Multi-size substrate holder

Abstract

Various examples include multi-size substrate clamps configured to easily receive and secure substrates of various sizes. For example, in various implementations, the disclosed subject matter describes a mechanism that can be easily adjusted as an alternative to receive and secure (e.g., attach) substrates of various sizes, such as 200 mm wafers and 300 mm wafers. Other apparatuses and devices are also disclosed.

Description

[0001] Claiming priority

[0002] This patent application claims priority to U.S. Provisional Application Serial No. 63 / 342,798, filed May 17, 2022, entitled “MULTI-SIZED SUBSTRATE FIXTURE”, the disclosure of which is incorporated herein by reference in its entirety. Technical Field

[0003] The disclosed subject matter generally relates to the field of metrology and inspection tools used in the semiconductor and related industries (e.g., flat panel display and solar cell manufacturing facilities). More specifically, in various embodiments, the disclosed subject matter relates to a substrate clamp that can be configured, as an alternative, to receive and hold substrates of various sizes, such as, for example, semiconductor wafers. Background Technology

[0004] Various types and sizes of substrates are often used in the same manufacturing facility. These types and sizes include, for example, semiconductor (e.g., silicon) wafers with diameters of 200 mm and 300 mm. However, there is currently no substrate jig that can be easily configured as an alternative to process substrates of multiple sizes (e.g., 200 mm and 300 mm wafers) and substrates of different shapes (e.g., circular wafers and rigid flat panel displays). Summary of the Invention

[0005] Among other things, this document describes an apparatus that can be readily configured to receive and hold substrates of various sizes. For example, in various embodiments, the disclosed subject matter describes a mechanism that can be readily adjusted as another option to receive and hold (e.g., attach or clamp) and release (e.g., loosen) substrates of various sizes and shapes, such as 200 mm and 300 mm circular wafers.

[0006] Among the various embodiments described herein, the disclosed subject matter is an apparatus for receiving at least two different sizes of substrates. The apparatus includes at least two sub-assemblies. Each sub-assembly has a set of substrate edge holders configured to hold a corresponding edge on one of the at least two different sizes of substrates. The set of substrate edge holders includes at least one edge holder having a movable portion for clamping and releasing one of the at least two different sizes of substrates. A substrate adjustment device is arranged to alternatively position at least one of the at least two sub-assemblies in an extended position and a retracted position. The extended position accommodates the smaller of the at least two sizes of substrates.

[0007] In the various embodiments described herein, the disclosed subject matter is a multi-size substrate fixture for receiving at least two different sizes of substrates. The multi-size substrate fixture includes a small substrate size sub-assembly for attaching the smaller of the at least two different sizes of substrates. A first plurality of substrate edge holders are mechanically coupled to the small substrate size sub-assembly. The fixture also includes a large substrate size sub-assembly configured to attach the larger of the at least two different sizes of substrates. A second plurality of substrate edge holders are mechanically coupled to the large substrate size sub-assembly. The small substrate size sub-assembly and the large substrate size sub-assembly are concentrically mounted.

[0008] In the various embodiments described herein, the disclosed subject matter is a multi-size substrate fixture for receiving at least two different sizes of substrates. The multi-size substrate fixture includes a small substrate size sub-assembly for attaching the smaller of the at least two different sizes of substrates. A first plurality of substrate edge holders are mechanically coupled to the small substrate size sub-assembly. The fixture also includes a large substrate size sub-assembly configured to attach the larger of the at least two different sizes of substrates. The first plurality of substrate edge holders are arranged to extend and retract via the large substrate size sub-assembly. A second plurality of substrate edge holders are mechanically coupled to the large substrate size sub-assembly. The small substrate size sub-assembly is concentrically mounted with the large substrate size sub-assembly. Brief description of the attached figures

[0009] The accompanying drawings illustrate only exemplary embodiments of this disclosure and should not be considered as limiting the scope of this disclosure.

