Tooling station for receiving tooling

Abstract

The utility model relates to the technical field of semiconductor material processing equipment, specifically disclose a tooling station for accomodating tooling. The tooling station includes fixed base, and the top end detachable installation of fixed base has the positioning piece, and the positioning piece includes tooling table, adsorption unit, in -place detection unit and control device, and the top recessed of tooling table has the accommodation groove, and the bottom surface of upper table can be with the top surface of tooling table and is pasted together, and the pressure head is placed in the accommodation groove and is set apart with the lateral wall of accommodation groove, adsorption unit selectively adsorbs the bottom surface of upper table, in -place detection unit is used for monitoring the position of tooling, and in -place detection unit will sense the position signal feedback of tooling to control device, and control device receives the on-off of adsorption unit after controlling position signal. The tooling station improves the versatility and flexibility of tooling station through the optimal design on structure, ensures the accuracy and stability of tooling accomodation.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material processing equipment technology, and in particular to a tooling station for storing tooling. Background Technology

[0002] In chip-to-wafer or chip-to-chip bonding processes, chip pick-up and pressure application are critical steps. Since different products have different pressure requirements during bonding, different pressure heads are needed for each product. Manually changing pressure heads is not only cumbersome but also time-consuming, severely impacting production efficiency. Therefore, automating pressure head replacement is a crucial way to improve bonding process efficiency.

[0003] Currently, most equipment achieves automatic tooling switching by configuring multiple tooling stations. However, existing tooling stations have certain limitations. On the one hand, their layout and quantity adjustments are not flexible enough, making it difficult to quickly and effectively change according to different actual production needs, resulting in poor versatility. On the other hand, there are shortcomings in tooling storage and fixation; tooling is prone to shaking or displacement during placement, affecting the accuracy of the pressure head and potentially damaging it. Furthermore, they cannot achieve automated detection and effective control of tooling placement, making it difficult to guarantee the accuracy and reliability of tooling placement. Utility Model Content

[0004] The purpose of this invention is to provide a tooling station for storing tooling, so as to improve the versatility and flexibility of the tooling station and ensure the accuracy and stability of tooling storage.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A tooling station for storing tooling, comprising an upper platform and a pressure head located at the bottom of the upper platform. The projection of the upper platform in a horizontal plane overlaps the projection of the pressure head in the horizontal plane. The tooling station includes a fixed base with a detachable positioning component at its top. The positioning component includes a tooling table, an adsorption unit, a positioning detection unit, and a control device. The top of the tooling table has a recessed receiving groove, allowing the bottom surface of the upper platform to fit against the top surface of the tooling table. The pressure head is placed within the receiving groove and spaced apart from its sidewall. The adsorption unit is mounted on the tooling table and selectively adsorbs the bottom surface of the upper platform. The positioning detection unit is located on the tooling table and monitors the position of the tooling. The control device is communicatively connected to both the positioning detection unit and the adsorption unit. The positioning detection unit feeds back the detected position signal of the tooling to the control device, which then controls the on / off state of the adsorption unit upon receiving the position signal.

[0007] As an optional technical solution for a tooling station for storing tooling, the positioning detection unit includes a sensor transmitter for emitting light signals and a sensor receiver for receiving the light signals. The sensor transmitter and the sensor receiver are both located at the top of the tooling table and on opposite sides of the receiving slot.

[0008] As an optional technical solution for a tooling station for storing tooling, the top of the tooling platform is also recessed with two mounting slots, which are connected to the receiving slot. The sensor transmitter is at least partially installed in one of the mounting slots, and the sensor receiver is at least partially installed in the other mounting slot.

[0009] As an optional technical solution for a tooling station for storing tooling, the tooling platform is provided with a gas channel and a vacuum adsorption channel. One end of the vacuum adsorption channel is connected to the gas channel, and the other end is open on the top surface of the tooling platform. The adsorption unit includes a vacuum pumping device, and the output end of the vacuum pumping device is connected to the gas channel.

