Table alignment device

Abstract

A stage alignment apparatus includes a lower stage, a plurality of alignment drivers provided on the lower stage, and an upper stage provided on the plurality of alignment drivers and supported and aligned by the plurality of alignment drivers. At least one of the plurality of alignment drivers includes first and second sliders slidable in directions perpendicular to each other, each of the other alignment drivers of the plurality of alignment drivers includes third and second sliders slidable in directions perpendicular to each other, and a shape of the first slider of the at least one of the plurality of alignment drivers is substantially different from a shape of the third slider of the other alignment drivers of the plurality of alignment drivers.

Description

[0001] Cross-references to related applications

[0002] This application claims priority and benefit to Korean Patent Application No. 10-2024-0052298, filed on April 18, 2024, and Korean Patent Application No. 10-2024-0070830, filed on May 30, 2024, the entire contents of which are incorporated herein by reference. Technical Field

[0003] This disclosure generally relates to a table alignment device and a driving method thereof. Background Technology

[0004] In panel processing, the alignment accuracy of the stages is crucial. Accordingly, there is a need to develop a stage alignment device to reduce tolerances during stage movement and to accurately align the stages.

[0005] The information disclosed above in this related technology section is only intended to enhance the understanding of the background of this disclosure, and therefore may contain information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0006] The embodiments provide a table alignment device with high durability by effectively eliminating deformation caused by vertical loads, and a driving method for the table alignment device.

[0007] According to one aspect of this disclosure, a table alignment device is provided, comprising: a lower table; a plurality of alignment drivers disposed on the lower table; and an upper table disposed on the plurality of alignment drivers and supported and aligned by the plurality of alignment drivers, wherein at least one of the plurality of alignment drivers may include a first slider and a second slider slidable in directions perpendicular to each other, each of the other alignment drivers may include a third slider and a second slider slidable in directions perpendicular to each other, and wherein the shape of the first slider of at least one of the plurality of alignment drivers is different from or substantially different from the shape of the third slider of the other alignment drivers.

[0008] The first slider of at least one alignment driver may include a bending block.

[0009] The bending blocks can be divided into a first bending block group and a second bending block group, each of which may include at least two bending blocks. The first bending block group and the second bending block group may be spaced apart from each other in a first direction. The bending blocks included in each of the first bending block group and the second bending block group may be adjacent to each other in a second direction intersecting the first direction.

[0010] The bending block of the first slider of at least one alignment driver may include an elastic material.

[0011] Each of the bending blocks may include a first region, a second region, a third region, a first bending region, and a second bending region. The second region may face each of the first and third regions at a surface. The first bending region may connect the first and second regions and extend in a bent or substantially bent shape. The second bending region may connect the second and third regions and extend in a bent or substantially bent shape.

[0012] Each of the bending blocks may include a first region, a second region, a third region, a first bending region, and a second bending region. The first region may face each of the second and third regions at two separate surfaces. The first bending region may connect the first and second regions and extends in a bent or substantially bent shape. The second bending region may connect the first and third regions and extends in a bent or substantially bent shape.

[0013] Each of the bending blocks may include a first region, a second region, a third region, a first bending region, a second bending region, a third bending region, and a fourth bending region. The second region may face each of the first and third regions at its surface. The first and second bending regions may overlap each other in a second direction. The third and fourth bending regions may overlap each other in a second direction. The first and second bending regions may be connected between the first and second regions and extend in a bent or substantially bent shape. The third and fourth bending regions may be connected between the second and third regions and extend in a bent or substantially bent shape.

[0014] Multiple alignment drivers may include a first alignment driver, a second alignment driver, a third alignment driver, and a fourth alignment driver.

[0015] Each of the plurality of alignment drives may further include: a first guide block disposed between the lower stage and the first slider or the third slider; a second guide block disposed between the first slider or the third slider and the second slider; a support member disposed on the second slider to connect each of the plurality of alignment drives to the upper stage; a transmission motor for transmitting the first slider or the third slider in one direction; and a ball screw connected between the first slider or the third slider and the transmission motor.

[0016] Ball screws can be cylindrical or substantially cylindrical in shape and extend in one direction.

[0017] The support may include a protrusion disposed on the upper surface of the support. The upper stage may include holes in multiple areas. The protrusion of the support of each of the plurality of alignment drivers may connect to each of the holes in the upper stage to support the upper stage on the plurality of alignment drivers.

[0018] The first guide block can be connected to the lower platform and restricts the sliding direction of the first or third slider. The second guide block can be connected to the first or third slider and restricts the sliding direction of the second slider.

[0019] The first slider of at least one of the alignment drives may include: an upper surface on which a second guide block is disposed; and a lower surface connected to a ball screw to transmit power from a transmission motor.

[0020] The first slider of at least one alignment driver may include: a body connected to a ball screw to transmit power from a transmission motor, the body including a portion having a substantially arched shape; and a bending block connected to the body.

[0021] According to another aspect of this disclosure, a method for driving a stage alignment device is provided, the stage alignment device including alignment drivers and a stage, at least one alignment driver including a first slider and a second slider slidable in mutually perpendicular directions, each of the other alignment drivers including a third slider and a second slider slidable in mutually perpendicular directions, the stage being aligned by the alignment drivers, and the method including moving the stage by moving the first slider or the third slider of each of the alignment drivers; and moving the second slider of each of the alignment drivers according to the movement of the stage, wherein the shape of the first slider of at least one alignment driver is different from or substantially different from the shape of the third slider of the other alignment drivers.

[0022] The first slider of at least one alignment driver may include a bending block.

