An alignment adjusting device for a vacuum coating equipment to a radiation sensor

Abstract

The utility model relates to vacuum coating equipment technical field, concretely relates to a kind of alignment adjusting device for alignment of vacuum coating equipment to sensor, and the observation window seat of fixed position setting is equipped with mounting seat on the back of observation window seat, transmitter is fixedly arranged on one of mounting seat, receiver is fixedly arranged on another mounting seat, adjusting screw is respectively equipped in four corners on mounting seat, elastic member is connected between mounting seat and observation window seat, for increasing a reverse pre-tightening force between mounting seat and observation window seat, so that mounting seat remains stable, when actually using, rotating adjusting screw in four corners is used to adjust the distance between four corners of mounting seat and observation window seat, in the adjustment process, transmitter will follow the process of loosening and tightening of adjusting screw, and the position moving process of the light spot projected on the side of receiver is observed by operator through the window body at transmitter side, until receiver detects light source, that is, alignment is completed, and it is convenient to operate.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to an alignment adjustment device for a through-beam sensor in a vacuum coating equipment. Background Technology

[0002] One of the core aspects of vacuum coating equipment is avoiding interference from air molecules to ensure the quality of the deposited film. Therefore, non-contact detection devices, such as through-beam sensors, are typically used. These sensors consist of a transmitter and a receiver. Their working principle involves the transmitter emitting a light beam (infrared light or laser, etc.) towards the receiver. By detecting whether the light path is blocked by an object, the receiver provides different signals based on changes in the light path. In practical applications, to ensure the light beam emitted by the transmitter is projected onto the receiver, the direction of the emitted beam needs to be adjustable. Current methods for adjusting the angle often involve completely loosening the screws securing the through-beam sensor, moving the sensor to align it, and then quickly tightening the screws while maintaining alignment. However, in practice, the tightening process easily leads to wobbling, causing the alignment to deviate, often requiring multiple repetitions to ensure proper alignment, making the operation cumbersome. Utility Model Content

[0003] In view of this, the purpose of this utility model is to provide an alignment adjustment device for a through-beam sensor in a vacuum coating equipment, so as to solve one or more of the problems mentioned above.

[0004] To achieve the above objectives, this utility model provides an alignment adjustment device for a through-beam sensor in a vacuum coating equipment, comprising a transmitter and a receiver arranged in pairs, and further comprising:

[0005] Two symmetrically arranged observation window mounts are provided, with an observation window in the middle of each mount. A mounting base is located on the back of each mount, with adjusting screws at each of the four corners. These screws are movably connected to the observation window mounts. An elastic element connects the mounting base and the observation window mounts, which is used to push outwards and press against the mounting base. The transmitter is fixedly mounted on one of the mounting bases, and the receiver is fixedly mounted on the other. The beam emitted by the transmitter passes sequentially through the window on the same side, then the window on the opposite side, and is received by the receiver. The distance between the mounting base and the observation window mounts can be adjusted by rotating the adjusting screws.

[0006] Preferably, the observation window base is designed in a flattened oval shape, with the window body positioned parallel to the center of the observation window base.

[0007] Preferably, the elastic element is located at the middle position of the upper and lower sets of adjusting screws on the mounting base.

[0008] Preferably, the adjusting screw on the same side as the receiver is in a locked state, and the mounting base on the same side as the receiver and the observation window base are designed to be parallel.

[0009] Preferably, the observation window base has a through hole, and a screw cylinder is movably connected to the through hole, with the rod of the adjusting screw engaged inside the screw cylinder.

[0010] Preferably, the bottom end of the screw barrel is connected to the bottom end of the through hole via a universal joint.

[0011] Preferably, an elastic connection is provided between the outer wall of the screw barrel and the inner wall of the through hole.

[0012] The beneficial effects of this utility model are as follows: An observation window base is fixedly positioned, with a mounting base on its back. The transmitter is fixedly mounted on one of the mounting bases, and the receiver is fixedly mounted on the other. Adjusting screws are located at the four corners of each mounting base, and these screws are movably connected to the observation window base. An elastic element connects the mounting base and the observation window base, providing a reverse pre-tightening force to stabilize the mounting base. In actual use, the distance between the four corners of the mounting base and the observation window base is adjusted by rotating the adjusting screws. During adjustment, the transmitter moves with the tightening and loosening of the adjusting screws. The operator can observe the movement of the projected light spot on one side of the receiver through the window at the transmitter until the receiver detects the light source, thus completing the alignment. This facilitates quick and efficient alignment and debugging, and is easy to operate. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only for this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0015] Figure 2 This is a schematic diagram of the structure of the observation window holder of this utility model;

[0016] Figure 3 This is a front view schematic diagram of the through hole structure of this utility model;

[0017] Figure 4 This is a schematic diagram of the internal structure of the through hole in this utility model.

