A biaxial error compensator

By designing a two-axis error compensator, the deviation problem caused by errors during the assembly robot's gripping process was solved, achieving high-precision flexible movement and locking, simplifying the control structure, and improving gripping accuracy and stability.

CN224429340UActive Publication Date: 2026-06-30HANGZHOU BAISIHE TECH CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
HANGZHOU BAISIHE TECH CO LTD
Filing Date
2025-09-18
Publication Date
2026-06-30

AI Technical Summary

Technical Problem

During the process of assembly robots or robotic arms grasping workpieces, production errors and positioning errors cause deviations between the product and the grasping mechanism in the X and Y axes, resulting in the product failing to accurately enter the fixture or being damaged in quality, and increasing the extra burden on the robot. Existing grasping and locking structures are bulky and complex to control.

Method used

A two-axis error compensator is adopted, including an upper flange seat, a lower flange seat, a middle plate seat, a first guide rail unit, a second guide rail unit, and a piston unit. The position of the lower flange seat relative to the upper flange seat is locked by air pressure, realizing flexible movement and precise gripping of the X and Y axes, and locking the product position after gripping.

Benefits of technology

It achieves high-precision flexible planar movement, simplifies the control structure, avoids position changes of the compensator during movement, reduces the overall volume, and improves grasping accuracy and stability.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure CN224429340U_ABST
    Figure CN224429340U_ABST
Patent Text Reader

Abstract

This utility model relates to a biaxial error compensator, comprising an upper flange seat and a lower flange seat. The upper flange seat includes a tube body and a first air inlet channel. A middle plate seat is arranged around the tube body. A first guide rail unit is mounted on the upper flange seat and slidably connected to the middle plate seat. A second guide rail unit is mounted on the lower flange seat and slidably connected to the middle plate seat. A piston unit is slidably mounted on the tube body. Under the air inlet pressure of the first air inlet channel, the piston unit moves to abut against the lower flange seat to lock the offset position of the lower flange seat relative to the upper flange seat. It can accurately grasp products at any position within its range of motion, with high grasping precision. After grasping, the coaxially arranged piston unit abuts against and locks the lower flange seat, fixing the lower flange seat relative to the upper flange seat and preventing position changes during compensator movement, making locking convenient.
Need to check novelty before this filing date? Find Prior Art

Description

Technical Field

[0001] This utility model relates to the field of automated flexible connection technology, and in particular to a two-axis error compensator. Background Technology

[0002] During the assembly process of a robot or robotic arm gripping and assembling a workpiece, the gripping mechanism needs to pick up the workpiece from the gripping point and move it to the assembly point for assembly. However, manufacturing errors and positioning errors exist in the gripping mechanism. During the gripping process, these errors cause positional deviations between the product and the gripping mechanism in the X and Y axes, leading to technical problems such as the product failing to enter the fixture or quality damage. This also causes the robot or mechanism to bear abnormal flexural loads, compromising its accuracy and lifespan. Existing external gripping and locking structures result in a bulky overall size and complex control structure, thus requiring improvement. Utility Model Content

[0003] To overcome the problems existing in related technologies, this utility model provides a two-axis error compensator to solve the technical problem of assembly misalignment or damage caused by errors, and the inability to lock the product position after gripping.

[0004] According to a first aspect of the present invention, a biaxial error compensator is provided, the biaxial error compensator comprising:

[0005] An upper flange seat and a lower flange seat are arranged opposite each other to form an installation space. The upper flange seat includes a tube body portion protruding into the installation space and a first air intake channel communicating with the internal space of the tube body portion.

[0006] A middle plate seat is arranged around the tube body portion;

[0007] The first guide rail unit is installed on the upper flange seat and slidably connected to the middle plate seat;

[0008] The second guide rail unit is installed on the lower flange seat and slidably connected to the middle plate seat. The sliding direction of the first guide rail unit and the sliding direction of the second guide rail unit are perpendicular to each other.

[0009] A piston unit is slidably mounted on the tube body. Under the intake pressure of the first intake channel, the piston unit moves to abut against the lower flange seat to lock the offset position of the lower flange seat relative to the upper flange seat.

[0010] In one embodiment, the inner ring wall of the middle plate seat is spaced apart from the tube body by a first movable distance, and the outer ring wall of the middle plate seat is spaced apart from the inner wall of the installation space by a second movable distance, wherein the first movable distance is greater than or equal to the second movable distance.

