam 605. For example, the first upper guide rail assembly 606 may include a first upper guide rail and a first upper slider that matches the first upper guide rail, wherein the first upper guide rail may be fixedly connected to the first crossbeam 605, and the first upper slider may be fixedly connected to the first adapter 607.

[0084] In some embodiments, the first adapter 607 is also fixedly connected to the second direction base 321, and the first adapter 607 is provided with a first absolute position measuring head 603.

[0085] When the second direction base 321 carries the driven component 400 to move along the first direction X, the second direction base 321 drives the first absolute position measuring head 603 to move along the first direction X through the first adapter 607, thereby reading the value on the first absolute position measuring scale 602 to measure the position of the driven component 400 relative to the base 100 in the first direction X.

[0086] In one or more embodiments of this specification, the second direction absolute position measuring device 700 further includes: a second lower guide rail assembly 704, a second crossbeam 705, a second upper guide rail assembly 706, and a second adapter 707.

[0087] In some embodiments, a second lower guide rail assembly 704 is disposed on a base 100 and extends in a first direction X.

[0088] In some embodiments, the second crossbeam 705 is movable along the second lower guide rail assembly 704. Exemplarily, the second lower guide rail assembly 704 may include a second lower guide rail and a second lower slider that mates with the second lower guide rail, wherein the second lower guide rail may be fixedly connected to the base 100, and the second lower slider may be fixedly connected to the second crossbeam 705, thereby allowing the second crossbeam 705 to move along the second lower guide rail assembly 704. In some embodiments, the second crossbeam 705 is provided with a second absolute position measuring scale 702.

[0089] In some embodiments, the second upper guide rail assembly 706 is disposed on the second crossbeam 705. Exemplarily, the second upper guide rail assembly 706 may include a second upper guide rail and a second upper slider that matches the second upper guide rail, wherein the second upper guide rail may be fixedly connected to the second crossbeam 705, and the second upper slider may be fixedly connected to the second adapter 707.

[0090] In some embodiments, the second adapter 707 is also fixedly connected to the mover of the second direction drive device 323, and the second adapter 707 is provided with a second absolute position measuring head 703.

[0091] When the mover of the second direction drive device 323 carries the driven member 400 to move along the second direction Y, the mover of the second direction drive device 323 drives the second absolute position measuring head 703 to move along the second direction Y through the second adapter 707, thereby reading the value on the second absolute position measuring scale 702 to measure the position of the driven member 400 relative to the base 100 in the second direction Y.

[0092] In one or more embodiments of this specification, the first-direction absolute position measuring device 600 and the second-direction absolute position measuring device 700 further include a vertically rotating flexible connector 800. In some embodiments, the vertically rotating flexible connector 800 is configured to be rigid in the first direction X and the second direction Y, and flexible about a third direction Z, wherein the third direction Z is perpendicular to the first direction X and the second direction Y. In some embodiments, the vertically rotating flexible connector 800 is used to achieve rotational decoupling about the third direction Z.

[0093] In some embodiments, the vertically rotating flexible connector 800 includes a third connecting portion 801, a fourth connecting portion 802, a central portion 803, a third vertically rotating flexible spring 804 connecting the third connecting portion 801 and the central portion 803, and a fourth vertically rotating flexible spring 805 connecting the fourth connecting portion 802 and the central portion 803.

[0094] In some embodiments, the third connecting portion 801 is C-shaped. In some embodiments, the fourth connecting portion 802 is C-shaped. In some embodiments, an accommodating space for receiving the central portion 803 is formed between the third connecting portion 801 and the fourth connecting portion 802. In some embodiments, the accommodating space between the third connecting portion 801 and the fourth connecting portion 802 may be rectangular. In some embodiments, the central portion 803 may have a columnar structure. In some embodiments, the central portion 803 may have a cylindrical structure. In other embodiments, the central portion 803 may have a prism-like structure, such as a hexagonal prism.

[0095] In some embodiments, the number of third vertically rotating flexible springs 804 can be one, two, or more, such as three. In some embodiments, the number of fourth vertically rotating flexible springs 805 can be one, two, or more, such as three. In some embodiments, the shape of the central portion 803 can be selected based on the number of third vertically rotating flexible springs 804 and the number of fourth vertically rotating flexible springs 805. For example, if the total number of third vertically rotating flexible springs 804 and fourth vertically rotating flexible springs 805 is six, the shape of the central portion 803 can be selected as a hexagonal prism; if the total number of third vertically rotating flexible springs 804 and fourth vertically rotating flexible springs 805 is eight, the shape of the central portion 803 can be selected as an octagonal prism, and so on.

