Thickness measuring device

Abstract

This application relates to a thickness measuring device. The thickness measuring device includes: a support platform having a support surface for supporting a workpiece to be measured; and a thickness gauge mounted on the top side of the support surface and used to measure the thickness of the workpiece; wherein the thickness gauge is movably disposed relative to the support surface to adjust its position. When the thickness gauge is mounted on the top side of the support surface, it can translate relative to the support surface to adjust its position on the workpiece and can measure a specified location on the workpiece. Therefore, the thickness measuring device of this application can measure a specified location, and has a wider measurement range.

Description

Technical Field

[0001] This application relates to the field of thickness measurement technology, and specifically to a thickness measurement device. Background Technology

[0002] Polishing pads are frequently used consumables in CMP (Chemical Mechanical Polishing) equipment. Before use, the thickness of the polishing pad needs to be measured to ensure it meets requirements. However, due to the large surface area of ​​polishing pads, conventional vernier calipers can only measure the edge thickness and cannot accurately measure the thickness at locations outside the caliper's range, such as the center thickness, making it difficult to measure specific locations on the polishing pad. Utility Model Content

[0003] Therefore, it is necessary to provide a thickness measuring device capable of measuring a specified location to address the above-mentioned problems.

[0004] A thickness measuring device, the thickness measuring device comprising:

[0005] A support platform, having a bearing surface for supporting the workpiece to be tested; and

[0006] A thickness gauge is installed on the top side of the bearing surface and is used to measure the thickness of the part to be measured.

[0007] The thickness gauge is movably disposed relative to the bearing surface to adjust its position.

[0008] In some embodiments, the thickness measuring device further includes a vertical rod, a horizontal rod, and a mounting base. The vertical rod is disposed on the bearing surface, the horizontal rod is connected to the vertical rod, the mounting base is slidably disposed on the horizontal rod, and the thickness gauge is disposed on the mounting base.

[0009] In some embodiments, the thickness measuring device further includes a movable block slidably disposed on the vertical rod and connected to the horizontal rod, the movable block being used to drive the thickness gauge to move up and down relative to the bearing surface.

[0010] In some embodiments, the thickness gauge includes a telescopic trigger button, a connector, a thickness measuring body, and a probe. The probe is disposed on the thickness measuring body. The telescopic trigger button is mechanically connected to the probe through the connector. The probe is configured to retract when the telescopic trigger button is pressed and to extend when the telescopic trigger button is released.

[0011] In some embodiments, the thickness measuring device further includes a foot pedal button electrically connected to the thickness measuring body, and the thickness measuring body is configured to send measurement data to a terminal device when the foot pedal button is pressed.

[0012] In some embodiments, the thickness measuring device further includes a position calibrator configured to press the workpiece against the bearing surface and to calibrate the position of the thickness gauge.

[0013] In some embodiments, the position calibrator includes a connecting ring and a plurality of scales spaced circumferentially along the connecting ring, with one end of all the scales connected to the connecting ring and the other ends of all the scales converging at the center of the connecting ring.

[0014] In some embodiments, a center calibration notch is provided at the confluence of the other ends of all the scales.

[0015] In some embodiments, the thickness measuring device further includes a support frame for supporting the support platform;

[0016] The thickness measuring device further includes multiple height adjustment components and / or at least one level adjustment component;

[0017] All the height adjustment components are arranged along the circumference of the support platform. Each height adjustment component includes a first adjustment part and a second adjustment part connected together. The first adjustment part is disposed on the support platform, and the second adjustment part is disposed on the support frame and is retractable relative to the first adjustment part.

[0018] The support frame has multiple support legs, and the leveling adjustment member corresponds to and is connected to at least some of the support legs, and the leveling adjustment member is retractable relative to the support leg it corresponds to.

[0019] In some embodiments, the thickness measuring device further includes a plurality of blocking members, all of which are disposed on the support frame and arranged circumferentially around the support platform, and all of the blocking members cooperate to prevent the support platform from falling.

