A FOSB wafer box handling and boxing robot gripper

Abstract

The utility model relates to the technical field of automation equipment of semiconductor industry discloses a kind of based on FOSB wafer box handling and boxing robot clamp, including clamp frame assembly, servo drive assembly, anti-falling detection component and two groups of hook claw components.Claw frame assembly contains robot flange and clamp bottom plate, realize and external robot connection;Servo drive assembly is driven synchronous belt operation with servo motor with brake, and symmetrically distributed clamp plate and hook claw component are driven along linear guide rail component sliding;Anti-falling detection component monitors wafer box clamping state and anti-falling by photoelectric component, this clamp replaces artificial handling, improves efficiency, reduces labor intensity, through orientation, force detection and multilayer protection, guarantee wafer box stable clamping, avoid damage and drop, adapt to the automation of semiconductor industry, high-precision, high safety requirement.

Description

Technical Field

[0001] This utility model relates to the field of automation equipment technology in the semiconductor industry, specifically a FOSB wafer box handling and packing robot gripper. Background Technology

[0002] In the semiconductor industry's production process, FOSB wafer boxes serve as the core carriers of wafers, requiring critical handling and packing operations before shipment. However, this stage currently faces numerous technical challenges: Firstly, FOSB wafer boxes are heavy, and traditional manual handling requires workers to exert sustained high physical exertion, easily leading to fatigue and decreased handling efficiency due to fatigue, making it difficult to meet the automation and efficiency requirements of semiconductor production lines. Secondly, wafers are high-precision, high-value products, demanding strict stability during handling. Uneven hand pressure or fluctuating movements during manual handling can cause the wafer box to shake, resulting in collisions and friction between the wafers and the box, causing surface damage or performance parameter deviations, directly impacting product yield. Furthermore, manual operation carries uncontrollable human error risks, such as hand slippage or misalignment during packing, which can cause the wafer box to fall accidentally. Since a single wafer box has extremely high economic value, a fall would result in significant economic losses.

[0003] Existing technologies that attempt to use simple mechanical clamps have failed to effectively solve the above problems due to structural design flaws: these clamps often lack stable transmission and guiding mechanisms, making it easy for wafer cassettes to open and close asynchronously or shift in position when clamping them; moreover, they are not equipped with precise force detection and anti-drop protection mechanisms, which may cause the wafer cassette to loosen due to insufficient clamping force or damage the wafer due to excessive force squeezing the cassette. At the same time, they cannot monitor the clamping status of the wafer cassette in real time, making it difficult to deal with emergencies such as power outages and mechanical failures, and still pose a high safety hazard. Utility Model Content

[0004] This utility model provides a robot fixture based on FOSB wafer box handling and packing, which solves the technical problems in the existing semiconductor industry where the traditional manual handling of FOSB wafer boxes is inefficient, prone to wafer damage and risk of falling, and the existing simple mechanical fixtures lack stable transmission guidance, accurate force detection and reliable anti-fall protection, making it difficult to adapt to the needs of automated production.

[0005] To achieve the above objectives, this utility model adopts the following technical solution: a FOSB wafer cassette handling and packing robot gripper, comprising a gripper frame assembly, a servo transmission assembly, an anti-drop detection assembly, and two sets of claw assemblies; the gripper frame assembly includes a robot flange and a gripper base plate vertically and fixedly connected to the robot flange, the robot flange being used to connect the gripper to an external robot; the servo transmission assembly includes a servo motor with a brake mechanism and a synchronous belt drive mechanism connected to the servo motor, the synchronous belt drive mechanism including a drive pulley assembly, an idler pulley assembly, a first clamping plate, and a second clamping plate, the synchronous belt forming a closed-loop motion between the drive pulley assembly and the idler pulley assembly, the first clamping plate and the second clamping plate rotating around the drive pulley assembly. The center of the axis connecting the component and the idler wheel assembly is symmetrically distributed and fixed to both sides of the synchronous belt respectively; two sets of hook assemblies are symmetrically arranged along the centerline of the length direction of the fixture base plate and are fixedly connected to the first clamping plate and the second clamping plate respectively; linear guide rail assemblies are arranged on both sides of the width direction of the fixture base plate, and the slider of the linear guide rail assembly is fixedly connected to the hook assemblies; the anti-drop detection assembly includes a drop detection photoelectric assembly set on the fixture base plate, whose detection light path passes through the detection hole located on the fixture base plate and covers the clamping area of ​​the two sets of hook assemblies, and also includes an opening detection slot type photoelectric assembly, a reset detection slot type photoelectric assembly and a clamping detection slot type photoelectric assembly arranged along the stroke direction of the hook assemblies to detect the clamping state of the two sets of hook assemblies.