[0010] As an optional technical solution for a tooling station for storing tooling, the gas channel includes a first channel, and at least two vacuum adsorption channels are provided. The first channel connects to at least two vacuum adsorption channels. The gas channel has a first air vent on the side of the tooling table. The first channel connects the first air vent and at least two vacuum adsorption channels. The output end of the vacuum pumping device is plugged into the first air vent.

[0011] As an optional technical solution for a tooling station for storing tooling, at least two of the vacuum adsorption channels are respectively disposed on both sides of the receiving groove along a first direction, and the first channel extends along the first direction; wherein, the first air inlet is disposed on the side of the tooling table along the first direction; or, the first air inlet is disposed on the side of the tooling table along a second direction, and the gas channel further includes a second channel extending along the second direction, the second channel connecting the first air inlet and the first channel.

[0012] As an optional technical solution for a tooling station for storing tooling, the gas channel has a second air inlet on the side of the tooling table. The first air inlet and the second air inlet are located on different sides of the tooling table. The second air inlet is used to install a detection device, which is used to detect the air pressure in the gas channel.

[0013] As an optional technical solution for a tooling station for storing tooling, the gas channel further includes a third channel, which connects the second gas inlet and the first channel, and the extension direction of the third channel intersects the extension direction of the first channel.

[0014] As an optional technical solution for a tooling station for storing tooling, the first air inlet and the second air inlet are respectively located on two opposite sides of the tooling platform along the second direction, the second channel connects the first air inlet and the first channel, the third channel extends along the second direction, and the second channel and the third channel are respectively located on both sides of the first channel along the second direction.

[0015] As an optional technical solution for a tooling station for storing tooling, the vacuum adsorption channel is provided in multiple ways, and all the vacuum adsorption channels are symmetrically arranged about the center of the receiving tank.

[0016] As an optional technical solution for a tooling station for storing tooling, the top edge of the tooling platform is provided with a limiting protrusion, and the side wall of the limiting protrusion is used to position the side of the upper platform.

[0017] As an optional technical solution for a tooling station for storing tooling, the limiting protrusion extends vertically; and / or, the receiving groove is recessed vertically.

[0018] The beneficial effects of this utility model are:

[0019] The tooling station for storing tooling features a detachable positioning component on its fixed base, allowing for flexible installation and replacement of the tooling table. It is not limited to the shape shown in the attached diagram, enabling flexible adjustment of the layout and quantity of the tooling station to meet different needs, thus improving its versatility and flexibility. The bottom surface of the upper platform fits snugly against the top surface of the tooling table, and the receiving slot houses the pressure head, ensuring accurate tooling placement and easy storage, preventing tooling from shaking or shifting, and facilitating storage and management. The receiving slot houses the pressure head, and the two are spaced apart to avoid damage from direct contact between the pressure head and the tooling table surface. The adsorption unit selectively adsorbs the bottom surface of the upper platform, ensuring the tooling is firmly fixed on the tooling table and preventing shaking or shifting during operation. The positioning detection unit monitors the position of the tooling and feeds the position signal back to the control device. The control device controls the on / off state of the adsorption unit based on the position signal, achieving automated detection and adsorption control of tooling placement, ensuring accuracy and reliability. If the tooling is successfully placed and vacuum adsorption is detected, it indicates that the tooling is positioned correctly; if the tooling is placed but adsorption cannot be established, it indicates that the tooling is tilted or not placed correctly. Attached Figure Description

[0020] Figure 1 This is a side view of the existing tooling;

[0021] Figure 2 This is a structural schematic diagram of a tooling station for storing tooling provided in an embodiment of this utility model;

[0022] Figure 3 This is a top view of a tooling station for storing tooling provided in an embodiment of the present invention;

[0023] Figure 4 This is a partial structural schematic diagram of a tooling station for storing tooling provided in an embodiment of this utility model;

[0024] Figure 5 This is a partial top view of a tooling station for storing tooling provided in an embodiment of this utility model;

[0025] Figure 6 This is a partial cross-sectional view of a tooling station for storing tooling provided in an embodiment of this utility model.

