Multi-zone temperature controlled tube furnace

Abstract

The utility model discloses a kind of multi-zone temperature control pipe type furnace, it is related to pipe type furnace technical field, comprising: equipment bin and heating bin;Heating bin is installed with multiple heat insulating plates, heat insulating plate is divided into multiple temperature zones in heating bin;Each temperature zone is provided with electric heating rod;Each temperature zone is installed with combustion pipe and temperature sensor;Combustion pipe is used to place sample;Through hole is provided on heat insulating plate, and the side of heat insulating plate is provided with plugging plate;Electric push rod is installed in equipment bin, and electric push rod is connected with plugging plate, for moving plugging plate, to control the closing and opening of through hole.The utility model can complete the heating process of multiple samples at a time, is conducive to improving experimental speed, improve experimental efficiency;The utility model is opened by through hole, so that heat is rapidly exchanged between adjacent temperature zones, even if partial electric heating rod failure occurs, it also does not affect the normal operation of entire equipment, is conducive to improving the use stability of equipment.

Description

Technical Field

[0001] This utility model relates to the field of tubular furnace technology, and in particular to a multi-zone temperature-controlled tubular furnace. Background Technology

[0002] A tube furnace is a high-temperature heating device with a sealed tubular cavity as its core, which realizes processes such as material heat treatment, chemical reaction, and synthesis through precise temperature control. Its core advantages lie in the uniform temperature field, controllable atmosphere, and flexible adaptability, and it is widely used in materials science, chemical synthesis, semiconductors, and new energy fields.

[0003] A three-zone tube furnace is a high-end heat treatment equipment with multi-segment independent temperature control. By dividing the furnace body into three independent temperature zones—front, middle, and rear—it achieves temperature gradient control or long, uniform temperature zone expansion, making it suitable for complex processes (such as crystal growth and gradient material synthesis). Each temperature zone is equipped with an independent silicon carbide / silicon molybdenum rod, with an adjustable power distribution ratio (e.g., 30%:40%:30%). Alumina fiber modules separate the temperature zones, reducing thermal interference.

[0004] However, each zone of the existing three-zone tube furnace uses independent electric heating. If the electric heating equipment of one zone is damaged, the combustion tube in that zone of the tube furnace will not be able to be used normally, which has certain drawbacks. In addition, the existing three-zone tube furnaces all use a single tube design, which can only heat one experimental sample at a time, resulting in low experimental efficiency. Utility Model Content

[0005] In order to overcome the defects in the prior art, this utility model provides a multi-zone temperature-controlled tube furnace, which can improve the stability and efficiency of the equipment.

[0006] To achieve the above objectives, the present invention adopts the following technical solution, including:

[0007] A multi-zone temperature-controlled tubular furnace includes: an equipment compartment and a heating compartment;

[0008] The heating chamber is equipped with multiple heat insulation plates, which divide the heating chamber into multiple temperature zones.

[0009] Each temperature zone is equipped with an independent heating source, which includes an electric heating rod installed inside the heating chamber; a control terminal is installed inside the equipment chamber; the control terminal is electrically connected to the electric heating rod and is used to control the operation of the electric heating rod.

[0010] Each temperature zone is equipped with a combustion tube and a temperature sensor; the combustion tube is used to place the sample; the temperature sensor is used to measure the temperature in each temperature zone, and the temperature sensor is electrically connected to the control terminal.

[0011] The heat insulation board is provided with through holes, and a sealing mechanism is provided on one side of the heat insulation board; the sealing mechanism includes a sealing plate; an electric push rod is installed in the equipment compartment, and the electric push rod is electrically connected to the control end; the electric push rod is connected to the sealing plate and is used to move the sealing plate, thereby controlling the closing and opening of the through holes.

[0012] Preferably, a heat-absorbing end is installed inside the heating chamber, a refrigeration device is installed inside the equipment chamber, and a heat-releasing end is installed outside the equipment chamber. The refrigeration device is connected to both the heat-absorbing end and the heat-releasing end. The refrigeration device is used to absorb heat from the heating chamber through the heat-absorbing end and release heat through the heat-releasing end.

