Passivation device

Abstract

The application provides a passivation device, which comprises a reaction chamber with a process area; a conveying mechanism arranged at the bottom of the reaction chamber and used for conveying materials along a first direction; and a gas supply mechanism arranged at the side of the reaction chamber and located in the process area, wherein the gas supply mechanism comprises a plurality of process nozzles arranged at intervals along the first direction, and the plurality of process nozzles can respectively output different process gases to the materials when the materials move to the process area. During the movement of the materials along the first direction through the process area, the materials will pass through the plurality of process nozzles in sequence, so that the plurality of process nozzles can spray different process gases to the cross section of the materials in sequence, and the plurality of process gases can be alternately sprayed in a single movement of the materials, thereby reducing the process time and improving the production efficiency.

Description

Technical Field

[0001] This application relates to the field of battery cell processing technology, and in particular to a passivation device. Background Technology

[0002] In the photovoltaic cell manufacturing process, it is common practice to dicing and cutting sheet materials into multiple pieces. Then, a passivation process is used to passivate the cut surfaces of these sections, repairing the cross-sections and improving the photovoltaic conversion efficiency of the silicon wafers. Passivation processes include atomic layer deposition (ALD).

[0003] Passivation devices in related technologies typically include a reaction chamber and a gas supply mechanism. During the passivation process, the sheet material enters the reaction chamber, and the gas supply mechanism needs to introduce different process gases into the reaction chamber multiple times. These process gases sequentially contact the cross-section of the sheet material to form a coating. However, this process has the problems of long processing time and low production efficiency. Utility Model Content

[0004] In view of the above, it is necessary to provide a passivation device that can improve production efficiency.

[0005] This application provides a passivation device, comprising: a reaction chamber having a process area; a transport mechanism disposed at the bottom of the reaction chamber for transporting materials along a first direction; and a gas supply mechanism disposed on the side of the reaction chamber and located in the process area; wherein the gas supply mechanism has multiple process nozzles, which are spaced apart along the first direction; when the material moves to the process area, the multiple process nozzles can output different process gases to the material respectively.

[0006] In some embodiments, the process nozzle is located above the process zone; the reaction chamber is provided with an exhaust port, which is located in the process zone and below the gas supply mechanism; when the material moves to the process zone, the exhaust port is located near the cross-section of the material, and the height of the exhaust port is lower than the lowest point of the cross-section of the material; the ratio of the exhaust rate of the exhaust port to the gas flow rate of the process gas ejected by the process nozzle is defined as S, where 1 / 6 ≤ S ≤ 1 / 4.

[0007] In some embodiments, the gas supply mechanism has multiple sets, which are spaced apart along a second direction and have an angle between the second direction and the first direction; when the material moves to the process area, the multiple sets of gas supply mechanisms can output process gas to multiple cross sections of the material respectively.

[0008] In some embodiments, the material includes a carrier and a plurality of sheet materials. The carrier is provided with a receiving cavity and a connecting port is provided on the side of the carrier, which connects to the receiving cavity. The cross-section of the side of the sheet material is exposed to the reaction chamber through the connecting port. When the material moves to the process area, the connecting port is positioned directly opposite the gas supply mechanism.

[0009] In some embodiments, the passivation apparatus further includes a separating nozzle disposed between two adjacent process nozzles, the separating nozzle being used to output inert gas to the material.

[0010] In some embodiments, the reaction chamber has a first heating zone located on one side of the process zone; the passivation apparatus further includes a first heating element disposed on the side of the reaction chamber and located in the first heating zone.

[0011] In some embodiments, the first heating element has multiple groups, which are spaced apart along a second direction, and the second direction has an angle with the first direction.

[0012] In some embodiments, the reaction chamber has a second heating zone located on the side of the process zone away from the first heating zone; the passivation apparatus further includes a second heating element disposed on the side of the reaction chamber and located in the second heating zone.