[0023] The bending blocks can be divided into a first bending block group and a second bending block group, each of the bending block groups may include at least two bending blocks. The first bending block group and the second bending block group may be spaced apart from each other in a first direction. The bending blocks included in each of the first bending block group and the second bending block group may be adjacent to each other in a second direction intersecting the first direction.

[0024] Each of the bending blocks may include a first region, a second region, a third region, a first bending region, and a second bending region. The second region may face each of the first and third regions at a surface. The first bending region may connect the first and second regions and extend in a bent or substantially bent shape. The second bending region may connect the second and third regions and extend in a bent or substantially bent shape.

[0025] Each of the bending blocks may include a first region, a second region, a third region, a first bending region, and a second bending region. The first region may face each of the second and third regions at two surfaces. The first bending region may connect the first and second regions and extends in a bent or substantially bent shape. The second bending region may connect the first and third regions and extends in a bent or substantially bent shape.

[0026] Each of the bending blocks may include a first region, a second region, a third region, a first bending region, a second bending region, a third bending region, and a fourth bending region. The second region may face each of the first and third regions at its surface. The first and second bending regions may overlap each other in a second direction intersecting the first direction. The third and fourth bending regions may overlap each other in the second direction. The first and second bending regions may be connected between the first and second regions and extend in a bent or substantially bent shape. The third and fourth bending regions may be connected between the second and third regions and extend in a bent or substantially bent shape. Attached Figure Description

[0027] The above and other aspects and features of this disclosure will become more apparent from the detailed description of embodiments thereof with reference to the accompanying drawings, in which:

[0028] Figure 1 A schematic perspective view of a table alignment device according to an embodiment is shown.

[0029] Figure 2 For example Figure 1 A schematic perspective view of the alignment drive unit (or component) shown in the figure.

[0030] Figure 3 Example according to one embodiment Figure 2 A detailed schematic perspective view of the components of the alignment drive unit is shown in the figure.

[0031] Figure 4 and Figure 5 For example Figure 3 A schematic perspective view of the third slider and the first slider shown in the figure.

[0032] Figure 6 For example Figure 5 A schematic perspective view of a first embodiment of the bending block of the first slider is shown in the figure.

[0033] Figure 7 For example Figure 5 A schematic perspective view of a second embodiment of the bending block of the first slider shown in the figure.

[0034] Figure 8 For example Figure 5 A schematic perspective view of a third embodiment of the bending block of the first slider shown in the figure.

[0035] Figure 9 For detailed examples Figure 8 The view of the third bend region shown in the image.

[0036] Figure 10 Here is a view of one embodiment of the table alignment device according to an example. Detailed Implementation

[0037] In the following description, embodiments will be described in more detail with reference to the accompanying drawings. The present disclosure will now be described more fully below with reference to the accompanying drawings, in which embodiments are illustrated. However, the present disclosure may be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that the present disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

[0038] In the accompanying drawings, the dimensions, thickness, scale, and dimensions of the components may be enlarged for ease of description and clarity. The same numbers refer to the same components throughout.

[0039] As used herein, the singular forms “a”, “an”, and “the” are intended to include the plural forms as well, unless the context clearly indicates otherwise.

[0040] In the specification and claims, for the purposes of its meaning and interpretation, the term "and / or" is intended to include any combination of the terms "and" and "or". For example, "A and / or B" can be understood as "A, B, or A and B". The terms "and" and "or" can be used to connect or separate meanings and can be understood as equivalent to "and / or".

[0041] In the following description, operation according to this disclosure is described, and descriptions of other components may be omitted so as not to unnecessarily obscure the subject matter of this disclosure. This disclosure is not limited to the embodiments described herein, but may be embodied in various different forms. Rather, the embodiments described herein are provided to thoroughly and completely describe the disclosure to those skilled in the art.

[0042] Throughout the specification, when an element is referred to as "connected" or "coupled" to another element, it may be directly connected or coupled to the other element, or indirectly connected or coupled to the other element through one or more intermediary elements inserted therein. The technical terminology used herein is for illustrative purposes only and is not intended to limit the embodiments. It will be understood that when a component "includes" an element, unless otherwise described to the contrary, it should be understood that the component does not exclude another element, but may further include another element.

[0043] It will be understood that, for the purposes of this disclosure, "at least one of X, Y, and Z" can be interpreted as only X, only Y, only Z, or any combination of two or more X, Y, and Z items (e.g., XYZ, XYY, YZ, ZZ). Similarly, for the purposes of this disclosure, "at least one selected from the group consisting of X, Y, and Z" can be interpreted as only X, only Y, only Z, or any combination of two or more X, Y, and Z items (e.g., XYZ, XYY, YZ, ZZ).

[0044] It will be understood that although the terms “first,” “second,” etc., may be used herein to describe various elements, these elements should not be limited by these terms. These terms are used only to distinguish one element from another. Therefore, the “first” element discussed below may also be referred to as the “second” element without departing from the teachings of this disclosure.

[0045] For ease of description, spatial relative terms, such as “below” and “above”, are used herein to describe the relationship of one element to another, as illustrated in the figures. It will be understood that, in addition to the orientations described herein and depicted in the figures, the spatial relative terms and the illustrated configurations are intended to cover different orientations of the device in use or operation. For example, if the device in the figures is flipped, an element described as “below” or “under” will be oriented as “above” to that element or feature. Thus, the illustrative term “above” can cover both above and below orientations. The device may be oriented in other ways (e.g., rotated 90 degrees or otherwise), and the spatial relative descriptors used herein will be interpreted accordingly.

