Positioning device

Abstract

The utility model relates to a kind of positioner, comprising: mounting seat;Visual mechanism is installed on the mounting seat, for shooting the position of product on support surface;Positioning mechanism, including first drive assembly and positioner, the first drive assembly is connected with the mounting seat, the positioner is connected with the first drive assembly;The first drive assembly is used to drive the positioner according to the shooting data of the visual mechanism movement along first direction, second direction and rotate around the first axis extending along third direction, so that the positioner pushes product and moves on support surface, adjusts product to target position;The first direction, the second direction and the third direction intersect each other in pairs.

Description

Technical Field

[0001] This utility model relates to the field of testing and sorting equipment technology, and in particular to a placement device. Background Technology

[0002] With the continuous development of semiconductor manufacturing technology, the requirements for testing are constantly increasing. At the same time, the requirements for placing products (such as chips) into the testing area are also gradually increasing, requiring the placement accuracy to reach the micron level.

[0003] Typically, products are transported to the testing area using a conveying device. Before testing, the product's feeding accuracy is checked. If the feeding accuracy does not meet the testing requirements, the product is picked up and repositioned using the conveying device until the accuracy meets the requirements.

[0004] However, the above method of adjusting the feeding accuracy requires the handling device to pick up the chip, adjust its position, and then reposition it. During the accuracy adjustment process, the handling device cannot return to pick up new products, which affects the overall working efficiency of the machine. Utility Model Content

[0005] Therefore, it is necessary to provide a placement device that can conveniently adjust the feeding accuracy and improve production efficiency, in order to address the problem of low production efficiency caused by traditional methods of adjusting feeding accuracy.

[0006] A placement device, comprising:

[0007] Mounting base;

[0008] The vision mechanism mounted on the mounting base is used to capture the position of the product on the support surface;

[0009] The positioning mechanism includes a first drive assembly and a positioning component, wherein the first drive assembly is connected to the mounting base and the positioning component is connected to the first drive assembly;

[0010] The first driving component is used to drive the positioning component to move along the first direction and the second direction and rotate about the first axis extending along the third direction based on the shooting data of the vision mechanism, so that the positioning component pushes the product to move on the support surface and adjusts the product to the target position.

[0011] The first direction, the second direction, and the third direction intersect each other.

[0012] The aforementioned positioning device, through the cooperation of the vision mechanism and the positioning mechanism, can adjust the product to the target position, ensuring that the product meets the requirements for feeding accuracy. Therefore, compared to existing technologies, the positioning device alone can achieve product position adjustment, eliminating the need for a transport device to pick up the product again for positioning. The transport device can return to pick up new products, allowing product positioning and new product grabbing to occur simultaneously, thus improving work efficiency. Furthermore, during the movement of the positioning component driven by the first drive component, the vision mechanism does not move relative to the mounting base. Compared to the case where the vision mechanism and the positioning component move synchronously, the vision mechanism, remaining relatively stationary with respect to the mounting base, can obtain more accurate imaging data. Combined with the multi-directional movement of the positioning component driven by the first drive component, this further ensures the feeding accuracy of the product.

[0013] In one embodiment, the positioning mechanism further includes a second drive component, which is mounted on the mounting base, and the first drive component is connected to the second drive component;

[0014] The second drive component is used to drive the first drive component and the positioning member to move along the third direction, so that the positioning member moves closer to or away from the product located on the support surface.

[0015] In one embodiment, the first driving component includes a first driving module, a second driving module, and a third driving module that are interconnected.

[0016] The first driving module is used to drive the positioning component to move along the first direction, the second driving module is used to drive the positioning component to move along the second direction, and the third driving module is used to drive the positioning component to rotate around the first axis.

[0017] In one embodiment, the third drive module is connected to the mounting base, the first drive module is connected to the third drive module, the second drive module is connected to the first drive module, and the positioning member is connected to the second drive module.

[0018] In one embodiment, the positioning component is provided with a light-transmitting limiting through hole, and the positioning component is framed outside the product through the limiting through hole;

[0019] The positioning component pushes the product to move on the support surface through the wall of the limiting through hole.

[0020] In one embodiment, the cross-sectional shape of the limiting through hole is square.

[0021] In one embodiment, the vision mechanism and the first driving component are arranged side by side along the first direction;

[0022] The positioning component includes a connecting portion and a positioning portion that are connected to each other. The connecting portion is connected to the first driving component. The positioning portion extends relative to the connecting portion along the first direction to be opposite to the vision mechanism along the third direction, such that at least a portion of the positioning portion is located within the field of view of the vision mechanism.