[0006] Furthermore, this application also proposes that the fixture frame assembly further includes an idler wheel tensioning assembly, which is fixed to the fixture base plate and the idler wheel assembly is mounted on the idler wheel tensioning assembly. By adjusting the position of the idler wheel tensioning assembly, the distance between the idler wheel assembly and the drive pulley assembly can be changed, thereby adjusting the tension of the timing belt.

[0007] Furthermore, this application also proposes that the idler wheel tensioning assembly includes an adjusting block and a tensioning screw, the adjusting block is slidably engaged with the guide groove of the fixture base plate, and the adjusting block is detachably fixed to the fixture base plate by the tensioning screw.

[0008] Furthermore, this application also proposes that the servo drive assembly is equipped with a torque sensor, which is used to detect the clamping force when the servo drive assembly drives the claw assembly to clamp the FOSB wafer cassette. When the clamping force reaches a preset state, the torque sensor can feed back a signal to the servo motor to control the servo motor to stop driving.

[0009] Furthermore, this application also proposes that each set of claw assemblies includes a mounting base and a claw chuck, the claw chuck being detachably connected to the mounting base, and the clamping surface of the claw chuck being provided with an elastic buffer layer.

[0010] Furthermore, this application also proposes that the linear guide rail assembly includes a guide rail and a slider. The guide rail is fixed to both sides of the clamp base plate along the length direction of the clamp base plate and the slider is slidably mounted on the guide rail. The sliders on both sides are fixedly connected to the two ends of the mounting base of the claw assembly in the width direction.

[0011] Furthermore, this application also proposes that the mounting base of the hook assembly is fixedly connected to the first clamping plate or the second clamping plate.

[0012] Furthermore, this application also proposes that the linear guide rail assembly further includes a limiting block, which is fixed to both ends of the guide rail to limit the sliding stroke of the slider on the guide rail and prevent the slider from sliding beyond the guide rail range, causing the position of the claw assembly to shift.

[0013] Furthermore, this application also proposes that the anti-fall detection component further includes a detection plate, which is fixed on the mounting base and moves synchronously with the mounting base; when the claw assembly is in the open, reset or clamped state, the detection plate can enter the slot of the open detection slot photoelectric component, the reset detection slot photoelectric component or the clamping detection slot photoelectric component respectively, triggering the corresponding slot photoelectric component to output a status signal.

[0014] Furthermore, this application also proposes that the clamping surface of the claw chuck is provided with an elastic buffer layer of polyurethane.

[0015] Compared with the prior art, the beneficial effects of this utility model are:

[0016] This invention connects to an external robot via a robot flange, and, in conjunction with a servo transmission component, drives the hook assembly to automatically open and close, replacing manual handling, significantly reducing labor intensity and improving work efficiency. A linear guide provides stable guidance for the hook assembly, a torque sensor precisely controls the clamping force, and the elastic buffer layer of the hook chuck absorbs vibration, effectively preventing wafer cassette swaying and wafer damage, ensuring product quality. The multi-layer detection structure of the anti-drop detection component and the brake mechanism of the servo motor can monitor the clamping status in real time and respond to emergencies, preventing accidental wafer cassette drops and reducing economic losses. Simultaneously, the idler wheel tensioning component facilitates adjustment of the synchronous belt tension, and the limit block prevents component overtravel damage, improving equipment operational stability and service life. Overall, it is perfectly suited to the automated, high-precision, and high-safety production needs of the semiconductor industry. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 The three-dimensional fixture for the wafer box handling and packing robot of this utility model Figure 1 ;