[0011] In one embodiment, the upper flange seat further includes a guide tube protruding in a tubular shape, the guide tube and the tube body are coaxially arranged, an air intake chamber is formed between the guide tube and the tube body, a portion of the piston unit is inserted into the air intake chamber, and the first air intake channel communicates with the air intake chamber.

[0012] In one embodiment, the piston unit includes a piston body that is slidably and sealingly connected to the tube body, a piston reset member sleeved on the piston body, and a support member installed on the tube body. The two ends of the piston reset member elastically abut against the step surfaces of the support member and the piston body, respectively.

[0013] In one embodiment, the biaxial error compensator further includes a plunger assembly that slides on the upper flange seat and / or the piston unit, the upper flange seat being provided with a second air intake channel toward the plunger assembly, and the movable end of the plunger assembly extending out of the piston unit and protruding toward the lower flange seat;

[0014] The lower flange seat is provided with a positioning part, and the movable end of the plunger assembly abuts against the positioning part to reset and center the lower flange seat.

[0015] In one embodiment, the movable end of the plunger assembly is provided with a conical or spherical surface; the lower flange seat is configured with a centering groove adapted to the conical surface.

[0016] In one embodiment, the biaxial error compensator includes a disc detachably mounted on the lower flange seat, and the positioning part is disposed on the disc.

[0017] In one embodiment, the plunger assembly includes a plunger body that slides on the upper flange seat, a plunger elastic element fitted on the plunger body, and a plunger sealing ring. The two ends of the plunger elastic element abut against the stepped surfaces of the piston unit and the plunger body, respectively, and the plunger sealing ring seals the sliding mating surfaces of the plunger body and the upper flange seat.

[0018] In one embodiment, the first guide rail unit includes two sets of first guide rail groups symmetrically distributed on both sides of the piston unit. The first guide rail group includes a first guide rail component, a second guide rail component, and a rolling element movable between the first guide rail component and the second guide rail component. The first guide rail component is fixedly connected to the upper flange seat, and the second guide rail component is fixedly connected to the middle plate seat.

[0019] In one embodiment, at least a portion of the first guide rail unit is embedded in the upper flange seat and / or the middle plate seat.

[0020] The technical solution provided by the embodiments of this utility model can include the following beneficial effects: The compensator uses a first guide rail unit and a second guide rail unit to achieve flexible movement within the X-axis and Y-axis planar range, realizing flexible planar movement, and can accurately grasp products at any position within the range of motion with high grasping accuracy. After grasping, the coaxially arranged piston unit abuts and locks the lower flange seat, so that the lower flange seat is fixed relative to the upper flange seat, avoiding changes in position during the movement of the compensator, and making locking convenient. The piston unit is built into the compensator and is pressurized and locked by air pressure, simplifying the control structure and not increasing the original structural volume. Attached Figure Description

[0021] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with the present invention and, together with the description, serve to explain the principles of the present invention.

[0022] Figure 1 This is a schematic diagram of a two-axis error compensator according to one embodiment.

[0023] Figure 2 This is a top view schematic diagram of a biaxial error compensator according to one embodiment.

[0024] Figure 3 yes Figure 2 A cross-sectional schematic diagram of FF.

[0025] Figure 4 yes Figure 2 A cross-sectional schematic diagram of GG.

[0026] Figure 5 yes Figure 2 A schematic diagram of the cross-section of EE.

[0027] In the figure, the upper flange seat is 10; the first air intake channel is 11; the pipe body is 12; the guide pipe is 13; the upper slide groove is 14; the second air intake channel is 15; the lower flange seat is 20; the positioning part is 21; the tray is 22; the first guide rail unit is 30; the first guide rail component is 31; the second guide rail component is 32; the rolling element is 33; the second guide rail unit is 40; the middle plate seat is 50; the first slide groove is 51; the piston unit is 60; the piston body is 61; the piston sealing ring is 62; the piston reset component is 63; the support component is 64; the plunger assembly is 70; the plunger body is 71; the moving end is 711; the plunger sealing ring is 72; and the plunger elastic component is 73. Detailed Implementation

[0028] In the accompanying drawings of this utility model, the same or similar reference numerals correspond to the same or similar components. In the description of this utility model, it should be understood that if terms such as "upper," "lower," "left," "right," "inner," and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the drawings are only for illustrative purposes and should not be construed as limiting this utility model. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0029] like Figures 1 to 5 As shown, this utility model provides a two-axis error compensator. As part of a gripping mechanism or a robotic arm, the two-axis error compensator can achieve movable gripping and locking to maintain the gripping posture and position of the product unchanged.

