An FMM type mask clamping device

Abstract

The utility model relates to FMM type mask processing and detection technical field, specifically disclose a kind of FMM type mask clamping device. The FMM type mask clamping device includes locating frame and locking structure, and the locating frame is equipped with the open slot compatible with the master copy of FMM type mask;The locking structure is equipped as multiple, and is along the profile direction of the locating frame interval arrangement;Wherein, the locking structure includes clamp block and locking piece, the clamp block is set on the locating frame, the locking piece is adjustably connected on the clamp block, and the clamp block is equipped with the avoidance slot, so that the locking piece and the locating frame between formation have adjustment gap. Therefore, provide a kind of safer, reliable and can effectively prevent the structure of substrate damage and deformation, solve the technical problem that master copy is deformed and damaged in the manufacturing, inspection and repair process in the handling and operation link of prior art.

Description

Technical Field

[0001] This utility model relates to the field of FMM-type mask processing and testing technology, specifically to an FMM-type mask clamping device. Background Technology

[0002] A photomask (also known as a photomask, mask, or photomask) is a key precision component in the field of microelectronics manufacturing. Essentially, it is a transfer template used to form micro- and nano-scale electronic circuit patterns on a coated glass substrate. This template uses high-precision photolithography to etch the design pattern onto the substrate, ultimately being used in the mass production of microelectronic products such as semiconductor devices or display panels, achieving precise replication of the pattern from design to substrate.

[0003] Among the many types of photomasks, the Fine Metal Mask (FMM) stands out as a representative of high-precision masks due to its special materials and processes. FMM masks are typically made of Invar 36 alloy (an iron-nickel alloy) with a thickness of only 2030 micrometers (μm). In the manufacturing of organic light-emitting diode (OLED) display panels, the FMM plays a crucial role as a consumable material. Its working principle involves tightly bonding the FMM to an indium tin oxide (ITO) transparent conductive layer substrate during the evaporation of organic light-emitting materials. At this point, the precisely machined array of openings on the FMM acts as channels for the organic light-emitting material vapor to pass through, ensuring that the material can be deposited accurately and uniformly at predetermined positions on the ITO substrate to form a pixel array. Therefore, the precision (such as opening size, positional accuracy, and screen flatness) and stability of the FMM mask directly determine the resolution, imaging quality, and production yield of the final display panel.

[0004] The fabrication of FMM masks typically involves a crucial pre-process: the creation of the master mask. This master mask is usually made of glass substrate, and the target pattern is first formed onto the glass master mask using a high-precision photolithography process. Subsequently, using an exposure device and the glass master mask as a template, a secondary photolithography process is employed to precisely transfer the pattern onto the aforementioned Invar 36 alloy sheet, ultimately completing the fabrication of the metal FMM template.

[0005] However, in the production and subsequent processing (such as defect inspection and repair) of FMM photomasks, the handling and manipulation of the glass master mask has become a significant technical bottleneck and a source of safety hazards. Specifically, the main problems are as follows:

[0006] 1. Substrate fragility: To meet the requirements of high-precision pattern transfer, these glass master plates typically have a large area but an extremely thin thickness (e.g., only 5 mm). Compared to conventional glass substrates or the metal FMM itself used in the final application, this "large and thin" structure significantly reduces its mechanical strength and makes it extremely vulnerable to bending and impact.

[0007] 2. High handling risk: Whether using automated equipment such as Automated Guided Vehicles (AGVs) for picking and handling, or having operators manually lift, place, or position the glass substrate, it faces an extremely high risk of damage. Any minor stress concentration, uneven localized force, or slight collision during operation can easily lead to irreparable cracks or even complete breakage of the glass substrate.

[0008] 3. Difficulty in controlling deformation: Throughout the entire process (including placement, fixing, and movement on the inspection / repair machine), the master plate is prone to slight elastic or even plastic deformation under its own weight or external clamping force. This deformation directly affects the geometric accuracy of the pattern on the master plate, which in turn transmits the error to subsequent FMM products, ultimately impairing the accuracy of the vapor-deposited pattern.

[0009] In summary, the glass master plates used in the existing technology for manufacturing high-precision FMM photomasks are prone to deformation and damage during handling and operation in the manufacturing, inspection and repair processes due to their inherent thin and large-size structural characteristics. Therefore, there is an urgent need to provide a safer, more reliable structure that can effectively prevent substrate damage and deformation. Utility Model Content

[0010] The purpose of this invention is to provide an FMM-type mask clamping device to solve the problem that the master mask is prone to deformation and damage during operation in the prior art.

