A gripping mechanism

Abstract

The utility model relates to the technical field of semiconductor, especially point to a kind of clamping mechanism, including first supporting arm, the second supporting arm of hinging with first supporting arm and at least two clamping components connected between first supporting arm and second supporting arm, the clamping component is symmetrically arranged in the two sides of first supporting arm and second supporting arm, the hinging place of the clamping component and first supporting arm and second supporting arm is respectively first hinging point and second hinging point, the straight line of first hinging point and the straight line of second hinging point parallel, the distance of adjacent first hinging point is equal to the distance of adjacent second hinging point, the clamping component is connected with the executor for taking and placing wafer;The utility model is by using symmetrical clamping component, so that the two sides of first supporting arm and second supporting arm moment distribution is uniform, it is convenient to steady grab wafer, reduce wafer's positioning error.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and in particular to a clamping mechanism. Background Technology

[0002] In semiconductor wafer transport equipment, the robotic arm achieves high-precision in-plane movement through two rotary joints and realizes wafer picking and placing through an end effector, which is suitable for horizontal wafer transport.

[0003] However, existing robotic arms are usually single-arm structures. Due to their asymmetrical structural arrangement, the distribution of inertial torque is uneven, resulting in axial deflection vibration during high-speed movement, especially during acceleration / deceleration, which causes wafer positioning errors. Utility Model Content

[0004] This invention addresses the shortcomings of existing technologies by providing a gripping mechanism. By employing symmetrical gripping components, the torque distribution on both sides of the first and second arms is uniform, facilitating stable gripping of the wafer and reducing wafer positioning errors.

[0005] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0006] This utility model provides a clamping mechanism, including a first arm, a second arm hinged to the first arm, and at least two clamping assemblies connected between the first arm and the second arm. The clamping assemblies are symmetrically arranged on both sides of the first arm and the second arm. The hinge points of the clamping assemblies with the first arm and the second arm are respectively the first hinge point and the second hinge point. The straight line containing the first hinge point is parallel to the straight line containing the second hinge point. The distance between adjacent first hinge points is equal to the distance between adjacent second hinge points. The clamping assemblies are connected to actuators for picking up and placing wafers.

[0007] The clamping assembly includes a first clamping arm with one end hinged to a first support arm, a second clamping arm with one end hinged to a second support arm, and a clamping seat hinged to the first clamping arm and the second clamping arm. The actuator is connected to the clamping seat. The hinge point between the first clamping arm and the first support arm is the first hinge point, and the hinge point between the second clamping arm and the second support arm is the second hinge point. The clamping seat is located outside the line where the first hinge point and the second hinge point are located.

[0008] The first gripping arm is connected to a rotating shaft, which is rotatably connected to the first support arm. The axis of the rotating shaft coincides with the rotation center of the first hinge point.

[0009] The first arm is provided with a rotating cavity, and the rotating shaft is rotatably connected to the rotating cavity. The upper and lower ends of the rotating shaft are respectively equipped with a first bearing and a second bearing, which are located inside the rotating cavity.

[0010] The bottom end of the rotating shaft is connected to a base plate, the inner ring of the second bearing is connected to the base plate, the first support arm is equipped with a cover plate, the cover plate is provided with a receiving groove, and the base plate is located in the receiving groove.

[0011] The first arm is equipped with a first limiting block, the first limiting block is equipped with a first elastic element, the second arm is equipped with a second limiting block, and the second limiting block is equipped with a second elastic element.

[0012] When the first arm and the second arm approach each other to the desired position, the first elastic element and the second elastic element abut against each other.

[0013] The first arm has mounting holes extending vertically through one end near the second arm, and the mounting holes are connected to the second arm. The hinge joint of the first and second arms is coaxial with the mounting holes.

[0014] The beneficial effects of this utility model are:

[0015] By employing symmetrical gripping components, the torque distribution on both sides of the first and second arms is uniform, facilitating stable wafer gripping and reducing wafer positioning errors. The first and second hinge points on the two gripping components are combined to form a parallelogram structure, enabling the two actuators to move and approach each other smoothly, further reducing wafer positioning errors. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the clamping mechanism.

[0017] Figure 2 This is a cross-sectional view of the structure at the connection between the first and second arms.

[0018] Figure 3 This is a cross-sectional view of the connection structure between the first arm and the first gripping arm.

[0019] 1. First arm; 101. Rotating cavity; 102. Mounting hole;

[0020] 2. Second arm; 3. Gripping assembly;

[0021] 31. First gripping arm; 32. Second gripping arm; 33. Grip seat;

[0022] 301. Shaft; 302. First bearing; 303. Second bearing;

[0023] 4. Actuator;

[0024] 5. Base plate;

[0025] 6. Cover plate; 601. Receiving groove;

[0026] 7. First limiting block; 71. First elastic element;

[0027] 8. Second limiting block; 81. Second elastic element. Detailed Implementation

[0028] To facilitate understanding by those skilled in the art, the present invention will be further described below in conjunction with embodiments and accompanying drawings. Specific embodiments of the present invention will be described below. It should be noted that, in order to provide a concise description of these embodiments, this specification cannot provide a detailed description of all features of the actual embodiments.