[0030] The biaxial error compensator includes an upper flange seat 10, a lower flange seat 20, a middle plate seat 50, a first guide rail unit 30, a second guide rail unit 40, and a piston unit 60. The upper flange seat 10 and lower flange seat 20 are columnar structures, and at least one of them is provided with a mounting groove. The upper flange seat 10 and lower flange seat 20 are arranged opposite each other, forming an installation space corresponding to the mounting groove positions. There is a movable gap between the upper flange seat 10 and lower flange seat 20. The middle plate seat 50, the first guide rail unit 30, the second guide rail unit 40, and the piston unit 60 are all located within the installation space, resulting in a high degree of installation concentration.

[0031] The upper flange seat 10 has a partial tubular protrusion forming a tube body 12, which is located within the installation space. The middle plate seat 50 has an annular structure, allowing the tube body 12 to pass through it. The inner annular wall of the middle plate seat 50 is spaced apart from the tube body 12 by a first movable distance, and the outer annular wall of the middle plate seat 50 is spaced apart from the inner wall of the installation space by a second movable distance. The first and second movable distances form an annular movable space, allowing the middle plate seat 50 to move at any angle within the installation space. The first movable distance is greater than or equal to the second movable distance, ensuring that the middle plate seat 50 can move within the installation space without colliding with the tube body 12.

[0032] The first guide rail unit 30 is mounted on the upper flange seat 10 and slidably connected to the middle plate seat 50. The first guide rail unit 30 includes two sets of first guide rails symmetrically distributed on both sides of the piston unit 60. Each first guide rail set is a linear movable guide rail, enabling the middle plate seat 50 to slide in the first direction, referred to as X-axis sliding. The second guide rail unit 40 is mounted on the lower flange seat 20 and slidably connected to the middle plate seat 50. The second guide rail unit 40 includes two sets of second guide rails symmetrically distributed on both sides of the piston unit 60, enabling the lower flange seat 20 to slide in the second direction, referred to as Y-axis sliding.

[0033] like Figure 3 and Figure 4 As shown, preferably, the first guide rail unit 30 and the second guide rail unit 40 have identical structures, resulting in high motion consistency. The sliding directions of the first guide rail unit 30 and the second guide rail unit 40 are perpendicular to each other, enabling high-precision correction of motion at any angle within the plane. The first guide rail unit 30 and the second guide rail unit 40 have low coefficients of friction, allowing for flexible movement and ensuring smooth position correction. The compensator is compact in size and can be applied to high-precision assembly applications. The two sets of first guide rails and the two sets of second guide rails improve connection strength and ensure movement stability.

[0034] In one embodiment, the upper flange seat 10 has an upper groove that forms part of the installation space. The lower flange seat 20 has a lower groove that forms another part of the installation space. The surrounding area of ​​the pipe body 12 forms an internal space, and the upper flange seat 10 has a first air inlet channel 11 that communicates with the internal space. The first air inlet channel 11 is connected to an air source, which can be supplied with a gas medium at a preset pressure.

[0035] The piston unit 60 is slidably mounted on the tube body 12. Under the action of the intake pressure of the first intake channel 11, the piston unit 60 moves to abut against the lower flange seat 20 to lock the offset position of the lower flange seat 20 relative to the upper flange seat 10.

[0036] The coaxially mounted piston unit 60 abuts against and locks the lower flange seat 20, thus fixing the lower flange seat 20 relative to the upper flange seat 10 and preventing position changes during compensator movement, making locking convenient. The piston unit 60 is built into the compensator and is locked by air pressure, simplifying the control structure and not increasing the original structural volume.

[0037] In one embodiment, the upper flange seat 10 further includes a tubular protruding guide tube 13, which is coaxially arranged with the tube body portion 12, and the outer diameter of the guide tube 13 is smaller than the inner diameter of the tube body portion 12. An air intake chamber is formed between the guide tube 13 and the tube body portion 12, and the space of the air intake chamber is controllable. A portion of the piston unit 60 is inserted into the air intake chamber, and the first air intake passage 11 communicates with the air intake chamber.