[0096] In some embodiments, there may be gaps between the plurality of third vertically rotating flexible springs 804. In some embodiments, the plurality of third vertically rotating flexible springs 804 may be arranged in parallel, or there may be an angle between the plurality of third vertically rotating flexible springs 804. In some embodiments, there may be gaps between the plurality of fourth vertically rotating flexible springs 805. In some embodiments, the plurality of fourth vertically rotating flexible springs 805 may be arranged in parallel, or there may be an angle between the plurality of fourth vertically rotating flexible springs 805.

[0097] In some embodiments, the third connecting part 801 is fixedly connected to the first crossbeam 605 or the second crossbeam 705, and the fourth connecting part 802 is fixedly connected to the slider of the first lower guide rail assembly 604 or the slider of the second lower guide rail assembly 704.

[0098] For example, see Figure 9 , Figure 10 , combined Figure 11 , Figure 12 As shown, the third connecting part 801 of the vertical rotating flexible connector 800 is fixedly connected to the first crossbeam 605, and the fourth connecting part 802 is fixedly connected to the slider (such as the aforementioned first lower slider) of the first lower guide rail assembly 604, so as to realize the rotational decoupling between the first crossbeam 605 and the first lower guide rail assembly 604.

[0099] For example, see Figure 13 , combined Figure 11 , Figure 12 As shown, the third connecting part 801 of the vertical rotating flexible connector 800 is fixedly connected to the second crossbeam 705, and the fourth connecting part 802 is fixedly connected to the slider (such as the aforementioned second lower slider) of the second lower guide rail assembly 704, so as to realize the rotational decoupling between the second crossbeam 705 and the second lower guide rail assembly 704.

[0100] In one or more embodiments of this specification, the two-dimensional balancing motion device may include two first-direction absolute position measuring devices 600, which are respectively disposed on both sides of the two-dimensional balancing mass block 200 in the second direction Y. In one or more embodiments of this specification, the two-dimensional balancing motion device may include two second-direction absolute position measuring devices 700, which are respectively disposed on both sides of the second-direction base 321 in the first direction X.

[0101] In one or more embodiments of this specification, the base 100 includes a measuring base 1001, on which a groove 1002 is formed.

[0102] In some embodiments, see Figure 7 As shown, the measuring base 1001 is disposed on the outer side of the two-dimensional balancing mass block 200 along the second direction Y. The first crossbeam 605 is disposed at the groove 1002, the first lower guide rail assembly 604 is disposed on the side wall of the groove 1002, and the second lower guide rail assembly 704 is disposed on the surface of the measuring base 1001. It should be noted that by disposing of the first lower guide rail assembly 604 on the side wall of the groove 1002, the parallelism of the first lower guide rail assembly 604 can be adjusted by adjusting the positions of the two ends of the first lower guide rail, thereby reducing the machining requirements of the measuring base 1001.

[0103] In other embodiments, the measuring base 1001 is disposed on the outer side of the two-dimensional balancing mass block 200 along the first direction X, the second crossbeam 705 is disposed at the groove 1002, the second lower guide rail assembly 704 is disposed on the side wall of the groove 1002, and the first lower guide rail assembly 604 is disposed on the surface of the measuring base 1001. It should be noted that by disposing the second lower guide rail assembly 704 on the side wall of the groove 1002, the parallelism of the second lower guide rail assembly 704 can be adjusted by adjusting the positions of the two ends of the second lower guide rail, thereby reducing the machining requirements of the measuring base 1001.

[0104] In one or more embodiments of this specification, see Figures 14 to 16As shown, both the first-direction absolute position measuring device 600 and the second-direction absolute position measuring device 700 include: a long strip mirror 901 disposed on the driven member 400 and a laser interferometer 902 matched with the long strip mirror 901 and disposed on the base 100. The position of the driven member 400 relative to the base 100 in the first direction X or the position of the driven member 400 relative to the base 100 in the second direction Y is measured by the cooperation of the long strip mirror 901 and the laser interferometer 902. It should be noted that, compared to the interferometer measurement in this embodiment, the measurement using a grating ruler (e.g., the first absolute position measuring read head 603 and the first absolute position measuring scale 602, or the second absolute position measuring read head 703 and the second absolute position measuring scale 702) in one or more of the aforementioned embodiments has lower environmental requirements and is simpler to control.

[0105] In one or more embodiments of this specification, the driven component 400 may be disposed on the two-dimensional balancing mass block 200, for example, air-floated on the two-dimensional balancing mass block 200.

[0106] In one or more embodiments of this specification, the driven member 400 may be disposed on the base 100, for example, air-floated on the base 100. In this embodiment, a two-dimensional balancing mass block 200 surrounds the driven member 400, for example, the two-dimensional balancing mass block 200 has a frame-like structure (e.g., a U-shaped structure) that runs vertically through it, and the driven member 400 passes through the two-dimensional balancing mass block 200 and air-floats on the base 100.