[0013] In some embodiments, the second heating element has multiple groups, which are spaced apart along a second direction, and the second direction has an angle with the first direction.

[0014] In some embodiments, the passivation device further includes a evacuation mechanism connected to the reaction chamber, which is used to evacuate the reaction chamber.

[0015] With the passivation device provided in this application, as the material moves through the process zone in the first direction, the material will pass through multiple process nozzles in sequence. In this way, the multiple process nozzles will spray different process gases onto the cross-section of the material in sequence. Multiple process gases can be sprayed alternately in a single movement of the material, which reduces the process time and improves the production efficiency. Attached Figure Description

[0016] Figure 1 This is a schematic diagram showing the state of the sheet material provided in this application when it is horizontally stacked on a carrier.

[0017] Figure 2 This is a schematic diagram showing the state of the sheet material provided in this application when it is vertically stacked on a carrier.

[0018] Figure 3 A schematic diagram of the working state of the first embodiment of the passivation device provided in this application.

[0019] Figure 4This is a schematic diagram showing the distribution of the process nozzles, separator nozzles, and sheet materials provided in this application.

[0020] Figure 5 A schematic diagram showing the distribution of the process nozzle, sheet material, and air extraction port provided in this application.

[0021] Figure 6 A schematic diagram of the working state of the second embodiment of the passivation device provided in this application.

[0022] Explanation of main component symbols

[0023] 100. Passivation device; 10. Reaction chamber; 11. Process area; 12. First heating zone; 13. Second heating zone; 14. Exhaust port; 20. Transport mechanism; 30. Gas supply mechanism; 31. Process nozzle; 40. Separating nozzle; 50. Furnace door mechanism; 60. First heating element; 70. Second heating element; 200. Carrier; 201. Receiving cavity; 202. Connecting port; 300. Sheet material; 301. Cross-section. Detailed Implementation

[0024] In the description of the embodiments of this application, when an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an element centrally located simultaneously. When an element is considered to be "set" on another element, it can be directly set on the other element or there may be an element centrally located simultaneously. In this application, unless otherwise expressly specified and limited, the terms "installed," "connected," "attached," "fixed," etc., should be interpreted broadly. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection within two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances. The directional descriptions in this embodiment, such as "up," "down," "top," "bottom," etc., are all based on the direction of the product in the actual use scenario.

[0025] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0026] In related technologies, there are various passivation devices. Each passivation device includes a reaction chamber and a gas supply mechanism. The gas supply mechanism has a nozzle. The working methods of different passivation devices may differ. The following will use tubular passivation devices and rotary passivation devices as examples for explanation.

[0027] The tubular passivation device includes a reaction chamber and a single nozzle. The nozzle is located inside the reaction chamber and can output different process gases.

[0028] The working principle of the tubular passivation device is as follows: after the sheet material is transported to the reaction chamber, the sheet material is paused and the nozzle sequentially outputs a variety of different process gases to the cross-section of the sheet material so that the various process gases come into contact with the cross-section of the sheet material in sequence to form a coating.

[0029] Thus, when passivation coating is performed using a tubular passivation device, the nozzle needs to output different process gases multiple times, resulting in a long process time and low production efficiency.

[0030] The rotary passivation device includes a reaction chamber, a rotary table, and multiple nozzles. The rotary table is located inside the reaction chamber, and the multiple nozzles are located inside the reaction chamber, with the positions of the nozzles corresponding to the rotation angle of the rotary table. Each nozzle is used to output a different process gas.

[0031] The rotary passivation device works as follows: after transporting the sheet material to the reaction chamber, the sheet material is placed on the rotary table with the cross-section facing outwards. The rotary table drives the sheet material to make a circular motion and pass under multiple nozzles in sequence. During the process of the sheet material passing under the nozzles, the process gas output from the nozzles will contact the cross-section of the sheet material to form a coating.

