Pulling table structure for vacuum chamber

Abstract

The utility model relates to a pull out workstation structure technical field especially relates to a kind of pull out workstation structure for vacuum cavity.Its technical scheme includes cleaning platform and vacuum cavity, the cleaning platform includes platform bottom plate and is installed on the cleaning bottom plate above platform bottom plate, guide rail assembly is installed between platform bottom plate and cleaning bottom plate, the guide rail assembly includes guide rail on platform bottom plate in the direction of pull fixed, the slider of fixed connection with cleaning bottom plate, multiple pulleys are rotatably installed on the slider, the pulley surface is equipped with circular-arc groove, the circular-arc convex structure that cooperates with the circular-arc groove of pulley is equipped on the guide rail, forms rolling pair.The utility model discards the lubricating grease demand of traditional linear guide rail, avoids grease volatilization pollution product in the process of plasma cleaning, completely solves secondary pollution problem, avoids conventional non-metallic slider easy ageing failure, effectively prolongs equipment life, provides excellent temperature resistance and reliability.

Description

Technical Field

[0001] This utility model relates to the technical field of pull-out worktable structures, and in particular to a pull-out worktable structure for a vacuum cavity. Background Technology

[0002] For cleaning batches of products not addressed during the plasma research and development phase, such as in some research institutes and universities, stand-alone plasma cleaners are still used. These cleaners often do not require high cleaning efficiency and rely on manual loading and unloading. For cleaning chambers with a relatively long depth, manual loading and unloading is quite troublesome. Furthermore, the conventional pull-out structure uses linear guides and sliders, which contain non-metallic materials that cannot withstand the cyclical temperature rise of plasma cleaning for extended periods. Additionally, the linear guides and sliders require lubrication, which introduces new contaminants during the plasma cleaning process, causing secondary contamination of the cleaned materials or products. Utility Model Content

[0003] The purpose of this invention is to address the problems existing in the background technology by proposing a pull-out worktable structure for a vacuum chamber that allows the cleaning platform to be pulled out for convenient placement of cleaning materials or products.

[0004] The technical solution of this utility model is: a pull-out worktable structure for a vacuum chamber, including a cleaning platform and a vacuum chamber, wherein the cleaning platform includes a platform base plate and a cleaning base plate installed on top of the platform base plate;

[0005] A guide rail assembly is installed between the platform base plate and the cleaning base plate. The guide rail assembly includes a guide rail fixed to the platform base plate along the pulling direction, a slider fixedly connected to the cleaning base plate, and multiple pulleys rotatably installed on the slider. The surface of the pulleys is provided with arc-shaped grooves, and the guide rail is provided with arc-shaped protrusions that cooperate with the arc-shaped grooves of the pulleys to form a rolling pair.

[0006] A limiting component installed on the platform base plate to limit the displacement stroke of the slider;

[0007] A plunger-type limiting assembly is installed between the platform base plate and the cleaning base plate, wherein the plunger-type limiting assembly limits the cleaning base plate.

[0008] Optionally, the limiting component includes limiting blocks fixedly installed on both sides of the guide rail assembly, the limiting blocks being fixedly connected to the platform base plate, and the limiting blocks being higher than the upper surface of the guide rail.

[0009] Optionally, the plunger-type limiting assembly includes a plunger positioning block fixed to the cleaning base plate, the surface of the plunger positioning block is provided with a V-shaped groove, a plunger fixing block is fixedly installed on the platform base plate, a ball-head plunger is fixedly installed inside the plunger fixing block, and the head of the ball-head plunger is elastically pressed against the V-shaped groove.

[0010] Optionally, the number of plunger positioning blocks is four sets, distributed at the four corners of the cleaning base plate, and the number of plunger fixing blocks is two sets, corresponding to the limit positions of the cleaning base plate's pull-out stroke.