[0010] Figure 1 A top perspective view shows examples of multi-size substrate clamps according to various embodiments of the disclosed subject matter;

[0011] Figure 2 An embodiment of a multi-size substrate clamp with substrate edge holders for two different substrate sizes is shown; Figure 2 It is based on the various implementation schemes of the disclosed topic. Figure 1 A bottom perspective view of an example of a multi-size substrate fixture;

[0012] Figure 3 It shows having Figure 1 Additional details of the multi-size substrate fixture; top perspective view of an example of a multi-size substrate fixture; Figure 3 This is an embodiment of a multi-size substrate clamp according to various embodiments of the disclosed subject matter, the multi-size substrate clamp being arranged to hold the smaller of two sizes of substrates;

[0013] Figure 4 It shows Figure 1 A top perspective view of an example of a multi-size substrate fixture; Figure 4 A multi-size substrate clamp according to various embodiments of the disclosed subject matter is shown, the multi-size substrate clamp being arranged to hold the smaller of two sizes of substrates;

[0014] Figure 5 It shows having Figure 1 Additional details of the multi-size substrate fixture; top perspective view of an example of a multi-size substrate fixture; Figure 5 This is an embodiment of a multi-size substrate clamp according to various embodiments of the disclosed subject matter, the multi-size substrate clamp being arranged to hold the larger of two substrates of different sizes;

[0015] Figure 6 It shows Figure 1 A top perspective view of an example of a multi-size substrate fixture; Figure 6 A multi-size substrate clamp according to various embodiments of the disclosed subject matter is shown, the multi-size substrate clamp being arranged to hold the larger of two substrates of different sizes;

[0016] Figure 7A Various implementation schemes based on the disclosed subject matter are shown. Figure 1 A cross-sectional view of a multi-size substrate fixture; and

[0017] Figure 7B A portion of a cross-sectional view of a multi-size substrate fixture shown in Figure 7, according to various embodiments of the disclosed subject matter, is illustrated. Detailed Implementation

[0018] The disclosed subject matter relates to an apparatus that can be readily configured (as an alternative) to receive and fix (e.g., attach) substrates of various sizes and shapes.

[0019] For example, now refer to Figure 1 The image shows a top perspective view of an example of a multi-size substrate clamp 100 according to various embodiments of the disclosed subject matter. Figure 1 This is illustrated by a substrate size changing ring 101, a small substrate size sub-assembly 107, and a large substrate size sub-assembly 109. (See diagram below.) Figure 1 As shown, a small substrate-size subassembly 107, which is arranged to accommodate the smaller of at least two substrate sizes, is concentrically mounted within a large substrate-size subassembly 109.

[0020] As described below, the small substrate-size subassembly 107 can be moved to extend or retract the edge holder, to which a smaller substrate can be temporarily attached. The large substrate-size subassembly 109 includes an edge holder to which a larger substrate can be temporarily attached. The edge holder is also described in detail below.

[0021] Figure 1 Also shown is a top side view including motor mounting bracket 103A. Motor mounting bracket 103A is mechanically arranged to couple a motor (e.g., an electric motor or an air bearing) to a substrate rotatably attached to a multi-size substrate jig 100. In this embodiment, the multi-size substrate jig 100 is arranged such that the substrate is mounted to the bottom side of the multi-size substrate jig 100, as detailed below.

[0022] Although not explicitly shown, various types of metrology or inspection tools may be mounted below, above, or around the multi-size substrate fixture 100. In various embodiments, the metrology or inspection tools may be arranged to measure, for example, at least a portion of the back side of the substrate or to inspect at least a portion of the back side of the substrate as the substrate rotates. However, in other embodiments, the front side of the substrate may also be measured or inspected. Moreover, although the multi-size substrate fixture 100 is shown with the substrate attached to the lower portion (e.g., the lower part) of the multi-size substrate fixture 100, such limitation is not intended. The multi-size substrate fixture 100 can be operated and oriented in multiple locations.

[0023] In one embodiment, if the end user of the multi-size substrate fixture 100 wishes to measure or inspect the entire surface or a portion of the entire surface of the substrate, the measurement or inspection can be performed as a series of concentric rings while the substrate rotates above the tool. Each concentric ring may involve a measuring or inspecting component of the tool moving in a direction radially outward (or inward) relative to the substrate.

[0024] In other embodiments, if the end user of the multi-size substrate fixture 100 wishes to measure or inspect the entire surface or a portion of the entire surface of the substrate, the measurement or inspection can be performed in the form of an Archimedean spiral as the substrate rotates above the tool. Therefore, the substrate can be measured or inspected while the measuring or inspecting components of the tool are continuously moved relative to the substrate in a radially outward (or inward) direction.

[0025] Suitable substrates that can be attached to the multi-size substrate fixture 100 may include, for example, various types of substrates, such as wafers comprising elemental semiconductors (e.g., silicon or germanium), wafers comprising compound semiconductors (e.g., gallium arsenide (GaAs) or gallium nitride (GaN)), or various other substrate types known in the art (including conductive, semiconductive, and nonconductive substrates). Therefore, the substrate may include any one or more circular substrates (e.g., wafers) of, for example, 400 mm, 300 mm, 200 mm, 150 mm, 125 mm, and 100 mm, including opaque (e.g., at visible wavelengths), transparent, and bonded substrates.

