Reel and elevator comprising it
By using a take-up and release device in the elevator, including a winding wheel, drive wheel, adjustment unit and sensor, the rotation speed of the winding wheel is controlled, which solves the problem of smooth and reliable lifting of the lifting track and crane, and ensures the safety and reliability of the semiconductor processing.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANGHAI GONA SEMICONDUCTOR TECHNOLOGY CO LTD
- Filing Date
- 2025-06-20
- Publication Date
- 2026-06-23
AI Technical Summary
In semiconductor processing, there are problems with the smooth and reliable lifting of the hoisting track and overhead crane, which can easily lead to slippage and other issues.
The system employs a winding and unwinding device, including a winding wheel, a drive wheel, a belt, an adjustment unit, a sensing unit, and a controller. The position of the belt is detected by the elastic element of the adjustment wheel and the sensor, and the rotation speed of the winding wheel is controlled to ensure stable belt tension and avoid excessive tightness or looseness.
This achieves smooth and reliable lifting of the lifting components, avoids slippage, and improves the safety and reliability of the system.
Smart Images
Figure CN224394444U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor transmission system technology, specifically to a take-up and take-down device and an elevator containing the same. Background Technology
[0002] Automated material handling systems (AWMS) are responsible for transporting semiconductor wafer cassettes during semiconductor manufacturing. This system mainly consists of a work track, an overhead crane, and a control system. Guided by the control system, the overhead crane moves along the work track, thus accurately transporting the wafer cassettes to designated locations such as process equipment. Before installing the overhead crane onto the work track, it must first be installed on a lifting track. Then, a lifting device is used to raise the lifting track and the overhead crane together. Once the lifting track is raised to the same height as the work track and docked, the overhead crane can be transferred from the lifting track to the work track. During the movement of the overhead crane along the lifting track, slippage is highly likely; therefore, ensuring the smooth and reliable lifting of the lifting track and the overhead crane is a crucial problem to be solved. Utility Model Content
[0003] To overcome the above-mentioned shortcomings, one of the objectives of this utility model is to provide a winding and unwinding device, comprising: a winding and unwinding section, including a winding wheel, a drive wheel, and a belt, one end of the belt being wound around the winding wheel, and the other end being wound around the drive wheel and connected to a lifting member, the drive wheel being used to drive the belt so that the lifting member moves up and down at a predetermined speed, and the winding wheel being used to wind and unwind the belt; and an adjusting section, the adjusting section being arranged between the drive wheel and the winding wheel, the adjusting section including a base plate and an elastic member and an adjusting wheel disposed on the base plate, the elastic member being able to elastically press the adjusting wheel onto the belt, and the shaft of the adjusting wheel being slidably fitted on the base plate to allow the belt to push the adjusting wheel to reciprocate along an adjusting direction perpendicular to the width of the belt.
[0004] Furthermore, it also includes a sensing unit and a controller. The sensing unit includes a transmission component connected to the shaft of the adjusting wheel and a sensor communicatively connected to the controller. The sensor can detect the position of the transmission component so that the controller can adjust the rotational speed of the winding wheel based on the position signal of the transmission component through a drive source.
[0005] Furthermore, the seat plate includes a vertical plate, and both the vertical plate and the elastic element are arranged at intervals along the width direction of the belt and correspond one-to-one. The vertical plate has adjustment holes extending along the adjustment direction. The rotating shafts at both ends of the adjustment wheel pass through the two adjustment holes and can reciprocate along the extension direction of the adjustment holes. The elastic element includes a guide rod and a compression spring sleeved on the guide rod. The vertical plate has a guide hole, and the guide rod is fitted into the guide hole and can reciprocate along the adjustment direction. One end of the guide rod is connected to the rotating shaft of the adjustment wheel. The transmission element has a connecting part and a transmission part. The other ends of the two guide rods are connected through the connecting part. One end of the transmission part is connected to the connecting part, and the other end of the transmission part can be sensed by the sensor.
[0006] Furthermore, the guide hole is formed between the two wall surfaces of the upright plate. The guide hole is a blind hole. The compression spring is disposed in the blind hole. The bottom of the blind hole has a guide hole for the guide rod to pass through the adjustment hole and match the circumferential surface of the guide rod. A rod sleeve is embedded at the opening of the blind hole. The inner wall surface of the rod sleeve matches the circumferential surface of the guide rod. An annular step is provided in the middle of the guide rod. One end of the compression spring abuts against the annular step, and the other end of the compression spring abuts against the end face of the rod sleeve.