[0023] In one embodiment, the vision mechanism includes a camera and a lens, the camera being mounted on the mounting base and the lens being connected to the camera;

[0024] and / or

[0025] The positioning device also includes a laser displacement sensor mounted on the mounting base, which is used to detect the degree of warping of the product on the support surface.

[0026] In one embodiment, the positioning device further includes an air blowing mechanism mounted on the mounting base, the air blowing mechanism being used to blow temperature-controlled gas onto the vision mechanism.

[0027] In one embodiment, the mounting base has a receiving cavity in which at least a portion of the vision mechanism is mounted;

[0028] The blowing mechanism is used to blow temperature-controlled gas into the receiving cavity. Attached Figure Description

[0029] Figure 1 This is a structural diagram of a placement device provided in an embodiment of this application;

[0030] Figure 2 for Figure 1 A structural diagram of the placement device shown from another perspective;

[0031] Figure 3 for Figure 1 The diagram shows a structural view of the placement device from another perspective.

[0032] Explanation of reference numerals in the attached figures:

[0033] 100. Positioning device; 10. Mounting base; 11. Receiving cavity; 20. Vision mechanism; 21. Camera; 22. Lens; 30. Positioning mechanism; 31. First drive assembly; 311. First drive module; 312. Second drive module; 313. Third drive module; 32. Positioning component; 321. Connecting part; 322. Positioning part; 323. Limiting through hole; 33. Second drive assembly; 40. Light source; 50. Air blowing mechanism; 60. Laser displacement sensor. Detailed Implementation

[0034] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0035] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0036] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0037] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0038] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0039] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0040] See Figure 1 One embodiment of this application provides a positioning device 100, which includes a mounting base 10, a vision mechanism 20, and a positioning mechanism 30, both of which are mounted on the mounting base 10. Optionally, a product support is provided on a support surface, which serves to support the product. In some specific embodiments, the product is a chip, and the support surface is formed on a probe stage. Of course, in other embodiments, the type of product is not limited, nor is the structure on which the support surface is formed.

[0041] The vision mechanism 20 is used to capture the position of the product on the support surface. See some embodiments. Figure 2 The vision mechanism 20 includes a camera 21 and a lens 22. The camera 21 is mounted on the mounting base 10, and the lens 22 is connected to the camera 21. The cooperation between the camera 21 and the lens 22 can improve the shooting effect of the vision mechanism 20. Of course, in some other embodiments, the structure of the vision mechanism 20 is not limited. For example, the vision mechanism 20 may only include the camera 21.

[0042] Continue reading Figure 1The positioning mechanism 30 includes a first drive assembly 31 and a positioning component 32. The first drive assembly 31 is connected to the mounting base 10, and the positioning component 32 is connected to the first drive assembly 31. The first drive assembly 31 is used to drive the positioning component 32 to rotate along a first direction X, a second direction Y, and about a first axis extending along a third direction Z, based on the shooting data of the vision mechanism 20. This causes the positioning component 32 to push the product on the support surface and adjust the product to the target position. That is, the first drive assembly 31 can not only drive the positioning component 32 to move along the first direction X and the second direction Y, but also drive the positioning component 32 to rotate about the axis extending along the third direction Z. In actual operation, whether the first drive assembly 31 drives the positioning component 32 to rotate along the first direction X, the second direction Y, and about the first axis is determined based on the shooting data of the vision mechanism 20.

[0043] In this configuration, the first direction X, the second direction Y, and the third direction Z intersect each other pairwise. Specifically, the first direction X, the second direction Y, and the third direction Z are perpendicular to each other pairwise. Generally, the supporting surface is parallel to the plane formed by the intersection of the first direction X and the second direction Y, and the product is supported on the supporting surface by gravity. In this case, the third direction Z is parallel to the direction of gravity.

[0044] In the above configuration, the vision mechanism 20 captures the position of the product on the support surface. The first drive component 31 can drive the positioning component 32 to rotate along the first direction X, the second direction Y, and around the first axis according to the capture data of the vision mechanism 20. During the movement (swing) of the positioning component 32 relative to the mounting base 10, it applies a force to the product in contact with it, thereby driving the product to move on the support surface and finally adjusting the product to the target position.