[0019] Figure 2 The three-dimensional fixture for the wafer box handling and packing robot of this utility model Figure 2 ;

[0020] Figure 3 This is a front view of the wafer box handling and packing robot fixture of this utility model;

[0021] Figure 4 This is a top view of the wafer box handling and packing robot fixture of this utility model;

[0022] Figure 5 This utility model Figure 3 A cross-sectional view along the AA direction;

[0023] Figure 6 This utility model Figure 4 A cross-sectional view along the DD direction;

[0024] Figure 7 This utility model Figure 2 Enlarged schematic diagram of the structure at point A in the middle.

[0025] In the diagram: 1. Fixture frame assembly; 11. Robot flange; 12. Fixture base plate; 13. Idler wheel tensioning assembly; 14. Linear guide rail assembly; 121. Guide groove; 122. Detection hole; 131. Adjusting block; 132. Tensioning screw; 141. Guide rail; 142. Slider; 143. Limit block;

[0026] 2. Servo drive assembly; 21. Servo motor; 22. Planetary reducer; 23. Drive pulley assembly; 24. Synchronous belt; 25. First clamping plate; 26. Second clamping plate; 27. Idler pulley assembly;

[0027] 3. Anti-drop detection component; 31. Drop detection photoelectric component; 32. Opening detection slot type photoelectric component; 33. Reset detection slot type photoelectric component; 34. Clamping detection slot type photoelectric component; 35. Detection plate;

[0028] 4. Hook and claw assembly; 41. Mounting base; 42. Hook and claw chuck. Detailed Implementation

[0029] The technical solutions of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of the embodiments. The components of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application. It should be noted that similar reference numerals and letters in the following drawings indicate similar items; therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. Furthermore, in the description of this application, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0030] like Figure 1-7 As shown, this application proposes a FOSB wafer box handling and packing robot gripper, including a gripper frame assembly 1, a servo transmission assembly 2, an anti-drop detection assembly 3, and two sets of claw assemblies 4.

[0031] The fixture frame assembly 1 includes a robot flange 11 and a fixture base plate 12 vertically fixedly connected to the robot flange 11. The robot flange 11 is used to connect the fixture to an external robot. The fixture frame assembly 1 can be made of aluminum alloy to reduce weight. The robot flange 11 is connected to the external robot by high-strength bolts, suitable for FOSB wafer box handling, palletizing, and traying applications. The servo drive assembly 2 includes a servo motor 21 with a brake mechanism and a synchronous belt drive mechanism connected to the servo motor 21. The brake mechanism can automatically lock the output shaft of the servo motor 21 when the power is off. The synchronous belt drive mechanism includes a drive pulley assembly 23, an idler pulley assembly 27, a first clamping plate 25, and a second clamping plate 26. The synchronous belt 24 forms a closed loop motion between the drive pulley assembly 23 and the idler pulley assembly 27. The first clamping plate 25 and the second clamping plate 26 are symmetrically distributed about the center of the line connecting the axes of the drive pulley assembly 23 and the idler pulley assembly 27, and are respectively fixed on both sides of the synchronous belt 24. Two sets of claw assemblies 4 are symmetrically arranged along the centerline of the length direction of the clamp base plate 12 and are fixedly connected to the first clamping plate 25 and the second clamping plate 26 respectively. Linear guide rail assemblies 14 are arranged on both sides of the width direction of the clamp base plate 12. The slider 142 of the linear guide rail assembly 14 is fixedly connected to the claw assembly 4 by screws.

[0032] The anti-fall detection component 3 includes a fall detection photoelectric component 31 disposed on the fixture base plate 12. The fall detection photoelectric component 31 can be a diffuse reflection type photoelectric sensor. The detection hole 122 is disposed in the middle of the fixture base plate 12. Its detection light path passes through the detection hole 122 on the fixture base plate 12 and covers the clamping area of ​​the two sets of claw components 4. It also includes an opening detection groove type photoelectric component 32, a reset detection groove type photoelectric component 33 and a clamping detection groove type photoelectric component 34 arranged along the stroke direction of the claw components 4, which are respectively installed at the beginning and middle positions of the movement trajectory of the claw components 4, and are used to detect the clamping status of the two sets of claw components 4.

