A wireless remote double focal length visual monitoring device for a semiconductor crystal growing furnace

Abstract

The utility model is suitable for the technical field of semiconductor crystal growing furnace, provides a wireless remote double focal length visual monitoring device for semiconductor crystal growing furnace, including far -focal visual shell and near -focal visual shell, the front of far -focal visual shell is connected with far -focal industry camera, the front of near -focal visual shell is connected with near -focal industry camera, the bottom of far -focal visual shell is equipped with far -focal mobile device, the bottom of near -focal visual shell is equipped with near -focal mobile device, the end of far -focal mobile device and near -focal mobile device is equipped with flange observation port in common, the inside of far -focal visual shell and near -focal visual shell is equipped with ESP module, one side of ESP module is equipped with camera fixed stake, camera fixed stake is connected with corresponding far -focal industry camera or near -focal industry camera. This scheme adopts double focal length industry camera design, is used for the state monitoring of silicon rod in the stage of drawing crystal, shoulder stage and equal diameter stage respectively, satisfies the visual demand of different production stages.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor crystal growth furnace technology, and in particular relates to a wireless remote dual-focal-length visual monitoring device for semiconductor crystal growth furnaces. Background Technology

[0002] In the production of semiconductor silicon rods, the crystal growth furnace is a critical piece of equipment, and the growth state of the silicon rods inside directly affects product quality. The silicon rod production process is mainly divided into three stages: wafer pulling, shoulder formation, and diameter equalization. The shape and size of the silicon rod change significantly at each stage. Traditional visual monitoring systems for crystal growth furnaces typically use industrial cameras with a single focal length, which cannot simultaneously meet the monitoring needs of different production stages. For example, in the wafer pulling and shoulder formation stages, the silicon rod is relatively small, requiring a telephoto lens to capture details; while in the diameter equalization stage, the silicon rod is relatively large, requiring a close-focus lens to capture the entire scene.

[0003] Although a monocular lens can achieve both near and far focus shooting by cropping and magnifying distant images, this method has obvious drawbacks:

[0004] 1. Poor image quality: The enlarged image has low resolution and blurry details, making it difficult to meet the requirements of high-precision monitoring.

[0005] 2. Limited field of view: A single-lens reflex camera cannot simultaneously meet the shooting needs of both telephoto and close-up shots, requiring frequent adjustments to the lens position or focal length, which is complex and inefficient.

[0006] 3. Insufficient real-time performance: Screenshotting and zooming increase image processing time, affecting the real-time monitoring effect.

[0007] Furthermore, traditional monitoring systems mostly employ wired connections, resulting in complex wiring that is difficult to adapt to the high-temperature, high-dust industrial environment. They also suffer from insufficient heat dissipation, easily leading to overheating and affecting long-term stable operation. Therefore, a visual monitoring device is needed that can adapt to the monitoring needs of different production stages, possesses wireless remote image transmission capabilities, and has excellent heat dissipation performance to improve the automation level and product quality of semiconductor silicon rod production. Utility Model Content

[0008] The purpose of this invention is to provide a wireless remote dual-focal-length visual monitoring device for semiconductor crystal growth furnaces, so as to solve the problems in the background art.

[0009] To achieve the above objectives, this utility model provides the following technical solution: a wireless remote dual-focal-length visual monitoring device for semiconductor crystal growth furnaces, comprising a telephoto vision housing and a near-focal-length vision housing. A telephoto industrial camera is connected to the front of the telephoto vision housing, and a near-focal-length industrial camera is connected to the front of the near-focal-length vision housing. A telephoto moving device is provided on the bottom surface of the telephoto vision housing, and a near-focal-length moving device is provided on the bottom surface of the near-focal-length vision housing. The ends of the telephoto and near-focal-length moving devices are provided with a flange observation port. An ESP module is provided inside both the telephoto and near-focal-length vision housings. A camera mounting post is provided on one side of the ESP module, and the camera mounting post is connected to the corresponding telephoto or near-focal-length industrial camera.

