Single crystal furnace hot field furnace bottom fixed felt

Abstract

The utility model discloses a single crystal furnace heat field furnace bottom fixed felt, including fixed felt body, the recess is passed through and is equipped with exhaust hole, electrode through -hole and the through -hole of supporting rod in the recess, and the recess top surface is evenly spaced and is equipped with a plurality of guide grooves, and the recess lateral wall is equipped with a plurality of and communicates with the guide groove one -to -one and limit slot, the recess is detachably connected with the heat preservation bucket, and the heat preservation bucket outer wall bottom end is fixedly connected with a plurality of and the guide groove, limit slot adaptation joint's joint block, the fixed felt body top surface is provided with fixed component, and fixed component is used for the limit fixed joint block. The utility model can improve the connection strength with the heat preservation bucket, and the accurate positioning of heat preservation bucket in multiple directions improves the reliability and stability of heat preservation bucket installation, guarantees the stability of single crystal furnace heat field system, and provides more stable heat environment for single crystal silicon growth.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace technology, and in particular to a furnace bottom solid felt for the hot zone of a single crystal furnace. Background Technology

[0002] The single-crystal furnace is a core piece of equipment used in the production of single-crystal silicon, widely applied in the photovoltaic and semiconductor industries. The furnace bottom mat in the hot zone of the single-crystal furnace is a crucial component of the furnace's thermal system. Installed at the bottom of the furnace, its primary function is to reduce heat dissipation. Through a special structural design and material properties, it converts heat transfer between the furnace bottom insulation system into heat radiation, effectively increasing the furnace bottom's insulation performance and thus providing a stable thermal environment for the growth of single-crystal silicon within the furnace.

[0003] Utility model patent CN222349177U discloses a novel solid felt bottom structure for a single crystal furnace hot zone. The solid felt body has vent holes on its surface, an insulation tank at its bottom, a docking groove, and a locking assembly. By creating a docking groove at the bottom of the solid felt and a locking slot on the inner wall of the groove, the locking slot and locking block are fitted and locked together. Subsequently, the locking block remains connected to the locking slot under the action of a spring baffle.

[0004] The aforementioned utility model patent uses the force of a spring baffle to tightly fit the locking block and the docking slot, which can provide a certain degree of fixation for the insulation container. However, under long-term high temperature, vibration, and other complex operating conditions, the spring baffle is prone to fatigue and failure, resulting in low stability of the insulation container. Furthermore, because the locking block cannot be fixed vertically, the insulation container is prone to vertical displacement during the operation of the single crystal furnace, thus affecting its stability.

[0005] Therefore, it is necessary to develop a furnace bottom solid felt for the hot zone of a single crystal furnace to address the above-mentioned defects. Utility Model Content

[0006] The purpose of this invention is to provide a furnace bottom fixing felt for the hot zone of a single crystal furnace, which can improve the connection strength with the insulation barrel, accurately position the insulation barrel in multiple directions, improve the reliability and stability of the insulation barrel installation, ensure the stability of the hot zone system of the single crystal furnace, and provide a more stable thermal environment for the growth of single crystal silicon.

[0007] To solve the above-mentioned technical problems, the present invention adopts the following technical solution:

[0008] This utility model discloses a furnace bottom fixing felt for a single crystal furnace hot zone, comprising a fixing felt body. A groove is formed on the top surface of the fixing felt body, and an exhaust hole, an electrode through hole, and a support rod through hole are formed through the groove. Several guide grooves are evenly spaced around the circumference of the top surface of the fixing felt body, and several limiting grooves corresponding to and communicating with the guide grooves are formed on the sidewall of the groove. A heat preservation barrel is detachably connected to the groove, and several locking blocks that are adapted to and engage with the guide grooves and limiting grooves are fixedly connected to the bottom of the outer wall of the heat preservation barrel. A fixing component is provided on the top surface of the fixing felt body, and the fixing component is used to limit and fix the locking blocks.

[0009] Furthermore, the fixing component includes a limiting ring, which is sleeved on the outer wall of the insulation barrel. A plurality of plug-in blocks corresponding to and adapted to the guide groove are fixedly connected to the bottom surface of the limiting ring, and the plug-in blocks are plugged into the guide groove.

[0010] Furthermore, a number of vertically arranged limiting rods are fixedly connected to the circumference of the felt body, and a number of limiting holes corresponding to and adapted to the limiting rods are opened on the bottom surface of the limiting ring. A threaded section is opened at the top of the limiting rod, and a limiting nut is threadedly connected to the threaded section.

[0011] Furthermore, several positioning blocks are provided on the circumference of the bottom surface of the solid felt body, and the solid felt is engaged with the bottom of the single crystal furnace through the positioning blocks.