[0033] This technical solution uses a servo transmission component 2 to drive a synchronous belt 24, which in turn drives two sets of claw components 4 to open and close synchronously. Combined with a linear guide rail component 14, this achieves precise guidance, solving the problems of low efficiency and poor stability in manual handling. An anti-drop detection component 3 monitors the wafer cassette clamping status in real time to prevent accidental drops.

[0034] like Figure 4 As shown, this application further proposes that the fixture frame assembly 1 also includes an idler wheel tensioning assembly 13. The idler wheel tensioning assembly 13 is fixed to the fixture base plate 12, and the idler wheel assembly 27 is mounted on the idler wheel tensioning assembly 13. By adjusting the position of the idler wheel tensioning assembly 13, the distance between the idler wheel assembly 27 and the drive pulley assembly 23 can be changed, thereby adjusting the tension of the synchronous belt 24. Specifically, the idler wheel tensioning assembly 13 includes an adjusting block 131 and a tensioning screw 132. The adjusting block 131 is slidably engaged with the guide groove 121 of the fixture base plate 12. Specifically, the guide groove 121 can be a square groove. The adjusting block 131 is a square block, and the adjusting block 131 is clearance-fitted with the guide groove 121. The adjusting block 131 is provided with multiple elongated holes and can be detachably fixed to the fixture base plate 12 by the tensioning screw 132. The tensioning screw 132 can be an internal hexagon head screw.

[0035] This technical solution effectively solves the problem of decreased transmission accuracy caused by slack in the synchronous belt 24 transmission system due to long-term use, through an adjustable idler pulley tensioning mechanism. During semiconductor wafer cassette handling, precise control of the synchronous belt 24 tension ensures that the two sets of claw assemblies 4 always maintain synchronous movement, avoiding clamping position deviations caused by transmission errors.

[0036] Furthermore, this application proposes that the servo drive assembly 2 is equipped with a torque sensor, which can be a strain gauge or magnetoelastic sensor, installed between the output shaft of the servo motor 21 and the drive pulley assembly 23. The torque sensor is used to detect the clamping force when the servo drive assembly 2 drives the claw assembly 4 to clamp the FOSB wafer cassette. When the clamping force reaches a preset state, the torque sensor can feed back a signal to the servo motor 21 to control the servo motor 21 to stop driving. The preset state is set by the servo controller, and multiple thresholds can be set according to different specifications of FOSB wafer cassettes. When the measured torque reaches the threshold, the torque sensor outputs an analog signal, which is converted by an AD converter and transmitted to the driver of the servo motor 21 to trigger the servo motor 21 to brake. By quantitatively detecting the clamping force, both wafer cassette loosening due to insufficient clamping force and cassette deformation caused by overload clamping can be avoided.

[0037] like Figure 3 , Figure 7 As shown, this application further proposes that each set of claw components 4 includes a mounting base 41 and a claw chuck 42. The claw chuck 42 is detachably connected to the mounting base 41. The detachable claw chuck 42 can quickly adapt to FOSB wafer cassettes of different specifications, significantly improving the versatility of the fixture. The clamping surface of the claw chuck 42 is provided with an elastic buffer layer. The elastic buffer layer made of polyurethane is fixed to the metal substrate surface of the claw chuck 42 by bonding or molding processes. A secondary softening process is used to ensure the machining accuracy of the parts while reducing the hardness of the polyurethane to Rockwell hardness 40A to prevent the wafer cassette from being pinched or scratched. Preferably, the surface of the elastic buffer layer can be processed with anti-slip textures or groove arrays to increase the coefficient of friction with the contact surface of the wafer cassette.