[0010] Preferably, the telephoto moving device and the near-focus moving device include guide rails, the top surface of which is embedded in a guide rail fixing groove, and the bottom surfaces of the telephoto vision housing and the near-focus vision housing are connected to magnetic swivels, which are engaged with the guide rail fixing grooves.

[0011] Preferably, the bottom surface of the guide rail is provided with a fixing block, and the fixing block is connected to the side wall of the flange observation port by a fixing crank arm.

[0012] Preferably, the top surfaces of both the telephoto and near-focus vision housings are equipped with ESP cooling fans, and ESP fan mounting posts are provided between the ESP cooling fans and the corresponding telephoto or near-focus vision housings.

[0013] Preferably, a camera cooling fan is provided on the back of the ESP module, and a camera fan mounting post is provided between the camera cooling fan and the ESP module.

[0014] Preferably, the end of the telephoto or near-focus industrial camera is provided with a filter.

[0015] This utility model has at least the following beneficial effects:

[0016] (1) This utility model provides a wireless remote dual-focal-length visual monitoring device for semiconductor crystal growth furnaces. It adopts a dual-focal-length industrial camera design and is used for monitoring the status of silicon rods in the crystal pulling, shoulder setting and equal diameter stages, respectively, to meet the visual needs of different production stages.

[0017] (2) This utility model provides a wireless remote dual-focal-length visual monitoring device for semiconductor crystal growth furnaces, which realizes wireless transmission of images and data through the ESP remote module, reduces wiring complexity, and is suitable for industrial environments with high temperature and high dust.

[0018] (3) This utility model provides a wireless remote dual-focal-length visual monitoring device for semiconductor crystal growth furnaces, with cooling fans installed on the back plate of the industrial camera and the top of the device housing to ensure long-term stable operation of the equipment in high-temperature environments.

[0019] (4) This utility model provides a wireless remote dual-focal-length visual monitoring device for semiconductor crystal growth furnaces. Through the design of guide rail fixed curved arm and magnetic sliding plate, the camera angle can be flexibly adjusted to adapt to different observation needs.

[0020] (5) This utility model provides a wireless remote dual-focal-length visual monitoring device for semiconductor crystal growth furnaces. The device provides a user interface for debugging industrial cameras by installing a display screen on the device housing, and supports real-time adjustment of parameters such as resolution, exposure, contrast, grayscale, and shutter speed. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0022] Figure 2 This is a schematic diagram of part of the internal structure of this utility model;

[0023] Figure 3 This is a schematic diagram of the magnetic slider and the guide rail fixing groove of this utility model.

[0024] In the attached diagram, the following are the reference numerals: 1. Long-range vision housing; 2. Short-range vision housing; 3. Long-range moving device; 4. Short-range moving device; 5. Filter; 6. Fixed curved arm; 7. Flange observation port; 8. Long-range industrial camera; 9. Short-range industrial camera; 10. Fixing block; 11. Guide rail fixing groove; 12. ESP cooling fan; 13. ESP fan fixing post; 14. Camera fixing post; 15. ESP module; 16. Camera fan fixing post; 17. Camera cooling fan; 18. Magnetic scribing plate. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present utility model.