[0012] Furthermore, the bottom surface of the solid felt body is provided with several sliding grooves that are adapted to the positioning block, the positioning block is slidably connected in the sliding groove, and the positioning block is provided with an adjustment component.

[0013] Furthermore, the adjusting component includes a bolt that extends through the positioning block along its length and is rotatably connected to the positioning block. The sidewall of the slide groove has a threaded hole that matches the bolt, and the bolt is threadedly connected to the threaded hole.

[0014] Furthermore, the bolt is a countersunk bolt, and a countersunk hole is provided on the side wall of the positioning block, and a retaining ring is fixedly sleeved on the bolt.

[0015] Compared with the prior art, the beneficial technical effects of this utility model are as follows:

[0016] This invention utilizes a locking block on the insulation container and a guide groove and a limiting groove on the felt body. During installation, the locking block is inserted into the guide groove and slid downwards to the bottom. The insulation container is then rotated, causing the locking block to rotate and embed into the limiting groove, thus limiting and fixing the locking block vertically to prevent the insulation container from moving up and down. Then, a fixing component limits the horizontal position of the locking block, preventing the insulation container from rotating horizontally. This achieves precise positioning of the insulation container in multiple directions, improving the reliability and stability of the insulation container installation, ensuring the stability of the single crystal furnace thermal field system, and providing a more stable thermal environment for single crystal silicon growth. Attached Figure Description

[0017] The present invention will be further described below with reference to the accompanying drawings.

[0018] Figure 1 This is a schematic diagram of the three-dimensional structure of the furnace bottom solid felt in the hot zone of the single crystal furnace of this utility model;

[0019] Figure 2 This is an exploded view of the furnace bottom solid felt in the hot zone of the single crystal furnace of this utility model;

[0020] Figure 3 This is a three-dimensional structural diagram of the felt body of this utility model;

[0021] Figure 4 This is a three-dimensional structural diagram of the felt body from another perspective, which is a practical information.

[0022] Figure 5 This is a three-dimensional structural diagram of the adjustment component of this utility model.

[0023] Explanation of reference numerals in the attached drawings: 1. Felt body; 2. Groove; 3. Vent hole; 4. Electrode through hole; 5. Support rod through hole; 6. Guide groove; 7. Limiting groove; 8. Insulation bucket; 9. Snap-fit ​​block; 10. Fixing component; 1001. Limiting ring; 1002. Insertion block; 1003. Limiting rod; 1004. Limiting hole; 1005. Threaded section; 1006. Limiting nut; 11. Positioning block; 12. Slide groove; 13. Bolt; 14. Threaded hole; 15. Fixing ring. Detailed Implementation

[0024] The core of this utility model is to provide a furnace bottom fixing felt for the hot zone of a single crystal furnace, which can improve the connection strength with the insulation barrel, accurately position the insulation barrel in multiple directions, improve the reliability and stability of the insulation barrel installation, ensure the stability of the hot zone system of the single crystal furnace, and provide a more stable thermal environment for the growth of single crystal silicon.

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present utility model, and not all of them. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0027] In one specific embodiment of this utility model, such as Figures 1-3 As shown, a furnace bottom fixing felt for a single crystal furnace hot zone includes a fixing felt body 1. A groove 2 is formed on the top surface of the fixing felt body 1, and an exhaust hole 3, an electrode through hole 4, and a support rod through hole 5 are formed through the groove 2. Several guide grooves 6 are evenly spaced around the circumference of the top surface of the fixing felt body 1. Several limiting grooves 7, corresponding one-to-one with and connected to the guide grooves 6, are formed on the side wall of the groove 2. A heat preservation barrel 8 is detachably connected to the groove 2. Several locking blocks 9, which are adapted to and engage with the guide grooves 6 and the limiting grooves 7, are fixedly connected to the bottom of the outer wall of the heat preservation barrel 8. A fixing component 10 is provided on the top surface of the fixing felt body 1, which is used to limit and fix the locking blocks 9.

[0028] When installing the insulation bucket 8, align the snap-fit ​​block 9 with the guide groove 6 and insert it. Then rotate the insulation bucket 8 to allow the snap-fit ​​block 9 to slide into the limiting groove 7, achieving initial horizontal fixation of the insulation bucket 8 and preventing vertical displacement. The fixing component 10 further limits and fixes the snap-fit ​​block 9, preventing horizontal rotation of the insulation bucket 8. Compared with traditional structures, this greatly improves the stability of the insulation bucket 8 under complex working conditions.

[0029] In one specific embodiment of this utility model, such as Figure 2 and Figure 3 As shown, the fixing component 10 includes a limiting ring 1001, which is sleeved on the outer wall of the heat preservation barrel 8. Several plug-in blocks 1002, which correspond one-to-one with and are adapted to the guide groove 6, are fixedly connected to the bottom surface of the limiting ring 1001. The plug-in blocks 1002 are plugged into the guide groove 6.