[0026] Although the multi-size substrate fixture 100 described herein is intended for mounting 200mm or 300mm circular substrates (e.g., wafers), such limitations are not intended. Furthermore, the multi-size substrate fixture 100 may be arranged to receive non-circular substrates, such as flat panel displays. As described herein, receiving non-circular substrates may include increasing the number of mounting fingers (e.g., from three to four or more), and such configurations are considered to be within the scope of the disclosed subject matter. Additionally, the multi-size substrate fixture 100 may be configured to receive substrates of three or more sizes by exposing or retracting certain groups of fingers. However, the subject matter disclosed herein is for mounting 200mm or 300mm substrates, making the disclosed subject matter readily understandable to those skilled in the art. Upon reading and understanding the disclosed subject matter, those skilled in the art will recognize how the concepts and mechanisms described herein can be extended to receive substrates of more than two sizes or to receive non-circular substrates.

[0027] Figure 2 An embodiment of the disclosed subject matter is shown, which has a substrate edge holder for two different sizes of substrates. Figure 2 It is based on the various implementation schemes of the disclosed topic. Figure 1 A top perspective view 200 of an example of a multi-size substrate clamp 100. In this example, two outer fixed edge holders 201A and a movable outer edge holder 201B for clamping the edge of a substrate, for example, 300 mm, are shown. Additionally, two inner fixed edge holders 203A and a movable inner edge holder 203B for clamping the edge of a substrate, for example, 200 mm, are shown. The edge holders 203A and 203B are extendable through slots 205 formed in the large substrate size subassembly 109, as detailed below.

[0028] In various embodiments, the end effector of the robotic substrate transfer tool (not shown) can press the substrate upward against two fixed edge grippers. Then, before the end effector of the robot is removed, the movable edge grippers can be actuated (e.g., acted) to provide a force (e.g., a spring-loaded driving force, a solenoid-based driving force, a magnetically based driving force, a pneumatically based driving force, etc.) against the opposing portions of the substrate edge. Figure 2 It is also shown as including Figure 1 Bottom side view 103B of motor mounting bracket 103A.

[0029] In various embodiments, and as detailed below, one or both of the two fixed edge holders 201A may also be movable. In such embodiments, the movable edge holder may or may not have a portion that can be driven to press against the substrate, thereby securing the substrate in a known position. Therefore, the terms "attached" and "movable" are provided only for the purpose of providing a more easily understood description of the disclosed subject matter.

[0030] As mentioned above, the substrate is described as "300mm" and "200mm" merely for ease of transport. Figure 1 The multi-size substrate clamp 100 accepts two sizes. Depending on the configuration, the multi-size substrate clamp 100 can accept other sizes and more than two sizes of substrates. As further described above, the multi-size substrate clamp 100 can accept substrates of other shapes, such as square, rectangular, or other polygonal shapes. Such non-circular shapes can benefit from additional edge holders in fixed edge holders and / or movable edge holders. For example, four or more edge holders (e.g., two fixed edge holders and two movable edge holders) can provide more stable support for square or rectangular substrates.

[0031] Continue to refer to Figure 2 , Figure 1 A top perspective view 200 of an example of a multi-size substrate clamp 100 is shown, wherein all inner edge holders 203A, 203B are in the extended position. As detailed below, the extended position allows a 200mm substrate to be attached. Figure 1 The multi-size substrate clamp 100 has inner edge holders 203A and 203B. The inner edge holders 203A and 203B extend through or from the large substrate size subassembly 109.

[0032] exist Figure 1In various embodiments of the multi-size substrate fixture 100, the outer edge holders 201A, 201B are always extended and therefore not retractable. Thus, in these embodiments, if necessary, a 300mm substrate is mounted after the inner edge holders 203A, 203B have retracted. Therefore, the positions of the 200mm and 300mm substrates are always in a substantially common plane (e.g., coplanar). This common plane allows, for example, the focal plane or point of metrology and inspection tools to remain fixed. Therefore, when the multi-size substrate fixture 100 is switched from a 200mm to a 300mm configuration, the metrology and inspection tools do not need to be refocused or realigned.

