A two-way clamping positioning tool for precision pipe welding of semiconductor equipment

Abstract

The utility model discloses a kind of semiconductor equipment precision pipe fittings welding bidirectional clamping positioning tool, belong to semiconductor equipment manufacturing technical field.It include round bar, first base, second base, bidirectional clamping positioning tool includes horizontal workbench and the positioning block with first limit seat, second limit seat of setting in horizontal workbench top side;The top side of positioning block is provided with the arc-shaped recess that can be embedded with the outer periphery of round bar, first clamping piece that can be pushed first base to move to the outside of first limit seat is set on horizontal workbench, second clamping piece that can be pushed second base to move to the outside of second limit seat.The utility model of a kind of semiconductor equipment precision pipe fittings welding bidirectional clamping positioning tool, to solve the problem that welding tool cannot be accurately positioned in prior art, resulting in poor welding quality, low production efficiency.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor equipment manufacturing technology, specifically relating to a bidirectional clamping and positioning fixture for welding precision tubes in semiconductor equipment. Background Technology

[0002] Precision tubular welding is a critical process in semiconductor equipment manufacturing. The workpiece requiring positioning typically consists of a round bar and two bases. The bases have circular holes corresponding to the ends of the bar. During welding, it is essential to ensure that the end of the bar passes through the holes in the bases, that the end face of the bar is flush with the outer side of the bases, and that the relative position between the two bases is precise. However, existing welding fixtures struggle to simultaneously meet these high-precision positioning requirements, leading to workpiece misalignment during welding. This affects welding quality and product performance, reduces production efficiency and yield, and increases production costs.

[0003] Therefore, there is an urgent need for a bidirectional clamping and positioning fixture that can achieve precise positioning. Utility Model Content

[0004] The purpose of this utility model is to overcome the shortcomings of the prior art and provide a bidirectional clamping and positioning fixture for welding precision tubes of semiconductor equipment, so as to solve the problem that the welding fixtures in the prior art cannot be accurately positioned, resulting in poor welding quality and low production efficiency.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a bidirectional clamping and positioning fixture for welding precision tubes of semiconductor equipment, comprising a round bar and a first base and a second base respectively movably sleeved on both ends of the round bar. The bidirectional clamping and positioning fixture includes a horizontal worktable and a plurality of positioning blocks and a first limiting seat and a second limiting seat disposed on the top side of the horizontal worktable.

[0006] The positioning block has an arc-shaped groove on its top side that can fit into the outer periphery of the round bar. The horizontal worktable is provided with a first clamping member that can push the first base to move in the horizontal direction to fit against the outer side of the first limiting seat, and a second clamping member that can push the second base to move in the horizontal direction to fit against the outer side of the second limiting seat. The end face of the round bar can abut against the ends of the first clamping member and the second clamping member. The moving direction of the first clamping member and the second clamping member is parallel to the central axis of the round bar placed on the positioning block.

[0007] Optionally, both the first clamping member and the second clamping member include a mounting base that is slidably connected to the horizontal workbench in the horizontal direction and a plurality of clamping columns that are movably inserted through the mounting base in the horizontal direction.

[0008] The clamping post has a spring that is movably sleeved on one end of its outer periphery, which passes through the mounting base and can elastically support the clamping post and the mounting base, and an adjusting nut is threadedly connected to the other end of its outer periphery.

[0009] Optionally, the horizontal worktable is provided with a straight groove corresponding to the mounting base, and the mounting base includes a limiting rib that can pass through the straight groove and slide along the straight groove, and the straight groove is arranged along the axial direction of the round bar placed on the positioning block.

[0010] Optionally, a copper post is provided on one end of the clamping post facing the first base or the second base.

[0011] Optionally, at least one end of the clamping post can abut against the end face of the round bar and the first base or the second base.

[0012] Optionally, the top side of the horizontal worktable is provided with a first sinking groove corresponding to the first base and a second sinking groove corresponding to the second base.