[0046] The term “overlap” or “overlapped” means that the first object may be on top of, below, or to the side of the second object, or vice versa. Additionally, the term “overlap” may include layer, stack, face to face, extend over, cover or partially cover, or any other suitable term that a person skilled in the art will recognize and understand.

[0047] The terms "face" and "facing" mean that the first element can directly or indirectly oppose the second element. When a third element is interposed between the first and second elements, the first and second elements can be understood as indirectly opposite each other, although they still face each other.

[0048] When an element is described as “non-overlapping” or “non-overlapping” with another element, this may include the elements being spaced apart from each other, offset from each other, or placed on top of each other, or any other suitable terminology that a person skilled in the art would recognize and understand.

[0049] The terms “comprises,” “comprising,” “includes,” and / or “including,” “has,” “have,” and / or “having,” and variations thereof, are used in this specification to indicate the presence of a described feature, integer, step, operation, element, component, and / or group thereof, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof.

[0050] Embodiments of this disclosure are described herein with reference to the schematic diagrams (and intermediate structures) thereof, such that shape variations due to, for example, manufacturing techniques and / or tolerances are contemplated. Therefore, embodiments of this disclosure should not be limited to the shapes of the regions shown, but include shape deviations caused by, for example, manufacturing techniques. The regions shown in the figures are schematic in nature and their shapes do not represent the actual shapes of the regions of the device, and do not limit the scope of this disclosure.

[0051] As used herein, “about” or “approximately” includes stated values ​​and means within an acceptable range of deviation from a particular value, as determined by one of ordinary skill in the art, taking into account the measurements discussed and the errors associated with the measurement of the particular quantity (i.e., limitations of the measurement system). For example, “about” may mean within one or more standard deviations, or within ±30%, 20%, 10%, or 5% of the stated value.

[0052] Unless otherwise defined or implied herein, all terms used herein (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure pertains. It will be further understood that terms, such as those defined in common dictionaries, shall be interpreted as having a meaning consistent with their meaning in the context of the relevant field and shall not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

[0053] Figure 1 A schematic perspective view of a table alignment device according to an embodiment is shown.

[0054] refer to Figure 1 The alignment device 100 may include a lower stage 110, multiple alignment drive units (or drivers or components) 120 and an upper stage 130.

[0055] The lower stage 110 can support multiple alignment drive units 120 disposed on the lower stage 110. The lower stage 110 can have various shapes on the first direction DR1, the second direction DR2 intersecting the first direction DR2, and the third direction DR3 intersecting the first direction DR1 and the second direction DR2. The lower stage 110 is not limited to Figure 1 The shape shown in the image.

[0056] Multiple alignment drive units 120 may be disposed on the lower stage 110. Each of the multiple alignment drive units 120 may be fixedly coupled (or connected) to a specific or constant region of the lower stage 110. For example, each of the multiple alignment drive units 120 may be fixedly coupled near each corner of the lower stage 110.

[0057] The plurality of alignment drive units 120 may include a first alignment drive unit 121, a second alignment drive unit 122, a third alignment drive unit 123, and a fourth alignment drive unit 124. Each of the first alignment drive units 121 to the fourth alignment drive unit 124 may be fixedly connected near each corner of the lower stage 110. The second alignment drive unit 122 may be configured to be spaced apart from the first alignment drive unit 121 in a second direction DR2. The third alignment drive unit 123 may be configured to be spaced apart from the first alignment drive unit 121 in the opposite direction to the first direction DR1. The fourth alignment drive unit 124 may be configured to be spaced apart from the first alignment drive unit 121 in a diagonal direction.

[0058] Multiple alignment drive units 120 can support a platform 130 disposed on the multiple alignment drive units 120. Moreover, the multiple alignment drive units 120 can align the platform 130 (or adjust the position of the platform 130). This will be described in detail below.

[0059] The upper platform 130 can be mounted on multiple alignment drive units 120. The upper platform 130 can be supported by multiple alignment drive units 120. The upper platform 130 can have various shapes on the first direction DR1, the second direction DR2 intersecting the first direction DR2, and the third direction DR3 intersecting the first direction DR1 and the second direction DR2. The upper platform 130 is not limited to any particular shape. Figure 1 The shape shown in the image.

[0060] The upper platform 130 can be aligned by multiple alignment drive units 120 (or the position of the upper platform 130 can be adjusted by multiple alignment drive units 120). The upper platform 130 can provide space in which a substrate or panel will be mounted.

[0061] In various processes related to substrates or panels, the substrates or panels should be present in the intended positions. For this purpose, it is important that the upper platform 130 on which the substrates or panels are disposed is present in the intended positions. The durability of the alignment drive unit 120, which adjusts the position of the upper platform 130, can be important. According to embodiments of the present disclosure, the durability of the alignment drive unit 120 is improved, enabling precise position adjustment of the upper platform 130.

[0062] Figure 2 For example Figure 1 A schematic perspective view of the alignment drive unit shown in the figure.

[0063] refer to Figure 1 and Figure 2 The type I alignment driving unit 200 according to an embodiment of the present disclosure and the type II alignment driving unit 200' according to an embodiment of the present disclosure can be provided in Figure 1 The alignment drive unit 120 shown in the figure.

[0064] Type I alignment drive unit 200 or Type II alignment drive unit 200' may include a transmission motor 210, a ball screw 220, a first guide block 230, a first slider 240 or a third slider 240', a second guide block 250, a second slider 260, and a support member 270. According to an embodiment of this disclosure, Type I alignment drive unit 200 may include a first slider 240. According to an embodiment of this disclosure, Type I alignment drive unit 200 may include a first slider 240 or include both a first slider 240 and a third slider 240'. According to an embodiment of this disclosure, Type II alignment drive unit 200' may include a third slider 240' and may not include a first slider 240. For example, the shape of the first slider 240 may be different from or substantially different from the shape of the third slider 240'.