[0020] Compared with the prior art, this application has the following beneficial effects:

[0021] When the thickness measuring device described above is installed on the top side of the bearing surface, the thickness gauge can be translated relative to the bearing surface to adjust the position of the thickness gauge on the workpiece to be measured, and can measure a specified position on the workpiece to be measured, with a wider measurement range. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the thickness measuring device in one embodiment of this application;

[0023] Figure 2 for Figure 1 A schematic diagram of the thickness measuring device from another perspective;

[0024] Figure 3 for Figure 1 The diagram shows the structure of the thickness gauge and the mounting base in the thickness measuring device shown.

[0025] Figure 4 for Figure 1 The diagram shows the structure of the position calibration component in the thickness measuring device.

[0026] Figure 5 for Figure 1 The diagram shows the structure of the support frame, height adjustment component, levelness adjustment component, and blocking component in the thickness measuring device.

[0027] Icon labels:

[0028] 100. Thickness measuring device;

[0029] 1. Support platform; 1a. Support surface; 2. Vertical rod; 3. Movable block; 4. Horizontal rod; 5. Mounting base;

[0030] 6. Thickness gauge; 6a. Telescopic trigger button; 6b. Connector; 6c. Thickness gauge body; 6d. Probe; 7. Position calibration component; 7a. Connecting ring; 7b. Scale; 7c. Center calibration notch; 8. Support frame; 8a. Support leg; 9. Blocking component; 10. Height adjustment component; 10a. First adjustment part; 10b. Second adjustment part; 11. Levelness adjustment component; 12. Foot pedal button. Detailed Implementation

[0031] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0032] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0033] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0034] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0035] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0036] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0037] Please see Figure 1 and Figure 2 This application provides a thickness measuring device 100 for measuring a specified position of a workpiece.

[0038] The thickness measuring device 100 includes a support platform 1 and a thickness gauge 6. The support platform 1 has a support surface 1a for supporting the part to be measured. The thickness gauge 6 is mounted on the top side of the support surface 1a and is used to measure the thickness of the part to be measured. The thickness gauge 6 is movably arranged relative to the support surface 1a to adjust the position of the thickness gauge 6.

[0039] Specifically, the test piece can be a grinding pad or other consumables required for production, and the specific requirements can be set according to the needs.

[0040] Typically, the bearing surface 1a of the bearing platform 1 needs to be hardened to maintain its flatness. A rust-proof and scratch-resistant film is applied to the bearing surface 1a of the bearing platform 1 to ensure that the bearing surface 1a will not contaminate or scratch the workpiece under test during measurement.

[0041] The thickness gauge 6 can be a contact thickness gauge 6, such as an ultrasonic thickness gauge 6, or it can be a non-contact thickness gauge 6, such as a laser thickness gauge 6, an eddy current thickness gauge 6, an optical thickness gauge 6, etc. The specific type can be selected according to the requirements.

[0042] When the thickness gauge 6 is installed on the top side of the bearing surface 1a, the thickness gauge 6 can be moved relative to the bearing surface 1a by external force to adjust the position of the thickness gauge 6 and to measure the specified position of the workpiece (such as the center position of the workpiece), thus providing a wider measurement range.

[0043] The external force driving the thickness gauge 6 to move can be human power or power provided by the driving components. Preferably, the external force driving the thickness gauge 6 to move is human power, so as to simplify the structure of the thickness measuring device 100 and reduce the manufacturing cost of the thickness measuring device 100.

[0044] In some embodiments, the thickness measuring device 100 further includes a vertical rod 2, a horizontal rod 4, and a mounting base 5. The vertical rod 2 is disposed on the bearing surface 1a, the horizontal rod 4 is connected to the vertical rod 2, the mounting base 5 is slidably disposed on the horizontal rod 4, and the thickness gauge 6 is disposed on the mounting base 5. The mounting base 5 is used to drive the thickness gauge 6 to move horizontally.