[0032] Thus, when using a rotary passivation device for passivation coating, the end face of the sheet material must be facing upwards, and the nozzle can only coat one side of the sheet material at a time. However, the sheet material may have both sides that need coating, so a single batch of sheet material needs to be clamped, transported, and passivated in two separate processes, resulting in a 50% reduction in equipment capacity and production efficiency.

[0033] On the other hand, when controlling the dwell time of the sheet material under each nozzle to meet the coating requirements, the system needs to calculate the moving time, moving distance and spray area of ​​the sheet material. In the process of the rotary table driving the sheet material to make circular motion, the moving path of the sheet material is an arc path. Therefore, it is also necessary to calculate the angular velocity, moving radius and other factors of the sheet material. There are many factors that affect the error, which in turn affect the coating quality.

[0034] Therefore, this application provides a passivation apparatus. The passivation apparatus can transport and passivate materials.

[0035] Figure 1 This is a schematic diagram showing the state of the sheet material provided in this application when it is horizontally stacked on a carrier. Figure 2 This is a schematic diagram showing the state of the sheet material provided in this application when it is vertically stacked on a carrier.

[0036] like Figure 1 and Figure 2 As shown in the example of this application, the material includes a carrier 200 and a plurality of sheet materials 300, each sheet material 300 having a cross-section 301 on at least one side. The carrier 200 has a receiving cavity 201 for stacking and loading the plurality of sheet materials 300. A connecting opening 202 is provided on the side of the carrier 200, connecting to the receiving cavity 201. The plurality of sheet materials 300 are loaded in the carrier 200, and the cross-section 301 of the side of each sheet material 300 is exposed to the carrier 200 through the connecting opening 202, so that the cross-section 301 can contact the process gas during the passivation coating process.

[0037] Specifically, the sheet material 300 can be a raw material for solar cells such as silicon wafers. The sheet material 300 has been diced and has cross-sections 301 on both sides.

[0038] The carrier 200 can be a material box, and the receiving cavity 201 forms an opening on one side of the carrier 200. Multiple sheet materials 300 can enter or exit the receiving cavity 201 through the opening. The carrier 200 has connecting ports 202 on opposite sides, and the two connecting ports 202 can be located on the two sides of the carrier 200 adjacent to the opening.

[0039] When multiple sheet materials 300 are stacked and loaded into the receiving cavity 201, the cross-sections 301 on both sides of the multiple sheet materials 300 are exposed to the receiving cavity 201 through the connecting ports 202 on both sides of the carrier 200, so that the cross-sections 301 on both sides of all sheet materials 300 can be exposed to both sides of the carrier 200, so that all cross-sections 301 can come into contact with the process gas during the passivation coating process.

[0040] It is worth noting that multiple sheet materials 300 can be loaded onto the carrier 200 in either a horizontal or vertical stacking manner. Horizontal stacking can be achieved by having the sheet materials 300 parallel to the horizontal direction, stacking multiple sheet materials 300 vertically to form a pile, and loading the entire pile onto the carrier 200; or by arranging multiple piles of sheet materials 300 horizontally and loading them onto the carrier 200. Vertical stacking can be achieved by having the sheet materials 300 parallel to the vertical direction, stacking multiple sheet materials 300 horizontally. It is understood that regardless of the stacking method, as long as the cross-section 301 of the sheet materials 300 faces the connecting opening 202, this application does not impose any restrictions.

[0041] Figure 3 A schematic diagram of the working state of the first embodiment of the passivation device provided in this application.

[0042] like Figure 2 and Figure 3 As shown, the passivation apparatus 100 includes a reaction chamber 10, a transport mechanism 20, and a gas supply mechanism 30. The reaction chamber 10 has a reaction space inside for material movement and passivation coating, and the reaction chamber 10 has a process area 11, which is the position where the material is passivated and coated.