[0026] In the picture:

[0027] 100. Tooling table; 101. First air inlet; 102. Second air inlet; 104. Vacuum adsorption channel; 110. Limiting protrusion; 120. Receiving groove;

[0028] 210. Sensor transmitter; 220. Sensor receiver;

[0029] 300. Fixture;

[0030] 900, tooling; 910, platform; 920, press head. Detailed Implementation

[0031] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0032] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions. Moreover, "above," "on top of," and "over" the first feature in relation to the second feature includes the first feature directly above and diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature includes the first feature directly below and diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0033] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0034] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0035] like Figures 1 to 6As shown, this embodiment provides a tooling station for storing tooling 900. Tooling 900 includes an upper platform 910 and a pressure head 920 located at the bottom of the upper platform 910. The projection of the upper platform 910 in the horizontal plane covers the projection of the pressure head 920 in the horizontal plane. The tooling station for storing tooling includes a fixed base 300. A positioning component is detachably installed on the top of the fixed base 300. The positioning component includes a tooling table 100, an adsorption unit, a positioning detection unit, and a control device. The top of the tooling table 100 is recessed with a receiving groove 120, and the bottom surface of the upper platform 910... The fixture 900 can fit against the top surface of the fixture 100. The pressure head 920 is placed in the receiving groove 120 and spaced apart from the side wall of the receiving groove 120. The adsorption unit is installed on the fixture 100 and selectively adsorbs the bottom surface of the upper stage 910. The positioning detection unit is located on the fixture 100 and is used to monitor the position of the fixture 900. The control device is communicatively connected to the positioning detection unit and the adsorption unit. The positioning detection unit feeds back the position signal of the fixture 900 to the control device. After receiving the position signal, the control device controls the on / off state of the adsorption unit.

[0036] In this embodiment, the plane containing the bottom end of the upper platform 910 is the bottom surface of the upper platform 910, and the bottom surface of the upper platform 910 is parallel to the horizontal plane; in the vertical direction, the bottom end of the upper platform 910 is located below the top end of the upper platform 910. The plane containing the top end of the fixing seat 300 is parallel to the horizontal plane; in the vertical direction, the top end of the fixing seat 300 is located above the bottom end of the fixing seat 300. The plane containing the top end of the tooling table 100 is the top surface of the tooling table 100, and the top surface of the tooling table 100 is parallel to the horizontal plane; in the vertical direction, the top end of the tooling table 100 is located above the bottom end of the tooling table 100.

[0037] The tooling station's mounting base 300 has a detachable positioning component at its top, allowing for flexible installation and replacement of the tooling table 100. This design is not limited to the shape shown in the attached diagram, enabling flexible adjustment of the layout and quantity of the tooling station to meet different needs, thus improving its versatility and flexibility. The bottom surface of the upper platform 910 is flush with the top surface of the tooling table 100, and the receiving groove 120 houses the pressure head 920, ensuring accurate placement of the tooling 900 and facilitating its storage. This prevents the tooling 900 from shaking or shifting, simplifying storage and management. The receiving groove 120 houses the pressure head 920, and the two are spaced apart to prevent damage from direct contact between the pressure head 920 and the surface of the tooling table 100. The adsorption unit can selectively adsorb the bottom surface of the upper platform 910, ensuring the tooling 900 is firmly fixed on the tooling table 100 and preventing shaking or shifting during operation. The positioning detection unit monitors the position of fixture 900 and feeds the position signal back to the control device. The control device controls the on / off state of the adsorption unit based on the position signal, enabling automated detection and adsorption control of fixture 900 placement, ensuring the accuracy and reliability of fixture 900 placement. If fixture 900 is detected to be placed and vacuum adsorption is successful, it indicates that fixture 900 is correctly positioned; if fixture 900 is detected to be placed but adsorption cannot be established, it indicates that fixture 900 is tilted or not placed correctly.

[0038] For example, multiple positioning elements can be installed at the top of the fixing base 300. In this embodiment, two positioning elements are taken as examples.

[0039] In this embodiment, a limiting protrusion 110 is provided on the edge of the top of the tooling table 100, and the sidewall of the limiting protrusion 110 is used to position the side of the upper platform 910. In this embodiment, two limiting protrusions 110 are provided on the edge of the top of the tooling table 100 as an example.

