An integrated vacuum air circulation system for the exterior of a vacuum evaporation machine

Abstract

This invention proposes an integrated vacuum pumping system for the exterior of a vacuum evaporation machine, comprising a coarse pumping pipe and a fine pumping pipe. A first three-way pipe and the fine pumping pipe are connected by a telescopic motor that drives the valve cover to rise and fall, enabling rapid switching between the coarse and fine pumping lines and avoiding vacuum fluctuations. Under the precise pressure control of the telescopic motor, the valve cover maintains uniform contact pressure on the sealing surface. The transition pipe directly connects the coarse and fine pumping pipes, eliminating flow channel redundancy in traditional multi-valve systems and reducing gas flow resistance. The telescopic motor is linked with a vacuum sensor to automatically switch the pumping mode based on the cavity pressure threshold, avoiding errors caused by manual intervention. The integrated three-way pipe reduces external connecting components, shrinks the equipment size, and lowers manufacturing costs and maintenance complexity.

Description

Technical Field

[0001] This utility model belongs to the field of vacuum evaporation equipment technology, and more specifically, relates to an integrated vacuum air circulation system outside a vacuum evaporation equipment. Background Technology

[0002] In vacuum evaporation equipment, the coordinated operation of the coarse and fine evaporation vacuum systems is crucial for achieving a high-efficiency and stable vacuum environment. Traditional vacuum systems often employ independent coarse and fine evaporation tubes, switching gas paths manually or via solenoid valves, which presents the following problems:

[0003] 1. Low switching efficiency: The switching between coarse and fine pumping modes requires the coordinated operation of multiple valves, which results in a slow response speed and a longer pumping cycle (for example, when switching from coarse to fine pumping, the coarse pumping valve needs to be closed and then the fine pumping valve needs to be opened, resulting in vacuum fluctuations in the middle).

[0004] 2. Poor sealing reliability: Frequent valve switching can easily lead to wear on the sealing surface, especially under high temperature and high pressure conditions, which can easily cause leakage and require frequent maintenance (the actual life of traditional valves is less than 100,000 cycles).

[0005] 3. Increased system complexity: Multiple valves and complex piping layouts increase equipment size and cost, and dead zones exist in the gas flow path, affecting extraction efficiency (local resistance loss can reach more than 15%).

[0006] 4. Inaccurate vacuum control: The timing of switching between coarse and fine evacuation pipelines depends on human experience, which can easily lead to excessive residual gas concentration in the chamber due to operational delays (such as oxygen concentration fluctuations exceeding ±50ppm).

[0007] Therefore, there is an urgent need for an integrated and highly reliable vacuum pipeline switching system to improve pumping efficiency and process stability. Utility Model Content

[0008] Therefore, to solve the above-mentioned technical problems, this utility model proposes an integrated vacuum pumping system for the outside of a vacuum evaporation machine, including a coarse pumping pipe 10 and a fine pumping pipe 60. The first three-way pipe 20 and the fine pumping pipe 60 are connected by a telescopic motor driving the valve cover to rise and fall, realizing rapid switching between the coarse and fine pumping pipes 60 and avoiding vacuum fluctuations. Under the precise pressure control of the telescopic motor, the valve cover has uniform contact pressure on the sealing surface. The transition pipe 40 directly connects the coarse pumping pipe 10 and the fine pumping pipe 60, eliminating the flow channel redundancy of the traditional multi-valve system and reducing gas flow resistance. The telescopic motor is linked with the vacuum sensor and automatically switches the pumping mode according to the cavity pressure threshold, avoiding errors caused by manual intervention. The integrated three-way pipe reduces external connecting parts, shrinks the equipment size, and reduces manufacturing costs and maintenance complexity.