[0043] A transport mechanism 20 is disposed at the bottom of the reaction chamber 10. The transport mechanism 20 is used to transport materials along a first direction. For example, the first direction is the length direction of the reaction chamber 10, with the X-axis direction shown in the figure as an example. The transport mechanism 20 can be a transfer roller. The transport mechanism 20 is disposed at the bottom of the reaction chamber 10. The transport mechanism 20 can carry the carrier 200 and drive the carrier 200 to move along the first direction, thereby causing the various sheet materials 300 within the carrier 200 to move along the first direction.

[0044] In the example of this application, the cross-section 301 of the sheet material 300 is located on the side of the sheet material 300 in a second direction, and the second direction has an angle with the first direction. Exemplarily, the second direction is the width direction of the reaction chamber 10, and the second direction is exemplified by the Y-axis direction in the figure. When the material moves to the process area, the connecting port 202 is arranged directly opposite the gas supply mechanism 30 along the second direction, so that the cross-section 301 of the side of the sheet material 300 is exposed to the reaction chamber 10 through the connecting port 202.

[0045] Figure 4 This is a schematic diagram showing the distribution of the process nozzles, separator nozzles, and sheet materials provided in this application.

[0046] like Figure 3 and Figure 4As shown, the gas supply mechanism 30 is disposed on the side of the reaction chamber 10 and is located in the process area 11. The gas supply mechanism 30 has a plurality of process nozzles 31, which are spaced apart along a first direction. For example, each process nozzle 31 can output process gas to the material, and each process nozzle 31 can output a different process gas.

[0047] It is understood that during the process of the sheet material 300 moving along the first direction through the process area 11, the sheet material 300 will pass through multiple process nozzles 31 in sequence. In this way, the multiple process nozzles 31 will spray different process gases onto the cross section 301 of the sheet material 300 in sequence. Multiple process gases can be sprayed alternately in a single movement of the sheet material 300, which reduces the process time and improves production efficiency.

[0048] On the other hand, since the sheet material 300 moves in a straight line, when controlling the dwell time of the sheet material 300 under each process nozzle 31 to meet the coating requirements, the system does not need to calculate the angular velocity, moving radius, etc. of the sheet material 300, which reduces factors that can easily cause errors and thus improves the coating quality.

[0049] In some embodiments, the gas supply mechanism 30 has multiple sets, which are spaced apart along a second direction. When the material moves to the process zone, the multiple sets of gas supply mechanisms 30 can respectively output process gas to the cross-sections 301 on multiple sides of the sheet material 300.

[0050] For example, the gas supply mechanism 30 has two sets, which are distributed on opposite sides of the reaction chamber 10 in the second direction. During the process of the sheet material 300 moving along the first direction through the process area 11, the two sets of gas supply mechanisms 30 alternately spray the cross-sections 301 on both sides of the sheet material 300 at the same time. Simultaneous spraying on both sides can be achieved in a single movement of the sheet material 300, reducing the frequency of material clamping and transportation and improving production capacity.

[0051] It is worth noting that, in the examples of this application, the total number and distribution of the multiple sets of air supply mechanisms 30, as well as the working mode of the multiple sets of air supply mechanisms 30, can be adaptively adjusted according to the number and distribution of the cross-sections 301 of the sheet material 300, as long as the requirements of passivation coating can be met. This application does not impose any restrictions on this. For example, if the top surface of the sheet material 300 loaded on the carrier 200 also has a cross-section 301, an additional air supply mechanism 30 corresponding to the top surface of the sheet material 300 can be provided in the reaction chamber 10; if the sheet material 300 loaded on the carrier 200 has a cross-section 301 on only one side, the air supply mechanism 30 facing away from the cross-section 301 in the reaction chamber 10 can pause spraying, and the other set of air supply mechanisms 30 facing the cross-section 301 in the reaction chamber 10 can spray.

[0052] On the other hand, the transport mechanism 20 in this application can drive the material to move back and forth along the first direction. Each time the material moves through the process zone 11, a single layer of coating can be achieved. In this way, the material can achieve multi-layer coating during multiple moves through the process zone 11, thereby increasing the film thickness.