[0038] The mounting base 41 of the claw assembly 4 is fixedly connected to the first clamping plate 25 or the second clamping plate 26. The mounting base 41 serves as a support structure for the claw assembly 4 and is fixedly connected to the clamping plate via bolts, ensuring that the first clamping plate 25 or the second clamping plate 26 can synchronously drive the claw assembly 4 to move. When the servo motor 21 drives the synchronous belt 24, the power is directly transmitted to the mounting base 41 via the first clamping plate 25 or the second clamping plate 26. Specifically, the first clamping plate 25 or the second clamping plate 26 is an L-shaped plate. The side of the L-shaped plate is fixed to the synchronous belt 24 with screws. Threaded holes can be machined on the top surface of the mounting base 41, and screws are used to fix it in place with through holes on the bottom surface of the L-shaped plate.

[0039] like Figure 3As shown, this application further proposes that the linear guide rail assembly 14 is provided in four sets, with each set of claw assembly 4 corresponding to two sets of linear guide rail assemblies 14. The symmetrical arrangement of the linear guide rail assemblies 14 on both sides solves the problem of off-center loading during the movement of the claw assembly 4, and provides stable support and guidance for the movement of the claw assembly 4. Each set of linear guide rail assembly 14 includes a guide rail 141 and a slider 142. The guide rail 141 is fixed to both sides of the clamp base plate 12 along the length direction of the clamp base plate 12 in the width direction. The slider 142 is slidably mounted on the guide rail 141. The sliders 142 on both sides are fixedly connected to the two ends of the mounting base 41 of the claw assembly 4 in the width direction. The connection between the mounting base 41 and the slider 142 is fixed with screws. Furthermore, the linear guide assembly 14 also includes a limiting block 143, which is fixed to both ends of the guide rail 141 to limit the sliding stroke of the slider 142 on the guide rail 141, preventing the slider 142 from sliding beyond the range of the guide rail 141 and causing the position of the claw assembly 4 to shift. The limiting block 143 can be made of metal and is installed in the threaded hole at the end of the guide rail 141 by bolt fastening. This technical solution effectively solves the stroke control problem of the claw assembly 4 when moving on the linear guide assembly 14 by adding a mechanical limiting structure.

[0040] like Figure 4 As shown, this application further proposes that the anti-drop detection component 3 also includes a detection plate 35. The detection plate 35 can be made of metal or high-rigidity plastic material. The detection plate 35 is fixed on the mounting base 41 and moves synchronously with the mounting base 41. When the claw assembly 4 is in the open, reset, or clamped state, the detection plate 35 can enter the slot of the open detection slot photoelectric component 32, the reset detection slot photoelectric component 33, or the clamping detection slot photoelectric component 34 respectively, triggering the corresponding slot photoelectric component to output a status signal. When the mounting base 41 moves the claw assembly 4, the detection plate 35 fixed on it moves synchronously. When it reaches the preset position, the detection plate 35 enters the sensing area of ​​the corresponding slot photoelectric component, thereby triggering the photoelectric signal output. This ensures timely and accurate feedback of the clamping status during wafer cassette handling, providing a reliable status judgment basis for anti-drop protection.

[0041] Working principle:

[0042] First, the external robot establishes a stable connection with the fixture through the robot flange 11 in the fixture frame assembly 1. In the initial state, the servo motor 21 with a brake mechanism in the servo transmission assembly 2 is in a power-off brake state to ensure that the claw assembly 4 remains in the reset position. The reset detection slot type photoelectric component 33 in the anti-fall detection assembly 3 monitors the position of the detection plate 35 in real time. The detection plate 35 is fixed on the mounting base 41 of the claw assembly 4. When the detection plate 35 enters the slot of the reset detection slot type photoelectric component 33, a reset signal is fed back, indicating that the two sets of claw assemblies 4 have symmetrically opened to the initial position along the center line of the length direction of the fixture base plate 12. The slider 142 of the linear guide rail assembly 14 is in the middle of the guide rail 141. The limit block 143 limits the initial stroke boundary of the slider 142 to avoid overtravel deviation.