[0009] An integrated vacuum path system for the exterior of a vacuum evaporation machine includes a coarse suction pipe 10 and a fine suction pipe 60. One end of the coarse suction pipe 10 is connected to the working chamber of the evaporation machine, and the other end is connected to a coarse vacuum device. The fine suction pipe 60 is characterized in that one end is connected to the coarse suction pipe 10 via a transition pipe 40, and the other end is connected to the fine vacuum device. A first three-way pipe 20 is provided between the coarse suction pipe 10 and the transition pipe 40. The upper end of the first three-way pipe 20 is connected to a first telescopic motor 21, and the lower end of the first three-way pipe 20 is connected to the coarse suction pipe 10. One side end of the first three-way pipe 20 is connected to the transition pipe 40. The telescopic shaft of the first telescopic motor 21 is connected to a first valve cover 22, which is raised and lowered. When the first valve cover 22 abuts against the connection between the first three-way pipe 20 and the coarse suction pipe 10... When the coarse suction pipe 10 is not connected to the transition pipe 40, the coarse suction pipe 10 is connected to the transition pipe 40 when the first valve cover 22 is located above the connection between the first tee pipe 20 and the transition pipe 40. The fine suction pipe 60 is a tee pipe. The upper end of the fine suction pipe 60 is connected to the second telescopic motor 61, and the lower end of the fine suction pipe 60 is connected to the fine vacuum equipment. One side end of the fine suction pipe 60 is connected to the transition pipe 40. The telescopic shaft of the second telescopic motor 61 is connected to the second valve cover 62, which drives the second valve cover 62 to rise and fall. When the second valve cover 62 abuts against the connection between the fine suction pipe 60 and the fine vacuum equipment, the fine suction pipe 60 is not connected to the transition pipe 40. When the second valve cover 62 is located above the connection between the fine suction pipe 60 and the transition pipe 40, the fine suction pipe 60 is connected to the transition pipe 40.

[0010] Furthermore, the coarse drawing pipe 10 is a right-angle bent pipe, and both ends of the coarse drawing pipe 10 are connected to the working chamber of the vapor deposition machine and the first tee pipe 20 respectively through flanges 70.

[0011] Furthermore, the connection between the transition pipe 40 and the fine suction pipe 60 is a right-angle bend, and the fine suction pipe 60 is connected to the transition pipe 40, the fine vacuum equipment, and the second telescopic motor 61 via flanges 70.

[0012] Furthermore, a vacuum level detector 30 is provided at the coarse vacuum tube 10. When a coarse vacuum is required, the first valve cover 22 is opened and the second valve cover 62 is closed, and a coarse vacuum is performed by the coarse vacuum equipment. When the vacuum level detector 30 detects that the coarse vacuum has been completed, the second valve cover 62 is opened, and a fine vacuum is performed by the fine vacuum equipment. When the vacuum level detector 30 detects that the required vacuum level has been reached, the first valve cover 22 and the second valve cover 62 are closed.

[0013] In some embodiments, the first valve cover 22 is locked to the telescopic shaft of the first telescopic motor 21 via the first locking cover 23, and the second valve cover 62 is locked to the telescopic shaft of the second telescopic motor 61 via the second locking cover 63. The structure is simple and easy to disassemble and maintain.

[0014] Furthermore, when the first valve cover 22 descends to the point where its bottom abuts against the flange 70 at the connection between the first tee pipe 20 and the coarse suction pipe 10, the coarse suction pipe 10 and the transition pipe 40 are not connected. When the second valve cover 62 descends to the point where its bottom abuts against the flange 70 at the connection between the fine suction pipe 60 and the fine vacuum equipment, the fine suction pipe 60 and the transition pipe 40 are not connected.

[0015] Furthermore, a first sealing ring 24 is provided at the connection between the first valve cover 22 and the flange 70 at the connection between the first tee pipe 20 and the coarse suction pipe 10, and a second sealing ring 64 is provided at the connection between the second valve cover 62 and the flange 70 at the connection between the fine suction pipe 60 and the fine vacuum equipment, for sealing the pipeline.

[0016] In some embodiments, the transition pipe 40 includes an upper transition sub-pipe 41 and a lower transition sub-pipe 42, which are connected by a corrugated pipe 50 for earthquake resistance.