[0053] Figure 5 A schematic diagram showing the distribution of the process nozzle, sheet material, and air extraction port provided in this application.

[0054] Please refer to the following: Figure 5 In some embodiments, the process nozzle 31 is located above the process area 11, that is, the position of the process nozzle 31 is set in the height direction, and the first direction and the second direction are perpendicular to each other with the height direction. The height direction is exemplified by the Z-axis direction in the figure. It can be understood that by setting the process nozzle 31 above the process area 11, the space occupied by the process nozzle 31 in the reaction chamber 10 in the second direction can be reduced.

[0055] The reaction chamber 10 is equipped with an exhaust port 14, which is located in the process area 11 and below the gas supply mechanism 30. When the material moves to the process area 11, the exhaust port 14 is located near the cross-section 301 of the material, and the height of the exhaust port 14 is lower than the lowest point of the cross-section 301 of the material.

[0056] For example, the air extraction port 14 can be a slit-type air extraction port. The air extraction port 14 is distributed on both sides of the process area 11 in the second direction. The air extraction port 14 is located below the process nozzle 31, and in the height direction, the bearing surface of the carrier 200 carrying the sheet material 300 is higher than the position of the air extraction port 14.

[0057] During the gas spraying process, the extraction port 14 generates a local negative pressure by extracting air, creating a low-pressure zone near the two side sections 301 of the sheet material 300. Meanwhile, the gas ejected from the process nozzle 31 generates a local high-pressure zone, creating a pressure gradient between the high-pressure and low-pressure zones. This gradient forces the gas to flow directionally from the high-pressure zone to the low-pressure zone, compelling the gas to diffuse to the two side sections 301 as it reaches the sheet material 300 from the process nozzle 31. The gas diffusion path is as follows: Figure 5 As shown by the dashed arrow in the diagram. Furthermore, by positioning the air extraction port 14 below the lowest point of the cross-section 301 of the sheet material 300, it can be ensured that the airflow can pass through the entire cross-section 301 from top to bottom, achieving a better coating effect.

[0058] In this embodiment, the ratio of the extraction rate of the extraction port 14 to the gas flow rate of the process gas ejected from the process nozzle 31 is defined as S, where 1 / 6 ≤ S ≤ 1 / 4.

[0059] For example, when the extraction rate of the extraction port 14 is 200 sccm (standard cubic centimeters per minute), the ejected process gas flow rate can be 1200 sccm, and S is 1 / 6. As another example, when the extraction rate of the extraction port 14 is 200 sccm, the ejected process gas flow rate can be 1000 sccm, and S is 1 / 5. Yet another example, when the extraction rate of the extraction port 14 is 500 sccm, the ejected process gas flow rate can be 2000 sccm, and S is 1 / 4. The values ​​in the above examples can be adjusted according to actual application requirements, and this application does not impose any limitations on this.

[0060] It is understandable that the extraction rate of the extraction port 14 and the gas flow rate of the process gas ejected from the process nozzle 31 both affect the rate at which the gas flows directionally from the high-pressure area to the low-pressure area. Experimental tests showed that when S < 1 / 6, the negative pressure provided by the extraction port 14 is insufficient, and the gas diffusion is dominated by the gas's inertia, resulting in a low proportion of gas spreading to the cross-section 301. When S > 1 / 4, the negative pressure provided by the extraction port 14 is too high, which can easily cause the gas to be extracted prematurely, reducing the gas coverage time on the cross-section 301 and affecting the spraying effect. Therefore, this application, by limiting the range of S, can balance the gas residence time and diffusion efficiency, ensuring that the gas fully covers the cross-section 301 and improving the coating quality.