[0011] This utility model is achieved through the following technical solution:

[0012] An FMM-type mask clamping device includes a positioning frame and a locking structure. The positioning frame is provided with an open slot adapted to the master plate of the FMM-type mask. Multiple locking structures are provided and spaced apart along the outline of the positioning frame.

[0013] The locking structure includes a clamping block and a locking member. The clamping block is disposed on the positioning frame, and the locking member is adjustablely connected to the clamping block. The clamping block is provided with a clearance groove so that an adjustable gap is formed between the locking member and the positioning frame.

[0014] Alternatively, one of the positioning frame and the clamping block is provided with a strip groove, and the other of the positioning frame and the clamping block is provided with a positioning hole adapted to the strip groove. A positioning bolt is inserted into the strip groove and the positioning hole, and a nut is provided on the positioning bolt. When the nut is loosened, the clamping block moves relative to the positioning frame to move closer to or further away from the master plate.

[0015] Alternatively, the inner side of the positioning frame is provided with a recessed groove.

[0016] Alternatively, the FMM-type mask clamping device may further include multiple adjustment knobs, and the positioning frame is provided with threaded holes that are adapted to the adjustment knobs, the threaded holes being evenly spaced along the profile direction of the slot;

[0017] The adjustment knob is located on the opposite side of the bracket and is set in a threaded hole. When the adjustment knob is turned, the end face of the adjustment knob can press against the mother plate.

[0018] Alternatively, the end face of the adjustment knob may be formed as a smooth plane.

[0019] Alternatively, the locking element is configured as a locking knob threadedly connected to the clamping block, and the end face of the locking knob facing the adjustment gap is formed as a plane.

[0020] Alternatively, the positioning frame may be provided with a retraction groove for avoiding the hand.

[0021] Alternatively, the retraction groove is offset relative to the locking structure.

[0022] Alternatively, at least two pairs of the retraction grooves are provided and are located on the long side of the positioning frame.

[0023] Alternatively, the positioning frame may have a Teflon coating; the positioning frame may be made of a high-strength alloy material.

[0024] The advantages of this utility model compared to the prior art are as follows:

[0025] During clamping, the operator places the mother plate horizontally within the open slot of the positioning frame, relying on the slot structure for initial positioning, with the bottom surface of the mother plate completely against the support surface of the positioning frame. The locking elements (such as bolts) on each clamping block are rotated, causing their ends to move towards the edge of the mother plate. After the locking elements contact the mother plate, they continue to rotate, pushing the clamping blocks to produce elastic deformation, creating a counterforce between the locking elements and the positioning frame. A preload is continuously applied until the edge of the mother plate is stably clamped between the locking elements and the positioning frame, ensuring the substrate remains stable on the positioning frame without wobbling during movement. The positioning frame is then lifted by the clamping device, and the mother plate is transferred and operated on the machine under the protection of distributed locking force and bottom support, without direct contact with the mother plate itself throughout the entire process.

[0026] With the above technical solution, operators only need to manipulate the positioning frame during operation, eliminating contact between hands / AGV and the master mask. The positioning frame provides continuous bottom support, counteracting the sagging of the master mask due to its own weight (especially for 5mm ultra-thin glass). The combined effect of distributed locking force and clearance grooves minimizes pressure on the edges of the master mask, preventing damage. This non-contact clamping method also avoids wiping and fingerprint contamination, maintaining the photomask's light transmittance. Therefore, it solves the problems of easy damage during manual handling and deformation of the thin glass master mask during machine operation in the prior art. Attached Figure Description

[0027] To more clearly illustrate the technical solutions of the exemplary embodiments of this utility model, the drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of this utility model and should not be considered as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort. In the drawings:

[0028] Figure 1 A schematic diagram of the structure of the FMM-type mask clamping device provided by this utility model in one embodiment;

[0029] Figure 2 for Figure 1 A magnified structural diagram of part A in the middle.

[0030] Figure 3 This is a partial structural diagram of the FMM-type mask clamping device provided by this utility model when it is clamped onto the master plate.