[0033] Figure 3 It shows having Figure 1 Top perspective view 300 of the multi-size substrate fixture 100 with additional details. Figure 3 This is an embodiment of a multi-size substrate clamp 100 arranged to hold the smaller of two substrates (e.g., a 200 mm substrate) according to various embodiments of the disclosed subject matter. Figure 3 The diagram shows a pair of substrate size adjustment mechanisms 303, each including an annular adjustment device 301. This annular adjustment device 301 allows the substrate size adjustment mechanism 303 to extend or retract the small substrate size subassembly 107 via a substrate size changing ring 101 (mechanically coupled to the small substrate size subassembly 107). Although the annular adjustment device 301 is shown as circular, this shape is not required. Therefore, the annular adjustment device can also be considered a substrate adjustment device. The annular adjustment device 301 moves the substrate size changing ring 101, causing the inner edge holders 203A, 203B (see...) to... Figure 2 (elongation or retraction.) In an embodiment, if the substrate size changing ring 101 is not being moved, the ring adjustment device 301 does not need to contact the substrate size changing ring 101 when the substrate rotates.

[0034] In various embodiments, the actuation force from the substrate size adjustment mechanism 303 through the annular adjustment device 301 to the substrate size changing ring 101 can be applied in a variety of different ways. For example, the actuation force can consist of one or more of the following forces, including electric (e.g., applied via a solenoid), magnetic, pneumatic, or various other means. Furthermore, although only two substrate size adjustment mechanisms 303 are shown, more than two adjustment mechanisms can be used in various embodiments. For example, if the multi-size substrate clamp 100 is configured to attach a large rectangular flat panel display, three or more of c 303 can be used.

[0035] Figure 3It is also shown to include a movable outer edge gripper actuation mechanism 305 and a movable inner edge gripper actuation mechanism 309. In this embodiment, the edge gripper actuation mechanisms 305, 309 are arranged to provide actuation force to the respective substrate gripper actuation pads 307, 311. (Refer to below) Figure 7A and Figure 7B The edge gripper actuation mechanisms 305 and 309 are described in more detail. The edge gripper actuation mechanisms 305 and 309 can be driven by a variety of different forces, including, for example, electricity (e.g., applied via a solenoid), magnetic force, pneumatic force, or a variety of other means.

[0036] Figure 4 It shows Figure 1 A top perspective view 400 of an example of a multi-size substrate fixture 100. Also refer to... Figure 3 , Figure 4 A multi-size substrate clamp 100 is shown according to various embodiments of the disclosed subject matter, the multi-size substrate clamp being arranged to hold the smaller of two sizes of substrates. Figure 4 The illustration shows a 200mm substrate 401 held by extensions of the inner edge holders 203A and 203B. In this embodiment, as described above, the outer edge holders 201A and 201B are fixed. Since the diameter of the 200mm substrate 401 is smaller than the diameter of the inner edge holders 203A and 203B disposed thereon, there is no reason to retract the outer edge holders 201A and 201B at any time.

[0037] Figure 5 It shows having Figure 1 Top perspective view 500 of the multi-size substrate fixture 100 with additional details. Figure 5 This is an embodiment of a multi-size substrate clamp 100 arranged to hold the larger of two substrates of different sizes, according to various embodiments of the disclosed subject matter. In this example, the smaller substrate size subassembly 107 has been retracted by the substrate size changing annulus 101 to accommodate a 300mm substrate, which lies in a plane substantially coplanar with the now-removed 200mm substrate 401. When the inner edge holders 203A, 203B have been retracted by the slot 205, it is possible to... Figure 5 These inner edge grippers can be seen in the image.

[0038] Figure 6 It shows Figure 1 A top perspective view 600 of an example of a multi-size substrate fixture 100. Also refer to... Figure 5 , Figure 6 A multi-size substrate clamp according to various embodiments of the disclosed subject matter is shown, the multi-size substrate clamp being arranged to hold the larger of two substrates of different sizes. Figure 6 The illustration shows a 300mm substrate 501 held by outer edge holders 201A and 201B. In this embodiment, as described above, the outer edge holders 201A and 201B are fixed. Since the diameter of the 300mm substrate 501 is larger than the diameter of the inner edge holders 203A and 203B disposed thereon, the inner edge holders 203A and 203B are retracted as described above so as not to interfere with the placement of the 300mm substrate 501.

[0039] Figure 7A Various implementation schemes based on the disclosed subject matter are shown. Figure 1 A cross-sectional view 700 of the multi-size substrate clamp 100. The cross-sectional view 700 provides an overall background of the multi-size substrate clamp 100 to provide more details of the operation of the edge clamp actuation mechanisms 305, 309, which provide actuation force to a corresponding one of the substrate clamp actuation pads 307, 311.