[0030] By inserting the plug 1002 on the limiting ring 1001 into the guide groove 6, the snap block 9 on the insulation bucket 8 can be fixed and limited in the limiting groove 7, thereby restricting the rotation of the insulation bucket 8 in the horizontal direction.

[0031] Specifically, a number of vertically arranged limiting rods 1003 are fixedly connected to the circumference of the felt body 1. A number of limiting holes 1004 corresponding to and adapted to the limiting rods 1003 are opened on the bottom surface of the limiting ring 1001. A threaded section 1005 is opened at the top of the limiting rod 1003, and a limiting nut 1006 is threadedly connected to the threaded section 1005.

[0032] The limiting rod 1003 engages with the limiting hole 1004 to guide and position the installation of the limiting ring 1001. The limiting ring 1001 is securely fixed to the felt body 1 by screwing the limiting nut 1006 onto the threaded section 1005. This prevents the insert block 1002 on the limiting ring 1001 from slipping out of the guide groove 6, which could cause the locking block 9 on the insulation bucket 8 to rotate horizontally, affecting the stability of the insulation bucket 8.

[0033] In one specific embodiment of this utility model, such as Figure 3 and Figure 4 As shown, several positioning blocks 11 are provided on the circumference of the bottom surface of the solid felt body 1, and the solid felt is engaged with the bottom of the single crystal furnace through the positioning blocks 11.

[0034] The positioning block 11 enables the positioning and fixing of the felt body 1 to the bottom of the single crystal furnace. When installing the felt body 1, the positioning block 11 is engaged with the corresponding slot or structure on the bottom of the single crystal furnace to ensure that the felt body 1 is accurately installed at the designated position on the bottom of the furnace.

[0035] Specifically, the bottom surface of the felt body 1 has several grooves 12 adapted to the positioning blocks 11. The positioning blocks 11 are slidably connected to the grooves 12 through dovetail or T-groove structures, ensuring the sliding stability and guidance of the positioning blocks 11 within the grooves 12, while preventing lateral detachment of the positioning blocks 11 during sliding. Adjustment components on the positioning blocks 11 are used to precisely lock the position of the positioning blocks 11 within the grooves 12, thereby meeting the installation requirements of different models of single crystal furnace bottoms and improving the versatility of the felt body 1.

[0036] Specifically, the adjusting assembly adopts a screw drive structure, including a bolt 13. The bolt 13 passes through the positioning block 11 along its axial direction and forms a rotatable connection with the positioning block 11 through a bearing or bushing, reducing the frictional resistance between the bolt 13 and the positioning block 11 when rotating and improving the ease of operation. On the side wall of the slide groove 12, a threaded hole 14 is provided at the position corresponding to the bolt 13. The thread specification of the threaded hole 14 matches that of the bolt 13 to achieve threaded transmission engagement between the two.

[0037] When the position of the positioning block 11 within the slide groove 12 needs adjustment, the operator rotates the bolt 13. Based on the principle of screw drive, the threaded pair of the bolt 13 and the threaded hole 14 generates relative movement, pushing the positioning block 11 to move axially along the bolt 13 within the slide groove 12. Utilizing the self-locking characteristic of the threads of the bolt 13 and the threaded hole 14, the positioning block 11 is firmly fixed within the slide groove 12. Reverse rotation of the bolt 13 moves the positioning block 11 away from the threaded hole 14, achieving position adjustment. By precisely controlling the depth to which the bolt 13 is screwed into the threaded hole 14, accurate adjustment of the position of the positioning block 11 can be achieved, facilitating accurate adjustment by installers according to the model or structure of the single crystal furnace, ensuring accurate installation and stable connection between the felt body 1 and the furnace bottom of the single crystal furnace. To prevent the bolt 13 from jamming due to thermal expansion and other factors in the high-temperature operating environment of the single crystal furnace, a high-temperature resistant anti-jamming agent can be coated on the mating thread surface of the bolt 13 and the threaded hole 14. Meanwhile, a wear-resistant and friction-reducing coating is applied to the contact surface between the positioning block 11 and the slide groove 12 to further improve the reliability and service life of the adjustment component under complex working conditions.

[0038] Specifically, bolt 13 is a countersunk bolt, and a countersunk hole is provided on the side wall of the positioning block 11. A retaining ring 15 is fixedly sleeved on bolt 13.

[0039] By using countersunk bolts and countersunk holes, the head of bolt 13 is recessed into the positioning block 11, preventing the bolt head from protruding and affecting the fit between the felt body 1 and the bottom of the single crystal furnace. The fixing ring 15 limits the position of bolt 13, preventing relative sliding between the positioning block 11 and bolt 13. This ensures the positioning block 11 is firmly fixed within the groove 12, thereby guaranteeing the stability of the connection between the felt body 1 and the bottom of the single crystal furnace.

