A hemispherical resonator gyroscope and a plate electrode thereof

Abstract

The utility model discloses a kind of hemispherical resonator gyroscopes and flat plate electrodes, flat plate electrode includes quartz sheet, its upper surface is equipped with by the frame pattern with set line width is separated GND film layer and multiple electrode film layers, multiple electrode film layers are arranged in circumferential interval, GND film layer is extended from quartz upper surface edge to surround multiple electrode film layers by inside;Multiple grooves are equipped on the lateral wall surface of quartz sheet, groove extends to the lower surface of quartz sheet and is penetrated, groove includes a ground groove and multiple electrode grooves, multiple electrode grooves and multiple electrode film layers one-to-one correspondence, each electrode film layer extends to the groove wall of corresponding electrode groove by inside, ground groove is located between two adjacent electrode grooves, the region corresponding to GND film layer and ground groove extends to the groove wall layer covering ground groove by inside.The utility model can solve the problem that hemispherical resonator gyroscope assembly reverse welding is difficult, vibration is easy to fall off.

Description

Technical Field

[0001] This utility model relates to the field of inertial navigation technology, specifically to a hemispherical resonant gyroscope and its flat plate electrode. Background Technology

[0002] The hemispherical resonator gyroscope, a high-precision attitude sensor based on the Coriolis effect, features high precision, long lifespan, high reliability, and low power consumption. It is primarily used in aerospace, marine, space exploration, and robotics applications. Its hemispherical resonator is driven to vibrate by electrostatic force through electrodes, and angular velocity is detected by capacitance changes fed back from vibration modes. The base electrode, a key component of the hemispherical resonator, provides the input and output functions for electrical excitation and detection of the resonator. Conventional base electrodes are made of the same quartz material as the resonator, with a metal film electroplated onto the surface through evaporation or magnetron sputtering. This metal film provides electrical signal transmission. Existing technologies transmit electrical signals by welding or gluing the surface metal through a through-hole to electrode pins. This method requires a through-hole to allow the surface metal to transmit signals through the electrode pins. Welding at both ends through the through-hole is limited to the end faces, resulting in a small welding area. Because gyroscopes are affected by the operating environment and generally require vibration resistance testing, the welds often detach with increasing vibration time, causing gyroscope failure. Another technique involves coating both sides and then adjusting the angle of the target material or electrode to coat the side, connecting the front and back sides. Electrode pins are welded to the back side to transmit electrical signals. In this method, the spacing between the electrode pins is generally narrow, making positioning difficult when welding on the back side. During welding, the distance between the electrode pins affects each other, making it difficult for the welding tool to extend into the interior, resulting in discontinuous weld points that are prone to detachment under lateral impact and vibration. Utility Model Content

[0003] To address the problems in the background technology, this utility model proposes a hemispherical resonant gyroscope and its flat plate electrode, which can solve the problems of difficult reverse welding and easy detachment during vibration in hemispherical resonant gyroscope assembly.

[0004] The present invention adopts the following technical solution:

[0005] A hemispherical resonant gyroscope plate electrode includes a quartz plate with a central through hole. The upper surface of the quartz plate is provided with a GND film layer and multiple electrode films. The electrode films and the GND film layer are separated by a frame pattern with a set line width. The multiple electrode films are arranged circumferentially around the central through hole. The GND film layer extends inward from the edge of the upper surface of the quartz plate to surround the multiple electrode films.

[0006] Multiple grooves are formed on the sidewall of the quartz plate, extending downwards to penetrate the lower surface of the quartz plate. Each groove includes a grounding groove and multiple electrode grooves, with each electrode groove corresponding to a specific electrode film layer. Each electrode film layer extends downwards to cover the groove wall of its corresponding electrode groove. The grounding groove is located between two adjacent electrode grooves, and the area of ​​the GND film layer corresponding to the grounding groove extends downwards to cover the groove wall of the grounding groove.

[0007] The lower surface of the quartz plate is provided with a high-pressure film layer, which extends radially inward to reach or near the central through hole, and extends radially outward to connect to the GND film layer.

[0008] Optionally, the electrode film, the GND film, and the high voltage film all include a base film layer and a functional film layer disposed on the base film layer. The base film layer is made of Cr and / or Ti, and the functional film layer is made of Au, Pt, and / or Ag.

[0009] Optionally, the thickness of the base film layer is 10nm-100nm, and the thickness of the first functional film layer is 500nm-1000nm.