[0040] Figure 7B A portion 720 of a cross-sectional view 700 of a multi-size substrate fixture 100 shown in FIG7, according to various embodiments of the disclosed subject matter, is illustrated. In this example, reference is also made to... Figure 3 , Figure 3 The small substrate-sized subassembly 107 has been lowered by the substrate-size-changing ring 101, thereby elongating the inner edge holders 203A, 203B to accommodate a 200mm substrate. However, a similar operation will occur when a 300mm substrate is attached to the outer edge holders 201A, 201B.

[0041] However, for additional clarity, the operation of the outer edge holders 201A and 201B will now be described. For example, when a substrate is loaded into the multi-size substrate holder 100, an actuating force (as described above) is applied to the outer edge holder actuation mechanism 305 to place the plunger in a first position 721. In the first position 721, the substrate holder actuation pad 307 applies force to the plunger of the edge holder actuation mechanism 305. The substrate holder actuation pad 307 rotates about a pivot point 725, moving the substrate holder actuation pad 307 to a substrate release position 729. In the second position 723, the substrate holder actuation pad 307 releases the force from the plunger of the edge holder actuation mechanism 305.

[0042] Once the substrate is loaded into the multi-size substrate holder 100, another actuating force (e.g., via spring return force) is applied to position the substrate holder actuation pad 307 in the substrate clamping position 727. The end effector of the robot (not shown) that placed the substrate can then be withdrawn.

[0043] Although the substrate holder actuation pad 307 is described as having a pivot point 725, there are many other means of releasing or clamping the substrate. For example, actuation force can be applied or released from a lateral position on the substrate. In this embodiment, the substrate holder actuation pad 307 may be located on the lower (e.g., bottom) portion of the multi-size substrate clamp 100, rather than being driven from above.

[0044] As used herein, the term "or" can be interpreted in an inclusive or exclusive sense. Furthermore, based on reading and understanding of the provided disclosure, those skilled in the art will understand other embodiments. Moreover, those skilled in the art will readily understand that various combinations of the techniques and examples provided herein can all be applied in various combinations.

[0045] Throughout this specification, multiple instances can be implemented as components, operations, or structures described as a single instance. Although each operation is shown and described as a separate operation, one or more of the operations may be performed simultaneously, and unless otherwise stated, these operations are not required to be performed in the order shown in the illustrations. Structures and functions presented as separate components in the example configurations can be implemented as combined structures or components. Similarly, structures and functions presented as single components can be implemented as separate components. These and other variations, modifications, additions, and improvements all fall within the scope of the subject matter described herein.

[0046] Furthermore, although not explicitly shown, those skilled in the art will understand that each of the various arrangements, quantities, and number of elements may vary (e.g., the number and type of edge grippers and drive mechanisms). Additionally, elements for detecting the presence or absence of a substrate may be included. For example, such a "substrate presence sensor" may be located at the bottom of a multi-size substrate fixture. Such a sensor may include, for example, an optical sensor comprising an LED pointing towards an LED sensor. If a beam of light from the LED is not received by the LED sensor, the substrate is mounted or attached in the correct position. Furthermore, each example shown and described herein represents only one possible configuration and should not be construed as limiting the scope of the invention.

[0047] Although various implementation schemes have been discussed individually, these individual implementation schemes are not intended to be considered as independent technologies or designs. As indicated above, each of the various parts can be related to each other, and each can be used alone or in combination with other implementation schemes discussed herein. For example, although various implementation schemes of operations, systems, and processes have been described, these methods, operations, systems, and processes can be used alone or in various combinations.

[0048] Therefore, as will be apparent to those skilled in the art upon reading and understanding the disclosure provided herein, many modifications and variations are possible. Based on the foregoing description, functionally equivalent methods and apparatuses within the scope of this disclosure, other than those listed herein, will be apparent to those skilled in the art. Parts and features of some embodiments may be included in, or substitute for, parts and features of other embodiments. Such modifications and variations are intended to fall within the scope of the appended claims. Therefore, this disclosure is limited only by the terms of the appended claims and the full scope of their equivalents. It should also be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting.

[0049] The abstract is provided to allow the reader to quickly determine the essence of the technical disclosure. The abstract is submitted on the understanding that it will not be used to interpret or limit the claims. Furthermore, as can be seen in the foregoing detailed description, various features may be combined in a single embodiment for the purpose of simplifying the disclosure. This method of disclosure should not be construed as limiting the claims. Therefore, the following claims are hereby incorporated into the detailed description, wherein each claim is itself a separate embodiment.

