A radio frequency coil transfer frame for etching equipment

Abstract

This utility model discloses a radio frequency coil transfer rack for etching equipment. It relates to the field of radio frequency coil technology and includes a coil and a placement tray, as well as several guide rails mounted on the placement tray. Two support rods are welded to the bottom side of the coil, each located within one of the guide rails. The coil is laid on the top side of the placement tray, and a baffle is fixed to the top side of the guide rails. The advantages of this utility model are: the movement of the positioning component within the guide rails improves the smoothness of the positioning component during operation and allows for the fixing of coils of different sizes. Furthermore, the cooperation between the pressing component and the positioning component enhances the stability of the coil on the placement tray, thus preventing positional shifts during transportation and further preventing collisions. The support rods effectively prevent deformation of the coil portion outside the placement tray due to road bumps.

Description

Technical Field

[0001] This utility model relates to the field of radio frequency coil technology, specifically to a radio frequency coil transfer frame for etching equipment. Background Technology

[0002] Etching machines are primarily used in the aerospace, machinery, and signage industries. Etching technology is widely applied to reduce the weight of instrument panels, nameplates, and thin workpieces that are difficult to process using traditional methods. In semiconductor and circuit board manufacturing processes, etching is an indispensable technique.

[0003] Currently, when radio frequency coils are transported, they are usually placed on a pallet first and then transported by truck. During the transport process, when the truck travels on uneven roads, it will cause bumps and vibrations. During this period, the radio frequency coils may shift or even collide with each other due to the bumps of the truck, which may cause the coils to be damaged and unable to be used normally. Utility Model Content

[0004] The purpose of this invention is to provide a radio frequency coil transfer frame for etching equipment.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a radio frequency coil transfer frame for etching equipment, comprising a coil and a placement tray, and several guide rails disposed on the placement tray. Two support rods are welded to the bottom side of the coil, and the two support rods are respectively located in two of the guide rails. The coil is laid on the top side of the placement tray, and a baffle is fixed to the top side of the guide rails. A pressing component and a positioning component are respectively installed in the other two guide rails. The pressing component and the positioning component are used to prevent the coil from shifting during transportation.

[0006] As a further embodiment of this utility model: the pressing assembly includes a slider, which is slidably connected to one of the guide rail frames. A support plate is fixed to the top side of the slider. A limiting groove is formed on one side of the support plate. A pressing plate a is slidably connected in the limiting groove. An mounting plate is fixed to the top side of the support plate. A threaded hole is formed on the top side of the mounting plate. A threaded rod is threaded into the threaded hole. An assist frame a is fixed to the top end of the threaded rod. A through hole is formed on the top side of the pressing plate a. A slot is formed on the bottom side of the pressing plate a at the through hole. A limiting plate is fixed at the bottom end of the threaded rod at the slot after passing through the through hole. A guide rod is fixed to the side of the support plate away from the limiting groove. A spring a is movably sleeved on the outer wall of the guide rod. One end of the spring a is fixedly connected to one side of one of the baffles. The other end of the spring a is fixed to the side of the support plate away from the limiting groove. The end of the guide rod away from the support plate moves through one side of one of the baffles. A handle a is fixed to the side of the guide rod away from the support plate.

[0007] As a further embodiment of this utility model: the diameter of the slot is larger than the diameter of the limiting disc, and the diameter of the through hole is larger than the diameter of the threaded rod.

[0008] As a further embodiment of this utility model: the positioning component includes a limiting plate, which is slidably connected to another guide rail frame. A threaded hole is provided on one side of the limiting plate, and a lead screw is engaged in the threaded hole. The two ends of the lead screw respectively movably pass through one side of the other two guide rail frames. An assist frame b is fixed to one end of the lead screw. Two circular holes are provided on the top side of the limiting plate, and a circular rod is movably connected in the circular holes. A lower pressure plate b is fixed to the bottom end of the circular rod. A spring b is movably sleeved on the outer side wall of one of the circular rods. One end of the spring b is fixed to the inner side wall of the top of the limiting plate, and the other end of the spring b is fixedly connected to the top side of the lower pressure plate b. A handle b is fixed to the top of one of the circular rods, and a positioning plate is fixed to the bottom side of the lower pressure plate b.