[0045] The positioning device 100 provided in this application embodiment can adjust the product to the target position through the cooperation of the vision mechanism 20 and the positioning mechanism 30, so that the product meets the requirements of feeding accuracy. It can be seen that, compared with the prior art, the product position can be adjusted by the positioning device 100, eliminating the need for the handling device to pick up the product again for positioning. The handling device can return to pick up new products, so that the product positioning and the picking of new products are carried out simultaneously, improving work efficiency. Furthermore, during the movement of the positioning component 32 driven by the first drive component 31, the vision mechanism 20 does not move relative to the mounting base 10. Compared with the case where the vision mechanism 20 and the positioning component 32 move synchronously, the vision mechanism 20, which remains relatively stationary with respect to the mounting base 10, can obtain more accurate imaging data. Combined with the multi-directional movement of the positioning component 32 driven by the first drive component 31, the feeding accuracy of the product is further guaranteed.

[0046] Furthermore, the positioning device 100 also includes a controller. The vision mechanism 20 and the first drive component 31 are both electrically connected to the controller. The controller can acquire the shooting data of the vision mechanism 20 and control the first drive component 31 to work according to the shooting data.

[0047] It is conceivable that in other embodiments, the placement device 100 itself may not include a controller, but the first drive component 31 may be controlled by a controller of a transport system that includes the placement device 100 and the transport device, which is not limited here.

[0048] In some embodiments, the mounting base 10 is composed of multiple mounting plates. It is understood that in other embodiments, the specific structure of the mounting base 10 is not limited, as long as it can enable the installation of the vision mechanism 20 and the positioning mechanism 30.

[0049] In some embodiments, see further reference. Figure 2 The vision mechanism 20 and the first drive assembly 31 are arranged side-by-side along a first direction X. The positioning member 32 includes a connecting portion 321 and a positioning portion 322 connected to each other. The connecting portion 321 is connected to the first drive assembly 31, and the positioning portion 322 extends relative to the connecting portion 321 along the first direction X to face the lens 22 of the vision mechanism 20 along a third direction Z, such that at least a portion of the positioning portion 322 is located within the field of view of the vision mechanism 20. The field of view represents the maximum range that the vision mechanism 20 can observe; a larger field of view results in a larger observation range. During shooting, the product on the support surface needs to be within the field of view of the vision mechanism 20. Since the positioning portion 322 needs to contact the product to push it, at least a portion of the positioning portion 322 needs to be within the field of view of the vision mechanism 20.

[0050] The above setup ensures that the visual mechanism 20 and the positioning mechanism 30 are arranged in a compact manner, while also not affecting the coordinated adjustment of the product position by the visual mechanism 20 and the positioning mechanism 30.

[0051] It is understood that in other embodiments, the vision mechanism 20 and the first driving component 31 may be arranged in other ways, which are not limited here.

[0052] Further reading Figure 3 The positioning device 100 also includes a light source 40, which is mounted on the mounting base 10 and faces the lens 22 along the third direction Z to provide supplementary lighting for the camera 21. Specifically, the light source 40 is located between the vision mechanism 20 and the positioning part 322. Of course, in some other embodiments, the specific positions of the light source 40, the vision mechanism 20, and the positioning part 322 are not limited.

[0053] Continue reading Figure 2 and Figure 3The positioning part 322 is provided with a limiting through hole 323 for light transmission, and the positioning part 322 is framed outside the product through the limiting through hole 323. The positioning part 322 pushes the product to move on the support surface through the wall of the limiting through hole 323. Thus, when it is necessary to adjust the position of the product on the support surface, the positioning part 322 is framed outside the product through the limiting through hole 323. When the first drive assembly 31 drives the positioning member 32 to move, since the product is limited to the limiting through hole 323, the wall of the limiting through hole 323 contacts the product, pushing the product to move on the support surface to adjust the product to the target position.

[0054] Specifically, the cross-sectional shape of the limiting through hole 323 is square, which facilitates the movement of the product on the support surface through the hole walls around the square.

[0055] In some specific embodiments, for ease of adjustment, the product is considered to have been adjusted to the target position when its center is aligned with the center of the vision mechanism 20 and the center of the limiting through hole 323. Of course, in other embodiments, the target position of the product is not limited and is set as needed.

[0056] It should be understood that in some other embodiments, the cross-sectional shape of the limiting through hole 323 is not limited. For example, the cross-sectional shape of the limiting through hole 323 may also be a circle or other irregular shape.

[0057] In other embodiments, the positioning part 322 may omit the limiting through hole 323. For example, the product may be moved on the support surface by pushing the edge of the positioning part 322. This is not limited here.