[0011] Optionally, a photoelectric sensor is fixedly installed at the front end of the platform base plate, and the photoelectric sensor detects whether the cleaning base plate has completely retracted into the vacuum chamber.

[0012] Optionally, the guide rail cooperates with at least two sets of sliders and pulleys, with pulleys installed at the four corners of each set of sliders.

[0013] Optionally, the platform base plate and the vacuum chamber are molded together, forming a sealed space within the vacuum chamber, and a sealing ring is fixedly installed on the contact surface between the vacuum chamber and the platform base plate.

[0014] Optionally, the bottom of the cleaning platform is provided with a circular opening, a vacuum connector is fixedly installed on the circular opening, the other end of the vacuum connector is connected to a vacuum pump group, and an observation window is provided on the vacuum chamber.

[0015] In summary, this application includes at least one of the following beneficial technical effects:

[0016] The all-metal guide rail assembly eliminates the need for lubrication grease in traditional linear guide rails, avoiding grease evaporation and product contamination during plasma cleaning, thus completely solving the problem of secondary pollution. The metal rolling pair structure can withstand the cyclic temperature rise of plasma cleaning for a long time, avoiding the aging and failure of conventional non-metallic sliders, effectively extending the equipment's lifespan and providing excellent temperature resistance and reliability. The pull-out design allows the cleaning platform to be pulled out of the cavity as a whole, solving the problem of difficult manual loading and unloading of materials in deep cavities and improving operational convenience. Attached Figure Description

[0017] Figure 1 This is a structural diagram of a pull-out workbench.

[0018] Figure 2 This is a schematic diagram of the cleaning platform.

[0019] Figure 3 This is a schematic diagram showing the position of the limit block;

[0020] Figure 4 This is a schematic diagram showing the distribution of the plunger-type limiting assembly;

[0021] Figure 5 This is a schematic diagram of the guide rail assembly.

[0022] Figure 6 Schematic diagram of the platform base plate and cleaning base plate Figure 1 ;

[0023] Figure 7 Schematic diagram of the platform base plate and cleaning base plate Figure 2 .

[0024] Reference numerals: 1. Cleaning platform; 11. Vacuum connector; 12. Platform base plate; 13. Cleaning base plate; 14. Guide rail assembly; 141. Guide rail; 142. Slider; 143. Pulley; 15. Limiting block; 16. Plunger-type limiting assembly; 161. Plunger positioning block; 162. Plunger fixing block; 163. Ball-head plunger; 17. Photoelectric sensor; 2. Vacuum chamber; 21. Observation window. Detailed Implementation

[0025] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of this utility model, but not all embodiments.

[0026] The components of the present invention embodiments described and shown in the accompanying drawings can typically be arranged and designed in a variety of different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention.

[0027] Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0028] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0029] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0030] like Figure 1 , Figure 2 , Figure 6 , Figure 7 As shown, the present invention proposes a pull-out worktable structure for a vacuum chamber, including a cleaning platform 1 and a vacuum chamber 2. The bottom of the cleaning platform 1 is provided with a circular opening, and a vacuum connector 11 is fixedly installed on the circular opening. The other end of the vacuum connector is connected to a vacuum pump group. The vacuum pump group extracts the gas in the vacuum chamber 2 to create a vacuum environment, which is conducive to the generation of plasma and the reaction. The platform base plate 12 and the vacuum chamber 2 are molded together, forming a sealed space in the vacuum chamber 2. A sealing ring is fixedly installed on the contact surface between the vacuum chamber 2 and the platform base plate 12 to ensure the airtightness of the vacuum chamber 2 and the platform base plate 12 when molded together. An observation window 21 is provided on the vacuum chamber 2, through which plasma glow can be observed. The cleaning platform 1 includes a platform base plate 12 and a cleaning base plate 13 installed on the platform base plate 12.