[0009] As a further embodiment of this utility model: a clamping assembly is installed on the limiting plate, the clamping assembly includes a hydraulic rod, the hydraulic rod is fixed to the top side of the limiting plate, a connecting plate is fixed to the top of the hydraulic rod, a steering seat is fixed to both sides of the connecting plate, a locking rod is fixed to the side of the steering seat away from the connecting plate, a movable seat is rotatably connected to the outer wall of the locking rod, and the sides of the two movable seats that are close to each other are fixedly connected to the limiting plate.

[0010] As a further embodiment of this utility model, a positioning pin is provided at the center position of the top side of the placement tray.

[0011] As a further embodiment of this utility model: the positioning plate is made of rubber in one piece, and one side of the positioning plate is arc-shaped.

[0012] Compared with the prior art, the beneficial effects of this utility model by adopting the above technical solution are as follows:

[0013] 1. This utility model improves the smoothness of the positioning component during operation by moving the positioning component within the guide rail frame. It can also fix coils of different sizes. Furthermore, the cooperation between the pressing component and the positioning component can improve the stability of the coil on the placement tray, thereby preventing the coil from shifting position during transportation and further preventing it from being bumped. The support rod can effectively prevent the coil part outside the placement tray from deforming due to road bumps.

[0014] 2. This utility model can restrict the position of the lower pressure plate b through the clamping component, and then quickly position the coils of different sizes through the positioning plate. Finally, by releasing the clamping component from the lower pressure plate b, the position of the coil is fixed. This can improve the working efficiency when fixing coils of different sizes, and also improve the stability of the coil during transportation.

[0015] Other advantages, objectives and features of this invention will be set forth in part in the description which follows, and in part will be apparent to those skilled in the art from the following examination or study, or may be taught from the practice of this invention. Attached Figure Description

[0016] Figure 1 This is a top view of the structure in an embodiment of the present utility model;

[0017] Figure 2 This is a partial structural diagram of an embodiment of the present utility model;

[0018] Figure 3 This is a partial structural diagram of the lead screw in an embodiment of this utility model;

[0019] Figure 4 This is a partial structural diagram of the pressing component in an embodiment of the present invention;

[0020] Figure 5 This is a partial structural diagram of the positioning component in an embodiment of the present utility model;

[0021] Figure 6 This is a partial structural diagram of the clamping component in an embodiment of the present invention.

[0022] In the diagram: 1. Coil; 2. Placement plate; 3. Guide rail frame; 4. Support rod; 5. Baffle; 6. Pressing assembly; 61. Slider; 62. Support plate; 63. Limiting groove; 64. Pressing plate a; 65. Mounting plate; 66. Threaded hole; 67. Threaded rod; 68. Assist frame a; 69. Through hole; 610. Slot; 611. Limiting plate; 612. Guide rod; 613. Spring a; 614. Handle a; 7. Positioning assembly; 71. Limiting plate; 72. Threaded hole; 73. Lead screw; 74. Assist frame b; 75. Round hole; 76. Round rod; 77. Spring b; 78. Handle b; 79. Positioning plate; 710. Pressing plate b; 8. Clamping assembly; 81. Hydraulic rod; 82. Connecting plate; 83. Steering seat; 84. Locking rod; 85. Movable seat; 9. Positioning pin. Detailed Implementation

[0023] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings. It should be noted that the description of these embodiments is for the purpose of helping to understand this utility model, but does not constitute a limitation on this utility model.

[0024] Furthermore, the technical features involved in the various embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0025] Please see the appendix Figure 1 -Appendix Figure 6 This utility model discloses a radio frequency coil transfer frame for etching equipment, including a coil 1 and a placement tray 2, as well as several guide rails 3 set on the placement tray 2. A positioning pin 9 is provided at the center of the top side of the placement tray 2. Two support rods 4 are welded to the bottom side of the coil 1, and the two support rods 4 are respectively located in two of the guide rails 3. The coil 1 is laid on the top side of the placement tray 2. A baffle 5 is fixed on the top side of the guide rail 3. A pressing component 6 and a positioning component 7 are respectively installed in the other two guide rails 3. The pressing component 6 and the positioning component 7 are used to prevent the coil 1 from being displaced during transportation.