[0061] In some embodiments, the passivation device 100 further includes a separating nozzle 40, which is disposed between two adjacent process nozzles 31. The separating nozzle 40 is used to output inert gas to the material. When the gas supply mechanism 30 is operating normally, the separating nozzle 40 and the two adjacent process nozzles 31 output gas simultaneously. The inert gas output by the separating nozzle 40 can separate the process gases output by the two process nozzles 31 to avoid mixing of the two process gases.

[0062] For example, the two process nozzles 31 are defined as process nozzle 31A and process nozzle 31B, respectively, and process nozzle 31A, the separating nozzle 40, and process nozzle 31B are distributed at intervals along a first direction. During the movement of the sheet material 300 through the process zone 11, the sheet material 300 can sequentially pass through process nozzle 31A, the separating nozzle 40, and the process nozzle 31B. At this time, the separating nozzle 40 separates the spray area of ​​process nozzle 31A and the spray area of ​​process nozzle 31B using an inert gas to ensure that the two process gases are sprayed alternately. In some embodiments, the passivation device 100 further includes a furnace door mechanism 50, which is disposed at one end of the reaction chamber 10 near the first heating zone 12.

[0063] In some embodiments, the passivation apparatus 100 further includes a furnace door mechanism 50 disposed at one end of the reaction chamber 10. The furnace door mechanism 50 is used to open or close the reaction chamber 10. When the furnace door mechanism 50 is in the open state, the material to be processed is allowed to enter the reaction chamber 10 from the outside, or the processed material is allowed to leave the reaction chamber 10 from the inside. When the furnace door mechanism 50 is in the closed state, the furnace door mechanism 50 seals the reaction chamber 10 so that a reaction environment that meets the coating requirements can be formed inside the reaction chamber 10.

[0064] It is worth noting that in this embodiment, the number of furnace door mechanisms 50 is one, meaning that materials can enter and exit the reaction chamber 10 from one end. In other embodiments, the number of furnace door mechanisms 50 may be greater than one, meaning there may be multiple furnace door mechanisms 50, which can be distributed at different positions in the reaction chamber 10 to allow materials to enter and exit the reaction chamber 10 from the corresponding positions. The specific configuration can be determined according to the actual application scenario, and this application does not impose any restrictions on this.

[0065] In some embodiments, the reaction chamber 10 further includes a first heating zone 12, which is located on one side of the process zone 11.

[0066] The passivation apparatus 100 further includes a first heating element 60, which is disposed on the side of the reaction chamber 10 and located in the first heating zone 12. For example, the first heating element 60 can be a thermal field. The first heating element 60 extends along a first direction. It is understood that the first heating element 60 can increase the ambient temperature of the reaction chamber 10 to meet the reaction conditions of the process gas.

[0067] In some embodiments, the first heating element 60 has multiple sets, and the multiple sets of first heating elements 60 are distributed at intervals along the second direction. For example, there are two sets of first heating elements 60, distributed on opposite sides of the reaction chamber 10 in the second direction. It can be understood that the multiple sets of first heating elements 60 can heat from both sides of the reaction chamber 10 respectively, improving the heating efficiency and temperature uniformity of the ambient temperature.

[0068] In some embodiments, the furnace door mechanism 50 is disposed at one end of the reaction chamber 10 near the first heating zone 12, and the first heating zone 12 is located between the furnace door mechanism 50 and the process zone 11. Thus, during the process of the sheet material 300 to be processed entering the reaction chamber 10 from the furnace door mechanism 50 and moving to the process zone 11, the sheet material 300 can be preheated by passing through the first heating zone 12 to meet the corresponding coating conditions.

[0069] In some embodiments, the reaction chamber 10 further includes a second heating zone 13, which is located on one side of the process zone 11.

[0070] The passivation apparatus 100 further includes a second heating element 70, which is disposed on the side of the reaction chamber 10 away from the first heating zone 12 and located in the second heating zone 13. For example, the second heating element 70 can be a thermal field. The second heating element 70 extends along a first direction. It is understood that the second heating element 70 and the first heating element 60 can raise the ambient temperature of the reaction chamber 10 from both sides of the process zone 11.