[0038] The piston unit 60 has an annular protrusion at its end, which inserts into the intake chamber. The piston unit 60 and the tube body 12 are slidably connected. Preferably, the piston unit 60 has a piston sealing ring 62, which slidably seals with the tube body 12. The protrusion can adjust the pressure of the pressure application area of ​​the first intake passage 11, as well as the intake range.

[0039] The piston unit 60 includes a piston body 61, a piston reset member 63 sleeved on the piston body 61, and a support member 64 installed on the tube body 12. The two ends of the piston reset member 63 elastically abut against the support member 64 and the stepped surface of the piston body 61, respectively. The piston body 61 and the tube body 12 are slidably sealed together, wherein a piston sealing ring 62 is sleeved on the outer peripheral wall of the piston body 61 to form a sliding sealing structure.

[0040] The support member 64 is installed on the inner wall of the tube body 12 and is positioned opposite to the stepped surface of the piston body 61. Optionally, the support member 64 can be a hollow threaded member, multiple pin protrusions, or a retaining ring to form the abutment part of the piston reset member 63. The threaded member can be an externally threaded ring or an internally threaded nut. Preferably, the support member 64 is configured as a retaining ring for easy disassembly and fixation to the tube body 12.

[0041] The piston reset component 63 is configured as a piston spring, which is sleeved on the front end of the piston body 61 to form a driving force for elastic reset.

[0042] like Figures 3 to 5 As shown, the working process of piston unit 60 is as follows: When a preset pressure is input into the first intake channel 11, the piston body 61 overcomes the elastic force of the piston spring and presses against the lower flange seat 20 to maintain the stable position of the lower flange seat 20. When the pressure in the first intake channel 11 is released, the piston spring pushes the piston body 61 to move and reset, and the lower flange seat 20 resumes its movement.

[0043] To further improve the resetting and centering effect of the lower flange seat 20, in one embodiment, the biaxial error compensator further includes a plunger assembly 70 that slides on the upper flange seat 10 and / or the piston unit 60. The movable end 711 of the plunger assembly 70 extends out of the piston unit 60 and protrudes towards the lower flange seat 20. The plunger assembly 70 passes through the piston unit 60. Preferably, the plunger assembly 70 and the piston unit 60 are coaxially arranged. Further, the upper flange seat 10 is configured as a cylindrical structure, and the centerline of the plunger assembly 70 is coaxial with the centerline of the upper flange seat 10.

[0044] The upper flange 10 is provided with a second air intake channel 15 facing the plunger assembly 70. The second air intake channel 15 is connected to an air source and receives gas at a preset pressure. The plunger assembly 70 extends under the gas pressure and moves toward the lower flange 20. The lower flange 20 is provided with a positioning part 21, at least part of which is located within the extension range of the movable end 711 of the plunger assembly 70. The movable end 711 of the plunger assembly 70 abuts against the positioning part 21 to center the lower flange 20. Preferably, the connection port of the first air intake channel 11 and the connection port of the second air intake channel 15 are located on the periphery of the upper flange 10 to facilitate lateral connection of air ducts.

[0045] After the piston unit 60 releases its lock on the lower flange seat 20, the movable end 711 of the plunger assembly 70 contacts and positions itself with the positioning part 21, thereby centering the lower flange seat 20. At least part of the contact surfaces of the movable end 711 and the positioning part 21 are curved or inclined surfaces to facilitate centering adjustment. Optionally, if the movable end 711 is configured as a protrusion with a gradually decreasing cross-section, the positioning part 21 is configured as a groove structure that matches the recess. Optionally, if the movable end 711 is configured as a recess structure with a gradually decreasing cross-section, the positioning part 21 is configured as a boss structure that matches the protrusion.

[0046] In one embodiment, the movable end 711 of the plunger assembly 70 is provided with a conical or spherical surface, the cross-section of which gradually decreases, thereby forming a centering guiding effect. The positioning part 21 provides a centering groove adapted to the conical surface for the lower flange seat 20, wherein the centering groove is frustoconical or spherical, thereby enabling the movable end 711 to be centered. When the movable end 711 abuts against the lowest point of the mating part of the centering groove, the lower flange seat 20 is centered.