[0058] In some embodiments, see further reference. Figure 2 The first drive assembly 31 includes a first drive module 311, a second drive module 312, and a third drive module 313 connected to each other. The first drive module 311 drives the positioning component 32 to move along a first direction X, the second drive module 312 drives the positioning component 32 to move along a second direction Y, and the third drive module 313 drives the positioning component 32 to rotate around a first axis. Thus, the first drive module 311, the second drive module 312, and the third drive module 313 cooperate to drive the positioning component 32 to move along the first direction X, the second direction Y, and around the first axis, thereby changing the position of the product on the support surface to ensure positioning accuracy.

[0059] Specifically, the third drive module 313 is connected to the mounting base 10, the first drive module 311 is connected to the third drive module 313, the second drive module 312 is connected to the first drive module 311, and the positioning member 32 is connected to the second drive module 312. Thus, the third drive module 313 can drive the first drive module 311, the second drive module 312, and the positioning member 32 to rotate around a first axis; the first drive module 311 can drive the second drive module 312 and the positioning member 32 to move along a first direction X; and the second drive module 312 can drive the positioning member 32 to move along a second direction Y. Generally, the load (physical weight that can be borne) of the third drive module 313 is greater than the load of the first drive module 311 and the second drive module 312. The third drive module 313 with a large load is first connected to the mounting base 10, and then the first drive module 311 and the second drive module 312 with a small load are installed on the third drive module 313. This simplifies the structural layout of the first drive assembly 31 and improves the stability of the installation of the first drive assembly 31.

[0060] Optionally, the first drive module 311 and the second drive module 312 are linear modules. The third drive module 313 includes a drive component, a transmission component, and a follower component. The positioning component 32 is connected to the follower component. The drive component drives the follower component to rotate around the first axis through the transmission component, thereby causing the positioning component 32 to rotate around the first axis.

[0061] It should be understood that in some other embodiments, the specific structure of the first drive module 311, the second drive module 312 and the third drive module 313 is not limited, as long as they can respectively achieve the purpose of driving the positioning member 32 to move along the first direction X, move in the second direction Y and rotate around the first axis.

[0062] In some embodiments, see further reference. Figure 2 The positioning mechanism 30 also includes a second drive assembly 33, which is mounted on the mounting base 10. The first drive assembly 31 is connected to the second drive assembly 33. In some specific embodiments, a third drive module 313 is connected to the mounting base 10 via the second drive assembly 33. The second drive assembly 33 is used to drive the first drive assembly 31 and the positioning member 32 to move along a third direction Z, so that the positioning member 32 moves closer to or further away from the product located on the support surface.

[0063] In the above configuration, when it is necessary to adjust the position of the product on the support surface, the second drive component 33 drives the first drive component 31 and the positioning component 32 to move towards the product along the third direction (Z), eventually bringing the positioning component 32 into contact with the product. The first drive component 31 then drives the positioning component 32 to move, causing the positioning component 32 to push the product across the support surface. After the product is adjusted to the target position, the second drive component 33 drives the first drive component 31 and the positioning component 32 to move away from the product along the third direction (Z), thus avoiding interference from the positioning component 32 with subsequent operations.

[0064] Specifically, the second drive component 33 can be driven by a motor or a cylinder.

[0065] In some embodiments, see further reference. Figures 1-3 The positioning device 100 also includes an air blowing mechanism 50, which is mounted on the mounting base 10 and is used to blow temperature-controlled gas to the vision mechanism 20.

[0066] When conducting high-temperature tests on the product, the positioning device 100 needs to be in a high-temperature environment. Blowing low-temperature gas onto the vision mechanism 20 via the air blowing mechanism 50 ensures a stable working environment for the vision mechanism 20 and guarantees its accuracy. Similarly, when conducting low-temperature tests on the product, the positioning device 100 needs to be in a low-temperature environment. Blowing high-temperature gas onto the vision mechanism 20 via the air blowing mechanism 50 ensures a stable working environment for the vision mechanism 20 and guarantees its imaging accuracy.

[0067] Optionally, please continue reading Figure 1 The mounting base 10 has a receiving cavity 11, in which at least a portion of the vision mechanism 20 is mounted. The blowing mechanism 50 is used to blow temperature-controlled gas into the receiving cavity 11, thereby ensuring a stable working environment for the vision mechanism 20.

[0068] Continue reading Figure 1 The positioning device 100 also includes a laser displacement sensor 60, which is used to detect the degree of warping of the product on the support surface and determine whether the product quality meets the requirements.

