A surface treatment apparatus for germanium wafer processing

Abstract

This utility model relates to the field of semiconductor material processing technology, and in particular to a surface treatment apparatus for germanium wafer processing. The utility model provides such a surface treatment apparatus for germanium wafer processing, including a frame, a controller, electric guide rails, a clamping mechanism, a placement block, and a drag plate. The controller is installed on the front left side of the frame, and electric guide rails are installed on both the upper and lower sides of the rear of the frame. A clamping mechanism is slidably mounted on the upper electric guide rail. A placement block is fixedly connected to the left side of the frame, and a drag plate is slidably connected to the lower electric guide rail. The drag plate slides alternately on the placement block, and the placement block and the drag plate are on the same horizontal plane. This utility model, by setting up two polishing wheels (upper and lower) and a slidable drag plate, achieves rapid switching between single-sided and double-sided polishing modes, solving the problem that traditional equipment can only meet single process requirements, and improving the applicability and flexibility of the equipment.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor material processing technology, and in particular to a surface treatment device for processing germanium wafers. Background Technology

[0002] Germanium sheets are thin sheets cut from high-purity germanium single crystals. Due to their high transmittance of infrared light, they are widely used in high-end optical fields such as thermal imagers and aerospace lenses. However, the performance of germanium sheets needs to be improved through surface treatment (cleaning, polishing, coating, etc.) during the production process.

[0003] The surface treatment requirements for germanium wafers vary depending on their final application during the polishing process. If the germanium wafer is used as an optical element, typically only one side is used for transmitting or reflecting light, while the other side does not require the same treatment and is usually used for bonding or encapsulation. However, if the germanium wafer is used as a substrate for semiconductor devices (such as transistors and solar cells), double-sided polishing is required to maintain overall flatness and avoid problems caused by warping during subsequent processing. Existing polishing equipment can usually only meet one of the above-mentioned process requirements, so two different types of equipment are needed to complete these two types of processes separately. This not only increases equipment investment but also raises production costs.

[0004] Therefore, it is necessary to design a surface treatment device for germanium wafer processing. Utility Model Content

[0005] In order to overcome the shortcomings of existing polishing equipment that cannot flexibly switch between single-sided polishing and double-sided polishing, this utility model provides a surface treatment device for germanium sheet processing.

[0006] The technical implementation scheme of this utility model is as follows: A surface treatment device for germanium wafer processing includes a frame, a controller, electric guide rails, a clamping mechanism, a placement block, a drag plate, an electric push rod, a second motor, a polishing wheel, and an elastic element. The controller is installed on the left front part of the frame, and electric guide rails are installed on both the upper and lower sides of the rear part of the frame. The clamping mechanism is slidably mounted on the upper electric guide rail. A placement block is fixedly connected to the left side inside the frame, and a drag plate is slidably connected to the lower electric guide rail. The drag plate slides alternately on the placement block, and the placement block and the drag plate are on the same horizontal plane. In the initial state, the drag plate is located to the right of the placement block, and the rightmost end of the drag plate is an inclined surface. An electric push rod is installed on the upper right side inside the frame. Second motors are installed on the upper and lower sides of the right side inside the frame. The upper second motor is connected to the telescopic end of the electric push rod, and the lower second motor is slidably connected to the frame. Elastic elements are connected to the frame on both the front and rear sides of the lower second motor. Polishing wheels are connected to the lower output shaft of the upper second motor and the upper output shaft of the lower second motor. The two polishing wheels are horizontally aligned vertically. The edge of the lower polishing wheel is inclined. The inclined surfaces of the lower polishing wheel and the drag plate are complementary. In the initial state, the lower polishing wheel abuts against the lower part of the drag plate and is located below it. The elastic elements are in a compressed state.

[0007] In a preferred embodiment of this utility model, the clamping mechanism includes a connecting rod, clamping blocks, a bidirectional screw, a first motor, and a thickness detector. The connecting rod is slidably connected to the upper electric guide rail. Clamping blocks are slidably connected to both the left and right sides of the connecting rod. A bidirectional screw is threadedly connected between the front sides of the two clamping blocks. The bidirectional screw is rotatably connected to the connecting rod. The first motor is installed on the right front part of the connecting rod. The output shaft of the first motor is connected to the bidirectional screw. The thickness detector is installed in the middle of the rear side of the connecting rod.