[0018] The diagram is marked as follows:

[0019] 100. Beam; 1. Transmitter; 2. Receiver; 3. Observation window mount; 31. Through hole; 32. Screw; 33. Flexible connection; 4. Window; 5. Mounting base; 6. Adjusting screw; 7. Elastic element. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments.

[0021] It should be noted that, unless otherwise defined, the technical or scientific terms used in this utility model should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "first," "second," and similar terms used in this utility model do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0022] An alignment adjustment device for a through-beam sensor in a vacuum coating equipment includes a transmitter 1 and a receiver 2 arranged in pairs, and two observation window seats 3 arranged symmetrically. The observation window seat 3 has an observation window 4 in the middle, and a mounting base 5 on the back of the observation window seat 3. Adjusting screws 6 are respectively provided at the four corners of the mounting base 5 and are movably connected to the observation window seat 3 through the adjusting screws 6. An elastic element 7 is connected between the mounting base 5 and the observation window seat 3 for pushing outward and pressing against the mounting base 5. The transmitter 1 is fixedly mounted on one of the mounting bases 5, and the receiver 2 is fixedly mounted on the other mounting base 5. The light beam emitted by the transmitter 1 passes through the window 4 on the same side and the window 4 on the opposite side in sequence, and is then received by the receiver 2. The distance between the mounting base 5 and the observation window seat 3 is adjusted by rotating the adjusting screws 6.

[0023] like Figure 1 , Figure 2As shown, this utility model is based on existing conventional vacuum coating equipment, that is, a device for depositing a thin film on the surface of a substrate in a vacuum environment through physical or chemical methods. One of its core features is to avoid interference from air molecules, ensuring the quality and various parameters of the deposited film. Therefore, non-contact detection devices are usually used, such as through-beam sensors, including a pair of transmitters 1 and receivers 2. The transmitter 1 emits a light beam 100 (infrared light or laser, etc.) to the receiver 2. By detecting whether the light path is blocked by an object, the receiver 2 feeds back different signals according to the abrupt change in the light path. It also includes two symmetrically arranged observation window seats 3, with an observation window 4 in the middle of the observation window seats 3. The observation window seats 3 are fixed in position, that is, they are kept in a parallel and symmetrical state, such as... Figure 1 , Figure 2 As shown, the observation window base 3 can be designed as a flattened oval shape, formed by pressing two observation window covers together. The two observation window covers are fixedly connected by multiple bolts. The window body 4 is parallel to the middle of the observation window base 3 and can be made of transparent glass. The oval shape is designed to facilitate observation of the light spot landing point projected by the transmitter 1 onto the opposite side during adjustment. A mounting base 5 is provided on the back of the observation window base 3. The back of the observation window base 3 is the side away from the opposite side of the observation window base 3. The mounting base 5 can be designed as a flat plate structure, and adjusting screws 6 are provided at the four corners of the mounting base 5. The adjusting screws 6 are movably connected to the observation window base 3. An elastic element 7 is connected between the mounting base 5 and the observation window base 3 to push outward and press against the mounting base 5. Specifically, as shown... Figure 2 As shown, the elastic element 7 can be a conventional elastic component such as a spring, and is respectively located in the middle of the two sets of adjusting screws 6 on the upper and lower parts of the mounting base 5. The transmitter 1 is fixedly mounted on one of the mounting bases 5, and the receiver 2 is fixedly mounted on the other mounting base 5, both mounted at the center position on the mounting base 5. The direction of the beam 100 is perpendicular to the plane of the mounting base 5. The transmitter 1 / receiver 2 can be fixedly locked to the mounting base 5 using nuts, thus... Figure 1 As shown, the beam 100 emitted by the transmitter 1 passes through the window 4 on the same side and the window 4 on the opposite side in sequence, and is then received by the receiver 2.

[0024] In practical use, considering that the deviation angle of transmitter 1 is random within a certain angle range, with different deviation angles and deflection directions, and that the greater the detection distance of the through-beam sensor, the farther the distance between the light spot projection position and receiver 2 will be due to a certain angular deviation of transmitter 1, the more difficult it is to adjust using existing methods. This involves completely loosening the fastening screws used to secure the through-beam sensor, then translating the sensor along the X and Y directions of the mounting base 5 to align it, and then quickly tightening the screws while maintaining alignment. However, this process is cumbersome, as it easily leads to wobbling and misalignment, requiring repeated adjustments to ensure alignment. Furthermore, the through-beam sensor requires a greater movement distance to align, which is particularly disadvantageous in situations with limited installation space. The adjustment method described in this invention... During this process, a reverse pre-tightening force is added between the mounting base 5 and the observation window base 3 through the elastic element 7. The distance between the four corners of the mounting base 5 and the observation window base 3 is adjusted by rotating the adjusting screws 6 at the four corners. The adjusting screws 6 at the transmitter 1 are only used for connection and positioning and are not locked. During the adjustment process, the transmitter 1 will move with the loosening and tightening of the adjusting screws 6, and the compression of the elastic element 7 will also change slightly. The distance and plane tilt angle of the mounting base 5 relative to the observation window base 3 will also change slightly. The mounting base 5 and the observation window base 3 are kept in a suspended space state. The operator can observe the position movement of the projected light spot on the side of the receiver 2 through the window 4 at the transmitter 1 until the receiver 2 detects the light source, which means that the alignment is completed. Generally, only one or two screws need to be adjusted to complete the alignment work quickly and accurately.