[0045] It is understood that the vertical rod 2 is a rod that extends roughly in the vertical direction, and the horizontal rod 4 is a rod that extends roughly in the horizontal direction. The horizontal rod 4 is connected to the vertical rod 2 and is spaced apart from the bearing surface 1a, so that space can be reserved between the horizontal rod 4 and the bearing surface 1a for assembling the mounting base 5 and the thickness gauge 6.

[0046] Mounting base 5 is slidably mounted on crossbar 4. For example, mounting base 5 can be slidably sleeved on the outside of crossbar 4 to achieve sliding installation of mounting base 5. When driven by external force, mounting base 5 can move thickness gauge 6, adjusting the relative position between thickness gauge 6 and the workpiece to be measured, thereby enabling thickness gauge 6 to measure the thickness at a specified location on the workpiece. After the relative position adjustment is completed, mounting base 5 is fixed to crossbar 4 by detachable parts such as latches or screws to ensure that thickness gauge 6 can be fixed in position and can quickly and accurately measure the thickness at a specified location on the workpiece.

[0047] The method of sliding the thickness gauge 6 by designing the structure of the vertical rod 2, horizontal rod 4 and mounting base 5 is simple and reliable, which facilitates the simplification of the structure of the thickness measuring device 100 and reduces the manufacturing cost of the thickness measuring device 100.

[0048] Furthermore, in some embodiments, the thickness measuring device 100 further includes a movable block 3, which is slidably disposed on the vertical rod 2 and connected to the horizontal rod 4. The movable block 3 is used to drive the thickness gauge 6 to move up and down relative to the bearing surface 1a.

[0049] With this design, the height of the crossbar 4 can be adjusted to accommodate the installation of measuring instruments of different specifications. At the same time, the height of the thickness gauge 6 is also adjusted, thus enabling it to measure the thickness of parts with different thicknesses.

[0050] As an example, the movable block 3 is slidably fitted onto the vertical rod 2 and is driven to slide relative to the vertical rod 2 by an external force. This external force is preferably human force, in order to simplify the structure of the thickness measuring device 100. Of course, this external force is not limited to human force; it can also be powered by a drive structure.

[0051] As an example, the movable block 3 is fixed to the vertical rod 2 by a detachable component such as a latch, screw, or pin, so that the movable block 3, the horizontal rod 4, and the thickness gauge 6 can be positioned and fixed at a specific height.

[0052] As an example, there are two vertical rods 2 and two movable blocks 3. The two vertical rods 2 are spaced apart on the bearing surface 1a, and the movable blocks 3 correspond one-to-one with the vertical rods 2. The movable blocks 3 are installed on the corresponding vertical rods 2, and the horizontal rod 4 is connected between the two movable blocks 3. This design helps to improve the stability of the horizontal rod 4. Since the mounting base 5 and the thickness gauge 6 are installed on the horizontal rod 4, the stability of the mounting base 5 and the thickness gauge 6 is also indirectly improved. In addition, it is worth mentioning that in the above design, the mounting base 5 is installed between the two movable blocks 3, and the two movable blocks 3 can also limit the sliding range of the mounting base 5 within the length of the horizontal rod 4 to prevent the mounting base 5 from falling off the horizontal rod 4.

[0053] Please see Figure 2 and Figure 3 In some embodiments, the thickness gauge 6 includes a telescopic trigger button 6a, a connector 6b, a thickness measuring body 6c, and a probe 6d. The probe 6d is disposed on the thickness measuring body 6c. The telescopic trigger button 6a is mechanically connected to the probe 6d through the connector 6b. The probe 6d is configured to retract when the telescopic trigger button 6a is pressed and to extend when the telescopic trigger button 6a is released. When the probe 6d retracts, it can be conveniently moved and arranged to be measured. After the arrangement is completed, the probe 6d is extended and pressed against the workpiece to be measured to achieve the measurement effect.