[0029] refer to Figures 1 to 3 As shown, this utility model provides a clamping mechanism, including a first arm 1, a second arm 2 hinged to the first arm 1, and two clamping components 3 connected between the first arm 1 and the second arm 2. The clamping components 3 are symmetrically arranged on both sides of the first arm 1 and the second arm 2. The hinge points of the clamping components 3 with the first arm 1 and the second arm 2 are respectively the first hinge point and the second hinge point. The straight line where the first hinge point is located is parallel to the straight line where the second hinge point is located. The distance between adjacent first hinge points is equal to the distance between adjacent second hinge points. The clamping components 3 are connected to an actuator 4 for picking up and placing wafers.

[0030] refer to Figure 1 , 2 As shown, in practical applications, the first arm 1 and the second arm 2 are connected to the two output ends of the robotic arm, allowing the first arm 1 and the second arm 2 to rotate independently. When the first arm 1 and the second arm 2 rotate in the same direction, the entire gripping mechanism rotates, facilitating wafer placement and removal in different directions. When the first arm 1 and the second arm 2 rotate in opposite directions, one actuator 4 moves away from the hinge of the first arm 1 and the second arm 2, while the other actuator 4 moves closer to the hinge of the first arm 1 and the second arm 2, thus meeting the wafer gripping requirements in different directions and positions. By using symmetrical gripping components 3, the torque distribution on both sides of the first arm 1 and the second arm 2 is uniform, facilitating stable wafer gripping and reducing wafer positioning errors. The first hinge point and the second hinge point on the two gripping components 3 are combined to form a parallelogram structure, allowing the two actuators 4 to move and approach each other smoothly, reducing wafer positioning errors.

[0031] refer to Figure 1As shown, in this embodiment, the gripping assembly 3 includes a first gripping arm 31 with one end hinged to the first support arm 1, a second gripping arm 32 with one end hinged to the second support arm 2, and a gripping seat 33 hinged to the first gripping arm 31 and the second gripping arm 32. The actuator 4 is connected to the gripping seat 33. The hinge point between the first gripping arm 31 and the first support arm 1 is the first hinge point, and the hinge point between the second gripping arm 32 and the second support arm 2 is the second hinge point. The gripping seat 33 is located outside the line where the first hinge point and the second hinge point are located. In actual application, the first support arm 1 and the second support arm 2 rotate in opposite directions. By setting the gripping seat 33 outside the line where the first hinge point and the second hinge point are located, the moving arm of the gripping seat 33 is increased, which facilitates the smooth movement of the gripping seat 33.

[0032] refer to Figure 1 , 3 As shown, in this embodiment, the first gripping arm 31 is connected to a rotating shaft 301, which is rotatably connected to the first support arm 1. The axis of the rotating shaft 301 coincides with the rotation center of the first hinge point. Specifically, the connection between the second gripping arm 32 and the second support arm 2 adopts the same connection structure, which facilitates the stable rotation of the first gripping arm 31 and the second gripping arm 32.

[0033] refer to Figure 1 , 3 As shown, in this embodiment, the first support arm 1 is provided with a rotating cavity 101, and the rotating shaft 301 is rotatably connected to the rotating cavity 101. The upper and lower ends of the rotating shaft 301 are respectively equipped with a first bearing 302 and a second bearing 303. The first bearing 302 and the second bearing 303 are located inside the rotating cavity 101. The first bearing 302 and the second bearing 303 stably support the two ends of the rotating shaft 301, which facilitates the smooth rotation of the rotating shaft 301. The rotating shaft 301 is hidden inside the first gripping arm 31, resulting in a compact structure and saving space.

[0034] refer to Figure 1 As shown, in this embodiment, the bottom end of the rotating shaft 301 is connected to a base plate 5, the inner ring of the second bearing 303 is connected to the base plate 5, the first support arm 1 is equipped with a cover plate 6, the cover plate 6 is provided with a receiving groove 601, and the base plate 5 is located in the receiving groove 601. In actual application, the cover plate 6 is removed to separate the base plate 5 and the rotating shaft 301, so that the top end of the rotating shaft 301 can be pulled out of the first support arm 1, which is convenient for cleaning or replacing the rotating shaft 301 and for quick maintenance of the connection between the first support arm 1 and the first clamping arm 31. Specifically, the connection between the second support arm 2 and the second clamping arm 32 adopts the same connection method as the first support arm 1 and the second clamping arm 32, which is convenient for maintenance of the connection between the second support arm 2 and the second clamping arm 32.

