A non-restrictive vacuum gauge anti-fouling detection connector

Abstract

This utility model provides a non-obstructive vacuum gauge anti-fouling detection connector, including a vacuum gauge body, a hollow plastic disc, and an inner rotating disc. The lower end of the vacuum gauge body is connected to a vacuum gauge connecting pipe, and a metal connecting disc is fixed to the lower end of the vacuum gauge connecting pipe. The hollow plastic disc is fixed to the outside of the metal connecting disc. A semi-circular travel groove is opened on the right side of the hollow plastic disc, and the inner rotating disc is slidably installed inside the hollow plastic disc. This design solves the problem that the metal screen used in the original vacuum gauge anti-fouling method cannot be quickly disassembled and cleaned, and eventually needs to be stopped for disassembly and replacement, resulting in high maintenance costs and low replacement efficiency. This utility model adopts a magnetic positioning and modular rotating screen structure, which can quickly replace and disassemble a single screen after use without affecting its working efficiency. At the same time, the screen that has been used for filtration can be quickly disassembled.

Description

Technical Field

[0001] This utility model is a non-obstructive anti-fouling detection connector for vacuum gauges, belonging to the field of vacuum gauge technology. Background Technology

[0002] In high-end vacuum processes, real-time and accurate measurement of the vacuum level within the chamber is crucial. High-precision vacuum gauges (such as capacitance diaphragm gauges) require extremely high cleanliness. Directly exposed to the process chamber, they are highly susceptible to contamination by dust, sputtering particles, oil vapor, precursors, and other pollutants, leading to measurement inaccuracies, decreased sensitivity, or even permanent damage. Commonly known connection methods often involve direct connection or the use of simple straight-through adapters. These structures offer virtually no protection for the vacuum gauge. One existing method of preventing contamination is to install a metal screen in the connecting pipeline; however, this introduces new problems.

[0003] For example, the mesh of a metal screen can be gradually clogged by finer particles or sticky substances, forming permanent flow resistance. It cannot be quickly disassembled and cleaned, and eventually needs to be shut down for disassembly and replacement, resulting in high maintenance costs and low replacement efficiency. There is an urgent need for a non-obstruction vacuum gauge anti-fouling detection connector to solve the above problems. Utility Model Content

[0004] To address the shortcomings of existing technologies, the purpose of this utility model is to provide a non-obstructive vacuum gauge anti-fouling detection connector to solve the problems mentioned in the background. This utility model adopts a magnetic positioning and modular rotating screen structure, which allows for quick replacement and disassembly of a single screen after use without affecting its working efficiency. At the same time, the screen can be quickly disassembled after filtration.

[0005] To achieve the above objectives, this utility model is implemented through the following technical solution: a non-obstructive vacuum gauge anti-fouling detection connector, comprising a vacuum gauge body, a hollow plastic disc, and an inner rotating disc. A vacuum gauge connecting pipe is connected to the lower end of the vacuum gauge body, and a metal connecting disc is fixed to the lower end of the vacuum gauge connecting pipe. The hollow plastic disc is fixed to the outside of the metal connecting disc. A semi-circular travel groove is formed on the right side of the hollow plastic disc. An inner rotating disc is slidably installed inside the hollow plastic disc. A first through hole and a second through hole are respectively formed on the left and right sides of the upper end of the inner rotating disc. A first limiting ring and a second limiting ring are respectively fixed to the lower ends of the first and second through holes. A first filter element and a second filter element are respectively placed on the upper ends of the first and second limiting rings. A first magnet ring and a second magnet ring are respectively fixed to the upper edges of the first and second filter elements. A first main screen and a first auxiliary screen are horizontally inserted into the lower ends of the first and second filter elements, respectively. A second main screen and a second auxiliary screen are horizontally inserted into the lower ends of the first and second filter elements, respectively.

[0006] Furthermore, an external connecting pipe is longitudinally installed on the lower left side of the hollow plastic disc, and the external connecting pipe is connected to the first through hole and the vacuum gauge connecting pipe.

[0007] Furthermore, a disassembly hole is provided on the upper right side of the metal connecting disc, which communicates with the second through hole. A magnetic baffle is provided on the upper end of the disassembly hole, and a rotating plate is integrally connected to the left end of the magnetic baffle. A fixing pin is movably inserted through the rotating plate and is embedded in the upper right side of the metal connecting disc.

[0008] Furthermore, both the first and second magnet rings are movably attracted to the lower end face of the metal connecting disk.

[0009] Furthermore, a bending pinch block is bolted to the left side of the front end of the inner rotating disk, and the bending pinch block slides through the semi-circular travel groove.

[0010] Furthermore, the arc of the semicircular travel groove is 180°.

