A material surface low-temperature plasma processing device

Abstract

The utility model discloses a material surface low temperature plasma processing device, including work table, the drawer slot inner wall inserts and has the inner groove, the cover plate is connected with the other side of the hinge and overturns and is connected, and the cover plate lower end both sides protrude fixed connection has the locking buckle, two axle moving mechanism, first electric push rod, low temperature plasma processing host computer, second electric push rod, conveyer belt, servo motor and positive and negative tooth screw rod mechanism and PLC controller electric connection. This material surface low temperature plasma processing device can be through conveyer belt and carry out continuous operation, and it is convenient to carry out continuous dismounting, and can be through the leakage hole, conveyer belt and inner groove and carry out the separation scrap collection, and it is convenient to handle, and can be through the screw block, positive and negative tooth screw rod mechanism drive clamp block and pad and adapt to clamp the material, and can be through second electric push rod and servo motor and carry out the lift overturning adjustment, and it is convenient to carry out the turning over processing, and the processing is more comprehensive, and the use effect is better.

Description

Technical Field

[0001] This utility model relates to the field of low-temperature plasma treatment technology for material surfaces, specifically a low-temperature plasma treatment device for material surfaces. Background Technology

[0002] Material surface modification technology is one of the most commonly used material preparation technologies. Its basic principle is that under certain external conditions, external substances react with the material surface in a physical or chemical manner, thereby changing the surface state of the material or producing new elements and new groups on the material surface, ultimately meeting the needs of practical applications.

[0003] A low-temperature spray type AP plasma treatment device (CN202411445864.4) can adjust the working position of the plasma cleaning nozzle and the distance between the plasma cleaning nozzle and the silicon wafer, facilitating the adjustment of the plasma spray distance and enabling better cleaning of the silicon wafer surface. However, it has shortcomings: the existing equipment has poor continuous processing effect and cannot perform effective flipping operation, resulting in incomplete processing and poor effect. Therefore, a low-temperature plasma treatment device for material surface is needed to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to provide a low-temperature plasma treatment device for material surfaces, in order to solve the problems mentioned in the background art, such as poor continuous processing effect of low-temperature spray type AP plasma treatment device, inability to perform effective flipping operation, incomplete treatment, and poor effect.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a low-temperature plasma treatment device for material surfaces, comprising a worktable, a support frame connected to the upper end of the worktable, and a PLC controller electrically connected to the upper front side of the worktable. A conveyor belt is embedded in the upper inner wall of the worktable, and perforations are distributed along the inner wall of the conveyor belt. A pull-out chute is distributed along the lower end of the conveyor belt, and a drawer slot is slidably connected to the inner wall of the pull-out chute. An inner groove is inserted into the inner wall of the drawer slot. A two-axis moving mechanism is embedded in the middle of the upper inner wall of the support frame, and a first electric push rod is vertically connected to the lower end of the two-axis moving mechanism. A low-temperature plasma treatment head is fixedly connected to the output end of the first electric push rod. A low-temperature plasma treatment host is fixedly connected to the middle rear side of the support frame, and the low-temperature plasma treatment host is electrically connected to the low-temperature plasma treatment head. A second electric push rod is fixedly connected to the front and rear sides of the upper side, and a fixed block is fixedly connected to the output end of the second electric push rod. A servo motor is inserted and connected to the middle position of one side of the fixed block, and a lead screw groove plate is rotatably connected to the output end of the servo motor. A positive and negative thread lead screw mechanism is inserted and connected through the inner wall of the lead screw groove plate, and a lead screw slider is distributed on the outer wall of the positive and negative thread lead screw mechanism. A clamping block is fixedly connected to one side of the lead screw slider, and a pad is fixedly connected to the inner side of the clamping block. The pad is distributed at the insertion position on one side of the inner wall of the bracket, and a connecting hinge is fixedly connected to the middle position of the upper front side of the bracket. A cover plate is flipped and connected to the other side of the connecting hinge, and locking buckles are fixedly connected to the lower two sides of the cover plate. The two-axis moving mechanism, the first electric push rod, the low-temperature plasma treatment host, the second electric push rod, the conveyor belt, the servo motor, and the positive and negative thread lead screw mechanism are electrically connected to the PLC controller.

[0006] Preferably, the low-temperature plasma treatment head is connected to the bracket in a three-axis moving manner via a first electric push rod, and the position of the low-temperature plasma treatment head matches the position of the cover plate. The cover plate is connected to the bracket in a reset flip-up manner via a connecting hinge, and the cover plate is magnetically locked to the bracket via a locking block.