[0031] Figure 4 A cross-sectional view of the FMM-type mask clamping device provided by this utility model when it is clamped onto the master plate;

[0032] Figure 5 A three-dimensional structural schematic diagram of the FMM-type mask clamping device provided by this utility model in one embodiment.

[0033] The markings and corresponding component names in the attached diagram are as follows: 1-positioning frame, 11-slot, 12-threaded hole, 13-return groove, 2-clamping block, 3-locking component, 4-avoidance groove, 51-strip groove, 52-positioning bolt, 6-adjustment knob, 7-master plate. Detailed Implementation

[0034] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be noted that while the description of these embodiments is intended to aid in understanding the present invention, it does not constitute a limitation thereof. The specific structural and functional details disclosed herein are only for describing exemplary embodiments of the present invention. However, the present invention may be embodied in many alternative forms and should not be construed as being limited to the embodiments described herein.

[0035] According to a first aspect of this disclosure, an FMM-type mask clamping device is provided. Figures 1 to 5 The specific implementation method is shown. The structure and working principle of the FMM-type mask clamping device are described below using a glass substrate (i.e., the master plate referred to below) as an example.

[0036] See Figures 1 to 5 As shown, the FMM-type mask clamping device includes a positioning frame 1 and a locking structure. The positioning frame 1 is provided with an open slot that is adapted to the master plate 7 of the FMM-type mask. Multiple locking structures are provided and are spaced apart along the outline of the positioning frame 1. The locking structure includes a clamping block 2 and a locking member 3. The clamping block 2 is disposed on the positioning frame 1, and the locking member 3 is adjustablely connected to the clamping block 2. The clamping block 2 is provided with an clearance groove 4 so that an adjustable gap is formed between the locking member 3 and the positioning frame 1.

[0037] The master plate 7 (glass substrate) and the positioning frame 1 can be positioned through surface-to-surface contact, which helps to distribute the gravitational load and effectively suppresses deformation of the master plate. Multiple locking structures are distributed at intervals along the contour of the positioning frame 1. The adjustable locking element 3 applies uniform pressure to the edge of the master plate 7, forming multi-point fixation and avoiding stress concentration. At the same time, the adjustment gap formed by the clearance groove 4 allows the locking element 3 to move slightly in the vertical direction, which can accommodate the thickness tolerance and surface flatness fluctuations of the master plate 7. This allows the locking element 3 to provide pressure perpendicular to the positioning frame 1 to the master plate 7 when it moves, which helps to make the master plate 7 fit more tightly against the positioning frame 1.

[0038] During clamping, the operator places the mother plate 7 horizontally in the open slot of the positioning frame 1, achieving initial alignment using the slot structure, with the bottom surface of the mother plate 7 completely against the support surface of the positioning frame 1. The locking elements 3 (such as bolts) on each clamping block 2 are rotated, causing their ends to move towards the edge of the mother plate 7. After contacting the mother plate 7, the locking elements 3 continue to rotate, pushing the clamping blocks 2 to undergo elastic deformation, creating a counterforce between the locking elements 3 and the positioning frame 1. A pre-tightening force is continuously applied until the edge of the mother plate 7 is stably clamped between the locking elements 3 and the positioning frame 1, ensuring the substrate remains stable on the positioning frame 1 without wobbling during movement. The positioning frame 1 is lifted by the clamping device, and the mother plate 7 is transferred and operated on the machine under the protection of distributed locking force and bottom support, without directly contacting the body of the mother plate 7 throughout the process.

[0039] Through the above technical solution, operators only need to operate the positioning frame 1 during operation, thus isolating the operator's hand / AGV from contact with the master plate 7. The positioning frame 1 provides continuous bottom support, counteracting the sagging of the master plate 7 due to its own weight (especially for 5mm ultra-thin glass). The combined effect of the distributed locking force and the clearance groove 4 reduces the pressure on the edges of the master plate 7, preventing damage. This non-contact clamping method also avoids wiping and fingerprint contamination, maintaining the photomask's light transmittance. Therefore, the problems of easy damage during manual handling and deformation during machine operation of thin glass master plates 7 in the prior art are solved.

[0040] It should be noted that the directional terms used, such as "inner" and "outer," refer to "inner" and "outer" relative to the outline of the component, and are directed towards the device (which can be combined with...). Figure 1 (For clarification) The direction inside is "inside," and vice versa. Furthermore, it should be noted that terms such as "first" and "second" are used to distinguish one element from another and do not indicate sequence or importance. Moreover, in the following descriptions with accompanying drawings, the same reference numerals in different drawings represent the same element.