[0071] In some embodiments, the second heating element 70 has multiple sets, which are spaced apart along the second direction. For example, there are two sets of second heating elements 70 distributed on opposite sides of the reaction chamber 10 in the second direction. It is understood that the multiple sets of second heating elements 70 can heat from both sides of the reaction chamber 10 respectively, improving the heating efficiency and temperature uniformity of the ambient temperature.

[0072] In some embodiments, the passivation device 100 further includes a vacuum pump (not shown in the figure). The vacuum pump is connected to the reaction chamber 10 and is used to evacuate the reaction chamber 10. For example, the vacuum pump can be a vacuum dry pump. On the one hand, the vacuum pump can create a vacuum environment within the reaction chamber 10 to meet the corresponding coating conditions; on the other hand, it can remove excess process gas from the reaction chamber 10, reducing dust generated within the reaction chamber 10.

[0073] For ease of understanding, the following description uses the ALD process flow of a passivation apparatus 100 as an example.

[0074] First, the furnace door mechanism 50 is in the open state, and the carrier 200 loaded with multiple sheet materials 300 enters the first heating zone 12 of the reaction chamber 10.

[0075] Then, the furnace door mechanism 50 switches to the closed state, and the first heating element 60 and the second heating element 70 heat up the inside of the reaction chamber 10 so that the ambient temperature inside the reaction chamber 10 rises to the set temperature (e.g., 300°C). The evacuation mechanism is used to evacuate the reaction chamber 10 so that the reaction chamber 10 is in a vacuum state with a pressure of a specified value (e.g., 500 mtorr).

[0076] Then, the transport mechanism 20 drives each sheet material 300 to move in the positive direction of the first direction, so that each sheet material 300 moves from the first heating zone 12 to the second heating zone 13, and the gas supply mechanism 30 outputs process gas.

[0077] As each sheet material 300 moves through the process zone 11, the cross-section 301 of the sheet material 300 passes through the process nozzle 31A, the separating nozzle 40, and the process nozzle 31B in sequence. This causes the cross-sections 301 on both sides of the sheet material 300 to be sprayed by the process nozzle 31A first and then by the process nozzle 31B, so that film layers are formed on both sides of the sheet material 300. At the same time, excess process gas is extracted from the bottom of the reaction chamber 10 by the gas extraction mechanism.

[0078] Then, the gas supply mechanism 30 stops outputting process gas, and the transport mechanism 20 drives each sheet material 300 to move in the negative direction of the first direction, so that each sheet material 300 moves from the second heating zone 13 back to the first heating zone 12.

[0079] Then, the transport mechanism 20 restarts the movement of each sheet material 300 along the positive direction of the first direction, moving each sheet material 300 from the first heating zone 12 to the second heating zone 13. The gas supply mechanism 30 outputs process gas to form a film layer on both sides of the sheet material 300, realizing one reciprocating movement of the sheet material 300 for coating. In this way, after the sheet material 300 has been reciprocated for coating a specified number of times, the film layer on the cross-sections 301 on both sides of the sheet material 300 reaches the specified thickness, thus completing the double-section passivation coating process.

[0080] Then, the transport mechanism 20 moves each sheet material 300 to the first heating zone 12, the furnace door mechanism 50 switches to the open state, and each sheet material 300 leaves the reaction chamber 10 from the furnace door mechanism 50.

[0081] It is understood that the number of times the sheet material 300 moves back and forth in the above process can be configured according to the thickness requirements of the coating, and this application does not impose any restrictions on this.

[0082] Figure 6 A schematic diagram of the working state of the second embodiment of the passivation device provided in this application.

[0083] like Figure 2 and Figure 6 As shown, the difference between this embodiment and the first embodiment is that the reaction chamber 10 has multiple process zones 11, which are spaced apart along a first direction. Multiple sets of gas supply mechanisms 30 are spaced apart along the first direction, and these multiple sets of gas supply mechanisms 30 correspond to the multiple process zones 11. Furthermore, an intermediate heating zone is provided between two adjacent sets of process zones 11, and a heat field located in the intermediate heating zone is also provided between two adjacent sets of gas supply mechanisms 30.