[0040] The limiting protrusion 110 on the top edge of the tooling table 100 can position the side of the upper table 910, further improving the positioning accuracy of the tooling 900 during placement and allowing the bottom surface of the upper table 910 to better fit with the top surface of the tooling table 100. Moreover, the positioning effect of the limiting protrusion 110 on the side of the upper table 910 can further prevent the tooling 900 from shaking or shifting during placement and operation, enhancing the stability of the tooling 900 during placement.

[0041] In this embodiment, all sidewalls of the limiting protrusion 110 are parallel to the vertical direction, all sides of the upper platform 910 are parallel to the vertical direction, and all sides of the tooling table 100 are parallel to the vertical direction.

[0042] In one embodiment of this invention, the limiting protrusion 110 extends vertically; the receiving groove 120 is recessed vertically.

[0043] The limiting protrusion 110 and the receiving groove 120 extend vertically, which on the one hand makes the installation and placement of the tooling 900 more convenient, better fits the shape of the tooling 900, meets the placement and storage requirements of the tooling 900, facilitates the vertical placement and removal of the tooling 900, and improves the ease of operation; on the other hand, it ensures the vertical stability of the tooling 900, prevents the tooling 900 from shaking during placement, and helps to improve the structural strength and stability of the tooling table 100.

[0044] In another embodiment of this invention, only the limiting protrusion 110 is limited to extending in the vertical direction; in yet another embodiment of this invention, only the receiving groove 120 is limited to being recessed in the vertical direction.

[0045] In this embodiment, the upper platform 910 of different tooling 900 is consistent, and the size of the pressure head 920 is determined according to the size of the chip it clamps. The pressure head 920 can adsorb the chip, and the tooling table 100 only needs to be adapted to the size of the upper platform 910.

[0046] In this embodiment, the positioning detection unit includes a sensor transmitter 210 for emitting light signals and a sensor receiver 220 for receiving light signals. The sensor transmitter 210 and the sensor receiver 220 are both located at the top of the tooling table 100 and on both sides of the receiving groove 120.

[0047] By employing a sensor transmitter 210 to emit light signals and a sensor receiver 220 to receive light signals, with the two located on opposite sides of the receiving slot 120, it is possible to accurately detect whether the fixture 900 is correctly placed on the fixture table 100, avoiding situations where the fixture 900 is not placed properly, and improving the accuracy and sensitivity of position detection.

[0048] In other embodiments of this example, the position detection unit is any other sensor capable of detecting the presence or absence of tooling 900. The specific structure and working principle of the sensor are common knowledge within this application and will not be elaborated here.

[0049] Furthermore, in this embodiment, the top of the tooling table 100 is also recessed with two mounting slots, which are connected to the receiving slot 120. The sensor transmitter 210 is at least partially installed in one mounting slot, and the sensor receiver 220 is at least partially installed in the other mounting slot.

[0050] The tooling table 100 has a recessed mounting groove at its top, which is connected to the receiving groove 120. The sensor transmitter 210 and the sensor receiver 220 are at least partially installed in the mounting groove. This not only optimizes the spatial layout of the tooling table 100 and makes the sensor transmitter 210 and the sensor receiver 220 reasonably arranged, but also provides a certain degree of protection for the positioning detection unit, preventing it from being interfered with or damaged by external factors.

[0051] Specifically, the location, shape, and fixing position of the mounting slot are selected based on the shape and usage of the positioning detection unit.

[0052] For example, when using the aforementioned sensor transmitter 210 and sensor receiver 220, it is necessary to ensure the depth of the mounting groove so that the detection upper surface of the sensor transmitter 210 and the detection upper surface of the sensor receiver 220 are both lower than the lower surface of the upper platform 910, thereby preventing position interference.

[0053] In this embodiment, the tooling table 100 is provided with a gas channel and a vacuum adsorption channel 104. One end of the vacuum adsorption channel 104 is connected to the gas channel, and the other end is open on the top surface of the tooling table 100. The adsorption unit includes a vacuum pumping device, and the output end of the vacuum pumping device is connected to the gas channel.