[0013] Preferably, the heating chamber includes a hinged bottom chamber and a top cover; the heat insulation plate is composed of two half-plates, each installed in the bottom chamber and the top cover respectively;

[0014] The bottom compartment is equipped with quick-fixing mechanisms on both sides. The quick-fixing mechanisms include a hinged first arc-shaped block and a second arc-shaped block. The size of the ring formed by the first arc-shaped block and the second arc-shaped block after closing is adapted to the diameter of the combustion tube and is used to fix the combustion tube. The first arc-shaped block is fixedly connected to the bottom compartment. The first arc-shaped block and the second arc-shaped block are respectively provided with corresponding positioning grooves and pins. A pad is also installed on the first arc-shaped block.

[0015] Preferably, the heating chamber includes a hinged bottom chamber and a top cover; a lock and a limit switch are installed on the bottom chamber; the limit switch is used to close when the top cover closes on the bottom chamber and touches the limit switch, and the lock is used to lock the top cover and the bottom chamber together when the limit switch is closed.

[0016] Preferably, corresponding sealing half-rings are installed in the bottom compartment and the top cover respectively, and the two sealing half-rings are combined into a sealing ring to clamp and seal the combustion tube, thereby achieving a seal between the combustion tube and the heating compartment.

[0017] Preferably, an air inlet connector and an air outlet connector are installed at both ends of the combustion tube; a pressure gauge is installed on the air inlet connector and a valve is installed on the air outlet connector.

[0018] Preferably, a honeycomb ceramic exhaust gas treatment pipe is installed inside the combustion pipe.

[0019] Preferably, the equipment compartment is equipped with an intelligent instrument, a temperature adjustment button, and a control button group; the intelligent instrument is used to display the temperature of each temperature zone in the heating compartment and the power of each electric heating rod; the temperature adjustment button is used to set the target temperature value of the electric heating rod; the control button group includes a main power button, a start button, a stop button, and an emergency stop button.

[0020] Preferably, the inner wall of the combustion tube is coated with a repair coating containing nano-ceramic particles.

[0021] Preferably, an inert gas, a reducing gas, or a mixture is introduced into the combustion tube; or, the combustion tube is evacuated.

[0022] The advantages of this utility model are:

[0023] (1) This utility model sets up an equipment chamber and a heating chamber, and sets up multiple temperature zones in the heating chamber. Each temperature zone is equipped with an independent heating source and an independent combustion tube. The multiple combustion tubes are heated separately, which can complete the heating process of multiple samples at one time. This is beneficial to improve the experimental speed and efficiency. By setting up a sealing mechanism, the independent heating source in the adjacent temperature zone can be replaced by the adjacent independent heating source, so that the faulty temperature zone can be heated normally, thereby improving the stability of the equipment.

[0024] (2) By setting up a heat-absorbing end, a refrigeration device and a heat-releasing end, this utility model can conveniently cool down the combustion tube.

[0025] (3) By providing a quick-fixing mechanism, this utility model can facilitate the quick installation and disassembly of the combustion tube.

[0026] (4) By installing pads on the quick-fixing mechanism, this utility model can flexibly fix the combustion tube in the quick-fixing mechanism, reducing surface damage to the combustion tube.

[0027] (5) By setting a sealing half-ring, this utility model can improve the sealing of the heating chamber, reduce heat loss, and thus reduce energy consumption.

[0028] (6) By installing a honeycomb ceramic exhaust gas treatment pipe inside the combustion tube, this utility model can conveniently treat the generated exhaust gas and reduce exhaust gas emission pollution.

[0029] (7) This utility model can easily achieve automatic repair of the combustion tube by coating the inner wall of the combustion tube with an intelligent repair coating containing nano-ceramic particles, which is beneficial to improving the service life of the combustion tube.

[0030] (8) By setting an air inlet connector and an air outlet connector at both ends of the combustion tube, this utility model can conveniently control the air intake and exhaust of the combustion tube and realize the atmosphere control inside the combustion tube.

[0031] (9) By installing a lock and a limit switch, this utility model can easily close and lock the bottom chamber and the top cover, thus sealing the heating chamber.