[0007] Furthermore, there are two sensors, which are arranged at intervals along the adjustment direction, and the two sensors are adapted to detect the two extreme positions of the adjustment wheel.
[0008] Furthermore, the sensor is a limit switch or a photoelectric sensor.
[0009] Furthermore, the adjustment direction is up and down, the belt is bent at the position of the adjustment wheel, and the belt segments on both sides of the adjustment wheel form an angle with the opening facing upwards.
[0010] Furthermore, it also includes a first idler wheel and a second idler wheel. The belt passes sequentially around the drive wheel, the first idler wheel, the adjusting wheel, and the second idler wheel before being wound onto the winding wheel. The belt between the first idler wheel and the adjusting wheel forms the included angle with the belt between the second idler wheel and the adjusting wheel.
[0011] Furthermore, the first idler wheel is positioned close to the drive wheel, such that the wrap angle of the belt around the drive wheel is greater than 180°.
[0012] The second objective of this utility model is to provide an elevator that includes the aforementioned launching and retracting device.
[0013] Furthermore, the elevator also includes a guide rail extending in the vertical direction and a lifting wheel disposed at the top of the guide rail. The guide rail, the lifting wheel and the retraction device are all arranged at intervals along the width direction of the belt and are one to one. The belts of the multiple retraction devices are connected to the lifting member by passing around the lifting wheel, so that the lifting member can move up and down along the guide rail. Attached Figure Description
[0014] Figure 1 This is a three-dimensional structural diagram showing the deployment and retraction device of Embodiment 1 of this utility model installed in an elevator;
[0015] Figure 2 This is a cross-sectional view of the retracting device of Embodiment 1 of this utility model installed in an elevator;
[0016] Figure 3 This is a three-dimensional structural diagram of the adjustment part according to Embodiment 1 of this utility model;
[0017] Figure 4 This is a cross-sectional view of the adjustment part according to Embodiment 1 of this utility model.
[0018] In the picture:
[0019] 1. Retracting / unwinding section; 11. Drive wheel; 12. Winding wheel; 13. Belt;
[0020] 2. Adjustment section; 21. Seat plate; 211. Vertical plate; 2111. Adjustment hole; 2112. Guide hole; 212. Rod sleeve;
[0021] 22. Adjusting wheel; 221. Rotating shaft;
[0022] 23. Guide rod; 231. Circular step; 232. Connecting area;
[0023] 24. Compression spring;
[0024] 25. Sensing unit; 251. Transmission component; 2511. Connecting part; 2512. Transmission part; 252. Upper limit sensor; 253. Lower limit sensor;
[0025] 26. First idler gear; 27. Second idler gear;
[0026] 3. First drive source; 4. Reducer; 5. Second drive source. Detailed Implementation
[0027] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention.
[0028] Example 1:
[0029] This embodiment is a take-up and take-down device, which includes: a take-up and take-down part 1 and an adjustment part 2.
[0030] The take-up and release section 1 includes a winding wheel 12, a drive wheel 11, and a belt 13. One end of the belt 13 is wound around the winding wheel 12, and the other end is wound around the drive wheel 11 and connected to the lifting member. The drive wheel 11 is used to drive the belt 13 so that the lifting member can move up and down at a predetermined speed. The winding wheel 12 is used to wind up and release the belt 13.
[0031] An adjusting section 2 is arranged between the drive wheel 11 and the winding wheel 12. The adjusting section 2 includes a seat plate 21, an elastic element mounted on the seat plate 21, and an adjusting wheel 22. The elastic element elastically presses the adjusting wheel 22 onto the belt 13. The shaft 221 of the adjusting wheel 22 is slidably fitted onto the seat plate 21, allowing the belt 13 to push the adjusting wheel 22 to reciprocate along an adjusting direction perpendicular to the width of the belt 13. Here, "the adjusting wheel 22 reciprocates along an adjusting direction perpendicular to the width of the belt 13" means that the adjusting wheel 22 can be... Figure 2 In any direction on the paper, it is only necessary to ensure that the adjusting wheel 22 can always apply a tensioning force to the belt 13 as the belt 13 rises or falls at a constant speed with the drive wheel 11.