[0107] In some embodiments, the two-dimensional balancing mass block 200 with a frame structure has a fixed air-floating base with a leveling mechanism in the middle, and the driven member 400 is disposed on the fixed air-floating base with the leveling mechanism to facilitate the leveling of the fixed air-floating base.

[0108] In some other embodiments, a leveling mechanism is provided between the driven member 400 and the driven substrate 401.

[0109] In summary, one or more embodiments of this specification reduce or eliminate additional impact vibrations generated by the two-dimensional motion device during high acceleration and high deceleration motions by using an integrated two-dimensional balancing mass block. One or more embodiments of this specification avoid the need for complex decoupling mechanisms by ensuring that the driving of the two-dimensional balancing mass block by the first-direction balancing mass drive device and the second-direction balancing mass drive device does not interfere with each other. One or more embodiments of this specification also solve the problem of difficulty in measuring the absolute position of the mover in a two-dimensional motion device.

[0110] The basic concepts have been described above. It is obvious that the detailed disclosure above is merely illustrative and does not constitute a limitation of this specification. Although not explicitly stated herein, various modifications, improvements, and corrections may be made to this specification by those skilled in the art. Such modifications, improvements, and corrections are taught in this specification and therefore remain within the spirit and scope of the exemplary embodiments described herein.

Claims

1. A two-dimensional balanced motion device, characterized by, include: The base (100), a first-direction balancing mass drive device (101) and a second-direction balancing mass drive device (102) disposed on the base (100), a two-dimensional balancing mass block (200) connected to the first-direction balancing mass drive device (101) and the second-direction balancing mass drive device (102), a two-dimensional motion device (300) disposed on the two-dimensional balancing mass block (200), and a driven component (400) connected to the two-dimensional motion device (300); The two-dimensional balancing mass block (200) is a one-piece structure; The first directional balancing mass drive device (101) is capable of driving the two-dimensional balancing mass block (200) to move along a first direction (X), and the first directional balancing mass drive device (101) is configured to allow the two-dimensional balancing mass block (200) to move along a second direction (Y); The second directional balancing mass drive device (102) is capable of driving the two-dimensional balancing mass block (200) to move along the second direction (Y), and the second directional balancing mass drive device (102) is configured to allow the two-dimensional balancing mass block (200) to move along the first direction (X); The two-dimensional motion device (300) drives the driven component (400) to move relative to the base (100) along the first direction (X) and / or the second direction (Y).

2. The two-dimensional balanced exercise apparatus of claim 1, wherein, The first directional balancing mass drive device (101) and / or the second directional balancing mass drive device (102) are linear motors; The linear motor includes a coil assembly (1011) and a magnet assembly (1012), one of the coil assembly (1011) and the magnet assembly (1012) being fixedly connected to the base (100), and the other of the coil assembly (1011) and the magnet assembly (1012) being fixedly connected to the two-dimensional balancing mass block (200). The magnet assembly (1012) is provided with a magnetic field space extending along the first direction (X) and the second direction (Y). The coil of the coil assembly (1011) is disposed in the magnetic field space. The movable stroke of the magnet assembly (1012) relative to the coil assembly (1011) in the first direction (X) and the second direction (Y) is greater than the maximum movable stroke of the two-dimensional balancing mass block (200) in the first direction (X) and the second direction (Y). The base (100) is also provided with one or more balancing mass guiding devices (105), and the two-dimensional balancing mass block (200) is air-floating on the balancing mass guiding device (105).

3. The two-dimensional balanced exercise apparatus of claim 1, wherein, The two-dimensional motion device (300) includes a first-direction motion device (310) and a second-direction motion device (320); The first directional motion device (310) includes: a first directional base (311) disposed on the two-dimensional balance mass block (200), a first directional guide device (312) disposed on the first directional base (311), and a first directional drive device (313); The second directional motion device (320) includes: a second directional base (321) connected to the first directional guide device (312), a second directional guide device (322) disposed on the second directional base (321), and a second directional drive device (323); The first direction driving device (313) drives the second direction base (321) to move along the first direction (X); The second direction driving device (323) drives the driven member (400) to move along the second direction (Y).

4. The two-dimensional balanced exercise apparatus of claim 3, wherein, A vertical flexible connector (500) is provided between the second direction driving device (323) and the driven component (400); The vertical flexible connector (500) is configured such that it is rigid along the first direction (X) and the second direction (Y), and flexible along the third direction (Z); The third direction (Z) is perpendicular to the first direction (X) and the second direction (Y); The vertical flexible connector (500) includes a first connecting part (501), a second connecting part (502), and a vertical flexible spring (503) connecting the first connecting part (501) and the second connecting part (502); The first connecting part (501) is connected to the second direction driving device (323); The driven component (400) includes a driven substrate (401), and the second connecting portion (502) is connected to the driven substrate (401).