[0069] The placement device 100 provided in this application embodiment has the following beneficial effects:

[0070] 1. The vision mechanism 20 is used to capture the position of the product on the support surface. The first drive component 31 can not only drive the positioning component 32 to move along the first direction X and the second direction Y, but also drive the positioning component 32 to rotate around the first axis extending along the third direction Z. Through the cooperation of the vision mechanism 20 and the positioning mechanism 30, the product can be adjusted to the target position so that the product meets the requirements of feeding accuracy.

[0071] 2. During the movement of the first drive component 31 driving the positioning component 32, the vision mechanism 20 will not move relative to the mounting base 10. Compared with the situation where the vision mechanism 20 and the positioning component 32 move synchronously, the vision mechanism 20, which remains relatively stationary with the mounting base 10, can obtain more accurate shooting data. In addition, the first drive component 31 drives the positioning component 32 to move in multiple directions, so as to further ensure the material feeding accuracy of the product.

[0072] 3. By setting up an air blowing mechanism 50 for blowing air onto the vision mechanism 20, the working environment of the vision mechanism 20 is stabilized, thereby ensuring the shooting accuracy of the vision mechanism 20.

[0073] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0074] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A placement device, characterized in that, include: Mounting base (10); The vision mechanism (20) mounted on the mounting base (10) is used to capture the position of the product on the support surface; The positioning mechanism (30) includes a first drive assembly (31) and a positioning component (32), wherein the first drive assembly (31) is connected to the mounting base (10) and the positioning component (32) is connected to the first drive assembly (31); The first drive component (31) is used to drive the positioning component (32) to move along the first direction (X), the second direction (Y) and rotate about the first axis extending along the third direction (Z) according to the shooting data of the vision mechanism (20), so that the positioning component (32) pushes the product to move on the support surface and adjusts the product to the target position; The first direction (X), the second direction (Y), and the third direction (Z) intersect each other.

2. The placement device according to claim 1, characterized in that, The positioning mechanism (30) further includes a second drive component (33), which is mounted on the mounting base (10), and the first drive component (31) is connected to the second drive component (33). The second drive component (33) is used to drive the first drive component (31) and the positioning member (32) to move along the third direction (Z) so that the positioning member (32) moves closer to or away from the product located on the support surface.

3. The placement device according to claim 1, characterized in that, The first drive component (31) includes a first drive module (311), a second drive module (312), and a third drive module (313) that are interconnected. The first drive module (311) is used to drive the positioning member (32) to move along the first direction (X), the second drive module (312) is used to drive the positioning member (32) to move along the second direction (Y), and the third drive module (313) is used to drive the positioning member (32) to rotate around the first axis.

4. The placement device according to claim 3, characterized in that, The third drive module (313) is connected to the mounting base (10), the first drive module (311) is connected to the third drive module (313), the second drive module (312) is connected to the first drive module (311), and the positioning component (32) is connected to the second drive module (312).

5. The placement device according to claim 1, characterized in that, The placement component (32) is provided with a light-transmitting limiting through hole (323), and the placement component (32) is framed outside the product through the limiting through hole (323); The positioning component (32) pushes the product to move on the support surface through the wall of the limiting through hole (323).

6. The placement device according to claim 5, characterized in that, The cross-sectional shape of the limiting through hole (323) is square.

7. The placement device according to claim 1, characterized in that, The vision mechanism (20) and the first drive component (31) are arranged side by side along the first direction (X); The positioning component (32) includes a connecting portion (321) and a positioning portion (322) connected to each other. The connecting portion (321) is connected to the first driving component (31). The positioning portion (322) extends relative to the connecting portion (321) along the first direction (X) to face the vision mechanism (20) along the third direction (Z), such that at least a portion of the positioning portion (322) is located within the field of view of the vision mechanism (20).

8. The placement device according to claim 1, characterized in that, The vision mechanism (20) includes a camera (21) and a lens (22), the camera (21) being mounted on the mounting base (10) and the lens (22) being connected to the camera (21); and / or The positioning device also includes a laser displacement sensor (60) mounted on the mounting base (10), which is used to detect the degree of warping of the product on the support surface.

9. The placement device according to any one of claims 1-8, characterized in that, The positioning device also includes an air blowing mechanism (50) mounted on the mounting base (10), the air blowing mechanism (50) being used to blow temperature-controlled gas to the vision mechanism (20).

10. The placement device according to claim 9, characterized in that, The mounting base (10) is provided with a receiving cavity (11), and at least a portion of the vision mechanism (20) is mounted in the receiving cavity (11); The blowing mechanism (50) is used to blow temperature-controlled gas into the receiving cavity (11).

Images