[0007] Preferably, the clamping block is connected to the screw groove plate in opposite directions via a screw slider and a forward and reverse screw mechanism, and the pad is made of rectangular rubber material and is distributed equidistantly and parallelly on the clamping block.

[0008] Preferably, the drawer slot is slidably connected to the workbench via a sliding groove, the inner slot is interlocked with the drawer slot, and the inner slot is arranged in four parallel groups on the inner wall of the drawer slot.

[0009] Preferably, the conveyor belt is connected to the upper end of the worktable in a left-right movable manner, and the conveyor belt is connected to the inner trough in a supporting manner through the perforation.

[0010] Preferably, the lead screw groove plate and clamping block are connected to the fixed block in a reset rotational manner via a servo motor, and the lead screw groove plate and clamping block are connected to the bracket in a lifting and lowering manner via a second electric push rod.

[0011] Compared with the prior art, the beneficial effects of this utility model are: the material surface low-temperature plasma treatment device can be continuously operated by a conveyor belt, which is convenient for continuous assembly and disassembly. Moreover, it can separate and collect debris through the leakage hole, conveyor belt and inner groove, which is convenient for processing. Furthermore, it can drive the clamping block and pad block to adapt and clamp the material through the lead screw slider and positive and negative thread screw mechanism. Moreover, it can be lifted and flipped by the second electric push rod and servo motor, which is convenient for flipping processing, making the processing more comprehensive and the effect better. Attached Figure Description

[0012] Figure 1 This is a front view of a low-temperature plasma treatment device for material surfaces according to the present invention.

[0013] Figure 2 This is a schematic diagram of the internal structure of a low-temperature plasma treatment device for material surfaces according to this utility model;

[0014] Figure 3 This is a top view of the clamping block of a low-temperature plasma treatment device for material surfaces according to this utility model;

[0015] Figure 4 This utility model relates to a low-temperature plasma treatment device for material surfaces. Figure 2 Enlarged view of point A in the middle;

[0016] Figure 5 This utility model relates to a low-temperature plasma treatment device for material surfaces. Figure 2 Enlarged view at point B in the middle;

[0017] Figure 6 This utility model relates to a low-temperature plasma treatment device for material surfaces. Figure 3 Enlarged view of point C.