[0026] Example

[0027] Please see Figure 1 , Figure 2 and Figure 3This utility model provides a technical solution: a wireless remote dual-focal-length visual monitoring device for semiconductor crystal growth furnaces, comprising a far-focus visual housing 1 and a near-focus visual housing 2. A far-focus industrial camera 8 is connected to the front of the far-focus visual housing 1, specifically, the far-focus industrial camera 8 is fixedly connected to the far-focus visual housing 1. A near-focus industrial camera 9 is connected to the front of the near-focus visual housing 2, specifically, the near-focus industrial camera 9 is fixedly connected to the near-focus visual housing 2. A far-focus moving device 3 is provided on the bottom surface of the far-focus visual housing 1, and a near-focus moving device 4 is provided on the bottom surface of the near-focus visual housing 2. The ends of the far-focus moving device 3 and the near-focus moving device 4 share a flange observation port 7. Specifically, the flange observation port 7 serves as a connection between the device and... The connection interface of the crystal growth furnace is used to observe the growth status of the silicon rod inside the furnace. Both the far-focus vision housing 1 and the near-focus vision housing 2 are equipped with ESP modules 15. Specifically, the ESP module 15 is connected to a display screen, which is installed on the side wall of the far-focus vision housing 1 and the near-focus vision housing 2. The display screen provides a user interface for debugging the industrial camera and supports real-time adjustment of image parameters. A camera mounting post 14 is provided on one side of the ESP module 15. Specifically, the camera mounting post 14 is fixedly connected to the ESP module 15 and is connected to the corresponding far-focus industrial camera 8 or near-focus industrial camera 9.

[0028] In this embodiment, the dual-focal-length design adapts to the monitoring needs of different production stages, improves monitoring accuracy and comprehensiveness, and avoids problems such as poor image quality, limited field of view, and insufficient real-time performance caused by magnification of images captured by a monocular lens.

[0029] Furthermore, the telephoto moving device 3 and the near-focus moving device 4 include guide rails, with the top surface of the guide rails embedded in guide rail fixing grooves 11. Specifically, the guide rail fixing grooves 11 are fixedly connected to the guide rails. The bottom surfaces of the telephoto vision housing 1 and the near-focus vision housing 2 are connected to magnetic swivels 18. Specifically, the magnetic swivels 18 are fixedly connected to the corresponding telephoto vision housing 1 or near-focus vision housing 2, and the magnetic swivels 18 are engaged with the guide rail fixing grooves 11. Specifically, the magnetic swivels 18 are slidably connected to the guide rail fixing grooves 11.

[0030] In this embodiment, the position of the telephoto industrial camera 8 or the near-focus industrial camera 9 is adjusted by the cooperation of the magnetic swivel 18 and the guide rail.

[0031] Furthermore, a fixing block 10 is provided on the bottom surface of the guide rail. Specifically, the fixing block 10 is fixedly connected to the guide rail, and a fixing crank arm 6 is connected to the side wall of the flange observation port 7. Specifically, the fixing crank arm 6 is fixedly connected to both the fixing block 10 and the side wall of the flange observation port 7.

[0032] In this embodiment, the flange observation port 7 is fixed by the cooperation of the fixing block 10 and the fixing crank arm 6.

[0033] Furthermore, both the top surfaces of the telephoto vision housing 1 and the near-focus vision housing 2 are equipped with ESP cooling fans 12, and ESP fan mounting posts 13 are provided between the ESP cooling fans 12 and the corresponding telephoto vision housing 1 or near-focus vision housing 2. Specifically, the ESP fan mounting posts 13 are fixedly connected to the ESP cooling fans 12 and the corresponding telephoto vision housing 1 or near-focus vision housing 2.

[0034] In this embodiment, the ESP cooling fan 12 is fixed by the ESP fan mounting post 13.

[0035] Furthermore, a camera cooling fan 17 is provided on the back of the ESP module 15, and a camera fan mounting post 16 is provided between the camera cooling fan 17 and the ESP module 15. Specifically, the camera fan mounting post 16 is fixedly connected to the camera cooling fan 17 and the ESP module 15.

[0036] In this embodiment, the ESP module 15 is fixed by the camera fan mounting post 16.

[0037] Furthermore, the end of the telephoto industrial camera 8 or the near-focus industrial camera 9 is provided with a filter 5. Specifically, the filter 5 is fixedly connected to the telephoto industrial camera 8 or the near-focus industrial camera 9.