[0065] A drive motor 210 may be mounted (e.g., fixedly connected) on the lower stage 110. The drive motor 210 may be connected to a first slider 240 or a third slider 240' via a ball screw 220. The drive motor 210 may push or pull the ball screw 220. In other words, the drive motor 210 may move the ball screw 220 in one direction (or the direction in which the ball screw 220 extends). The drive motor 210 may transmit power to the first slider 240 or the third slider 240' via the ball screw 220. The first slider 240 or the third slider 240' may move in the same direction as the ball screw 220.

[0066] The first guide block 230 may be disposed (e.g., fixedly connected) on the lower stage 110. The first guide block 230 may support the first slider 240 or the third slider 240' disposed on the first guide block 240, the second guide block 250, the second slider 260 and the support member 270.

[0067] The first guide block 230 provides space in which the first slider 240 or the third slider 240' can move (or slide). Furthermore, the first guide block 230 can restrict the direction of movement (or sliding) of the first slider 240 or the third slider 240'. For example, the first guide block 230 can restrict the direction of movement (or sliding) such that the first slider 240 or the third slider 240' can only move (or slide) in the direction in which the ball screw 220 extends.

[0068] The first guide block 230 is not limited to Figure 2 The shape shown in the figure can be any shape, as long as the first guide block 230 can perform the above functions.

[0069] The first slider 240 or the third slider 240' may be disposed on the first guide block 230. The first slider 240 or the third slider 240' may not be fixedly connected to the first guide block 230. Furthermore, the first slider 240 or the third slider 240' may move (or slide) on the first guide block 230 via the transmission motor 210. The first slider 240 or the third slider 240' will refer to... Figures 3 to 7 It is described in detail.

[0070] The second guide block 250 may be disposed (e.g., fixedly connected) on the first slider 240 or the third slider 240'. The second guide block 250 may support the second slider 260 and the support member 270 disposed on the second guide block 250.

[0071] The second guide block 250 provides space in which the second slider 260 can move (or slide). Furthermore, the second guide block 250 can restrict the direction of movement (or sliding) of the second slider 260. For example, the second guide block 250 can restrict the direction of movement (or sliding) such that the second slider 240 can only move (or slide) in a direction perpendicular to the extension direction of the ball screw 220.

[0072] The second slider 260 may be disposed on the second guide block 250. The second slider 260 may not be fixedly connected to the second guide block 250. The second slider 260 may move freely according to the movement of the upper platform 130 disposed on the second slider 260. In other words, when the first slider 240 or the third slider 240' moves by power from the transmission motor, the second slider 260 may move freely without its own power.

[0073] The support member 270 may be mounted (or fixedly connected) on the second slider 260. The support member 270 may support the upper platform 130 mounted on the support member 270.

[0074] like Figure 2 As shown, the support member 270 may have a shape including a protrusion at the top surface (or upper surface) of a plate extending in the first direction DR1 and the second direction DR2. The upper platform 130 may have holes in certain areas. The protrusion of the support member 270 of the type I alignment drive unit 200 or type II alignment drive unit 200' may be connected or coupled (e.g., fixedly coupled) to the holes of the upper platform 130, such that the upper platform 130 is supported on the type I alignment drive unit 200 or type II alignment drive unit 200'. The position of the upper platform 130 may be adjusted (or aligned) according to the movement of the first slider 240 or the third slider 240'. By way of example, when the first slider 240 or the third slider 240' moves, the power of the first slider 240 or the third slider 240' may be transmitted to the upper platform 130 via the second slider 260 and the support member 270. The position of the upper platform 130 may be adjusted (or aligned) by the power of the first slider 240 or the third slider 240'. Reference will be made later. Figure 8 The detailed operation of the embodiments is described in detail.

[0075] Figure 3 Example according to one embodiment Figure 2 The diagram shows a detailed schematic perspective view of the components of the alignment drive unit.

[0076] refer to Figure 2 and Figure 3 According to an embodiment of the present disclosure, the Type II alignment drive unit 200' may include a ball screw 220, a third slider 240', a second guide block 250, and a second slider 260. Reference will be made later. Figure 4 The shape of the third slider 240' is described in detail. A type I alignment drive unit 200 according to an embodiment of this disclosure may include a ball screw 220, a first slider 240, a second guide block 250, and a second slider 260. A type I alignment drive unit 200 according to an embodiment of this disclosure may differ from a type II alignment drive unit 200' according to an embodiment of this disclosure because the type I alignment drive unit 200 may include the first slider 240 instead of only including the third slider 240'. Reference will be made later. Figures 5 to 7 Describe the shape of the first slider 240 in detail.

[0077] At least one of the alignment drivers 120 may include a first slider 240 and a second slider 260 that are slidable in mutually perpendicular directions by applying a type I alignment drive unit 200. Each of the other alignment drivers may include a third slider 240' and a second slider 260 that are slidable in mutually perpendicular directions by applying a type II alignment drive unit 200'. For example, each of the three alignment drive units in the alignment drive unit 120 may include a third slider 240'. On the other hand, only any one of the alignment drive units in the alignment drive unit 120 may include a first slider 240.

[0078] For example, if the first alignment drive unit 121 may include a first slider 240, each of the second alignment drive units 122 to the fourth alignment drive units 124 may include a third slider 240'.