[0008] In a preferred embodiment of the present invention, a polishing liquid storage tank and a spray head are also included. The polishing liquid storage tank is fixedly connected to the upper right side of the frame, and the spray head is connected and communicated to the left side of the polishing liquid storage tank. The spray head port faces the middle position of the two polishing wheels.

[0009] In a preferred embodiment of the present invention, the device further includes a waste liquid recovery tank, a filter element, a connecting pipe, and a pump body. The waste liquid recovery tank is connected to the lower right side of the frame and is located below the polishing wheel. The filter element is connected to the lower part of the waste liquid recovery tank. A connecting pipe is connected between the filter element and the inside of the polishing liquid storage tank, and the pump body is connected to the upper part of the connecting pipe.

[0010] In a preferred embodiment of this utility model, foot pads are also included, and multiple foot pads are provided on the lower part of the frame.

[0011] In a preferred embodiment of this utility model, it also includes observation windows, with multiple observation windows provided on the front and rear sides of the upper part of the frame.

[0012] Beneficial effects:

[0013] 1. This utility model, by setting up two polishing wheels (upper and lower) and a sliding drag plate, realizes the rapid switching between single-sided polishing and double-sided polishing modes, solves the problem that traditional equipment can only meet the needs of a single process, and improves the applicability and flexibility of the equipment.

[0014] 2. This utility model, through the combination of a clamping mechanism and a thickness measuring instrument, can automatically adjust the clamping width according to germanium sheets of different sizes, and optimize polishing parameters through thickness measurement data, thereby improving the stability of clamping and polishing accuracy. At the same time, it also realizes the efficient recycling and reuse of polishing liquid through a waste liquid recovery tank, reducing chemical consumption and environmental pollution. Attached Figure Description

[0015] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0016] Figure 2 This is a three-dimensional structural diagram of the components of this utility model, including the placement block, the first motor, and the thickness detection device.

[0017] Figure 3 This is a three-dimensional structural diagram of the connecting rod, clamping block, and bidirectional screw of this utility model.

[0018] Figure 4 This is a three-dimensional structural diagram of the components of this utility model, including the electric push rod, the second motor, and the polishing wheel.

[0019] Figure 5 This is a three-dimensional structural diagram of the placement block and drag plate components of this utility model.

[0020] Figure 6 This is a three-dimensional structural diagram of the elastic element, waste liquid recovery tank, and observation window of this utility model.

[0021] The components in the diagram are labeled as follows: 1-Frame, 101-Controller, 2-Electric guide rail, 3-Placement block, 4-Connecting rod, 5-Clamping block, 6-Bidirectional screw, 7-First motor, 8-Thickness gauge, 9-Drag plate, 10-Electric push rod, 11-Second motor, 12-Polishing wheel, 13-Elastic component, 14-Waste liquid recovery tank, 15-Filter element, 16-Connecting pipe, 17-Polishing liquid storage tank, 18-Spray head, 19-Pump body, 102-Foot pad, 103-Observation window. Detailed Implementation

[0022] Example: A surface treatment apparatus for processing germanium wafers, such as... Figures 1-6As shown, the device includes a frame 1, a controller 101, an electric guide rail 2, a clamping mechanism, a placement block 3, a drag plate 9, an electric push rod 10, a second motor 11, a polishing wheel 12, and an elastic element 13. The controller 101 is mounted on the front left side of the frame 1. Electric guide rails 2 are mounted on both the upper and lower rear sides of the frame 1. A clamping mechanism is slidably mounted on the upper electric guide rail 2. A placement block 3 is fixedly connected to the left side inside the frame 1, and a drag plate 9 is slidably connected to the lower electric guide rail 2. The drag plate 9 slides alternately on the placement block 3, and the placement block 3 and the drag plate 9 are on the same horizontal plane. Initially, the drag plate 9 is located to the right of the placement block 3, and the rightmost end of the drag plate 9 is inclined. An electric push rod 10 is mounted on the upper right side inside the frame 1. The push rod 10 and the upper and lower sides of the right side of the frame 1 are equipped with second motors 11. The upper second motor 11 is connected to the telescopic end of the electric push rod 10, and the lower second motor 11 is slidably connected to the frame 1. The lower second motor 11 is connected to the frame 1 on both the front and rear sides. Polishing wheels 12 are connected to the lower output shaft of the upper second motor 11 and the upper output shaft of the lower second motor 11. The two polishing wheels 12 are horizontally aligned vertically. The edge of the lower polishing wheel 12 is an inclined surface. The inclined surfaces of the lower polishing wheel 12 and the drag plate 9 are complementary. In the initial state, the lower polishing wheel 12 abuts against the lower part of the drag plate 9 and is located below it. The elastic element 13 is in a compressed state.