[0032] When the winding device of this application winds up the belt 13 to raise the lifting member, as the winding wheel 12 continuously winds up the belt 13, the diameter of the belt 13 wound on the winding wheel 12 becomes larger and larger, and the winding speed of the winding wheel 12 winds up the belt 13 becomes faster and faster. The belt 13 between the winding wheel 12 and the drive wheel 11 is pulled. At this time, the belt 13 will exert a force on the adjusting wheel 22, while the elastic member will exert a force on the adjusting wheel 22 in the opposite direction to that of the belt 13. Therefore, the adjusting wheel 22 moves along the adjusting direction on the seat plate 21 with the tension of the belt 13, thereby preventing the belt 13 from being over-tensioned. At the same time, under the action of the elastic member, the adjusting wheel 22 always presses the belt 13, so that the adjusting wheel 22 and the belt 13 are tautly connected.
[0033] Conversely, when the retracting device releases the belt 13 to lower the lifting member, the winding wheel 12 releases the belt 13, and the drive wheel 11 drives the released belt 13 to move away from the winding wheel 12. As the belt 13 on the winding wheel 12 is released, the diameter of the belt 13 wound on the winding wheel 12 becomes smaller and smaller, and the linear speed at which the winding wheel 12 releases the belt 13 becomes slower and slower. The length of the belt 13 between the drive wheel 11 and the winding wheel 12 becomes shorter and taut. At this time, the belt 13 pushes the adjusting wheel 22 to move along the adjusting direction, preventing the belt 13 from becoming too taut. Meanwhile, the elastic element applies a reverse force to the adjusting wheel 22 to keep the adjusting wheel 22 pressed against the belt 13. Thus, without over-tightening the belt 13, the adjusting wheel 22 maintains a taut connection with the belt 13.
[0034] In some embodiments, the take-up and take-down device further includes a sensing unit 25 and a controller. The sensing unit 25 includes a transmission member 251 connected to the shaft 221 of the adjusting wheel 22 and a sensor communicatively connected to the controller. The sensor can detect the position of the transmission member 251 so that the controller can adjust the rotation speed of the winding wheel 12 via a motor based on the position signal of the transmission member 251.
[0035] In some embodiments, there are two sensors, arranged at intervals along the adjustment direction of the adjustment section 2, and the two sensors are adapted to detect the two extreme positions of the adjustment wheel 22. (See attached diagram) Figure 3 Taking the adjustment direction of the adjustment unit 2 as the up-down direction in the figure as an example, the two sensors are set as upper limit sensor 252 and lower limit sensor 253 respectively. Please note that the up-down direction in the figure is not the up-down direction in actual use of the take-up and put-down device of this application. That is, the adjustment direction of the adjustment unit 2 of the take-up and put-down device can be up-down, left-right, or any other tilt direction at any angle.
[0036] Therefore, when winding the belt 13, if the upper limit sensor 252 detects the first limit position of the transmission component 251, it indicates that the length of the belt 13 between the winding wheel 2 and the drive wheel 1 is too short. A signal will be sent to the controller to reduce the rotational speed of the winding wheel 12. At this time, the belt 13 between the winding wheel 12 and the drive wheel 11 becomes slack. Because the adjusting wheel 22 is always taut and in contact with the belt 13 under the action of the elastic element, the adjusting wheel 22 reverses direction (…). Figure 3 The winding wheel 12 moves downwards, causing the transmission component 251 to move in the opposite direction. During this process, the length of the belt 13 between the winding wheel 12 and the drive wheel 11 increases until the transmission component 251 reaches its second limit position and is detected by the lower limit sensor 253. This indicates that the length of the belt 13 between the winding wheel 2 and the drive wheel 1 is too long, and a signal is sent to the controller to increase the rotational speed of the winding wheel 12. This causes the length of the belt 13 between the winding wheel 12 and the drive wheel 11 to gradually shorten until the transmission component 251 moves back to its first limit position, and this process repeats. The unwinding process of the belt 13 is the reverse, and will not be described in detail here.
[0037] In some implementations, the sensor is a limit switch or a photoelectric sensor.