[0026] In embodiment 1, the pressing assembly 6 includes a slider 61, which is slidably connected to one of the guide rails 3. A support plate 62 is fixed to the top side of the slider 61. A limiting groove 63 is formed on one side of the support plate 62, and a pressing plate a64 is slidably connected in the limiting groove 63. A mounting plate 65 is fixed to the top side of the support plate 62. A threaded hole 66 is formed on the top side of the mounting plate 65, and a threaded rod 67 is threadedly connected in the threaded hole 66. An assist frame a68 is fixed to the top of the threaded rod 67. A through hole 69 is formed on the top side of the pressing plate a64, and a slot 610 is formed on the bottom side of the pressing plate a64 at the through hole 69. The bottom end of the threaded rod 67 passes through the through hole 69. A limiting disc 611 is fixed at the slot 610. A guide rod 612 is fixed on the side of the support plate 62 away from the limiting groove 63. A spring a613 is movably sleeved on the outer wall of the guide rod 612. One end of the spring a613 is fixedly connected to one side of one of the baffles 5. The other end of the spring a613 is fixed to the side of the support plate 62 away from the limiting groove 63. The end of the guide rod 612 away from the support plate 62 moves through one side of one of the baffles 5. A handle a614 is fixed on the side of the guide rod 612 away from the support plate 62. The diameter of the slot 610 is larger than the diameter of the limiting disc 611. The diameter of the through hole 69 is larger than the diameter of the threaded rod 67.

[0027] Specifically, pulling handle a614 causes guide rod 612 to move within one of the baffles 5. As guide rod 612 moves, it causes support plate 62 and slider 61 within guide rail 3 to move synchronously. Support plate 62 compresses spring a613, and simultaneously, as support plate 62 moves, it causes lower pressure plate, mounting plate 65, threaded rod 67, assist bracket a68, and limiting plate 611 to move towards the side closer to handle a614. Then, the inner center ring of coil 1 is fitted onto the outside of positioning pin 9, thus ensuring coil 1 is in the center area of ​​placement plate 2. The two support rods 4 at the bottom of the RF coil are inserted into the corresponding two guide rails 3, preventing coil 1 from rotating during transport. Then, the coil is slowly released... Open handle a614, and the elasticity of spring a613 drives support plate 62 and guide rod 612 to move towards coil 1. The movement of support plate 62 drives slider 61 to move within guide rail frame 3. When one side of slider 61 contacts coil 1, rotating assist frame a68 drives threaded rod 67 to rotate downward within threaded hole 66. At the same time, the rotation of threaded rod 67 drives limiting plate 611 to rotate downward within through hole 69 and slot 610 of lower pressure plate a64. While rotating, it drives lower pressure plate a64 to move downward within limiting groove 63. When lower pressure plate a64 contacts coil 1, stop rotating assist frame a68. This can improve the working efficiency when fixing coil 1, and also improve the effect after fixing coil 1.

[0028] In embodiment 2, the positioning component 7 includes a limiting plate 71, which is slidably connected to another guide rail frame 3. A threaded hole 72 is provided on one side of the limiting plate 71, and a lead screw 73 is engaged in the threaded hole 72. The two ends of the lead screw 73 are respectively movably passed through one side of the other two guide rail frames 3. An assist frame b74 is fixed to one end of the lead screw 73. Two round holes 75 are provided on the top side of the limiting plate 71, and a round rod 76 is movably connected in the round holes 75. A lower pressure plate b710 is fixed to the bottom end of the round rod 76. A spring b77 is movably sleeved on the outer side wall of one of the round rods 76. One end of the spring b77 is fixed to the inner side wall of the top of the limiting plate 71, and the other end of the spring b77 is fixedly connected to the top side of the lower pressure plate b710. A handle b78 is fixed to the top of one of the round rods 76, and a positioning plate 79 is fixed to the bottom side of the lower pressure plate b710. The positioning plate 79 is made of rubber in one piece, and one side of the positioning plate 79 is arc-shaped.

[0029] Specifically, the rotating assist frame b74 drives the lead screw 73 to rotate. When the lead screw 73 rotates, it engages and drives the limiting plate 71 to move within the guide rail frame 3. When the limiting plate 71 moves, it drives the clamping assembly 8, the two round rods 76, the lower pressure plate b710, the spring b77, the handle b78, and the positioning plate 79 to move synchronously. When the positioning plate 79 contacts the coil 1, the handle b78 is lifted, and then the clamping assembly 8 releases the restriction on the lower pressure plate b710. Finally, the handle b78 is released, and the elasticity of the spring b77 drives the movement of the coil. The pressure plate b710, the positioning plate 79, and the two round rods 76 move downwards simultaneously. When the bottom side of the pressure plate b710 contacts the top side of the coil 1, the coil 1 is further fixed. This can further improve the stability of the coil 1 during transportation and prevent the coil 1 from shifting due to road bumps during transportation. This can reduce the impact caused by the displacement of the coil 1. Since the positioning plate 79 is made of rubber, it can better prevent the coil 1 from being scratched during transportation.