[0050] The description provided herein includes illustrative examples, devices, and apparatuses that embody various aspects of the subject matter described in this invention document. Numerous specific details are set forth in this description for purposes of explanation in order to provide an understanding of various embodiments of the subject matter discussed. However, it will be apparent to those skilled in the art that various embodiments of the disclosed subject matter can be practiced without these specific details. Furthermore, well-known structures, materials, and techniques have not been shown in detail so as not to obscure the various illustrated embodiments. As used herein, the terms “about,” “approximately,” and “substantially” can refer, for example, to a value within ±10% of a given value or a range of values.

[0051] The following numbered examples are specific implementation schemes of the disclosed subject matter.

[0052] Example 1: In an exemplary embodiment, the disclosed subject matter is an apparatus for receiving at least two different sizes of substrates. The apparatus includes at least two sub-assemblies. Each sub-assembly has a set of substrate edge holders configured to hold a corresponding edge on one of the at least two different sizes of substrates. The set of substrate edge holders includes at least one edge holder having a movable portion for clamping and releasing one of the at least two different sizes of substrates. A substrate adjustment device is arranged to position at least one of the at least two sub-assemblies, as an alternative, in an extended position and a retracted position. The extended position accommodates the smaller of the at least two sizes of substrates.

[0053] Example 2: The apparatus according to Example 1 further includes at least one edge gripper actuation mechanism coupled to each of at least two sub-assemblies to provide actuation to the at least one edge gripper having a movable portion.

[0054] Example 3: An apparatus according to any of the foregoing embodiments, wherein each of the at least two different sized substrates is configured, as an alternative, to be substantially mounted on a common plane.

[0055] Example 4: The apparatus according to any one of the preceding embodiments, wherein a portion of the set of substrate edge holders is configured to extend and retract via the larger of the at least two sub-assemblies, and the portion of the set of substrate edge holders is configured to receive the smaller of the at least two different sized substrates.

[0056] Example 5: The apparatus according to any one of the foregoing embodiments further includes a substrate size changing ring coupled to one of the at least two sub-components, the substrate size changing ring being driven by a plurality of substrate size adjustment mechanisms.

[0057] Example 6: The apparatus according to Example 5, wherein each of the plurality of substrate size adjustment mechanisms includes a ring adjustment device configured to allow the substrate size adjustment mechanism to retract and extend the smaller of the at least two sub-assemblies by acting on the substrate size change ring, the substrate size change ring being mechanically coupled to the smaller of the at least two sub-assemblies.

[0058] Example 7: The apparatus according to Example 6, wherein the annular adjustment device is configured to retract and extend the smaller of the at least two sub-components by applying power to the annular adjustment device.

[0059] Example 8: The apparatus according to Example 6, wherein the annular adjustment device is configured to retract and extend the smaller of the at least two sub-components by applying a magnetic force to the annular adjustment device.

[0060] Example 9: The apparatus according to Example 6, wherein the annular adjustment device is configured to retract and extend the smaller of the at least two sub-components by applying a pneumatic force to the annular adjustment device.

[0061] Example 10: The device according to any one of the foregoing embodiments further includes a motor mounting bracket coupled to the at least two sub-components and configured to be rotatably attached to the substrate of the device.

[0062] Example 11: The apparatus according to any one of the foregoing embodiments, wherein the smaller of the at least two sub-assemblies arranged to accommodate the smaller of the at least two sizes of substrates is concentrically mounted within the larger of the at least two sub-assemblies.

[0063] Example 12: In an exemplary embodiment, the disclosed subject matter is a multi-size substrate fixture for receiving at least two different sizes of substrates. The multi-size substrate fixture includes a small substrate size sub-assembly for attaching the smaller of the at least two different sizes of substrates. A first plurality of substrate edge holders are mechanically coupled to the small substrate size sub-assembly. The fixture also includes a large substrate size sub-assembly configured to attach the larger of the at least two different sizes of substrates. A second plurality of substrate edge holders are mechanically coupled to the large substrate size sub-assembly. The small substrate size sub-assembly and the large substrate size sub-assembly are concentrically mounted.

[0064] Example 13: The multi-size substrate clamp according to Example 12, wherein the small substrate size sub-assembly is configured to be moved to extend and retract the substrate edge holder, and the smaller substrate can be temporarily attached to the substrate edge holder.