[0054] As an example, the thickness gauge 6 is a digital micrometer, which also includes a display screen for displaying measurement data. The coordination of the telescopic trigger button 6a, connector 6b, thickness measuring body 6c, probe 6d, and display screen in the digital micrometer is conventional technology in the field, and therefore will not be described in detail here.

[0055] In actual operation, the operator presses the telescopic trigger button 6a with one hand, retracting the extended probe 6d inward through the connector 6b, creating a larger gap between the probe 6d and the bearing surface 1a. Then, the operator moves the workpiece or thickness gauge 6 with the other hand, aligning the probe 6d with a designated position on the workpiece. Next, the operator releases the telescopic trigger button 6a, and the probe 6d rests at the designated position on the workpiece. The thickness gauge 6 can then quickly acquire the thickness measurement data at the designated position and display it on the screen for easy recording by the operator.

[0056] As can be seen from the above, the thickness gauge 6, which is formed by a combination of a telescopic trigger button 6a, a connector 6b, a thickness measuring body 6c, and a probe 6d, has a simple and reliable measurement method.

[0057] It is worth mentioning that, in order to improve the accuracy of the measurement, the thickness gauge 6 and the bearing surface 1a need to be zeroed before the measurement. The specific zeroing process is as follows: operate the moving block 3 to drive the thickness gauge 6 down so that the probe 6d contacts the bearing surface 1a, and observe whether the measurement data displayed on the screen is 0. If it is, the zeroing is successful. If not, the level of the bearing surface 1a needs to be adjusted until the probe 6d contacts the bearing surface 1a and the display shows the measurement data as zero.

[0058] It should be noted that the adjustment of the levelness of the bearing surface 1a will be described in detail in the following section.

[0059] In some embodiments, the thickness measuring device 100 further includes a foot pedal button 12, which is electrically connected to the thickness measuring body 6c. The thickness measuring body 6c is configured to send measurement data to a terminal device when the foot pedal button 12 is pressed. When it is necessary to record the measurement data measured by the thickness gauge 6 in real time, the foot pedal button 12 is connected to the thickness measuring body 6c. By stepping on the pedal, the measurement data can be uploaded to the terminal device, reducing the tediousness and error-proneness of manual recording of measurement data, improving the accuracy and convenience of measurement data recording, and greatly improving production efficiency.

[0060] As an example, the foot pedal button 12 and the thickness measuring body 6c, as well as the thickness measuring body 6c and the terminal device, can be electrically connected through electrical control wires, wireless connection modules (such as Bluetooth), cellular mobile communication modules (such as 4G or 5G) to upload measurement data.

[0061] Please see Figure 1 and Figure 4 In some embodiments, the thickness measuring device 100 further includes a position calibration element 7, which is configured to press the part to be measured against the bearing surface 1a and to calibrate the position of the thickness gauge 6.

[0062] In actual operation, the position calibration component 7 is placed above the workpiece to be measured and presses the workpiece onto the bearing surface 1a. The position calibration component 7 can calibrate the dimensions of the workpiece to facilitate confirmation of the current measurement position of the thickness gauge 6 (such as the center position, edge position, etc.), so that the measured position and the measurement data can correspond one-to-one.

[0063] In some embodiments, the position calibrator 7 includes a connecting ring 7a and a plurality of scales 7b arranged circumferentially along the connecting ring 7a. One end of all scales 7b is connected to the connecting ring 7a, and the other ends of all scales 7b converge at the center of the connecting ring 7a.

[0064] The scale 7b is equipped with length markings, which allow the thickness gauge 6 to determine the current measurement position on the workpiece, ensuring a one-to-one correspondence between the measured position and the measurement data. Multiple scales 7b are designed and spaced apart along the circumference of the connecting ring 7a. Therefore, the multiple scales 7b work together to calibrate the positions of multiple areas on the workpiece along the circumference of the connecting ring 7a. The measurer can select a scale 7b that is convenient for reading the measurement position to calibrate the measurement location.