[0079] For example, if the second alignment drive unit 122 may include the first slider 240, each of the first alignment drive unit 121, the third alignment drive unit 123 and the fourth alignment drive unit 124 may include the third slider 240'.

[0080] For example, if the third alignment drive unit 123 may include the first slider 240, each of the first alignment drive unit 121, the second alignment drive unit 122 and the fourth alignment drive unit 124 may include the third slider 240'.

[0081] For example, if the fourth alignment drive unit 124 may include the first slider 240, each of the first alignment drive units 121 to the third alignment drive unit 123 may include the third slider 240'.

[0082] like Figure 3 As shown, four second guide blocks 250 may be disposed on the first slider 240 or the third slider 240'. The second guide blocks 250 may be spaced apart from each other in the first direction DR1 and the second direction DR2. A second slider 260 may be disposed on some of the second guide blocks 250. A second slider 260 may be disposed on other second guide blocks 250.

[0083] However, the embodiments disclosed herein are not limited thereto. In one embodiment, two second guide blocks 250 may be disposed on the first slider 240 or the third slider 240'. The second guide blocks 250 may be spaced apart from each other in the first direction DR1. A second slider 260 may be disposed on the second guide blocks 250.

[0084] The first slider 240 or the third slider 240' and the second slider 260 can move (or slide) in directions perpendicular to each other. For example, the first slider 240' can move (or slide) in the second direction DR2 (or the direction in which the ball screw 220 extends). On the other hand, the second slider 260 can move (or slide) in the first direction DR1 (or the direction perpendicular to the direction in which the ball screw 220 extends).

[0085] The following description uses the scenario where the first slider 240 or the third slider 240' moves a specific or constant distance in the second direction DR2 while the second slider 260 moves a specific or constant distance in the first direction DR1. The support 270 and the upper platform 130 mounted on the second slider 260 can be in a state where the support 270 and the upper platform 130 have moved a specific or constant distance in the first direction DR1 and the second direction DR2 from their initial positions. In this way, the position of the upper platform 130 can be adjusted.

[0086] It is assumed that each of the first alignment drive unit 121, the second alignment drive unit 122, the third alignment drive unit 123, and the fourth alignment drive unit 124 may include a third slider 240'. In other words, it is assumed that any one of the alignment drive units 120 does not include the first slider 240. The third slider 240' can receive power from the transmission motor 210 under a high load applied to the third slider 240'. The third slider 240' can be heated by heat generated by friction, etc., and the shape of each of the third sliders 240' can be deformed by mechanical force. For example, the top surface (or upper surface) (or the surface in contact with the second guide block 250) of the third slider 240' can be heated by heat generated by friction, etc., and the shape of each of the top surfaces can be deformed by mechanical force.

[0087] On the other hand, in the stage alignment device 100 according to an embodiment of the present disclosure, any one of the alignment drive units 120 may include a first slider 240. The first slider 240 receives power from the transmission motor 210 when a high load is applied to the first slider 240. Even when the first slider 240 is heated by heat generated by friction, etc., and when mechanical force is applied to the first slider 240, the first slider 240 can more easily disperse force or heat compared to the third slider 240'. Accordingly, compared to the third slider 240', the first slider 240 may have superior durability against deformation. Therefore, in the stage alignment device 100 according to an embodiment of the present disclosure, any one of the alignment drive units 120 may include a first slider 240, thereby improving the durability of the alignment drive unit 120.

[0088] Through examples, Figure 4 For example Figure 3 A schematic perspective view of the third slider 240' shown in the figure. Figure 5 Here is a schematic perspective view of the first slider 240.

[0089] refer to Figure 3 and Figure 4 The third slider 240' may include an upper surface US and a lower surface LS.

[0090] The second guide block 250 may be coupled (e.g., fixedly coupled) to the upper surface US of the third slider 240'. By way of example, the upper surface US of the third slider 240' may include a first region US1 and a second region US2. Some of the second guide blocks 250 may be coupled (e.g., fixedly coupled) to the first region US1 of the upper surface US. Others of the second guide blocks 250 may be coupled (e.g., firmly coupled) to the second region US2 of the upper surface US.

[0091] The third slider 240' may include a portion having an arched shape. However, this is used to connect the third slider 240' to a ball screw 220 having a cylindrical shape, and embodiments of this disclosure are not necessarily limited thereto. In one embodiment, if the ball screw 220 has a cuboid shape, the third slider 240' may not include a portion having an arched shape.

[0092] refer to Figure 3 and Figure 5 The first slider 240 may include a body 241 and a bending block 242. For example, the first slider 240 of at least one alignment driver may include the bending block 242, and the shape of the first slider 240 of at least one alignment driver may differ from the shape of the third slider 240' of other alignment drivers in that the first slider 240 of at least one alignment driver includes the bending block 242.

[0093] The body 240 may be connected to the ball screw 220 to receive power from the transmission motor 210 via the ball screw 220. The first slider 240 may include a portion having an arched shape. However, this is used to connect the first slider 240 to the ball screw 220, which has a cylindrical shape, and embodiments of this disclosure are not necessarily limited thereto. In one embodiment, if the ball screw 220 has a cuboid shape, the first slider 240 may not include a portion having an arched shape.

[0094] The bending block 242 may be coupled (or fixedly coupled) to the body 241. For example, the body 241 may include a first region 241a and a second region 241b. Moreover, the bending block 242 may include a first bending block 242a, a second bending block 242b, a third bending block 242c, and a fourth bending block 242d. Some of the bending blocks 242 (e.g., the first bending block 242a and the second bending block 242b) may be coupled to the first region 241a of the body 241. Others of the bending blocks 242 (e.g., the third bending block 242c and the fourth bending block 242d) may be coupled to the second region 241b of the body 241.

