A gas supply device for a vacuum coating apparatus

Abstract

The utility model discloses a kind of gas supply devices for vacuum coating equipment, it is related to vacuum coating technical field, including limiting pedestal, the inner chamber of limiting pedestal is movably connected with gas storage tank, the compatible place of gas storage tank and limiting pedestal is all threadedly connected with fixed bolt, the inner chamber of gas storage tank is fixedly connected with limiting stand, the inner chamber of limiting stand is embeddedly connected with filter filter core, the gas inlet of gas storage tank is threadedly connected with gas pipe, the other end of gas pipe is threadedly connected with air pump, the gas inlet of air pump is threadedly connected with filter cover. The utility model is to be fixed and disassembled by thread assembly of filter cover and air pump, and in addition, limiting stand can realize the fixed disassembly of filter filter core, convenient for replacement and cleaning in later period, avoid dust in air directly into gas storage tank, improve the stability and security of device use.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, and in particular to a gas supply device for vacuum coating equipment. Background Technology

[0002] Vacuum coating equipment mainly refers to a type of coating that needs to be carried out under high vacuum. It includes many types, such as vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, etc. The main ideas are divided into evaporation and sputtering.

[0003] In vacuum coating equipment, dust or other particulate contaminants may be mixed into the gas supply system. Dust particles may adhere to the substrate surface, causing uneven coating, forming pinholes, bumps or cracks, which may affect optical, conductive or protective properties. Particulate contamination may also damage the adhesion between the film layer and the substrate, leading to blistering and peeling. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by providing a gas supply device for vacuum coating equipment. Its advantages include convenient assembly and disassembly through threaded connection between the filter cover and the air pump; additionally, the limiting bracket allows for the fixed assembly and disassembly of the filter element, facilitating later replacement and cleaning; preventing dust from directly entering the air storage tank; and improving the stability and safety of the device.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A gas supply device for a vacuum coating equipment includes a limiting base, an air storage box movably connected to the inner cavity of the limiting base, fixing bolts threadedly connected to the matching parts of the air storage box and the limiting base, a limiting frame fixedly connected to the inner cavity of the air storage box, a filter element embedded in the inner cavity of the limiting frame, an air supply pipe threadedly connected to the air inlet of the air storage box, a vacuum pump threadedly connected to the other end of the air supply pipe, and a filter cover threadedly connected to the air inlet of the vacuum pump.

[0007] The above technical solutions facilitate easy fixing and disassembly by using threaded assembly between the filter cover and the air pump. In addition, the limiting bracket enables the fixing and disassembly of the filter element, which is convenient for later replacement and cleaning. It also prevents dust in the air from directly entering the air storage tank, thereby improving the stability and safety of the device.

[0008] The present invention is further configured such that the outlet of the gas storage tank is threadedly connected to an exhaust pipe, the other end of the exhaust pipe is threadedly connected to an exhaust pump, and the exhaust port of the exhaust pump is threadedly connected to a connecting pipe.

[0009] The above technical solution allows for easy control of the air volume delivered by the operator, thus enabling the air to be delivered to the vacuum coating equipment.

[0010] The present invention is further configured such that one end of the gas storage tank is fixedly connected to the outer wall of the exhaust pump, and one end of the gas storage tank is fixedly connected to the outer wall of the suction pump.

[0011] The above technical solution involves fixing the exhaust pump and the suction pump to the outer wall of the air storage tank, thereby improving the stability of airflow.

[0012] The present invention is further provided that a sealing plate is movably connected to the upper opening of the gas storage box from the inside to the outside, and through grooves adapted to the sealing plate are opened at both ends of the upper opening of the gas storage box from the inside to the outside. The surface of the through groove in contact with the sealing plate is treated with wear resistance.

[0013] The above technical solutions play a crucial role in ensuring the stability of the sealing plate switch adjustment. When the sealing plate is closed, it ensures the airtightness of the air storage box and prevents leakage of stored air. When the sealing plate is open, it facilitates the replacement and cleaning of the filter element inside the air storage box.

[0014] The present invention is further configured such that movable frames are fixedly connected to both sides of the sealing plate, and movable grooves adapted to the movable frames are opened from the inside to the outside on both sides of the upper opening of the gas storage box. The surfaces of the movable grooves that contact the movable frames are treated with wear resistance.

[0015] The above technical solutions provide a basis for the stability of the sealing plate's adjustment trajectory and prevent the sealing plate from completely detaching from the gas storage tank.

[0016] The present invention is further configured such that a connecting frame is fixedly connected to one side of the upper end of the gas storage tank, and a reduction motor is fixedly connected to the middle of the connecting frame.

[0017] The above technical solution involves setting the connecting frame on one side of the upper end of the gas storage tank, and installing a geared motor in the middle area to provide sufficient power for adjusting the operation of the adjusting bolts.

[0018] The present invention is further configured such that an adjusting bolt is coaxially fixedly connected to the output end of the geared motor, an adjusting bracket is threadedly connected to the outer wall of the adjusting bolt, and the other end of the adjusting bracket is fixedly connected to the outer wall of the movable frame located at the rear end.