[0047] like Figures 3 to 5 As shown, in one embodiment, the biaxial error compensator includes a tray 22 detachably mounted on the lower flange seat 20, and a positioning part 21 disposed on the tray 22. The tray 22 and the lower flange seat 20 are detachably connected, enabling replaceable operation. Furthermore, the material of the tray 22 can be flexibly adjusted and independently processed to meet different functional requirements. The tray 22 can achieve requirements such as localized wear resistance, good lubrication, and easy replacement. For example, the tray 22 can be made of copper.

[0048] Part of the plunger assembly 70 slides on the upper flange seat 10. Specifically, part of the plunger assembly 70 slides on the guide tube 13. The piston body 61 is provided with a central hole. The plunger assembly 70 slides in the central hole and is slidably connected to the piston body 61.

[0049] The plunger assembly 70 includes a plunger body 71, a plunger elastic element 73 sleeved on the plunger body 71, and a plunger sealing ring 72. The plunger body 71 slides on the guide tube 13 of the upper flange seat 10. The second air intake channel 15 connects to the internal space of the guide tube 13 to push the plunger body 71 to slide by air pressure. Preferably, the end of the plunger body 71 is provided with a concave push groove. The plunger sealing ring 72 seals the sliding mating surface of the plunger body 71 and the guide tube 13, that is, the plunger sealing ring 72 seals the sliding seal of the pipe wall of the plunger body 71 and the guide tube 13.

[0050] The plunger elastic element 73 can be an elastic return element such as a spring. Both ends of the plunger elastic element 73 abut against the stepped surfaces of the piston unit 60 and the plunger body 71, respectively. The stepped bore is approximately a stepped bore structure, with a stepped protruding ring at the opening of the central bore. One end of the plunger elastic element 73 abuts against the stepped protruding ring. The plunger body 71 has a stepped shaft structure, and the other end of the plunger elastic element 73 abuts against the stepped surface of the plunger body 71.

[0051] Furthermore, a plunger sealing ring 72 is disposed on the outer peripheral wall of the plunger body 71, and the plunger sealing ring 72 and the hole wall of the central hole slide in fit to form a sliding seal.

[0052] In one embodiment, the first guide rail assembly includes a first guide rail component 31, a second guide rail component 32, and a rolling element 33 movable between the first guide rail component 31 and the second guide rail component 32. The first guide rail component 31 is fixedly connected to the upper flange seat 10, and the second guide rail component 32 is fixedly connected to the middle plate seat 50. Both the first guide rail component 31 and the second guide rail component 32 are provided with sliding grooves, and the rolling element 33 is located in the oppositely arranged sliding grooves. The two sets of first guide rail assemblies can be jointly supported on both sides of the piston unit 60, thereby enabling the middle plate seat 50 to be connected to the upper flange seat 10.

[0053] Based on the same principle, the second guide rail group connects the middle plate seat 50 and the lower flange seat 20. The difference is that the movement direction of the second guide rail group is perpendicular to the movement direction of the first guide rail group.

[0054] To reduce the overall height of the biaxial error compensator, in one embodiment, at least a portion of the first guide rail unit 30 is recessed into the upper flange seat 10 and / or the middle plate seat 50. The upper flange seat 10 and / or the middle plate seat 50 are partially recessed to accommodate a portion of the first guide rail unit 30, thereby reducing the distance between the upper flange seat 10 and the middle plate seat 50 corresponding to the installation position of the first guide rail unit 30. For example, the upper flange seat 10 is provided with an upper sliding groove 14, and the middle plate seat 50 is provided with a first sliding groove 51. The upper sliding groove 14 and the first sliding groove 51 are arranged opposite to each other, and at least a portion of the first guide rail unit 30 is located in the upper sliding groove 14 and the first sliding groove 51, respectively. The gap between the middle plate seat 50 and the bottom of the mounting groove is small, reducing the overall height dimension.

[0055] In a specific application scenario of the biaxial error compensator, the upper flange seat 10 is connected to the assembly mechanism, and the lower flange seat 20 is connected to the gripper fixture that grips the part to be installed. Because there are X-axis and Y-axis positional deviations between the part to be installed and the gripper fixture, when the gripper fixture approaches the part to be installed, one side of the gripper fixture contacts the part to be installed first. The lateral thrust generated pushes the lower flange seat 20 and the middle plate seat 50 to perform X-axis and Y-axis movements until the gripper fixture and the part to be installed are aligned and gripped.

