Special gas supply device

Abstract

This utility model discloses a special gas supply device, including a box housing a special gas cylinder and a sealing door that seals the special gas cylinder within the box. A connector is located on the top of the special gas cylinder, and a pipe hole corresponding to the height of the connector is opened on the side of the box. A sealing structure is provided within the pipe hole. The sealing structure includes a conduit connected to the connector, an inner sealing component sleeved outside the conduit, an outer sealing component threaded to the inner sealing component, and a plug component sandwiched between the inner and outer sealing components to seal the pipe hole. This utility model employs a multi-seal structure design. An outer sealing ring contacts the box via an inner retaining ring, and the inner sealing ring contacts a stop ring, forming a double sealing defense. A metal-rubber composite seal is achieved through O-ring compression deformation, improving pressure resistance compared to traditional single seals. The slip ring connected to the elastic bladder can axially expand and contract under lubrication, and expands outward under pressure to seal the pipe hole.

Description

Technical Field

[0001] This utility model belongs to the technical field of special gas supply, and specifically relates to a special gas supply device. Background Technology

[0002] Specialty gas supply systems are equipment systems used for storing, transporting, and distributing specialty gases, and are widely used in fields such as semiconductors, photovoltaics, and electronics. They can precisely control the flow rate and pressure of specialty gases according to the requirements of production processes, ensuring a stable and accurate supply of gas to production equipment, thereby guaranteeing the consistency and stability of product quality.

[0003] A search revealed that CN217503358U discloses a special gas supply device. Its structure includes a housing, a switch door, a controller, a backplate, a gas supply pipe, a sealing connector, and a control valve. This design is such that when the connection between the gas supply pipe and the pipeline becomes loose and a special gas leaks, the high-speed, high-pressure gas generated by the leak impacts the connecting components inside the sealed enclosure, causing the connection between the sealed enclosure and the top device to shift. This shifts the top device downwards, forming a sealed space with the sealed enclosure to seal the leaked special gas. This effectively prevents the special gas from leaking and harming the surrounding environment and personnel. Furthermore, as the top device shifts downwards, an alarm device is triggered to alert personnel to the special gas leak.

[0004] However, existing specialty gas supply systems have the following problems: Existing specialty gas pipelines typically have a gap between themselves and the cabinet's through-holes, allowing the specialty gas to easily leak out. Many specialty gases are flammable and explosive, such as silane and hydrogen. Once these gases leak into the air and reach a certain concentration, they can easily ignite upon contact with open flames, static electricity, or other ignition sources, posing a serious threat to personnel safety and equipment. Utility Model Content

[0005] The purpose of this utility model is to provide a special gas supply device to solve the problem mentioned in the background art that there is usually a certain gap between the special gas pipeline and the cabinet through hole.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a special gas supply device, comprising a box containing a special gas cylinder, a sealing door that seals the special gas cylinder within the box, a connector being provided on the top of the special gas cylinder, and a pipe hole being provided on the side of the box corresponding to the height of the connector, a sealing structure being provided inside the pipe hole, the sealing structure comprising a conduit connected to the connector, an inner sealing component sleeved outside the conduit, an outer sealing component threadedly engaged with the inner sealing component, and a plugging component sandwiched between the inner sealing component and the outer sealing component to block the pipe hole.

[0007] Preferably, the conduit passes through the tube hole, and a stop ring is provided on the outer wall of the conduit.

[0008] Preferably, the inner sealing component includes a sleeve that passes through a pipe hole inside the box, and an inner retaining ring is provided at one end of the sleeve located inside the box.

[0009] Preferably, the outer diameter of the inner retaining ring is larger than the diameter of the pipe hole, and the inner diameter of the inner retaining ring is smaller than the outer diameter of the stop ring.

[0010] Preferably, the inner retaining ring has an outer sealing ring on its contact surface with the inner wall of the housing, and the inner retaining ring has an inner sealing ring on its contact surface with the stop ring.

[0011] Preferably, the outer sealing component includes a threaded sleeve, which is sleeved outside the housing and threadedly connected to the housing. An outer retaining ring is provided at one end of the threaded sleeve near the inner retaining ring.

[0012] Preferably, the outer diameter of the outer retaining ring is larger than the diameter of the pipe hole.

[0013] Preferably, the sealing component includes an elastic bladder, one end of which is fixed to an inner retaining ring, and the other end of which is fixed to a slip ring, which is slidably sleeved outside the tube sleeve.