[0084] Thus, when the transport mechanism 20 moves the sheet material 300 through multiple process zones 11, the multiple sets of gas supply mechanisms 30 corresponding to the multiple process zones 11 can sequentially spray multiple process gases to increase the film thickness and thus meet the corresponding coating thickness requirements.

[0085] In this embodiment, furnace door mechanisms 50 are provided at both ends of the reaction chamber 10. The material to be processed can enter the reaction chamber 10 through the furnace door mechanism 50 at one end of the reaction chamber 10, and the processed material can leave the reaction chamber 10 through the furnace door mechanism 50 at the other end of the reaction chamber 10.

[0086] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this application without departing from the spirit and scope of the technical solutions of this application.

Claims

1. A passivation device, characterized in that, include: The reaction chamber has a process area; A transport mechanism is disposed at the bottom of the reaction chamber, the transport mechanism being used to transport materials along a first direction, wherein at least one side of the material has a cross section; A gas supply mechanism is disposed on the side of the reaction chamber and located in the process area; wherein the gas supply mechanism has multiple process nozzles, which are spaced apart along the first direction; when the material moves to the process area, the multiple process nozzles can output different process gases to the material respectively, and make the cross-section of the material contact the process gas.

2. The passivation apparatus according to claim 1, characterized in that, The process nozzle is located above the process area; the reaction chamber is provided with an exhaust port, which is located in the process area and below the gas supply mechanism; when the material moves to the process area, the exhaust port is located near the cross-section of the material, and the height of the exhaust port is lower than the lowest point of the cross-section of the material; the ratio of the exhaust rate of the exhaust port to the gas flow rate of the process gas ejected by the process nozzle is defined as S, where 1 / 6 ≤ S ≤ 1 / 4.

3. The passivation apparatus according to claim 1, characterized in that, The gas supply mechanism has multiple sets, and the multiple sets of gas supply mechanisms are distributed at intervals along the second direction, with an angle between the second direction and the first direction. When the material moves to the process area, multiple sets of gas supply mechanisms can output process gas to multiple cross-sections of the material.

4. The passivation apparatus according to claim 1, characterized in that, The material includes a carrier and multiple sheet materials. The carrier is provided with a receiving cavity, and a connecting port is provided on the side of the carrier, which is connected to the receiving cavity. The cross-section of the side of the sheet material is exposed to the reaction chamber through the communication port, wherein the communication port is positioned directly opposite the gas supply mechanism when the material moves to the process area.

5. The passivation apparatus according to claim 1, characterized in that, The passivation device further includes a separating nozzle, which is disposed between two adjacent process nozzles and is used to output inert gas to the material.

6. The passivation apparatus according to claim 1, characterized in that, The reaction chamber has a first heating zone, which is located on one side of the process area; The passivation device further includes a first heating element, which is disposed on the side of the reaction chamber and located in the first heating zone.

7. The passivation apparatus according to claim 6, characterized in that, The first heating element has multiple sets, and the multiple sets of the first heating element are distributed at intervals along the second direction, with an angle between the second direction and the first direction.

8. The passivation apparatus according to claim 6, characterized in that, The reaction chamber has a second heating zone, which is located on the side of the process area away from the first heating zone. The passivation device further includes a second heating element, which is disposed on the side of the reaction chamber and located in the second heating zone.

9. The passivation apparatus according to claim 8, characterized in that, The second heating element has multiple sets, which are distributed at intervals along a second direction, and the second direction has an angle with the first direction.

10. The passivation apparatus according to claim 6, characterized in that, The passivation device further includes a gas extraction mechanism connected to the reaction chamber, which is used to extract air from the reaction chamber.

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