[0038] In this embodiment, a filter 5 is provided for light filtering.

[0039] This application employs a dual-focal-length industrial camera: including a telephoto lens camera (50mm) and a close-focus lens camera (16mm), used for monitoring the status of silicon rods at different production stages; and adopts an ESP remote module, integrated into the industrial camera, to realize wireless transmission of images and data and communication with a remote centralized control system.

[0040] Working principle and usage process of this utility model:

[0041] ① During the crystal pulling and shoulder formation stages, a telephoto lens camera (50mm) is used to capture the detailed state of the silicon rod, ensuring high-precision monitoring in the early stages of silicon rod growth.

[0042] ② During the constant diameter stage, a close-focus lens camera (16mm) is used to capture panoramic images of the silicon rod to ensure comprehensive monitoring during the later stages of silicon rod growth.

[0043] ③ The industrial camera wirelessly transmits images and data to the remote centralized control system via the ESP remote module, enabling remote real-time monitoring.

[0044] ④ The cooling fan runs continuously to ensure the long-term stable operation of the equipment in high-temperature environments.

[0045] ⑤ Users can adjust the image parameters of the industrial camera in real time through the display screen to optimize the monitoring effect.

[0046] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. It will be apparent to those skilled in the art that this utility model is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description. Therefore, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this utility model, and no reference numerals in the claims should be construed as limiting the scope of the claims.

[0047] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A wireless remote dual-focal-length visual monitoring device for semiconductor crystal growth furnaces, characterized in that, The device includes a telephoto vision housing (1) and a near-focus vision housing (2). A telephoto industrial camera (8) is connected to the front of the telephoto vision housing (1), and a near-focus industrial camera (9) is connected to the front of the near-focus vision housing (2). A telephoto moving device (3) is provided on the bottom surface of the telephoto vision housing (1), and a near-focus moving device (4) is provided on the bottom surface of the near-focus vision housing (2). The ends of the telephoto moving device (3) and the near-focus moving device (4) are provided with a flange observation port (7). An ESP module (15) is provided inside both the telephoto vision housing (1) and the near-focus vision housing (2). A camera fixing post (14) is provided on one side of the ESP module (15), and the camera fixing post (14) is connected to the corresponding telephoto industrial camera (8) or near-focus industrial camera (9).

2. The wireless remote dual-focal-length visual monitoring device for semiconductor crystal growth furnaces according to claim 1, characterized in that: The telephoto moving device (3) and the near-focus moving device (4) include guide rails, the top surface of which is embedded in a guide rail fixing groove (11), and the bottom surfaces of the telephoto vision shell (1) and the near-focus vision shell (2) are connected to magnetic swivels (18), which are connected to the guide rail fixing groove (11).

3. The wireless remote dual-focal-length visual monitoring device for semiconductor crystal growth furnaces according to claim 2, characterized in that: The bottom surface of the guide rail is provided with a fixing block (10), and the fixing block (10) is connected to the side wall of the flange observation port (7) with a fixing crank arm (6).

4. The wireless remote dual-focal-length visual monitoring device for semiconductor crystal growth furnaces according to claim 3, characterized in that: The top surfaces of both the telephoto vision housing (1) and the near-focus vision housing (2) are provided with ESP cooling fans (12), and ESP fan fixing posts (13) are provided between the ESP cooling fans (12) and the corresponding telephoto vision housing (1) or near-focus vision housing (2).

5. A wireless remote dual-focal-length visual monitoring device for a semiconductor crystal growth furnace according to claim 4, characterized in that: The ESP module (15) has a camera cooling fan (17) on its back, and a camera fan mounting post (16) is provided between the camera cooling fan (17) and the ESP module (15).

6. A wireless remote dual-focal-length visual monitoring device for a semiconductor crystal growth furnace according to claim 5, characterized in that: The end of the telephoto industrial camera (8) or the near-focus industrial camera (9) is provided with a filter (5).

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