[0054] The tooling table 100 is equipped with a gas channel and a vacuum adsorption channel 104. The vacuuming device effectively adsorbs the bottom surface of the upper platform 910 through the gas channel and the vacuum adsorption channel 104, which can ensure that there is sufficient adsorption force between the tooling 900 and the tooling table 100, so as to achieve stable fixation of the tooling 900 and ensure the stability of the tooling 900 on the tooling table 100.

[0055] In this embodiment, multiple vacuum adsorption channels 104 are provided, and all vacuum adsorption channels 104 are arranged symmetrically about the center of the receiving groove 120.

[0056] All vacuum adsorption channels 104 are symmetrically arranged about the center of the receiving groove 120, which can make all parts of the bottom surface of the upper platform 910 receive uniform adsorption force, further improving the stability of the tooling 900 on the tooling table 100 and avoiding the problem of the tooling 900 tilting or not being fixed firmly due to uneven adsorption force.

[0057] Specifically, there are two vacuum adsorption channels 104.

[0058] Furthermore, the gas channel includes a first channel, and at least two vacuum adsorption channels 104 are provided. The first channel connects to at least two vacuum adsorption channels 104. A first gas port 101 is opened on the side of the tooling table 100. The first channel connects the first gas port 101 and at least two vacuum adsorption channels 104. The output end of a vacuum pumping device is plugged into the first gas port 101.

[0059] The first gas channel connects to the first gas inlet 101 and at least two vacuum adsorption channels 104. The first gas inlet 101 is plugged into the output end of the vacuum pumping device, facilitating the connection and disassembly of the vacuum pumping device and the tooling table 100, simplifying equipment installation and maintenance, and simplifying operation. Furthermore, the connection of at least two vacuum adsorption channels 104 to the first channel helps to ensure uniform adsorption force on all parts of the bottom surface of the upper platform 910, improving the stability of the tooling 900 on the tooling table 100. This further facilitates the connection and disassembly of the vacuum pumping device and the tooling table 100, simplifying equipment installation and maintenance.

[0060] In one embodiment of this example, at least two vacuum adsorption channels 104 are respectively disposed on both sides of the receiving groove 120 along a first direction, and the first channel extends along the first direction; the first air port 101 is disposed on the side of the tooling table 100 along the first direction.

[0061] In another embodiment of this example, at least two vacuum adsorption channels 104 are respectively disposed on both sides of the receiving groove 120 along a first direction, and the first channel extends along the first direction; the first air port 101 is disposed on the side of the tooling table 100 along the second direction, and the gas channel also includes a second channel extending along the second direction, the second channel connecting the first air port 101 and the first channel.

[0062] At least two vacuum adsorption channels are respectively arranged on both sides of the receiving groove 120 along the first direction. The first channel extends along the first direction, and the first gas port 101 can be flexibly set on different sides of the tooling table 100 and connected through the second channel. This layout can reasonably adapt to the structure of the tooling table 100 and the placement requirements of the tooling 900, and optimize the setting of the gas channel.

[0063] To reduce the difficulty of preparing the first channel, the above embodiment adopts a scheme of opening a first gas duct 101 on the side in the second direction. The first gas duct 101 is used to assist in the preparation of the first channel. After preparation, a plug can be added inside the first gas duct 101 to block it and improve the sealing performance. Furthermore, when the first gas duct 101 needs to be used, the plug can be removed for assembly with other devices, achieving flexible connection between the tooling station used to house the tooling and external equipment. The plug can flexibly adjust the opening and closing of the gas channel and the gas flow rate according to actual needs to adapt to the adsorption requirements of different tooling 900s.

[0064] Furthermore, a second air inlet 102 is provided on the side of the tooling table 100. The first air inlet 101 and the second air inlet 102 are respectively provided on different sides of the tooling table 100. The second air inlet 102 is used to install a detection device, which is used to detect the air pressure in the gas channel.

[0065] A second gas inlet 102 is opened on the side of the tooling table 100. The second gas inlet 102 is used to set up a detection device to monitor the gas pressure changes in the gas channel in real time, ensure that the adsorption force is within a suitable range, provide accurate data support for the control of the adsorption unit, and ensure the adsorption effect and the stability of the tooling 900.