[0031] As one implementation method, such as Figure 2 , Figure 3 as well as Figure 5 As shown, the pull-out workbench structure of this embodiment also includes a guide rail assembly 14 installed between the platform base plate 12 and the cleaning base plate 13. The guide rail assembly 14 includes a guide rail 141 fixed on the platform base plate 12 along the pulling direction, a slider 142 fixedly connected to the cleaning base plate 13, and multiple pulleys 143 rotatably installed on the slider 142. The surface of the pulleys 143 is provided with arc-shaped grooves, and the guide rail 141 is provided with arc-shaped protrusions that cooperate with the arc-shaped grooves of the pulleys 143 to form a rolling pair. When the user pulls out the cleaning base plate 13, the metal pulleys 143 on the slider 142 roll along the arc protrusions of the guide rail 141. The metal directly rolls and rubs against each other, eliminating the need for lubrication and avoiding the risk of contamination. The pulley grooves and the guide rail protrusions are precisely engaged to ensure smooth movement.

[0032] The guide rail 141 is in cooperation with at least two sets of sliders 142 and pulleys 143. Each set of sliders 142 is equipped with pulleys 143 at its four corners, which can ensure the smooth movement of the cleaning base plate 13.

[0033] As one implementation method, such as Figures 2 to 4 As shown, the pull-out workbench structure of this embodiment also includes a limiting component installed on the platform base plate 12 to limit the displacement stroke of the slider 142 and a plunger-type limiting component 16 installed between the platform base plate 12 and the cleaning base plate 13. The plunger-type limiting component 16 limits the cleaning base plate 13, preventing the slider 142 from slipping off the guide rail 141. The plunger-type limiting component 16 also ensures the stability of the cleaning base plate 13 at its extreme positions.

[0034] Furthermore, the limiting component includes limiting blocks 15 fixedly installed on both sides of the guide rail assembly 14. The limiting blocks 15 are fixedly connected to the platform base plate 12. The limiting blocks 15 are higher than the upper surface of the guide rail 141 and can block the slider 142 to prevent the slider 142 from sliding out of the guide rail 141.

[0035] Furthermore, the plunger-type limiting assembly 16 includes a plunger positioning block 161 fixed on the cleaning base plate 13. The surface of the plunger positioning block 161 is provided with a V-shaped groove. A plunger fixing block 162 is fixedly installed on the platform base plate 12. A ball-head plunger 163 is fixedly installed inside the plunger fixing block 162. The head of the ball-head plunger 163 is elastically pressed against the V-shaped groove. There are four sets of plunger positioning blocks 161, distributed at the four corners of the cleaning base plate 13. There are two sets of plunger fixing blocks 162, which are correspondingly set at the limit position of the pulling stroke of the cleaning base plate 13. When the head of the ball-head plunger 163 slides into the plunger positioning block 161, the V-shaped groove plays a limiting role, which can limit the cleaning base plate 13 at the limit position and prevent the cleaning base plate 13 from sliding.

[0036] like Figures 1 to 3 As shown, in this embodiment, a photoelectric sensor 17 is fixedly installed at the front end of the platform base plate 12. The photoelectric sensor 17 detects whether the cleaning base plate 13 has completely retracted into the vacuum chamber 2 when the equipment is running, so as to prevent the risk of equipment or product damage if the cleaning base plate 13 is not completely retracted into the vacuum chamber 2 when the platform base plate 12 and the vacuum chamber 2 are closed.

[0037] When the user pulls out the cleaning base plate 13, the metal pulley 143 on the slider 142 rolls along the arc protrusion of the guide rail 141. The metal directly rolls and rubs against each other, eliminating the need for lubricating grease and avoiding the risk of contamination. The pulley groove and the guide rail protrusion are precisely engaged to ensure smooth movement.

[0038] When the cleaning base plate 13 is pulled to the end point, the head of the ball plunger 163 is elastically pressed into the V-groove of the plunger positioning block 161, forming a mechanical self-lock to prevent the platform from accidentally sliding back. When pushed back to the end point, another set of plunger limits is triggered in the same way.