[0032] (10) This utility model, by setting up intelligent instruments and temperature adjustment buttons, can conveniently display and set the target temperature and real-time temperature of each temperature zone in the heating chamber. By setting up a control button group, the start and stop control of the equipment can be conveniently realized.

[0033] (11) This utility model enables rapid heat exchange between adjacent temperature zones by controlling the opening of the through hole, replacing the electric heating rod in the faulty temperature zone and heating the combustion tube in the faulty temperature zone. This ensures that even if some electric heating rods fail, the normal operation of the entire equipment will not be affected, which is beneficial to improving the stability of the equipment. Furthermore, the heating rate and temperature of the combustion tube can be controlled by controlling the size of the exposed through hole. Attached Figure Description

[0034] Figure 1 A schematic diagram of the structure of the multi-zone temperature-controlled tubular furnace provided by this utility model;

[0035] Figure 2 for Figure 1 A side sectional view of the multi-zone temperature-controlled tubular furnace is shown.

[0036] Figure 3 for Figure 1 The diagram shown illustrates the use of a multi-zone temperature-controlled tube furnace.

[0037] Figure 4 for Figure 1 The diagram shows the disassembly and assembly of the combustion tube in a multi-zone temperature-controlled tubular furnace.

[0038] Figure 5 for Figure 1 The diagram shows the structure of the rapid fixing mechanism in a multi-zone temperature-controlled tubular furnace.

[0039] Figure 6 for Figure 1 The diagram shows the structure of the combustion tube in a multi-zone temperature-controlled tubular furnace.

[0040] Figure 7 for Figure 1 The diagram shows the structure of the honeycomb ceramic exhaust gas treatment pipe in a multi-zone temperature-controlled tubular furnace.

[0041] The corresponding names of the attached figures are as follows: 1-Equipment compartment, 2-Heating compartment, 3-Combustion tube, 4-Bottom compartment, 5-Top cover, 6-Insulation plate, 7-Electric heating rod, 8-Control end, 9-Temperature sensor, 10-Through hole, 11-Sealing plate, 12-Electric push rod, 13-Heat absorption end, 14-Refrigeration equipment, 15-Heat release end, 16-Quick fixing mechanism, 17-First arc block, 18-Second arc block, 19-Pin rod, 20-Positioning groove, 21-Padded block, 22-Inlet connector, 23-Pressure gauge, 24-Outlet connector, 25-Valve, 26-Honeycomb ceramic exhaust gas treatment pipe, 27-Lock, 28-Limit switch, 29-Intelligent instrument, 30-Temperature adjustment button, 31-Control button group. Detailed Implementation

[0042] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0043] Example 1:

[0044] like Figure 1-7As shown, the multi-zone temperature-controlled tube furnace provided by this utility model includes: an equipment chamber 1 and a heating chamber 2 located on top of the equipment chamber 1. Multiple heat insulation plates 6 are installed inside the heating chamber 2, dividing the interior of the heating chamber 2 into three temperature zones. Each of the three temperature zones is equipped with an independent heating source, including an electric heating rod 7 installed inside the heating chamber 2. The electric heating rod 7 can be made of silicon carbide or silicon molybdenum. The electric heating rod 7 is electrically connected to a control terminal 8 installed inside the equipment chamber 1. Combustion tubes 3 and temperature sensors 9 are installed in each of the three temperature zones. Different tube materials can be selected according to the heating temperature, such as corundum tubes or quartz tubes. Different samples can be placed in the multiple combustion tubes 3. Through holes 10 are provided on the heat insulation plates 6 to accelerate the heat exchange rate between the two sides of the heat insulation plates 6. A sealing mechanism is provided on one side of the heat insulation plates 6, including a sealing plate 11 made of heat insulation material. The sealing plate 11 is connected to an electric push rod 12 installed inside the equipment chamber 1. During use, multiple combustion tubes can be... Different experimental samples are added to each of the three combustion tubes 3. The electric heating rod 7 is controlled by the control terminal 8 to heat each temperature zone, so that the samples in each combustion tube 3 can reach the designed temperature. The temperature sensor 9 detects the temperature of each temperature zone and transmits the data to the control terminal 8. The control terminal 8 controls the electric heating rod 7 to start / stop in a timely manner. Its control program can be designed according to the existing three-temperature zone tube furnace, which will not be elaborated here. The temperature of each temperature zone reaches the heating temperature value of each combustion tube 3. If one of the electric heating rods 7 is damaged, the through hole 10 of the adjacent temperature zone (the side with a higher temperature) will be opened. The specific operation is as follows: the electric push rod 12 is started, its output shaft is shortened and the sealing plate 11 is lowered, so that the through hole 10 is exposed. The hot air in the adjacent temperature zone enters the current temperature zone through the through hole 10 to realize the rapid exchange of heat, replacing the damaged electric heating rod 7 in the current temperature zone, and realizing the heating of the combustion tube 3 in the current temperature zone. The heating rate and temperature of the combustion tube 3 can be controlled by controlling the size of the exposed through hole 10. This ensures that even if some of the electric heating rods 7 are damaged, the normal operation of the entire equipment will not be affected. This improves the stability of the equipment. It should be noted that this method is suitable for short-term replacement use, but not for long-term use. This invention employs a multi-tube structural design, enabling the simultaneous heating of multiple samples in each combustion tube 3, thus saving experimental time and improving efficiency. It should be noted that the sample loading process in the combustion tube 3 and subsequent usage procedures can refer to existing tube furnace operating procedures, which will not be elaborated here.