[0038] In some embodiments, the seat plate 21 includes a vertical plate 211. Both the vertical plate 211 and the elastic element are arranged in pairs, spaced apart and corresponding one-to-one, along the width direction of the belt 13. The vertical plate 211 has adjustment holes 2111 extending along the adjustment direction of the adjustment section 2. The rotating shafts 221 at both ends of the adjustment wheel 22 pass through the two adjustment holes 2111 respectively and can reciprocate along the extension direction of the adjustment holes 2111. The elastic element includes a guide rod 23 and a compression spring 24 sleeved on the guide rod 23. The adjustment wheel 22 has a guide hole 2112. A guide rod 23 fits within the guide hole 2112 and can reciprocate along the extension direction of the adjustment hole 2111. One end of the guide rod 23 is connected to the shaft 221 of the adjustment wheel 22. The transmission component 251 has a connecting part 2511 and a transmission part 2512. The other ends of the two guide rods 23 are connected through the connecting part 2511. One end of the transmission part 2512 is connected to the connecting part 2511, and the other end of the transmission part 2512 can be sensed by a sensor. Therefore, the movement of the adjustment wheel 22 is transmitted to the transmission part 2512 through the connecting part 2511. By connecting the other ends of the two guide rods 23 through the connecting part 2511, a stable frame structure is formed between the shafts 221 on both sides of the adjustment wheel 22, the guide rods 23, and the connecting part 2511, ensuring the consistency of movement of the shafts 221 on both sides of the adjustment wheel 22 and enabling accurate sensing of the position of the adjustment wheel 22.
[0039] In some implementations, see Figure 4 The guide rod 23 is detachably connected to the connecting part 2511 and the rotating shaft 221. A first limiting nut is provided at the lower end of the guide rod 23 below the rotating shaft 221 of the adjusting wheel 22, and a second limiting nut is provided at the upper end of the guide rod 23 above the connecting part 2511, thus achieving the connection between the guide rod 23, the rotating shaft 221, and the connecting part 2511. In some embodiments, a connecting area 232 is provided at the upper end of the guide rod 23 corresponding to the area where the connecting part 2511 is located. The outer diameter of the connecting area 232 is smaller than the outer diameter of the main body of the guide rod 23, thereby ensuring a stable connection between the connecting part 2511 and the guide rod 23 under the action of the second limiting nut.
[0040] In other possible implementations, the guide rod 23 may also be fixedly connected to the connecting portion 2511 and the rotating shaft 221, such as by welding.
[0041] In some embodiments, a guide hole 2112 is formed between the two wall surfaces of the upright plate 211. The guide hole 2112 is a blind hole, and a compression spring 24 is disposed in the blind hole. A guide hole is provided at the bottom of the blind hole for the guide rod 23 to pass through the adjustment hole 2111 and to match the circumferential surface of the guide rod 23. A rod sleeve 212 is embedded at the opening of the blind hole. The inner wall surface of the rod sleeve 212 matches the circumferential surface of the guide rod 23. An annular step 231 is provided in the middle of the guide rod 23. One end of the compression spring 24 abuts against the annular step 231, and the other end of the compression spring 24 abuts against the end face of the rod sleeve 212. By placing the compression spring 24 and the guide rod 23 in the blind hole, interference with the compression spring 24 or the guide rod 23 can be prevented when the belt 13 becomes slack or when the belt 13 moves between the winding wheel 12 and the drive wheel 11. By matching the inner wall surface of the sleeve 212 with the circumferential surface of the guide rod 23, the guide rod 23 can move smoothly with the adjustment wheel 22 without shaking, thereby ensuring that the sensor can stably receive the sensing signal.
[0042] In some embodiments, the belt 13 is bent at the position of the adjusting wheel 22, and the belt 13 segments on both sides of the adjusting wheel 22 form an angle, the opening direction of which is opposite to the direction of the force applied by the elastic element. This ensures that the adjusting wheel 22 can always apply a tensioning force to the belt 13.
[0043] In some embodiments, a first idler pulley 26 and a second idler pulley 27 are also included. The belt 13 sequentially passes around the drive wheel 11, the first idler pulley 26, the adjusting wheel 22, and the second idler pulley 27 before being wound onto the winding wheel 12. The belt 13 between the first idler pulley 26 and the adjusting wheel 22 forms an angle with the belt 13 between the second idler pulley 27 and the adjusting wheel 22. The first idler pulley 26 is positioned close to the drive wheel 11, so that the wrap angle of the belt 13 around the drive wheel 11 is greater than 180°. Therefore, the first idler pulley 26 can prevent the belt 13 on the drive wheel 11 from coming off.
[0044] In some embodiments, the drive wheel 11 rotates at a constant speed via the first drive source 3, and the winding wheel 12 rotates via the second drive source 5. The controller adjusts the speed and direction of the second drive source 5 according to the signal from the sensor. In some embodiments, a reducer 4 connected to the first drive source 3 is also included, and the reducer 4 is coaxially connected to the drive wheel 11.
[0045] Example 2:
[0046] This embodiment is a lift, which includes the launching and retracting device of Embodiment 1.