[0017] The beneficial effects of this utility model are as follows: This utility model proposes an integrated vacuum pumping system for the exterior of a vacuum evaporation machine, including a coarse pumping pipe 10 and a fine pumping pipe 60. The first three-way pipe 20 and the fine pumping pipe 60 are connected by a telescopic motor driving the valve cover to rise and fall, realizing rapid switching between the coarse and fine pumping pipes 60 and avoiding vacuum fluctuations. Under the precise pressure control of the telescopic motor, the valve cover has uniform contact pressure on the sealing surface. The transition pipe 40 directly connects the coarse pumping pipe 10 and the fine pumping pipe 60, eliminating the flow channel redundancy of traditional multi-valve systems and reducing gas flow resistance. The telescopic motor is linked with the vacuum sensor to automatically switch the pumping mode according to the cavity pressure threshold, avoiding errors caused by manual intervention. The integrated three-way pipe reduces external connecting parts, shrinks the equipment size, and reduces manufacturing costs and maintenance complexity. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0019] Figure 2 This is a cross-sectional view of the present invention.

[0020] Explanation of key component symbols:

[0021] 10. Coarse drawing pipe, 20. First tee pipe, 21. First telescopic motor, 22. First valve cover, 23. First locking cover, 24. First sealing ring, 30. Vacuum gauge, 40. Transition pipe, 41. Upper transition sub-pipe, 42. Lower transition sub-pipe, 50. Corrugated pipe, 60. Fine drawing pipe, 61. Second telescopic motor, 62. Second valve cover, 63. Second locking cover, 64. Second sealing ring, 70.

[0022] The following detailed description, in conjunction with the accompanying drawings, will further illustrate this utility model. Detailed Implementation

[0023] The following embodiments are described to aid in understanding this application. These embodiments are not, and should not be, construed in any way as limiting the scope of protection of this application.

[0024] In the following description, those skilled in the art will recognize that throughout this discussion, components may be described as individual functional units (which may include subunits), but those skilled in the art will recognize that various components or portions thereof may be divided into individual components or may be integrated together (including integrated within a single system or component).

[0025] Furthermore, the connection between components or systems is not intended to be limited to a direct connection; on the contrary, data between these components may be modified, reformatted, or otherwise altered by intermediate components. Additionally, other or fewer connections may be used. It should also be noted that the terms "connection," "link," or "input" should be understood to include direct connections, indirect connections via one or more intermediate devices, and wireless connections. Example 1:

[0026] like Figure 1-2As shown, an integrated vacuum path system for the exterior of a vacuum evaporation machine includes a coarse suction pipe 10 and a fine suction pipe 60. One end of the coarse suction pipe 10 is connected to the working chamber of the evaporation machine, and the other end is connected to a coarse vacuum pumping device. One end of the fine suction pipe 60 is connected to the coarse suction pipe 10 via a transition pipe 40, and the other end is connected to a fine vacuum pumping device. A first tee pipe 20 is provided between the coarse suction pipe 10 and the transition pipe 40. The upper end of the first tee pipe 20 is connected to a first telescopic motor 21, the lower end of the first tee pipe 20 is connected to the coarse suction pipe 10, and one side end of the first tee pipe 20 is connected to the transition pipe 40. The telescopic shaft of the first telescopic motor 21 is connected to the first... The valve cover 22 drives the first valve cover 22 to rise and fall. When the first valve cover 22 abuts against the connection between the first tee pipe 20 and the coarse suction pipe 10, the coarse suction pipe 10 and the transition pipe 40 are not connected. When the first valve cover 22 is located above the connection between the first tee pipe 20 and the transition pipe 40, the coarse suction pipe 10 and the transition pipe 40 are connected. The fine suction pipe 60 is a tee pipe. The upper end of the fine suction pipe 60 is connected to the second telescopic motor 61, and the lower end of the fine suction pipe 60 is connected to the fine vacuum device. One side end of the fine suction pipe 60 is connected to the transition pipe 40. The telescopic shaft of the second telescopic motor 61 is connected to the second valve cover 62, driving the second valve cover 62 to rise. When the second valve cover 62 abuts against the connection between the thin suction pipe 60 and the thin vacuum equipment, the thin suction pipe 60 and the transition pipe 40 are not connected. When the second valve cover 62 is located above the connection between the thin suction pipe 60 and the transition pipe 40, the thin suction pipe 60 and the transition pipe 40 are connected. The coarse suction pipe 10 is a right-angle bend pipe. Both ends of the coarse suction pipe 10 are connected to the working chamber of the vapor deposition machine and the first tee pipe 20 respectively through flanges 70. The connection between the transition pipe 40 and the thin suction pipe 60 is a right-angle bend pipe. The thin suction pipe 60 is connected to the transition pipe 40, the thin vacuum equipment, and the second telescopic motor 61 respectively through flanges 70. The coarse suction pipe 10 is equipped with... The vacuum gauge 30, when a rough vacuum is required, opens the first valve cover 22 and closes the second valve cover 62, performing a rough vacuum using a rough vacuum pumping device. When the vacuum gauge 30 detects that the rough vacuum has been completed, it opens the second valve cover 62, performing a fine vacuum using a fine vacuum pumping device. When the vacuum gauge 30 detects that the required vacuum level has been reached, it closes the first valve cover 22 and the second valve cover 62. The first valve cover 22 is locked to the telescopic shaft of the first telescopic motor 21 via the first locking cover 23, and the second valve cover 62 is locked to the telescopic shaft of the second telescopic motor 61 via the second locking cover 63. The structure is simple and easy to disassemble and maintain.