[0045] By setting up equipment chamber 1 and heating chamber 2, and setting up an independent heating source in heating chamber 2 to heat multiple combustion tubes 3 separately, the heating process of multiple samples can be completed at one time, which is beneficial to improve the experimental speed and efficiency. By setting up a sealing mechanism, the independent heating source in the adjacent temperature zone can be replaced by a nearby independent heating source, so that the combustion tube 3 in that temperature zone can be heated normally, thereby improving the stability of the equipment.

[0046] Example 2:

[0047] like Figure 2 As shown, a heat-absorbing end 13 is installed in the heating chamber 2, a cooling device 14 is installed in the equipment chamber 1, and a heat-releasing end 15 is installed at the bottom of the equipment chamber 1. The cooling device 14 is connected to the heat-absorbing end 13 and the heat-releasing end 15. When in use, the cooling device 14 can absorb heat from each temperature zone in the heating chamber 2 through the heat-absorbing end 13 and release heat through the heat-releasing end 15, which can effectively reduce the temperature in the heating chamber 2 and cool down the combustion tube 3.

[0048] By setting up a heat absorption end 13, a cooling device 14, and a heat release end 15, the combustion tube 3 can be easily cooled down.

[0049] Example 3:

[0050] like Figure 2-5 As shown, the heating chamber 2 includes a hinged bottom chamber 4 and a top cover 5. The heat insulation plate 6 is composed of two half-plates, each installed on the bottom chamber 4 and the top cover 5 respectively. To facilitate the disassembly of the combustion tube 3, quick-fixing mechanisms 16 are installed on both sides of the bottom chamber 4. The quick-fixing mechanism 16 includes a hinged first arc-shaped block 17 and a second arc-shaped block 18. The first arc-shaped block 17 is fixedly connected to the bottom chamber 4, and a positioning groove 20 is provided on one side of the first arc-shaped block 17. A pin 19 is installed on the second arc-shaped block 18. The pin 19 is a spring pin that can be pulled outward. In use, the combustion tube 3 is placed on the arc-shaped groove of the first arc-shaped block 17, and then the second arc-shaped block 18 is flipped so that the pin 19 is aligned with the positioning groove 20. The pin 19 is then inserted into the positioning groove 20 to fix the combustion tube 3. Conversely, the combustion tube 3 can be quickly disassembled. This structural design makes it convenient to install and disassemble the combustion tube 3, making it more convenient to use.

[0051] By incorporating a quick-fixing mechanism 16, the combustion tube 3 can be easily installed and removed quickly.

[0052] Example 4:

[0053] like Figure 5 As shown, a pad 21 is installed on the first arc-shaped block 17. The pad 21 is made of a soft, high-temperature resistant material. When in use, the combustion tube 3 contacts the pad 21 and squeezes the pad 21, thereby flexibly fixing the combustion tube 3 in the quick-fixing mechanism 16.