[0025] The above devices are mainly used in horizontal vacuum coating production lines and are installed on the side wall of the vacuum chamber, such as photovoltaic cell coating lines, LCD panel coating lines, and LOW-E glass coating lines.

[0026] In the embodiments of this utility model, optionally, such as Figure 1 , Figure 2 As shown, the adjusting screw 6 located on the same side as the receiver 2 is in the locked state. The receiver generally does not need to be adjusted. Therefore, the mounting base 5 of the receiver and the observation window base 3 can be in a stable locked state. The mounting base 5 and the observation window base 3 located on the same side as the receiver 2 are designed to be parallel.

[0027] In the embodiments of this utility model, optionally, such as Figure 1 , Figure 2 , Figure 3 , Figure 4 As shown, the observation window base 3 has a through hole 31, and a screw cylinder 32 is movably connected to the through hole 31. The rod of the adjusting screw 6 is engaged with the screw cylinder 32.

[0028] In the embodiments of this utility model, optionally, such as Figure 1 , Figure 2 , Figure 3 , Figure 4 As shown, the bottom end of the screw cylinder 32 is connected to the bottom end of the through hole 31 through a universal joint, so that the adjusting screw 6 can rotate flexibly relative to the through hole 31.

[0029] In the embodiments of this utility model, optionally, such as Figure 1 , Figure 2 , Figure 3 , Figure 4 As shown, an elastic connecting part 33 connects the outer wall of the screw barrel 32 and the inner wall of the through hole 31. The elastic connecting part 33 can be a conventional component such as an elastic rubber layer. Either the universal joint or the elastic connecting part 33 can be set in the through hole 31, or both can be set in the through hole 31. When rotating the adjusting screw 6, the adjusting screw 6 is prevented from dislodging from the observation window seat 3, and the adjusting screw 6 can be flexibly rotated relative to the observation window seat 3.

[0030] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of the present invention is limited to these examples; within the framework of the present invention, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of the present invention as described above, which are not provided in the details for the sake of brevity.

Claims

1. An alignment adjustment device for a through-beam sensor in a vacuum coating equipment, comprising a transmitter (1) and a receiver (2) arranged in pairs, characterized in that, Also includes: Two symmetrically arranged observation window seats (3) are provided. The middle of the observation window seat (3) is provided with an observation window (4). The back of the observation window seat (3) is provided with a mounting seat (5). The four corners of the mounting seat (5) are provided with adjusting screws (6), which are movably connected to the observation window seat (3) through the adjusting screws (6). An elastic element (7) is connected between the mounting seat (5) and the observation window seat (3) for pushing outward and pressing against the mounting seat (5). The transmitter (1) is fixedly mounted on one of the mounting seats (5), and the receiver (2) is fixedly mounted on the other mounting seat (5). The beam (100) emitted by the transmitter (1) passes through the window (4) on the same side and the window (4) on the opposite side in sequence, and is then received by the receiver (2). The distance between the mounting seat (5) and the observation window seat (3) is adjusted by rotating the adjusting screws (6).

2. The alignment adjustment device for a through-beam sensor in a vacuum coating equipment according to claim 1, characterized in that, The observation window base (3) is designed in a flattened elliptical shape, and the window body (4) is set parallel to the middle of the observation window base (3).

3. The alignment adjustment device for a through-beam sensor in a vacuum coating equipment according to claim 1, characterized in that, The elastic element (7) is located at the middle position of the two sets of adjusting screws (6) on the upper and lower parts of the mounting base (5).

4. The alignment adjustment device for a through-beam sensor in a vacuum coating equipment according to claim 1, characterized in that, The adjusting screw (6) located on the same side as the receiver (2) is in the locked state, and the mounting base (5) located on the same side as the receiver (2) is designed to be parallel to the observation window base (3).

5. The alignment adjustment device for a through-beam sensor in a vacuum coating equipment according to claim 1, characterized in that, The observation window seat (3) has a through hole (31), and a screw cylinder (32) is movably connected to the through hole (31). The rod of the adjusting screw (6) is engaged with the screw cylinder (32).

6. The alignment adjustment device for a through-beam sensor in a vacuum coating equipment according to claim 5, characterized in that, The bottom end of the screw cylinder (32) is connected to the bottom end of the through hole (31) by a universal joint.

7. The alignment adjustment device for a through-beam sensor in a vacuum coating equipment according to claim 5, characterized in that, An elastic connection (33) is provided between the outer wall of the screw (32) and the inner wall of the through hole (31).

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