[0065] Furthermore, in some embodiments, a center calibration notch 7c is provided at the confluence of the other ends of all the scales 7b.

[0066] The center calibration notch 7c is located at the center of the position calibration component 7. When the center of the part to be measured is exposed in the center calibration notch 7c, the center calibration notch 7c is equivalent to calibrating the center position of the part to be measured. At this time, when the probe 6d passes through the center calibration notch 7c and comes into contact with the part to be measured, the thickness gauge 6 can measure the measurement data of the center position of the part to be measured.

[0067] Therefore, the setting of the center calibration notch 7c facilitates the calibration of the center position of the part to be measured, enabling the thickness gauge to quickly measure the measurement data of the center position of the part to be measured.

[0068] Please see Figure 1 and Figure 5 In some embodiments, the thickness measuring device 100 further includes a support frame 8 for supporting the bearing platform 1; the thickness measuring device 100 also includes a plurality of height adjusting members 10 and / or at least one level adjusting member 11; all height adjusting members 10 are arranged circumferentially along the bearing platform 1, and each height adjusting member 10 includes a first adjusting part 10a and a second adjusting part 10b connected together, the first adjusting part 10a being disposed on the bearing platform 1, the second adjusting part 10b being disposed on the support frame 8 and being retractable relative to the first adjusting part 10a; the support frame 8 has a plurality of support legs 8a, and the level adjusting member 11 corresponds to and is connected to at least some of the support legs 8a, and the level adjusting member 11 is retractable relative to its corresponding support leg 8a.

[0069] For example, the first adjustment part 10a is installed on the bottom side of the support platform 1, and the second adjustment part 10b is installed on the top side of the support frame 8. Of course, the installation method of the first adjustment part 10a and the second adjustment part 10b is not limited to the above one. The first adjustment part 10a can also be installed on the periphery of the support platform 1, and the second adjustment part 10b can be installed on the periphery of the support frame 8.

[0070] As an example, the first adjusting part 10a is a nut, and the second adjusting part 10b is a screw. By operating the second adjusting part 10b of all height adjusting parts 10 to extend and retract relative to the first adjusting part 10a, the overall height of the support platform 1 can be adjusted to accommodate the height needs of measuring personnel of different heights.

[0071] A leveling adjustment element 11 is disposed on the bottom side of the support leg 8a of the support frame 8. There can be one or more leveling adjustment elements 11. If there are multiple elements, all leveling adjustment elements 11 can correspond one-to-one with some or all of the support legs 8a, and each leveling adjustment element 11 is connected to its corresponding support leg 8a. Preferably, there is one leveling adjustment element 11 connected to one of the support legs 8a. This design reduces the number of leveling adjustment elements 11 and helps to reduce the difficulty of adjusting the level.

[0072] As an example, the leveling adjustment component 11 has a screw portion and a threaded hole is provided in the support leg 8a. The screw portion engages with the threaded hole and extends and retracts relative to the threaded hole to adjust the level of the bearing surface 1a.

[0073] In this embodiment, the level adjustment member 11 extends and retracts relative to the corresponding support foot 8a, which can adjust the level of the bearing surface 1a so that the bearing surface 1a is kept in a horizontal state, so as to facilitate the bearing of the test piece.

[0074] In some embodiments, the thickness measuring device 100 further includes a plurality of blocking members 9, all of which are disposed on the support frame 8 and arranged circumferentially around the support platform 1, and all of which cooperate to prevent the support platform 1 from falling.

[0075] As an example, the blocking element 9 can be in the form of a sheet, a rod, or other shapes, which can be set according to the requirements.

[0076] All the blocking components 9 work together to reduce the phenomenon of the support platform 1 sliding and falling due to imbalance, thereby improving the safety of the thickness measuring device 100.