[0095] Bending blocks 242 (e.g., at least two bending blocks 242) connected to a first region 241a of the main body 241 can form a first bending block group G1. Bending blocks 242 (e.g., at least two bending blocks 242) connected to a second region 241b of the main body 241 can form a second bending block group G2. Figure 5 As shown, the first bending block group G1 and the second bending block group G2 are spaced apart from each other in the first direction DR1. The bending blocks 242 included in the first bending block group G1 are adjacent to each other in the second direction DR2. The bending blocks 242 included in the second bending block group G2 are adjacent to each other in the second direction DR2.

[0096] The second guide block 250 may be coupled (e.g., fixedly coupled) to the bending block 242. For example, a second guide block 250 may be coupled (e.g., fixedly coupled) to each of the first bending block 242a, the second bending block 242b, the third bending block 242c, and the fourth bending block 242d.

[0097] Please refer to later Figure 7 and Figure 8 Describe the detailed shape of the bent block 242.

[0098] Figure 6 For example Figure 5 A schematic perspective view of a first embodiment of the bending block of the first slider is shown in the figure.

[0099] refer to Figure 5 and Figure 6 The bending block 300 according to the first embodiment of this disclosure can be provided in Figure 5 Among the first bending block 242a, the second bending block 242b, the third bending block 242c, and the fourth bending block 242d shown.

[0100] The bending block 300 may have a three-dimensional shape extending in a first direction DR1 to a third direction DR3.

[0101] The bending block 300 may include a first region 310, a second region 320, a third region 330, a first bending region 340, and a second bending region 350.

[0102] refer to Figure 6 The first region 310 to the third region 330 of the bending block 300 can be arranged side by side in the first direction DR1.

[0103] A surface or surface of the first region 310 of the bending block 300 may face a surface or surface of the second region 320 of the bending block 300. A surface of the first region 310 of the bending block 300 may face a surface of the second region 320 of the bending block 300 in a first direction DR1.

[0104] One surface or surface of the third region 330 of the bending block 300 may face another surface of the second region 320 of the bending block 300. One surface of the third region 330 of the bending block 300 may face another surface of the second region 320 of the bending block 300 in the first direction DR1.

[0105] The first bending region 340 can be connected between the first region 310 and the second region 320. The first bending region 340 can be as follows: Figure 6 The image shows an extension in a bent shape.

[0106] Similarly, the second bending region 350 can be connected between the second region 320 and the third region 330. The second bending region 350 can be as follows: Figure 6 The image shows an extension in a bent shape.

[0107] In one embodiment, in addition to the first bending region 340 and the second bending region 350, the bending block 300 may further include additional bending regions. Some of the additional bending regions of the bending block 300 may connect between the first region 310 and the second region 320. Other regions of the additional bending regions of the bending block 300 may connect between the second region 320 and the third region 330.

[0108] In one embodiment, the bending block 300 may include an elastic material.

[0109] Figure 7 For example Figure 5 A schematic perspective view of a second embodiment of the bending block of the first slider shown in the figure.

[0110] refer to Figure 5 and Figure 7 The bending block 400 according to the second embodiment of this disclosure can be provided in... Figure 5 Among the first bending block 242a, the second bending block 242b, the third bending block 242c, and the fourth bending block 242d shown.

[0111] The bending block 400 may have a three-dimensional shape extending in a first direction DR1 to a third direction DR3.

[0112] The bending block 400 may include a first region 410, a second region 420, a third region 430, a first bending region 440, and a second bending region 450.

[0113] refer to Figure 7 The first region 410 to the third region 430 of the bending block 400 can be arranged side by side on the first direction DR1.

[0114] The first region 410 of the bending block 400 may face the second region 420 of the bending block 400 at both of its surfaces. The first region 410 of the bending block 400 may face the second region 420 of the bending block 400 in the first direction DR1 and the second direction DR2.

[0115] The first region 410 of the bending block 400 may face the third region 430 of the bending block 400 at two of its surfaces. The surfaces facing each other of the first region 410 and the second region 420 of the bending block 400 may be different from the surfaces facing each other of the first region 410 and the third region 430 of the bending block 400.

[0116] The first bending region 440 can be connected between the first region 410 and the second region 420. The first bending region 440 can be as follows: Figure 7 The image shows an extension in a bent shape.

[0117] Similarly, the second bending region 450 can be connected between the first region 410 and the third region 430. The second bending region 450 can be as follows: Figure 7 The image shows an extension in a bent shape.

[0118] In one embodiment, in addition to the first bending region 440 and the second bending region 450, the bending block 400 may further include additional bending regions. Some of the additional bending regions of the bending block 400 may connect between the first region 410 and the second region 420. Other regions of the additional bending regions of the bending block 400 may connect between the first region 410 and the third region 430.

[0119] In one embodiment, the bending block 400 may include an elastic material.

[0120] Figure 8 For example Figure 5 A schematic perspective view of a third embodiment of the bending block of the first slider shown in the figure.

[0121] refer to Figure 5 and Figure 8The bending block 500 according to the third embodiment of this disclosure can be provided in Figure 5 Among the first bending block 242a, the second bending block 242b, the third bending block 242c, and the fourth bending block 242d shown.

[0122] The bending block 500 may have a three-dimensional shape extending in a first direction DR1 to a third direction DR3.

[0123] The bending block 500 may include a first region 510, a second region 520, a third region 530, a first bending region 540, a second bending region 550, a third bending region 560, and a fourth bending region 570.

