Wafer handling drive apparatus and system

Abstract

The utility model relates to wafer carrying equipment technical field especially is a kind of wafer carrying drive device and system, including carrying frame, lift mechanism being installed in carrying frame, and the rotating mechanism for connecting manipulator and the waterproof assembly for preventing water from infiltrating inside carrying frame are driven to be connected with lift mechanism;The waterproof assembly includes at least one protective cover installed in the outside of carrying frame, at least one adjacent to the side of protective cover's baffle and locking member, lift mechanism and rotating mechanism are located in the inside of protective cover and baffle, and the locking member locks protective cover and baffle and is used to prevent water from infiltrating carrying frame along the installation gap of locking member;The utility model prevents water from infiltrating inside carrying frame by waterproof assembly, prevents lift mechanism and rotating mechanism from being subjected to water vapor or condensate water infiltration under humid environment, avoids the phenomenon of frequently disassembling cleaning or replacing rusted component, and improves equipment utilization.

Description

Technical Field

[0001] This utility model relates to the field of wafer handling equipment technology, and in particular to a wafer handling drive device and system. Background Technology

[0002] A wafer handling robot is an automated device used in the semiconductor manufacturing process to handle and process fragile and critical wafers. Wafers are the fundamental material for semiconductor chip manufacturing and need to be handled and processed in various manufacturing steps. Therefore, specially designed and precisely operated robots are required to accomplish these tasks. Currently, the robot's mounting end is usually connected to a drive unit, which drives the robot to lift, rotate, and move, thereby meeting the robot's handling needs at different heights and angles.

[0003] Because the drive unit lacks a waterproof design, moisture or condensation can seep into the mechanical interfaces of the drive unit, such as the motor shaft, gearbox, and cable inlet, in humid environments. This leads to a shortened material fatigue life, such as reduced elasticity of the sealing ring and oxidation of the PCB copper foil. Frequent disassembly, cleaning, or replacement of rusted parts is required, reducing equipment utilization. Utility Model Content

[0004] This utility model addresses the shortcomings of existing technologies by providing a wafer handling drive device and system. It prevents water from seeping into the handling rack through waterproof components, and prevents the lifting and rotating mechanisms from being affected by moisture or condensation in humid environments. This avoids the need for frequent disassembly, cleaning, or replacement of rusted parts, thereby improving equipment utilization.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] This utility model provides a wafer handling drive device, including a handling frame, a lifting mechanism installed on the handling frame, a rotating mechanism driven and connected to the lifting mechanism and used to connect to a robot arm, and a waterproof component for preventing water from seeping into the interior of the handling frame.

[0007] The waterproof assembly includes at least one protective cover installed on the outside of the transport frame, at least one baffle plate adjacent to one side of the protective cover, and a locking member. The lifting mechanism and the rotating mechanism are located inside the protective cover and the baffle plate. The locking member locks the protective cover and the baffle plate and is used to prevent water from seeping into the transport frame along the installation gap of the locking member.

[0008] The transport frame includes a transport bracket and a top plate installed on the top of the transport bracket. The waterproof component is installed on the transport bracket. The bottom of the top plate is provided with an annular slot. The tops of the protective cover and the shield are inserted into the annular slot.

[0009] The top plate is provided with a transport space, and a corrugated pipe is installed at the top of the top plate. The corrugated pipe is connected to the interior of the transport space, and the top of the corrugated pipe is used to fit over the outside of the robot arm.

[0010] The locking component includes a washer and a locking member. A first elastic part is provided on one side of the washer. The first elastic part is provided with a first mounting hole that communicates with the washer. The locking member passes through the first mounting hole.

[0011] The locking member presses against the first elastic part and locks the protective cover and the baffle plate. The first elastic part seals the connection between the baffle plate and the gasket to prevent water from seeping into the transport frame.

[0012] The washer has a second elastic part on the other side, and the second elastic part has a second mounting hole that communicates with the washer. The locking member passes through the second mounting hole.

[0013] The locking component is provided with a pressing part, which presses the first elastic part and the second elastic part to lock the protective cover and the baffle plate. The second elastic part seals the connection between the locking component and the washer to prevent water from seeping into the transport frame.

[0014] One of the shields is provided with a connection port, and a waterproof cover is installed on the outside of the shield, the waterproof cover being connected to the connection port.

[0015] This utility model also provides a wafer handling drive system, which includes a wafer handling drive device.

[0016] The beneficial effects of this utility model are:

[0017] It prevents water from seeping into the inside of the handling frame, and prevents the lifting and rotating mechanisms from being exposed to moisture or condensation in humid environments. This avoids the need for frequent disassembly, cleaning, or replacement of rusted parts, and improves equipment utilization. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of the wafer handling drive device.

[0019] Figure 2 This is a partial structural cross-sectional view of the wafer handling drive device.