[0019] Through the above technical solution: since the rotation direction of the adjusting bolt is controlled by the geared motor, and the rotation direction of the adjusting bolt can control the adjustment direction of the adjusting frame, the adjusting frame drives the sealing plate to adjust through the movable frame, thereby controlling the opening and closing of the gas storage box, which not only ensures the airtightness of the gas storage, but also facilitates the replacement or cleaning of the internal filter element.

[0020] The present invention is further configured such that a communicator is fixedly connected to one end of the gas storage tank, the communicator is electrically connected to the air pump, the geared motor and the exhaust pump respectively, and the communicator is connected to a terminal for signal connection.

[0021] With the above technical solutions, operators can control the operation of the device through a terminal.

[0022] The beneficial effects of this utility model are as follows:

[0023] The air supply device for this vacuum coating equipment uses a threaded assembly of a filter cover and an air pump for easy fixing and disassembly. In addition, the limiting bracket can fix and disassemble the filter element, which is convenient for later replacement and cleaning. It also prevents dust in the air from directly entering the air storage tank, thus improving the stability and safety of the equipment.

[0024] The air supply device of this vacuum coating equipment is controlled by a geared motor through the rotation direction of an adjusting bolt. The rotation direction of the adjusting bolt controls the adjustment direction of the adjusting frame, which in turn drives the sealing plate through the movable frame to adjust, thereby controlling the opening and closing of the air storage tank. This ensures the airtightness of the air storage and facilitates the replacement or cleaning of the internal filter element. Attached Figure Description

[0025] Figure 1 This is a three-dimensional structural diagram of one end of a gas supply device for a vacuum coating equipment proposed in this utility model.

[0026] Figure 2 This is a three-dimensional structural diagram of the other end of a gas supply device for a vacuum coating equipment proposed in this utility model.

[0027] Figure 3 This is a cross-sectional structural schematic diagram of a gas supply device for a vacuum coating equipment proposed in this utility model;

[0028] Figure 4 This is a schematic diagram of the internal structure of the gas storage tank of a gas supply device for a vacuum coating equipment proposed in this utility model.

[0029] In the diagram: 1. Limiting base; 2. Air storage tank; 3. Sealing plate; 4. Connector; 5. Air pump; 6. Filter cover; 7. Air supply pipe; 8. Exhaust pipe; 9. Exhaust pump; 10. Connecting pipe; 11. Fixing bolt; 12. Connecting frame; 13. Adjusting frame; 14. Adjusting bolt; 15. Gear motor; 16. Filter element; 17. Limiting frame; 18. Movable frame. Detailed Implementation

[0030] The technical solution of this patent will be further described in detail below with reference to specific embodiments.

[0031] The embodiments of this patent are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this patent, and should not be construed as limiting this patent.

[0032] Reference Figure 1-4 A gas supply device for vacuum coating equipment includes a limiting base 1, an air storage box 2 movably connected to the inner cavity of the limiting base 1, and fixing bolts 11 threadedly connected to the matching parts of the air storage box 2 and the limiting base 1. A limiting frame 17 is fixedly connected to the inner cavity of the air storage box 2, and a filter element 16 is embedded in the inner cavity of the limiting frame 17. An air supply pipe 7 is threadedly connected to the air inlet of the air storage box 2, and a vacuum pump 5 is threadedly connected to the other end of the air supply pipe 7. A filter cover 6 is threadedly connected to the air inlet of the vacuum pump 5. By using threaded assembly between the filter cover 6 and the vacuum pump 5, it is easy to fix and disassemble. In addition, the limiting frame 17 can realize the fixation and disassembly of the filter element 16, which is convenient for later replacement and cleaning, and prevents dust in the air from directly entering the air storage box 2, thereby improving the stability and safety of the device.

[0033] Specifically, the outlet of the air storage tank 2 is threadedly connected to an exhaust pipe 8, and the other end of the exhaust pipe 8 is threadedly connected to an exhaust pump 9. The exhaust port of the exhaust pump 9 is threadedly connected to a connecting pipe 10, so that the amount of air delivered can be easily controlled by the operator, thereby delivering the air to the vacuum coating equipment.

[0034] Specifically, one end of the air storage tank 2 is fixedly connected to the outer wall of the exhaust pump 9, and the other end of the air storage tank 2 is fixedly connected to the outer wall of the suction pump 5. The exhaust pump 9 and the suction pump 5 are fixedly installed on the outer wall of the air storage tank 2 to improve the stability of airflow.

[0035] Specifically, a sealing plate 3 is movably connected to the upper opening of the air storage box 2 from the inside to the outside. Both ends of the upper opening of the air storage box 2 have through grooves adapted to the sealing plate 3 from the inside to the outside. The surface of the through groove in contact with the sealing plate 3 is treated with wear resistance, which plays a crucial role in the stability of the opening and closing adjustment of the sealing plate 3. When the sealing plate 3 is closed, it ensures the airtightness of the air storage box 2 and prevents leakage of stored air. When the sealing plate 3 is open, it facilitates the replacement and cleaning of the filter element 16 inside the air storage box 2.