5. The two-dimensional balanced exercise apparatus of claim 3, wherein, Also includes: First direction absolute position measuring device (600) and second direction absolute position measuring device (700); The first direction absolute position measuring device (600) is used to measure the position of the driven member (400) relative to the base (100) in the first direction (X); the second direction absolute position measuring device (700) is used to measure the position of the driven member (400) relative to the base (100) in the second direction (Y).

6. The two-dimensional balanced exercise apparatus of claim 5, wherein, The first direction absolute position measuring device (600) includes: a first absolute position measuring tape (602) disposed on the base (100) and capable of moving relative to the base (100) along the second direction (Y) and a first absolute position measuring reading head (603) fixedly connected to the second direction base (321), wherein the first absolute position measuring tape (602) extends along the first direction (X); The second direction absolute position measuring device (700) includes: a second absolute position measuring tape (702) disposed on the base (100) and capable of moving relative to the base (100) along the first direction (X) and a second absolute position measuring reading head (703) fixedly connected to the mover of the second direction driving device (323), wherein the second absolute position measuring tape (702) extends along the second direction (Y).

7. The two-dimensional balanced exercise apparatus of claim 6, wherein, The first direction absolute position measuring device (600) further includes: A first lower guide rail assembly (604) is provided on the base (100), the first lower guide rail assembly (604) extending in the second direction (Y); A first crossbeam (605) capable of moving along the first lower guide rail assembly (604), the first crossbeam (605) being provided with the first absolute position measuring tape (602); A first upper guide rail assembly (606) is disposed on the first crossbeam (605); A first adapter (607) is connected to the slider of the first upper guide rail assembly (606), and the first adapter (607) is also fixedly connected to the second direction base (321). The first adapter (607) is provided with the first absolute position measuring head (603). And / or, The second direction absolute position measuring device (700) further includes: A second lower guide rail assembly (704) is provided on the base (100) and extends in the first direction (X); A second crossbeam (705) capable of moving along the second lower guide rail assembly (704), the second crossbeam (705) being provided with the second absolute position measuring scale (702); A second upper guide rail assembly (706) is provided on the second crossbeam (705); A second adapter (707) is connected to the slider of the second upper guide rail assembly (706). The second adapter (707) is also fixedly connected to the mover of the second direction drive device (323). The second adapter (707) is provided with the second absolute position measuring head.

8. The two-dimensional balanced exercise apparatus of claim 7, wherein, The first direction absolute position measuring device (600) and the second direction absolute position measuring device (700) further include: a vertical rotation flexible connector (800); The vertically rotating flexible connector (800) includes a third connecting part (801), a fourth connecting part (802), a central part (803), a third vertically rotating flexible spring (804) connecting the third connecting part (801) and the central part (803), and a fourth vertically rotating flexible spring (805) connecting the fourth connecting part (802) and the central part (803). The third connecting part (801) is fixedly connected to the first crossbeam (605) or the second crossbeam (705), and the fourth connecting part (802) is fixedly connected to the slider of the first lower guide rail assembly (604) or the slider of the second lower guide rail assembly (704). The vertical rotational flexible connector (800) is configured to be rigid in the first direction (X) and the second direction (Y) and flexible in the third direction (Z). The third direction (Z) is perpendicular to the first direction (X) and the second direction (Y).

9. The two-dimensional balanced exercise apparatus of claim 7, wherein, The base (100) includes a measuring base (1001), and the measuring base (1001) has a groove (1002) formed thereon; The measuring base (1001) is disposed on the outside of the two-dimensional balance mass block (200) along the second direction (Y), the first crossbeam (605) is disposed at the groove (1002), the first lower guide rail assembly (604) is disposed on the side wall of the groove (1002), and the second lower guide rail assembly (704) is disposed on the surface of the measuring base (1001). Alternatively, the measuring base (1001) is disposed on the outer side of the two-dimensional balance mass block (200) along the first direction (X), the second crossbeam (705) is disposed at the groove (1002), the second lower guide rail assembly (704) is disposed on the side wall of the groove (1002), and the first lower guide rail assembly (604) is disposed on the surface of the measuring base (1001).

10. The two-dimensional balanced exercise apparatus of claim 5, wherein, Both the first direction absolute position measuring device (600) and the second direction absolute position measuring device (700) include: a long strip mirror (901) disposed on the driven member (400) and a laser interferometer (902) that matches the long strip mirror (901) and is disposed on the base (100).

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