[0030] In embodiment 3, a clamping assembly 8 is installed on the limiting plate 71. The clamping assembly 8 includes a hydraulic rod 81, which is fixed to the top side of the limiting plate 71. A connecting plate 82 is fixed to the top of the hydraulic rod 81. A steering seat 83 is fixed to both sides of the connecting plate 82. A locking rod 84 is fixed to the side of the steering seat 83 away from the connecting plate 82. A movable seat 85 is rotatably connected to the outer wall of the locking rod 84. The sides of the two movable seats 85 that are close to each other are fixedly connected to the limiting plate 71.

[0031] Specifically, when the hydraulic rod 81 is activated, the output end of the hydraulic rod 81 extends or retracts, causing the two steering seats 83 to move. When the two rotating seats move, they respectively cause the two locking rods 84 to move within the movable seat 85. This allows for more convenient and faster restriction or release of the lower pressure plate b710.

[0032] Working principle:

[0033] First, pulling handle a614 moves guide rod 612 within one of the baffles 5. As guide rod 612 moves, it causes support plate 62 and slider 61 within guide rail 3 to move synchronously. Support plate 62 compresses spring a613, and simultaneously, as support plate 62 moves, it causes lower pressure plate, mounting plate 65, threaded rod 67, assist bracket a68, and limiting plate 611 to move closer to handle a614. Then, the inner center ring of coil 1 is fitted onto the outside of positioning pin 9, thus ensuring coil 1 is in the center area of ​​placement plate 2, and causing the two support rods 4 at the bottom of the RF coil to... Insert the coil 1 into the corresponding two guide rail brackets 3 to prevent it from rotating during transportation. Then, slowly release the handle a614. The elasticity of the spring a613 drives the support plate 62 and the guide rod 612 to move towards the coil 1. The movement of the support plate 62 causes the slider 61 to move within the guide rail bracket 3. When one side of the slider 61 contacts the coil 1, the rotating assist bracket a68 drives the threaded rod 67 to rotate downward within the threaded hole 66. At the same time, the rotation of the threaded rod 67 drives the limiting plate 611 to rotate downward within the through hole 69 and the slot 610 of the lower pressure plate a64. The rotation also causes... The lower pressure plate a64 moves downward within the limiting groove 63. When the lower pressure plate a64 contacts the coil 1, the rotating assist frame a68 stops rotating. Then, the rotating assist frame b74 drives the lead screw 73 to rotate. When the lead screw 73 rotates, it engages and drives the limiting plate 71 to move within the guide rail frame 3. When the limiting plate 71 moves, it drives the clamping assembly 8, the two round rods 76, the lower pressure plate b710, the spring b77, the handle b78, and the positioning plate 79 to move synchronously. When the positioning plate 79 contacts the coil 1, the handle b78 is lifted, and then the clamping assembly 8 releases the restriction on the lower pressure plate b710. Finally, the handle b78 is released. 78. The spring b77 causes the lower pressure plate b710, the positioning plate 79, and the two round rods 76 to move downwards simultaneously. When the bottom side of the lower pressure plate b710 contacts the top side of the coil 1, the coil 1 is fixed. When the lower pressure plate b710 needs to be released, the hydraulic rod 81 is activated. When the output end of the hydraulic rod 81 extends and retracts, it drives the two steering seats 83 to move. When the two steering seats move, they respectively drive the two locking rods 84 to move within the movable seat 85. When the locking rods 84 disengage from the lower pressure plate b710, the lower pressure plate b710 is released. At this point, the entire working process ends.

[0034] The terms "front," "back," "left," "right," "top," and "bottom" all refer to the figures in the accompanying drawings. Figure 1 Based on.

[0035] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the scope of protection of this utility model.

[0036] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings, but the present invention is not limited to the described embodiments.

[0037] For those skilled in the art, various changes, modifications, substitutions, and alterations to these embodiments without departing from the principles and spirit of this utility model will still fall within the protection scope of this utility model.