[0041] In one embodiment provided in this disclosure, one of the positioning frame 1 and the clamping block 2 is provided with a strip groove 51, and the other of the positioning frame 1 and the clamping block 2 is provided with a positioning hole adapted to the strip groove 51. The positioning bolt 52 is inserted into the strip groove 51 and the positioning hole, and the positioning bolt 52 is provided with a nut. When the nut is loosened, the clamping block 2 moves relative to the positioning frame 1 to move closer to or further away from the mother plate 7.

[0042] When the nut is loosened, the locking of the positioning frame 1 or the clamping block 2 can be released, allowing the clamping block 2 to slide relative to the strip groove 51. The positioning bolt 52 then moves within the strip groove 51, limiting the direction and range of movement. This allows the clamping block 2 to move closer to or further away from the edge of the mother plate 7. After aligning the position, the nut is tightened again to fix the position. This allows for more space, not only preventing any impact on the mother plate 7 but also better supporting the mother plate 7.

[0043] In this disclosure, see Figure 2 and Figure 3 As shown, the strip groove is set on the clamping block, while the positioning bolt is set on the positioning frame. This not only facilitates assembly, but also makes it easier to push the clamping block to move smoothly.

[0044] In one embodiment, the inner side of the positioning frame 1 is provided with a recessed groove 11, so that the mother plate 7 is completely fitted and embedded in the groove 11, thereby realizing the rapid positioning of the mother plate 7 and also facilitating the accurate action of the locking member 3 on the mother plate 7.

[0045] In one exemplary embodiment provided in this disclosure, the FMM-type mask clamping device further includes a plurality of adjusting knobs 6. The positioning frame 1 is provided with threaded holes 12 adapted to the adjusting knobs 6, and the threaded holes 12 are evenly spaced along the profile direction of the support groove 11. The adjusting knobs 6 are located on the side opposite to the support groove 11 and are disposed in the threaded holes 12. When the adjusting knobs 6 are turned, the end face of the adjusting knobs 6 can press against the master mask 7.

[0046] By adjusting the threaded structure of knob 6, it can be moved slowly and evenly towards the mother plate 7, thereby achieving opposing pressure (clamping) with locking element 3 and completing bidirectional fixation of the mother plate 7. This adjusting knob 6 has a simple structure and is easy to operate. Furthermore, based on its threaded engagement structure, it prevents rapid movement and provides resistance when the knob is fully pressed into place, resulting in a pushing sensation in the hand. This allows the operator to stop the pushing action promptly, thus providing a certain degree of protection for the mother plate 7.

[0047] Specifically, the end face of the adjustment knob 6 is formed as a smooth plane, which allows the plane to fit against the master plate 7. This surface-to-surface contact method, compared to point-to-surface contact, can largely prevent stress concentration and avoid deformation of the master plate 7.

[0048] Furthermore, a rubber pad is provided on the plane. Based on the flexible characteristics of the rubber pad, an elastic transition structure can be established to reduce the force acting on the mother plate 7 during contact and avoid deformation.

[0049] In a specific embodiment of this disclosure, the locking member 3 is configured as a locking knob threadedly connected to the clamping block 2, and the end face of the locking knob facing the adjustment gap is formed as a plane.

[0050] Similarly, based on the threaded engagement structure, the locking knob does not move rapidly during displacement. It provides resistance as soon as it reaches its final position, resulting in a tactile feedback that allows the operator to stop the movement promptly, thus providing a degree of protection for the mother plate 7. This allows the locking knob to move slowly and evenly towards the mother plate 7. The locking knob has a simple structure and is easy to operate.

[0051] In one embodiment provided in this disclosure, the positioning frame 1 is provided with a retraction groove 13 to avoid hand movement, facilitating manual placement of the master template 7. Based on the retraction groove 13, a safe operating space can be created, eliminating the risk of hand interference when manually placing the master template 7.

[0052] Furthermore, the retraction groove 13 is offset relative to the locking structure. This design ensures that the positioning frame 1 has sufficient strength to prevent deformation; at the same time, it also prevents interference between the hand and the clamping block 2, ensuring operational safety.