[0077] When the thickness measuring device 100 and the thickness gauge 6 are installed on the top side of the bearing surface 1a, the thickness gauge 6 can be translated relative to the bearing surface 1a to adjust the position of the thickness gauge 6 on the workpiece to be measured, and can measure a specified position on the workpiece to be measured, with a wider measurement range.

[0078] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0079] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A thickness measuring device, characterized in that, The thickness measuring device includes: The support platform (1) has a support surface (1a) for supporting the test piece; and A thickness gauge (6) is installed on the top side of the bearing surface (1a) and is used to measure the thickness of the part to be measured; The thickness gauge (6) is movably disposed relative to the bearing surface (1a) to adjust the position of the thickness gauge (6).

2. The thickness measuring device according to claim 1, characterized in that, The thickness measuring device further includes a vertical rod (2), a horizontal rod (4) and a mounting base (5). The vertical rod (2) is disposed on the bearing surface (1a). The horizontal rod (4) is connected to the vertical rod (2). The mounting base (5) is slidably disposed on the horizontal rod (4). The thickness gauge (6) is disposed on the mounting base (5).

3. The thickness measuring device according to claim 2, characterized in that, The thickness measuring device also includes a moving block (3), which is slidably disposed on the vertical rod (2) and connected to the horizontal rod (4). The moving block (3) is used to drive the thickness gauge (6) to rise and fall relative to the bearing surface (1a).

4. The thickness measuring device according to claim 1, characterized in that, The thickness gauge (6) includes a telescopic trigger button (6a), a connector (6b), a thickness measuring body (6c), and a probe (6d). The probe (6d) is disposed on the thickness measuring body (6c). The telescopic trigger button (6a) is mechanically connected to the probe (6d) through the connector (6b). The probe (6d) is configured to retract when the telescopic trigger button (6a) is pressed and to extend when the telescopic trigger button (6a) is released.

5. The thickness measuring device according to claim 4, characterized in that, The thickness measuring device also includes a foot pedal button (12), which is electrically connected to the thickness measuring body (6c), and the thickness measuring body (6c) is configured to send measurement data to the terminal device when the foot pedal button (12) is pressed.

6. The thickness measuring device according to claim 1, characterized in that, The thickness measuring device further includes a position calibration element (7), which is configured to press the part to be measured against the bearing surface (1a) and to calibrate the position of the thickness gauge (6).

7. The thickness measuring device according to claim 6, characterized in that, The position calibration component (7) includes a connecting ring (7a) and a plurality of scales (7b) arranged circumferentially along the connecting ring (7a). One end of all the scales (7b) is connected to the connecting ring (7a), and the other ends of all the scales (7b) converge at the center of the connecting ring (7a).

8. The thickness measuring device according to claim 7, characterized in that, The other end of all the scales (7b) has a center marking notch (7c) at the point where they converge.

9. The thickness measuring device according to claim 1, characterized in that, The thickness measuring device also includes a support frame (8) for supporting the bearing platform (1). The thickness measuring device also includes a plurality of height adjustment elements (10) and / or at least one level adjustment element (11). All the height adjustment components (10) are arranged around the circumference of the support platform (1). Each height adjustment component (10) includes a first adjustment part (10a) and a second adjustment part (10b) connected together. The first adjustment part (10a) is disposed on the support platform (1), and the second adjustment part (10b) is disposed on the support frame (8) and is retractable relative to the first adjustment part (10a). The support frame (8) has multiple support legs (8a), and the level adjustment member (11) corresponds to and is connected to at least some of the support legs (8a), and the level adjustment member (11) is retractable relative to the support leg (8a) it corresponds to.

10. The thickness measuring device according to claim 9, characterized in that, The thickness measuring device also includes a plurality of blocking elements (9), all of which are disposed on the support frame (8) and arranged around the circumference of the support platform (1). All of the blocking elements (9) cooperate to prevent the support platform (1) from falling.

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