[0014] Preferably, the outer surface of the sleeve is coated with a layer of lubricating oil.

[0015] Compared with the prior art, this utility model provides a special gas supply device, which has the following beneficial effects:

[0016] 1. This utility model adopts a multi-seal structure design. The outer sealing ring is set by the inner retaining ring to contact the box body, and the inner sealing ring is in contact with the stop ring to form a double sealing defense. The metal-rubber composite seal is achieved by the compression deformation of the O-ring, which improves the pressure resistance compared with the traditional single seal. The slip ring connected to the elastic bladder can be axially extended and retracted under the lubrication of lubricating oil. When under pressure, it expands outward to seal the pipe hole.

[0017] 2. The sealing component and the inner and outer sealing components of this utility model are all independent units, and all sealing components adopt a quick-release design, which is convenient to disassemble and assemble without special tools. Attached Figure Description

[0018] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0019] Figure 1 This is a schematic diagram of a special gas supply device proposed in this utility model;

[0020] Figure 2 This is a schematic diagram of the internal structure of the box proposed in this utility model;

[0021] Figure 3 This is a schematic diagram of the overall structure of the sealing structure proposed in this utility model;

[0022] Figure 4 This is an exploded view of the sealing structure proposed in this utility model;

[0023] Figure 5 This is a schematic cross-sectional view of the sealing structure proposed in this utility model;

[0024] In the diagram: 1. Box body; 2. Sealing door; 3. Pipe hole; 4. Sealing structure; 41. Conduit; 411. Stop ring; 42. Inner sealing component; 421. Pipe sleeve; 422. Inner retaining ring; 423. Outer sealing ring; 424. Inner sealing ring; 43. Outer sealing component; 431. Threaded sleeve; 432. Outer retaining ring; 44. Sealing plug component; 441. Elastic bladder; 442. Slip ring; 5. Special gas cylinder; 6. Connector. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] Please see Figures 1-5 This utility model provides a technical solution: a special gas supply device, including a box 1 containing a special gas cylinder 5, a sealing door 2 that seals the special gas cylinder 5 inside the box 1, a connector 6 on the top of the special gas cylinder 5, and a pipe hole 3 on the side of the box 1 corresponding to the height of the connector 6. A sealing structure 4 is provided inside the pipe hole 3. The sealing structure 4 includes a conduit 41 connected to the connector 6, an inner sealing component 42 sleeved outside the conduit 41, an outer sealing component 43 threadedly engaged with the inner sealing component 42, and a plugging component 44 clamped between the inner sealing component 42 and the outer sealing component 43 to block the pipe hole 3.

[0027] like Figure 3 and Figure 4 As shown, the conduit 41 passes through the tube hole 3, and a stop ring 411 is provided on the outer wall of the conduit 41. The stop ring 411 and the inner retaining ring 422 form an axial positioning.

[0028] Furthermore, the inner sealing component 42 includes a sleeve 421, which passes through the pipe hole 3 inside the housing 1. One end of the sleeve 421 inside the housing 1 is provided with an inner retaining ring 422. The outer diameter of the inner retaining ring 422 is larger than the diameter of the pipe hole 3, and the inner diameter of the inner retaining ring 422 is smaller than the outer diameter of the stop ring 411. An outer sealing ring 423 is provided on the contact surface of the inner retaining ring 422 with the inner wall of the housing 1, and an inner sealing ring 424 is provided on the contact surface of the inner retaining ring 422 with the stop ring 411. The outer sealing ring 423 contacts the housing through the inner retaining ring, and the inner sealing ring 424 contacts the stop ring, forming a double sealing defense line. The metal-rubber composite seal is achieved by the compression deformation of the O-ring, which improves the pressure resistance compared with the traditional single seal.

[0029] Furthermore, the outer sealing component 43 includes a threaded sleeve 431, which is sleeved on the outside of the tube sleeve 421 by the housing 1 and threadedly connected to the tube sleeve 421. The end of the threaded sleeve 431 near the inner retaining ring 422 is provided with an outer retaining ring 432, the outer diameter of which is larger than the diameter of the tube hole 3, and is used to position the outer sealing component 43 inside the housing 1.

[0030] Furthermore, the sealing component 44 includes an elastic bladder 441, one end of which is fixed to the inner retaining ring 422, and the other end of which is fixed to a slip ring 442. The slip ring 442 is slidably sleeved on the outside of the tube sleeve 421. The elastic bladder 441 is made of fluororubber + PTFE composite material, and its working temperature range is -40℃ to +150℃.