[0124] refer to Figure 8 The first region 510 and the third region 530 of the bending block 500 can be arranged side by side in the first direction DR1.

[0125] A surface or surface of the first region 510 of the bending block 500 may face a surface or surface of the second region 520 of the bending block 500. A surface of the first region 510 of the bending block 500 may face a surface of the second region 520 of the bending block 500 in a first direction DR1.

[0126] One surface or surface of the third region 530 of the bending block 500 may face another surface of the second region 520 of the bending block 500. One surface of the third region 530 of the bending block 500 may face another surface of the second region 520 of the bending block 500 in the first direction DR1.

[0127] The first bending region 540 of the bending block 500 can be connected between the first region 510 and the second region 520. The first bending region 540 can be as follows: Figure 8 The image shows an extension in a bent shape.

[0128] Similarly, the second bending region 550 of the bending block 500 can be connected between the first region 510 and the second region 520. The second bending region 540 can be as follows: Figure 8 The image shows an extension in a bent shape.

[0129] The first bending region 540 and the second bending region 550 can overlap each other while being spaced apart in the second direction DR2.

[0130] The third bending region 560 of the bending block 500 can be connected between the second region 520 and the third region 530. The third bending region 560 can be as follows: Figure 8 The image shows an extension in a bent shape.

[0131] Similarly, the fourth bending region 570 of the bending block 500 can be connected between the second region 520 and the third region 530. The fourth bending region 570 can be as follows: Figure 8 The image shows an extension in a bent shape.

[0132] The third bending region 560 and the fourth bending region 570 can overlap each other while being spaced apart in the second direction DR2.

[0133] In one embodiment, in addition to the first bending regions 540 to the fourth bending regions 570, the bending block 500 may further include additional bending regions. Some regions of the additional bending regions of the bending block 500 may connect between the first region 510 and the second region 520. Other regions of the additional bending regions of the bending block 500 may connect between the second region 520 and the third region 530.

[0134] In one embodiment, the bending block 500 may include an elastic material.

[0135] Figure 9 For detailed examples Figure 8 The view shown is of the third bending region. In the following description, the third bending region 560 is used as an example, but the first bending region 540, the second bending region 550 and the fourth bending region 570 may be the same as the third bending region 560.

[0136] refer to Figure 9 The third bending region 560 may include the thirty-first sub-bending region 561 and the thirty-second sub-bending region 562.

[0137] like Figure 9 As shown, each of the thirty-first sub-bending region 561 and the thirty-second sub-bending region 562 may extend while including the bending portion. Moreover, the thirty-first sub-bending region 561 and the thirty-second sub-bending region 562 may be connected to each other in some regions, and may not contact each other in regions other than the partially connected regions.

[0138] exist Figure 9 In the example, the ends of each of the thirty-first sub-bending regions 561 and 562 are shown to have an angular shape. However, embodiments of this disclosure are not limited to this. For example, the ends of each of the thirty-first sub-bending regions 561 and 562 may have a rounded shape (or a non-angular shape).

[0139] Any of the multiple alignment drive units 120 may include a first slider 240 when the Type I alignment drive unit 200 is used. The first slider 240 includes a bending block 500, which includes a third bending region 560. In the process of adjusting the position of the upper stage 130, the first slider 240 receives power from the transfer motor 210 while a high load is applied to the first slider 240. Within the spirit and scope of this disclosure, the first slider 240 is heated by heat generated by friction, etc. Although mechanical force is applied, the first slider 240 can more easily distribute force or heat, etc., compared to the third slider 240'. Accordingly, the first slider 240 may have superior durability against deformation compared to the third slider 240'. Therefore, in the stage alignment device 100 according to an embodiment of this disclosure, the first slider 240, which includes the bending block 500 (which includes the third bending region 560), is included in any of the alignment drive units 120, thereby improving the durability of the alignment drive unit 120.

[0140] Figure 10 Here is a view of one embodiment of the table alignment device according to an example.

[0141] refer to Figure 1 and Figure 10 The alignment device 100 may include a first alignment drive unit 121 to a fourth alignment drive unit 124.

[0142] According to an embodiment, any one of the first alignment driving units 121 to the fourth alignment driving unit 124 may include a first slider 240. Each of the other alignment driving units may include a third slider 240'. Hereinafter, it is assumed and described that the first alignment driving unit 121 may include the first slider 240.

[0143] Each of the first alignment drive units 121 to the fourth alignment drive units 124 may include a first slider 240 or a third slider 240' and a second slider 260 that can move (or slide) in a direction perpendicular to each other.

[0144] For example, the first slider 240 of the first alignment drive unit 121 can move (or slide) in the second direction DR2, and the second slider 260 of the first alignment drive unit 121 can move (or slide) in the first direction DR1.

[0145] For example, the third slider 240' of the second alignment drive unit 122 can move (or slide) in the first direction DR1, and the second slider 260 in the second alignment drive unit 122 can move (or slide) in the second direction DR2.

[0146] For example, the third slider 240' of the third alignment drive unit 123 can move (or slide) in the first direction DR1, and the second slider 260 in the third alignment drive unit 123 can move (or slide) in the second direction DR2.

[0147] For example, the third slider 240' of the fourth alignment drive unit 124 can move (or slide) in the second direction DR2, and the second slider 260 in the fourth alignment drive unit 124 can move (or slide) in the first direction DR1.

[0148] An operational embodiment of the stage alignment device according to embodiments of the present disclosure is as follows: Figure 10 As shown in the image.

[0149] exist Figure 10 In the process, the third slider 240' of each of the second alignment drive unit 122 and the third alignment drive unit 123 can move in the first direction DR1 via the transmission motor 210.