[0054] By installing a pad 21 on the first arc-shaped block 17, the combustion tube 3 can be flexibly fixed in the quick-fixing mechanism 16, reducing surface damage to the combustion tube 3.

[0055] Example 5:

[0056] like Figure 6 As shown, in this embodiment, an inlet connector 22 is installed at the inlet end of the combustion tube 3, through which inert gas or other types of gas can be introduced. A pressure gauge 23 is installed on the inlet connector 22, through which the inlet pressure value can be viewed. An outlet connector 24 is installed at the outlet end of the combustion tube 3, and a valve 25 is installed on the outlet connector 24. The valve 25 is a needle valve or other type, which will not be described in detail here. In use, inert gas (N2, Ar), reducing gas (H2), or a mixture of gases can be introduced into the combustion tube 3 through the inlet connector 22, so that the sample in the combustion tube 3 comes into contact with the gas (preventing reaction or participating in reaction), thereby achieving atmosphere control in the combustion tube 3. Similarly, the inlet connector 22 at the inlet end can be replaced with a plug to close the inlet end, and a vacuum pump or other equipment can be connected to the outlet connector 24 at the outlet end to evacuate the gas inside the combustion tube 3, thereby achieving a near-vacuum state inside the combustion tube 3, thereby achieving multiple atmosphere control in the combustion tube 3. It is worth noting that the connection between the combustion pipe 3 and the air inlet connector 22 and the air outlet connector 24 can be achieved by flange connection, threaded connection, hinge connection, etc., provided that the sealing performance can be guaranteed.

[0057] By setting the intake connector 22 and the exhaust connector 24, the intake and exhaust of the combustion tube 3 can be easily controlled, thereby achieving atmosphere control of the combustion tube 3.

[0058] Example 6:

[0059] like Figure 7 As shown, a honeycomb ceramic exhaust gas treatment tube 26 can also be installed inside the combustion tube 3 according to experimental needs. The honeycomb ceramic exhaust gas treatment tube 26 has a honeycomb structure and does not affect the passage of gas when placed inside the combustion tube 3. The outer diameter of the honeycomb ceramic exhaust gas treatment tube 26 is slightly smaller than the inner diameter of the combustion tube 3. The honeycomb ceramic exhaust gas treatment tube 26 can be supplemented with ZrO2-CeO2 composite carrier + Pt / Pd, or V2O5-WO3 / TiO2, or Pt / Al2O3, etc., according to experimental needs, to treat CO, VOCs, nitrogen oxides, etc. in the exhaust gas, respectively, thereby treating the emitted exhaust gas and reducing emission pollution.

[0060] By installing a honeycomb ceramic exhaust gas treatment pipe 26 inside the combustion pipe 3, the generated exhaust gas can be easily treated, reducing exhaust gas emission pollution.

[0061] Example 7:

[0062] like Figure 3 As shown, a lock 27 is installed on the bottom compartment 4. The lock 27 is a mechanical lock or an electronic lock, which can lock the top cover 5 and the bottom compartment 4 when closed. At the same time, a limit switch 28 is installed on one side of the bottom compartment 4. When the top cover 5 is closed in the bottom compartment 4, the limit switch 28 can only be closed when the top cover 5 touches the limit switch 28, and then the lock 27 can be locked.

[0063] By installing the lock 27 and the limit switch 28, the bottom chamber 4 and the top cover 5 can be easily closed and locked, thus sealing the heating chamber 2.

[0064] Example 8:

[0065] like Figure 3-4 As shown, in this embodiment, multiple smart meters 29 are installed on one side of the front of the equipment compartment 1. The smart meters 29 display the temperature of the three temperature zones in the heating compartment 2 and the real-time power of the electric heating rod 7. A temperature adjustment button 30 is provided on one side of the smart meters 29, and the target temperature value of the electric heating rod 7 can be set through the temperature adjustment button 30.

[0066] By setting up the intelligent instrument 29 and the temperature adjustment button 30, the target temperature and real-time temperature of each temperature zone in the heating chamber 2 can be easily displayed and set.