[0011] The beneficial effects of this utility model are as follows: This utility model provides a non-obstruction vacuum gauge anti-fouling detection connector. Because it incorporates a hollow plastic disc, a metal connecting disc, a bending pinch block, a semi-circular travel groove, an inner rotating disc, a first filter element, a first magnetic ring, a second main screen, a second auxiliary screen, a second magnetic ring, and a second filter element, its structure is reasonable. It adopts a magnetic positioning and modular rotating screen structure, allowing for quick replacement and disassembly of individual screens without affecting their working efficiency. Furthermore, it allows for rapid disassembly of the screen after filtration, simplifying operation and ensuring no impact on the subsequent non-obstruction detection efficiency of the vacuum gauge. It is highly practical. Attached Figure Description

[0012] Other features, objects, and advantages of this invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:

[0013] Figure 1 This is a schematic diagram of the structure of a non-obstructive vacuum gauge anti-fouling detection connector according to the present invention;

[0014] Figure 2 This is a schematic diagram of the disassembly and assembly holes of a non-obstructive vacuum gauge anti-fouling detection connector according to the present invention.

[0015] Figure 3 This is a schematic diagram of the exploded disassembly structure of the inner rotating disk of the non-obstruction vacuum gauge anti-fouling detection connector of this utility model.

[0016] In the diagram: 1-Vacuum gauge body, 2-Vacuum gauge connecting pipe, 3-Hollow plastic disc, 4-Metal connecting disc, 5-Outer pipe, 6-Bending pinch block, 7-Semi-circular stroke groove, 8-Fixing pin, 9-Rotating plate, 10-Magnetic baffle, 11-Inner rotating disc, 12-First through hole, 13-First limiting ring, 14-First filter element, 15-First magnetic ring, 16-Second main screen, 17-First main screen, 18-Second auxiliary screen, 19-First auxiliary screen, 20-Second magnetic ring, 21-Second filter element, 22-Second through hole, 23-Second limiting ring, 24-Disassembly hole. Detailed Implementation

[0017] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0018] Please see Figures 1-3 This utility model provides a technical solution: a non-obstructive vacuum gauge anti-fouling detection connector, including a vacuum gauge body 1, a hollow plastic disc 3, and an inner rotating disc 11. A vacuum gauge connecting pipe 2 is connected to the lower end of the vacuum gauge body 1, and a metal connecting disc 4 is fixed to the lower end of the vacuum gauge connecting pipe 2. The hollow plastic disc 3 is fixed to the outside of the metal connecting disc 4. A semi-circular travel groove 7 is formed on the right side of the hollow plastic disc 3. The inner rotating disc 11 is slidably installed inside the hollow plastic disc 3. A first through hole 12 and a second through hole 22 are respectively formed through the left and right sides of the upper end of the inner rotating disc 11. A first limiting ring 13 and a second limiting ring 13 are respectively fixed to the lower ends of the first through hole 12 and the second through hole 22. The first filter element 14 and the second filter element 21 are respectively placed on the upper ends of the positioning ring 23, the first limiting ring 13 and the second limiting ring 23. The first magnetic ring 15 and the second magnetic ring 20 are respectively fixed to the upper edges of the first filter element 14 and the second filter element 21. The first main screen 17 and the first auxiliary screen 19 are respectively horizontally inserted into the lower ends of the first filter element 14 and the second filter element 21. The second main screen 16 and the second auxiliary screen 18 are respectively horizontally inserted into the lower ends of the first filter element 14 and the second filter element 21. This design solves the problem that the metal screen used for anti-fouling of the original vacuum gauge cannot be quickly disassembled and cleaned, and eventually needs to be disassembled and replaced after shutdown, resulting in high maintenance costs and low replacement efficiency.

[0019] As the first embodiment of this utility model: an outer tube 5 is longitudinally installed on the lower left side of the hollow plastic disc 3. The outer tube 5 is connected to the first through hole 12 and the vacuum gauge connecting pipe 2. By adding the outer tube 5 and connecting it to the first through hole 12 and the vacuum gauge connecting pipe 2, and the first filter element 14 is located in the first through hole 12, the first main screen 17 and the second main screen 16 can filter the gas drawn in.