[0010] As a general inventive concept, this utility model also provides a hemispherical resonant gyroscope, including a hemispherical resonator, a grounding pin, a high-voltage pin, multiple electrode pins, and the aforementioned flat plate electrode. The inner anchor rod of the hemispherical resonator extends into the central through hole of the flat plate electrode and is fixedly connected to the hole wall. The lip of the hemispherical resonator and the electrode film layer on the surface of the flat plate electrode form a detection or excitation capacitor. The multiple electrode pins correspond one-to-one with multiple electrode grooves. The upper part of the electrode pin extends into the corresponding electrode groove and is fixedly connected to the groove wall. The upper part of the grounding pin extends into the grounding groove and is fixedly connected to the groove wall. The upper part of the high-voltage pin contacts the high-voltage film layer and is fixedly connected to the flat plate electrode.

[0011] Compared with the prior art, the advantages of this utility model are:

[0012] This invention relates to a hemispherical resonant gyroscope with a flat plate electrode. A groove penetrating the lower surface of a quartz plate is created on the side. The electrode film and GND film are introduced into the corresponding groove walls, allowing the pins of the excitation and detection circuits to be embedded and welded into the groove. This facilitates the smooth outward extension of the excitation and detection circuits from the side. Because the pins are embedded on the side, the welding area is large, effectively maintaining post-weld tightness and preventing detachment during vibration testing. Furthermore, welding positioning is convenient, and the welding process is simple and easy to operate, making it suitable for mass production. In addition, the high-voltage film layer is located on the back, ensuring no interference with the excitation and detection circuits. Therefore, this invention effectively improves the problem of unstable welding between the hemispherical resonator and the base electrode in hemispherical resonant gyroscopes. Attached Figure Description

[0013] To facilitate understanding of this invention, it will be described in more detail with reference to the specific embodiments shown in the accompanying drawings. These drawings depict only typical embodiments of this invention and should not be considered as limiting the scope of protection of this invention.

[0014] Figure 1 This is a three-dimensional structural diagram of the flat plate electrode of the hemispherical resonant gyroscope in Embodiment 1 of this utility model.

[0015] Figure 2 This is a top view of the flat plate electrode of the hemispherical resonant gyroscope in Embodiment 1 of this utility model.

[0016] Figure 3 This is a bottom view of the flat plate electrode structure of the hemispherical resonant gyroscope in Embodiment 1 of this utility model.

[0017] Figure 4 This is a schematic diagram of the structure of the quartz plate in Embodiment 1 of this utility model.

[0018] Figure 5 This is a schematic diagram of the mask pattern in Embodiment 1 of this utility model.

[0019] Figure 6 This is a schematic diagram of the mask fixture of Embodiment 1 of this utility model.

[0020] Figure 7 This is a schematic diagram of a photolithographically processed quartz sheet being clamped in a mask fixture according to Embodiment 1 of this utility model.

[0021] Figure 8 A three-dimensional structural diagram of the hemispherical resonant gyroscope of Embodiment 2 of this utility model.

[0022] Figure 9 A cross-sectional structural diagram of the hemispherical resonant gyroscope of Embodiment 2 of this utility model.

[0023] Figure label:

[0024] 1. Quartz plate; 11. Center through hole; 12. Grounding groove; 13. Electrode groove; 2. Electrode film layer; 3. GND film layer; 4. High voltage film layer; 6. Hemispherical resonator; 7. Grounding pin; 8. High voltage pin; 9. Electrode pin; 10. Flat electrode; 5. Mask fixture; 51. Base plate; 52. Through hole; 53. Baffle; 54. Clearance groove; 55. Clamping platform; 56. L-shaped connecting plate; 57. Locking screw. Detailed Implementation

[0025] The embodiments of the present invention are described below with reference to the accompanying drawings, so that those skilled in the art can better understand and implement the present invention. However, the listed embodiments are not intended to limit the present invention. In the absence of conflict, the following embodiments and the technical features in the embodiments can be combined with each other, wherein the same components are indicated by the same reference numerals.

[0026] Example 1:

[0027] like Figures 1-3 As shown, this embodiment provides a hemispherical resonant gyroscope plate electrode, including a quartz plate 1, as... Figure 4 As shown, a central through hole 11 is provided on the quartz plate 1. A GND film layer 3 and multiple electrode film layers 2 are provided on the upper surface of the quartz plate 1. The electrode film layer 2 and the GND film layer 3 are separated by a frame pattern with a set line width. The multiple electrode film layers 2 are arranged circumferentially around the central through hole 11. The GND film layer 3 extends inward from the edge of the upper surface of the quartz plate to surround the multiple electrode film layers 2.

[0028] Multiple grooves are formed on the sidewall of the quartz plate 1, extending downwards to penetrate the lower surface of the quartz plate 1. Each groove includes a grounding groove 12 and multiple electrode grooves 13, with each electrode groove 13 corresponding to a specific electrode film layer 2. Each electrode film layer 2 extends downwards to cover the groove wall of the corresponding electrode groove 13. The grounding groove 12 is located between two adjacent electrode grooves 13. The area of ​​the GND film layer 3 corresponding to the grounding groove 12 extends downwards to cover the groove wall of the grounding groove 12.