[0027] When the first valve cover 22 descends to the point where its bottom abuts against the flange 70 at the connection between the first tee pipe 20 and the coarse extraction pipe 10, the coarse extraction pipe 10 and the transition pipe 40 are not connected. When the second valve cover 62 descends to the point where its bottom abuts against the flange 70 at the connection between the fine extraction pipe 60 and the fine vacuum equipment, the fine extraction pipe 60 and the transition pipe 40 are not connected. A first sealing ring 24 is provided at the connection between the first valve cover 22 and the flange 70 at the connection between the first tee pipe 20 and the coarse extraction pipe 10, and a second sealing ring 64 is provided at the connection between the second valve cover 62 and the flange 70 at the connection between the fine extraction pipe 60 and the fine vacuum equipment, for sealing the pipes.

[0028] The transition pipe 40 includes an upper transition sub-pipe 41 and a lower transition sub-pipe 42, which are connected by a corrugated pipe 50 for earthquake resistance.

[0029] The beneficial effects of this utility model are as follows: This utility model proposes an integrated vacuum pumping system for the exterior of a vacuum evaporation machine, including a coarse pumping pipe 10 and a fine pumping pipe 60. The first three-way pipe 20 and the fine pumping pipe 60 are connected by a telescopic motor driving the valve cover to rise and fall, realizing rapid switching between the coarse and fine pumping pipes 60 and avoiding vacuum fluctuations. Under the precise pressure control of the telescopic motor, the valve cover has uniform contact pressure on the sealing surface. The transition pipe 40 directly connects the coarse pumping pipe 10 and the fine pumping pipe 60, eliminating the flow channel redundancy of traditional multi-valve systems and reducing gas flow resistance. The telescopic motor is linked with the vacuum sensor to automatically switch the pumping mode according to the cavity pressure threshold, avoiding errors caused by manual intervention. The integrated three-way pipe reduces external connecting parts, shrinks the equipment size, and reduces manufacturing costs and maintenance complexity.