[0039] The photoelectric sensor 17 confirms that the cleaning base plate 13 has completely retracted into the cavity. The platform base plate 12 and the vacuum cavity 2 are pressed together by the sealing ring. The vacuum pump draws air through the bottom opening to form the sealed environment required for the plasma reaction.

[0040] The above specific embodiments are merely several optional embodiments of this utility model. Based on the technical solution of this utility model and the relevant teachings of the above embodiments, those skilled in the art can make various alternative improvements and combinations to the above specific embodiments.

Claims

1. A pull-out worktable structure for a vacuum cavity, characterized in that, include: The cleaning platform (1) and the vacuum chamber (2) are provided. The cleaning platform (1) includes a platform base plate (12) and a cleaning base plate (13) installed on the platform base plate (12). The guide rail assembly (14) is installed between the platform base plate (12) and the cleaning base plate (13). The guide rail assembly (14) includes a guide rail (141) fixed on the platform base plate (12) along the pulling direction, a slider (142) fixedly connected to the cleaning base plate (13), and a plurality of pulleys (143) rotatably installed on the slider (142). The surface of the pulleys (143) is provided with arc-shaped grooves, and the guide rail (141) is provided with arc-shaped protrusions that cooperate with the arc-shaped grooves of the pulleys (143) to form a rolling pair. A limiting component installed on the platform base plate (12) to limit the displacement stroke of the slider (142); A plunger-type limiting assembly (16) is installed between the platform base plate (12) and the cleaning base plate (13), wherein the plunger-type limiting assembly (16) limits the cleaning base plate (13).

2. The structure of a pull-out worktable for a vacuum cavity according to claim 1, characterized in that, The limiting component includes limiting blocks (15) fixedly installed on both sides of the guide rail assembly (14). The limiting blocks (15) are fixedly connected to the platform base plate (12), and the limiting blocks (15) are higher than the upper surface of the guide rail (141).

3. The structure of a pull-out worktable for a vacuum cavity according to claim 2, characterized in that, The plunger-type limiting assembly (16) includes a plunger positioning block (161) fixed on the cleaning base plate (13). The surface of the plunger positioning block (161) is provided with a V-shaped groove. A plunger fixing block (162) is fixedly installed on the platform base plate (12). A ball-head plunger (163) is fixedly installed inside the plunger fixing block (162). The head of the ball-head plunger (163) is elastically pressed against the V-shaped groove.

4. The structure of a pull-out worktable for a vacuum cavity according to claim 3, characterized in that, The number of plunger positioning blocks (161) is four sets, distributed at the four corners of the cleaning base plate (13), and the number of plunger fixing blocks (162) is two sets, corresponding to the limit position of the pull-out stroke of the cleaning base plate (13).

5. The structure of a pull-out worktable for a vacuum cavity according to claim 4, characterized in that, A photoelectric sensor (17) is fixedly installed at the front end of the platform base plate (12). The photoelectric sensor (17) detects whether the cleaning base plate (13) has completely retracted into the vacuum chamber (2).

6. The structure of a pull-out worktable for a vacuum cavity according to claim 5, characterized in that, The guide rail (141) cooperates with at least two sets of sliders (142) and pulleys (143), with pulleys (143) installed at the four corners of each set of sliders (142).

7. The structure of a pull-out worktable for a vacuum cavity according to claim 6, characterized in that, The platform base plate (12) and the vacuum cavity (2) are molded together, and a sealed space is formed inside the vacuum cavity (2). A sealing ring is fixedly installed on the contact surface between the vacuum cavity (2) and the platform base plate (12).

8. The structure of a pull-out worktable for a vacuum cavity according to claim 7, characterized in that, The bottom of the cleaning platform (1) is provided with a circular opening, and a vacuum connector (11) is fixedly installed on the circular opening. The other end of the vacuum connector is connected to a vacuum pump group, and an observation window (21) is provided on the vacuum chamber (2).

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