[0150] exist Figure 10 In the process, the first slider 240 of the first alignment drive unit 121 can move in the second direction DR2 via the transmission motor 210.

[0151] exist Figure 10 In the middle, the third slider 240' of the fourth alignment drive unit 124 can move in the second direction DR2 via the transmission motor 210.

[0152] The power of the first slider in each of the first alignment drive units 121 to the fourth alignment drive units 124 can be transmitted to the upper platform 130 through the second slider and the support member. With the power of the first slider, the upper platform 130 can move in the first direction DR1 and the second direction DR2.

[0153] When the platform 130 moves, the second slider 260 of each of the second alignment drive units 122 and the third alignment drive unit 123 can move in the second direction DR2. The second slider 260 of the first alignment drive unit 121 can move in the first direction DR1. The second slider 260 of the fourth alignment drive unit 124 can move in the first direction DR1.

[0154] In this way, the position of the upper stage 130 can be adjusted (or aligned) in the stage alignment device according to an embodiment of the present disclosure.

[0155] In the stage alignment device 100 according to an embodiment of the present disclosure, any one of the alignment drive units 120 may include a first slider 240. During the process of adjusting the position of the upper stage 130, the first slider 240 receives power from the transfer motor 210 while under a high load. Within the spirit and scope of the present disclosure, the first slider 240 is heated by heat generated by friction, etc. Although mechanical force is applied, the first slider 240 can more easily distribute force or heat compared to the third slider 240'. Accordingly, the first slider 240 may have superior durability against deformation compared to the third slider 240'. Therefore, in the stage alignment device 100 according to an embodiment of the present disclosure, the first slider 240 is included in any one of the alignment drive units 120, thereby improving the durability of the alignment drive unit 120.

[0156] According to this disclosure, a table alignment device with high durability by effectively eliminating deformation caused by vertical loads and a driving method for the table alignment device can be provided.

[0157] Exemplary embodiments are disclosed herein, and although terminology is used, it is used and interpreted in a general and descriptive sense only and not for limiting purposes. In some instances, features, characteristics, and / or elements otherwise described in connection with an embodiment may be used alone or in combination with features, characteristics, and / or elements described in connection with other embodiments, unless otherwise indicated. Accordingly, those skilled in the art will understand that various changes in form and detail may be made without departing from the spirit and scope of this disclosure and as set forth in the following claims.

Claims

1. A table alignment device, characterized in that, include: Step down; Multiple alignment drivers are arranged on the lower stage; as well as The platform is positioned on the plurality of alignment drivers and is supported and aligned by the plurality of alignment drivers, wherein... At least one of the plurality of alignment drivers includes a first slider and a second slider that can slide in directions perpendicular to each other, and each of the other alignment drivers includes a third slider and a second slider that can slide in directions perpendicular to each other. The shape of the first slider of the at least one alignment driver is different from the shape of the third slider of the other alignment drivers.

2. The table alignment device according to claim 1, characterized in that, The first slider of the at least one alignment driver includes a bending block.

3. The table alignment device according to claim 2, characterized in that, The bending blocks are divided into a first bending block group and a second bending block group, each of the first bending block group and the second bending block group including at least two bending blocks. The first bending block group and the second bending block group are spaced apart from each other in a first direction, and The bending blocks included in each of the first bending block group and the second bending block group are adjacent to each other in a second direction intersecting the first direction.

4. The table alignment device according to claim 2, characterized in that, Each of the bending blocks includes a first region, a second region, a third region, a first bending region, and a second bending region. The second region faces each of the first and third regions at its surface. The first bending region connects the first region and the second region, and extends in a bent shape. The second bending region connects the second region and the third region, and extends in a bent shape.

5. The table alignment device according to claim 2, characterized in that, Each of the bending blocks includes a first region, a second region, a third region, a first bending region, and a second bending region. The first region faces the second region and the third region at two different surfaces. The first bending region connects the first region and the second region, and extends in a bent shape. The second bending region connects the first region and the third region, and extends in a bent shape.

6. The table alignment device according to claim 2, characterized in that, Each of the bending blocks includes a first region, a second region, a third region, a first bending region, a second bending region, a third bending region, and a fourth bending region. The second region faces each of the first and third regions at its surface. The first bending region and the second bending region overlap each other in the second direction. The third bending region and the fourth bending region overlap each other in the second direction. The first bending region and the second bending region are connected between the first region and the second region, and extend in a bending shape. The third and fourth bending regions are connected between the second and third regions and extend in a bent shape.

7. The table alignment device according to claim 1, characterized in that, Each of the plurality of alignment drivers further includes: A first guide block is disposed between the lower platform and the first slider or the third slider; The second guide block is disposed between the first slider or the third slider and the second slider; A support member is disposed on the second slider, the support member being connected between each of the plurality of alignment drivers and the upper stage; A transmission motor, which transmits either the first slider or the third slider in one direction; and A ball screw is connected between the first slider or the third slider and the transmission motor.

8. The table alignment device according to claim 7, characterized in that, The ball screw has a cylindrical shape and extends in one direction.

9. The table alignment device according to claim 7, characterized in that, The support member includes a protruding portion disposed on the upper surface of the support member. The upper platform includes holes in multiple areas, and The protruding portion of the support of each of the plurality of alignment drivers is connected to each of the holes of the upper stage to support the upper stage on the plurality of alignment drivers.

10. The table alignment device according to claim 7, characterized in that, The first guide block is connected to the lower platform and restricts the sliding direction of the first slider or the third slider, and the second guide block is connected to the first slider or the third slider and restricts the sliding direction of the second slider.

Images