[0020] A disassembly hole 24 is provided on the upper right side of the metal connecting disc 4, which communicates with the second through hole 22. A magnetic baffle 10 is provided on the upper end of the disassembly hole 24, and a rotating plate 9 is integrally connected to the left end of the magnetic baffle 10. A fixing pin 8 is movably inserted through the rotating plate 9 and is embedded in the upper right side of the metal connecting disc 4. By covering the disassembly hole 24 with the added magnetic baffle 10, the second filter element 21 in the second through hole 22 can be protected from dust. The first magnetic ring 15 and the second magnetic ring 20 are both movably attracted to the lower end surface of the metal connecting disc 4. By adding the first magnetic ring 15 and the second magnetic ring 20, which are movably attracted to the lower end surface of the metal connecting disc 4, the loosening of the first filter element 14 and the second filter element 21 during use can be prevented. A bending pinch block 6 is bolted to the left front end of the inner rotating disk 11. The bending pinch block 6 slides through the semi-circular stroke groove 7, which has an arc of 180°. The added bending pinch block 6 makes it easy to rotate the inner rotating disk 11 within the hollow plastic disk 3. The semi-circular stroke groove 7 has an arc of 180°, which allows the first through hole 12 and the second through hole 22 to be replaced when the bending pinch block 6 swings to the right to its maximum extent.

[0021] As a second embodiment of this utility model: In actual use, the outer pipe 5 is connected to an external device, and the drawn-in gas enters the vacuum gauge body 1 through the outer pipe 5, the first through hole 12, and the vacuum gauge connecting pipe 2. During this process, the first main screen 17 and the second main screen 16 in the first filter element 14 filter the drawn-in gas particles (Note: the first main screen 17, the second main screen 16, the second auxiliary screen 18, and the first auxiliary screen 19 are all existing known metal filter sheets, and their filtration principles are not described in detail). After use, the folded... The bending block 6 swings to the right to its maximum extent, thereby replacing the positions of the first through hole 12 and the second through hole 22. The second filter element 21 in the second through hole 22 can then be reused. At this time, the first through hole 12 is below the disassembly hole 24. The magnetic baffle 10 is opened by swinging the block, and the first filter element 14 is pulled upward to clean the gas particles filtered and intercepted by the first main screen 17 and the second main screen 16. At the same time, the second auxiliary screen 18 and the first auxiliary screen 19 in the second filter element 21 can be used for filtration, thus not affecting the working efficiency of the vacuum gauge body 1.

[0022] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. It will be apparent to those skilled in the art that this utility model is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and thus all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this utility model. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0023] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A non-interfering vacuum gauge anti-fouling detection connector, comprising a vacuum gauge main body (1), a hollow plastic disc (3) and an inner rotating disc (11), characterized in that: The lower end of the vacuum gauge body (1) is connected to a vacuum gauge connecting pipe (2). A metal connecting disc (4) is fixed at the lower end of the vacuum gauge connecting pipe (2). The hollow plastic disc (3) is fixed outside the metal connecting disc (4). A semi-circular travel groove (7) is opened on the right side of the hollow plastic disc (3). An inner rotating disc (11) is slidably installed inside the hollow plastic disc (3). A first through hole (12) and a second through hole (22) are respectively opened on the left and right sides of the upper end of the inner rotating disc (11). A first limiting ring (13) and a second limiting ring (22) are respectively fixed at the lower end of the first through hole (12) and the second through hole (22). Two limiting rings (23), the first limiting ring (13) and the second limiting ring (23) are respectively placed on the upper ends of the first filter element (14) and the second filter element (21), the upper edges of the first filter element (14) and the second filter element (21) are respectively fixed with the first magnet ring (15) and the second magnet ring (20), the lower ends of the first filter element (14) and the second filter element (21) are respectively horizontally inserted with the first main screen (17) and the first auxiliary screen (19), the lower ends of the first filter element (14) and the second filter element (21) are respectively horizontally inserted with the second main screen (16) and the second auxiliary screen (18).

2. The non-intrusive pressure gauge anti-pollution detection connector according to claim 1, characterized in that: An external tube (5) is longitudinally installed on the lower left side of the hollow plastic disc (3). The external tube (5) is connected to the first through hole (12) and the vacuum gauge connecting tube (2).

3. The non-intrusive pressure gauge anti-pollution detection connector according to claim 1, characterized in that: The metal connecting disc (4) has a disassembly hole (24) on the upper right side. The disassembly hole (24) is connected to the second through hole (22). The upper end of the disassembly hole (24) is covered with a magnetic baffle (10). The left end of the magnetic baffle (10) is integrally connected with a rotating plate (9). A fixing pin (8) is movably inserted inside the rotating plate (9). The fixing pin (8) is embedded in the upper right side of the metal connecting disc (4).

4. The non-intrusive pressure gauge anti-pollution detection connector of claim 1, wherein: Both the first magnet ring (15) and the second magnet ring (20) are movably attracted to the lower end face of the metal connecting disk (4).

5. The non-intrusive pressure gauge anti-fouling detection connector of claim 1, wherein: A bending pinch block (6) is bolted to the left front end of the inner rotating disk (11), and the bending pinch block (6) slides through the semi-circular travel groove (7).

6. The non-intrusive, contamination detection connection for a vacuum gauge of claim 1, wherein: The semicircular travel groove (7) has an arc of 180°.

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