[0067] Example 9:

[0068] like Figure 2-3 As shown, in this embodiment, a control button group 31 is installed on one side of the front of the equipment compartment 1. The control button group 31 includes a main power button, a start button, a stop button, an emergency stop button, etc., which are used to control the start and stop of the equipment. It is worth mentioning that the start button of the equipment is linked with the limit switch 28. When the limit switch 28 is not closed, the start button of the equipment cannot be started, thereby avoiding the heating compartment 2 from not being fully closed, resulting in excessive energy consumption.

[0069] By installing a control button group 31 on the front of the equipment compartment 1, the start and stop control of the equipment can be easily realized.

[0070] Example 10:

[0071] In this embodiment, a smart repair coating containing nano-ceramic particles is coated on the inner wall of the combustion tube 3, which can automatically repair cracks at high temperatures and extend its service life. The method of implementation is as follows: a microencapsulated repair agent (such as liquid silane) is added to the silicon carbide composite material, triggering a repair reaction at temperatures above 1200°C. This process will not be described in detail here.

[0072] By coating the inner wall of the combustion tube 3 with an intelligent repair coating containing nano-ceramic particles, the combustion tube 3 can be easily repaired automatically, which helps to improve the service life of the combustion tube 3.

[0073] Example 11:

[0074] Sealing half-rings are installed in the bottom chamber 4 and the top cover 5. The two sealing half-rings are combined into a sealing ring to clamp and seal the combustion tube 3, thereby sealing the connection between the combustion tube 3 and the heating chamber 2 and reducing heat loss.

[0075] By setting a sealing semi-ring, the sealing performance of the heating chamber 2 can be improved, heat loss can be reduced, and energy consumption can be reduced.

[0076] It is worth mentioning that the temperature range of each combustion tube 3 can be designed as needed. The maximum temperature can be designed to be 1700℃, 1600℃, or 1500℃. The specific actual temperature range can be designed according to actual needs, which will not be elaborated here.

[0077] Working principle: During use, different experimental samples can be added to multiple combustion tubes 3. The electric heating rod 7 is controlled by the control terminal 8 to heat each temperature zone, so that the samples in each combustion tube 3 can reach the designed temperature. The temperature sensor 9 detects the temperature of each temperature zone and transmits the data to the control terminal 8. The control terminal 8 controls the electric heating rod 7 to start / stop in a timely manner. Its control program can be designed according to the existing three-temperature zone tube furnace, which will not be elaborated here. The temperature of each temperature zone reaches the heating temperature value of each combustion tube 3. If one of the electric heating rods 7 is damaged, the through hole 10 of the adjacent temperature zone (the side with a higher temperature) will be opened. The specific operation is as follows: the electric push rod 12 is started, its output shaft is shortened and the sealing plate 11 is lowered, so that the through hole 10 is exposed. The hot air in the adjacent temperature zone enters the current temperature zone through the through hole 10 to realize the rapid exchange of heat, replacing the damaged electric heating rod 7 in the current temperature zone, and realizing the heating of the combustion tube 3 in the current temperature zone. The heating rate and temperature of the combustion tube 3 can be controlled by controlling the size of the exposed through hole 10. This ensures that even if some of the electric heating rods 7 are damaged, it will not affect the normal operation of the entire device. This improves the stability of the device. It is worth noting that this method of use is suitable for short-term replacement, but not for long-term use.

[0078] This utility model adopts a multi-tube structure design, which can complete the heating process of multiple samples in each combustion tube 3 at one time, thereby saving experimental time and improving experimental efficiency. The sample loading in the combustion tube 3 and the subsequent use process can refer to the existing tube furnace usage procedures, which will not be repeated here.