[0066] The detection device can monitor the gas pressure changes in the gas channel during adsorption in real time, ensuring that the adsorption force is within a suitable range. This provides accurate data support for the control of the adsorption unit, helps to judge the effect of vacuum adsorption and the stability of the tooling 900, and promptly detects adsorption anomalies. Specifically, the detection device includes a pressure sensor. After the control device controls the adsorption unit to start, the detection device senses the gas pressure changes in the gas channel (taking a piezoresistive pressure sensor as an example, gas pressure acts on the surface of a silicon diaphragm or elastomer, causing the material to deform. The strain gauge of the metal or semiconductor material generates a change in resistance value with the deformation, which is converted into a voltage signal output through a Wheatstone bridge to achieve the purpose of outputting the gas pressure value). When the gas pressure change is within the predetermined range, it proves that both vacuum adsorption ports 104 have adsorbed the tooling 900, thus confirming that the orientation of the tooling 900 is correct. If the gas pressure change deviates from the predetermined range, it is determined that the tooling station used to store the tooling is not operating normally, and all tooling 900s are immediately removed and maintained.

[0067] Furthermore, the gas passage also includes a third passage, which connects the second gas inlet 102 and the first passage, and the extension direction of the third passage intersects the extension direction of the first passage.

[0068] The third gas channel connects the second gas inlet 102 and the first channel, and its extension direction intersects with the first channel. This layout further optimizes the connectivity of the gas channel, making the flow of gas in the channel more reasonable and helping to improve the adsorption effect.

[0069] The third and second channels are connected to the first channel respectively. This layout facilitates the connection of the first channel to all vacuum adsorption channels 104, making the gas flow in the channel more reasonable, and making it easier to provide gas inlets that meet the position requirements. This enables better adsorption of the tooling 900, further improving the adsorption effect and the stability of the tooling 900.

[0070] Furthermore, the first air inlet 101 and the second air inlet 102 are respectively located on two opposite sides of the tooling table 100 along the second direction; with the second channel connecting the first air inlet 101 and the first channel, and the third channel extending along the second direction, the second channel and the third channel are respectively located on both sides of the first channel along the second direction.

[0071] The first gas inlet 101 and the second gas inlet 102 are respectively located on two opposite sides of the tooling table 100 along the second direction. The second and third channels extend along the second direction and are located on both sides of the first channel, making the structure of the gas channels more symmetrical and reasonable. This simplifies the gas channel structure and the process of adjusting the position of the tooling table 100, thereby reducing the assembly difficulty of the tooling table 100 with other components, reducing the risk of positional interference, and facilitating the assembly of the vacuum pumping device on the tooling table 100. This also facilitates the adaptive adjustment of the tooling station structure layout used to store the tooling. This achieves optimized gas channel layout, reduces the space occupied, and further improves the adsorption stability of the tooling 900 and the utilization efficiency of the gas channels.

[0072] Furthermore, any two of the first direction, the second direction, and the vertical direction are perpendicular to each other.

[0073] The above-mentioned limitations make the gas channel layout more regular, which is in line with the structural characteristics of the tooling table 100 and the placement requirements of the tooling 900. This is conducive to improving the structural strength and stability of the tooling table 100, and also facilitates the installation and operation of the tooling 900.

[0074] In this embodiment, the tooling station for storing the tooling also includes bolts that can pass through the tooling table 100 and be screwed onto the fixing seat 300.

[0075] By bolting the tooling table 100 through and screwing it onto the fixed base 300, the tooling table 100 can be firmly installed on the fixed base 300, which enhances the overall structural stability of the tooling station used for storing tooling, ensures the safety of tooling 900 during placement and operation, and prevents the tooling table 100 from loosening or shifting during use.