[0018] In the diagram: 1. Workbench, 2. Support, 3. PLC controller, 4. Cover plate, 5. Connecting hinge, 6. Locking block, 7. Two-axis moving mechanism, 8. First electric push rod, 9. Low-temperature plasma treatment head, 10. Low-temperature plasma treatment host, 11. Second electric push rod, 12. Clamping block, 13. Drawer slot, 14. Leakage hole, 15. Conveyor belt, 16. Screw groove plate, 17. Servo motor, 18. Fixing block, 19. Screw slider, 20. Positive and negative thread screw mechanism, 21. Inner groove, 22. Pull-out slide, 23. Pad block. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] Please see Figure 1-6This utility model provides a technical solution: a low-temperature plasma treatment device for material surfaces, comprising a worktable 1, a support 2, a PLC controller 3, a cover plate 4, a connecting hinge 5, a locking block 6, a two-axis moving mechanism 7, a first electric push rod 8, a low-temperature plasma treatment head 9, a low-temperature plasma treatment host 10, a second electric push rod 11, a clamping block 12, a drawer groove 13, a drain hole 14, a conveyor belt 15, a lead screw groove plate 16, a servo motor 17, a fixing block 18, a lead screw slider 19, a positive and negative thread lead screw mechanism 20, an inner groove 21, a pull-out slide groove 22, and a pad 23. The support 2 is connected to the upper end of the worktable 1, and the PLC controller 3 is electrically connected to the upper front side of the worktable 1. The conveyor belt 15 is embedded in the upper inner wall of the worktable 1. Furthermore, the inner wall of the conveyor belt 15 has interlocking perforations 14. The conveyor belt 15 is connected to the upper end of the workbench 1 in a left-right sliding manner, and the conveyor belt 15 is supported and connected to the inner groove 21 through the perforations 14. This allows the conveyor belt 15 to be operated continuously, and it can effectively drain material and facilitate the removal of debris. The lower end of the conveyor belt 15 is connected to a pull-out chute 22, and the inner wall of the pull-out chute 22 is slidably connected to a drawer groove 13. The drawer groove 13 is slidably connected to the workbench 1 through the pull-out chute 22. The inner groove 21 is interlocked and spliced ​​with the drawer groove 13, and the inner groove 21 is arranged in four parallel groups on the inner wall of the drawer groove 13. This allows the drawer groove 13 and the inner groove 21 to be easily disassembled and assembled independently, facilitating debris handling and making it convenient to use. The wall-mounted fitting has an inner groove 21. A two-axis moving mechanism 7 is embedded in the middle of the upper end of the inner wall of the bracket 2, and a first electric push rod 8 is vertically connected to the lower end of the two-axis moving mechanism 7. A low-temperature plasma treatment head 9 is fixedly connected to the output end of the first electric push rod 8. The low-temperature plasma treatment head 9 is connected to the bracket 2 in a three-axis moving manner through the first electric push rod 8, and the position of the low-temperature plasma treatment head 9 matches the position of the cover plate 4. The cover plate 4 is connected to the bracket 2 in a reset and flipping manner through a connecting hinge 5, and the cover plate 4 is magnetically locked to the bracket 2 through a locking buckle 6. This allows the low-temperature plasma treatment head 9 to move in three axes and facilitates maintenance through the opening and closing of the cover plate 4. A low-temperature plasma treatment host is fixedly connected to the middle of the rear side of the bracket 2. 10. The low-temperature plasma treatment host 10 is electrically connected to the low-temperature plasma treatment head 9. A second electric push rod 11 is fixedly connected to the front and rear sides of the upper end of one side of the bracket 2. A fixing block 18 is fixedly connected to the output end of the second electric push rod 11. A servo motor 17 is inserted and connected to the middle position of one side of the fixing block 18. A lead screw groove plate 16 is rotatably connected to the output end of the servo motor 17. The lead screw groove plate 16 and the clamping block 12 are rotatably connected to the fixing block 18 through the servo motor 17. The lead screw groove plate 16 and the clamping block 12 are movably connected to the bracket 2 through the second electric push rod 11. This makes it easy to adjust the lead screw groove plate 16 and the clamping block 12 by lifting and flipping, and the treatment is more comprehensive. A positive and negative thread screw mechanism 20 is inserted and connected through the inner wall of the lead screw groove plate 16.Furthermore, the outer wall of the positive and negative thread screw mechanism 20 is fitted with a screw slider 19, and a clamping block 12 is fixedly connected to one side of the screw slider 19. A pad 23 is fixedly connected to the inner side of the clamping block 12. The clamping block 12 is connected to the screw groove plate 16 in opposite directions through the screw slider 19, the positive and negative thread screw mechanism 20, and the screw slider 19. The pad 23 is made of rectangular rubber and is equidistantly and parallelly distributed on the clamping block 12. This allows the clamping interval of the clamping block 12 to be adjusted, which is convenient for adapting to clamping adjustment. The device exhibits excellent adaptability. Pads 23 are distributed at the insertion points on one side of the inner wall of the bracket 2. A connecting hinge 5 is fixedly connected to the middle of the upper front end of the bracket 2. A cover plate 4 is flipped and connected to the other side of the connecting hinge 5. Locking blocks 6 are fixedly connected to the lower ends of the cover plate 4 on both sides. The two-axis moving mechanism 7, the first electric push rod 8, the low-temperature plasma treatment host 10, the second electric push rod 11, the conveyor belt 15, the servo motor 17, and the forward and reverse threaded screw mechanism 20 are electrically connected to the PLC controller 3.

[0021] Working principle: When using this low-temperature plasma treatment device for material surfaces, first connect the device to a power source, then place the material on the conveyor belt 15 and move it to one side. Next, the low-temperature plasma treatment head 9 is controlled by the two-axis moving mechanism 7 and the first electric push rod 8, and the low-temperature plasma treatment host 10 is started to perform material surface treatment. After one side is treated, it can be moved back, and then the clamping block 12 is moved down by the second electric push rod 11. Then, the clamping block 12 and the pad block 23 are moved by the lead screw slider 19 and the positive and negative thread lead screw mechanism 20. The material is clamped by retracting inward, then lifted up and rotated and flipped by servo motor 17 to continue processing. This process is repeated continuously. When the low-temperature plasma treatment head 9 needs maintenance, it can be reset, and the cover plate 4 can be flipped open for maintenance. The processed debris will be guided into the inner tank 21 through the drain hole 14 and conveyor belt 15. When the debris needs to be processed, the drawer slot 13 can be pulled out, and the inner tank 21 can be removed independently for cleaning. This is the process of using this low-temperature plasma treatment device for material surfaces.