[0047] In some embodiments, the elevator further includes a guide rail extending in the vertical direction and a lifting wheel disposed at the top of the guide rail. The guide rail, the lifting wheel and the take-up and release device are all arranged at intervals along the width direction of the belt 13 and are one to one. The belt 13 of the multiple take-up and release devices is connected to the lifting component by passing around the lifting wheel so that the lifting component can move up and down along the guide rail.
[0048] The above embodiments are only for illustrating the technical concept and features of this utility model. Their purpose is to enable those skilled in the art to understand the content of this utility model and implement it. They cannot be used to limit the protection scope of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be covered within the protection scope of this utility model.
Claims
1. A take-up and release device, characterized in that, include: The take-up and release section includes a winding wheel, a drive wheel, and a belt. One end of the belt is wound around the winding wheel, and the other end is wound around the drive wheel and connected to the lifting member. The drive wheel is used to drive the belt so that the lifting member moves up and down at a predetermined speed. The winding wheel is used to wind up and release the belt. An adjustment section is arranged between the drive wheel and the winding wheel. The adjustment section includes a seat plate and an elastic element and an adjustment wheel disposed on the seat plate. The elastic element can elastically press the adjustment wheel onto the belt. The shaft of the adjustment wheel is slidably fitted on the seat plate to allow the belt to push the adjustment wheel to reciprocate in an adjustment direction perpendicular to the width of the belt.
2. The retracting device according to claim 1, characterized in that, It also includes a sensing unit and a controller. The sensing unit includes a transmission component connected to the shaft of the adjusting wheel and a sensor communicatively connected to the controller. The sensor can detect the position of the transmission component so that the controller can adjust the rotational speed of the winding wheel based on the position signal of the transmission component through a drive source.
3. The retracting device according to claim 2, characterized in that, The seat plate includes a vertical plate. The vertical plate and the elastic element are arranged in pairs, spaced apart and corresponding one-to-one, along the width direction of the belt. The vertical plate has adjustment holes extending along the adjustment direction. The rotating shafts at both ends of the adjustment wheel pass through the two adjustment holes and can reciprocate along the extension direction of the adjustment holes. The elastic element includes a guide rod and a compression spring sleeved on the guide rod. The vertical plate has a guide hole. The guide rod fits in the guide hole and can reciprocate along the adjustment direction. One end of the guide rod is connected to the rotating shaft of the adjustment wheel. The transmission element has a connecting part and a transmission part. The other ends of the two guide rods are connected through the connecting part. One end of the transmission part is connected to the connecting part, and the other end of the transmission part can be sensed by the sensor.
4. The retracting device according to claim 3, characterized in that, The guide hole is formed between the two wall surfaces of the upright plate, and the guide hole is a blind hole. The compression spring is provided. Inside the blind hole, a guide hole is provided at the bottom of the blind hole for the guide rod to pass through the adjustment hole and to match the circumferential surface of the guide rod. A rod sleeve is embedded at the opening of the blind hole. The inner wall surface of the rod sleeve matches the circumferential surface of the guide rod. An annular step is provided in the middle of the guide rod. One end of the compression spring abuts against the annular step, and the other end of the compression spring abuts against the end face of the rod sleeve.
5. The take-up and take-down device according to any one of claims 2-4, characterized in that, The sensor is two in number and is arranged at intervals along the adjustment direction. The two sensors are adapted to detect the two extreme positions of the adjustment wheel.
6. The retraction and deployment device according to any one of claims 2-4, characterized in that, The sensor is a limit switch or a photoelectric sensor.
7. The take-up and take-down device according to any one of claims 1-4, characterized in that, The adjustment direction is up and down, the belt is bent at the position of the adjustment wheel, and the belt segments on both sides of the adjustment wheel form an angle with the opening facing upward.
8. The retracting device according to claim 7, characterized in that, It also includes a first idler wheel and a second idler wheel. The belt passes sequentially around the drive wheel, the first idler wheel, the adjusting wheel, and the second idler wheel before being wound around the winding wheel. The belt between the first idler wheel and the adjusting wheel and the belt between the second idler wheel and the adjusting wheel form the included angle.
9. An elevator, characterized in that, Includes the take-up and take-down device according to any one of claims 1-8.
10. The elevator according to claim 9, characterized in that, The elevator also includes a guide rail extending in the vertical direction and a lifting wheel disposed at the top of the guide rail. The guide rail, the lifting wheel and the retraction device are all arranged at intervals along the width direction of the belt and are in one-to-one correspondence. The belts of the multiple retraction devices are connected to the lifting member by passing around the lifting wheel, so that the lifting member can move up and down along the guide rail.