[0013] Optionally, the sidewall of the arc-shaped groove, the side of the first limiting seat that can abut against the first base, and the side of the second limiting seat that can abut against the second base are all provided with Teflon.

[0014] Optionally, it also includes a drive mechanism for driving the first clamping member and the second clamping member to move. The drive mechanism includes a gear rotatably connected to the middle of the bottom side of the horizontal worktable, and two racks that are parallel to each other and mesh with the gear are slidably connected to the bottom side of the horizontal worktable via a linear guide rail. The ends of the two racks are respectively fixedly connected to the first clamping member and the second clamping member, and a servo motor that is driven and connected to the gear is suspended at the bottom of the horizontal worktable.

[0015] Compared with the prior art, the beneficial effects achieved by this utility model are as follows: The radial support and positioning of the round bar is achieved using an arc-shaped groove. Subsequently, the first and second clamping members push the first and second bases, which are movably sleeved at both ends of the round bar, to move on a fixed horizontal plane until the first and second bases are in contact with the outer sides of the corresponding first and second limiting seats, thereby determining the positions of the first and second bases. Simultaneously, the end face of the round bar can also be pressed against the ends of the first and second clamping members. Through the axial force transmission of "clamping member-round bar-base-limiting seat," the round bar is axially fixed from both ends, thereby achieving high-precision positioning of the round bar during welding and preventing displacement of the various structures during the welding process. Attached Figure Description

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0017] Figure 1 This is a schematic diagram of the structure of a bidirectional clamping and positioning fixture for welding precision tubes of semiconductor equipment in a preferred embodiment of this utility model;

[0018] Figure 2 This is a cross-sectional view of a bidirectional clamping and positioning fixture for welding precision tubes of semiconductor equipment in a preferred embodiment of this utility model.

[0019] Figure 3 This is a schematic diagram of the structure of a bidirectional clamping and positioning fixture for welding precision tubes of semiconductor equipment using a drive mechanism in a preferred embodiment of this utility model;

[0020] Figure 4 This is a schematic diagram of the structure of the drive mechanism installed on the bottom side of the horizontal worktable in a preferred embodiment of the present invention;

[0021] The components are as follows: 1. Round bar; 2. First base; 3. Second base; 4. Horizontal worktable; 401. Straight groove; 402. First sinking slide; 403. Second sinking slide; 5. Positioning block; 6. First limit seat; 7. Second limit seat; 9. Mounting base; 901. Limiting rib; 10. Clamping column; 11. Spring; 12. Adjusting nut; 13. Copper column; 14. Gear; 15. Rack; 16. Servo motor; 17. Linear guide rail. Detailed Implementation

[0022] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. These drawings are simplified schematic diagrams, which are only used to illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0023] It should be noted that if directional indicators (such as up, down, bottom, top, etc.) are involved in this embodiment, these directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly. The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined with "first" and "second" may explicitly or implicitly include one or more of that feature. Unless otherwise explicitly specified and limited, the terms "set," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances. Example 1