[0022] It should be noted that this utility model is a low-temperature plasma treatment device for material surfaces. All components are standard parts or parts known to those skilled in the art. Its structure and principle can be learned by those skilled in the art through technical manuals or conventional experimental methods. Furthermore, all electrical components mentioned above refer to power elements, electrical components, and the matching monitoring computer and power supply connected by wires. The specific connection method should refer to the working principle described above, and the electrical connection between each electrical component should be completed in the order of operation. The detailed connection method is a well-known technology in the field.

[0023] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A low-temperature plasma treatment device for material surfaces, comprising a worktable (1), wherein a support (2) is connected to the upper end of the worktable (1), and a PLC controller (3) is electrically connected to the upper front side of the worktable (1), characterized in that: The upper end of the inner wall of the workbench (1) is inlaid with a conveyor belt (15), and the inner wall of the conveyor belt (15) is fitted with perforated holes (14). The lower end of the conveyor belt (15) is connected to a pull-out slide groove (22), and the inner wall of the pull-out slide groove (22) is slidably connected to a drawer groove (13). The inner wall of the drawer groove (13) is fitted with an inner groove (21). The middle position of the upper end of the inner wall of the bracket (2) is inlaid with a two-axis moving mechanism (7), and the lower end of the two-axis moving mechanism (7) is vertically connected to a first... An electric push rod (8) is provided, with a low-temperature plasma treatment head (9) fixedly connected to its output end. A low-temperature plasma treatment host (10) is fixedly connected to the middle rear side of the bracket (2), and the low-temperature plasma treatment host (10) is electrically connected to the low-temperature plasma treatment head (9). A second electric push rod (11) is fixedly connected to the front and rear sides of the upper side of one side of the bracket (2), and a fixing block (18) is fixedly connected to the output end of the second electric push rod (11). The fixing block (18) has a fixed side... A servo motor (17) is inserted and connected in the middle position, and a lead screw groove plate (16) is rotatably connected to the output end of the servo motor (17). A positive and negative thread lead screw mechanism (20) is inserted and connected through the inner wall of the lead screw groove plate (16), and a lead screw slider (19) is distributed on the outer wall of the positive and negative thread lead screw mechanism (20). A clamping block (12) is fixedly connected to one side of the lead screw slider (19), and a pad (23) is fixedly connected to the inner side of the clamping block (12). The pad (23) is inserted into one side of the inner wall of the bracket (2). The bracket (2) is fixedly connected to the middle of the upper front side with a connecting hinge (5). The other side of the connecting hinge (5) is flipped to connect to a cover plate (4). The lower sides of the cover plate (4) are fixedly connected to locking buckles (6). The two-axis moving mechanism (7), the first electric push rod (8), the low-temperature plasma treatment host (10), the second electric push rod (11), the conveyor belt (15), the servo motor (17), and the positive and negative thread screw mechanism (20) are electrically connected to the PLC controller (3).

2. The low-temperature plasma treatment device for material surface according to claim 1, characterized in that: The low-temperature plasma treatment head (9) is connected to the bracket (2) in a three-axis moving connection via the first electric push rod (8), and the position of the low-temperature plasma treatment head (9) matches the position of the cover plate (4). The cover plate (4) is connected to the bracket (2) in a reset flip-up connection via the connecting hinge (5), and the cover plate (4) is magnetically locked to the bracket (2) via the locking buckle (6).

3. The low-temperature plasma treatment device for material surface according to claim 2, characterized in that: The clamping block (12) is connected to the screw groove plate (16) in opposite directions via the screw slider (19), the positive and negative screw mechanism (20), and the pad (23) is made of rectangular rubber material and is equidistantly and parallelly distributed on the clamping block (12).

4. The low-temperature plasma treatment device for material surface according to claim 3, characterized in that: The drawer slot (13) is connected to the workbench (1) by a sliding slide (22), and the inner slot (21) is connected to the drawer slot (13) by an interlocking splice, and the inner slot (21) is distributed in four parallel groups on the inner wall of the drawer slot (13).

5. The low-temperature plasma treatment device for material surface according to claim 4, characterized in that: The conveyor belt (15) is connected to the upper end of the workbench (1) in a left-right movement, and the conveyor belt (15) is connected to the inner groove (21) through the hole (14) in a supporting communication.

6. The low-temperature plasma treatment device for material surface according to claim 5, characterized in that: The lead screw groove plate (16) and clamping block (12) are connected to the fixed block (18) in a reset rotational manner via a servo motor (17), and the lead screw groove plate (16) and clamping block (12) are connected to the bracket (2) in a lifting and lowering motion via a second electric push rod (11).

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