[0020] Figure 3 This is a schematic diagram of an exploded structure with a top plate, protective cover, and transport rack.

[0021] Figure 4 This is an exploded view of the installation structure of the waterproof components.

[0022] Figure 5 This is a cross-sectional view of the gasket.

[0023] Figure 6 This is a three-dimensional structural diagram of the waterproof cover and shield.

[0024] Figure 7 This is an exploded three-dimensional view of the wafer handling drive device.

[0025] 01. Robotic arm;

[0026] 1. Moving rack; 11. Moving support frame;

[0027] 12. Top plate; 121. Circular slot; 122. Handling space;

[0028] 2. Lifting mechanism; 3. Rotating mechanism;

[0029] 4. Waterproof components;

[0030] 41. Protective cover; 42. Baffle plate; 421. Connection port;

[0031] 43. Locking components;

[0032] 431, Washer; 4311, First elastic part; 4312, First mounting hole; 4313, Second elastic part; 4314, Second mounting hole; 432, Locking element; 4321, Pressing part;

[0033] 5. Corrugated pipe;

[0034] 6. Waterproof cover. Detailed Implementation

[0035] To facilitate understanding by those skilled in the art, the present invention will be further described below in conjunction with embodiments and accompanying drawings. Specific embodiments of the present invention will be described below. It should be noted that, in order to provide a concise description, this specification cannot provide a detailed description of all features of the actual embodiments.

[0036] refer to Figures 1 to 7 As shown, this utility model provides a wafer handling drive device, including a handling frame 1, a lifting mechanism 2 installed on the handling frame 1, a rotating mechanism 3 drivenly connected to the lifting mechanism 2 and used to connect to a robot arm 01, and a waterproof component 4 for preventing water from seeping into the interior of the handling frame 1; the waterproof component 4 includes two protective covers 41 installed on the outside of the handling frame 1, two baffles 42 adjacent to one side of the protective covers 41, and a locking member 43. The lifting mechanism 2 and the rotating mechanism 3 are located inside the protective covers 41 and the baffles 42. The locking member 43 locks the protective covers 41 and the baffles 42 and is used to prevent water from seeping into the handling frame 1 along the installation gap of the locking member 43.

[0037] refer to Figure 1 ,2 As shown in Figure 4, in practical applications, the lifting mechanism 2 adopts a screw motor module, a linear slide module, or an electric cylinder module, and the rotating mechanism 3 adopts a synchronous belt assembly and a servo motor. The servo motor and the synchronous belt assembly are connected to drive the robot 01 to rotate, thereby meeting the lifting and rotating requirements of the robot 01. The waterproof component 4 prevents water from seeping into the interior of the transport frame 1, and prevents the lifting mechanism 2 and the rotating mechanism 3 from being exposed to water vapor or condensation in a humid environment. This avoids the phenomenon of frequent disassembly for cleaning or replacement of rusted parts and improves the utilization rate of the equipment.

[0038] refer to Figure 3 As shown, in this embodiment, the transport rack 1 includes a transport support 11 and a top plate 12 installed on the top of the transport support 11. The waterproof component 4 is installed on the transport support 11. The bottom end of the top plate 12 is provided with an annular slot 121. The top ends of the protective cover 41 and the baffle plate 42 are inserted into the annular slot 121 to facilitate the smooth insertion of the protective cover 41 and the baffle plate 42 into the top plate 12, effectively protecting the top ends of the protective cover 41 and the baffle plate 42 and preventing water vapor or condensate from seeping into the interior of the transport rack 1.

[0039] refer to Figure 2 , 3 As shown, in this embodiment, the top plate 12 is provided with a transport space 122, and a corrugated pipe 5 is installed at the top of the top plate 12. The corrugated pipe 5 is connected to the interior of the transport space 122, and the top of the corrugated pipe 5 is used to fit over the outside of the robot arm 01. In actual application, the lifting mechanism 2 drives the robot arm 01 to move upward, and the top of the corrugated pipe 5 moves synchronously with the robot arm 01 to extend or retract. The corrugated pipe 5 always maintains a sealing effect between the top plate 12 and the robot arm 01 to ensure waterproof performance.

[0040] refer to Figure 1 , 4 As shown, in this embodiment, the locking member 43 includes a washer 431 and a locking member 432. A first elastic part 4311 is provided on one side of the washer 431. The first elastic part 4311 is provided with a first mounting hole 4312 communicating with the washer 431. The locking member 432 passes through the first mounting hole 4312. In actual application, the locking member 432 is a locking screw. The locking member 432 presses the first elastic part 4311 and locks the protective cover 41 and the baffle plate 42. Specifically, the front end of the locking member 432 can pass through the baffle plate 42 and the protective cover 41 to lock it to the transport frame 1, so as to stably lock the waterproof component 4 to the transport frame 1. The first elastic part 4311 seals the connection between the baffle plate 42 and the washer 431. The first elastic part 4311 seals the connection between the baffle plate 42 and the washer 431 through elastic deformation, effectively preventing water vapor or condensate from seeping into the transport frame 1, ensuring the waterproof performance of the drive device, and facilitating the use of the drive device in a humid environment.