[0024] like Figures 1-2As shown, a bidirectional clamping and positioning fixture for welding precision tube components in semiconductor equipment includes a round bar 1 and a first base 2 and a second base 3 respectively movably sleeved at both ends of the round bar 1. The bidirectional clamping and positioning fixture includes a horizontal worktable 4 and a plurality of positioning blocks 5 and a first limiting seat 6 and a second limiting seat 7 disposed on the top side of the horizontal worktable 4. The first base 2 and the second base 3 can be placed upright on the top side of the horizontal worktable 4, thereby determining the horizontal position of the first base 2 and the second base 3 relative to the horizontal worktable 4, i.e., determining the relative horizontal position of the first base 2 and the second base 3. Since the top side of the positioning block 5 is provided with an arc-shaped groove that can fit into the outer periphery of the round bar 1, when the round bar 1 is placed flat on the horizontal worktable 4 through the positioning block 5, the central axis of the round bar 1 can be positioned by the arc-shaped groove on the positioning block 5, achieving radial support positioning of the round bar 1 and determining the horizontal position of the round bar 1 relative to the horizontal worktable 4. Meanwhile, the horizontal worktable 4 is equipped with a first clamping member that can push the first base 2 to move in the horizontal direction to fit against the outer side of the first limiting seat 6, and a second clamping member that can push the second base 3 to move in the horizontal direction to fit against the outer side of the second limiting seat 7. The end face of the round bar 1 can abut against the ends of the first clamping member and the second clamping member. The moving direction of the first clamping member and the second clamping member is parallel to the central axis of the round bar 1 placed on the positioning block 5. Therefore, when the first clamping member moves against the first base 2 and / or the round bar 1, and the second clamping member moves against the second base 3 and / or the round bar 1, the first base 2, the second base 3, and the round bar 1 can all adjust their positions on a defined horizontal plane until the first base 2 is against the first limiting seat 6, the second base 3 is against the second limiting seat 7, and the end faces of both ends of the round bar 1 are flush with the first base 2 and the second base 3. At this time, the positions of the round bar 1, the first base 2, and the second base 3 can be effectively fixed, thereby ensuring the positional accuracy of the round bar 1, the first base 2, and the second base 3 during welding, and also preventing the round bar 1, the first base 2, and the second base 3 from shifting positions during the welding process.

[0025] It should be noted that sufficient clearance is provided between the first limiting seats 6 and between the second limiting seats 7 as described above, to facilitate manual or robotic welding. Furthermore, in this technical solution, the first and second clamping components can be driven by various linear drive units in the prior art, such as cylinders, linear motors, servo slides, and lead screw slides. Figure 2 Examples of cylinders from China and Israel.

[0026] Furthermore, such as Figure 1As shown, both the first and second clamping components include a mounting base 9 slidably connected to the horizontal worktable 4 in the horizontal direction and multiple clamping posts 10 movably passing through the mounting base 9 in the horizontal direction. Specifically, a spring 11 is movably sleeved on the outer periphery of a section of the clamping post 10 that passes through the mounting base 9 and is elastically supported on one end of the clamping post 10 facing the first base 2 or the second base 3 and the mounting base 9. An adjusting nut 12 is threadedly connected to the other section of the clamping post 10. By adjusting the relative position of the adjusting nut 12 with respect to the clamping post 10, the initial compression of the spring 11 can be adjusted, giving the clamping post 10 good adaptability. Furthermore, when the spring 11 is compressed due to the effective contact between the clamping post 10 and the round bar 1 and / or the first base 2 and the second base 3, the spring 11 provides a continuous clamping force for the positioning of the round bar 1 and / or the first base 2 and the second base 3, thereby ensuring the stability of the fixed position of the round bar 1, the first base 2, and the second base 3. Furthermore, the clamping column 10 can float relative to the mounting base 9, which can effectively prevent the clamping column 10 from rigidly contacting the round bar 1 and / or the first base 2 and the second base 3, thereby improving the service life of the clamping column 10.

[0027] It should be noted that the multiple clamping posts 10 disposed on the same mounting base 9 can act evenly on the first base 2 and / or the second base 3 and / or the round rod 1, ensuring that the first base 2, the second base 3, and the round rod 1 are subjected to uniform force. The first base 2 and the second base 3, which are movably sleeved on the end of the round rod 1, can also slide relative to the round rod 1, thereby facilitating the adjustment of the relative positions of the first base 2, the second base 3, and the round rod 1. Furthermore, at least one end of the clamping post 10 can simultaneously abut against the end face of the round rod 1 and the first base 2 or the second base 3, specifically as follows: Figure 1 As shown, this is to ensure that the end face of the round bar 1 is flush with the outer side of the first base 2 and the outer side of the second base 3.