[0040] The working principle of this utility model is as follows: When installing the furnace bottom fixing felt of the hot zone of the single crystal furnace, firstly, according to the structure of the furnace bottom of the single crystal furnace, the position of the positioning block 11 in the slide groove 12 is adjusted by adjusting the component, and the bolt 13 is turned to make the positioning block 11 slide to the appropriate position. Then, the fixing felt body 1 is placed on the furnace bottom of the single crystal furnace. The positioning of the fixing felt body 1 is completed by the positioning block 11 engaging with the furnace bottom groove or structure.

[0041] Next, insert the snap-fit ​​block 9 of the insulation bucket 8 into the guide groove 6 of the felt body 1, and rotate the insulation bucket 8 to make the snap-fit ​​block 9 slide into the limiting groove 7, thus initially fixing the insulation bucket 8 in the vertical direction. Then, insert the plug-in block 1002 of the limiting ring 1001 into the guide groove 6, and at the same time, insert the limiting hole 1004 into the limiting rod 1003. At this time, the plug-in block 1002 is inserted into the guide groove 6. Finally, fix the limiting ring 1001 onto the felt body 1 by screwing the limiting nut 1006 on the threaded section 1005 of the limiting rod 1003, thus completing the installation of the insulation bucket 8.

[0042] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the apparatus disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the description is relatively simple; relevant parts can be referred to the method section.

[0043] The embodiments described above are merely preferred embodiments of the present utility model and are not intended to limit the scope of the present utility model. Various modifications and improvements made to the technical solutions of the present utility model by those skilled in the art without departing from the spirit of the present utility model should fall within the protection scope defined by the claims of the present utility model.

Claims

1. A furnace bottom fixing felt for the hot zone of a single crystal furnace, characterized in that: The device includes a felt body (1), the top surface of which has a groove (2), and the groove (2) has a vent hole (3), an electrode through hole (4) and a support rod through hole (5) through it; a number of guide grooves (6) are evenly spaced around the circumference of the top surface of the felt body (1), and a number of limiting grooves (7) corresponding to and connected to the guide grooves (6) are provided on the side wall of the groove (2); a heat preservation bucket (8) is detachably connected inside the groove (2), and a number of snap-fit ​​blocks (9) that are adapted to and snap-fit ​​the guide grooves (6) and the limiting grooves (7) are fixedly connected to the bottom of the outer wall of the heat preservation bucket (8); a fixing component (10) is provided on the top surface of the felt body (1), and the fixing component (10) is used to limit and fix the snap-fit ​​blocks (9).

2. The furnace bottom fixing felt for the hot zone of a single crystal furnace according to claim 1, characterized in that: The fixing component (10) includes a limiting ring (1001), which is sleeved on the outer wall of the heat preservation barrel (8). The bottom surface of the limiting ring (1001) is fixedly connected with a plurality of plug-in blocks (1002) that correspond one-to-one with and are adapted to the guide groove (6). The plug-in blocks (1002) are plugged into the guide groove (6).

3. The furnace bottom fixing felt for the hot zone of a single crystal furnace according to claim 2, characterized in that: The felt body (1) is fixedly connected with several vertically arranged limiting rods (1003) around its circumference. The bottom surface of the limiting ring (1001) is provided with several limiting holes (1004) that correspond one-to-one with and are adapted to the limiting rods (1003). The top end of the limiting rod (1003) is provided with a threaded section (1005), and a limiting nut (1006) is threadedly connected to the threaded section (1005).

4. The furnace bottom fixing felt for the hot zone of a single crystal furnace according to claim 1, characterized in that: The solid felt body (1) has several positioning blocks (11) on its bottom circumference, and the solid felt is engaged with the bottom of the single crystal furnace by the positioning blocks (11).

5. The furnace bottom fixing felt for the hot zone of a single crystal furnace according to claim 4, characterized in that: The bottom surface of the solid felt body (1) is provided with a plurality of sliding grooves (12) that are adapted to the positioning block (11). The positioning block (11) is slidably connected in the sliding groove (12). An adjustment component is provided on the positioning block (11).

6. The furnace bottom fixing felt for the hot zone of a single crystal furnace according to claim 5, characterized in that: The adjusting assembly includes a bolt (13) that extends through the positioning block (11) along its length and is rotatably connected to the positioning block (11). The sidewall of the slide (12) is provided with a threaded hole (14) that is adapted to the bolt (13), and the bolt (13) is threadedly connected to the threaded hole (14).

7. The furnace bottom fixing felt for the hot zone of a single crystal furnace according to claim 6, characterized in that: The bolt (13) is a countersunk bolt, and a countersunk hole is provided on the side wall of the positioning block (11). A retaining ring (15) is fixedly sleeved on the bolt (13).

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