[0065] Example 14: A multi-size substrate fixture according to any one of Example 12 or Example 13, wherein the multi-size substrate fixture is configured to attach a smaller substrate of at least two different sizes of substrates and a larger substrate of at least two different sizes of substrates, respectively.

[0066] Example 15: A multi-size substrate clamp according to any one of Examples 12 to 14, wherein each of the first plurality of substrate edge holders and the second plurality of substrate edge holders includes at least one edge holder having a movable portion.

[0067] Example 16: The multi-size substrate fixture according to Example 15 further includes at least one edge holder actuation mechanism coupled to each of the small substrate size subassembly and the large substrate size subassembly to provide actuation to the at least one edge holder having a movable portion.

[0068] Example 17: A multi-size substrate fixture according to any one of Examples 12 to 16, wherein each of the at least two different sizes of substrates is configured, as an alternative, to be mounted substantially on a common plane.

[0069] Example 18: A multi-size substrate clamp according to any one of Examples 12 to 17, wherein the first plurality of substrate edge holders are configured to be extended and retracted by the large substrate size sub-assembly.

[0070] Example 19: The multi-size substrate fixture according to any one of Examples 12 to 18 further includes a substrate size changing ring coupled to the small substrate size sub-assembly, the substrate size changing ring being driven by a plurality of substrate size adjustment mechanisms.

[0071] Example 20: The multi-size substrate fixture according to Example 19, wherein each of the plurality of substrate size adjustment mechanisms includes a ring adjustment device configured to allow the substrate size adjustment mechanism to retract and extend the small substrate size sub-assembly by acting on the substrate size change ring, the substrate size change ring being mechanically coupled to the small substrate size sub-assembly.

[0072] Example 21: A multi-size substrate fixture according to any one of Examples 12 to 20, the multi-size substrate fixture further includes a motor mounting bracket coupled to the small substrate size sub-assembly and the large substrate size sub-assembly, the motor mounting bracket being configured to rotatably attach a substrate to the multi-size substrate fixture.

[0073] Example 22: In an exemplary embodiment, the disclosed subject matter is a multi-size substrate fixture for receiving at least two different sizes of substrates. The multi-size substrate fixture includes a small substrate size sub-assembly for attaching the smaller of the at least two different sizes of substrates. A first plurality of substrate edge holders are mechanically coupled to the small substrate size sub-assembly. The fixture also includes a large substrate size sub-assembly configured to attach the larger of the at least two different sizes of substrates. The first plurality of substrate edge holders are arranged to extend and retract via the large substrate size sub-assembly. A second plurality of substrate edge holders are mechanically coupled to the large substrate size sub-assembly. The small substrate size sub-assembly is concentrically mounted with the large substrate size sub-assembly.

Claims

1. A multi-size substrate clamp, the multi-size substrate clamp comprising: A small substrate-size subassembly and a large substrate-size subassembly, each of the small substrate-size subassembly and the large substrate-size subassembly having a set of substrate edge holders configured to hold a corresponding edge on one of the at least two different substrate sizes, the set of substrate edge holders including at least one edge holder having a movable portion to clamp and release one of the at least two different substrate sizes; and A substrate adjustment device, as an alternative, is configured to position the small substrate-sized subassembly in an extended position and a retracted position, the extended position being arranged to accommodate the smaller of at least two substrate sizes, such that a corresponding set of substrate edge holders of the small substrate-sized subassembly is extended through at least one slot of the large substrate-sized subassembly.

2. The multi-size substrate fixture of claim 1, wherein the substrate adjustment device comprises a pair of substrate size adjustment mechanisms, and wherein the set of substrate edge holders of the small substrate size sub-assembly comprises three substrate edge holders.

3. The multi-size substrate fixture according to claim 2, wherein each of the pair of substrate size adjustment mechanisms further comprises a circular adjustment device.

4. The multi-size substrate clamp of claim 1, wherein a portion of the set of substrate edge holders is configured to extend and retract via the larger of the at least two sub-assemblies, and the portion of the set of substrate edge holders is configured to receive the smaller of the at least two different sizes of substrates.

5. The multi-size substrate fixture according to claim 1, wherein the multi-size substrate fixture further comprises a substrate size changing ring coupled to one of the at least two sub-assemblies, the substrate size changing ring being driven by a plurality of substrate size adjustment mechanisms.

6. The multi-size substrate fixture of claim 5, wherein each of the plurality of substrate size adjustment mechanisms includes a ring adjustment device configured to allow the substrate size adjustment mechanism to retract and extend a smaller of the at least two sub-assemblies by acting on the substrate size changing ring, the substrate size changing ring being mechanically coupled to the smaller of the at least two sub-assemblies.