[0023] like Figure 2 and Figure 3 As shown, the clamping mechanism includes a connecting rod 4, clamping blocks 5, a bidirectional screw 6, a first motor 7, and a thickness gauge 8. The connecting rod 4 is slidably connected to the upper electric guide rail 2. Clamping blocks 5 are slidably connected to both the left and right sides of the connecting rod 4. The bidirectional screw 6 is threaded between the front sides of the two clamping blocks 5. The bidirectional screw 6 is rotatably connected to the connecting rod 4. The first motor 7 is installed on the front right side of the connecting rod 4. The output shaft of the first motor 7 is connected to the bidirectional screw 6. The thickness gauge 8 is installed in the middle of the rear side of the connecting rod 4.

[0024] like Figure 4 As shown, it also includes a polishing liquid storage tank 17 and a spray head 18. The polishing liquid storage tank 17 is fixedly connected to the upper right side of the frame 1. The left side of the polishing liquid storage tank 17 is connected to and communicates with the spray head 18. The port of the spray head 18 faces the middle position of the two polishing wheels 12.

[0025] like Figure 1 , Figure 4 and Figure 6As shown, it also includes a waste liquid recovery tank 14, a filter element 15, a connecting pipe 16, and a pump body 19. The waste liquid recovery tank 14 is connected to the lower right side of the frame 1. The waste liquid recovery tank 14 is located below the polishing wheel 12. The filter element 15 is connected to the lower part of the waste liquid recovery tank 14. The filter element 15 is connected to the interior of the polishing liquid storage tank 17 by a connecting pipe 16. The upper part of the connecting pipe 16 is connected to the pump body 19.

[0026] like Figure 1 , Figure 2 and Figure 6 As shown, it also includes foot pads 102 and observation windows 103. Multiple foot pads 102 are provided on the lower part of the frame 1. The foot pads 102 are made of rubber material and are used to enhance the stability of the whole machine and reduce vibration transmission. Multiple observation windows 103 are provided on the front and rear sides of the upper part of the frame 1, which facilitates the operator to monitor the polishing process in real time and ensure the stability of the process.

[0027] When using this equipment, the operator first places the germanium sheet to be processed on the placement block 3, and starts the first motor 7 through the controller 101, driving the bidirectional screw 6 to rotate, thereby driving the two clamping blocks 5 to close, realizing automatic clamping of the germanium sheet. At the same time, the thickness detector 8 measures the thickness of the germanium sheet and feeds the data back to the controller 101. The system automatically adjusts the polishing parameters accordingly to ensure process accuracy. If single-sided polishing is selected, the operator can drive the clamping mechanism to move to the right through the electric guide rail 2 above, driving the clamped germanium sheet into the space between the two polishing wheels 12. Then, the controller 101 issues a command to control the electric push rod 10 to push the second motor 11 above and its connected polishing wheel 12 down, so that it contacts the upper surface of the germanium sheet, and begins the single-sided polishing operation on the upper surface of the workpiece.

[0028] During this process, the spray head 18 continuously sprays polishing fluid between the two polishing wheels 12. This polishing fluid not only reduces the surface hardness of the germanium sheet and improves the mechanical grinding efficiency, but also acts as a lubricating medium to reduce frictional heat generation and prevent material damage caused by localized overheating. The waste liquid generated during polishing is collected by the waste liquid recovery tank 14 located below, and after preliminary purification through the filter element 15, it is pumped back to the polishing fluid storage tank 17 via the pump body 19 to achieve recycling and reduce chemical waste.

[0029] If the double-sided polishing mode is selected, the operator can drive the drag plate 9 to slide to the left via the electric guide rail 2 below until it no longer obstructs the polishing wheel 12 below. At this time, the elastic element 13, which is in a compressed state in the initial state, releases its elastic force and pushes the second motor 11 below and the polishing wheel 12 connected to it to move upward until the upper and lower polishing wheels 12 clamp the germanium sheet in the middle. Then, the controller 101 starts the two second motors 11, driving the upper and lower polishing wheels 12 to run synchronously and perform uniform polishing on the upper and lower surfaces of the germanium sheet.