[0028] The above, such as Figure 1 , Figure 2 As shown, the horizontal worktable 4 is provided with a straight groove 401 corresponding to the mounting base 9, and the mounting base 9 includes a limiting rib 901 that can pass through the straight groove 401 and slide along the straight groove 401. The straight groove 401 is arranged along the axial direction of the round bar 1 placed on the positioning block 5 to determine the sliding direction of the mounting base 9 relative to the horizontal worktable 4. At the same time, the mounting base 9 can be fixedly connected to the output end of the cylinder, and the cylinder can drive the mounting base 9 to move along the straight groove 401, thereby meeting the positioning requirements of the first base 2, the second base 3, and the round bar 1.

[0029] In this technical solution, such as Figure 1As shown, a copper column 13 is provided at one end of the clamping column 10 facing the first base 2 or the second base 3. The copper column 13 at the end of the clamping column 10 can quickly conduct and diffuse the heat generated by welding on the first base 2 and / or the second base 3 and / or the round bar 1, so as to avoid the first base 2 and / or the second base 3 and / or the round bar 1 from deforming due to local overheating.

[0030] Meanwhile, the top side of the horizontal worktable 4 is provided with a first recessed slide 402 corresponding to the first base 2 and a second recessed slide 403 corresponding to the second base 3. That is, the first base 2 can be placed upright at the bottom of the first recessed slide 402 and the second base 3 can be placed upright at the bottom of the second recessed slide 403. The depths of the first recessed slide 402 and the second recessed slide 403 are different, so as to meet the positioning requirements of the first base 2 and the second base 3 with different heights.

[0031] Furthermore, to prevent wear and tear on the surfaces of the first base 2, the second base 3, and the round bar 1 due to friction, Teflon is provided on the sidewall of the arc-shaped groove, the side of the first limiting seat 6 that can abut against the first base 2, and the side of the second limiting seat 7 that can abut against the second base 3. Example 2

[0032] like Figures 2-4 As shown, based on Embodiment 1, the bidirectional clamping and positioning fixture for welding precision tube components of semiconductor equipment further includes a driving mechanism for moving the first clamping member and the second clamping member. The driving mechanism includes a gear 14 rotatably connected to the center of the bottom side of the horizontal worktable 4, and two parallel racks 15 that mesh with the gear 14 are slidably connected to the bottom side of the horizontal worktable 4 via a linear guide rail 17. The linear guide rail 17 is existing technology, meaning that the racks 15 can be fixedly connected to the slider on the linear guide rail 17, and the guide rail on the linear guide rail 17 can be fixedly connected to the bottom side of the horizontal worktable 4. The slider and the guide rail slide together to ensure the linear motion accuracy of the racks 15. It should be noted that in this technical solution, the first clamping member and the second clamping member can also be slidably connected to the horizontal worktable 4 via the linear guide rail 17. Meanwhile, since the ends of the two racks 15 are fixedly connected to the first clamping member and the second clamping member respectively, and a servo motor 16 connected to the gear 14 is suspended at the bottom of the horizontal worktable 4, the drive connection includes direct connection, coupling connection, synchronous belt connection, planetary gear 14 reducer connection, etc. The servo motor 16 drives the gear 14 to rotate, thereby driving the two racks 15 to move synchronously towards or away from each other, and thus driving the first clamping member and the second clamping member to move synchronously towards or away from each other. Compared with using a single linear drive unit to drive the first clamping member and the second clamping member, this drive mechanism can enable the first clamping member and the second clamping member to achieve synchronous, stable, flexible and precise clamping actions, quickly adapt to different workpiece sizes, and ensure uniform clamping force and accurate positioning.

[0033] Working principle: During operation, the operator first places the round bar 1 on the arc-shaped groove on the positioning block 5. The arc-shaped groove provides radial support and positioning for the round bar 1. Then, the first clamping member and the second clamping member push the first base 2 and the second base 3, which are movably sleeved at both ends of the round bar 1, to move on a fixed horizontal plane, so that they fit against the outer sides of the corresponding first limit seat 6 and second limit seat 7, thereby determining the positions of the first base 2 and the second base 3. At the same time, the end face of the round bar 1 can also be pressed tightly by the ends of the first clamping member and the second clamping member. With the axial force transmission of "clamping member-round bar 1-base-limit seat", the round bar 1 is axially fixed from both ends, thereby achieving high-precision positioning of the round bar 1 during welding and preventing the structure from shifting during the welding process.