[0043] Then, the wafer cassette clamping stage begins. The external robot moves the gripper above the FOSB wafer cassette. Upon receiving the clamping command, the servo motor 21 unlocks the brake mechanism, starts, and drives the synchronous belt 24. Power is transmitted to the planetary reducer 22 via the output shaft of the servo motor 21. The planetary reducer 22 reduces speed and increases torque, driving the active pulley assembly 23 to rotate. The active pulley assembly 23 drives the idler pulley assembly 27 to rotate synchronously via the synchronous belt 24, forming a closed-loop transmission. Since the first clamping plate 25 and the second clamping plate 26 are symmetrically distributed around the center of the line connecting the axes of the active pulley assembly 23 and the idler pulley assembly 27 and are respectively fixed on both sides of the synchronous belt 24, when the synchronous belt 24 rotates, it will drive the first clamping plate 25 and the second clamping plate 26 to move synchronously in opposite directions, thereby pulling the two sets of claw assemblies 4 closer to each other along the guide rail 141 of the linear guide assembly 14. During this process, the slider 142 of the linear guide assembly 14 is fixedly connected to the mounting base 41 of the claw assembly 4, providing stable guidance for the opening and closing of the claw assembly 4 and preventing positional displacement or shaking during clamping. At the same time, the torque sensor configured in the servo transmission assembly 2 detects the clamping force in real time. When the claw chuck 42 contacts the wafer cassette and reaches the preset clamping force, the torque sensor feeds back a signal to the servo motor 21, the servo motor 21 stops driving and the brake mechanism locks again, completing the stable clamping of the wafer cassette. The polyurethane elastic buffer layer on the clamping surface of the claw chuck 42 absorbs the impact force at the moment of contact, preventing damage to the wafer cassette or tearing of the sealing film.

[0044] During the wafer cassette handling and status monitoring phase, an external robot moves the fixture and the clamped wafer cassette to the packing position. During this process, the anti-drop detection component 3 continuously operates: the detection optical path of the drop detection photoelectric component 31 passes through the detection hole 122 of the fixture base plate 12, covering the clamping area. If the wafer cassette falls, the detection optical path is blocked, and the drop detection photoelectric component 31 immediately sends an alarm signal. Simultaneously, as the claw assembly 4 moves with the mounting base 41, the detection plate 35 moves synchronously. When the claw assembly 4 is in a clamping state, the detection plate 35 enters the slot of the clamping detection slot-type photoelectric component 34, sending a clamping status signal to ensure reliable clamping throughout the handling process. In the event of a sudden power outage or mechanical failure, the brake mechanism of the servo motor 21 will immediately lock the output shaft to prevent the synchronous belt 24 from loosening and causing the claw assembly 4 to open, thus preventing the wafer cassette from falling.

[0045] Finally, in the wafer cassette release and fixture reset stage, after the wafer cassette moves to the target packing position, the servo motor 21 receives the release command, the brake mechanism unlocks and reverses, driving the synchronous belt 24 to reverse transmission. The first clamping plate 25 and the second clamping plate 26 drive the two sets of hook assemblies 4 to move away from each other along the linear guide assembly 14, and the hook chuck 42 disengages from the wafer cassette. When the detection plate 35 moves to the slot of the opening detection slot type photoelectric component 32, it sends a feedback signal indicating that the opening is complete, the servo motor 21 stops running, and then the fixture returns to its initial position under the drive of the external robot. The detection plate 35 then re-enters the slot of the reset detection slot type photoelectric component 33, completing one handling and packing cycle. In addition, if the synchronous belt 24 becomes loose due to long-term use, the tension can be adjusted by adjusting the idler wheel tensioning assembly 13, loosening the tensioning screw 132, and moving the adjusting block 131 along the guide groove 121 of the fixture base plate 12 to change the distance between the idler wheel assembly 27 and the drive pulley assembly 23, thereby adjusting the tension of the synchronous belt 24 to ensure subsequent transmission accuracy.

[0046] The above description is merely an embodiment of this application and is not intended to limit the scope of protection of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.