[0029] The lower surface of the quartz plate 1 is provided with a high-pressure film layer 4, which extends radially inward to reach or near the central through hole 11, and extends radially outward to connect to the GND film layer 3.

[0030] Therefore, by creating a groove penetrating the lower surface of the quartz plate on the side, and by introducing the electrode film layer 2 and the GND film layer 3 into the corresponding groove walls, the leads of the excitation and detection circuits can be embedded and soldered into the grooves. This allows the excitation and detection circuits to be easily led out from the side. Because the leads are embedded on the side, the soldering area is large, effectively maintaining the tightness after soldering. They will not fall off during vibration resistance tests, and the soldering positioning is convenient. The soldering process is simple and easy to operate, making it suitable for mass production. In addition, the high-voltage film layer is arranged on the back side, so it does not interfere with the excitation and detection circuits. Thus, this invention can effectively improve the problem of unstable assembly and soldering of the hemispherical resonator and the base electrode in a hemispherical resonator gyroscope.

[0031] In this embodiment, the electrode film layer 2, the GND film layer 3, and the high voltage film layer 4 all include a base film layer and a functional film layer disposed on the base film layer. The base film layer is made of Cr and / or Ti, and the functional film layer is made of Au, Pt, and / or Ag.

[0032] In this embodiment, the thickness of the base film layer is 10nm-100nm, and the thickness of the first functional film layer is 500nm-1000nm.

[0033] The method for fabricating the hemispherical resonant gyroscope plate electrode in this embodiment includes:

[0034] Photoresist was sprayed onto the surface of a quartz wafer 1 with a diameter of 20mm-40mm using a spraying method, and then removed from the surface of the quartz wafer except for the mask pattern using photolithography; Figure 5 As shown, the mask pattern includes a central circle and multiple frame patterns. The multiple frame patterns are arranged circumferentially around the central circle, and the outer border of the frame pattern extends outward to the edge of the upper surface of the quartz. The line width of each pattern is 0.5mm-1.5mm.

[0035] like Figure 7 As shown, the photolithographically processed quartz wafer 1, with the pattern facing upwards, is clamped into a mask fixture 5, as follows: Figure 6 As shown, the mask fixture 5 includes a base plate 51 that mates with the quartz sheet 1. The center of the base plate 51 has a through hole 52 corresponding to the GND film layer 3. The edge of the base plate 51 extends upward to form multiple baffles 53. The quartz sheet 1 is fitted into the space enclosed by the base plate 51 and the multiple baffles 53. Rotating the quartz sheet 1 causes the multiple baffles 53 to alternately arrange with the multiple grooves.

[0036] The lower end of the base plate 51 is provided with a connecting part, through which the mask fixture 5 holding the quartz wafer 1 is fixed in the vacuum chamber of the coating equipment. The upper, side, and lower surfaces of the quartz wafer 1 are coated. Ion cleaning is used on both surfaces, and Cr or Ti metal is electroplated as the underlayer using a mirror co-sputtering method, with a film thickness of 10nm-100nm. After the underlayer electroplating is completed, a functional layer of Pt or Au metal is then mirror co-sputtered, with a film thickness of 500nm-1000nm. Finally, the photoresist at the mask pattern is removed to obtain... Figure 1 The flat electrode 10 is shown with a 0.5mm-1.5mm linewidth separating the front electrode pattern.

[0037] After coating, such as Figure 2 The electrode film layer 2 shown on the front extends to Figure 1 Within the electrode groove 13 on the side as shown in the isometric diagram, as... Figure 2 The GND film 3 shown on the front extends to Figure 1 The grounding groove 12 on the side shown in the isometric view, as follows Figure 3 As shown, the high-pressure membrane layer 4 on the back is set independently.

[0038] In this embodiment, the area between two adjacent baffles 53 on the edge of the base plate 51 is radially recessed to form a relief groove 54, so that the bottom of the corresponding groove on the quartz plate 1 is exposed.

[0039] In this embodiment, the connecting part includes a carding platform 55 and a plurality of L-shaped connecting plates 56. The plurality of L-shaped connecting plates 56 are arranged circumferentially around the carding platform 55. One end of the L-shaped connecting plate 56 is fixedly connected to the carding platform 55, and the other end is connected to the base plate 51.

[0040] In this embodiment, the connecting part also includes a locking screw 57. The screw of the locking screw 57 passes through the central through hole 11 of the flat electrode 10 and is threadedly connected to the threaded hole 58 on the mounting plate 55. Its nut abuts against the upper surface of the quartz plate 1 to lock the quartz plate and prevent the quartz plate from falling off when flipped to the back coating.