[0076] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A tooling station for storing tooling (900), characterized in that, The tooling (900) includes an upper platform (910) and a pressure head (920) located at the bottom of the upper platform (910). The projection of the upper platform (910) in the horizontal plane covers the projection of the pressure head (920) in the horizontal plane. The tooling station for storing the tooling includes a fixed base (300). A positioning element is detachably installed on the top of the fixed base (300). The positioning element includes: The tooling table (100) has a recessed receiving groove (120) at the top. The bottom surface of the upper platform (910) can fit against the top surface of the tooling table (100). The pressure head (920) is placed in the receiving groove (120) and spaced apart from the side wall of the receiving groove (120). An adsorption unit is installed on the tooling table (100), and the adsorption unit selectively adsorbs the bottom surface of the upper table (910); A positioning detection unit is provided on the tooling table (100), and the positioning detection unit is used to monitor the position of the tooling (900); The control device is communicatively connected to the positioning detection unit and the adsorption unit respectively. The positioning detection unit feeds back the position signal of the tooling (900) to the control device. After receiving the position signal, the control device controls the on / off state of the adsorption unit.

2. The tooling station for storing tooling according to claim 1, characterized in that, The positioning detection unit includes a sensor transmitter (210) for emitting light signals and a sensor receiver (220) for receiving light signals. The sensor transmitter (210) and the sensor receiver (220) are both located at the top of the tooling table (100) and on both sides of the receiving groove (120).

3. The tooling station for storing tooling according to claim 2, characterized in that, The top of the tooling table (100) is also recessed with two mounting slots, which are connected to the receiving slot (120). The sensor transmitter (210) is at least partially installed in one of the mounting slots, and the sensor receiver (220) is at least partially installed in the other mounting slot.

4. The tooling station for storing tooling according to claim 1, characterized in that, The tooling table (100) is provided with a gas channel and a vacuum adsorption channel (104). One end of the vacuum adsorption channel (104) is connected to the gas channel, and the other end is open on the top surface of the tooling table (100). The adsorption unit includes a vacuum pumping device, and the output end of the vacuum pumping device is connected to the gas channel.

5. The tooling station for storing tooling according to claim 4, characterized in that, The gas channel includes a first channel, and at least two vacuum adsorption channels (104) are provided. The first channel connects to at least two vacuum adsorption channels (104). The gas channel has a first air port (101) on the side of the tooling table (100). The first channel connects the first air port (101) and at least two vacuum adsorption channels (104). The first air port (101) is connected to the output end of the vacuum pumping device.

6. The tooling station for storing tooling according to claim 5, characterized in that, At least two of the vacuum adsorption channels (104) are respectively disposed on both sides of the receiving groove (120) along a first direction, and the first channel extends along the first direction; Wherein, the first air inlet (101) is disposed on the side of the tooling table (100) along the first direction; or, the first air inlet (101) is disposed on the side of the tooling table (100) along the second direction, and the gas channel further includes a second channel extending along the second direction, the second channel connecting the first air inlet (101) and the first channel.

7. The tooling station for storing tooling according to claim 6, characterized in that, The gas channel has a second air inlet (102) on the side of the tooling table (100). The first air inlet (101) and the second air inlet (102) are respectively located on different sides of the tooling table (100). The second air inlet (102) is used to install a detection device, which is used to detect the gas pressure in the gas channel.

8. The tooling station for storing tooling according to claim 7, characterized in that, The gas passage further includes a third passage, which connects the second gas inlet (102) and the first passage, and the extension direction of the third passage intersects the extension direction of the first passage.

9. The tooling station for storing tooling according to claim 8, characterized in that, The first air inlet (101) and the second air inlet (102) are respectively located on two opposite sides of the tooling table (100) along the second direction. The second channel connects the first air inlet (101) and the first channel. The third channel extends along the second direction, and the second channel and the third channel are respectively located on both sides of the first channel along the second direction.

10. The tooling station for storing tooling according to claim 4, characterized in that, The vacuum adsorption channel (104) is provided in multiple ways, and all the vacuum adsorption channels (104) are arranged symmetrically about the accommodating groove (120).

11. The tooling station for storing tooling according to claim 1, characterized in that, The tooling table (100) has a limiting protrusion (110) protruding from the edge of its top end. The side wall of the limiting protrusion (110) is used to position the side of the upper platform (910).

12. The tooling station for storing tooling according to claim 11, characterized in that, The limiting protrusion (110) extends vertically; and / or, The receiving groove (120) is recessed in the vertical direction.

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