Claims

1. A FOSB wafer box handling and packing robot gripper, characterized in that, include: The fixture frame assembly (1), the servo drive assembly (2), the anti-fall detection assembly (3), and two sets of claw assemblies (4); The fixture frame assembly (1) includes a robot flange (11) and a fixture base plate (12) that is vertically fixedly connected to the robot flange (11). The servo drive assembly (2) includes a servo motor (21) with a brake mechanism and a synchronous belt drive mechanism that is connected to the servo motor (21). The synchronous belt drive mechanism includes a drive pulley assembly (23), an idler assembly (27), a first clamping plate (25), and a second clamping plate (26). The synchronous belt (24) is wrapped around the drive pulley assembly (23) and the idler assembly (27). The first clamping plate (25) and the second clamping plate (26) are symmetrically distributed around the center point of the line connecting the axes of the drive pulley assembly (23) and the idler assembly (27), and are respectively fixed on both sides of the synchronous belt (24). Two sets of claw assemblies (4) are symmetrically arranged along the centerline of the length direction of the fixture base plate (12) and are fixedly connected to the first clamping plate (25) and the second clamping plate (26) respectively. Linear guide rail assemblies (14) are provided on both sides of the width direction of the fixture base plate (12). The slider (142) of the linear guide rail assembly (14) is fixedly connected to the claw assembly (4). The anti-fall detection component (3) includes a fall detection photoelectric component (31) set on the base plate (12) of the clamp, whose detection optical path passes through the detection hole (122) on the base plate (12) of the clamp and covers the clamping area of ​​the two sets of claw components (4). It also includes an opening detection slot type photoelectric component (32), a reset detection slot type photoelectric component (33) and a clamping detection slot type photoelectric component (34) arranged along the travel direction of the claw components (4) for detecting the clamping state of the two sets of claw components (4).

2. The FOSB wafer box handling and packing robot gripper according to claim 1, characterized in that: The clamp frame assembly (1) further includes an idler wheel tensioning assembly (13), which is fixed to the clamp base plate (12), and the idler wheel assembly (27) is mounted on the idler wheel tensioning assembly (13).

3. The FOSB wafer box handling and packing robot gripper according to claim 2, characterized in that: The idler wheel tensioning assembly (13) includes an adjusting block (131) and a tensioning screw (132). The adjusting block (131) is slidably engaged with the guide groove (121) of the fixture base plate (12). The adjusting block (131) is detachably fixed to the fixture base plate (12) by the tensioning screw (132).

4. The FOSB wafer cassette handling and packing robot gripper according to claim 1, characterized in that: The servo drive assembly (2) is equipped with a torque sensor.

5. A FOSB wafer cassette handling and packing robot gripper according to claim 1, characterized in that: Each of the hook assemblies (4) includes a mounting base (41) and a hook chuck (42). The hook chuck (42) is detachably connected to the mounting base (41), and the clamping surface of the hook chuck (42) is provided with an elastic buffer layer.

6. A FOSB wafer cassette handling and packing robot gripper according to claim 5, characterized in that: The linear guide rail assembly (14) includes a guide rail (141) and a slider (142). The guide rail (141) is fixed along the length direction of the fixture base plate (12) on both sides of the width direction. The slider (142) is slidably mounted on the guide rail (141). The sliders (142) on both sides are fixedly connected to the two ends of the mounting base (41) of the claw assembly (4) in the width direction.

7. A FOSB wafer cassette handling and packing robot gripper according to claim 5, characterized in that: The mounting base (41) of the hook assembly (4) is fixedly connected to the first clamping plate (25) or the second clamping plate (26).

8. A FOSB wafer cassette handling and packing robot gripper according to claim 5, characterized in that: The linear guide rail assembly (14) also includes a limiting block (143), which is fixed to both ends of the guide rail (141).

9. A FOSB wafer cassette handling and packing robot gripper according to claim 5, characterized in that: The anti-fall detection component (3) also includes a detection plate (35), which is fixed on the mounting base (41). The detection plate (35) can enter the slot of the opening detection slot type photoelectric component (32), the resetting detection slot type photoelectric component (33), or the clamping detection slot type photoelectric component (34) respectively.

10. A FOSB wafer cassette handling and packing robot gripper according to claim 5, characterized in that: The gripping surface of the hook chuck (42) is provided with an elastic buffer layer of polyurethane.

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