[0036] Specifically, movable frames 18 are fixedly connected to both sides of the sealing plate 3, and movable grooves adapted to the movable frames 18 are opened from the inside to the outside on both sides of the upper opening of the gas storage box 2. The surfaces of the movable grooves and the movable frames 18 are treated with wear resistance, which not only provides a basis for the stability of the adjustment trajectory of the sealing plate 3, but also prevents the sealing plate 3 from completely detaching from the gas storage box 2.

[0037] Specifically, a connecting frame 12 is fixedly connected to one side of the upper end of the gas storage tank 2, and a geared motor 15 is fixedly connected to the middle of the connecting frame 12. The connecting frame 12 is located on one side of the upper end of the gas storage tank 2, and the geared motor 15 is located in the middle area to provide sufficient power for adjusting the operation of the adjusting bolt 14.

[0038] Specifically, an adjusting bolt 14 is coaxially fixedly connected to the output end of the geared motor 15. An adjusting frame 13 is threadedly connected to the outer wall of the adjusting bolt 14. The other end of the adjusting frame 13 is fixedly connected to the outer wall of the movable frame 18 located at the rear end. Since the rotation direction of the adjusting bolt 14 is controlled by the geared motor 15, and the rotation direction of the adjusting bolt 14 can control the adjustment direction of the adjusting frame 13, the adjusting frame 13 drives the sealing plate 3 to adjust through the movable frame 18, thereby controlling the opening and closing of the gas storage box 2. This ensures the airtightness of the gas storage and facilitates the replacement or cleaning of the internal filter element 16.

[0039] Specifically, a communication device 4 is fixedly connected to one end of the air storage tank 2. The communication device 4 is electrically connected to the air pump 5, the geared motor 15 and the exhaust pump 9 respectively. The communication device 4 is connected to a terminal, and the operator can control the operation of the device through the terminal.

[0040] Working principle: By using threaded assembly between the filter cover 6 and the air pump 5, it is easy to fix and disassemble. In addition, the limit bracket 17 can fix and disassemble the filter element 16, which is convenient for later replacement and cleaning. It prevents dust in the air from directly entering the air storage box 2, thus improving the stability and safety of the device. When the exhaust pump 9 is running, it transports the air in the air storage box 2 and delivers the air to the vacuum coating equipment.

[0041] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A gas supply device for a vacuum coating equipment, comprising a limiting base (1), characterized in that, The inner cavity of the limiting base (1) is movably connected to an air storage box (2). The matching parts of the air storage box (2) and the limiting base (1) are threaded with fixing bolts (11). The inner cavity of the air storage box (2) is fixedly connected to a limiting frame (17). The inner cavity of the limiting frame (17) is embedded with a filter element (16). The air inlet of the air storage box (2) is threaded with an air supply pipe (7). The other end of the air supply pipe (7) is threaded with a vacuum pump (5). The air inlet of the vacuum pump (5) is threaded with a filter cover (6).

2. The gas supply device for a vacuum coating equipment according to claim 1, characterized in that, The outlet of the gas storage tank (2) is threadedly connected to an exhaust pipe (8), and the other end of the exhaust pipe (8) is threadedly connected to an exhaust pump (9). The exhaust port of the exhaust pump (9) is threadedly connected to a connecting pipe (10).

3. The gas supply device for a vacuum coating equipment according to claim 1, characterized in that, One end of the gas storage tank (2) is fixedly connected to the outer wall of the exhaust pump (9), and the other end of the gas storage tank (2) is fixedly connected to the outer wall of the suction pump (5).

4. The gas supply device for a vacuum coating equipment according to claim 1, characterized in that, The upper opening of the gas storage box (2) is movably connected to a sealing plate (3) from the inside to the outside. Both ends of the upper opening of the gas storage box (2) have through grooves that are adapted to the sealing plate (3) from the inside to the outside. The surface of the through groove that contacts the sealing plate (3) is treated with wear resistance.

5. The gas supply device for a vacuum coating equipment according to claim 4, characterized in that, Both sides of the sealing plate (3) are fixedly connected to movable frames (18). The upper opening of the gas storage box (2) is provided with movable grooves from the inside to the outside that are adapted to the movable frames (18). The surfaces of the movable grooves that contact the movable frames (18) are treated with wear resistance.

6. The gas supply device for a vacuum coating equipment according to claim 1, characterized in that, A connecting frame (12) is fixedly connected to one side of the upper end of the gas storage tank (2), and a geared motor (15) is fixedly connected to the middle of the connecting frame (12).

7. The gas supply device for a vacuum coating equipment according to claim 6, characterized in that, The output end of the geared motor (15) is coaxially fixedly connected to an adjusting bolt (14), and the outer wall of the adjusting bolt (14) is threadedly connected to an adjusting bracket (13). The other end of the adjusting bracket (13) is fixedly connected to the outer wall of the movable bracket (18) located at the rear end.

8. The gas supply device for a vacuum coating equipment according to claim 1, characterized in that, One end of the gas storage tank (2) is fixedly connected to a communicator (4), which is electrically connected to the air pump (5), the geared motor (15) and the exhaust pump (9) respectively, and the communicator (4) is connected to a terminal.

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