[0056] Subsequently, gas at a preset pressure is introduced into the first air intake channel 11 to drive the piston unit 60 to move. The piston body 61 abuts against the lower flange seat 20, thereby locking the gripper fixture and the part to be installed in the gripping position. The part to be installed is moved to the product, and the part to be installed and the product body are coaxial or completely overlapped in position.

[0057] The first intake passage 11 stops the preset pressure gas, and the piston elastic element pushes the piston body 61 to reset. The second intake passage 15 introduces the preset pressure gas to drive the plunger body 71 to move. The movable end 711 of the plunger body 71 enters the positioning part 21 to achieve the correction of the lower flange seat 20.

[0058] It should be understood that this application is not limited to the precise structure described above and shown in the accompanying drawings, and various modifications and changes can be made without departing from its scope. This application is intended to cover any variations, uses, or adaptations of the present invention that follow the general principles of this application and include common knowledge or customary technical means in the art that are not disclosed in this invention.

Claims

1. A two-axis error compensator characterized by, The biaxial error compensator includes: An upper flange seat and a lower flange seat are arranged opposite each other to form an installation space. The upper flange seat includes a tube body portion protruding into the installation space and a first air intake channel communicating with the internal space of the tube body portion. A middle plate seat is arranged around the tube body portion; The first guide rail unit is installed on the upper flange seat and slidably connected to the middle plate seat; The second guide rail unit is installed on the lower flange seat and slidably connected to the middle plate seat. The sliding direction of the first guide rail unit and the sliding direction of the second guide rail unit are perpendicular to each other. A piston unit is slidably mounted on the tube body. Under the intake pressure of the first intake channel, the piston unit moves to abut against the lower flange seat to lock the offset position of the lower flange seat relative to the upper flange seat.

2. The two-axis error compensator of claim 1, wherein, The inner ring wall of the middle plate seat is spaced apart from the tube body by a first movable distance, and the outer ring wall of the middle plate seat is spaced apart from the inner wall of the installation space by a second movable distance, wherein the first movable distance is greater than or equal to the second movable distance.

3. The two-axis error compensator of claim 1, wherein, The upper flange seat also includes a tubular protruding guide tube, which is coaxially arranged with the tube body. An air intake chamber is formed between the guide tube and the tube body, and part of the piston unit is inserted into the air intake chamber. The first air intake channel is connected to the air intake chamber.

4. The two-axis error compensator of claim 3, wherein, The piston unit includes a piston body that is slidably and sealingly connected to the tube body, a piston reset member sleeved on the piston body, and a support member installed on the tube body. The two ends of the piston reset member elastically abut against the step surfaces of the support member and the piston body, respectively.

5. The two-axis error compensator of claim 1, wherein, The biaxial error compensator further includes a plunger assembly that slides on the upper flange seat and / or the piston unit. The upper flange seat is provided with a second air intake channel facing the plunger assembly. The movable end of the plunger assembly extends out of the piston unit and protrudes towards the lower flange seat. The lower flange seat is provided with a positioning part, and the movable end of the plunger assembly abuts against the positioning part to reset and center the lower flange seat.

6. The biaxial error compensator according to claim 5, characterized in that, The movable end of the plunger assembly is provided with a conical or spherical surface; the lower flange seat is provided with a centering groove adapted to the conical surface.

7. The biaxial error compensator according to claim 5, characterized in that, The biaxial error compensator includes a tray that is detachably installed on the lower flange seat, and the positioning part is disposed on the tray.

8. The biaxial error compensator according to claim 5, characterized in that, The plunger assembly includes a plunger body that slides on the upper flange seat, a plunger elastic element fitted on the plunger body, and a plunger sealing ring. The two ends of the plunger elastic element abut against the stepped surfaces of the piston unit and the plunger body, respectively, and the plunger sealing ring seals the sliding mating surfaces of the plunger body and the upper flange seat.

9. The biaxial error compensator according to claim 1, characterized in that, The first guide rail unit includes two sets of first guide rail groups symmetrically distributed on both sides of the piston unit. The first guide rail group includes a first guide rail component, a second guide rail component, and a rolling element that moves between the first guide rail component and the second guide rail component. The first guide rail component is fixedly connected to the upper flange seat, and the second guide rail component is fixedly connected to the middle plate seat.

10. The biaxial error compensator according to claim 1, characterized in that, At least a portion of the first guide rail unit is embedded in the upper flange seat and / or the middle plate seat.