[0041] Example 2:

[0042] like Figure 8 and Figure 9 As shown, this embodiment provides a hemispherical resonant gyroscope, including a hemispherical resonator 6, a grounding pin 7, a high-voltage pin 8, multiple electrode pins 9, and a flat plate electrode 10 as in Embodiment 1. The inner anchor rod of the hemispherical resonator 6 extends into the central through hole 11 of the flat plate electrode 10 and is fixedly connected to the hole wall of the central through hole 11. The lip of the hemispherical resonator 6 and the electrode film layer 2 on the surface of the flat plate electrode 10 form a detection or excitation capacitor. The multiple electrode pins 9 correspond one-to-one with multiple electrode grooves 13. The upper part of the electrode pin 9 extends into the corresponding electrode groove 13 and is fixedly connected to the groove wall of the electrode groove 13. The upper part of the grounding pin 7 extends into the grounding groove 12 and is fixedly connected to the groove wall of the grounding groove 12. The upper part of the high-voltage pin 8 contacts the high-voltage film layer 4 and is fixedly connected to the flat plate electrode 10.

[0043] The grounding pin 7 and electrode pin 9 are installed and welded to the groove wall corresponding to the side of the flat plate electrode 10. Each pin is installed in an embedded manner. The side welding area is large, which can effectively preserve the tightness after welding. Moreover, the welding method is simple and easy to operate, making it suitable for mass production.

[0044] The high-voltage pin 8 is welded to the edge of the high-voltage film layer 4, and the high-voltage film layer 4 is as close as possible to the side edge of the flat plate electrode 10 to facilitate welding.

[0045] It is evident that this invention can effectively solve the problems of difficult assembly and welding operations and easy detachment of hemispherical resonant gyroscopes, and the manufacturing process is simple, the manufacturing cost is low, and it is suitable for mass production.

[0046] The embodiments described above are merely preferred embodiments of this utility model. The terms "in one embodiment," "in another embodiment," "in yet another embodiment," or "in still another embodiment" used in this specification all refer to one or more of the same or different embodiments according to this disclosure. Ordinary variations and substitutions made by those skilled in the art within the scope of this utility model's technical solution should be included within the protection scope of this utility model.

Claims

1. A planar electrode for a hemispherical resonant gyroscope, characterized in that, The quartz plate (1) has a central through hole (11) and a GND film (3) and multiple electrode films (2) on the upper surface of the quartz plate (1). The electrode films (2) and the GND film (3) are separated by a frame pattern with a set line width. The multiple electrode films (2) are arranged circumferentially around the central through hole (11). The GND film (3) extends inward from the edge of the upper surface of the quartz plate to surround the multiple electrode films (2). Multiple grooves are formed on the sidewall of the quartz plate (1). The grooves extend downward to penetrate the lower surface of the quartz plate (1). The grooves include a grounding groove (12) and multiple electrode grooves (13). The multiple electrode grooves (13) correspond one-to-one with multiple electrode film layers (2). Each electrode film layer (2) extends downward to cover the groove wall of the corresponding electrode groove (13). The grounding groove (12) is located between two adjacent electrode grooves (13). The area of ​​the GND film layer (3) corresponding to the grounding groove (12) extends downward to cover the groove wall of the grounding groove (12). The lower surface of the quartz plate (1) is provided with a high-pressure film layer (4), which extends radially inward to reach or near the central through hole (11) and radially outward to connect to the GND film layer (3).

2. The hemispherical resonant gyroscope plate electrode according to claim 1, characterized in that, The electrode film layer (2), the GND film layer (3) and the high voltage film layer (4) all include a base film layer and a functional film layer disposed on the base film layer. The base film layer is made of Cr and / or Ti, and the functional film layer is made of Au, Pt and / or Ag.

3. The hemispherical resonant gyroscope plate electrode according to claim 2, characterized in that, The thickness of the base film is 10nm-100nm, and the thickness of the first functional film is 500nm-1000nm.

4. A hemispherical resonant gyroscope, comprising a hemispherical resonator (6), a grounding pin (7), a high-voltage pin (8), multiple electrode pins (9), and a flat plate electrode (10) as described in any one of claims 1-3, wherein the inner anchor of the hemispherical resonator (6) extends into the central through hole (11) of the flat plate electrode (10) and is fixedly connected to the hole wall of the central through hole (11), the lip of the hemispherical resonator (6) and the electrode film layer (2) on the surface of the flat plate electrode (10) form a detection or excitation capacitor, the multiple electrode pins (9) correspond one-to-one with multiple electrode grooves (13), the upper part of the electrode pin (9) extends into the corresponding electrode groove (13) and is fixedly connected to the groove wall of the electrode groove (13), the upper part of the grounding pin (7) extends into the grounding groove (12) and is fixedly connected to the groove wall of the grounding groove (12), and the upper part of the high-voltage pin (8) contacts the high-voltage film layer (4) and is fixedly connected to the flat plate electrode (10).

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