[0030] When it is necessary to switch back to single-sided polishing mode, the operator can control the lower electric guide rail 2 to drive the drag plate 9 to slide to the right to complete the reset. During the reset process, since the right end of the drag plate 9 has an inclined surface, and the edge of the lower polishing wheel 12 also has a complementary inclined surface, as the drag plate 9 moves to the right, it will gradually push the lower polishing wheel 12 downward, compressing the elastic element 13, and finally making the drag plate 9 return to the position above the lower polishing wheel 12, restoring the single-sided polishing preparation state. Thus, a surface treatment device for germanium sheet processing is realized, integrating functions such as free switching between single and double-sided polishing, adaptive clamping, intelligent detection, and polishing fluid circulation. Repeating the above steps allows for continuous operation.

Claims

1. A surface treatment apparatus for processing germanium sheets, characterized in that, The assembly includes a frame (1), a controller (101), an electric guide rail (2), a clamping mechanism, a placement block (3), a drag plate (9), an electric push rod (10), a second motor (11), a polishing wheel (12), and an elastic element (13). The controller (101) is installed on the left front part of the frame (1). Electric guide rails (2) are installed on both the upper and lower sides of the rear part of the frame (1). A clamping mechanism is slidably installed on the upper electric guide rail (2). A placement block (3) is fixedly connected to the left side inside the frame (1). A drag plate (9) is slidably connected to the lower electric guide rail (2). The drag plate (9) slides alternately on the placement block (3), and the placement block (3) and the drag plate (9) are on the same horizontal plane. In the initial state, the drag plate (9) is located to the right of the placement block (3), and the rightmost end of the drag plate (9) is an inclined surface. The upper right side inside the frame (1) An electric push rod (10) is installed on the frame (1). The upper and lower sides of the right side of the frame (1) are equipped with a second motor (11). The upper second motor (11) is connected to the telescopic end of the electric push rod (10). The lower second motor (11) is slidably connected to the frame (1). The lower second motor (11) is connected to the frame (1) on both the front and rear sides. The frame (1) is connected to an elastic element (13). The lower output shaft of the upper second motor (11) and the upper output shaft of the lower second motor (11) are both connected to polishing wheels (12). The two polishing wheels (12) are horizontally aligned. The edge of the lower polishing wheel (12) is an inclined surface. The inclined surfaces of the lower polishing wheel (12) and the drag plate (9) are complementary. In the initial state, the lower polishing wheel (12) abuts against the lower part of the drag plate (9) and is located below it. The elastic element (13) is compressed.

2. The surface treatment apparatus for processing germanium sheets according to claim 1, characterized in that, The clamping mechanism includes a connecting rod (4), a clamping block (5), a bidirectional screw (6), a first motor (7), and a thickness measuring instrument (8). The connecting rod (4) is slidably connected to the upper electric guide rail (2). The clamping blocks (5) are slidably connected to both the left and right sides of the connecting rod (4). The bidirectional screw (6) is threaded between the front sides of the two clamping blocks (5). The bidirectional screw (6) is rotatably connected to the connecting rod (4). The first motor (7) is installed on the right side of the front part of the connecting rod (4). The output shaft of the first motor (7) is connected to the bidirectional screw (6). The thickness measuring instrument (8) is installed in the middle of the rear side of the connecting rod (4).

3. The surface treatment apparatus for germanium sheet processing according to claim 2, characterized in that, It also includes a polishing liquid storage tank (17) and a spray head (18). The polishing liquid storage tank (17) is fixed to the upper right side of the frame (1). The left side of the polishing liquid storage tank (17) is connected to and communicates with the spray head (18). The port of the spray head (18) faces the middle position of the two polishing wheels (12).

4. The surface treatment apparatus for processing germanium sheets according to claim 3, characterized in that, It also includes a waste liquid recovery tank (14), a filter element (15), a connecting pipe (16) and a pump body (19). The waste liquid recovery tank (14) is connected to the lower right side of the frame (1). The waste liquid recovery tank (14) is located below the polishing wheel (12). The filter element (15) is connected to the lower middle part of the waste liquid recovery tank (14). The filter element (15) is connected to the polishing liquid storage tank (17) by a connecting pipe (16). The pump body (19) is connected to the upper part of the connecting pipe (16).

5. A surface treatment apparatus for processing germanium sheets according to claim 4, characterized in that, It also includes foot pads (102), and multiple foot pads (102) are provided on the lower part of the frame (1).

6. A surface treatment apparatus for processing germanium sheets according to claim 5, characterized in that, It also includes observation windows (103), with multiple observation windows (103) provided on the front and rear sides of the upper part of the frame (1).

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