[0031] Furthermore, the sleeve 421 is coated with a layer of lubricating oil. The lubricating oil is a perfluoropolyether (PFPE) grease, which has good antioxidant properties. The elastic bladder 441 can expand and contract axially under the lubrication of the lubricating oil, while the slip ring 442 slides from the outside of the sleeve 421 in the direction of the inner retaining ring 422. Since the slip ring 442 and the sleeve 421 are sealed by the lubricating oil, the air pressure inside the elastic bladder 441 increases and expands outward, thereby filling the tube hole 3.

[0032] The working principle and usage process of this utility model are as follows: First, the conduit 41 is passed through the pipe hole 3 from the outside. Then, the sleeve 421 is fitted over the conduit 41. Next, the conduit 41 is connected to the connector 6 at the top of the special gas cylinder 5. Then, the threaded sleeve 431 is fitted over the conduit 41 from the outside, and then over the sleeve 421. By screwing the threaded sleeve 431, the threads of the threaded sleeve 431 and the sleeve 421 gradually reduce the distance between the outer retaining ring 432 and the inner retaining ring 422 until the inner... The retaining ring 422 and the outer retaining ring 432 are respectively pressed against the inner and outer walls of the housing 1. During this process, the outer retaining ring 432 presses against the sliding ring 442, causing the sliding ring 442 to slide from the outside of the sleeve 421 towards the direction of the inner retaining ring 422. Since the sliding ring 442 and the sleeve 421 are lubricated and sealed by lubricating oil, the air pressure inside the elastic bladder 441 increases and expands outward, thereby filling the pipe hole 3 and sealing the pipe hole 3, thus solving the air leakage problem caused by the loose connection of the connector 6.

[0033] This technical solution combines mechanical structure innovation with materials science, achieving rapid installation, intelligent compensation, and convenient maintenance while ensuring sealing reliability. It significantly improves the overall performance compared to traditional special gas supply devices, and is especially suitable for the safe transportation of high-purity and high-hazard special gases.

[0034] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A special gas supply device, comprising a housing (1) containing a special gas cylinder (5) and a sealing door (2) enclosing the special gas cylinder (5) within the housing (1), characterized in that: The top of the special gas cylinder (5) is provided with a connector (6), and the side of the box body (1) is provided with a pipe hole (3) corresponding to the height position of the connector (6). A sealing structure (4) is provided in the pipe hole (3). The sealing structure (4) includes a conduit (41) connected to the connector (6), an inner sealing component (42) sleeved outside the conduit (41), an outer sealing component (43) threaded with the inner sealing component (42), and a plugging component (44) sandwiched between the inner sealing component (42) and the outer sealing component (43) to block the pipe hole (3).

2. The special gas supply device according to claim 1, characterized in that: The conduit (41) passes through the tube hole (3), and a stop ring (411) is provided on the outer wall of the conduit (41).

3. A special gas supply device according to claim 2, characterized in that: The inner sealing component (42) includes a sleeve (421), which is inserted into the pipe hole (3) from inside the box (1). One end of the sleeve (421) inside the box (1) is provided with an inner retaining ring (422).

4. A special gas supply device according to claim 3, characterized in that: The outer diameter of the inner retaining ring (422) is greater than the diameter of the pipe hole (3), and the inner diameter of the inner retaining ring (422) is smaller than the outer diameter of the stop ring (411).

5. A special gas supply device according to claim 3, characterized in that: The inner retaining ring (422) has an outer sealing ring (423) on the contact surface with the inner wall of the housing (1), and the inner retaining ring (422) has an inner sealing ring (424) on the contact surface with the stop ring (411).

6. A special gas supply device according to claim 3, characterized in that: The outer sealing component (43) includes a threaded sleeve (431), which is sleeved outside the casing (421) by the housing (1) and threadedly connected to the casing (421). The threaded sleeve (431) has an outer retaining ring (432) at one end near the inner retaining ring (422).

7. A special gas supply device according to claim 6, characterized in that: The outer diameter of the outer retaining ring (432) is larger than the diameter of the tube hole (3).

8. A special gas supply device according to claim 6, characterized in that: The sealing component (44) includes an elastic bladder (441), one end of which is fixed to an inner retaining ring (422), and the other end of which is fixed to a slip ring (442), which is slidably sleeved outside the tube sleeve (421).

9. A special gas supply device according to claim 3, characterized in that: The sleeve (421) is coated with a layer of lubricating oil.

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