[0034] Based on the preferred embodiments of this utility model described above, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A bidirectional clamping and positioning fixture for welding precision tube components of semiconductor equipment, comprising a round bar (1) and a first base (2) and a second base (3) respectively movably sleeved at both ends of the round bar (1), characterized in that: The bidirectional clamping and positioning fixture includes a horizontal worktable (4) and several positioning blocks (5) and a first limiting seat (6) and a second limiting seat (7) disposed on the top side of the horizontal worktable (4). The top side of the positioning block (5) is provided with an arc-shaped groove that can fit into the outer periphery of the round bar (1), and the horizontal worktable (4) is provided with a first clamping member that can push the first base (2) to move in the horizontal direction to fit against the outer side of the first limiting seat (6), and a second clamping member that can push the second base (3) to move in the horizontal direction to fit against the outer side of the second limiting seat (7), and the end face of the round bar (1) can abut against the ends of the first clamping member and the second clamping member. The moving direction of the first clamping member and the second clamping member is parallel to the central axis of the round bar (1) placed on the positioning block (5).

2. The bidirectional clamping and positioning fixture for welding precision tubes in semiconductor equipment according to claim 1, characterized in that: Both the first clamping member and the second clamping member include a mounting base (9) that is slidably connected to the horizontal worktable (4) in the horizontal direction and a plurality of clamping columns (10) that are movably inserted through the mounting base (9) in the horizontal direction. Among them, a spring (11) is movably sleeved on a section of the outer periphery of the clamping column (10) that passes through the mounting base (9) and is elastically supported on one end of the clamping column (10) facing the first base (2) or the second base (3) and the mounting base (9), and an adjusting nut (12) is threadedly connected to another section of the outer periphery of the clamping column (10).

3. The bidirectional clamping and positioning fixture for welding precision tubes in semiconductor equipment according to claim 2, characterized in that: The horizontal worktable (4) is provided with a straight groove (401) corresponding to the mounting base (9), and the mounting base (9) includes a limiting rib plate (901) that can pass through the straight groove (401) and slide along the straight groove (401). The straight groove (401) is arranged along the axial direction of the round bar (1) placed on the positioning block (5).

4. The bidirectional clamping and positioning fixture for welding precision tubes in semiconductor equipment according to claim 2, characterized in that: A copper column (13) is provided on one end of the clamping column (10) facing the first base (2) or the second base (3).

5. The bidirectional clamping and positioning fixture for welding precision tubes in semiconductor equipment according to claim 2, characterized in that: At least one end of the clamping post (10) is able to abut against the end face of the round bar (1) and the first base (2) or the second base (3).

6. The bidirectional clamping and positioning fixture for welding precision tubes in semiconductor equipment according to claim 1, characterized in that: The top side of the horizontal workbench (4) is provided with a first sinking groove (402) corresponding to the first base (2) and a second sinking groove (403) corresponding to the second base (3).

7. The bidirectional clamping and positioning fixture for welding precision tubes in semiconductor equipment according to claim 1, characterized in that: The sidewall of the arc-shaped groove, the side of the first limiting seat (6) that can abut against the first base (2), and the side of the second limiting seat (7) that can abut against the second base (3) are all provided with Teflon.

8. The bidirectional clamping and positioning fixture for welding precision tubes in semiconductor equipment according to claim 1, characterized in that: It also includes a drive mechanism for driving the first clamping member and the second clamping member to move. The drive mechanism includes a gear (14) rotatably connected to the middle of the bottom side of the horizontal worktable (4). The bottom side of the horizontal worktable (4) is slidably connected with two racks (15) that are parallel to each other and mesh with the gear (14) via a linear guide rail (17). The ends of the two racks (15) are respectively fixedly connected to the first clamping member and the second clamping member. A servo motor (16) that is driven and connected to the gear (14) is suspended at the bottom of the horizontal worktable (4).

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