[0035] refer to Figure 1As shown, in this embodiment, the first support arm 1 is equipped with a first limiting block 7, the first limiting block 7 is equipped with a first elastic element 71, the second support arm 2 is equipped with a second limiting block 8, and the second limiting block 8 is equipped with a second elastic element 81. In actual application, when the first support arm 1 and the second support arm 2 approach each other to the desired position, the first elastic element 71 and the second elastic element 81 abut against each other. The first elastic element 71 and the second elastic element 81 buffer the impact when the first support arm 1 and the second support arm 2 come into contact with each other, prevent the first support arm 1 and the second support arm 2 from colliding, and ensure the safety of the structure in use.

[0036] refer to Figure 1 , 2 As shown in this embodiment, the first support arm 1 has a mounting hole 102 extending vertically through one end near the second support arm 2. The mounting hole 102 is connected to the second support arm 2, and the hinge joint of the first support arm 1 and the second support arm 2 is coaxially corresponding to the mounting hole 102.

[0037] In practical applications, the shaft components connected to the two output ends of the robotic arm are designated as the outer shaft and the inner shaft, respectively. The inner shaft is coaxially inserted into the outer shaft. After passing through the mounting hole 102, the inner shaft is connected to the second arm 2, and the outer shaft is connected to the first arm 1. This makes the outer shaft, inner shaft, first arm 1 and second arm 2 coaxially corresponding, so that the actuator 4 is accurately positioned in the required position, improving the wafer pick-and-place accuracy.

[0038] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes, and modifications made to the above embodiments based on the present utility model without departing from the scope of the present utility model shall fall within the scope of the present utility model.

Claims

1. A clamping mechanism, characterized in that, The device includes a first arm (1), a second arm (2) hinged to the first arm (1), and at least two gripping assemblies (3) connected between the first arm (1) and the second arm (2). The gripping assemblies (3) are symmetrically arranged on both sides of the first arm (1) and the second arm (2). The hinge points of the gripping assemblies (3) with the first arm (1) and the second arm (2) are the first hinge point and the second hinge point, respectively. The straight line where the first hinge point is located is parallel to the straight line where the second hinge point is located. The distance between adjacent first hinge points is equal to the distance between adjacent second hinge points. The gripping assembly (3) is connected to an actuator (4) for picking up and placing wafers.

2. The clamping mechanism according to claim 1, characterized in that, The clamping assembly (3) includes a first clamping arm (31) hinged at one end to a first support arm (1), a second clamping arm (32) hinged at one end to a second support arm (2), and a clamping seat (33) hinged to the first clamping arm (31) and the second clamping arm (32). The actuator (4) is connected to the clamping seat (33). The hinge point between the first clamping arm (31) and the first support arm (1) is the first hinge point, and the hinge point between the second clamping arm (32) and the second support arm (2) is the second hinge point. The clamping seat (33) is located outside the straight line where the first hinge point and the second hinge point are located.

3. The clamping mechanism according to claim 2, characterized in that, The first gripping arm (31) is connected to a rotating shaft (301), which is rotatably connected to the first support arm (1). The axis of the rotating shaft (301) coincides with the rotation center of the first hinge point.

4. The clamping mechanism according to claim 3, characterized in that, The first support arm (1) is provided with a rotating cavity (101), and the rotating shaft (301) is rotatably connected to the rotating cavity (101). The upper and lower ends of the rotating shaft (301) are respectively equipped with a first bearing (302) and a second bearing (303), and the first bearing (302) and the second bearing (303) are located inside the rotating cavity (101).

5. The clamping mechanism according to claim 4, characterized in that, The bottom end of the rotating shaft (301) is connected to a base plate (5), the inner ring of the second bearing (303) is connected to the base plate (5), the first support arm (1) is equipped with a cover plate (6), the cover plate (6) is provided with a receiving groove (601), and the base plate (5) is located in the receiving groove (601).

6. The clamping mechanism according to claim 1, characterized in that, The first arm (1) is equipped with a first limiting block (7), the first limiting block (7) is equipped with a first elastic element (71), the second arm (2) is equipped with a second limiting block (8), and the second limiting block (8) is equipped with a second elastic element (81). When the first arm (1) and the second arm (2) move toward each other to the desired position, the first elastic element (71) and the second elastic element (81) come into contact.

7. The clamping mechanism according to claim 1, characterized in that, The first arm (1) has a mounting hole (102) extending vertically through one end near the second arm (2). The mounting hole (102) is connected to the second arm (2). The hinge of the first arm (1) and the second arm (2) is coaxial with the mounting hole (102).

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