[0030] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. An integrated evacuation air path system outside a vacuum evaporation machine, comprising a rough evacuation pipe (10) and a fine evacuation pipe (60), one end of the rough evacuation pipe (10) being communicated with a working chamber of the evaporation machine, the other end being connected with a rough vacuum device, characterized in that: One end of the thin suction tube (60) is connected to the coarse suction tube (10) through a transition tube (40), and the other end is connected to a fine vacuum device. A first three-way tube (20) is provided between the coarse suction tube (10) and the transition tube (40). The upper end of the first three-way tube (20) is connected to a first telescopic motor (21), and the lower end of the first three-way tube (20) is connected to the coarse suction tube (10). One side end of the first three-way tube (20) is connected to the transition tube (40). The telescopic shaft of the first telescopic motor (21) is connected to a first valve cover (22), which drives the first valve cover (22) to rise and fall. When the first valve cover (22) abuts against the connection between the first three-way tube (20) and the coarse suction tube (10), the coarse suction tube (10) and the transition tube (40) are not connected. When the first valve cover (22) is located at the connection of the first three-way tube (60)... 20) When the coarse suction pipe (10) is connected to the transition pipe (40) at the upper part of the connection point of the thin suction pipe (60), the coarse suction pipe (10) is connected to the transition pipe (40), the fine suction pipe (60) is a three-way pipe, the upper end of the fine suction pipe (60) is connected to the second telescopic motor (61), the lower end of the fine suction pipe (60) is connected to the fine vacuum device, one side end of the fine suction pipe (60) is connected to the transition pipe (40), the telescopic shaft of the second telescopic motor (61) is connected to the second valve cover (62), driving the second valve cover (62) to rise and fall. When the second valve cover (62) abuts against the connection point of the fine suction pipe (60) and the fine vacuum device, the fine suction pipe (60) is not connected to the transition pipe (40). When the second valve cover (62) is located above the connection point of the fine suction pipe (60) and the transition pipe (40), the fine suction pipe (60) is connected to the transition pipe (40).

2. The integrated evacuation air path system outside the vacuum evaporation machine according to claim 1, characterized in that: The coarse drawing pipe (10) is a right-angle bent pipe, and both ends of the coarse drawing pipe (10) are connected to the working chamber of the vapor deposition machine and the first tee pipe (20) respectively through flanges (70).

3. The integrated evacuation air path system outside the vacuum evaporation machine according to claim 1, characterized in that: The connection between the transition pipe (40) and the fine suction pipe (60) is a right-angle bend. The fine suction pipe (60) is connected to the transition pipe (40), the fine vacuum equipment and the second telescopic motor (61) through the flange (70).

4. The integrated vacuum air circulation system outside the vacuum evaporation machine according to claim 1, characterized in that: A vacuum level detector (30) is provided at the coarse vacuum tube (10). When a coarse vacuum is required, the first valve cover (22) is opened and the second valve cover (62) is closed. A coarse vacuum is performed by the coarse vacuum equipment. When the vacuum level detector (30) detects that the coarse vacuum has been completed, the second valve cover (62) is opened and a fine vacuum is performed by the fine vacuum equipment. When the vacuum level detector (30) detects that the required vacuum level has been reached, the first valve cover (22) and the second valve cover (62) are closed.

5. The integrated vacuum air circulation system outside the vacuum evaporation machine according to claim 1, characterized in that: The first valve cover (22) is locked to the telescopic shaft of the first telescopic motor (21) through the first locking cover (23), and the second valve cover (62) is locked to the telescopic shaft of the second telescopic motor (61) through the second locking cover (63). The structure is simple and easy to disassemble and maintain.

6. The integrated vacuum air circulation system outside the vacuum evaporation machine according to claim 1, characterized in that: When the first valve cover (22) descends to the point where its bottom just touches the flange (70) at the connection between the first tee pipe (20) and the coarse suction pipe (10), the coarse suction pipe (10) and the transition pipe (40) are not connected. When the second valve cover (62) descends to the point where its bottom just touches the flange (70) at the connection between the fine suction pipe (60) and the fine vacuum equipment, the fine suction pipe (60) and the transition pipe (40) are not connected.

7. The integrated vacuum air circulation system outside the vacuum evaporation machine according to claim 1, characterized in that: A first sealing ring (24) is provided at the connection between the first valve cover (22) and the flange (70) at the connection between the first tee pipe (20) and the coarse suction pipe (10), and a second sealing ring (64) is provided at the connection between the second valve cover (62) and the flange (70) at the connection between the fine suction pipe (60) and the fine vacuum equipment, for sealing the pipes.

8. The integrated vacuum air circulation system outside the vacuum evaporation machine according to claim 1, characterized in that: The transition pipe (40) includes an upper transition sub-pipe (41) and a lower transition sub-pipe (42), which are connected by a corrugated pipe (50) for earthquake resistance.

Images