[0041] refer to Figure 4 , 5 As shown, in this embodiment, a second elastic part 4313 is provided on the other side of the washer 431. The second elastic part 4313 is provided with a second mounting hole 4314 communicating with the washer 431. The locking member 432 passes through the second mounting hole 4314. The locking member 432 is provided with a pressing part 4321. The pressing part 4321 presses the first elastic part 4311 and the second elastic part 4313 and locks the protective cover 41 and the baffle plate 42. The second elastic part 4313 seals the connection between the locking member 432 and the washer 431. The second elastic part 4313 seals the connection between the locking member 432 and the washer 431 through elastic deformation, effectively preventing water vapor or condensate from seeping into the transport frame 1 along the installation gap of the locking member 432, ensuring the waterproof performance of the drive device, and facilitating the use of the drive device in a humid environment.

[0042] refer to Figure 6 As shown in this embodiment, one of the shielding plates 42 is provided with a connection port 421. A waterproof cover 6 is installed on the outside of the shielding plate 42. The waterproof cover 6 is connected to the connection port 421. Through the connection port 421, the relevant cables and mechanical interfaces for the drive device are installed to ensure the normal use of the device. The waterproof cover 6 effectively isolates water from eroding the connection port 421, improves the waterproof performance of the relevant components at the connection port 421, and meets the usage requirements of humid environments.

[0043] refer to Figure 1 , 7 As shown, this utility model also provides a wafer handling drive system, which includes a wafer handling drive device.

[0044] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.

Claims

1. A wafer carrying drive device, characterized by comprising: It includes a transport frame (1), a lifting mechanism (2) installed on the transport frame (1), a rotating mechanism (3) driven and connected to the lifting mechanism (2) and used to connect the robot (01), and a waterproof component (4) for preventing water from seeping into the interior of the transport frame (1). The waterproof component (4) includes at least one protective cover (41) installed on the outside of the transport frame (1), at least one baffle (42) adjacent to one side of the protective cover (41), and a locking member (43). The lifting mechanism (2) and the rotating mechanism (3) are located inside the protective cover (41) and the baffle (42). The locking member (43) locks the protective cover (41) and the baffle (42) and prevents water from seeping into the transport frame (1) along the installation gap of the locking member (43).

2. The wafer handling drive apparatus according to claim 1, wherein The transport rack (1) includes a transport bracket (11) and a top plate (12) installed on the top of the transport bracket (11). The waterproof component (4) is installed on the transport bracket (11). The bottom end of the top plate (12) is provided with an annular slot (121). The top ends of the protective cover (41) and the shield (42) are inserted into the annular slot (121).

3. The wafer handling drive apparatus of claim 2, wherein The top plate (12) is provided with a transport space (122). A corrugated pipe (5) is installed at the top of the top plate (12). The corrugated pipe (5) is connected to the interior of the transport space (122). The top of the corrugated pipe (5) is used to be fitted onto the outside of the robot arm (01).

4. The wafer handling drive apparatus of claim 1, wherein The locking member (43) includes a washer (431) and a locking member (432). A first elastic part (4311) is provided on one side of the washer (431). The first elastic part (4311) is provided with a first mounting hole (4312) communicating with the washer (431). The locking member (432) passes through the first mounting hole (4312). The locking member (432) presses against the first elastic part (4311) and locks the protective cover (41) and the shield (42). The first elastic part (4311) seals the connection between the shield (42) and the gasket (431) to prevent water from seeping into the transport frame (1).

5. The wafer handling drive apparatus according to claim 4, wherein A second elastic part (4313) is provided on the other side of the washer (431), and the second elastic part (4313) is provided with a second mounting hole (4314) that communicates with the washer (431). The locking member (432) passes through the second mounting hole (4314). The locking member (432) is provided with a pressing part (4321), which presses the first elastic part (4311) and the second elastic part (4313) and locks the protective cover (41) and the baffle (42). The second elastic part (4313) seals the connection between the locking member (432) and the washer (431) to prevent water from seeping into the transport frame (1).

6. The wafer handling drive device according to claim 1, characterized in that, One of the shields (42) is provided with a connection port (421), and a waterproof cover (6) is installed on the outside of the shield (42), the waterproof cover (6) being connected to the connection port (421).

7. A wafer handling drive system, characterized in that, The wafer handling drive system includes the wafer handling drive device according to any one of claims 1-6.

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