7. The multi-size substrate fixture of claim 6, wherein the annular adjustment device is configured to retract and extend the smaller of the at least two sub-assemblies by applying power to the annular adjustment device.

8. The multi-size substrate fixture of claim 6, wherein the annular adjustment device is configured to retract and elongate the smaller of the at least two sub-assemblies by applying a magnetic force to the annular adjustment device.

9. The multi-size substrate fixture of claim 6, wherein the annular adjustment device is configured to retract and extend the smaller of the at least two sub-assemblies by applying a pneumatic force to the annular adjustment device.

10. The multi-size substrate fixture of claim 1, further comprising a motor mounting bracket coupled to the at least two sub-assemblies and configured to rotatably attach a substrate to the multi-size substrate fixture.

11. The multi-size substrate fixture of claim 1, wherein the smaller of the at least two sub-assemblies arranged to receive the smaller of the at least two sizes of substrates are concentrically mounted within the larger of the at least two sub-assemblies.

12. A multi-size substrate clamp for receiving at least two different sizes of substrates, the multi-size substrate clamp comprising: Small substrate size subassembly, the small substrate size subassembly being configured to attach to the smaller of the at least two different sizes of substrates; A plurality of substrate edge holders are mechanically coupled to the small substrate-sized subassembly; A large substrate size subassembly, the large substrate size subassembly being configured to attach to the larger of the at least two different sizes of substrates; and A second plurality of substrate edge holders, mechanically coupled to the large substrate-size sub-assembly, wherein the small substrate-size sub-assembly is concentrically mounted with the large substrate-size sub-assembly. The small substrate-size subassembly is configured to be moved such that the first plurality of substrate edge holders extend or retract through at least one slot in the large substrate-size subassembly.

13. The multi-size substrate clamp of claim 12, wherein the small substrate size sub-assembly is configured to be moved to extend and retract the substrate edge holder, and the smaller substrate can be temporarily attached to the substrate edge holder.

14. The multi-size substrate fixture of claim 12, wherein the multi-size substrate fixture is configured to attach a smaller substrate of the at least two different sizes of substrates and a larger substrate of the at least two different sizes of substrates, respectively.

15. The multi-size substrate clamp of claim 12, wherein each of the first plurality of substrate edge holders and the second plurality of substrate edge holders comprises at least one edge holder having a movable portion.

16. The multi-size substrate fixture of claim 12, further comprising a pair of substrate size adjustment mechanisms for retracting or extending the small substrate size subassembly, wherein the first plurality of substrate edge holders comprises three substrate edge holders.

17. The multi-size substrate fixture of claim 16, wherein each of the pair of substrate size adjustment mechanisms comprises a circular adjustment device.

18. The multi-size substrate clamp of claim 12, wherein the first plurality of substrate edge holders are configured to be extended and retracted by the large substrate size sub-assembly.

19. The multi-size substrate fixture according to claim 12, the multi-size substrate fixture further comprising a substrate size changing ring coupled to the small substrate size sub-assembly, the substrate size changing ring being driven by a plurality of substrate size adjustment mechanisms.

20. The multi-size substrate fixture of claim 19, wherein each of the plurality of substrate size adjustment mechanisms includes a ring adjustment device configured to allow the substrate size adjustment mechanism to retract and extend the small substrate size sub-assembly by acting on the substrate size changing ring, the substrate size changing ring being mechanically coupled to the small substrate size sub-assembly.

21. The multi-size substrate fixture of claim 12, further comprising a motor mounting bracket coupled to the small substrate size subassembly and the large substrate size subassembly, the motor mounting bracket being configured to be rotatably attached to a substrate of the multi-size substrate fixture.

22. A multi-size substrate clamp for receiving at least two different sizes of substrates, the multi-size substrate clamp comprising: Small substrate size subassembly, the small substrate size subassembly being configured to attach to the smaller of the at least two different sizes of substrates; A plurality of substrate edge holders are mechanically coupled to the small substrate-sized subassembly; A large substrate size subassembly, the large substrate size subassembly being configured to attach to the larger of the at least two different sizes of substrates, and a small substrate size subassembly being configured to move such that the first plurality of substrate edge holders extend or retract through the large substrate size subassembly; and A second plurality of substrate edge holders are mechanically coupled to the large substrate size subassembly, and the small substrate size subassembly is concentrically mounted with the large substrate size subassembly.

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