Claims

1. A radio frequency coil transfer rack for an etching apparatus, comprising a coil (1) and a placement tray (2), and a plurality of guide rails (3) disposed on the placement tray (2), characterized in that: Two support rods (4) are welded to the bottom side of the coil (1). The two support rods (4) are located in two of the guide rail frames (3). The coil (1) is laid on the top side of the placement tray (2). A baffle (5) is fixed on the top side of the guide rail frame (3). A pressing component (6) and a positioning component (7) are installed in the other two guide rail frames (3). The pressing component (6) and the positioning component (7) are used to prevent the coil (1) from being displaced during transportation.

2. The radio frequency coil transfer frame for etching equipment according to claim 1, characterized in that: The pressing assembly (6) includes a slider (61), which is slidably connected to one of the guide rail frames (3). A support plate (62) is fixed to the top side of the slider (61). A limit groove (63) is opened on one side of the support plate (62). A pressing plate a (64) is slidably connected in the limit groove (63). A mounting plate (65) is fixed to the top side of the support plate (62). A threaded hole (66) is opened on the top side of the mounting plate (65). A threaded rod (67) is threadedly connected in the threaded hole (66). An assist frame a (68) is fixed to the top of the threaded rod (67). A through hole (69) is opened on the top side of the pressing plate a (64). A bottom part of the pressing plate a (64) is located at the through hole (69). The bottom end of the threaded rod (67) passes through the through hole (69) and is fixed at the slot (610) with a limiting plate (611). A guide rod (612) is fixed on the side of the support plate (62) away from the limiting groove (63). A spring a (613) is movably sleeved on the outer wall of the guide rod (612). One end of the spring a (613) is fixedly connected to one side of one of the baffles (5). The other end of the spring a (613) is fixed to the side of the support plate (62) away from the limiting groove (63). The end of the guide rod (612) away from the support plate (62) moves through one side of the baffle (5). A handle a (614) is fixed on the side of the guide rod (612) away from the support plate (62).

3. The radio frequency coil transfer frame for etching equipment according to claim 2, characterized in that: The diameter of the slot (610) is greater than the diameter of the limiting plate (611), and the diameter of the through hole (69) is greater than the diameter of the threaded rod (67).

4. The radio frequency coil transfer frame for etching equipment according to claim 1, characterized in that: The positioning component (7) includes a limiting plate (71), which is slidably connected to another guide rail frame (3). A threaded hole (72) is provided on one side of the limiting plate (71), and a lead screw (73) is engaged in the threaded hole (72). The two ends of the lead screw (73) respectively movably pass through one side of the other two guide rail frames (3). An auxiliary frame b (74) is fixed to one end of the lead screw (73). Two round holes (75) are provided on the top side of the limiting plate (71), and the round holes (75) are movable. A round rod (76) is movably connected, and a lower pressure plate b (710) is fixed at the bottom end of the round rod (76). A spring b (77) is movably sleeved on the outer side wall of one of the round rods (76). One end of the spring b (77) is fixed to the inner side wall of the top end of the limiting plate (71), and the other end of the spring b (77) is fixedly connected to the top side of the lower pressure plate b (710). A handle b (78) is fixed at the top end of one of the round rods (76), and a positioning plate (79) is fixed at the bottom side of the lower pressure plate b (710).

5. The radio frequency coil transfer frame for etching equipment according to claim 4, characterized in that: A clamping assembly (8) is installed on the limiting plate (71). The clamping assembly (8) includes a hydraulic rod (81). The hydraulic rod (81) is fixed to the top side of the limiting plate (71). A connecting plate (82) is fixed to the top of the hydraulic rod (81). A steering seat (83) is fixed to both sides of the connecting plate (82). A locking rod (84) is fixed to the side of the steering seat (83) away from the connecting plate (82). A movable seat (85) is rotatably connected to the outer wall of the locking rod (84). The two movable seats (85) are fixedly connected to the limiting plate (71) on the side that is close to each other.

6. The radio frequency coil transfer frame for etching equipment according to claim 1, characterized in that: A positioning pin (9) is provided at the center of the top side of the placement tray (2).

7. The radio frequency coil transfer frame for etching equipment according to claim 4, characterized in that: The positioning plate (79) is made of rubber in one piece, and one side of the positioning plate (79) is arc-shaped.

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