[0079] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A multi-zone temperature-controlled tubular furnace, characterized in that, include: Equipment compartment (1) and heating compartment (2); The heating chamber (2) is equipped with multiple heat insulation plates (6), which divide the heating chamber (2) into multiple temperature zones. Each temperature zone is equipped with an independent heating source, which includes an electric heating rod (7) installed in the heating chamber (2); a control terminal (8) is installed in the equipment chamber (1); the control terminal (8) is electrically connected to the electric heating rod (7) and is used to control the operation of the electric heating rod (7); Each temperature zone is equipped with a combustion tube (3) and a temperature sensor (9); the combustion tube (3) is used to place the sample; the temperature sensor (9) is used to measure the temperature in each temperature zone, and the temperature sensor (9) is electrically connected to the control terminal (8); The heat insulation plate (6) is provided with a through hole (10), and a sealing mechanism is provided on one side of the heat insulation plate (6); the sealing mechanism includes a sealing plate (11); an electric push rod (12) is installed in the equipment compartment (1), and the electric push rod (12) is electrically connected to the control terminal (8); the electric push rod (12) is connected to the sealing plate (11) and is used to move the sealing plate (11) to control the closing and opening of the through hole (10).

2. The multi-zone temperature-controlled tubular furnace according to claim 1, characterized in that, The heating chamber (2) is equipped with a heat-absorbing end (13), the equipment chamber (1) is equipped with a refrigeration device (14), and the equipment chamber (1) is equipped with a heat-releasing end (15). The refrigeration device (14) is connected to the heat-absorbing end (13) and the heat-releasing end (15) respectively. The refrigeration device (14) is used to absorb heat in the heating chamber (2) through the heat-absorbing end (13) and release heat through the heat-releasing end (15).

3. The multi-zone temperature-controlled tubular furnace according to claim 1, characterized in that, The heating chamber (2) includes a hinged bottom chamber (4) and a top cover (5); the heat insulation plate (6) is composed of two half-plates, each installed in the bottom chamber (4) and the top cover (5); The bottom compartment (4) is equipped with quick-fixing mechanisms (16) on both sides. The quick-fixing mechanism (16) includes a hinged first arc block (17) and a second arc block (18). The size of the ring formed by the first arc block (17) and the second arc block (18) after closing is adapted to the diameter of the combustion tube (3) and is used to fix the combustion tube (3). The first arc block (17) is fixedly connected to the bottom compartment (4). The first arc block (17) and the second arc block (18) are respectively provided with corresponding positioning grooves (20) and pins (19). A pad (21) is also installed on the first arc block (17).

4. A multi-zone temperature-controlled tubular furnace according to claim 1 or 3, characterized in that, The heating chamber (2) includes a hinged bottom chamber (4) and a top cover (5); a lock (27) and a limit switch (28) are installed on the bottom chamber (4); the limit switch (28) is used to close when the top cover (5) closes on the bottom chamber (4) and touches the limit switch (28); the lock (27) is used to lock the top cover (5) and the bottom chamber (4) when the limit switch (28) is closed.

5. A multi-zone temperature-controlled tubular furnace according to claim 3, characterized in that, Corresponding sealing half-rings are installed in the bottom chamber (4) and the top cover (5), and the two sealing half-rings are combined into a sealing ring to clamp and seal the combustion tube (3) to achieve a seal between the combustion tube (3) and the heating chamber (2).

6. A multi-zone temperature-controlled tubular furnace according to claim 1, characterized in that, The combustion tube (3) has an air inlet connector (22) and an air outlet connector (24) installed at both ends respectively; a pressure gauge (23) is installed on the air inlet connector (22) and a valve (25) is installed on the air outlet connector (24).

7. A multi-zone temperature-controlled tubular furnace according to claim 1, characterized in that, A honeycomb ceramic exhaust gas treatment pipe (26) is installed inside the combustion pipe (3).

8. A multi-zone temperature-controlled tubular furnace according to claim 1, characterized in that, The equipment compartment (1) is equipped with an intelligent instrument (29), a temperature adjustment button (30), and a control button group (31); the intelligent instrument (29) is used to display the temperature of each temperature zone in the heating compartment (2) and the power of each electric heating rod (7); the temperature adjustment button (30) is used to set the target temperature value of the electric heating rod (7); the control button group (31) includes a main power button, a start button, a stop button, and an emergency stop button.

9. A multi-zone temperature-controlled tubular furnace according to claim 1, characterized in that, The inner wall of the combustion tube (3) is coated with a repair coating containing nano-ceramic particles.

10. A multi-zone temperature-controlled tubular furnace according to claim 1, characterized in that, An inert gas, a reducing gas, or a mixture is introduced into the combustion tube (3); or, the combustion tube (3) is evacuated.

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