[0053] Furthermore, the retraction groove 13 is provided with at least two pairs and is located on the long side of the positioning frame 1. This allows at least two workers to work simultaneously with both hands, helping to stabilize the template; at the same time, the multi-point gripping method is also beneficial for achieving multi-point positioning and suppressing the twisting and deformation of thinner templates.

[0054] In this disclosure, the positioning frame 1 is coated with a Teflon coating. Teflon has excellent chemical corrosion resistance, resisting the erosion of many chemicals such as acids, alkalis, and solvents, protecting the positioning frame 1 from corrosion in chemical environments and extending its service life. Simultaneously, this coating also exhibits excellent high-temperature resistance, maintaining stable performance in high-temperature environments and withstanding temperatures up to 260 degrees Celsius. Therefore, it is suitable for positioning frames 1 used in high-temperature working environments, such as those in ovens and hot presses, improving the heat resistance and service life of the equipment. Furthermore, the Teflon coating has an extremely low coefficient of friction, making the coating surface smooth and easy to slide. The Teflon coating surface has good non-stick properties, effectively preventing various substances such as grease and chemicals from adhering to and accumulating on the surface of the positioning frame 1, facilitating cleaning and maintenance.

[0055] In this disclosure, the positioning frame 1 is made of a high-strength alloy material. Through the synergistic strengthening of alloying elements (such as chromium, nickel, molybdenum, vanadium, etc.), the high-strength alloy material maintains high tensile strength (e.g., the tensile strength of 35CrNiMoV alloy ≥1080MPa) while possessing excellent impact toughness. The high-strength alloy positioning frame 1 can withstand greater loads, ensuring its stability under extreme conditions.

[0056] Finally, it should be noted that this utility model is not limited to the above-described optional embodiments, and anyone can derive other various forms of products under the guidance of this utility model. The above specific embodiments should not be construed as limiting the scope of protection of this utility model, which should be determined by the claims, and the description can be used to interpret the claims.

Claims

1. A photomask clamping device for FMM type, characterized in that, It includes a positioning frame and a locking structure. The positioning frame has an open slot that is adapted to the master template of an FMM-type mask. Multiple locking structures are configured and spaced apart along the outline of the positioning frame. The locking structure includes a clamping block and a locking member. The clamping block is disposed on the positioning frame, and the locking member is adjustablely connected to the clamping block. The clamping block is provided with a clearance groove so that an adjustable gap is formed between the locking member and the positioning frame.

2. The FMM-type mask clamping device according to claim 1, characterized in that, One of the positioning frame and the clamping block is provided with a strip groove, and the other of the positioning frame and the clamping block is provided with a positioning hole adapted to the strip groove. The positioning bolt is inserted into the strip groove and the positioning hole, and the positioning bolt is provided with a nut. When the nut is loosened, the clamping block moves relative to the positioning frame to move closer to or further away from the master plate.

3. The FMM-type mask clamping device according to claim 1, characterized in that, The inner side of the positioning frame is provided with a recessed support groove.

4. The FMM-type mask clamping device according to claim 3, characterized in that, The FMM-type mask clamping device also includes multiple adjustment knobs. The positioning frame is provided with threaded holes that are adapted to the adjustment knobs. The threaded holes are evenly spaced along the profile direction of the support groove. The adjustment knob is located on the opposite side of the bracket and is set in a threaded hole. When the adjustment knob is turned, the end face of the adjustment knob can press against the mother plate.

5. The FMM-type mask clamping device according to claim 4, characterized in that, The end face of the adjustment knob is formed into a smooth plane.

6. The FMM-type mask clamping device according to claim 1, characterized in that, The locking element is configured as a locking knob threadedly connected to the clamping block, and the end face of the locking knob facing the adjustment gap is formed as a plane.

7. The FMM-type mask clamping device according to claim 1, characterized in that, The positioning frame is provided with a retraction groove to avoid the hand.

8. The FMM-type mask clamping device according to claim 7, characterized in that, The return groove is offset relative to the locking structure.

9. The FMM-type mask clamping device according to claim 7, characterized in that, The retraction groove is provided in at least two pairs and is located on the long side of the positioning frame.

10. The FMM-type mask clamping device according to claim 1, characterized in that, The positioning frame is coated with Teflon; the positioning frame is made of high-strength alloy material.

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